Cooling system and clean bench device

Abstract

The application discloses a cooling system and a purification table device. The cooling system comprises a fan, an air extraction pipeline, a controller, a detection assembly, at least two cooling assemblies and at least two air valves. An accommodation space for accommodating a sheet is formed below each cooling assembly. The air extraction pipeline is connected with the fan and the cooling assemblies respectively, and each air valve is arranged on a connecting path of the air extraction pipeline and one cooling assembly. The controller is electrically connected with each air valve and the detection assembly respectively. The controller controls the opening or closing of the air valve of the corresponding cooling assembly according to the detection result of the detection assembly, so that the fan can accurately extract air from a single accommodation space, and energy consumption can be reduced compared with overall air extraction.

Description

Technical Field

[0001] This application relates to the field of photovoltaic material manufacturing equipment, and more particularly to a cooling system and a clean bench device. Background Technology

[0002] A cleanroom bench is a general term for certain high-temperature reactor process equipment in the photovoltaic material production process, used to cool and purify the sheets. Currently, cleanroom benches can only cool the entire sheet and cannot cool the individual carriers holding the sheets, leading to excessive energy consumption. Utility Model Content

[0003] In view of this, this application provides a cooling system to solve the problem that the cleanroom bench cannot cool down a single carrier that carries sheet material, resulting in excessive energy consumption of the cleanroom bench.

[0004] One embodiment of this application provides a cooling system including a fan, an exhaust pipe, a controller, a detection component, at least two cooling components, and at least two air valves. The at least two cooling components are spaced apart vertically, and each cooling component has a receiving space below it for accommodating sheets. The exhaust pipe is connected to both the fan and each cooling component, and the fan is used to extract heat from the receiving space. Each air valve is located on the connection path between the exhaust pipe and a cooling component, and the air valve is used to control the connection or disconnection between the cooling component and the corresponding exhaust pipe. The controller is electrically connected to each air valve and the detection component, which is used to detect the temperature within a receiving space and generate a first feedback signal; and / or the detection component is used to detect whether a carrier is present within a receiving space and generate a second feedback signal. The controller is configured to control the corresponding air valve to open or close based on the first feedback signal and / or the second feedback signal.

[0005] In the above embodiments, when the detection component detects a temperature rise in the containment space or the presence of a vehicle in the containment space, the controller controls the corresponding cooling component's air valve to open, causing the fan to evacuate the containment space. When the detection component detects a temperature drop in the containment space to a specified value or the containment space is empty, the controller controls the corresponding cooling component's air valve to close, thereby achieving precise evacuation of a single containment space, which helps reduce energy consumption compared to overall evacuation.

[0006] In some embodiments, the cooling system further includes a heat exchanger and an air outlet duct. The heat exchanger contains a cooling medium and is connected between the air inlet of a fan and the exhaust pipe. The fan draws air through the heat exchanger so that the cooling medium in the heat exchanger cools the air drawn out by the fan. One end of the air outlet duct is located on one side of the receiving space below at least two cooling components, and the other end of the air outlet duct is connected to the air outlet of the fan. The air outlet duct guides the air cooled by the heat exchanger to the receiving space below each cooling component.

[0007] In some embodiments, the heat exchanger includes a water inlet end connected to an external water source. The cooling system also includes a water valve and a first temperature sensor, both electrically connected to a controller. The water valve is located at the water inlet end and is used to control the water flow rate at the water inlet end. The first temperature sensor is located at the air inlet end of the air outlet duct or fan. The first temperature sensor is used to detect the temperature of the cooled air and send a third feedback signal to the controller. The controller controls the water valve to adjust the opening degree of the water valve based on the third feedback signal.

[0008] In some embodiments, the air outlet duct is equipped with an air filter.

[0009] In some embodiments, the cooling system includes two cooling units distributed along the Y-axis, each cooling unit including at least two cooling components, wherein the Y-axis is perpendicular to the vertical direction.

[0010] In some embodiments, each cooling component includes a cooling body, a negative pressure chamber is provided inside the cooling body, an opening is provided on the bottom surface of the cooling body and the opening is connected to the negative pressure chamber, and an exhaust pipe is connected to the negative pressure chamber so as to create a negative pressure environment in the negative pressure chamber under the action of a fan.

