A force sensor

Abstract

A force sensor comprises a strain beam and a strain gauge, the strain gauge is pasted on the strain beam, the strain beam is used for bearing an external force and generating an elastic deformation proportional to the external force, the strain gauge is used for measuring the elastic deformation of the strain beam and converting the elastic deformation into an electrical signal, the strain gauge comprises one or more, and at least one strain gauge is pasted at the vertex of the surface of the strain beam. The above-mentioned force sensor solves the technical problem that the conversion from a single-dimensional force sensor to a multi-dimensional force sensor is limited to manual operation, resulting in different performance of each force sensor, low production efficiency and high production cost.

Description

Technical Field

[0001] This utility model relates to the field of strain measurement technology, specifically to a force sensor. Background Technology

[0002] A force sensor is a device that detects the magnitude of force and outputs the detected force as an electrical signal to achieve the requirements of force information sensing, transmission, and control. The strain gauge layout in a force sensor is the most critical step and a key factor affecting its performance. Therefore, there is an urgent need to propose a new strain gauge layout scheme to improve the production efficiency and reduce the production cost of force sensors. Summary of the Invention

[0003] The main technical problem this invention addresses is that the transition from single-dimensional force sensors to multi-dimensional force sensors is limited by manual operation, resulting in inconsistent performance of each force sensor, low production efficiency, and high production costs.

[0004] According to a first aspect, one embodiment provides a force sensor including a strain beam and strain gauges, the strain gauges being attached to the strain beam, the strain beam being used to bear an external force and generate elastic deformation proportional to the external force, the strain gauges being used to measure the elastic deformation of the strain beam and convert the elastic deformation into an electrical signal, the strain gauges including one or more, at least one strain gauge being attached to the apex of the surface of the strain beam.

[0005] In some embodiments, the strain beam is cuboid in shape, and the strain gauge is attached to the apex of the upper surface of the strain beam and / or the apex of the lower surface of the strain beam.

[0006] In some embodiments, there are multiple strain gauges. If strain gauges are attached to both the upper and lower surfaces of the strain beam, the strain gauges attached to the upper and lower surfaces of the strain beam are vertically aligned in the height direction of the strain beam and are all located at the same vertex.

[0007] In some embodiments, the strain gauges attached to the upper surface of the strain beam and the strain gauges attached to the lower surface of the strain beam are attached in different directions.

[0008] In some embodiments, the strain gauge is attached in a longitudinal, transverse, and oblique direction, wherein the longitudinal direction is along the length of the strain beam, the transverse direction is along the width of the strain beam, and the oblique direction is at a 45-degree angle to the edge of the strain beam surface.

[0009] In some embodiments, there are multiple strain gauges. If multiple strain gauges are attached to the upper surface and / or the lower surface of the strain beam, the number of strain gauges attached to the left and right edges of the upper and / or lower surfaces of the strain beam is the same, wherein the strain gauges on each edge are arranged at equal intervals.

[0010] In some embodiments, the multiple strain gauges on the upper surface of the strain beam are pasted in different directions and / or the multiple strain gauges on the lower surface of the strain beam are pasted in different directions.

[0011] In some embodiments, the force sensor includes a bridge circuit, and the strain gauge is attached to the strain beam according to the bridging rules of the bridge circuit.

[0012] In some embodiments, the bridge grouping rules include quarter bridges, half bridges, and full bridges.

[0013] In some embodiments, the strain gauge is attached to the apex of the surface of the strain beam using an automated strain gauge attachment device.

[0014] According to the force sensor of the above embodiment, since the strain gauge is pasted at the vertex of the surface of the strain beam, the strain gauge pasted at the vertex can simultaneously sense the axial and lateral forces or torques of the strain beam, effectively sensing the strain under various conditions and reflecting the strain situation in various dimensions. It is convenient to complete the pasting of the strain gauge through automated equipment, solving the technical problem of being limited by manual operation when transitioning from a single-dimensional force sensor to a multi-dimensional force sensor. Attached Figure Description

