Tubular furnace and processing apparatus

Abstract

The application relates to the technical field of semiconductors or photovoltaics, in particular to a tubular furnace and processing equipment for reducing the heat conducted by the tubular furnace to the room, reducing the amount of hot air discharged to the outside, simultaneously reducing the amount of clean air input to the room, and reducing the cost of the tubular furnace in the process. The tubular furnace comprises a furnace body, one end of the length direction of the furnace body is provided with a furnace mouth, the outside of the furnace body is provided with a plurality of cooling sections, the plurality of cooling sections are sequentially arranged along the length direction of the furnace body, each cooling section is provided with a liquid cooling flow channel, a liquid inlet and a liquid outlet, and the liquid inlet and the liquid outlet are communicated with the liquid cooling flow channel. Therefore, the heat conducted by the furnace body to the room is reduced, so that the heat conducted by the tubular furnace to the room can be reduced, the amount of hot air discharged to the outside can be reduced, the amount of clean air input to the room can be simultaneously reduced, and the cost of the tubular furnace in the process can be reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic technology, and more particularly to a tube furnace and processing equipment. Background Technology

[0002] The tube furnace processes used in semiconductor or photovoltaic materials involve high temperatures and long processing times, resulting in the outer wall of the tube furnace remaining at a high temperature throughout the entire process. The outer wall of the tube furnace conducts heat into the air. To maintain a constant temperature in the semiconductor or photovoltaic workshop, hot air needs to be continuously exhausted outdoors while an equal amount of clean air is introduced into the room, leading to high costs for diffusion or oxidation processes. Utility Model Content

[0003] In view of this, embodiments of this application provide a tubular furnace and processing equipment to reduce the heat conducted from the tubular furnace to the room, reduce the amount of hot air emitted to the outside, and reduce the amount of clean air introduced into the room, thereby reducing the cost of processing in the tubular furnace.

[0004] In a first aspect, one embodiment of this application provides a tubular furnace, which includes a furnace body, a furnace opening at one end along the length direction of the furnace body, and multiple cooling sections on the outside of the furnace body. The multiple cooling sections are arranged sequentially along the length direction of the furnace body, and each cooling section is provided with a liquid cooling channel, a liquid inlet and a liquid outlet, and the liquid inlet and the liquid outlet are both connected to the liquid cooling channel.

[0005] In conjunction with the first aspect, in some implementations of the first aspect, the cooling section includes a furnace mouth section, a middle section, and a furnace tail section. In the length direction of the furnace body, the furnace mouth section is located close to the furnace mouth, the furnace tail section is located away from the furnace mouth, and the middle section is located between the furnace mouth section and the furnace tail section.

[0006] In conjunction with the first aspect, in some implementations of the first aspect, the furnace body has a process chamber, the furnace opening is connected to the process chamber, the process chamber includes a process section, the process section is used to accommodate the product to be processed, and the middle section is set corresponding to the process section.

[0007] In conjunction with the first aspect, in some implementations of the first aspect, the furnace body includes a furnace body and multiple cooling water jackets, the cooling water jackets being fitted over the outside of the furnace body, and each cooling water jacket forming a cooling section.

[0008] In conjunction with the first aspect, in some implementations of the first aspect, the cooling water jacket includes a jacket body and a connecting assembly, the jacket body having a first side and a second side disposed opposite to each other along the circumference of the furnace body, the jacket body being fitted over the outside of the furnace body body, and the first side and the second side being detachably connected by the connecting assembly.

[0009] In conjunction with the first aspect, in some implementations of the first aspect, a first connecting ear is provided on a first side, a second connecting ear is provided on a second side, the first connecting ear is provided with a first connecting hole, and the second connecting ear is provided with a second connecting hole; the connecting assembly includes a pull rod, a nut, and an elastic element, the pull rod passes through the first connecting hole and the second connecting hole and is connected to the nut, the elastic element is sleeved on the outside of the pull rod, and the elastic element is disposed between the nut and the second connecting ear.

[0010] In conjunction with the first aspect, in some implementations of the first aspect, the cooling section includes an inner plate and an outer plate, the outer plate being disposed outside the inner plate, and a liquid cooling channel being formed between the inner plate and the outer plate; the outer plate includes: an outer plate body; a thermal insulation layer and / or a hydrophobic layer, the thermal insulation layer being disposed inside the outer plate body, and the hydrophobic layer being disposed outside the outer plate body.

[0011] In conjunction with the first aspect, in some implementations of the first aspect, there is a gap between the inner plate and the outer plate, the edges of the inner plate and the outer plate are connected to form a cavity, and a partition is provided in the cavity to divide the cavity into liquid cooling channels extending along a serpentine path.