[0011] In some embodiments, each cooling assembly further includes a cooling pipe and a plurality of heat-conducting fins. The cooling pipe is disposed in the cooling body and is connected to an external water source. The plurality of heat-conducting fins are spaced apart in the opening, and each heat-conducting fin is connected to the cooling pipe. The space between two adjacent heat-conducting fins is used to allow air to flow from outside the cooling body into the negative pressure chamber. Each heat-conducting fin is used to absorb heat from the air, and the cooling pipe is used to absorb heat from the heat-conducting fins.

[0012] In some embodiments, the cooling assembly further includes an extraction pipe connected to an extraction pipe, the extraction pipe being disposed at an opening, and an air hole being provided on the side of the extraction pipe facing the negative pressure chamber from the opening, the air hole being used to extract air from the negative pressure chamber. Alternatively, the extraction pipe is disposed in the negative pressure chamber, and an air hole is provided on the horizontal side of the extraction pipe, the air hole being used to extract air from the negative pressure chamber.

[0013] In some embodiments, when multiple cooling components are distributed vertically at intervals, no accommodating space is formed below the lowest cooling component.

[0014] In some embodiments, there are multiple detection components, each of which is electrically connected to the controller, and each accommodating space is provided with at least one detection component.

[0015] In some embodiments, each detection component is used to detect the temperature within a containment space and generate a first feedback signal, and / or each detection component is used to detect whether a vehicle is present within a containment space and generate a second feedback signal.

[0016] In some embodiments, each detection component generates a first feedback signal and a second feedback signal simultaneously. When the first feedback signal indicates that the temperature of the containment space has reached a specified value and the second feedback signal indicates that there is a vehicle in the containment space, the controller controls the corresponding air valve to open based on the first feedback signal and the second feedback signal.

[0017] One embodiment of this application also provides a clean bench device, including a cabinet and a cooling system as described above. The cabinet is used to store sheets, and the cooling system is disposed within the cabinet. The cabinet includes a pusher area, a heat exchange area, and a temporary storage area. The pusher area and the temporary storage area are respectively used to accommodate sheets, and a fan is disposed in the heat exchange area. The temporary storage area and the heat exchange area are arranged opposite to each other along the X-axis direction, and both the temporary storage area and the heat exchange area are located on the same side of the pusher area along the Y-axis direction, wherein the X-axis and the Y-axis are perpendicular to the vertical direction. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of a clean bench device provided in an embodiment of this application.

[0019] Figure 2 for Figure 1 A schematic diagram of the cooling system.

[0020] Figure 3 for Figure 2 Side view of the cooling system.

[0021] Figure 4 for Figure 2 A schematic diagram of the piping and circuit connections of the cooling system.

[0022] Figure 5 for Figure 2 A schematic diagram of the cooling components.

[0023] Figure 6 for Figure 5 An enlarged diagram of point B in the diagram.

[0024] Figure 7 for Figure 2 A partial schematic diagram of the cooling component after being cut along section line AA.

[0025] Figure 8 for Figure 1 A top view of the cabinet.

[0026] Explanation of main component symbols 100. Clean bench device; 10. Cooling system; 11. Cooling components; 111. Accommodation space; 112. Cooling main body; 1121. Negative pressure chamber; 1122. Opening; 1123. Cooling plate; 1124. Cover plate; 113. Exhaust pipe; 1131. Air vent; 114. Cooling pipe; 115. Heat-conducting fins; 12. Fan; 13. Exhaust pipe; 14. Air valve; 15. Controller; 16. Detection components; 17. Heat exchanger; 171. Water inlet; 172. Water outlet; 18. Water valve; 19. First temperature sensor; 20. Air outlet duct; 21. Air filter; 22. Cooling unit; 30. Cabinet; 31. Temporary storage area; 32. Pushing area; 33. Heat exchange area; 40. Pushing mechanism; 50. Temporary storage rack. Detailed Implementation

[0027] The technical solutions of the embodiments of this application will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.

[0028] The terms “top,” “upper,” “lower,” “front,” “back,” and similar expressions used in this article are for illustrative purposes only.

[0029] The terms “first”, “second”, etc., are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implying the quantity, specific order, or primary and secondary relationship of the indicated technical features.

[0030] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0031] This application provides a cooling system including a fan, an exhaust pipe, a controller, a detection component, at least two cooling components, and at least two air valves. The at least two cooling components are spaced apart vertically, and each cooling component has a receiving space below it for accommodating sheets. The exhaust pipe is connected to both the fan and each cooling component, and the fan is used to extract heat from the receiving space. Each air valve is located on the connection path between the exhaust pipe and a cooling component, and the air valve is used to control the connection or disconnection between the cooling component and the corresponding exhaust pipe. The controller is electrically connected to each air valve and the detection component, which is used to detect the temperature within a receiving space and generate a first feedback signal; and / or the detection component is used to detect whether a carrier is present in a receiving space and generate a second feedback signal, wherein the controller is configured to control the corresponding air valve to open or close based on the first and second feedback signals.