[0015] Figure 1 This is a schematic diagram showing the layout of a strain gauge on the upper surface of the strain beam in an embodiment of this application; Figure 2 This is a schematic diagram showing the layout of two strain gauges on the upper surface of a strain beam according to one embodiment. Figure 3 This is a schematic diagram of the layout of four strain gauges on the upper surface of a strain beam according to one embodiment; Figure 4 This is a schematic diagram of the layout of six strain gauges on the upper surface of a strain beam according to one embodiment; Figure 5 This is a schematic diagram showing the layout of two strain gauges on the upper and lower surfaces of a strain beam according to one embodiment. Figure 6 This is a schematic diagram showing the layout of four strain gauges on the upper and lower surfaces of a strain beam according to one embodiment. Figure 7 This is a schematic diagram of the layout of eight strain gauges on the upper and lower surfaces of a strain beam according to one embodiment. Figure 8This is a schematic diagram of the layout of twelve strain gauges on the upper and lower surfaces of a strain beam according to one embodiment. Figure 9 A circuit diagram of a quarter-bridge circuit according to one embodiment; Figure 10 A circuit diagram of a half-bridge circuit according to one embodiment; Figure 11 This is a circuit diagram of a full-bridge circuit according to one embodiment. Detailed Implementation

[0016] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments. Similar elements in different embodiments are referred to by related similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of the present application. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, certain operations related to the present application are not shown or described in the specification. This is to avoid obscuring the core parts of the present application with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0017] Furthermore, the features, operations, or characteristics described in the specification can be combined in any suitable manner to form various embodiments. At the same time, the steps or actions in the method description can be rearranged or adjusted in a manner obvious to those skilled in the art. Therefore, the various orders in the specification and drawings are only for the clear description of a particular embodiment and do not imply a necessary order, unless otherwise stated that a particular order must be followed.

[0018] The serial numbers assigned to components in this document, such as "first" and "second," are used only to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages).

[0019] Existing strain gauges are typically fixed at the region of maximum strain in the strain beam, located at the midpoint of the strain beam's force direction. For current force sensor fabrication, strain beams are often cuboid in shape, with strain gauges positioned at the maximum strain location. While this allows for measurement of the maximum strain in the force direction, structural interference issues exist, especially with multi-dimensional force sensors. Strain in any direction affects other directions, and this influence cannot be completely eliminated structurally. Furthermore, automated strain gauge installation is difficult, requiring manual application. Therefore, the consistency, efficiency, and cost of force sensors face significant challenges. Thus, researching new strain gauge layouts to address these issues is of great importance.

[0020] To address the aforementioned issues, this application provides a force sensor comprising a strain beam and strain gauges. The strain gauges are attached to the strain beam, which bears external forces and generates elastic deformation proportional to those forces. The strain gauges measure the elastic deformation of the strain beam and convert it into an electrical signal. The strain gauges may be one or more, with at least one strain gauge attached to the apex of the surface of the strain beam.

[0021] Specifically, strain gauges are positioned at the apex of the strain beam surface of the force sensor. Although this position is not the location of maximum strain, it allows the sensing of forces or torques acting on the strain beam in all directions. For a cuboid strain beam, the apex of the surface can be the upper left, upper right, lower left, or lower right corner. The strain at this position in each dimension is analyzed as follows: For a single strain beam, the applied forces and torques in each dimension are converted into shear forces. When the strain beam is subjected to axial shear force, it experiences a downward vertical force, an axial force, or a rotational torque along the axial direction. In this case, the applied and fixed ends of the upper and lower surfaces of the strain beam will show significant strain. When the strain beam is subjected to lateral shear force, it experiences a lateral force and a horizontal rotational torque. The strain is greatest at the applied ends on the left and right sides of the strain beam, but significant strain can still be sensed at the applied ends on the upper and lower surfaces. Based on the analysis of the strain conditions in the above-mentioned dimensions, it is shown that placing the strain gauge at the apex of the surface of the force sensor strain beam can effectively sense the strain under various conditions and show the strain conditions in various dimensions.

[0022] In some embodiments, the strain beam is cuboid in shape, and the strain gauges are attached to the apex of the upper surface and / or the apex of the lower surface of the strain beam.

[0023] Specifically, for a cuboid strain beam, the rectangular surface closest to the direction of gravity when the cuboid is laid flat is called the lower surface, and the rectangular surface furthest from the direction of gravity and located at the top is called the upper surface. The strain gauge can be attached only to the apex of the upper surface of the strain beam, only to the apex of the lower surface, or simultaneously to both apexes.

