Detection device for contact state of radio frequency copper bar and matching device, Semiconductor device

Abstract

The utility model discloses a kind of detection device of radio frequency copper bar and contact state of matcher, semiconductor equipment, the detection device includes: radio frequency copper bar, matcher and tension detection component, the matcher is equipped with leaf spring type jack, one end of the radio frequency copper bar is inserted into the leaf spring type jack, other end is connected with the tension detection component, the tension detection component is configured to read tension value when the radio frequency copper bar is pulled out from the leaf spring type jack. Whether the contact pressure of leaf spring type jack and radio frequency copper bar is in allowable range can be judged by tension value, and then whether contact resistance meets requirements is determined, to ensure that radio frequency loop characteristic impedance is up to standard, reduce reflected power, avoid machine alarm downtime, guarantee HDPCVD equipment process stability and film quality.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a device for detecting the contact state between an RF copper rod and a matching device, and a semiconductor equipment. Background Technology

[0002] In HDPCVD equipment, deposition and sputtering processes are performed simultaneously. The sputtering process uses a bias RF field to attract Ar ions and direct them to bombard the wafer, thus preventing defects such as voids in the thin film. The sputtering process requires low bias RF power loss to stably and efficiently transmit the preset bias RF power to the reaction chamber. For this purpose, the characteristic impedance of the bias RF circuit, the matching circuit, the RF copper rod, the ESC, and the plasma must be 50 ohms. However, under certain process conditions, poor contact between the RF copper rod and the matching circuit often results in a large contact resistance, causing the characteristic impedance of the bias RF circuit to fail to reach 50 ohms, resulting in a large reflected power, triggering the machine alarm and causing it to shut down. The main factor causing poor contact between the RF copper rod and the matching circuit is that the contact pressure between the copper rod and the leaf spring socket inside the matching circuit exceeds the allowable range, causing changes in contact resistance. Utility Model Content

[0003] This utility model provides a detection device and semiconductor equipment for the contact state of an RF copper rod and a matching device, aiming to solve the problem of impedance mismatch in the RF circuit caused by poor contact between the RF copper rod and the matching device, which leads to excessive reflected power and equipment downtime.

[0004] In a first aspect, this utility model provides a detection device for the contact state of an RF copper rod and a matching device, comprising: an RF copper rod, a matching device, and a tensile force detection component. The matching device is provided with a leaf spring type socket. One end of the RF copper rod is inserted into the leaf spring type socket, and the other end is connected to the tensile force detection component. The tensile force detection component is configured to read the tensile force value when the RF copper rod is pulled out of the leaf spring type socket.

[0005] Furthermore, the tensile testing component includes a tensile gauge, a clamping member, and a protective sleeve. The protective sleeve is fitted around the outer periphery of the other end of the radio frequency copper rod, the clamping member is detachably clamped onto the protective sleeve, and the tensile gauge is connected to the clamping member.

[0006] Furthermore, the clamping member includes a clamping part, a first connecting part, and a second connecting part. The clamping part is at least partially clamped to the outer periphery of the protective sleeve. The first connecting part and the second connecting part are respectively disposed on both sides of the clamping part. Both the first connecting part and the second connecting part are connected to the tension gauge.

[0007] Furthermore, both the first connecting part and the second connecting part are provided with connecting holes, and the reading end of the tension gauge is fixedly connected to the connecting holes on the first connecting part and the second connecting part respectively through connecting ropes.

[0008] Furthermore, the first connecting portion and the second connecting portion are symmetrically arranged on both sides of the clamping portion along the axis of the radio frequency copper rod.

[0009] Furthermore, the clamping part is semi-circular in shape.

[0010] Furthermore, the protective sleeve has a cylindrical structure, and its inner diameter matches the outer diameter of the radio frequency copper rod.

[0011] Furthermore, the protective sleeve is a non-metallic protective sleeve.

[0012] Furthermore, the protective sleeve is a polytetrafluoroethylene (PTFE) protective sleeve.

[0013] Secondly, this utility model also provides a semiconductor device, including: an electrostatic chuck, an RF copper rod, a matching unit, and a detection device for the contact state between the RF copper rod and the matching unit. The two ends of the RF copper rod are respectively connected to the electrostatic chip and the matching unit. The detection device for the contact state between the RF copper rod and the matching unit is the detection device of the first aspect. The detection device is used to pre-detect the contact state between the RF copper rod and the matching unit before the process.