[0012] In conjunction with the first aspect, in some implementations of the first aspect, the inner plate has a first edge and a second edge arranged opposite to each other along the circumference of the furnace body, and the outer plate has a third edge and a fourth edge arranged opposite to each other along the circumference of the furnace body. The first edge and the third edge are connected to form a first side, and the second edge and the fourth edge are connected to form a second side. The partition extends along the circumference of the furnace body. In two adjacent partitions, one end of one partition extends to the first side and the other end is spaced from the second side, and one end of the other partition extends to the second side and the other end is spaced from the first side, so as to divide the cavity to form a liquid cooling channel extending along a serpentine path.

[0013] In conjunction with the first aspect, in some implementations of the first aspect, the cooling section has multiple connection points at the liquid cooling channel, with adjacent connection points spaced apart, and the connection points connect the inner plate and the outer plate.

[0014] Secondly, one embodiment of this application provides a processing device, which includes a cabinet, a tubular furnace, and a furnace door. The tubular furnace is any of the tubular furnaces mentioned above, and the tubular furnace is disposed inside the cabinet. The furnace door is disposed inside the cabinet and at the furnace opening, and the furnace door is used to close or open the furnace opening.

[0015] In conjunction with the first aspect, in some implementations of the first aspect, the cabinet is provided with a cabinet door for opening or closing the cabinet. The processing equipment also includes: a temperature detection device, which is located on the inside of the cabinet door and is used to detect the temperature inside the cabinet; a door opening mechanism, which is used to control the opening or closing of the furnace door; and a controller, which is connected to both the door opening mechanism and the temperature detection device via a signal, and can control the door opening mechanism to close the furnace door when the temperature inside the cabinet is greater than or equal to a preset temperature.

[0016] The tubular furnace provided in this embodiment features cooling sections on the exterior of the furnace body. Each cooling section is equipped with a liquid cooling channel, an inlet, and an outlet, all of which are connected to the liquid cooling channel. This allows coolant to flow into the liquid cooling channel through the inlet. As the coolant flows through the cooling section, it exchanges heat with the exterior of the furnace body. The coolant then flows out through the outlet, carrying the heat from the furnace body to the exterior, thus cooling the exterior. This reduces the amount of heat conducted from the furnace body to the interior, thereby reducing the amount of heat transferred from the tubular furnace to the room, decreasing the amount of hot air emitted to the outside, and reducing the amount of clean air introduced into the room, thus lowering the cost of processes conducted in the tubular furnace. Furthermore, by actively cooling the tubular furnace through the cooling sections, the cooling rate inside the furnace can be increased, effectively shortening the process cycle. Attached Figure Description

[0017] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 The diagram shown is a structural schematic of a tubular furnace provided in an embodiment of this application.

[0019] Figure 2 As shown Figure 1 Enlarged view of point A in the middle.

[0020] Figure 3 As shown Figure 1 Enlarged view of point B in the middle.

[0021] Figure 4 The diagram shown is an unfolded view of the liquid cooling channel of a tubular furnace according to an embodiment of this application.

[0022] Figure 5 The diagram shown is a structural schematic of the middle section of a tubular furnace provided in an embodiment of this application.

[0023] Figure 6As shown Figure 5 A magnified view of a section at point C.

[0024] Figure 7 The diagram shown is a structural schematic of the furnace mouth section of a tubular furnace provided in an embodiment of this application.

[0025] Figure 8 As shown Figure 7 A magnified view of a section at point D.

[0026] Figure 9 The image shown is a cross-sectional view of the outer plate of a tubular furnace provided in an embodiment of this application.

[0027] Figure label: 10. Tubular furnace; 1. Furnace body; 11. Furnace opening; 12. Process chamber; 2. Cooling section; 21. Liquid inlet; 22. Liquid outlet; 23. Sleeve; 231. First side; 2311. First connecting lug; 232. Second side; 2321. Second connecting lug; 233. Separator; 234. Connection point; 24. Connection assembly; 241. Tie rod; 242. Nut; 243. Elastic element; 25. Inner plate; 26. Outer plate; 261. Outer plate body; 262. Insulation layer; 263. Hydrophobic layer; 200. Liquid cooling channel; 201. Furnace opening section; 202. Middle section; 203. Furnace tail section. Detailed Implementation

[0028] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0029] The tube furnace 10 used for semiconductor or photovoltaic materials operates at a process temperature of 900℃~1150℃ during high-temperature diffusion or oxidation. The outer wall temperature of the tube furnace 10 also reaches 150℃~350℃. Furthermore, the high-temperature diffusion or oxidation process is lengthy, causing the outer wall temperature of the tube furnace 10 to remain consistently between 150℃ and 350℃, continuously transferring heat into the air. Since semiconductor or photovoltaic workshops are temperature-controlled environments, it is necessary to continuously exhaust excess hot air outdoors while simultaneously producing an equal amount of clean air and introducing it indoors. This significantly increases the cost of the tube furnace 10 process, resulting in high costs for diffusion or oxidation processes.