[0024] For example, for three strain gauges, strain gauge 1, strain gauge 2, and strain gauge 3 can be attached to the lower right corner of the upper surface of the strain beam. Similarly, strain gauge 1, strain gauge 2, and strain gauge 3 can also be attached to the lower right corner of the lower surface of the strain beam. Additionally, strain gauge 1 and strain gauge 2 can be attached to the lower right corner of the upper surface of the strain beam, and strain gauge 3 can be attached to the lower right corner of the lower surface of the strain beam.

[0025] In some embodiments, there are multiple strain gauges. If strain gauges are attached to both the upper and lower surfaces of the strain beam, the strain gauges attached to the upper and lower surfaces of the strain beam are vertically aligned in the height direction of the strain beam and are all located at the apex on the same side.

[0026] For example, the strain gauges attached to the upper and lower surfaces of the strain beam are vertically aligned along the height of the strain beam and are both located at the lower right corner of the surface.

[0027] In some embodiments, the strain gauges attached to the upper surface of the strain beam and the strain gauges attached to the lower surface of the strain beam are attached in different directions.

[0028] For example, a strain gauge is attached to the upper and lower surfaces of a strain beam. The attachment directions can include the following situations: Situation 1: The strain gauge on the upper surface of the strain beam is attached longitudinally, and the strain gauge on the lower surface of the strain beam is attached laterally; Situation 2: The strain gauge on the upper surface of the strain beam is attached longitudinally, and the strain gauge on the lower surface of the strain beam is attached obliquely; Situation 3: The strain gauge on the upper surface of the strain beam is attached obliquely, and the strain gauge on the lower surface of the strain beam is attached laterally.

[0029] In some embodiments, the strain gauge is attached in a longitudinal, transverse, and oblique direction, wherein the longitudinal direction is along the length of the strain beam, the transverse direction is along the width of the strain beam, and the oblique direction is at a 45-degree angle to the edge of the surface of the strain beam.

[0030] In some embodiments, there are multiple strain gauges. If multiple strain gauges are attached to the upper surface and / or the lower surface of the strain beam, the number of strain gauges attached to the left and right edges of the upper surface and / or the lower surface of the strain beam is the same, wherein the strain gauges on each edge are arranged at equal intervals.

[0031] Specifically, if multiple strain gauges are attached to the upper surface of the strain beam, the number of strain gauges attached to the left and right edges of the upper surface of the strain beam is the same, and the strain gauges on each edge are arranged at equal intervals. Based on the actual number of strain gauges, they are preferentially attached to the vertices of the upper surface. After the four vertices of the upper surface are attached, the remaining strain gauges are then arranged at equal intervals along the edges.

[0032] For example, if four strain gauges are attached to the upper surface of the strain beam, the four strain gauges will be attached to the four vertices of the upper surface. If six strain gauges are attached to the upper surface of the strain beam, four of the six strain gauges will be attached to the four vertices of the upper surface, and the remaining two strain gauges will be attached to the middle positions of the left and right edges of the upper surface.

[0033] In some embodiments, the multiple strain gauges on the upper surface of the strain beam are pasted in different directions and / or the multiple strain gauges on the lower surface of the strain beam are pasted in different directions.

[0034] For example, three strain gauges are attached to the upper surface of a strain beam. The first strain gauge is attached in a horizontal direction, the second strain gauge is attached in a vertical direction, and the third strain gauge is attached in an oblique direction.

[0035] In some embodiments, the force sensor includes a bridge circuit, and strain gauges are attached to the strain beam according to the bridging rules of the bridge circuit.

[0036] Specifically, the bridging rules for the selected bridge circuit are determined based on the number of strain gauges, and the strain gauges are then attached to the strain beam according to these bridging rules.

[0037] For example, when the bridge configuration is a full-bridge circuit, four strain gauges are connected to the four arms of the bridge and attached to the strain beam. When the bridge configuration is a half-bridge circuit, two strain gauges are connected to the diagonal arms of the bridge, such as R1 and R3, and the other two arms can be fixed resistors. When the bridge configuration is a quarter-bridge, only one strain gauge is connected to one arm of the bridge, and the remaining arms are fixed resistors.

[0038] In this embodiment, the strain gauge placement can effectively identify the stress conditions at various locations on the strain beam, and different bridge assembly rules can directly measure the strain in the corresponding direction.