[0032] In the above embodiments, when the detection component detects a temperature rise in the containment space or the presence of a vehicle in the containment space, the controller controls the corresponding cooling component's air valve to open, causing the fan to evacuate the containment space. When the detection component detects a temperature drop in the containment space to a specified value or the containment space is empty, the controller controls the corresponding cooling component's air valve to close, thereby achieving precise evacuation of a single containment space, which helps reduce energy consumption compared to overall evacuation.

[0033] Some embodiments of this application will now be described with reference to the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0034] Please see Figure 1 A clean bench device 100 includes a cabinet 30 for storing sheets (not shown).

[0035] In some embodiments, please refer to Figure 1 The clean bench unit 100 also includes a cooling system 10, which cools the cabinet 30 to create a low-temperature environment inside the cabinet 30. By placing the sheet material in this low-temperature environment, the cooling efficiency of the sheet material is improved. Here, low temperature refers to a temperature below room temperature or below the specified temperature required for operation.

[0036] In some embodiments, please refer to Figure 1 The cooling system 10 is located inside the cabinet 30, and the portion of the cooling system 10 is located outside the cabinet 30, so that the cooling system 10 can be moved together with the cabinet 30, which helps to improve the efficiency of transferring and installing the clean bench device 100.

[0037] Furthermore, the cooling system 10 is entirely housed within the cabinet 30 to reduce the risk of external contamination of the cooling system 10.

[0038] In other embodiments, the cooling system 10 is applied to a device such as a thermal field in a photovoltaic material manufacturing equipment that can accommodate the sheet, so as to achieve the effect of cooling the sheet in different environments.

[0039] In some embodiments, the carriers for carrying the sheet material inside the cabinet 30 are spaced apart in the vertical direction.

[0040] In some embodiments, please refer to Figures 2 to 4 The cooling system 10 includes a fan 12, an exhaust pipe 13, a controller 15, a detection component 16, at least two cooling components 11, and at least two air valves 14. The at least two cooling components 11 are spaced apart vertically, and each cooling component 11 has a receiving space 111 formed below it. The receiving space 111 is used to receive a carrier for carrying the sheet material; exemplarily, when the sheet material is placed inside the cabinet 30, the carrier is located within the receiving space 111. The exhaust pipe 13 is connected to the fan 12 and each cooling component 11, and each air valve 14 is located on the connection path between the exhaust pipe 13 and a cooling component 11. The controller 15 is electrically connected to each air valve 14 and the detection component 16. During operation, the detection component 16 detects the temperature within a receiving space 111 and generates a first feedback signal, which characterizes the temperature value within the receiving space 111.

[0041] For example, a detection component 16 detects the temperature of a receiving space 111 and generates a first feedback signal. When the detection component 16 detects that the temperature inside the receiving space 111 is higher than a specified value, the controller 15 controls the air valve 14 corresponding to the cooling component 11 to open according to the detection result of the detection component 16, so that the fan 12 draws air from the receiving space 111 to remove the heat inside the receiving space 111 and to replenish the receiving space 111 with surrounding cold air to cool the sheet inside the receiving space 111.

[0042] When the detection component 16 detects that the temperature inside the containment space 111 is lower than a specified value, the controller 15 controls the air valve 14 corresponding to that cooling component 11 to close based on the detection result of the detection component 16. This achieves precise evacuation of air from a single containment space 111, which helps reduce energy consumption compared to evacuating the entire environment inside the cabinet 30. Furthermore, by closing the corresponding air valve 14 (the air valve 14 connected to the cooling component 11 whose temperature is lower than the specified value and which has no sheet material), the risk of heat diffusion caused by the cooling component 11 drawing heat from the containment space 111 below the adjacent cooling component 11 is reduced, thereby maintaining a stable temperature in other containment spaces 111 or other areas inside the cabinet 30.

[0043] In other embodiments, each detection component 16 is used to detect whether a carrier (not shown, used to carry the sheet) is present in a receiving space 111 or in the receiving space 111, and to generate a second feedback signal, the second feedback signal indicating whether a carrier is present in the receiving space 111.

