Valve island testing apparatus

Abstract

The application discloses a valve island testing device and belongs to the technical field of detection. The valve island testing device comprises a workbench, a pipeline, a pipe support plate and a plurality of branch assemblies. The workbench has a table top. The pipeline and the branch assemblies are arranged above the table top. The branch assembly comprises a pipe fitting and a collection piece. One end of the pipe fitting is communicated with the pipeline, and the other end is configured to be communicated with a water outlet of a valve island. The collection piece is connected with the pipe fitting and is configured to collect pressure information and flow information in the pipe fitting. The pipe support plate is installed on the table top and is used for supporting and fixing the pipe fitting. According to the technical scheme, each branch of the valve island can be communicated with the corresponding branch assembly in turn, so that the flow information and the pressure information of each branch can be determined, the flow and the pressure of the water outlet of each throttling hole of the valve island can be detected, and whether the throttling holes of the valve island are blocked, have burrs, impurities, foreign matters and incomplete suction of the electromagnetic valve can be quickly judged.

Description

Technical Field

[0001] This application relates to the field of testing technology, and in particular to a valve island testing device. Background Technology

[0002] In various semiconductor manufacturing processes, the cooling and temperature control of the vacuum pump body are closely related to product quality. The temperature control requirements for the vacuum pump body vary depending on the process. For example, processes involving pyrolysis or corrosive process gases require cryogenic control of the vacuum pump body to prevent the process gases from undergoing pyrolysis or CVD (Chemical Vapor Deposition) reactions due to excessively high pump body temperature, forming solid particles or powdery byproducts. Conversely, processes involving low-temperature condensable process gases require high-temperature control of the vacuum pump body to prevent condensation and the formation of solid particles or powdery byproducts due to excessively low pump body temperature. Poor temperature control of the vacuum pump body can lead to the accumulation of these byproducts between the stator and rotor, causing mechanical friction, pump jamming, or even system failure, thus reducing the lifespan of the vacuum pump. Furthermore, poor cryogenic control exacerbates the corrosion of the stator and rotor by corrosive process gases, resulting in a decrease in the vacuum pump's ultimate vacuum and pumping speed. Therefore, temperature control of the vacuum pump body is very important during use.

[0003] The core component for vacuum pump body temperature control is the valve island (e.g., a water-cooled valve island for cooling the pump body). The valve island has multiple orifices of different diameters to control the flow rate in the pipes connected to each orifice. A solenoid valve is installed at the outlet of the orifice in the water-cooled valve island. This solenoid valve is normally closed; its function is to control the opening and closing of the orifice by switching it on and off. For example, when the pump body surface temperature rises to a set value, the solenoid valve is energized and opens the corresponding orifice, allowing cooling water to be output from the outlet of the orifice at the corresponding flow rate, thus cooling the pump body. When the pump body temperature drops to the target temperature, the solenoid valve is de-energized and closes. This process repeats until the pump body temperature rises back to the set value, thus achieving pump body temperature control.

[0004] Typically, when the inlet pressure of a valve island is constant, the flow rate and pressure through different throttling orifices of the valve island are also constant. However, blockages, burrs, impurities, foreign objects, or incomplete engagement of the solenoid valve can lead to lower flow rates. While this may achieve pump body temperature control in the short term, prolonged operation can cause the pump body temperature to rise uncontrollably, triggering high-temperature alarms or even shutdown. Therefore, it is crucial to accurately measure the flow rate and pressure at the outlet of each throttling orifice of the valve island. Utility Model Content

[0005] This application provides a valve island testing device that can measure the flow rate and pressure at the outlet of each throttling orifice of the valve island, thereby at least solving the above-mentioned technical problems.

[0006] To achieve the above objectives, this application provides a valve island testing device, which includes a workbench, pipes, a pipe support plate, and multiple branch components. The workbench has a tabletop. The pipes and multiple branch components are arranged above the tabletop. Each branch component includes a pipe fitting and a data acquisition device. One end of the pipe fitting is connected to the pipe, and the other end is configured to connect to an outlet of the valve island. The data acquisition device is connected to the pipe fitting and is configured to acquire pressure and flow information within the pipe fitting. The pipe support plate is installed on the tabletop and is used to support and fix the pipe fitting.