[0030] Currently, it is difficult to increase the cooling rate during high-temperature diffusion or oxidation processes in semiconductor or photovoltaic materials. This is mainly because energy saving in the process requires enhancing the insulation effect of the tube furnace 10, which slows down the cooling rate. In addition, the high temperature of the outer wall of the tube furnace 10 can easily burn operators during inspections.

[0031] Figure 1 The diagram shown is a structural schematic of a tubular furnace 10 provided in an embodiment of this application. Figure 2 As shown Figure 1 Enlarged view of point A in the middle. Figure 3 As shown Figure 1 Enlarged view of point B in the middle. Figure 4 The diagram shown is an unfolded view of the liquid cooling channel of a tubular furnace according to an embodiment of this application.

[0032] like Figures 1 to 4 As shown, the tubular furnace 10 provided in this embodiment includes a furnace body, with a furnace opening 11 at one end along the length direction of the furnace body. Multiple cooling sections 2 are provided on the outside of the furnace body. The multiple cooling sections 2 are arranged sequentially along the length direction of the furnace body. Each cooling section 2 is provided with a liquid cooling channel 200, a liquid inlet 21 and a liquid outlet 22. The liquid inlet 21 and the liquid outlet 22 are both connected to the liquid cooling channel 200.

[0033] For example, the tube furnace 10 can be a diffusion furnace for performing a phosphorus diffusion process on a product to be processed (e.g., photovoltaic materials), or an oxidation furnace for performing an oxidation process on the product to be processed.

[0034] The tubular furnace 10 provided in this embodiment features cooling sections 2 on the exterior of the furnace body. Each cooling section 2 is equipped with a liquid cooling channel 200, an inlet 21, and an outlet 22, both of which are connected to the liquid cooling channel 200. This allows coolant to flow into the liquid cooling channel 200 through the inlet 21. As the coolant flows through the cooling section 2, it exchanges heat with the exterior of the furnace body. The coolant then flows out through the outlet 22, carrying the heat from the furnace body to the exterior, thus cooling the exterior. This reduces the heat conducted from the furnace body to the interior, thereby reducing the amount of heat transferred from the tubular furnace 10 to the interior, reducing the amount of hot air emitted to the outside, and reducing the amount of clean air introduced into the interior, thus lowering the cost of processes performed in the tubular furnace 10. Furthermore, by actively cooling the tubular furnace 10 through the cooling sections 2, the cooling rate inside the tubular furnace 10 can be increased, effectively shortening the process cycle.

[0035] Furthermore, by setting up multiple cooling sections 2, arranged sequentially along the length of the furnace body, operators can control the flow rate of the coolant in each cooling section 2 according to the cooling needs of different parts of the furnace body. This reduces the heat conducted from the tubular furnace 10 to the interior while avoiding increased energy consumption due to over-cooling of the tubular furnace 10. Moreover, by lowering the outer wall temperature of the tubular furnace 10, the problem of burns to operators caused by high outer wall temperatures can be effectively avoided.

[0036] For example, the coolant can be cooling water.

[0037] For example, when the cooling section 2 is not provided on the outside of the tube furnace 10, the process temperature inside the tube furnace 10 is 900℃~1150℃, and the temperature of the outer wall of the tube furnace 10 is 150℃~350℃. By providing the cooling section 2 on the outside of the tube furnace 10, the coolant in the cooling section 2 is used to cool and dissipate heat to the outside of the tube furnace 10, so that the temperature of the outer wall of the tube furnace 10 can be reduced to less than or equal to 45℃. The load of the clean air conditioning in the semiconductor or photovoltaic workshop can be reduced by 30%~40%, and correspondingly, the amount of clean air that needs to be input into the workshop is also reduced accordingly, resulting in a significant reduction in electricity costs and gas purification costs in the semiconductor or photovoltaic workshop, and a significant decrease in costs.

[0038] In some embodiments, such as Figures 1 to 3 As shown, the cooling section 2 includes a furnace opening section 201, a middle section 202, and a furnace tail section 203. In the length direction of the furnace body, the furnace opening section 201 is located close to the furnace opening 11, the furnace tail section 203 is located away from the furnace opening 11, and the middle section 202 is located between the furnace opening section 201 and the furnace tail section 203.

