A high-vacuum tube furnace with high temperature and pressure resistance
Patent Information
- Application Number
- CN202522065804.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-25
- Publication Date
- 2026-09-29
- Estimated Expiration
- 2035-09-25
AI Technical Summary
[0004]本实用新型的目的在于提供一种耐高温高压的高真空管式炉，以解决上述背景技术中提出高真空管式炉使用时整体密封性不够高，耐高温高压性能有待进一步提高，以及保温性能不够好的问题
[0013]与现有技术相比，本实用新型的有益效果是：该耐高温高压的高真空管式炉不仅使得高真空管式炉使用时的整体气密性更高，在使用过程中不会产生漏气而影响对传感器本体的加工效果的现象，使得高真空管式炉使用时可以达到减小上炉腔、下炉腔和炉管内部的压力差的作用，增加炉管的使用寿命，提高炉管使用时的真空度，而且使得高真空管式炉使用时能够提高能源的利用率，减少热量散失，提高高真空管式炉使用时的热效率，进一步延长了高真空管式炉的使用寿命；
Smart Images
Figure CN224815400U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of high vacuum tube furnace technology, specifically a high vacuum tube furnace resistant to high temperature and high pressure. Background Technology
[0002] Vacuum atmosphere tube furnaces are commonly used laboratory instruments for vacuum sintering experiments. The vacuum level of a vacuum atmosphere tube furnace mainly depends on the density of the furnace tube material and the sealing technology of the furnace tube. In the sensor manufacturing process, high vacuum tube furnaces are a key piece of equipment, mainly used to provide a high-purity and controlled heating environment to ensure the performance and reliability of the sensors. However, the vacuum level of existing high vacuum tube furnaces often fails to meet the expected results during use. To meet market needs, a high-temperature and high-pressure resistant high vacuum tube furnace is required.
[0003] Existing high-vacuum tube furnaces suffer from insufficient overall sealing, leading to reduced airtightness and potential leakage that affects the processing of sensor bodies. Furthermore, their high-temperature and high-pressure resistance needs improvement, shortening the furnace tube's lifespan and reducing vacuum levels. Additionally, inadequate insulation reduces energy efficiency, causing heat loss and lowering thermal efficiency, further shortening the furnace's lifespan. Utility Model Content
[0004] The purpose of this invention is to provide a high-vacuum tube furnace that is resistant to high temperature and high pressure, in order to solve the problems mentioned in the background art, such as insufficient overall sealing, the need to further improve the high temperature and high pressure resistance, and the inadequate heat preservation performance of the high-vacuum tube furnace.
[0005] To achieve the above objectives, this utility model provides the following technical solution: a high-vacuum tube furnace resistant to high temperature and high pressure, comprising a base, a controller mounted on the surface of the base, a lower furnace box mounted on the surface of the top of the base, an upper furnace box mounted on the surface of the lower furnace box, an upper furnace cavity opened inside the upper furnace box, a lower furnace cavity opened inside the lower furnace box, a furnace tube mounted on the inner wall of the lower furnace cavity, an inlet pipe mounted on one side of the furnace tube by screws, the inlet pipe communicating with the interior of the furnace tube, a tube body mounted on the surface of the inlet pipe, an outlet pipe mounted on the side of the furnace tube away from the inlet pipe by screws, the outlet pipe communicating with the interior of the furnace tube, a fixing pipe mounted on the surface of the outlet pipe, a high-temperature and high-pressure resistant mechanism provided on the surface of the tube body and the fixing pipe, a high-sealing mechanism provided on the inner walls of the furnace tube, the outlet pipe and the inlet pipe, and a high-efficiency heat preservation mechanism provided on the inner wall of the upper furnace cavity.