[0007] Optionally, the valve island testing equipment further includes a valve support plate, which is mounted on the platform and configured to mount the valve island.

[0008] Optionally, the valve support plate includes fasteners, a first base plate, and a first upright plate. The first base plate is connected to the table surface, one end of the first upright plate is connected to the first base plate, and the other end of the first upright plate is provided with a mounting groove. The mounting groove is configured to place the water inlet pipe of the valve island, and the fasteners are configured to fix the valve island to the first upright plate.

[0009] Optionally, the pipe support plate includes a second base plate and a second upright plate. The second base plate is connected to the table surface, and one end of the second upright plate is connected to the second base plate. A through hole is provided on the second upright plate, and the pipe is inserted through the through hole.

[0010] Optionally, the valve island testing equipment further includes an electronically controlled data acquisition unit. The data acquisition unit sends at least one of the pressure information and the flow information to the electronically controlled data acquisition unit. The electronically controlled data acquisition unit compares the received information with the corresponding preset information and outputs the comparison result.

[0011] Optionally, the data acquisition device includes a pressure gauge and a flow meter, both of which are connected to the pipe fitting. The pressure gauge is configured to acquire pressure information within the pipe fitting, and the flow meter is configured to acquire flow information within the pipe fitting.

[0012] Optionally, the pipe fitting includes a first pipe, a second pipe, and a third pipe connected in sequence, with the pressure gauge connected between the first pipe and the second pipe, and the flow meter connected to the third pipe; wherein the second pipe is connected to the pipe support plate.

[0013] Optionally, the fitting further includes a tee pipe, which is connected between the first pipe and the second pipe, with one end of the tee pipe inserted into the pressure gauge, and the other two ends of the tee pipe connected to the first pipe and the second pipe respectively; and / or, the flow meter is connected to the third pipe through a through-plate connector.

[0014] Optionally, the branch assembly further includes a connecting pipe and a pipe plug, one end of the connecting pipe being connected to the end of the pipe fitting away from the pipe, and the other end being connected to the pipe plug, the pipe fitting being configured to be connected to an outlet of the valve island in sequence through the connecting pipe and the pipe plug; wherein the connecting pipe is flexible.

[0015] Optionally, a plurality of casters are provided at the bottom of the workbench; and / or, a lighting device is provided above the workbench.

[0016] In the valve island testing equipment of this application embodiment, through the above technical solution, each branch of the valve island can be connected to the corresponding branch component in sequence, thereby measuring the flow and pressure information of each branch, which is conducive to detecting whether the flow and pressure of the outlet of each throttling orifice of the valve island are normal, thereby quickly determining whether there is blockage, burrs, impurities, foreign objects, or incomplete engagement of the solenoid valve in each throttling orifice of the valve island.

[0017] Other features and advantages of this application will be described in detail in the following detailed description section. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] To gain a more complete understanding of this application and its beneficial effects, the following description will be provided in conjunction with the accompanying drawings, wherein the same reference numerals in the following description denote the same parts.

[0020] Figure 1 This is a schematic diagram of the valve island testing equipment provided in an embodiment of this application;

[0021] Figure 2 This is a schematic diagram of the layout of the branch components provided in an embodiment of this application;

[0022] Figure 3 This is a schematic diagram showing the connection between the branch assembly and the valve island provided in an embodiment of this application;

[0023] Figure 4This is a schematic diagram of the valve support plate provided in an embodiment of this application;

[0024] Figure 5 This is a schematic diagram of the structure of the tube support plate provided in an embodiment of this application;

[0025] Figure 6 This is a top view of the branch component provided in an embodiment of this application;

[0026] Figure 7 yes Figure 6 Sectional view of AA;

[0027] Figure 8 yes Figure 7 Enlarged schematic diagram of part B;

[0028] Figure 9 yes Figure 7 An enlarged schematic diagram of section C.