[0044] For example, a detection component 16 detects whether a vehicle is present in a receiving space 111 and generates a second feedback signal. When the detection component 16 detects a vehicle in the receiving space 111, the controller 15 controls the corresponding air valve 14 to open based on the detection result of the detection component 16, thereby evacuating the receiving space 111. When the detection component 16 detects that there is no vehicle in the receiving space 111, the controller 15 controls the corresponding air valve 14 to close based on the detection result of the detection component 16, thereby stopping the evacuation of the receiving space 111.

[0045] Furthermore, each detection component 16 is used to detect the temperature within a containment space 111 and simultaneously detect the presence of a vehicle within the containment space 111.

[0046] In other embodiments, when a protective gas (such as nitrogen) is required to protect the sheet, the fan 12 draws the protective gas from the containment space 111 so that the protective gas circulates within the cabinet 30.

[0047] In some embodiments, the detection component 16 includes a second temperature sensor (not shown) for detecting the temperature within the accommodating space 111. When the second temperature sensor detects that the temperature within the accommodating space 111 has risen to a specified value (due to the carrier-bearing sheet being located within the accommodating space 111, causing the temperature of the accommodating space 111 to rise), the second temperature sensor sends a first feedback signal to the controller 15, causing the controller 15 to open the air valve 14. When the second temperature sensor detects that the temperature within the accommodating space 111 has dropped to a specified value, the controller 15 closes the air valve 14.

[0048] In other embodiments, the detection component 16 includes a laser sensor or proximity switch (not shown) disposed within the accommodating space 111. When the carrier is placed within a designated range within the accommodating space 111, the laser sensor or proximity switch detects the carrier and sends a second feedback signal to the controller 15. The controller 15 controls the air valve 14 to open based on the detection result of the laser sensor or proximity switch, so that the fan 12 can evacuate the accommodating space 111. When the laser sensor or proximity switch does not detect the carrier within the designated range of the accommodating space 111 (i.e., the carrier moves out of the designated range of the accommodating space 111), the controller 15 controls the air valve 14 to close based on the detection result of the laser sensor or proximity switch.

[0049] In some embodiments, when the detection component 16 in each of the accommodating spaces 111 is used to detect the temperature in the accommodating space 111 and detect whether there is a vehicle in the accommodating space 111, each accommodating space 111 is provided with two different detection components 16, one of which is a second temperature sensor and the other is a laser sensor or a proximity switch.

[0050] Furthermore, when the detection component 16 in the containment space 111 can simultaneously generate a first feedback signal and a second feedback signal, the controller 15 controls the corresponding air valve 14 to open based on the first and second feedback signals. That is, when the temperature of the containment space 111 reaches a specified value and there is a vehicle in the containment space 111, the containment space 111 is evacuated. When the first feedback signal generated by the detection component 16 disappears, that is, when the temperature in the containment space 111 is lower than the specified value, the controller 15 controls the corresponding air valve 14 to close.

[0051] In other embodiments, when a detection component 16 within the accommodating space 111 is capable of simultaneously generating a first feedback signal and a second feedback signal, the detection component 16 includes an infrared detector, so that the infrared detector can replace the second temperature sensor and the laser sensor (or proximity switch) to simultaneously detect the position and temperature of the vehicle.

[0052] In some embodiments, the detection component 16 continuously sends a detection signal to the accommodating space 111 and generates a feedback signal to prompt the controller 15 to take corresponding actions based on the feedback signal, that is, the detection component 16 actively detects the temperature and / or whether there is a vehicle in the accommodating space 111.

[0053] In other embodiments, the detection component 16 sends a detection signal to the accommodating space 111 and generates a feedback signal under the control of the controller 15, so that the controller 15 can take corresponding actions based on the feedback signal. That is, the detection component 16 passively detects the temperature and / or whether there is a vehicle in the accommodating space 111. By making the detection component 16 work intermittently, it helps to reduce the energy consumption of the detection component 16 and extend its service life.

[0054] In some embodiments, please refer to Figures 2 to 4The cooling system 10 also includes a heat exchanger 17 and an air outlet duct 20. The heat exchanger 17 contains a cooling medium and is connected between the air inlet of the fan 12 and the exhaust pipe 13. One end of the air outlet duct 20 (hereinafter referred to as the air inlet) is located on one side of the receiving space 111 below at least two cooling components 11, and the other end of the air outlet duct 20 is connected to the air outlet of the fan 12. During operation, the fan 12 draws air from the receiving space 111 and delivers it through the heat exchanger 17 so that the cooling medium in the heat exchanger 17 can cool the air drawn out by the fan 12. Finally, the air outlet duct 20 guides the air cooled by the heat exchanger 17 to the receiving space 111 below each cooling component 11, thereby realizing the air circulation and cooling within the cabinet 30. Compared with the fan 12 directly discharging the drawn air to the outside, this helps to reduce the risk of temperature rise in the surrounding environment (such as a processing workshop).