[0006] Preferably, the surfaces of the upper furnace box and the lower furnace box are rotatably fitted together. Each surface of the upper furnace box is provided with a buckle, which rotatably fits with the surface of the upper furnace box. Each surface of the lower furnace box is equipped with a locking post, which engages with the surface of the buckle. The interiors of the lower furnace cavity and the upper furnace cavity are connected. A support seat is installed on the inner wall of the lower furnace cavity. Fixed covers are installed on both sides of the lower furnace box and the upper furnace box. One end of the furnace tube passes sequentially through the lower furnace box, the upper furnace box, and the fixed cover, extending to the outside of the fixed cover. One end of the tube extends into the interior of the air inlet pipe and connects with the interior of the air inlet pipe. An assembly tube is installed on the surface of the tube. A flow meter is installed on one side of the furnace box. The flow meter is connected to the inside of the assembly tube through a pipe. Resistance wires are installed on the inner walls of both the upper and lower furnace chambers. The input end of the resistance wire is electrically connected to the output end of the controller. A sealing head is installed inside each furnace tube. A sensor body is placed at the center of the furnace tube. One end of the fixed tube extends into the interior of the gas outlet tube and is connected to the interior of the gas outlet tube. Needle valves are installed on the surface of both the tube body and the fixed tube. A gas outlet is installed on the surface of the fixed tube and is connected to the interior of the fixed tube. A baffle valve is installed on the surface of the fixed tube, and a connecting pipe is installed on the surface of the baffle valve.
[0007] Preferably, the high-temperature and high-pressure resistant mechanism consists of a pressure sensor, a temperature sensor, a resistance vacuum gauge, and a mounting base. The mounting base is fitted onto the surface of the fixed tube, and the resistance vacuum gauge is mounted on the surface of the mounting base. The resistance vacuum gauge is connected to the interior of the fixed tube, and the output end of the resistance vacuum gauge is electrically connected to the input end of the controller.
[0008] Preferably, a pressure sensor is fitted on the surface of the tube, and the output end of the pressure sensor is electrically connected to the input end of the controller. A temperature sensor is installed on the inner wall of the upper furnace cavity, and the output end of the temperature sensor is electrically connected to the input end of the controller.
[0009] Preferably, the high sealing mechanism consists of a rubber sealing ring, an annular rubber ring, a rubber clip, and a fixing groove. The inner walls on both sides of the furnace tube are equipped with annular rubber rings for sealing between the furnace tube and the outlet pipe, and between the furnace tube and the inlet pipe. The surfaces of the annular rubber rings are in contact with the inner walls of the outlet pipe and the inlet pipe, respectively.
[0010] Preferably, the inner walls of both the exhaust pipe and the inlet pipe are equipped with rubber sealing rings, the inner walls of the rubber sealing rings are in contact with the surface of the furnace tube, the surfaces of both the exhaust pipe and the inlet pipe are equipped with rubber clips, and the inner walls of the furnace tube are provided with fixing grooves, the fixing grooves and the surfaces of the rubber clips engaging with each other.
[0011] Preferably, the high-efficiency heat preservation mechanism consists of a first heat preservation cotton layer, a second heat preservation cotton layer, a heat preservation board, and an installation clip. The inner wall of the upper furnace cavity is provided with a heat preservation board, and the surface of the heat preservation board is covered with a second heat preservation cotton layer.
[0012] Preferably, the first insulation layer is installed on the surface of the second insulation layer away from the insulation board. The first and second insulation layers are made of insulation cotton. The inner wall of the insulation board is equipped with mounting blocks, which are engaged with the inner wall of the upper furnace box.
[0013] Compared with the prior art, the beneficial effects of this utility model are: the high-temperature and high-pressure resistant high-vacuum tube furnace not only makes the overall airtightness of the high-vacuum tube furnace higher during use, and prevents air leakage from affecting the processing effect of the sensor body during use, but also reduces the pressure difference between the upper furnace chamber, lower furnace chamber and furnace tube, increases the service life of the furnace tube, and improves the vacuum degree of the furnace tube during use. In addition, it improves the energy utilization rate, reduces heat loss, and improves the thermal efficiency of the high-vacuum tube furnace during use, further extending the service life of the high-vacuum tube furnace.
