An ellipsometer with high precision compensator

Abstract

The utility model discloses a full spectrum ellipsometer with high accuracy compensator, including base and the backboard of installing on the upper end of base, the upper end outer wall fixedly connected with support platform of base to place material, the front end outer wall center of backboard is provided with main light source, the front end outer wall of backboard is close to right side and is provided with polarization analyser, the left side of main light source is provided with polarization generator, through installing sliding slot, locating piece, chuck and spring, when angle adjustment is carried out to polarization analyser and polarization generator, can provide the pressure of spring tightly, makes the chuck abuts at the inside of sliding slot, and the position between locating piece, spring and polarization analyser and polarization generator is limited, effectively avoided the component because suddenly losing screw fastening force and quickly sliding, protected expensive and accurate polarization component, reduced the component damage because of accidental slide, reduced equipment maintenance cost and downtime.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology, specifically relating to a full-spectrum ellipsometer with a high-precision compensator. Background Technology

[0002] A full-spectrum ellipsometer with a high-precision compensator is an advanced scientific instrument used to measure the optical properties of materials. It can accurately measure optical parameters of material surfaces, such as film thickness, refractive index, and extinction coefficient, and has wide applications in many fields such as materials science, semiconductor manufacturing, optical coating, and biomedicine.

[0003] However, when adjusting the angle of the polarization analyzer and polarization generator, if the operator does not support the polarization analyzer and polarization generator at the moment of loosening the fastening screws that fix the polarization analyzer and polarization generator, the polarization analyzer and polarization generator will move downward and be damaged. Utility Model Content

[0004] The purpose of this invention is to provide a full-spectrum ellipsometer with a high-precision compensator to solve the problem mentioned in the background art that if the operator does not support the polarization analyzer and polarization generator when the fastening screws of the fixed polarization analyzer and polarization generator are loosened, the polarization analyzer and polarization generator will move downward and be damaged.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a full-spectrum ellipsometer with a high-precision compensator, comprising a base and a back plate mounted on the upper end of the base; A support platform is fixedly connected to the upper outer wall of the base for placing materials; A main light source is provided at the center of the front outer wall of the back plate; A polarization analyzer is located on the outer front wall of the back plate near the right side, and a polarization generator is located on the left side of the main light source. The front outer wall of the back plate has a groove, and the rear outer walls of the polarization analyzer and the polarization generator are fixedly connected to positioning blocks that are inserted into the groove. The left and right sides of the two positioning blocks are provided with clips, and springs are fixedly connected between the two clips and the positioning blocks.

[0006] Preferably, the inner circular walls of both grooves are provided with guide grooves for the locking head to engage.

[0007] Preferably, grooves are provided inside the outer walls at both ends of the two positioning blocks to restrict the position of the spring and provide space for the spring to extend and retract.

[0008] Preferably, one end of each of the plurality of card heads is elliptical and has anti-slip texture on its surface.

[0009] Preferably, the base has slots at the four corners of its lower outer wall, and each of the slots has a base plate inside.

[0010] Preferably, each of the lower outer walls of the multiple base plates is fixedly connected with a vibration damping pad, and each of the lower outer walls of the multiple vibration damping pads is provided with multiple vibration damping feet.

[0011] Preferably, the polarization analyzer has an objective lens inside, an analyzer body is located to the right of the objective lens, and a detector is located to the right of the analyzer body.

[0012] Preferably, the polarization generator has an internal secondary light source, a linear polarizer is located to the right of the secondary light source, and a compensator body is located to the right of the linear polarizer.

[0013] Preferably, a fixing frame is fixedly connected to the front outer wall of the back plate, and the body is arranged inside the fixing frame to provide different light parameters of the main light source.

[0014] Preferably, a central axis is provided at the center of the front outer wall of the back plate, and multiple positioning holes are provided on the front outer wall of the back plate to limit the angular position of the polarization analyzer and the polarization generator.

[0015] Compared with the prior art, this utility model provides a full-spectrum ellipsometer with a high-precision compensator, which has the following advantages: 1. By installing a slide, positioning block, clamp, and spring, when adjusting the angle of the polarization analyzer and polarization generator, the spring provides a clamping force, causing the clamp to abut against the inside of the slide. The positioning block restricts the position of the clamp, spring, and polarization analyzer and polarization generator. When the polarization analyzer and polarization generator are adjusted by loosening the fastening screws, it can prevent the polarization analyzer and polarization generator from slipping and falling down and being damaged at the moment of loosening. It effectively prevents the components from slipping down quickly due to the sudden loss of screw fastening force, protects expensive and precision polarization components, reduces component damage caused by accidental slippage, and lowers equipment maintenance costs and downtime.

