Purification vacuum furnace lower composite insulation structure

Abstract

The utility model discloses a kind of purification vacuum furnace lower layer composite heat preservation structure, including inner heat preservation structure, middle layer aerogel layer heat insulation layer and outer heat preservation layer, inner heat preservation structure is fixed in the inboard of middle layer aerogel layer heat insulation layer, middle layer aerogel layer heat insulation layer is fixed in the inboard of outer heat preservation layer, inner heat preservation structure includes: fiber heat preservation layer, nano zirconium oxide coating and passivation molybdenum foil layer, the inboard of fiber heat preservation layer is provided with a plurality of convex points, the outboard of fiber heat preservation layer is fixed with a layer of nano zirconium oxide coating, the outboard of nano zirconium oxide coating is fixed with a layer of passivation molybdenum foil layer, the inboard of middle layer aerogel layer heat insulation layer is provided with honeycomb hole structure. The utility model is designed by inner, middle and outer three layers, adapts different temperature interval, and heat insulation is kept step by step, and the uniformity of heat preservation efficiency and temperature field is greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of purification vacuum furnace technology, and in particular to a composite insulation structure for the lower layer of a purification vacuum furnace. Background Technology

[0002] Purification vacuum furnaces are core equipment used in photovoltaic, semiconductor, and new energy fields for purifying high-purity materials such as graphite, SiC, and battery anode materials. They create a vacuum environment through a vacuum pump and combine it with high-temperature heating to evaporate or react and volatilize impurities in the material. They rely on efficient heat preservation structures to maintain a precise temperature field inside the furnace, reduce energy consumption, and ensure purification purity.

[0003] However, traditional lower layer insulation structures for purification vacuum furnaces often employ a single-layer material design, which has significant shortcomings: the surface of the inner insulation material (such as ordinary carbon felt) is flat, resulting in weak reflection and reheating capabilities of radiant heat within the furnace, easily leading to poor temperature field uniformity (temperature differences often exceeding ±10℃); insulation in the medium and low temperature zones relies on a single fiberboard, which is not optimized for different temperature gradients, further weakening the insulation effect and failing to meet the industry's demand for efficient and stable insulation. Therefore, in response to the above situation, there is an urgent need to develop a composite insulation structure for the lower layer of purification vacuum furnaces that utilizes a three-layer collaborative design (inner, middle, and outer layers) to adapt to different temperature ranges, providing progressive insulation and significantly improving insulation efficiency and temperature field uniformity, in order to overcome the shortcomings in current practical applications and meet current needs. Utility Model Content

[0004] The purpose of this invention is to provide a composite insulation structure for the lower layer of a purification vacuum furnace to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A composite insulation structure for the lower layer of a purification vacuum furnace includes an inner insulation structure, a middle aerogel insulation layer, and an outer insulation layer. The inner insulation structure is fixed inside the middle aerogel insulation layer, and the middle aerogel insulation layer is fixed inside the outer insulation layer. The inner insulation structure includes a fiber insulation layer, a nano-zirconia coating, and a passivated molybdenum foil layer. The inner side of the fiber insulation layer has multiple protrusions, the outer side of the fiber insulation layer is fixed with a nano-zirconia coating, the outer side of the nano-zirconia coating is fixed with a passivated molybdenum foil layer, and the inner side of the middle aerogel insulation layer has a honeycomb structure.

[0007] Preferably, the fiber insulation layer is made of high-density graphite felt or zirconia ceramic fiber felt.

[0008] Preferably, the protrusion is hemispherical.

[0009] Preferably, the middle aerogel insulation layer is made of alumina aerogel.

[0010] Preferably, the outer insulation layer comprises a stainless steel shell and a lightweight aluminum silicate fiberboard, wherein the lightweight aluminum silicate fiberboard is fixed to the inner side of the stainless steel shell.

[0011] Preferably, the stainless steel outer shell is provided with a vacuum insulation cavity.