[0014] 1. By setting a high-sealing mechanism, the rubber clips on the surface of the exhaust pipe and the inlet pipe automatically engage with the corresponding fixed slots. The annular rubber rings on the inner walls of both ends of the furnace tube move to contact the inner walls of the inlet pipe and the exhaust pipe, respectively. Under the action of the annular rubber rings, the sealing effect between the furnace tube and the inlet pipe, and between the furnace tube and the exhaust pipe can be improved. The rubber sealing rings on the inner walls of the exhaust pipe and the inlet pipe move to fit against the surface of the furnace tube, realizing the high-sealing function of the high-vacuum tube furnace. This makes the overall airtightness of the high-vacuum tube furnace higher during use, and there will be no leakage during use that would affect the processing effect of the sensor body.
[0015] 2. By incorporating a high-temperature and high-pressure resistant mechanism, the furnace tube and lower furnace chamber are positioned between the upper and lower furnace chambers. This configuration allows for vacuuming of the furnace tube while simultaneously reducing the pressure difference between the upper and lower furnace chambers and the furnace tube itself. When gas enters the tube, the pressure sensor monitors the internal pressure in real time, and the temperature sensor monitors the temperatures of the upper and lower furnace chambers, enabling precise temperature control. Furthermore, the resistance vacuum gauge monitors the vacuum level inside the furnace tube. This achieves the high-temperature and high-pressure resistance of the high-vacuum tube furnace, thereby reducing the pressure difference between the upper and lower furnace chambers and the furnace tube, increasing the furnace tube's lifespan, and improving the vacuum level during operation.
[0016] 3. By incorporating a high-efficiency insulation mechanism, the insulation board, the second insulation layer, and the first insulation layer are placed inside the upper furnace cavity. This allows the insulation board to automatically engage with the corresponding mounting clips on the inner wall of the upper furnace cavity. The insulation board, the second insulation layer, and the first insulation layer are then installed on the inner wall of the upper furnace cavity. The combined action of the first and second insulation layers provides insulation for both the upper and lower furnace cavities. Furthermore, the insulation board further enhances the insulation effect of the upper and lower furnace cavities, achieving high-efficiency insulation for the high-vacuum tube furnace. This improves energy utilization, reduces heat loss, increases thermal efficiency, and extends the service life of the high-vacuum tube furnace. Attached Figure Description
[0017] Figure 1 This is a three-dimensional structural diagram of the present invention;
[0018] Figure 2 This is a schematic diagram of the front cross-sectional structure of this utility model;
[0019] Figure 3 For the present utility model Figure 2 Enlarged structural diagram at point A in the middle;
[0020] Figure 4For the present utility model Figure 2 Enlarged structural diagram of a medium-to-high sealing mechanism;
[0021] Figure 5 For the present utility model Figure 2 Enlarged structural diagram of a medium- and high-efficiency thermal insulation mechanism.
[0022] In the diagram: 1. Base; 11. Controller; 101. Lower furnace box; 102. Upper furnace box; 103. Buckle; 104. Locking post; 105. Flow meter; 106. Sealing head; 107. Assembly pipe; 108. Pipe body; 109. Support base; 110. Furnace tube; 111. Sensor body; 112. Upper furnace chamber; 113. Baffle valve; 114. Connecting pipe; 115. Lower furnace chamber; 116. Fixing cover; 117. Resistance wire; 118. Gas outlet pipe; 11 9. Fixed tube; 120. Needle valve; 121. Air outlet; 122. Air inlet pipe; 2. High temperature and high pressure resistant mechanism; 21. Pressure sensor; 22. Temperature sensor; 23. Resistance vacuum gauge; 24. Mounting base; 3. High sealing mechanism; 31. Rubber sealing ring; 32. Annular rubber ring; 33. Rubber clip; 34. Fixing slot; 4. High efficiency insulation mechanism; 41. First insulation layer; 42. Second insulation layer; 43. Insulation board; 44. Mounting clip. Detailed Implementation
[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, not all embodiments. In addition, the terms "first", "second", "third", "upper", "lower", "left", "right", etc. are used for descriptive purposes only and should not be construed as indicating or implying relative importance. At the same time, in the description of the present utility model, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present utility model.