[0014] This invention provides a device and semiconductor equipment for detecting the contact state between an RF copper rod and a matching unit. The device inserts one end of the RF copper rod into a spring-loaded socket of the matching unit and connects the other end to a tension detection component. The tension detection component reads the tension value when the RF copper rod is pulled out of the spring-loaded socket. This tension value corresponds to the contact pressure of the spring-loaded socket on the RF copper rod. When the tension value meets a preset standard, it indicates that the contact pressure between the spring-loaded socket and the RF copper rod is within the allowable range, resulting in a lower contact resistance. This ensures that the sum of the characteristic impedances of the matching unit, the RF copper rod, the ESC, and the plasma in the bias RF circuit reaches 50 ohms, avoiding impedance mismatch caused by increased contact resistance due to poor contact. This method of indirectly determining whether the contact pressure is qualified by detecting the tension value filters out RF copper rods with acceptable contact conditions from the source, thus solving the problem of impedance mismatch in the RF circuit caused by poor contact between the RF copper rod and the matching unit. This reduces the large reflected power caused by impedance mismatch, prevents machine alarms and shutdowns, and ensures the stable operation of the HDPCVD equipment and the quality of thin film deposition. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 A schematic diagram of a device for detecting the contact state between an RF copper rod and a matching unit according to an embodiment of the present invention is shown. Figure 2 Showing Figure 1 Schematic diagram of Part A; Figure 3 A schematic diagram of a semiconductor device according to an embodiment of the present invention is shown; Figure label: 1. RF copper rod; 2. Matching unit; 21. Leaf spring type socket; 3. Tensile gauge; 4. Clamping component; 41. First connecting part; 41. Second connecting part; 43. Connecting hole; 5. Protective sleeve; 6. Connecting rope; 7. Electrostatic chuck. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0018] The directional terms used in this invention, such as "up," "down," "front," "back," "left," "right," "inner," "outer," and "side," are merely for reference to the accompanying drawings. Therefore, the directional terms used are for explanation and understanding of this invention, and not for limiting it. Furthermore, in the accompanying drawings, structures that are similar or identical are indicated by the same reference numerals.

[0019] During the process of HDPCVD equipment operation, the bias RF circuit needs to stably and efficiently transmit the preset RF power to the reaction chamber to ensure the normal operation of the sputtering process. The achievement of this goal depends on the coordinated characteristic impedance of the matching unit, RF copper rod, ESC and plasma in the circuit to reach the standard impedance value of 50 ohms. Among them, good contact between the RF copper rod and the matching unit is the key link to maintain the stability of the circuit impedance. However, in actual production scenarios, the contact state between the RF copper rod and the leaf spring socket in the matching unit is easily affected by contact pressure. When the contact pressure exceeds the allowable range, a large contact resistance will be generated between the two, which directly destroys the impedance balance of the bias RF circuit, causing the circuit characteristic impedance to fail to meet the 50-ohm requirement, and thus causing significant reflected power. This not only interferes with the normal process performance of the equipment and affects the film deposition quality, but also triggers machine alarms and causes downtime, which has an adverse impact on production efficiency and cost control.

[0020] To address this, this utility model provides a device for detecting the contact state between an RF copper rod and a matching device. A tension detection component reads the tension required for the RF copper rod to disengage from the leaf spring socket in real time during the removal process, thereby indirectly quantifying whether the contact pressure is within an effective range. This prevents abnormal increases in contact resistance due to excessive or insufficient contact pressure, which could disrupt the 50-ohm characteristic impedance matching of the bias RF circuit. The device requires no electrical measurement, is easy to operate, and can perform contact performance prediction before the copper rod is installed, effectively screening out defective components. This significantly reduces the risk of reflected power fluctuations and equipment downtime caused by poor contact, improving process stability and equipment reliability.

[0021] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0022] Please see Figures 1-2 This utility model embodiment demonstrates a detection device for the contact state between an RF copper rod 1 and a matching device 2, comprising: an RF copper rod 1, a matching device 2, and a tension detection component. The matching device 2 is provided with a leaf spring type socket 21. One end of the RF copper rod 1 is inserted into the leaf spring type socket 21, and the other end is connected to the tension detection component. The tension detection component is configured to read the tension value when the RF copper rod 1 is pulled out of the leaf spring type socket 21.