[0012] The beneficial effects of this invention are as follows: The lower composite insulation structure of this purification vacuum furnace, during use, isolates the high temperature inside the furnace through the fiber insulation layer. Multiple protrusions enhance radiative heat return into the furnace by forming multi-directional reflection channels, and the micro-air gaps between the protrusions weaken heat conduction and convection, thereby improving insulation efficiency and temperature field uniformity. The passivated molybdenum foil layer efficiently reflects radiative heat transferred from the inner layer, forcing heat to flow back into the furnace cavity, reducing radiative heat loss towards the furnace shell, thus improving the insulation effect in the high-temperature zone. The middle aerogel insulation layer, made of alumina aerogel, uses its low thermal conductivity to insulate the medium-temperature zone inside the furnace, reducing heat transfer outwards. Lightweight aluminosilicate fiberboard insulates the low-temperature zone inside the furnace, and the vacuum insulation cavity inside the stainless steel shell provides further insulation, improving the insulation performance of the low-temperature zone and achieving excellent insulation results. In summary, this invention, through the coordinated design of the inner, middle, and outer layers, adapts to different temperature ranges, providing step-by-step insulation and significantly improving insulation efficiency and temperature field uniformity. Attached Figure Description

[0013] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0014] Figure 2 This is an exploded view of the present invention.

[0015] Figure 3 This is an internal sectional view of the present invention.

[0016] Figure 4 This is a partial structural diagram of the present invention. Figure 1 .

[0017] Figure 5 This is a partial structural diagram of the present invention. Figure 2 .

[0018] Legend:

[0019] 1. Internal insulation structure; 101. Fiber insulation layer; 1011. Raised dots; 102. Nano-zirconia coating; 103. Passivated molybdenum foil layer; 2. Middle aerogel insulation layer; 201. Honeycomb structure; 3. Outer insulation layer; 301. Stainless steel shell; 3011. Vacuum insulation cavity; 302. Lightweight aluminum silicate fiberboard. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0021] Specific implementation examples are given below.

[0022] See Figures 1-5 In this embodiment of the present invention, a composite insulation structure for the lower layer of a purification vacuum furnace includes an inner insulation structure 1, a middle aerogel insulation layer 2, and an outer insulation layer 3. The inner insulation structure 1 is fixed inside the middle aerogel insulation layer 2, the middle aerogel insulation layer 2 is fixed inside the outer insulation layer 3, and the outer insulation layer 3 is fixedly installed inside the furnace cavity of the purification vacuum furnace. The inner insulation structure 1 is used to isolate the high-temperature zone (above 1200℃) inside the furnace, the middle aerogel insulation layer 2 is used to isolate the medium-temperature zone (below 1000℃), and the outer insulation layer 3 is used to block the low-temperature zone (below 600℃).

[0023] The internal insulation structure 1 includes: a fiber insulation layer 101, a nano-zirconia coating 102, and a passivated molybdenum foil layer 103. The inner side of the fiber insulation layer 101 has multiple protrusions 1011, each protrusion being hemispherical. These protrusions 1011 can enhance radiative heat return into the furnace by forming multi-directional reflection channels, and weaken heat conduction and convection by forming micro-air gaps between the protrusions, thereby improving insulation efficiency and temperature field uniformity. The fiber insulation layer 101 is made of high-density graphite felt or zirconia ceramic fiber felt, both of which have good high-temperature resistance and low conductivity. The thermal coefficient can significantly reduce the efficiency of heat conduction through solids. A nano-zirconia coating 102 is fixed on the outer side of the fiber insulation layer 101, and a passivated molybdenum foil layer 103 is fixed on the outer side of the nano-zirconia coating 102. The passivated molybdenum foil layer 103 can efficiently reflect the radiant heat transferred from the inner layer, forcing the heat to flow back to the furnace cavity and reducing the radiant heat loss towards the furnace shell. The nano-zirconia coating 102 can form a dense and stable barrier in a high-temperature environment, which can not only block the high-temperature volatilization and oxidation of the fiber insulation layer 101 and the passivated molybdenum foil layer 103, but also reflect infrared radiation to weaken the heat radiation transfer.