[0024] This utility model provides a high-temperature and high-pressure resistant high-vacuum tube furnace with the following structure: Figure 1 , Figure 2 and Figure 3As shown, the system includes a base 1, on which a controller 11 (e.g., LA series) is mounted. A lower furnace box 101 is mounted on the top surface of the base 1. An upper furnace box 102 is mounted on the surface of the lower furnace box 101, and the surfaces of the upper furnace box 102 and lower furnace box 101 are rotatably fitted together. Each surface of the upper furnace box 102 is provided with a latch 103, which rotatably engages with the surface of the upper furnace box 102. Each surface of the lower furnace box 101 is equipped with a locking post 104, which engages with the surfaces of the latches 103. The upper furnace box 102 has an upper furnace cavity 112 inside. The furnace 1 has a lower furnace chamber 115, which is connected to the interior of the upper furnace chamber 112. Support seats 109 are installed on the inner wall of the lower furnace chamber 115, and furnace tubes 110 are installed on the inner wall of the lower furnace chamber 115. Fixing covers 116 are installed on both sides of the lower furnace chamber 101 and the upper furnace chamber 102. One end of the furnace tube 110 passes through the lower furnace chamber 101, the upper furnace chamber 102, and the fixing cover 116, extending to the outside of the fixing cover 116. An air inlet pipe 122 is installed on one side of the furnace tube 110 via screws. The air inlet pipe 122 is connected to the interior of the furnace tube 110, and a pipe body 108 is installed on the surface of the air inlet pipe 122. One end of the body 108 extends into the interior of the air inlet pipe 122 and communicates with the interior of the air inlet pipe 122. An assembly pipe 107 is installed on the surface of the body 108. A flow meter 105 is installed on one side of the lower furnace box 101. The flow meter 105 is connected to the interior of the assembly pipe 107 through a pipe. A resistance wire 117 is installed on the inner wall of both the upper furnace chamber 112 and the lower furnace chamber 115. The resistance wire 117 can be of the CR series. The input terminal of the resistance wire 117 is electrically connected to the output terminal of the controller 11. A sealing head 106 is provided inside the furnace tube 110. A sensor body 11 is placed at the center of the interior of the furnace tube 110. 1. A gas outlet pipe 118 is installed on the surface of the furnace tube 110 away from the gas inlet pipe 122 by screws. The gas outlet pipe 118 is connected to the interior of the furnace tube 110. A fixing pipe 119 is installed on the surface of the gas outlet pipe 118. One end of the fixing pipe 119 extends into the interior of the gas outlet pipe 118 and is connected to the interior of the gas outlet pipe 118. A needle valve 120 is installed on the surface of both the tube body 108 and the fixing pipe 119. A gas outlet 121 is installed on the surface of the fixing pipe 119 and is connected to the interior of the fixing pipe 119. A baffle valve 113 is installed on the surface of the fixing pipe 119, and a connecting pipe 114 is installed on the surface of the baffle valve 113.
[0025] Furthermore, such as Figure 2 and Figure 3As shown, the surfaces of the tube body 108 and the fixed tube 119 are provided with a high-temperature and high-pressure resistant mechanism 2. The high-temperature and high-pressure resistant mechanism 2 consists of a pressure sensor 21, a temperature sensor 22, a resistance vacuum gauge 23, and a mounting base 24. The surface of the fixed tube 119 is fitted with a mounting base 24, and the surface of the mounting base 24 is fitted with a resistance vacuum gauge 23. The resistance vacuum gauge 23 can be of the ZJ series. The resistance vacuum gauge 23 is connected to the interior of the fixed tube 119. The output end of the resistance vacuum gauge 23 is electrically connected to the input end of the controller 11. The surface of the tube body 108 is fitted with a pressure sensor 21. The pressure sensor 21 can be of the RS series. The output end of the pressure sensor 21 is electrically connected to the input end of the controller 11. The inner wall of the upper furnace cavity 112 is fitted with a temperature sensor 22. The temperature sensor 22 can be of the PT series. The output end of the temperature sensor 22 is electrically connected to the input end of the controller 11.