[0023] Specifically, the RF copper rod 1 is a long, conductive strip used to transmit RF power in the biased RF circuit; the matching unit 2 is a component with signal conditioning function, and the leaf spring type socket 21 is a hole-like structure with an elastic sheet on the inner wall of the matching unit 2. The function of this socket is to cooperate with the RF copper rod 1 to realize the connection between the two; the pull force detection component is a component that can detect the magnitude of the pull force to obtain the pull force value when the RF copper rod 1 is pulled out of the leaf spring type socket 21. One end of the RF copper rod 1 is inserted into the leaf spring type socket 21 of the matching unit 2 to form a plug-in engagement, and the other end of the RF copper rod 1 is connected to the pull force detection component, so that the pull force detection component can detect the pull force synchronously with the movement of the RF copper rod 1. Specifically, the core reason for poor contact between the RF copper rod 1 and the matching unit 2 is that the contact pressure between the two exceeds the allowable range. The pull force value read by the pull force detection component is directly related to the contact pressure. Through this device, the pull force value can be obtained to determine whether the contact pressure is qualified, thereby avoiding the increase in contact resistance due to abnormal contact pressure, and ultimately solving the problem of impedance mismatch in the RF circuit. The detection device in this embodiment can effectively detect the contact state between the RF copper rod 1 and the matching device 2, providing a basis for screening qualified RF copper rods 1, thereby reducing machine alarms and shutdowns caused by impedance mismatch and ensuring the normal process operation of HDPCVD equipment.

[0024] In one embodiment, the tensile testing component includes a tensile gauge 3, a clamping member 4, and a protective sleeve 5. The protective sleeve 5 is fitted around the outer periphery of the other end of the radio frequency copper rod 1. The clamping member 4 is detachably clamped onto the protective sleeve 5. The tensile gauge 3 is connected to the clamping member 4.

[0025] Specifically, the force gauge 3 is an instrument capable of displaying the tensile force value for direct reading of the tensile force; the clamping component 4 is a component with clamping function used to fix it on the protective sleeve 5 to drive the RF copper rod 1 to move; the protective sleeve 5 is a sleeve-shaped component with protective function used to wrap the outer periphery of the RF copper rod 1 to prevent the clamping component 4 from causing damage to the surface of the RF copper rod 1. The protective sleeve 5 is fitted onto the outer periphery of the other end of the RF copper rod 1, forming a tight fitting with the RF copper rod 1. The clamping component 4 is detachably clamped onto the protective sleeve 5 and fixed to the outside of the protective sleeve 5 by clamping force. The force gauge 3 is connected to the clamping component 4, so that the tensile force applied by the force gauge 3 can be transmitted to the RF copper rod 1 through the clamping component 4 and the protective sleeve 5. Specifically, during the testing process, the clamping component 4 directly contacts the protective sleeve 5 instead of the RF copper rod 1. This avoids scratching the surface of the RF copper rod 1 during clamping. The protective sleeve 5 does not affect the force transmission between the RF copper rod 1 and the clamping component 4, ensuring that the pull-out force gauge 3 can accurately obtain the pull-out force value. This further ensures the accuracy of the contact pressure judgment, thereby better solving the impedance mismatch problem caused by poor contact between the RF copper rod 1 and the matching device 2. The testing device in this embodiment protects the surface integrity of the RF copper rod 1, ensures the accuracy of the pull-out force test, improves the reusability of the RF copper rod 1 during the testing process, and enhances the reliability of the test results, providing a stronger guarantee for the stable operation of subsequent processes.

[0026] In one embodiment, the clamping member 4 includes a clamping part, a first connecting part 41 and a second connecting part 41. The clamping part is at least partially clamped on the outer periphery of the protective sleeve 5. The first connecting part 41 and the second connecting part 41 are respectively disposed on both sides of the clamping part. Both the first connecting part 41 and the second connecting part 41 are connected to the tension gauge 3.