[0024] The inner side of the middle aerogel insulation layer 2 is provided with a honeycomb pore structure 201. The middle aerogel insulation layer 2 itself has good thermal insulation performance, and the honeycomb pore structure 201 extends the heat conduction path and helps to weaken radiative heat transfer, thereby further improving the thermal insulation stability and high-efficiency heat preservation performance of the middle aerogel insulation layer 2.

[0025] The middle aerogel insulation layer 2 is made of alumina aerogel and can withstand temperatures of 1000℃ for a long time, making it suitable for use at high temperatures.

[0026] The outer insulation layer 3 includes a stainless steel shell 301 and a lightweight aluminum silicate fiberboard 302. The lightweight aluminum silicate fiberboard 302 is fixed to the inside of the stainless steel shell 301. A vacuum insulation cavity 3011 is provided inside the stainless steel shell 301. The stainless steel shell 301 has good strength as the overall support. The vacuum insulation cavity 3011 reduces the heat transfer efficiency. The lightweight aluminum silicate fiberboard 302 has good heat insulation performance and can withstand high temperatures up to 800℃.

[0027] Working principle: The lower composite insulation structure of this purification vacuum furnace isolates the high temperature (above 1200℃) inside the furnace through the fiber insulation layer 101. Multiple protrusions 1011 can enhance the radiative heat return into the furnace by forming multi-directional reflection channels, and the micro air gap cavity formed by the protrusion gaps weakens heat conduction and convection, thereby improving the insulation efficiency and temperature field uniformity. The passivated molybdenum foil layer 103 can efficiently reflect the radiative heat transferred from the inner layer, forcing the heat to flow back to the furnace cavity, reducing the radiative heat loss towards the furnace shell, thereby improving the insulation effect of the high temperature zone. The middle aerogel layer insulation layer 2 made of alumina aerogel has a low thermal conductivity to insulate the medium temperature zone (below 1000℃) inside the furnace, reducing the heat transfer to the outside. The low temperature zone (below 600℃) inside the furnace is insulated by the lightweight aluminum silicate fiber board 302, and is further insulated by the vacuum insulation cavity 3011 inside the stainless steel shell 301, improving the insulation performance of the low temperature zone and achieving a good insulation effect.

[0028] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0029] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A composite insulation structure for the lower layer of a purification vacuum furnace, characterized in that, The insulation includes an inner insulation structure (1), a middle aerogel insulation layer (2), and an outer insulation layer (3). The inner insulation structure (1) is fixed inside the middle aerogel insulation layer (2), and the middle aerogel insulation layer (2) is fixed inside the outer insulation layer (3). The inner insulation structure (1) includes a fiber insulation layer (101), a nano-zirconia coating (102), and a passivated molybdenum foil layer (103). The inner side of the fiber insulation layer (101) is provided with a plurality of protrusions (1011). The outer side of the fiber insulation layer (101) is fixed with a nano-zirconia coating (102). The outer side of the nano-zirconia coating (102) is fixed with a passivated molybdenum foil layer (103). The inner side of the middle aerogel insulation layer (2) is provided with a honeycomb structure (201).

2. The composite insulation structure of the lower layer of the purification vacuum furnace according to claim 1, characterized in that, The fiber insulation layer (101) is made of high-density graphite felt or zirconia ceramic fiber felt.

3. The composite insulation structure of the lower layer of the purification vacuum furnace according to claim 1, characterized in that, The protrusion (1011) is hemispherical.

4. The composite insulation structure of the lower layer of the purification vacuum furnace according to claim 1, characterized in that, The middle aerogel insulation layer (2) is made of alumina aerogel.

5. The composite insulation structure of the lower layer of the purification vacuum furnace according to claim 1, characterized in that, The outer insulation layer (3) includes a stainless steel shell (301) and a lightweight aluminum silicate fiberboard (302), wherein the lightweight aluminum silicate fiberboard (302) is fixed to the inside of the stainless steel shell (301).

6. The composite insulation structure of the lower layer of the purification vacuum furnace according to claim 5, characterized in that, A vacuum insulation cavity (3011) is provided inside the stainless steel outer shell (301).

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