[0039] Understandably, when the tube furnace 10 processes the product to be processed, the product is usually located in the middle of the furnace body; that is, the furnace opening 11 and the furnace tail are usually not placed on the product to be processed. Therefore, the temperature accuracy requirements for the middle part of the tube furnace 10 are higher, while the temperature accuracy requirements for the furnace opening 11 and the furnace tail are lower. The furnace tail is the end of the furnace body 1 furthest from the furnace opening 11.

[0040] By setting the cooling section 2 to include the furnace mouth section 201, the middle section 202, and the furnace tail section 203, with the furnace mouth section 201 located close to the furnace mouth 11, the furnace tail section 203 located away from the furnace mouth 11, and the middle section 202 located between the furnace mouth section 201 and the furnace tail section 203, it is convenient for operators to control the flow rate of the coolant in the cooling section 2 corresponding to different parts of the furnace body as needed. This reduces the energy consumption for cooling the tube furnace 10 while meeting process requirements, and further reduces the cost of the tube furnace 10 during the process.

[0041] Optionally, in the length direction of the furnace body, the length of the middle section 202 is greater than the length of the furnace mouth section 201 and the length of the furnace tail section 203.

[0042] In some embodiments, the furnace body has a process chamber 12, the furnace opening 11 is connected to the process chamber 12, the process chamber 12 includes a process segment, the process segment is used to accommodate the product to be processed, and the middle segment 202 is provided corresponding to the process segment.

[0043] The process section can be understood as the location of the product to be processed during the process in the tube furnace 10. The middle section 202 corresponds to the process section setting and can be understood as the middle section 202 covering the outside of the process section.

[0044] By setting the middle section 202 to correspond to the process section, the cooling rate of the process section can be controlled by controlling the flow rate of the coolant in the middle section 202, so as to quickly cool the process section to the target temperature. This helps to shorten the time of the process in the tube furnace 10 and shorten the process cycle of the tube furnace 10.

[0045] Optionally, the tubular furnace 10 also includes a first water pump, a second water pump, and a third water pump. The first water pump is used to pump coolant to the furnace mouth section 201, the second water pump is used to pump coolant to the furnace tail section 203, and the third water pump is used to pump coolant to the middle section 202. By controlling the first, second, and third water pumps, the flow rate of the coolant in the corresponding cooling section 2 can be controlled, as well as the energy consumption of the first, second, and third water pumps.

[0046] For example, when the tubular furnace 10 is carrying out the process, the temperature change inside the tubular furnace 10 is mainly divided into three stages, namely the first stage, the second stage and the third stage. The temperature of the first stage is higher than the temperature of the second stage, and the temperature of the second stage is higher than the temperature of the third stage.

[0047] In the first stage, the internal temperature of the tubular furnace 10 is high, resulting in a high external wall temperature. Therefore, the coolant flow rate is high (e.g., S1) to improve the cooling efficiency of the tubular furnace 10 and maintain the external wall temperature within a preset range. In the second stage, the internal temperature of the tubular furnace 10 is moderate, and the coolant flow rate is also moderate (e.g., S2). This ensures cooling efficiency while reducing energy consumption for cooling. In the third stage, the internal temperature of the tubular furnace 10 is low, and the coolant flow rate is low (e.g., S3). This further reduces energy consumption for cooling while maintaining cooling efficiency and preventing overcooling. Specifically, S1 is greater than S2, and S2 is greater than S3.

[0048] For example, the first stage is 1150℃→900℃, the second stage is 900℃→600℃, and the third stage is less than 600℃. The flow rate S1 can be 5m / s, at which time the cooling rate can be 150℃ / min; the flow rate S2 can be 2m / s, at which time the cooling rate can be 50℃ / min; and the flow rate S3 can be 0.5m / s, at which time the cooling rate can be 20℃ / min.

[0049] By setting up cooling section 2 to actively cool the tube furnace 10, the cooling rate inside the tube furnace 10 can be increased, which can effectively shorten the process cycle when the tube furnace 10 is used for processing. For example, the process cycle can be shortened by 40% (e.g., from 4 hours to 2.4 hours). By setting different coolant flow rates for different temperature ranges, the cooling energy consumption can be effectively reduced, and over-cooling of the tube furnace 10 can be avoided.

[0050] For example, during the process from the completion of the process of the product to be processed to the removal of the product from the furnace body, the flow rate of the coolant in the furnace opening section 201 and the furnace tail section 203 can be set to be smaller than the flow rate of the coolant in the middle section 202, so that the temperature at the furnace opening 11 and the furnace tail is higher, so that when the next batch of products to be processed enters the furnace body, the furnace opening 11 and the furnace tail are kept in a higher temperature range, further shortening the process cycle.