[0026] During implementation, when gas enters the interior of tube 108, the pressure inside tube 108 can be monitored in real time by pressure sensor 21, and the result is displayed on the surface of controller 11. The temperature inside upper furnace chamber 112 and lower furnace chamber 115 can be monitored in real time by temperature sensor 22, and the temperature can be precisely controlled. The vacuum degree inside furnace tube 110 can be monitored by resistance vacuum gauge 23, and the monitoring result is displayed on the surface of controller 11, so that furnace tube 110 can withstand higher temperatures and higher pressures during use, thus realizing the function of high vacuum tube furnace with high temperature and high pressure resistance.
[0027] Furthermore, such as Figure 2 and Figure 4 As shown, the inner walls of the furnace tube 110, the exhaust pipe 118, and the intake pipe 122 are equipped with a high-sealing mechanism 3. The high-sealing mechanism 3 consists of a rubber sealing ring 31, an annular rubber ring 32, a rubber clamp 33, and a fixing groove 34. The inner walls on both sides of the furnace tube 110 are equipped with annular rubber rings 32 for sealing between the furnace tube 110 and the exhaust pipe 118, and between the furnace tube 110 and the intake pipe 122. The surfaces of the annular rubber rings 32 are in contact with the inner walls of the exhaust pipe 118 and the intake pipe 122, respectively. The inner walls of the exhaust pipe 118 and the intake pipe 122 are equipped with rubber sealing rings 31, and the inner walls of the rubber sealing rings 31 are in contact with the surface of the furnace tube 110. The surfaces of the exhaust pipe 118 and the intake pipe 122 are equipped with rubber clamps 33. The inner walls of the furnace tube 110 are provided with fixing grooves 34, and the fixing grooves 34 and the surfaces of the rubber clamps 33 are engaged with each other.
[0028] During implementation, the rubber clips 33 on the surfaces of the exhaust pipe 118 and the inlet pipe 122 automatically engage with the corresponding fixing slots 34. The annular rubber rings 32 on the inner walls of both ends of the furnace tube 110 move to contact the inner walls of the inlet pipe 122 and the exhaust pipe 118, respectively. Under the action of the annular rubber rings 32, the sealing effect between the furnace tube 110 and the inlet pipe 122, and between the furnace tube 110 and the exhaust pipe 118 can be improved. At this time, the rubber sealing rings 31 on the inner walls of the exhaust pipe 118 and the inlet pipe 122 move to fit against the surface of the furnace tube 110, thereby further ensuring the sealing performance of the high vacuum tube furnace and realizing the high sealing function of the high vacuum tube furnace.
[0029] Furthermore, such as Figure 2 and Figure 5 As shown, the inner wall of the upper furnace chamber 112 is provided with a high-efficiency heat preservation mechanism 4. The high-efficiency heat preservation mechanism 4 consists of a first heat preservation cotton layer 41, a second heat preservation cotton layer 42, a heat preservation board 43, and an installation block 44. The inner wall of the upper furnace chamber 112 is provided with a heat preservation board 43. The surface of the heat preservation board 43 is equipped with a second heat preservation cotton layer 42. The surface of the second heat preservation cotton layer 42 away from the heat preservation board 43 is equipped with a first heat preservation cotton layer 41. The first heat preservation cotton layer 41 and the second heat preservation cotton layer 42 are made of heat preservation cotton. The inner wall of the heat preservation board 43 is equipped with an installation block 44. The installation block 44 is engaged with the inner wall of the upper furnace chamber 102.
[0030] In practice, the insulation board 43, the second insulation layer 42, and the first insulation layer 41 are placed inside the upper furnace cavity 112, so that the insulation board 43 drives the mounting block 44 to automatically lock onto the inner wall of the corresponding upper furnace box 102. The insulation board 43, the second insulation layer 42, and the first insulation layer 41 are installed on the inner wall of the upper furnace cavity 112. Under the combined action of the first insulation layer 41 and the second insulation layer 42, the interior of the upper furnace cavity 112 and the lower furnace cavity 115 can be insulated. Under the action of the insulation board 43, the insulation effect inside the upper furnace cavity 112 and the lower furnace cavity 115 can be further improved, so that the resistance wire 117 inside the upper furnace cavity 112 and the lower furnace cavity 115 will not lose heat when heating, so as to achieve the high-efficiency insulation function of the high vacuum tube furnace.