[0027] Specifically, the clamping part, which is the portion of the clamping member 4 that directly contacts the protective sleeve 5, is used to fix it to the outer periphery of the protective sleeve 5 through a clamping action. The first connecting part 41 and the second connecting part 41 are both block-shaped or rod-shaped components extending from the clamping part, and their function is to provide connection points for the tension gauge 3. The clamping part is at least partially clamped to the outer periphery of the protective sleeve 5 and fixed to the protective sleeve 5 by wrapping or clamping. The first connecting part 41 and the second connecting part 41 are respectively located on both sides of the clamping part, and both are connected to the tension gauge 3, so that the tension applied by the tension gauge 3 can be distributed and transmitted to the clamping part through the two connecting parts. Specifically, the first connecting part 41 and the second connecting part 41 are respectively located on both sides of the clamping part, which can make the tension applied by the tension gauge 3 evenly distributed on the clamping part, avoiding the clamping member 4 from tilting or the protective sleeve 5 from shifting due to unilateral force, ensuring that the RF copper rod 1 is subjected to stable force during the pull-out process, thereby ensuring the accuracy of the tension value detection, more accurately judging whether the contact pressure is qualified, and solving the impedance mismatch problem. The detection device in this embodiment makes the tensile force transmission more balanced, reduces the detection error caused by uneven force during the detection process, improves the stability of tensile force detection, further ensures the accuracy of judging the contact state between the RF copper rod 1 and the matching device 2, and reduces the number of unqualified copper rods that are put into the machine due to detection errors.

[0028] In this embodiment, both the first connecting part 41 and the second connecting part 41 are provided with connecting holes 43, and the reading end of the tension gauge 3 is fixedly connected to the connecting holes 43 on the first connecting part 41 and the second connecting part 41 respectively through the connecting rope 6.

[0029] Specifically, the connecting hole 43 is a hole-like structure formed on the first connecting part 41 and the second connecting part 41, and its function is to provide a fixed point for the connecting rope 6 to pass through; the connecting rope 6 is a rope-like component with a certain strength and bendability used to connect the tension gauge 3 and the connecting part to realize the transmission of force; the reading end of the tension gauge 3 is the end of the tension gauge 3 used to output the tension value. Both the first connecting part 41 and the second connecting part 41 are provided with connecting holes 43. One end of the connecting rope 6 passes through the connecting hole 43 of the first connecting part 41 and is fixed, and the other end of the connecting rope 6 is connected to the reading end of the tension gauge 3. At the same time, one end of the connecting rope 6 passes through the connecting hole 43 of the second connecting part 41 and is fixed, and the other end of the connecting rope 6 is also connected to the reading end of the tension gauge 3, so that the tension gauge 3 is stably connected to the two connecting parts through the connecting rope 6. Specifically, by cooperating with the connecting rope 6 and the connecting hole 43, the connection angle and distance between the tension gauge 3 and the clamping member 4 can be flexibly adjusted to adapt to different testing environments. Simultaneously, the connecting rope 6 effectively transmits tension, ensuring that the tension gauge 3 accurately reads the tension value during the pull-out process, thereby accurately determining the contact pressure and resolving impedance mismatch issues. This connection method improves the environmental adaptability of the testing device, making testing operations more flexible and convenient, while ensuring the effectiveness of tension transmission, further ensuring the accuracy of the testing results, and providing reliable support for screening qualified RF copper rods 1.

[0030] In this embodiment, the first connecting part 41 and the second connecting part 41 are symmetrically arranged on both sides of the clamping part along the axis of the radio frequency copper rod 1.

[0031] Specifically, both the first connecting part 41 and the second connecting part 41 are components extending from the clamping part, and their structures are the same or similar, both used to connect the force gauge 3; the axis of the RF copper rod 1 is the central axis of the long strip structure of the RF copper rod 1, which is the reference line in the length direction of the RF copper rod 1; the clamping part is the part of the clamping member 4 that clamps the protective sleeve 5 and is used to fix it on the protective sleeve 5. The first connecting part 41 and the second connecting part 41 are symmetrically arranged on both sides of the clamping part along the axis of the RF copper rod 1, that is, the two connecting parts are equidistant from the axis of the RF copper rod 1 and are opposite in position, so that they are symmetrically distributed on the clamping part. Specifically, the symmetrical arrangement of the first connecting part 41 and the second connecting part 41 can ensure that the pulling force applied by the force gauge 3 is transmitted completely along the axial direction of the RF copper rod 1, avoiding additional friction or jamming between the RF copper rod 1 and the leaf spring type socket 21 during the pull-out process due to the deviation of the pulling force direction, ensuring that the pulling force value only reflects the magnitude of the contact pressure, improving the detection accuracy, thereby better judging the contact state and solving the impedance mismatch problem. The symmetrical structure of this embodiment makes the direction of the pulling force as consistent as possible with the direction of the pull-out of the radio frequency copper rod 1, reducing additional interference factors in the detection process, further improving the accuracy of the pulling force detection, ensuring the reliability of the contact pressure judgment, and effectively avoiding adverse consequences caused by detection deviation.