[0055] In some embodiments, the air outlet duct 20 has one or more outlet ends.

[0056] In some embodiments, the air outlet of the air duct 20 is located on the side of the cabinet 30 away from all the cooling components 11, so that the cold air enters the cabinet 30 and then flows to each of the accommodating spaces 111, which helps to improve the temperature uniformity of the low-temperature environment inside the cabinet 30.

[0057] In other embodiments, when the number of air outlets of the air outlet 20 is two or more, at least one air outlet extends into a receiving space 111.

[0058] In other embodiments, the fan 12 exhausts the extracted air directly outside the cabinet 30.

[0059] Since impurities may adhere to the sheet material during processing or when it enters the cabinet 30, in some embodiments, the air in the accommodating space 111 is extracted by the fan 12, and the impurities on the sheet material can be discharged with the air, thereby achieving the effect of purifying the sheet material.

[0060] In some embodiments, please refer to Figure 2 and Figure 4 The air outlet duct 20 is equipped with an air filter 21. When the fan 12 exhausts the air into the cabinet 30, the air filter 21 filters impurities in the air to improve the cleanliness of the air inside the cabinet 30, thereby reducing the risk of the sheet material being contaminated.

[0061] For example, air filter 21 includes a filter structure such as a filter element or filter screen.

[0062] In some embodiments, the cooling medium in the heat exchanger 17 is water. The heat exchanger 17 includes an inlet end 171 and an outlet end 172. The inlet end 171 is connected to an external water source, and the outlet end 172 is open to the outside. Cooling the air drawn out by the fan 12 by circulating water helps improve the cooling effect of the heat exchanger 17. Furthermore, using water as the cooling medium enables convenient use of the cooling system 10 even after it has moved with the cabinet 30.

[0063] In some embodiments, the heat exchanger 17 is provided with a tortuous cooling pipe (not shown) to extend the flow path of the cooling water, thereby increasing the contact area between the cooling water and the air.

[0064] In other embodiments, the cooling medium in the heat exchanger 17 is a medium other than water, and the cooling medium in the heat exchanger 17 is stationary. When the temperature of the cooling medium is higher than a specified value, the cooling medium is allowed to cool naturally or a new cooling medium is replaced.

[0065] In some embodiments, please refer to Figure 2 and Figure 4 The cooling system 10 also includes a water valve 18 and a first temperature sensor 19. The water valve 18 and the first temperature sensor 19 are electrically connected to the controller 15. The water valve 18 is located at the inlet 171 of the heat exchanger 17 to control the water flow rate at the inlet 171. The first temperature sensor 19 is located at the air inlet of the air outlet duct 20 or the fan 12. The first temperature sensor 19 detects the temperature of the cooled air and sends a third feedback signal to the controller 15. The third feedback signal indicates that the temperature of the air after passing through the heat exchanger 17 is higher than a specified value. During operation, when the first temperature sensor 19 detects that the temperature at the air inlet of the air outlet duct 20 or the fan 12 is higher than the specified value, the controller 15 controls the water valve 18 to increase its opening based on the detection result of the first temperature sensor 19, thereby increasing the flow rate of cooling water in the heat exchanger 17 and improving the cooling effect of the heat exchanger 17. When the first temperature sensor 19 detects that the temperature at the air outlet duct 20 or the air inlet of the fan 12 is lower than a specified value, the controller 15 controls the water valve 18 to reduce its opening based on the detection result of the first temperature sensor 19, so as to reduce the flow rate of cooling water in the heat exchanger 17, thereby helping to reduce water consumption and achieve water saving.

[0066] In some embodiments, please refer to Figures 5 to 7Each cooling component 11 includes a cooling body 112, within which a negative pressure chamber 1121 is provided. An opening 1122 is provided on the bottom surface of the cooling body 112, connecting the opening 1122 to the negative pressure chamber 1121. An air extraction pipe 13 is connected to the negative pressure chamber 1121. When the air valve 14 is opened, a negative pressure environment is created within the negative pressure chamber 1121 under the action of the fan 12, causing air in the containing space 111 to move into the negative pressure chamber 1121 under the pressure difference and be extracted by the fan 12.