[0031] Working principle: In use, first place the base 1 in the designated position. The user pulls the buckle 103 to move it away from the surface of the locking post 104. Then, the user loosens the screws on the surface of the furnace tube 110 and removes the exhaust pipe 118 from the surface of the furnace tube 110. Next, the sensor body 111 to be processed is placed inside the furnace tube 110. The external furnace hook is used to push the sensor body 111 to the center of the furnace tube 110. Then, the sealing head 106 is placed inside the furnace tube 110. Finally, the exhaust pipe 118 is installed on the furnace tube 110 by tightening the screws on the surface of the furnace tube 110. Next, the user loosens the screws on the other side of the furnace tube 110, removes the air inlet pipe 122 from the surface of the furnace tube 110, inserts the sealing head 106 into the inside of the furnace tube 110, and then assembles the air inlet pipe 122 onto the surface of the furnace tube 110. Then, the user pulls the upper furnace box 102 so that it covers the surface of the lower furnace box 101, and then pulls the buckle 103 so that it engages with the surface of the locking post 104, thereby fixing the upper furnace box 102 onto the surface of the lower furnace box 101. By operating the controller 11 and setting the working program of the base 1, the user opens the fixing pipe... The needle valve 120 on the surface of the furnace tube 119 is connected to the connecting pipe 114, which is then connected to an external molecular pump unit. The molecular pump unit extracts gas molecules from inside the furnace tube 110, achieving an extremely high vacuum inside the furnace tube 110. When the vacuum inside the furnace tube 110 reaches a set value, the vacuuming stops, and the controller 11 controls the resistance wire 117 to work, heating the interior of the upper furnace chamber 112 and the lower furnace chamber 115. Since the resistance wire 117 is arranged around the surface of the furnace tube 110, it can heat the surface of the furnace tube 110, allowing the sensor body 111 to move within the furnace tube 110. After thorough treatment in the internal temperature environment of furnace tube 10, and after the heat preservation time, the internal temperature of the upper furnace chamber 112 and the lower furnace chamber 115 is cooled down. Then, the user connects the assembly tube 107 to the external pipe and manually opens the needle valve 120 on the surface of the tube body 108. Gas enters the interior of the furnace tube 110, allowing the sensor body 111 to work in the inert gas atmosphere inside the furnace tube 110, preventing the sensor body 111 from being oxidized during the cooling process. The flow rate inside the assembly tube 107 is monitored by the flow meter 105, and the monitoring results are displayed on the surface of the controller 11.
[0032] Subsequently, after the user assembles the inlet pipe 122 and the outlet pipe 118 onto the surfaces of both ends of the furnace tube 110 using screws, the rubber clips 33 on the surfaces of the outlet pipe 118 and the inlet pipe 122 automatically snap into the corresponding fixing slots 34. The annular rubber rings 32 on the inner walls of both ends of the furnace tube 110 move to contact the inner walls of the inlet pipe 122 and the outlet pipe 118, respectively. Under the action of the annular rubber rings 32, the sealing effect between the furnace tube 110 and the inlet pipe 122, and between the furnace tube 110 and the outlet pipe 118 can be improved. At this time, the rubber sealing rings 31 on the inner walls of the outlet pipe 118 and the inlet pipe 122 move to fit against the surface of the furnace tube 110, thereby further ensuring the sealing performance of the high vacuum tube furnace and achieving the high sealing function of the high vacuum tube furnace. This makes the overall airtightness of the high vacuum tube furnace higher during use, and there will be no leakage during use that would affect the processing effect of the sensor body 111.