[0029] Explanation of reference numerals in the attached figures:

[0030] 10-Valve island testing equipment;

[0031] 11 Workbench; 111 Tabletop;

[0032] 12-Pipeline;

[0033] 13-Pipe support plate; 131-Second base plate; 132-Second vertical plate; 1321-Perforation;

[0034] 14-Branch assembly; 141-Connecting pipe; 142-Pipe plug; 143-Pipe fitting; 144-Pipe connector; 1441-Anti-loosening tooth; 145-Collar ring;

[0035] 15-Valve support plate; 151-Fastener; 152-First base plate; 153-First upright plate; 1531-Mounting through groove; 154-Fixing screw; 155-First through hole; 156-Connector; 1561-Angle bracket; 1562-Connecting screw;

[0036] 16-Data acquisition unit; 161-Pressure gauge; 162-Flow meter;

[0037] 17-Pipe fitting; 171-First pipe; 172-Second pipe; 173-Third pipe; 174-Tee pipe; 175-Through-plate connector; 176-Connecting nut;

[0038] 18-Electrically controlled data acquisition unit; 191-Pulley; 192-Lighting device;

[0039] 20-Valve Island. Detailed Implementation

[0040] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the protection scope of this application.

[0041] The following combination Figures 1 to 9 This application provides a detailed description of a valve island testing device 10 provided in the embodiments of this application.

[0042] Please see Figures 1 to 3 This application provides a valve island testing device 10. The valve island testing device 10 includes a workbench 11, a pipe 12, a pipe support plate 13, and multiple branch assembly 14. The workbench 11 has a table surface 111. The pipe 12 and the multiple branch assembly 14 are all located on the table surface 111. Each branch assembly 14 includes a pipe fitting 17 and a data acquisition device 16. One end of the pipe fitting 17 is connected to the pipe 12, and the other end is configured to be connected to an outlet of the valve island 20. The data acquisition device 16 is connected to the pipe fitting 17. The data acquisition device 16 is configured to collect pressure and flow information within the pipe fitting 17. The pipe support plate 13 is disposed between the table surface 111 and the pipe fitting 17, and is connected to both the pipe fitting 17 and the table surface 111.

[0043] It is understandable that the number of branch components 14 is equal to the number of outlets of the valve island 20 under test.

[0044] For example, the number of outlets of a valve island 20 is six, and correspondingly, the number of branch components 14 of the valve island test equipment 10 is six.

[0045] For example, the data acquisition unit 16 can be a combination of a pressure gauge 161 and a flow meter 162. The pressure gauge 161 and the flow meter 162 can be electrically powered data acquisition devices; for example, the flow meter 162 can be a digital display flow meter 162. The data acquisition unit 16 can also be an integrated pressure-flow sensor or a multi-parameter flow transmitter, such as a turbine-type integrated pressure-flow device, an ultrasonic-type integrated pressure-flow device, or an electromagnetic integrated pressure-flow device.

[0046] Taking a valve island 20 with six branches as an example, the valve island 20 has six throttling orifices (first throttling orifice, second throttling orifice, third throttling orifice, fourth throttling orifice, fifth throttling orifice, and sixth throttling orifice). When measuring the flow rate and pressure at the outlet of each throttling orifice of the valve island 20, the preset upper and lower limits of pressure and flow rate of each throttling orifice of the valve island 20 are first determined according to the design of the valve island 20. Then, fluid is introduced into the valve island 20 through the inlet.

[0047] After the pressure displayed on the flow and pressure acquisition devices 16 of each branch component 14 stabilizes, the first solenoid valve of the valve island 20, used to control the opening and closing of the first throttling orifice, is opened first. This allows the fluid entering the valve island 20 to flow through the first throttling orifice and into the corresponding pipe fitting 17. The corresponding acquisition device 16 then measures the flow and pressure information flowing out of the first throttling orifice. Next, the flow information acquired by the acquisition device 16 is compared with the design upper and lower limits of the flow rate corresponding to the first throttling orifice to determine whether the flow rate of the first throttling orifice is qualified. Similarly, the pressure information acquired by the acquisition device 16 is compared with the design upper and lower limits of the pressure corresponding to the first throttling orifice to determine whether the pressure of the first throttling orifice is qualified. Then, the first solenoid valve is closed, the second solenoid valve is opened, and the above operation is repeated. This process is repeated to test the flow and pressure of each throttling orifice after water is passed through it individually, thus determining whether the corresponding branch is qualified.