[0067] For example, please refer to Figure 5 and Figure 7 The cooling body 112 includes a cooling plate 1123 and a cover plate 1124. The cooling plate 1123 has a cavity (not marked) through it. The cover plate 1124 covers one side of the cooling plate 1123, so that the cavity is in a semi-closed state. The side of the cavity facing the cover plate 1124 forms a negative pressure cavity 1121, and the side of the cavity away from the cover plate 1124 forms an opening 1122.

[0068] In other embodiments, the cooling plate 1123 and the cover plate 1124 are integrally formed.

[0069] In some embodiments, please refer to Figures 5 to 7 The cooling assembly 11 also includes an extraction pipe 113 connected to the extraction pipe 13. The extraction pipe 113 is located at the opening 1122, and an air hole 1131 is provided on the side of the extraction pipe 113 facing the negative pressure chamber 1121 from the opening 1122. For example, when the receiving space 111 is located below the cooling assembly 11, the air hole 1131 is located on the upward side of the extraction pipe 113. By having the extraction pipe 113 located below the negative pressure chamber 1121 and extracting air from the negative pressure chamber 1121 in a direction away from the receiving space 111, the risk of the air hole 1131 directly extracting air from the receiving space 111 is reduced, which helps to form a stable negative pressure environment in the negative pressure chamber 1121. Furthermore, by having the extraction pipe 113 located above the negative pressure chamber 1121 to extract air from the negative pressure chamber 1121, the overall height of the cooling assembly 11 is reduced.

[0070] In other embodiments, the suction pipe 113 is disposed in the negative pressure chamber 1121, and the air hole 1131 is located on one side of the suction pipe 113 along the horizontal direction, that is, the suction pipe 113 and the negative pressure chamber 1121 are at the same horizontal height, so as to achieve the effect of suctioning air from the negative pressure chamber 1121 by the air hole 1131. Moreover, the suction pipe 113 is disposed above the negative pressure chamber 1121 to suction air from the negative pressure chamber 1121, which helps to reduce the overall height of the cooling assembly 11.

[0071] In some embodiments, please refer to Figures 5 to 7Each cooling component 11 also includes a cooling pipe 114, which is located in the cooling body 112 and connected to an external water source. When air enters the negative pressure chamber 1121 from the containing space 111 through the opening 1122, the cooling pipe 114 absorbs the heat of the air flowing through the opening 1122, thereby pre-cooling the air and helping to improve the cooling effect of the air.

[0072] In some embodiments, there are multiple cooling pipes 114, which are parallel and spaced apart from each other in the opening 1122.

[0073] In other embodiments, the cooling conduit 114 is arranged in a tortuous manner at the opening 1122.

[0074] In some embodiments, please refer to Figure 5 and Figure 7 Each cooling component 11 also includes multiple heat-conducting fins 115, which are spaced apart at the opening 1122. Each heat-conducting fin 115 is connected to a cooling pipe 114. When the fan 12 draws air from the receiving space 111, the air flows from outside the cooling body 112 through the space between two adjacent heat-conducting fins 115 into the negative pressure chamber 1121. Each heat-conducting fin 115 absorbs heat from the air, and the cooling pipe 114 then absorbs the heat from the heat-conducting fins 115, thereby achieving the effect of pre-cooling the air. By using thinner heat-conducting fins 115, the contact area with the air is increased without obstructing airflow, thus improving the cooling effect.

[0075] In some embodiments, the heat-conducting fins 115 are made of materials such as copper or aluminum, which have a higher thermal conductivity than water.

[0076] In some embodiments, please refer to Figure 5 When the cooling assembly 11 includes an exhaust pipe 113, a cooling pipe 114, and a heat-conducting fin 115, the exhaust pipe 113 is located in an annular arrangement on the side wall of the cooling body 112 at the opening 1122, and the cooling pipe 114 and the heat-conducting fin 115 are arranged inside the annular exhaust pipe 113, that is, the exhaust pipe 113 is arranged around the outer periphery of the cooling pipe 114 and the heat-conducting fin 115.

[0077] Furthermore, some of the extraction pipes 113 are also interspersed with cooling pipes 114 and / or heat-conducting fins 115, so that the extraction pipes 113 can uniformly extract air from the negative pressure chamber 1121.