[0033] Subsequently, the furnace tube 110 and the lower furnace chamber 115 are positioned between the upper furnace chamber 112 and the lower furnace chamber 115. This arrangement, while creating a vacuum inside the furnace tube 110, reduces the pressure difference between the upper furnace chamber 112, the lower furnace chamber 115, and the furnace tube 110, thereby increasing the service life of the furnace tube 110. When gas enters the interior of the tube body 108, the pressure sensor 21 can monitor the pressure inside the tube body 108 in real time and display the result on the surface of the controller 11. The temperature sensor 22 can monitor the pressure inside the upper furnace chamber 112 in real time. The temperature inside the upper furnace chamber 112 and the lower furnace chamber 115 is precisely controlled. Under the action of the resistance vacuum gauge 23, the vacuum degree inside the furnace tube 110 can be monitored. The monitoring results are displayed on the surface of the controller 11, which makes the furnace tube 110 more resistant to high temperature and high pressure during use, so as to realize the function of high vacuum tube furnace to withstand high temperature and high pressure. This allows the high vacuum tube furnace to reduce the pressure difference between the upper furnace chamber 112, the lower furnace chamber 115 and the furnace tube 110 during use, increase the service life of the furnace tube and improve the vacuum degree of the furnace tube 110 during use.
[0034] Subsequently, the insulation board 43, the second insulation layer 42, and the first insulation layer 41 are respectively placed into the interior of the upper furnace cavity 112, so that the insulation board 43 drives the mounting block 44 to automatically engage with the corresponding inner wall of the upper furnace box 102, thus installing the insulation board 43, the second insulation layer 42, and the first insulation layer 41 on the inner wall of the upper furnace cavity 112. Under the combined action of the first insulation layer 41 and the second insulation layer 42, the interior of the upper furnace cavity 112 and the lower furnace cavity 115 can be insulated. The lower furnace can further improve the heat preservation effect inside the upper furnace chamber 112 and the lower furnace chamber 115, so that the resistance wire 117 inside the upper furnace chamber 112 and the lower furnace chamber 115 will not lose heat during heating, thereby achieving the high-efficiency heat preservation function of the high-vacuum tube furnace. This improves the energy utilization rate, reduces heat loss, and increases the thermal efficiency of the high-vacuum tube furnace during use, further extending the service life of the high-vacuum tube furnace and ultimately completing the use of the high-vacuum tube furnace.
[0035] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.
Claims
1. A high-temperature and high-pressure resistant high-vacuum tube furnace, comprising a base (1), characterized in that: A controller (11) is mounted on the surface of the base (1). A lower furnace box (101) is mounted on the surface of the top of the base (1). An upper furnace box (102) is provided on the surface of the lower furnace box (101). An upper furnace chamber (112) is opened inside the upper furnace box (102). A lower furnace chamber (115) is opened inside the lower furnace box (101). A furnace tube (110) is installed on the inner wall of the lower furnace chamber (115). An air inlet pipe (122) is installed on one side of the furnace tube (110) by screws. The air inlet pipe (122) is connected to the inside of the furnace tube (110). 2) The surface of the furnace tube (110) is fitted with a tube body (108). The surface of the furnace tube (110) away from the gas inlet pipe (122) is fitted with a gas outlet pipe (118) by screws. The gas outlet pipe (118) is connected to the interior of the furnace tube (110). The surface of the gas outlet pipe (118) is fitted with a fixing pipe (119). The surfaces of the tube body (108) and the fixing pipe (119) are provided with a high temperature and high pressure resistant mechanism (2). The inner walls of the furnace tube (110), the gas outlet pipe (118) and the gas inlet pipe (122) are provided with a high sealing mechanism (3). The inner wall of the upper furnace cavity (112) is provided with a high efficiency heat preservation mechanism (4).