[0039] In some embodiments, the bridging rules include quarter bridges, half bridges, and full bridges.

[0040] Specifically, multiple full-bridge circuits can be combined to form a multi-full-bridge circuit.

[0041] In some embodiments, the strain gauges are attached to the apex of the surface of the strain beam using an automated strain gauge attaching device.

[0042] Specifically, the automated strain gauge bonding equipment can be a glass micro-dissolution bonding equipment.

[0043] Please refer to Figures 1 to 11 , Figures 1 to 11 The following is a schematic diagram showing different numbers of strain gauges attached to a cuboid strain beam in different orientations.

[0044] In some embodiments, Figure 1 Strain gauge 1 is longitudinally attached to the upper surface of strain beam 4 on the left side. This arrangement can detect the strain of strain beam 4 under axial shear force. Figure 1 Strain gauges 2 are horizontally attached to the upper surface of the strain beam 4 in the middle. This arrangement can detect the strain of the strain beam 4 under lateral shear force. Figure 1 Strain gauges 3 are obliquely attached to the upper surface of the strain beam 4 on the right side. This arrangement can detect the strain of the strain beam 4 under axial shear force and lateral shear force.

[0045] In some embodiments, Figure 2 A set of strain gauges 5 is longitudinally attached to the upper surface of the strain beam 4 on the left. This set of strain gauges 5 includes two strain gauges. This layout can detect the strain of the strain beam 4 under axial shear force. Figure 2 A set of strain gauges 6 is horizontally attached to the upper surface of the middle strain beam 4. The set of strain gauges 6 includes two strain gauges. This layout can detect the strain of the strain beam 4 under lateral shear force. Figure 2 A set of strain gauges 7 is obliquely attached to the upper surface of the strain beam 4 on the right. The set of strain gauges 7 includes two strain gauges. This layout can detect the strain of the strain beam 4 under axial shear force and lateral shear force.

[0046] In some embodiments, Figure 3 A set of strain gauges 8 is longitudinally attached to the upper surface of the strain beam 4 on the left. The set of strain gauges 8 includes four strain gauges. This layout can detect the strain of the strain beam 4 under axial shear force. Figure 3 A set of strain gauges 9 is horizontally attached to the upper surface of the middle strain beam 4. The set of strain gauges 9 includes four strain gauges. This layout can detect the strain of the strain beam 4 under lateral shear force. Figure 3 A set of strain gauges 10 is obliquely attached to the upper surface of the strain beam 4 on the right side. The set of strain gauges 10 includes four strain gauges. This layout can detect the strain of the strain beam 4 under axial shear force and lateral shear force.

[0047] In some embodiments, Figure 4A set of strain gauges 11 is longitudinally attached to the upper surface of the strain beam 4 on the left. The set of strain gauges 11 includes six strain gauges. This layout can detect the strain of the strain beam 4 under axial shear force. Figure 4 A set of strain gauges 12 is horizontally attached to the upper surface of the middle strain beam 4. The set of strain gauges 12 includes six strain gauges. This layout can detect the strain of the strain beam 4 under lateral shear force. Figure 4 A set of strain gauges 13 is obliquely attached to the upper surface of the strain beam 4 on the right side. The set of strain gauges 13 includes six strain gauges. This layout can detect the strain of the strain beam 4 under axial shear force and lateral shear force.

[0048] In some embodiments, Figure 5 A set of strain gauges 14 is longitudinally attached to the strain beam 4 on the left side. The set of strain gauges 14 includes two strain gauges, one of which is longitudinally attached to the upper surface of the strain beam 4 and the other is longitudinally attached to the lower surface of the strain beam 4. This arrangement can detect the strain of the strain beam 4 under axial shear force. Figure 5 A set of strain gauges 15 is horizontally attached to the middle strain beam 4. The set of strain gauges 15 includes two strain gauges, one of which is horizontally attached to the upper surface of the strain beam 4 and the other is horizontally attached to the lower surface of the strain beam 4. This arrangement can detect the strain of the strain beam 4 under lateral shear force. Figure 5 A set of strain gauges 16 is obliquely attached to the strain beam 4 on the right side. The set of strain gauges 16 includes two strain gauges, one of which is obliquely attached to the upper surface of the strain beam 4 and the other of which is obliquely attached to the lower surface of the strain beam 4. This arrangement can detect the strain of the strain beam 4 under axial shear force and lateral shear force.