[0078] In some embodiments, please refer to Figure 1 and Figure 8The clean bench device 100 also includes at least two pusher mechanisms 40 and at least two temporary storage racks 50. The cabinet 30 includes a temporary storage area 31 and a pusher area 32 spaced apart along the Y-axis. The pusher mechanism 40 is located in the pusher area 32 to transfer the carrier between the cabinet 30 and the external reactor along the X-axis. The temporary storage rack 50 is located in the temporary storage area 31 and is used to carry the carrier.

[0079] In some embodiments, the Y-axis and X-axis are perpendicular to the direction of gravity, and the positive direction of the Z-axis in the figure is the upward direction of gravity.

[0080] In some embodiments, a plurality of temporary storage racks 50 and a plurality of boat pushing mechanisms 40 are distributed at intervals along the vertical direction.

[0081] In some embodiments, please refer to Figure 3 The cooling system 10 includes two cooling units 22 distributed along the Y-axis. One cooling unit 22 is located in the temporary storage area 31, and the other cooling unit 22 is located in the pusher area 32. Each cooling unit 22 includes at least two cooling components 11. Each cooling component 11 of the cooling unit 22 in the temporary storage area 31 is located above a temporary storage rack 50, and a receiving space 111 is located between the temporary storage rack 50 and the cooling component 11. Each cooling component 11 of the cooling unit 22 in the pusher area 32 is located above a pusher mechanism 40, and a receiving space 111 is located between the pusher mechanism 40 and the cooling component 11, thereby achieving the effect of cooling the sheet on each pusher mechanism 40 or each temporary storage rack 50.

[0082] In some embodiments, when multiple cooling components 11 are distributed vertically at intervals, no receiving space 111 is formed below the lowest cooling component 11, so that all the boat pushing mechanisms 40 and / or all the temporary storage racks 50 can be located vertically between the cooling components 11 to achieve a sufficient cooling effect.

[0083] In some embodiments, since the length of the pusher mechanism 40 in the X-axis direction is greater than the length of the temporary storage rack 50, the length of the pusher region 32 in the X-axis direction is greater than the length of the temporary storage region 31.

[0084] In some embodiments, when the clean bench device 100 includes a pusher mechanism 40 or a temporary storage rack 50, the detection component 16 is disposed on the pusher mechanism 40 or the temporary storage rack 50.

[0085] In some embodiments, please refer to Figure 8The cabinet 30 also includes a heat exchange area 33. The temporary storage area 31 and the heat exchange area 33 are arranged opposite each other along the X-axis direction, and the temporary storage area 31 and the heat exchange area 33 are both located on the same side of the push boat area 32 along the Y-axis direction. The fan 12 is located in the heat exchange area 33 to make full use of the space inside the cabinet 30. The fan 12, the push boat mechanism 40 and the temporary storage rack 50 are distributed at intervals along the Y-axis direction, or the fan 12 is located above the temporary storage area 31 and the push boat area 32. This helps to reduce the size of the cabinet 30 in the Z-axis direction and the Y-axis direction, making the structure of the purification table device 100 more compact.

[0086] In some embodiments, at least one of the heat exchanger 17, the exhaust pipe 13, the controller 15, the air valve 14, and the water valve 18 is respectively disposed in the heat exchange area 33, which helps to improve the space utilization of the heat exchange area 33.

[0087] Furthermore, those skilled in the art should recognize that the above embodiments are merely illustrative of this application and are not intended to limit this application. Any appropriate changes and variations made to the above embodiments within the essential spirit and scope of this application fall within the scope of this application's disclosure.

Claims

1. A cooling system for cooling sheet material, characterized in that, include: At least two cooling components are provided, the at least two cooling components are distributed at intervals in a vertical direction, and a receiving space is formed below each cooling component, the receiving space being used to receive a carrier for carrying the sheet. Fan; An exhaust pipe is connected to the fan and each of the cooling components, and the fan is used to extract heat from the containment space. At least two air valves, each of which is located on the connection path between the air extraction line and one of the cooling components, the air valves being used to control the connection or disconnection of the cooling component and the corresponding air extraction line; The controller is electrically connected to each of the aforementioned air valves; A detection component, electrically connected to the controller, is used to detect the temperature within one of the containment spaces and generate a first feedback signal; And / or the detection component is used to detect whether a vehicle is present in one of the accommodating spaces and generate a second feedback signal; The controller is configured to control the corresponding air valve to open or close according to the first feedback signal and / or the second feedback signal.