[0051] In some embodiments, such as Figure 2 and Figure 3 As shown, the furnace body includes a furnace body 1 and multiple cooling water jackets. The cooling water jackets are fitted onto the outside of the furnace body 1, and each cooling water jacket forms a cooling section 2.

[0052] By setting the furnace body in the form of a furnace body 1 and a cooling water jacket, with the cooling water jacket fitted outside the furnace body 1, the structure of each component of the furnace body can be simplified, and the processing and manufacturing of the furnace body can be facilitated.

[0053] Figure 5 The diagram shown is a structural schematic of the middle section 202 of a tubular furnace 10 provided in an embodiment of this application. Figure 6 As shown Figure 5 A magnified view of a section at point C. Figure 7 The diagram shown is a structural schematic of the furnace mouth section 201 of a tubular furnace 10 provided in an embodiment of this application. Figure 8 As shown Figure 7 A magnified view of a section at point D.

[0054] In some embodiments, such as Figures 5 to 8As shown, the cooling water jacket includes a jacket body 23 and a connecting assembly 24. The jacket body 23 has a first side 231 and a second side 232 arranged opposite to each other along the circumference of the furnace body. The jacket body 23 is fitted onto the outside of the furnace body 1. The first side 231 and the second side 232 are detachably connected by the connecting assembly 24.

[0055] By making the cooling water jacket detachable, it is convenient to maintain and replace the cooling water jacket, avoiding the problem of the furnace body becoming unusable due to damage to the cooling water jacket.

[0056] In some embodiments, such as Figure 6 and Figure 8 As shown, the first side 231 is provided with a first connecting ear 2311, and the second side 232 is provided with a second connecting ear 2321. The first connecting ear 2311 is provided with a first connecting hole, and the second connecting ear 2321 is provided with a second connecting hole. The connecting assembly 24 includes a pull rod 241, a nut 242, and an elastic element 243. The pull rod 241 passes through the first connecting hole and the second connecting hole and is connected to the nut 242. The elastic element 243 is sleeved on the outside of the pull rod 241 and is disposed between the nut 242 and the second connecting ear 2321.

[0057] For example, the elastic element 243 is a compression spring, with its two ends abutting against the nut 242 and the second connecting lug 2321, respectively, to provide the nut 242 with a spring force away from the second connecting lug 2321.

[0058] When connecting the cooling water jacket to the furnace body 1, first, the cooling water jacket is fitted onto the outside of the furnace body 1; then, the pull rod 241 is passed through the first connecting hole and the second connecting hole in sequence, and an elastic element 243 is fitted onto the pull rod 241, and the pull rod 241 is threadedly connected to the nut 242. Under the elastic force of the elastic element 243, the nut 242 and the pull rod 241 are locked together, preventing the nut 242 from loosening.

[0059] By configuring the connecting assembly 24 to include a pull rod 241, a nut 242, and an elastic element 243, the connection reliability of the first side 231 and the second side 232 can be improved, thereby improving the reliability of the tubular furnace 10.

[0060] For example, there are two nuts 242, and each end of the pull rod 241 is connected to a nut 242. An elastic element 243 is provided between the nut 242 near the second side 232 and the second connecting ear 2321.

[0061] In some embodiments, the cooling section 2 includes an inner plate 25 and an outer plate 26, with the outer plate 26 disposed outside the inner plate 25, and the inner plate 25 and the outer plate 26 forming a liquid cooling channel 200.

[0062] For example, the inner plate 25 is made of stainless steel, the outer plate body 261 is made of stainless steel, and the inner plate 25 and the outer plate 26 are connected by vacuum brazing to form a liquid cooling channel 200. Stainless steel has good thermal conductivity and good high temperature resistance and corrosion resistance. The fact that the inner plate 25 and the outer plate 26 are made of stainless steel is beneficial to improving the reliability of the tube furnace 10.

[0063] By designing the cooling section 2 to include an inner plate 25 and an outer plate 26, with the inner plate 25 and the outer plate 26 forming a liquid cooling channel 200, the structure of the cooling section 2 is simple and easy to process and manufacture.

[0064] In some embodiments, such as Figure 4 , Figure 5 , Figure 7 and Figure 8 As shown, there is a gap between the inner plate 25 and the outer plate 26. The edges of the inner plate 25 and the outer plate 26 are connected to form a cavity. A partition 233 is provided in the cavity. The partition 233 divides the cavity to form a liquid cooling channel 200 extending along a serpentine path.