[0048] The fluid inlet pipe 12 in the branch assembly 14 can be guided back to the water tank through the pipe 12, providing a continuous fluid supply for the detection of the valve island 20.

[0049] In this embodiment, by setting multiple branch components 14, each branch of the valve island 20 can be sequentially connected to the corresponding branch component 14. This allows for the measurement of flow and pressure information for each branch, facilitating the detection of whether the flow and pressure at the outlet of each throttling orifice of the valve island 20 are normal. This enables rapid determination of whether there are blockages, burrs, impurities, foreign objects, or incomplete solenoid valve engagement in each throttling orifice of the valve island 20. Thus, the reliability of the valve island 20 applied to the vacuum pump can be improved, thereby enhancing the reliability of the vacuum pump itself.

[0050] Please see Figure 1 and Figure 2 In some embodiments, the valve island testing apparatus 10 further includes a valve support plate 15. The valve support plate 15 is disposed on the platform 111. The valve support plate 15 is configured to mount the valve island 20. Thus, the valve island 20 can be suspended above the platform 111 by the valve support plate 15, thereby improving the stability of the valve island 20 on the platform 111.

[0051] In addition, by suspending the valve island 20 above the tabletop 111 through the valve support plate 15, a gap can be created between the valve island 20 and the tabletop 111, which is beneficial for the layout of pipelines.

[0052] It is understandable that the valve support plate 15 can be magnetically fixed to the tabletop 111, screwed to the tabletop 111, or glued to the tabletop 111.

[0053] Please see Figure 3 as well as Figure 4In some embodiments, the valve support plate 15 includes a fastener 151, a first base plate 152, and a first upright plate 153. The first base plate 152 is connected to the tabletop 111. One end of the first upright plate 153 is connected to the first base plate 152. The other end of the first upright plate 153 is provided with a mounting slot 1531. The mounting slot 1531 is configured to accommodate the water inlet pipe of the valve island 20. The fastener 151 is configured to fix the valve island 20 to the first upright plate 153. This results in a simple structure for the valve support plate 15, while maintaining suitable strength.

[0054] Specifically, the first base plate 152 is horizontally fixed to the tabletop 111 by four fixing screws 154.

[0055] For example, the fixing screw 154 is an M8*25 screw.

[0056] The first upright plate 153 can be fixed to the first base plate 152 with screws or glued to the first base plate 152.

[0057] Please see Figure 4 In some embodiments, the fastener 151 is a bolt. A first through hole 155 is also provided on the first upright plate 153. The fastener 151 is configured to pass through the first through hole 155 and be threadedly connected to the valve island 20. In this way, the valve island 20 can be fixed to the first upright plate 153, while also making the connection structure between the valve island 20 and the first upright plate 153 simple and secure.

[0058] Specifically, the valve island 20 is fixed to the first upright plate 153 by three fasteners 151.

[0059] For example, fastener 151 is an M10*25 screw.

[0060] Please see Figure 4 In some embodiments, the valve support plate 15 further includes a connector 156. The connector 156 includes a bracket 1561 and a connecting screw 1562. One side of the bracket 1561 is connected to the first base plate 152 via the connecting screw 1562. The other side of the bracket 1561 is connected to the first upright plate 153 via the connecting screw 1562. This simplifies the connection structure between the first base plate 152 and the first upright plate 153 while ensuring reliable connection for stable support of the valve body.

[0061] For example, the first base plate 152 is connected to the first upright plate 153 by four connectors 156. Specifically, two connectors 156 are provided on both sides of the first upright plate 153.

[0062] Among them, the connecting screw 1562 is an M10*25 screw.