[0032] Furthermore, the clamping part is semi-circular in shape. Specifically, the semi-circular shape refers to the fact that the cross-section of the clamping part is semi-circular, that is, the clamping part has an arc-shaped inner wall that can fit against the outer peripheral surface of the protective sleeve 5. The semi-circular shape of the clamping part, with its arc-shaped inner wall tightly fitting against the outer peripheral surface of the protective sleeve 5, achieves a stable clamping of the protective sleeve 5 through its own body or in conjunction with other clamping structures (such as bolt tightening or elastic clamping). Specifically, the semi-circular shape of the clamping part can increase the contact area with the outer peripheral surface of the protective sleeve 5, so that the clamping force is applied more evenly to the protective sleeve 5, avoiding excessive local pressure that could damage the protective sleeve 5. At the same time, it ensures that there is no relative sliding between the clamping part 4 and the protective sleeve 5, ensuring that the tensile force can be effectively transmitted to the RF copper rod 1, so that the tensile force gauge 3 can accurately read the tensile force value, thereby accurately judging the contact pressure and solving the impedance mismatch problem. The semi-circular clamping part protects the integrity of the protective sleeve 5, ensures the stability of the clamping, guarantees the effectiveness of the tensile force transmission, improves the stability of the testing process and the accuracy of the test results, and provides a guarantee for screening qualified radio frequency copper rods 1.

[0033] In one embodiment, the protective sleeve 5 is a cylindrical structure, and its inner diameter matches the outer diameter of the RF copper rod 1. Specifically, the protective sleeve 5 is a component fitted around the outer periphery of the RF copper rod 1 to protect the surface of the RF copper rod 1 from damage; the cylindrical structure means that the protective sleeve 5 is a hollow cylinder with an inner wall, an outer wall, and two end faces, the inner wall forming a cavity to accommodate the RF copper rod 1; the inner diameter of the protective sleeve 5 is the diameter of the circle enclosed by the inner wall of the protective sleeve 5, and the outer diameter of the RF copper rod 1 is the diameter of the circle enclosed by the outer circumference of the RF copper rod 1. The matching between the two is such that the inner diameter of the protective sleeve 5 is similar in size to the outer diameter of the RF copper rod 1, so that the protective sleeve 5 can be tightly fitted onto the RF copper rod 1. The protective sleeve 5 is a cylindrical structure, its inner diameter matches the outer diameter of the RF copper rod 1, and the inner wall of the protective sleeve 5 fits tightly against the outer circumference of the RF copper rod 1 without obvious gaps, forming a stable fitting. Specifically, the cylindrical protective sleeve 5, with its matching inner and outer diameters, ensures a tight fit with the RF copper rod 1, preventing it from sliding on the rod. This guarantees that when the clamping component 4 moves the RF copper rod 1 via the protective sleeve 5, force is directly transmitted. Simultaneously, the cylindrical structure fully encloses the outer circumference of the RF copper rod 1, maximizing surface protection and preventing scratches during clamping. This ensures the accuracy of tensile testing and resolves impedance mismatch issues. This protective sleeve 5 structure enhances the stability of the fit between the sleeve and the RF copper rod 1, comprehensively protecting the surface of the rod and ensuring the integrity of the rod and the accuracy of tensile testing during the testing process, thus supporting stable operation of subsequent processes.