[0065] For example, the edges of the inner plate 25 and the outer plate 26 are welded to form a cavity, and the inner plate 25 and the outer plate 26 are connected at the cavity by multiple welds, which form a partition 233.

[0066] By setting the liquid cooling channel 200 to extend along a serpentine path, it is not only beneficial to increase the heat exchange area of ​​the cooling section 2, but also beneficial to reduce the flow resistance of the coolant, thereby further improving the cooling and heat dissipation efficiency of the tubular furnace 10.

[0067] In some embodiments, such as Figures 4 to 8 As shown, the inner plate 25 has a first edge and a second edge arranged opposite to each other along the circumference of the furnace body, and the outer plate 26 has a third edge and a fourth edge arranged opposite to each other along the circumference of the furnace body. Figure 5 , Figure 7 and Figure 8 As shown, the first edge and the third edge connect to form the first side 231, and the second edge and the fourth edge connect to form the second side 232. The partition 233 extends circumferentially along the furnace body. In two adjacent partitions 233, one end of one partition 233 extends to the first side 231, and the other end is spaced from the second side 232. The other partition 233 extends to the second side 232, and the other end is spaced from the first side 231, so as to divide the cavity to form a liquid cooling channel 200 extending along a serpentine path.

[0068] For example, the first edge is welded to the third edge, and the second edge is welded to the fourth edge. The inner plate 25 and the outer plate 26 are welded together by multiple welds, forming a partition 233, which extend circumferentially along the furnace body. Of two adjacent welds, one is the first weld and the other is the second weld. One end of the first weld extends to the first side 231 to separate the portion of the cavity located on both sides of the first weld, and the other end of the first weld has a gap between it and the second side 232 to connect the portion of the cavity located on both sides of the first weld. One end of the second weld extends to the second side 232 to separate the portion of the cavity located on both sides of the second weld, and the other end of the second weld has a gap between it and the first side 231 to connect the portion of the cavity located on both sides of the second weld. Thus, multiple welds divide the cavity into liquid-cooled channels 200 extending along a serpentine path.

[0069] By designing the inner plate 25, outer plate 26 and partition 233 as described above, it is convenient to form a liquid cooling channel 200 extending along a serpentine path between the inner plate 25 and outer plate 26, thereby facilitating the processing and manufacturing of the tube furnace 10 and helping to reduce the cost of the tube furnace 10.

[0070] like Figure 5 , Figure 7 and Figure 8 As shown, the cooling section 2 has multiple connection points 234 at the liquid cooling channel 200, with adjacent connection points 234 spaced apart, and the connection points 234 connect the inner plate 25 and the outer plate 26.

[0071] For example, the inner panel 25 and the outer panel 26 are welded together by multiple welding points, each welding point forming a connection point 234.

[0072] By setting multiple connection points 234, it is beneficial to increase the connection area between the inner plate 25 and the outer plate 26, increase the connection reliability between the inner plate 25 and the outer plate 26, and improve the reliability of the cooling section 2.

[0073] like Figures 2 to 8 As shown, along the length of the furnace body, the liquid inlet 21 and the liquid outlet 22 are respectively located on opposite sides of the cooling section 2.

[0074] For example, the cooling section 2 includes a first end and a second end arranged opposite to each other along the length of the furnace body. The first end is located near the furnace opening 11, and the second end is located near the furnace temperature. The liquid inlet 21 is located near the first end and communicates with the head end of the liquid cooling channel 200, and the liquid outlet 22 is located near the second end and communicates with the tail end of the liquid cooling channel 200. For example, the manufacturing method of cooling section 2 is as follows: First, the inner plate 25 and the outer plate 26 are welded together around their perimeters to form a cavity between the inner plate 25 and the outer plate 26; then, multiple connection points 234 are selected, and the inner plate 25 and the outer plate 26 are welded together at the connection points 234 to form welding points, and the inner plate 25 and the outer plate 26 are welded together at the locations where a partition 233 needs to be formed, so that the coolant cannot pass through the partition 233; then, high-pressure gas is introduced into the liquid inlet 21, and the unwelded parts of the outer plate 26 will be subjected to pressure and expand outward, causing bubbles to form in the unwelded parts of the outer plate 26, thereby forming a liquid cooling channel 200 between the inner plate 25 and the outer plate 26.

[0075] Figure 9 The image shown is a cross-sectional view of the outer plate 26 of a tubular furnace 10 provided in an embodiment of this application.

[0076] In some embodiments, such as Figure 9 As shown, the outer panel 26 includes an outer panel body 261 and an insulation layer 262, with the insulation layer 262 disposed on the inner side of the outer panel body 261.

[0077] For example, the insulation layer 262 includes insulation cotton.