[0063] Please see Figure 2 and Figure 5 In some embodiments, the pipe support plate 13 includes a second base plate 131 and a second upright plate 132. The second base plate 131 is connected to the platform 111. One end of the second upright plate 132 is connected to the second base plate 131. A through hole 1321 is provided on the second upright plate 132, through which the pipe fitting 17 passes. This makes the pipe support plate 13 structurally simple and has suitable strength. In addition, the pipe fitting 17 passing through the through hole 1321 can restrict the radial movement of the pipe fitting 17 through the hole wall of the through hole 1321, thereby improving the positional stability of the pipe fitting 17 and thus improving the accuracy of the inspection.

[0064] Specifically, the second base plate 131 is horizontally fixed to the tabletop 111 by four fixing screws 154.

[0065] For example, the fixing screw 154 is an M8*25 screw.

[0066] Specifically, the second upright plate 132 is connected to the second base plate 131 via multiple connectors 156. One side of the corner bracket 1561 of the connector 156 is connected to the second upright plate 132 via a connecting screw 1562, and the other side of the corner bracket 1561 of the connector 156 is connected to the second base plate 131 via a connecting screw 1562.

[0067] Please see Figure 1 In some embodiments, the valve island testing device 10 further includes an electronically controlled data acquisition unit 18. The data acquisition unit 16 sends at least one of the pressure information and flow information to the electronically controlled data acquisition unit 18. The electronically controlled data acquisition unit 18 compares the received information with corresponding preset information and outputs the comparison result. Thus, the comparison between the acquired information and the preset information can be performed directly through the electronically controlled data acquisition unit 18, thereby improving testing efficiency and accuracy.

[0068] It is understandable that the preset information consists of the upper and lower limits of the pressure design and the upper and lower limits of the flow design for each flow orifice.

[0069] The electronically controlled data acquisition unit 18 includes, but is not limited to, the MI-8100 series data acquisition unit and the MI-7308 series data acquisition controller.

[0070] The data acquisition unit 16 can send the acquired data to the electronic control data acquisition unit 18 via a data cable or via a communication module such as Bluetooth.

[0071] Specifically, the flow rate information collected by the acquisition unit 16 is sent to the electronically controlled acquisition unit 18 for explanation. When measuring the flow rate and pressure at the outlet of each orifice of the valve island 20, the preset upper and lower limits of pressure and flow rate for each orifice of the valve island 20 are first determined according to the valve island 20 design, and the upper and lower limits of flow rate at the outlet of each orifice are input into the electronically controlled acquisition unit 18. Then, fluid is introduced into the valve island 20 through the inlet.

[0072] After the pressure displayed by the acquisition devices 16 of each branch component 14 stabilizes, the first solenoid valve of the valve island 20, used to control the opening and closing of the first throttling orifice, is opened first. This allows the fluid entering the valve island 20 to flow through the first throttling orifice and into the corresponding pipe fitting 17. The corresponding acquisition device 16 then measures the flow rate and pressure information flowing out of the first throttling orifice. Next, the electronically controlled acquisition device 18 compares the flow rate information acquired by the acquisition device 16 with the design upper and lower limits of the flow rate corresponding to the first throttling orifice to determine whether the flow rate of the first throttling orifice is qualified. Then, the pressure information acquired by the acquisition device 16 is visually obtained and compared with the design upper and lower limits of the pressure corresponding to the first throttling orifice to determine whether the pressure of the first throttling orifice is qualified. Then, the first solenoid valve is closed, the second solenoid valve is opened, and the above operation is repeated. This process is repeated to test the flow rate and pressure of each throttling orifice after water is passed through individually, and to determine whether the corresponding branch is qualified.

[0073] Each solenoid valve in the control system 20 acts as a switch to control the on / off state of each branch. The communication method between the solenoid valves and the electronic control data acquisition unit 18 is not limited.

[0074] The electronic control data acquisition unit 18 can output the required operating voltage of the digital display flow meter 162 in any way, and the communication signal format involved is not limited.