[0049] In some embodiments, Figure 6 A set of strain gauges 17 is longitudinally attached to the strain beam 4 on the left side. This set of strain gauges 17 includes four strain gauges. Two strain gauges are longitudinally attached to the upper surface of the strain beam 4, and the other two strain gauges are longitudinally attached to the lower surface of the strain beam 4. This layout can detect the strain of the strain beam 4 under axial shear force. Figure 6 A set of strain gauges 18 is horizontally attached to the middle strain beam 4. This set of strain gauges 18 includes four strain gauges, with two strain gauges horizontally attached to the upper surface of the strain beam 4 and the other two strain gauges horizontally attached to the lower surface of the strain beam 4. This layout can detect the strain of the strain beam 4 under lateral shear force. Figure 6 A set of strain gauges 19 is obliquely attached to the strain beam 4 on the right side. The set of strain gauges 19 includes four strain gauges. Two strain gauges are obliquely attached to the upper surface of the strain beam 4, and the other two strain gauges are obliquely attached to the lower surface of the strain beam 4. This layout can detect the strain of the strain beam 4 under axial shear force and lateral shear force.

[0050] In some embodiments, Figure 7 A set of strain gauges 20 is longitudinally attached to the strain beam 4 on the left side. The set of strain gauges 20 includes eight strain gauges, with four strain gauges longitudinally attached to the upper surface of the strain beam 4 and another four strain gauges longitudinally attached to the lower surface of the strain beam 4. This layout can detect the strain of the strain beam 4 under axial shear force. Figure 7 A set of strain gauges 21 is horizontally attached to the middle strain beam 4. The set of strain gauges 21 includes eight strain gauges, with four strain gauges horizontally attached to the upper surface of the strain beam 4 and another four strain gauges horizontally attached to the lower surface of the strain beam 4. This layout can detect the strain of the strain beam 4 under lateral shear force. Figure 7 A set of strain gauges 22 is obliquely attached to the strain beam 4 on the right side. The set of strain gauges 22 includes eight strain gauges, with four strain gauges obliquely attached to the upper surface of the strain beam 4 and another four strain gauges obliquely attached to the lower surface of the strain beam 4. This layout can detect the strain of the strain beam under axial shear force and lateral shear force.

[0051] In some embodiments, Figure 8 A set of strain gauges 23 is longitudinally attached to the strain beam 4 on the left side. This set of strain gauges 23 includes twelve strain gauges, with six strain gauges longitudinally attached to the upper surface of the strain beam 4 and another six strain gauges longitudinally attached to the lower surface of the strain beam 4. This layout can detect the strain of the strain beam 4 under axial shear force. Figure 8 A set of strain gauges 24 is horizontally attached to the middle strain beam 4. This set of strain gauges 24 includes twelve strain gauges, with six strain gauges horizontally attached to the upper surface of the strain beam 4 and another six strain gauges horizontally attached to the lower surface of the strain beam 4. This arrangement can detect the strain of the strain beam 4 under lateral shear force. Figure 8 A set of strain gauges 25 is obliquely attached to the strain beam 4 on the right side. This set of strain gauges 25 includes twelve strain gauges, with six strain gauges obliquely attached to the upper surface of the strain beam 4 and another six strain gauges obliquely attached to the lower surface of the strain beam 4. This layout can detect the strain of the strain beam 4 under axial shear force and lateral shear force.

[0052] In some embodiments, Figure 9 It is a quarter-bridge circuit. Figure 10 It is a half-bridge circuit. Figure 11 It is a full-bridge circuit, in which, Figure 1 , Figure 2 and Figure 5 Usable Figure 9 A quarter-bridge circuit or multiple quarter-bridge circuits, Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6Applicable to Figure 10 A half-bridge circuit or multiple half-bridge circuits Figure 3 , Figure 6 , Figure 7 and Figure 8 Applicable to Figure 11 A full-bridge circuit or multiple full-bridge circuits.