[0016] 2. By installing vibration damping pads and damping feet, the ellipsometer can effectively absorb and buffer the vibration energy transmitted to the instrument from the outside world, reduce the fluctuation of the optical signal caused by vibration, and ensure that the equipment maintains the correct angle and position during the measurement process. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of a full-spectrum ellipsometer with a high-precision compensator according to the present invention.

[0018] Figure 2This is a partial structural diagram of the front view of a full-spectrum ellipsometer with a high-precision compensator according to the present invention.

[0019] Figure 3 This is a partial rear view structural diagram of the back panel area of ​​this utility model.

[0020] Figure 4 This is a partial structural schematic diagram of the rear cross-section of the positioning block area of ​​this utility model.

[0021] Figure 5 This is a partial side view of the base area of ​​this utility model.

[0022] In the diagram: 1. Base; 2. Backplate; 3. Support platform; 4. Central axis; 5. Positioning hole; 6. Polarization analyzer; 7. Mount; 8. Body; 9. Main light source; 10. Polarization generator; 11. Secondary light source; 12. Linear polarizer; 13. Compensator body; 14. Objective lens; 15. Analyzer body; 16. Detector; 17. Slide; 18. Positioning block; 19. Guide slot; 20. Clamp; 21. Spring; 22. Groove; 23. Slot; 24. Base plate; 25. Vibration damping pad; 26. Vibration damping foot. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] This utility model provides, for example Figure 1-5 The full-spectrum ellipsometer with a high-precision compensator shown includes a base 1 and a back plate 2 mounted on the upper end of the base 1. A support platform 3 is fixedly connected to the upper outer wall of the base 1 for placing materials; A main light source 9 is provided at the center of the front outer wall of the back plate 2; A polarization analyzer 6 is located on the right side of the front outer wall of the back plate 2, and a polarization generator 10 is located on the left side of the main light source 9. The material to be measured is placed on the support platform 3, ensuring that the surface of the material is flat and perpendicular to the light path, so as to ensure that the polarized light and the material can interact fully and uniformly. The main light source 9 is turned on to emit light, and at the same time, the polarization generator 10 also emits light. The polarized light is directed at the material placed on the support platform 3. After interacting with the material, the polarization state changes. The changed polarized light enters the polarization analyzer 6. The polarization analyzer 6 detects the change in the polarization state of the polarized light and converts it into an electrical signal or other measurable signal. These signals are transmitted to the instrument's data acquisition system for real-time acquisition. The front outer wall of the back plate 2 has a groove 17. The rear outer walls of the polarization analyzer 6 and the polarization generator 10 are fixedly connected to positioning blocks 18 that are inserted into the groove 17. The left and right sides of the two positioning blocks 18 are provided with clips 20. The two clips 20 and the positioning blocks 18 are fixedly connected with springs 21. When the angle of the polarization analyzer 6 and the polarization generator 10 needs to be adjusted, the fastening screws of the polarization analyzer 6 and the polarization generator 10 are loosened. The pressure of the springs 21 keeps the clips 20 in the groove 17 with a certain friction force, so as to prevent the polarization analyzer 6 and the polarization generator 10 from slipping down when the screws are loosened.

[0025] like Figure 3 and Figure 4 As shown, the inner circular walls of the two slides 17 are provided with guide grooves 19 for the locking heads 20 to be inserted. The outer walls of the left and right ends of the two positioning blocks 18 are provided with grooves 22 to restrict the position of the springs 21 and provide space for the extension and retraction of the springs 21. One end of each locking head 20 is elliptical and has anti-slip texture on its surface.

[0026] When the angle of the polarization analyzer 6 or the polarization generator 10 is adjusted, the clamp 20 is engaged in the guide groove 19 under the pressure of the spring 21, so that the clamp 20 can only move in the guide groove 19 in a specific direction, thereby ensuring the accuracy and stability of the angle adjustment path of the polarization analyzer 6 and the polarization generator 10.

[0027] like Figure 5 As shown, slots 23 are provided at the four corners of the lower outer wall of the base 1. Each slot 23 has a base plate 24 inside. Each base plate 24 has a vibration damping pad 25 fixedly connected to its lower outer wall. Each vibration damping pad 25 has a vibration damping foot 26 on its lower outer wall.