[0075] The signal communication method between the data acquisition device 16 and the electronic data acquisition device 18 is not limited; for example, it can be Bluetooth communication.

[0076] Please see Figure 2 In some embodiments, the data acquisition unit 16 includes a pressure gauge 161 and a flow meter 162. Both the pressure gauge 161 and the flow meter 162 are connected to the pipe fitting 17. The pressure gauge 161 is configured to acquire pressure information within the pipe fitting 17. The flow meter 162 is configured to acquire flow information within the pipe fitting 17. This allows for the acquisition of both pressure and flow information while maintaining a simple structure for the data acquisition unit 16, thus improving the economic efficiency of the valve island testing equipment 10. Furthermore, separating the data acquisition unit 16 into a pressure gauge 161 and a flow meter 162 allows for separate maintenance of the pressure gauge 161 and the flow meter 162, reducing maintenance costs and improving maintenance convenience.

[0077] The type of pressure gauge 161, the type of flow meter 162, the installation location of pressure gauge 161, and the installation location of flow meter are not limited. As long as pressure gauge 161 can collect pressure information within pipe fitting 17 and flow meter 162 can collect flow information within pipe fitting 17, it is acceptable.

[0078] Please see Figure 6 and Figure 7 In some embodiments, the fitting 17 includes a first pipe 171, a second pipe 172, and a third pipe 173 connected in sequence. A pressure gauge 161 is connected between the first pipe 171 and the second pipe 172. A flow meter 162 is connected to the third pipe 173. The second pipe 172 is connected to the pipe support plate 13. This makes the fitting 17 a discrete component, facilitating the connection of the pressure gauge 161 and the flow meter 162 within the fitting 17, thereby improving assembly efficiency.

[0079] Please see Figure 6 and Figure 7 In some embodiments, fitting 17 further includes a tee pipe 174. The tee pipe 174 connects between the first pipe 171 and the second pipe 172. One end of the tee pipe 174 is inserted into the pressure gauge 161, and the other two ends of the tee pipe 174 are connected to the first pipe 171 and the second pipe 172, respectively. Thus, by inserting one end of the tee pipe 174 into the pressure gauge 161, a larger connection area is provided between fitting 17 and the pressure gauge 161, thereby improving the reliability of the connection between the pressure gauge 161 and fitting 17.

[0080] The other two ports of the tee tube 174 can be threadedly connected to the first tube 171 and the second tube 172, respectively. Specifically, one end of the first tube 171 is inserted into one port of the tee tube 174 and threadedly connected thereto, and one end of the second tube 172 is inserted into the other port of the tee tube 174 and threadedly connected thereto.

[0081] Please see Figure 6 and Figure 7 In some embodiments, the flow meter 162 is connected to the third pipe 173 via a through-plate connector 175. This improves the reliability of the flow meter 162's connection to the pipe fitting 17.

[0082] It is understandable that the through-plate connector 175 is an accessory used to pass through the pipe 12, enabling the pipe 12 to be connected and allowing the flow meter 162 to be installed.

[0083] For example, flow meter 162 is a digital flow meter 162.

[0084] For example, the through-plate connector 175 is integrally formed with the third tube 173.

[0085] Please see Figure 7 and Figure 8In some embodiments, the pipe fitting 17 further includes a connecting nut 176. The end of the second pipe 172 furthest from the first pipe 171 passes through a through hole 1321 on the pipe support plate 13 and is inserted into the inner hole of the third pipe 173. The connecting nut 176 is located at the end of the through hole 1321 opposite to the third pipe 173 and is threaded onto the second pipe 172. The end faces of the nut and the third pipe 173 clamp the portion of the pipe support plate 13 near the through hole 1321. Thus, by clamping the portion of the pipe support plate 13 near the through hole 1321 with the end faces of the nut and the third pipe 173, the pipe fitting 17 can be fixed relative to the pipe support plate 13, thereby improving the positional stability of the pipe fitting 17 and facilitating successful testing of the valve island 20.

[0086] The end of the second tube 172 that is away from the first tube 171 can be threaded to the inner wall of the third tube 173.