2. The high-temperature and high-pressure resistant high-vacuum tube furnace according to claim 1, characterized in that: The surfaces of the upper furnace box (102) and the lower furnace box (101) are rotatably fitted together. Each surface of the upper furnace box (102) is provided with a buckle (103), which rotatably fits the surface of the upper furnace box (102). Each surface of the lower furnace box (101) is equipped with a locking post (104), which engages with the surface of the buckle (103). The lower furnace cavity (115) is internally connected to the upper furnace cavity (112), and the inner wall of the lower furnace cavity (115) is equipped with... A support base (109) is provided. Fixing covers (116) are installed on both sides of the lower furnace box (101) and the upper furnace box (102). One end of the furnace tube (110) passes through the lower furnace box (101), the upper furnace box (102), and the fixing cover (116) sequentially, extending to the outside of the fixing cover (116). One end of the tube body (108) extends into the interior of the air inlet pipe (122) and communicates with the interior of the air inlet pipe (122). An assembly tube (107) is installed on the surface of the tube body (108). The lower furnace... A flow meter (105) is installed on one side of the box (101). The flow meter (105) is connected to the interior of the assembly pipe (107) through a pipe. Resistance wires (117) are installed on the inner walls of the upper furnace chamber (112) and the lower furnace chamber (115). The input end of the resistance wire (117) is electrically connected to the output end of the controller (11). A sealing head (106) is provided inside the furnace tube (110). A sensor body (111) is placed at the center of the furnace tube (110). One end of the fixed tube (119) extends into the interior of the air outlet tube (118) and communicates with the interior of the air outlet tube (118). A needle valve (120) is installed on the surface of both the tube body (108) and the fixed tube (119). An air outlet (121) is installed on the surface of the fixed tube (119) and communicates with the interior of the fixed tube (119). A baffle valve (113) is installed on the surface of the fixed tube (119), and a connecting tube (114) is installed on the surface of the baffle valve (113).
3. The high-temperature and high-pressure resistant high-vacuum tube furnace according to claim 1, characterized in that: The high-temperature and high-pressure resistant mechanism (2) consists of a pressure sensor (21), a temperature sensor (22), a resistance vacuum gauge (23), and a mounting base (24). The mounting base (24) is fitted onto the surface of the fixed tube (119), and the resistance vacuum gauge (23) is mounted on the surface of the mounting base (24). The resistance vacuum gauge (23) is connected to the interior of the fixed tube (119), and the output end of the resistance vacuum gauge (23) is electrically connected to the input end of the controller (11).
4. The high-temperature and high-pressure resistant high-vacuum tube furnace according to claim 1, characterized in that: A pressure sensor (21) is fitted on the surface of the tube (108), and the output end of the pressure sensor (21) is electrically connected to the input end of the controller (11). A temperature sensor (22) is installed on the inner wall of the upper furnace cavity (112), and the output end of the temperature sensor (22) is electrically connected to the input end of the controller (11).
5. A high-temperature and high-pressure resistant high-vacuum tube furnace according to claim 1, characterized in that: The high sealing mechanism (3) consists of a rubber sealing ring (31), an annular rubber ring (32), a rubber clip (33), and a fixing groove (34). The inner walls on both sides of the furnace tube (110) are equipped with annular rubber rings (32) for sealing between the furnace tube (110) and the exhaust pipe (118), and between the furnace tube (110) and the intake pipe (122). The surface of the annular rubber ring (32) is in contact with the inner walls of the exhaust pipe (118) and the intake pipe (122), respectively.
6. A high-temperature and high-pressure resistant high-vacuum tube furnace according to claim 1, characterized in that: The inner walls of the exhaust pipe (118) and the inlet pipe (122) are both equipped with rubber sealing rings (31). The inner wall of the rubber sealing rings (31) is in contact with the surface of the furnace tube (110). The surfaces of the exhaust pipe (118) and the inlet pipe (122) are both equipped with rubber clips (33). The inner wall of the furnace tube (110) is provided with fixing grooves (34). The fixing grooves (34) and the surfaces of the rubber clips (33) are engaged with each other.
7. A high-temperature and high-pressure resistant high-vacuum tube furnace according to claim 1, characterized in that: The high-efficiency heat preservation mechanism (4) consists of a first heat preservation cotton layer (41), a second heat preservation cotton layer (42), a heat preservation board (43), and an installation block (44). The inner wall of the upper furnace cavity (112) is provided with a heat preservation board (43), and the surface of the heat preservation board (43) is provided with a second heat preservation cotton layer (42).
8. A high-temperature and high-pressure resistant high-vacuum tube furnace according to claim 7, characterized in that: The second insulation layer (42) has a first insulation layer (41) installed on the surface away from the insulation board (43). The first insulation layer (41) and the second insulation layer (42) are made of insulation cotton. The inner wall of the insulation board (43) is equipped with an installation block (44), and the installation block (44) is engaged with the inner wall of the upper furnace box (102).