[0034] In one embodiment, the protective sleeve 5 is a non-metallic protective sleeve 5. Specifically, the non-metallic protective sleeve 5 refers to a protective sleeve 5 made of a non-metallic material, such as plastic, rubber, or ceramic. These materials are non-conductive and have moderate hardness, providing protection without affecting the conductivity of the RF copper rod 1. The non-metallic protective sleeve 5 can also be a low-friction coefficient non-metallic protective sleeve 5 to avoid scratching the surface of the RF copper rod 1. The protective sleeve 5, being non-metallic, is fitted around the outer periphery of the RF copper rod 1, forming a tight fit. The clamping member 4 is clamped around the outer periphery of the non-metallic protective sleeve 5, without direct contact with the RF copper rod 1. Specifically, the non-metallic protective sleeve 5 will not undergo an electrochemical reaction with the RF copper rod 1, nor will it scratch the surface of the RF copper rod 1 due to excessive hardness. Simultaneously, the insulating properties of the non-metallic material prevent any impact on the conductivity of the RF copper rod 1, ensuring that the RF copper rod 1 can still transmit RF power normally after testing. Accurate detection of the tensile force value determines the contact pressure, thus resolving the impedance mismatch problem. The non-metallic protective sleeve 5 protects the surface and conductivity of the RF copper rod 1, ensures the reusability of the RF copper rod 1 after testing, reduces production costs, and guarantees the accuracy of tensile testing, providing a reliable guarantee for screening qualified RF copper rods 1.

[0035] In this embodiment, the protective sleeve 5 is a polytetrafluoroethylene (PTFE) protective sleeve 5. Specifically, PTFE is a non-metallic material with low friction coefficient, high temperature resistance, and corrosion resistance. The protective sleeve 5 made of this material has good stability and protective performance. The protective sleeve 5 is a PTFE protective sleeve 5, which has an overall sleeve-like structure that matches the RF copper rod 1. It is fitted around the outer periphery of the RF copper rod 1, and the inner wall is tightly fitted to the outer peripheral surface of the RF copper rod 1. The clamping member 4 is clamped on the outer side of the PTFE protective sleeve 5. Specifically, the low friction coefficient of PTFE material can reduce the friction between the protective sleeve 5 and the RF copper rod 1, avoiding damage to the surface of the RF copper rod 1 when putting on or taking off the protective sleeve 5. Its high temperature resistance and corrosion resistance can ensure that the protective sleeve 5 can be used stably in different process environments, ensuring that the protective sleeve 5 can effectively play a protective role for a long time, thereby ensuring the accuracy of tensile force detection. The tensile force value is used to determine whether the contact pressure is qualified, thus solving the impedance mismatch problem. The PTFE protective sleeve 5 further enhances the protective performance and service life of the protective sleeve 5, ensuring effective protection of the radio frequency copper rod 1 during long-term testing, while also ensuring the accuracy and stability of tensile testing, thus providing support for the long-term stable operation of the equipment.

[0036] Reference Figures 1-3This utility model embodiment also provides a semiconductor device, including: an electrostatic chuck 7, an RF copper rod 1, a matching device 2, and a device for detecting the contact state between the RF copper rod 1 and the matching device 2. The two ends of the RF copper rod 1 are respectively connected to the electrostatic chuck 7 and the matching device 2. The device for detecting the contact state between the RF copper rod 1 and the matching device 2 is the same as the device described in the above embodiment. This device is used to pre-detect the contact state between the RF copper rod 1 and the matching device 2 before the process. This device for detecting the contact state between the RF copper rod 1 and the matching device 2 has been described in detail in the above embodiment, and for the sake of brevity, it will not be repeated here.

[0037] Specifically, the electrostatic chuck 7 is a component used in semiconductor equipment to fix wafers, and it has the function of adsorbing and conducting radio frequency (RF) power; the RF copper rod 1 is a long strip-shaped conductive component used to connect the electrostatic chuck 7 and the matching device 2 and transmit RF power; the matching device 2 is a component for adjusting the RF signal and adjusting the loop impedance; the detection device for the contact state of the RF copper rod 1 and the matching device 2 is a component used to detect whether the contact state is qualified. The two ends of the RF copper rod 1 are connected to the electrostatic chuck 7 and the matching device 2 respectively, forming part of the biased RF loop. The detection device, in conjunction with the RF copper rod 1 and the matching device 2 before the process, performs a pre-detection of the contact state of the two. Specifically, by pre-detecting the contact state of the RF copper rod 1 and the matching device 2 before the process begins, components with poor contact can be screened out in advance, avoiding the use of RF copper rod 1 or matching device 2 with poor contact in the process. This prevents increased contact resistance due to poor contact, thereby avoiding RF loop impedance mismatch and solving the problem of excessive reflected power that may occur during the process. The semiconductor equipment in this embodiment can detect potential contact problems in advance before the process, reduce the probability of machine alarms and downtime during the process, ensure the continuity and stability of semiconductor equipment process operation, and improve production efficiency and thin film deposition quality.