[0087] Please see Figure 2 In some embodiments, the branch assembly 14 further includes a connecting pipe 141 and a pipe plug 142. One end of the connecting pipe 141 is connected to the end of the fitting 17 away from the pipe 12, and the other end is connected to the pipe plug 142. The fitting 17 is configured to connect to an outlet of the valve island 20 in sequence through the connecting pipe 141 and the pipe plug 142. The connecting pipe 141 is flexible. Thus, the fitting 17 can be quickly connected to the outlet of the valve island 20 via the pipe plug 142 to improve testing efficiency; simultaneously, the flexibility of the connecting pipe 141 allows for adjustment of the arrangement of the branch assembly 14 to improve operability.

[0088] Please see Figure 7 and Figure 9 In some embodiments, the branch assembly 14 further includes a pipe fitting 143, which includes a pipe connector 144 and a collar 145. One end of the pipe connector 144 is connected to the pipe fitting 17, and one end of the connecting pipe 141 is sleeved on the other end of the pipe connector 144. The collar 145 is sleeved on the end of the connecting pipe 141 that is sleeved with the pipe connector 144, and the connecting pipe 141 is press-fitted with the collar 145 and the pipe connector 144. This improves the reliability and sealing of the connection between the pipe fitting 17 and the connecting pipe 141.

[0089] The other end of the pipe connector 144 is connected to the end of the third pipe 173 of the pipe fitting 17 that is away from the second pipe 172.

[0090] Please see Figure 9In some embodiments, anti-detachment teeth 1441 are provided on the outer peripheral surface of the pipe connector 144. Specifically, along the direction approaching the connecting pipe 141, the surface of the anti-detachment teeth 1441 smoothly transitions from the surface away from the pipe connector 144 to the outer peripheral surface of the pipe connector 144. Thus, the anti-detachment teeth 1441 increase the frictional force at which the connecting pipe 141 disengages from the pipe connector 144, thereby improving the reliability of the connection between the pipe connector 144 and the connecting pipe 141. Simultaneously, the pressure between the pipe connector 144 and the connecting pipe 141 can be locally increased, thereby improving the sealing performance of the mating parts between the pipe connector 144 and the connecting pipe 141.

[0091] In some embodiments, the connecting pipe 141 is a metal pipe. This increases the strength of the connecting pipe 141 and prevents the internal channel of the connecting pipe 141 from becoming too narrow when it bends, thereby improving the smoothness of fluid flow inside the connecting pipe 141.

[0092] Please see Figure 1 In some embodiments, multiple casters 191 are provided at the bottom of the worktable 11. This improves the ease of movement of the worktable 11.

[0093] Please see Figure 1 A lighting device 192 is provided above the workbench 11. In this way, the lighting device 192 can illuminate the workbench 111 to increase the brightness of the workbench 111, thereby making it easier for relevant personnel to read the values ​​clearly.

[0094] In some embodiments, the testing steps of the valve island 20 by the valve island testing device 10 are as follows:

[0095] S1. Select the digital flow meter 162 and pressure gauge 161 according to the design values ​​of flow rate and pressure for different types of water-cooled valve islands 20. For example, select a flow meter 162 with a measurement range of 0-15L / min and a pressure gauge 161 with a measurement range of 0-6Mpa.

[0096] S2. Based on the type of valve island 20, design the dimensions and specific structure of valve support plate 15, pipe support plate 13 and pipe fitting 17;

[0097] S3. Using finite element analysis software such as ANSYS, simulate the flow rate and pressure of cooling water flowing into each branch individually under the condition that 0.55 MPa pressure cooling water is introduced into the inlet of valve island 20.

[0098] S4. Use a machining center to process the designed valve support plate 15, pipe support plate 13 and pipe fittings 17, etc.

[0099] S5. Assemble, test, and verify the various components of the valve island testing equipment 10.

[0100] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0101] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0102] The terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a product that comprises a list of elements includes not only those elements but also other elements not expressly listed or inherent to such a product.

[0103] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0104] The embodiments, implementation methods, and related technical features of this application can be combined and substituted for each other without conflict.