[0053] In summary, the strain gauge arrangement on the surface of the strain beam can adapt to various bonding situations, such as a single strain gauge arrangement, a two-strain gauge arrangement, an arrangement on the upper and lower surfaces of the strain beam, an arrangement at the apex of the strain beam, an arrangement at the apex of the upper and lower surfaces of the strain beam, an arrangement in the middle of the strain beam, an arrangement in the middle of the upper and lower surfaces of the strain beam, an arrangement with multiple strain gauges on the upper surface, and an arrangement with multiple strain gauges on the lower surface, etc.

[0054] According to the force sensor of the above embodiment, since the strain gauge is pasted at the vertex of the surface of the strain beam, the strain gauge pasted at the vertex can simultaneously sense the axial and lateral forces or torques of the strain beam, effectively sensing the strain under various conditions, reflecting the strain situation in various dimensions, and facilitating the pasting of the strain gauge through automated equipment, thus solving the technical problem of being limited by manual operation when transitioning from a single-dimensional force sensor to a multi-dimensional force sensor.

[0055] In this application, the technical problem to be solved is that the strain gauges of existing force sensors are attached to the middle of the strain beam, where there is only a large strain in a single direction. The determination of lateral strain mainly relies on the placement of the strain gauges on the sides of the strain beam. Furthermore, the manual curing of the strain gauges, from single-dimensional to multi-dimensional force sensors, is limited by manual operation, leading to deviations between the attached and preset positions. This results in inconsistent performance among force sensors, low production efficiency, and high production costs. To solve these problems, this application proposes a force sensor in which at least one strain gauge is attached to the apex of the strain beam surface. The attachment position of the strain gauge can simultaneously sense both axial and lateral forces or torques of the strain beam, providing a new solution for the automation of force sensor production. Simultaneously, it reduces the number of attachments, lowers costs, solves the problem of difficult attachment to the sides of the strain beam, and enables the application of force sensors, especially multi-dimensional force sensors, in automated production.

[0056] The above-described specific examples are for illustrative purposes only and are not intended to limit the scope of this invention. Those skilled in the art to which this invention pertains can make various simple deductions, modifications, or substitutions based on the concept of this invention.

Claims

1. A force sensor comprising a strain beam and a strain gauge, the strain gauge being attached to the strain beam, the strain beam being used to bear an external force and generate an elastic deformation proportional to the external force, the strain gauge being used to measure the elastic deformation of the strain beam and convert the elastic deformation into an electrical signal, characterized in that, The strain gauge includes one or more, with at least one strain gauge attached to the apex of the surface of the strain beam.

2. The force sensor as described in claim 1, characterized in that, The strain beam is rectangular in shape, and the strain gauge is attached to the vertex of the upper surface of the strain beam and / or the vertex of the lower surface of the strain beam.

3. The force sensor as described in claim 2, characterized in that, There are multiple strain gauges. If strain gauges are attached to both the upper and lower surfaces of the strain beam, the strain gauges attached to the upper and lower surfaces of the strain beam are vertically aligned in the height direction of the strain beam and are all located at the same vertex.

4. The force sensor as described in claim 3, characterized in that, The strain gauges attached to the upper surface of the strain beam and the strain gauges attached to the lower surface of the strain beam are attached in different directions.

5. The force sensor as described in claim 4, characterized in that, The strain gauge is attached in three directions: longitudinal, transverse, and oblique. The longitudinal direction is along the length of the strain beam, the transverse direction is along the width of the strain beam, and the oblique direction is at a 45-degree angle to the edge of the strain beam surface.

6. The force sensor as described in claim 2, characterized in that, There are multiple strain gauges. If multiple strain gauges are attached to the upper surface and / or the lower surface of the strain beam, the number of strain gauges attached to the left and right edges of the upper surface and / or the lower surface of the strain beam is the same, wherein the strain gauges on each edge are arranged at equal intervals.

7. The force sensor as described in claim 6, characterized in that, The strain gauges on the upper surface of the strain beam are pasted in different directions and / or the strain gauges on the lower surface of the strain beam are pasted in different directions.

8. The force sensor as described in claim 1, characterized in that, The force sensor includes a bridge circuit, and the strain gauge is attached to the strain beam according to the bridging rules of the bridge circuit.

9. The force sensor as described in claim 8, characterized in that, The bridge-building rules include quarter bridges, half bridges, and full bridges.

10. The force sensor as claimed in claim 1, characterized in that, The strain gauge is attached to the apex of the surface of the strain beam using an automated strain gauge attachment device.

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