2. The cooling system according to claim 1, characterized in that, The cooling system also includes a heat exchanger and an air outlet pipe. The heat exchanger contains a cooling medium and is connected between the air inlet of the fan and the air extraction pipe. The fan is used to transport the extracted air through the heat exchanger so that the cooling medium in the heat exchanger can cool the air extracted by the fan. One end of the air outlet duct is located on one side of the receiving space below at least two of the cooling components, and the other end of the air outlet duct is connected to the air outlet end of the fan. The air outlet duct is used to guide the air cooled by the heat exchanger to the receiving space below each of the cooling components.

3. The cooling system according to claim 2, characterized in that, The heat exchanger includes a water inlet end, which is connected to an external water source. The cooling system also includes a water valve and a first temperature sensor. The water valve and the first temperature sensor are electrically connected to the controller. The water valve is located at the water inlet and is used to control the water flow rate at the water inlet. The first temperature sensor is located at the air outlet duct or the air inlet of the fan. The first temperature sensor is used to detect the temperature of the cooled air and send a third feedback signal to the controller. The controller controls the water valve according to the third feedback signal to adjust the opening of the water valve.

4. The cooling system according to claim 2, characterized in that, The air outlet duct is equipped with an air filter.

5. The cooling system according to claim 1, characterized in that, The cooling system includes two cooling units distributed along the Y-axis, and each cooling unit includes at least two cooling components, wherein the Y-axis is perpendicular to the vertical direction.

6. The cooling system according to any one of claims 1 to 5, characterized in that, Each of the cooling components includes a cooling body, which has a negative pressure chamber. The bottom surface of the cooling body has an opening that communicates with the negative pressure chamber. The exhaust pipe is also connected to the negative pressure chamber to create a negative pressure environment within the negative pressure chamber under the action of the fan.

7. The cooling system according to claim 6, characterized in that, Each of the cooling components further includes a cooling pipe and multiple heat-conducting fins. The cooling pipe is located in the cooling body and is connected to an external water source. Multiple heat-conducting fins are spaced apart at the opening, each heat-conducting fin is connected to the cooling pipe, and air is allowed to flow from outside the cooling body into the negative pressure chamber between two adjacent heat-conducting fins. Each heat-conducting fin is used to absorb the heat of the air, and the cooling pipe is used to absorb the heat of the heat-conducting fins.

8. The cooling system according to claim 6, characterized in that, The cooling assembly further includes an extraction pipe connected to the extraction pipe, the extraction pipe being disposed at the opening, and an air hole being provided on the side of the extraction pipe facing the negative pressure chamber from the opening, the air hole being used to extract air from the negative pressure chamber; or The air extraction pipe is located in the negative pressure chamber, and an air hole is provided on one side of the air extraction pipe along the horizontal direction. The air hole is used to extract air from the negative pressure chamber.

9. The cooling system according to any one of claims 1 to 5, characterized in that, When multiple cooling components are distributed vertically at intervals, the receiving space is not formed below the cooling component located at the bottom.

10. The cooling system according to any one of claims 1 to 5, characterized in that, The number of detection components is multiple, each of which is electrically connected to the controller, and each accommodating space is provided with at least one of the detection components.

11. The cooling system according to claim 10, characterized in that, Each of the detection components is used to detect the temperature within one of the containment spaces and generate a first feedback signal; and / or Each of the detection components is used to detect whether there is a vehicle in one of the containment spaces and generate a second feedback signal.

12. The cooling system according to claim 11, characterized in that, The detection components in each of the containment spaces simultaneously generate the first feedback signal and the second feedback signal. When the first feedback signal indicates that the temperature of the containment space has reached a specified value and the second feedback signal indicates that there is a vehicle in the containment space, the controller controls the corresponding air valve to open based on the first feedback signal and the second feedback signal.

13. A cleanroom bench device, characterized in that, The device includes a cabinet and a cooling system as described in any one of claims 1 to 12, wherein the cabinet is used to store the sheet material and the cooling system is disposed within the cabinet; The cabinet includes a push-boat area, a heat exchange area, and a temporary storage area. The push-boat area and the temporary storage area are respectively used to accommodate sheets. The fan is located in the heat exchange area. The temporary storage area and the heat exchange area are arranged opposite each other along the X-axis direction. The temporary storage area and the heat exchange area are both located on the same side of the pusher area along the Y-axis direction, wherein the X-axis and the Y-axis are perpendicular to the vertical direction.

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