[0105] The above are merely preferred embodiments of this application and are not intended to limit this application in any way. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of this application without departing from the scope of the technical solution of this application shall still fall within the scope of the technical solution of this application.

Claims

1. A valve island testing device, characterized in that, include: A workbench (11) has a tabletop (111); Pipe (12) is arranged above the platform (111); Multiple branch components (14) are arranged above the platform (111). Each branch component (14) includes a pipe fitting (17) and a collector (16). One end of the pipe fitting (17) is connected to the pipe (12), and the other end is configured to be connected to an outlet of the valve island (20). The collector (16) is connected to the pipe fitting (17) and is configured to collect pressure and flow information within the pipe fitting (17). as well as A pipe support plate (13) is installed on the tabletop (111) and is used to support and fix the pipe fitting (17).

2. The valve island testing equipment according to claim 1, characterized in that, The valve island testing equipment also includes a valve support plate (15), which is mounted on the platform (111) and configured to mount the valve island (20).

3. The valve island testing equipment according to claim 2, characterized in that, The valve support plate (15) includes a fastener (151), a first base plate (152) and a first upright plate (153). The first base plate (152) is connected to the tabletop (111). One end of the first upright plate (153) is connected to the first base plate (152). The other end of the first upright plate (153) is provided with an installation through groove (1531). The installation through groove (1531) is configured to place the water inlet pipe of the valve island (20). The fastener (151) is configured to fix the valve island (20) to the first upright plate (153).

4. The valve island testing equipment according to claim 1, characterized in that, The pipe support plate (13) includes a second base plate (131) and a second upright plate (132). The second base plate (131) is connected to the table surface (111). One end of the second upright plate (132) is connected to the second base plate (131). A through hole (1321) is provided on the second upright plate (132), and the pipe fitting (17) passes through the through hole (1321).

5. The valve island testing equipment according to any one of claims 1-4, characterized in that, The valve island testing equipment also includes an electronically controlled data acquisition unit (18). The data acquisition unit (16) sends at least one of the pressure information and the flow information to the electronically controlled data acquisition unit (18). The electronically controlled data acquisition unit (18) compares the received information with the corresponding preset information and outputs the comparison result.

6. The valve island testing equipment according to any one of claims 1-4, characterized in that, The data acquisition device (16) includes a pressure gauge (161) and a flow meter (162). Both the pressure gauge (161) and the flow meter (162) are connected to the pipe fitting (17). The pressure gauge (161) is configured to acquire pressure information within the pipe fitting (17), and the flow meter (162) is configured to acquire flow information within the pipe fitting (17).

7. The valve island testing equipment according to claim 6, characterized in that, The pipe fitting (17) includes a first pipe (171), a second pipe (172) and a third pipe (173) connected in sequence. The pressure gauge (161) is connected between the first pipe (171) and the second pipe (172), and the flow meter (162) is connected to the third pipe (173). The second tube (172) is connected to the tube support plate (13).

8. The valve island testing equipment according to claim 7, characterized in that, The fitting (17) also includes a tee pipe (174), which is connected between the first pipe (171) and the second pipe (172). One end of the tee pipe (174) is inserted into the pressure gauge (161), and the other two ends of the tee pipe (174) are connected to the first pipe (171) and the second pipe (172) respectively. And / or, the flow meter (162) is connected to the third pipe (173) via a through-plate connector (175).

9. The valve island testing device according to any one of claims 1-4, characterized in that, The branch assembly (14) further includes a connecting pipe (141) and a pipe plug (142). One end of the connecting pipe (141) is connected to the end of the fitting (17) away from the pipe (12), and the other end is connected to the pipe plug (142). The fitting (17) is configured to be connected to an outlet of the valve island (20) in sequence through the connecting pipe (141) and the pipe plug (142). The connecting pipe (141) is flexible.

10. The valve island testing device according to any one of claims 1-4, characterized in that, Multiple pulleys (191) are provided at the bottom of the workbench (11); And / or, a lighting device (192) is provided above the workbench (11).

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