[0078] By providing an insulation layer 262 on the inner side of the outer panel 26, the heat conduction of the coolant to the outer panel body 261 can be reduced, which helps to lower the temperature of the outer panel body 261. This further reduces the heat conducted from the furnace body to the interior, and further reduces the cost of processes performed in the tube furnace 10.

[0079] Furthermore, by providing an insulation layer 262 on the inner side of the outer plate 26, heat transfer between the coolant and the outer plate body 261 is reduced. This also prevents condensation from forming on the outer plate 26 when the tubular furnace 10 is not operating and the coolant temperature is low, thus avoiding corrosion of the outer plate 26 due to excessively low temperature of the outer plate body 261. Therefore, the reliability of the tubular furnace 10 can be further improved.

[0080] In some embodiments, such as Figure 9 As shown, the outer panel 26 also includes a hydrophobic layer 263, which is disposed on the outside of the outer panel body 261.

[0081] For example, the hydrophobic layer 263 is a nano-hydrophobic coating.

[0082] By providing a hydrophobic layer 263 on the outer side of the outer plate body 261, the problem of condensation on the outer plate 26 due to excessively low temperature when the tubular furnace 10 is not in operation can be avoided, thus preventing corrosion of the outer plate 26. This further improves the reliability of the tubular furnace 10.

[0083] In some embodiments, each cooling section 2 is provided with a flow sensor, which is used to detect the flow rate of coolant in the cooling section 2.

[0084] By setting up a flow sensor, the flow rate of the coolant in the cooling section 2 can be easily obtained, allowing operators to adjust the flow rate of the coolant to the target value as needed, which helps to improve the ease of use of the tubular furnace 10.

[0085] The processing equipment provided in this embodiment includes a cabinet, a tubular furnace 10, and a furnace door. The tubular furnace 10 is any of the tubular furnaces described in the above embodiments. Both the tubular furnace 10 and the furnace door are housed within the cabinet. The furnace door is located at the furnace opening 11 and is used to close or open the furnace opening 11.

[0086] For example, the cabinet has multiple placement positions, each holding a tubular furnace 10. The top of the cabinet has an exhaust port for discharging hot air from inside the cabinet. The exhaust port is connected to a cleanroom air conditioner for cooling the hot air.

[0087] By setting a cooling section 2 outside the tube furnace 10, the heat conducted from the furnace body to the cabinet can be reduced, thereby lowering the temperature of the hot air discharged from the exhaust port, reducing the load on the clean air conditioning system, and reducing the amount of clean air introduced into the room, thus reducing the cost of the tube furnace 10 during the process.

[0088] In some embodiments, the cabinet is provided with a door for opening or closing the cabinet. The processing equipment also includes a temperature detection device, a door opening mechanism, and a controller. The temperature detection device is located on the inside of the door and is used to detect the temperature inside the cabinet. The door opening mechanism is used to control the opening or closing of the furnace door. Both the door opening mechanism and the temperature detection device are signal-connected to the controller to control the door opening mechanism to close the furnace door when the temperature inside the cabinet is greater than or equal to a preset temperature.

[0089] For example, the temperature detection device can be a temperature sensor, such as an infrared sensor. The preset temperature can be 45°C. The door opening mechanism is the same as the door opening mechanism of the tube furnace 10 in the related art, and will not be described in detail in this application.

[0090] When operators need to inspect the tubular furnace 10, they must open the cabinet door. A temperature detection device installed on the inside of the door monitors the internal temperature, allowing operators to easily obtain this information and prevent burns from excessively high temperatures. Furthermore, by controlling the door opening mechanism to close the furnace door when the internal temperature exceeds or equals a preset temperature, the risk of the furnace opening door and releasing heat into the cabinet—which could further increase the internal temperature and the risk of burns—is prevented. Therefore, the safety of the processing equipment is effectively improved, and the risk of burns to operators is reduced.

[0091] In addition, when the flow sensor detects that the coolant flow is zero and the temperature sensor detects that the temperature inside the cabinet exceeds the preset value, it can be determined that the coolant is blocked, which prevents the tube furnace 10 from being effectively cooled and dissipated. In this case, the processing equipment needs to be repaired.

[0092] The tubular furnace 10 and processing equipment provided in this application, by setting a cooling section 2 on the outside of the tubular furnace 10, can effectively reduce the external temperature of the tubular furnace 10, thereby reducing the cost of processing in the tubular furnace 10, shortening the process cycle, and saving up to 180,000 yuan per unit in electricity and gas purification costs annually. Furthermore, the external wall temperature of the tubular furnace 10 can be controlled within a preset range, reducing the risk of burns caused by excessively high external wall temperatures. By setting multiple cooling sections 2, different parts of the furnace body can be cooled differently according to requirements, allowing for precise control of the cooling rate of different parts of the furnace body.