[0038] To facilitate understanding of the tensile force detection in this embodiment, an example scenario will be used for illustration below.

[0039] For example, in the routine maintenance of HDPCVD (High-Density Plasma Chemical Vapor Deposition) equipment, technicians need to perform contact status checks on a batch of RF copper rods 1 to be replaced to ensure that they are properly fitted with the spring-loaded socket 21 of the 13.56MHz bias matcher 2. The spring-loaded socket 21 of the matcher 2 has a holding force requirement set by the supplier according to the current parameters required by the equipment process. The core of this holding force requirement is the minimum contact force standard that the spring-loaded socket 21 and the RF copper rod 1 must meet under the premise of ensuring the stable passage of the current required by the bias RF circuit during the equipment process. Specifically, the holding force must be ≥ 30N; Technicians use a testing device to insert one end of the RF copper rod 1 into the leaf spring socket 21 of the matching device 2, and connect the other end to the tension gauge 3 through the protective sleeve 5 and the clamp 4. After pulling the tension gauge 3, if the reading of the tension value is 32N, which is greater than 30N, it means that the contact force between the RF copper rod 1 and the leaf spring socket 21 meets the requirements, can ensure the stable current flow, meet the equipment usage requirements, and can be used for subsequent processes; if the reading of the tension value is 28N, which is less than 30N, it means that the contact force between the two is insufficient, and cannot ensure the stable current flow. The RF copper rod 1 cannot continue to be used and needs to be replaced with an RF copper rod 1 with a tension value that meets the standard.

[0040] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this utility model, and these modifications or substitutions should all be covered within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

Claims

1. A device for detecting the contact state between an RF copper rod and a matching unit, characterized in that, include: The device includes an RF copper rod, a matching unit, and a tensile testing component. The matching unit has a leaf spring type socket. One end of the RF copper rod is inserted into the leaf spring type socket, and the other end is connected to the tensile testing component. The tensile testing component is configured to read the tensile value when the RF copper rod is pulled out of the leaf spring type socket.

2. The detection device according to claim 1, characterized in that, The tensile testing component includes a tensile gauge, a clamping member, and a protective sleeve. The protective sleeve is fitted around the outer periphery of the other end of the radio frequency copper rod. The clamping member is detachably clamped onto the protective sleeve. The tensile gauge is connected to the clamping member.

3. The detection device according to claim 2, characterized in that, The clamping member includes a clamping part, a first connecting part, and a second connecting part. The clamping part is at least partially clamped to the outer periphery of the protective sleeve. The first connecting part and the second connecting part are respectively disposed on both sides of the clamping part. Both the first connecting part and the second connecting part are connected to the tension gauge.

4. The detection device according to claim 3, characterized in that, Both the first connecting part and the second connecting part are provided with connecting holes, and the reading end of the tension gauge is fixedly connected to the connecting holes on the first connecting part and the second connecting part respectively through connecting ropes.

5. The detection device according to claim 3, characterized in that, The first connecting portion and the second connecting portion are symmetrically arranged on both sides of the clamping portion along the axis of the radio frequency copper rod.

6. The detection device according to claim 3, characterized in that, The clamping part is semi-circular in shape.

7. The detection device according to claim 2, characterized in that, The protective sleeve has a cylindrical structure, and its inner diameter matches the outer diameter of the radio frequency copper rod.

8. The detection device according to claim 2, characterized in that, The protective sleeve is a non-metallic protective sleeve.

9. The detection device according to claim 8, characterized in that, The protective sleeve is a polytetrafluoroethylene (PTFE) protective sleeve.

10. A semiconductor device, characterized in that, include: An electrostatic chuck, an RF copper rod, a matching device, and a device for detecting the contact state between the RF copper rod and the matching device, wherein the two ends of the RF copper rod are respectively connected to the electrostatic chuck and the matching device, and the device for detecting the contact state between the RF copper rod and the matching device is the detection device according to any one of claims 1-9, and the detection device is used to pre-detect the contact state between the RF copper rod and the matching device before the process.

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