[0093] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not restrict the application from being implemented using the specific details described above.

[0094] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “featuring,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0095] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0096] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0097] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A tubular furnace, characterized in that, The furnace includes a furnace body, with a furnace opening at one end along its length. Multiple cooling sections are provided on the outside of the furnace body, and the multiple cooling sections are arranged sequentially along the length of the furnace body. Each cooling section is provided with a liquid cooling channel, a liquid inlet, and a liquid outlet, and the liquid inlet and the liquid outlet are both connected to the liquid cooling channel.

2. The tubular furnace according to claim 1, characterized in that, The cooling section includes a furnace opening section, a middle section, and a furnace tail section. In the length direction of the furnace body, the furnace opening section is located close to the furnace opening, the furnace tail section is located away from the furnace opening, and the middle section is located between the furnace opening section and the furnace tail section.

3. The tubular furnace according to claim 2, characterized in that, The furnace body has a process chamber, the furnace opening is connected to the process chamber, the process chamber includes a process section, the process section is used to accommodate the product to be processed, and the middle section is provided corresponding to the process section.

4. The tubular furnace according to claim 1, characterized in that, The furnace body includes a furnace body and multiple cooling water jackets. The cooling water jackets are fitted onto the outside of the furnace body, and each cooling water jacket forms a cooling section.

5. The tubular furnace according to claim 4, characterized in that, The cooling water jacket includes a jacket body and a connecting assembly. The jacket body has a first side and a second side that are arranged opposite to each other along the circumference of the furnace body. The jacket body is fitted over the outside of the furnace body body. The first side and the second side are detachably connected by the connecting assembly.

6. The tubular furnace according to claim 5, characterized in that, The first side is provided with a first connecting ear, and the second side is provided with a second connecting ear. The first connecting ear is provided with a first connecting hole, and the second connecting ear is provided with a second connecting hole. The connecting assembly includes a pull rod, a nut, and an elastic element. The pull rod passes through the first connecting hole and the second connecting hole and is connected to the nut. The elastic element is sleeved on the outside of the pull rod and is disposed between the nut and the second connecting lug.

7. The tubular furnace according to any one of claims 1-4, characterized in that, The cooling section includes an inner plate and an outer plate, the outer plate being disposed outside the inner plate, and the inner plate and the outer plate forming the liquid cooling channel; the outer plate includes: Outer panel body; A thermal insulation layer and / or a hydrophobic layer, wherein the thermal insulation layer is disposed on the inner side of the outer panel body and the hydrophobic layer is disposed on the outer side of the outer panel body.

8. The tubular furnace according to claim 7, characterized in that, There is a gap between the inner plate and the outer plate, and the edges of the inner plate and the outer plate are connected to form a cavity. A partition is provided in the cavity, and the partition divides the cavity to form a liquid cooling channel extending along a serpentine path.

9. The tubular furnace according to claim 8, characterized in that, The inner plate has a first edge and a second edge arranged opposite to each other along the circumference of the furnace body, and the outer plate has a third edge and a fourth edge arranged opposite to each other along the circumference of the furnace body. The first edge and the third edge are connected to form a first side edge, and the second edge and the fourth edge are connected to form a second side edge. The partition extends along the circumference of the furnace body. In two adjacent partitions, one end of one partition extends to the first side and the other end is spaced from the second side, and one end of the other partition extends to the second side and the other end is spaced from the first side, so as to divide the cavity into liquid cooling channels extending along a serpentine path.

10. The tubular furnace according to claim 8, characterized in that, The cooling section has multiple connection points at the liquid cooling channel, with adjacent connection points spaced apart, and the connection points connect the inner plate and the outer plate.

11. A processing equipment, characterized in that, include: Cabinet; A tubular furnace, wherein the tubular furnace is the tubular furnace according to any one of claims 1-10, and the tubular furnace is disposed in the cabinet; The furnace door is located inside the cabinet and at the furnace opening. The furnace door is used to close or open the furnace opening.

12. The processing equipment according to claim 11, characterized in that, The cabinet is equipped with a cabinet door, which is used to open or close the cabinet. The processing equipment further includes: A temperature detection device is installed on the inside of the cabinet door and is used to detect the temperature inside the cabinet. A door opening mechanism, which is used to control the opening or closing of the furnace door; The controller, the door opening mechanism and the temperature detection device are both connected to the controller signal to control the door opening mechanism to close the furnace door when the temperature inside the cabinet is greater than or equal to a preset temperature.

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