[0028] First, slide the base plate 24 into the slot 23 to restrict the position of the damping pad 25 and the damping foot 26. When the instrument is vibrated, the damping foot 26 plays an initial buffering role between the base plate 24 and the damping pad 25, converting the impact force generated by the vibration into its own elastic potential energy. After the vibration is initially buffered by the damping foot 26, the damping pad 25 continues to absorb the remaining vibration energy, further reducing the intensity of the vibration transmitted to the instrument.

[0029] like Figure 2 As shown, the polarization analyzer 6 has an objective lens 14 inside, an analyzer body 15 is located to the right of the objective lens 14, and a detector 16 is located to the right of the analyzer body 15.

[0030] Light reflected or transmitted from the sample enters the polarization analyzer 6 and first reaches the objective lens 14. The objective lens 14 focuses the light, converging the diverging light to the incident end of the analyzer body 15. The focused light then enters the analyzer body 15. Based on its internal optical structure and working principle, the analyzer body 15 analyzes the polarization state of the light and processes it according to different polarization directions, causing intensity differences in light with different polarization directions. The processed light from the analyzer body 15 reaches the detector 16, which converts the optical signal into an electrical signal and transmits these electrical signals to the instrument's data acquisition and processing system.

[0031] like Figure 2 As shown, a secondary light source 11 is provided inside the polarization generator 10, a linear polarizer 12 is provided to the right of the secondary light source 11, and a compensator body 13 is provided to the right of the linear polarizer 12.

[0032] The secondary light source 11 is turned on, and it emits light. This light enters the linear polarizer 12 as initial light. The light passes through the linear polarizer 12, which selects the polarization of the light, allowing only light with a specific polarization direction to pass through, thereby generating linearly polarized light. The linearly polarized light exits from the linear polarizer 12 and enters the compensator body 13. Within the compensator body 13, the polarization state of the linearly polarized light is modulated by adjusting the parameters of the optical elements inside the compensator body 13 according to the measurement requirements. The modulated polarized light exits from the polarization generator 10 and is directed toward the sample placed on the support stage 3, interacting with the sample and providing suitable polarized light for subsequent measurement of the sample's optical properties by the polarization analyzer 6.

[0033] like Figure 1 As shown, a mounting bracket 7 is fixedly connected to the front outer wall of the back plate 2, and the body 8 is arranged inside the mounting bracket 7 to provide different light parameters for the main light source 9.

[0034] The shape and size of the fixture 7 match the body 8, ensuring that the body 8 can be accurately installed in the fixture 7, limiting the displacement of the body 8 in the horizontal and vertical directions, ensuring that the position of the main light source 9 is fixed in the instrument, thereby maintaining the stability of the entire optical system. The drive circuit inside the body 8 can control the current or voltage of the main light source 9, thereby adjusting its light intensity. Its internal optical filter can change the wavelength range of the light emitted by the main light source 9 to meet the light parameter requirements of different sample measurements.

[0035] like Figure 1 As shown, a central shaft 4 is provided at the center of the front outer wall of the back plate 2, and multiple positioning holes 5 are provided on the front outer wall of the back plate 2 to limit the angular position of the polarization analyzer 6 and the polarization generator 10.

[0036] When the polarization analyzer 6 and the polarization generator 10 are rotated to a specific angle, the polarization component can be fixed at that angle position by the fastening screw that cooperates with the positioning hole 5. The positioning hole 5 provides discrete and precise angle positioning for the polarization analyzer 6 and the polarization generator 10, enabling the operator to accurately set and repeat specific measurement angles, and meet the precise control requirements of the polarization component angle for different measurement needs.

[0037] The implementation principle of this embodiment is as follows: The material to be measured is placed on the support platform 3, ensuring that the surface of the material is flat and perpendicular to the light path, so as to ensure that the polarized light and the material can interact fully and uniformly. The main light source 9 is turned on to emit light, and the polarization generator 10 also emits light. The polarized light is directed at the material placed on the support platform 3. After interacting with the material, the polarization state changes. The changed polarized light enters the polarization analyzer 6. The polarization analyzer 6 detects the change in the polarization state of the polarized light and converts it into an electrical signal or other measurable signal. These signals are transmitted to the instrument's data acquisition system for real-time acquisition. When it is necessary to adjust the angle of the polarization analyzer 6 and the polarization generator 10, the fastening screws that fix the polarization analyzer 6 and the polarization generator 10 are loosened. The clamping force of the spring 21 keeps the chuck 20 in the slide groove 17 with a certain friction force, preventing the polarization analyzer 6 and the polarization generator 10 from slipping and falling down the moment the screws are loosened.

[0038] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A full-spectrum ellipsometer with a high-precision compensator, comprising a base (1) and a back plate (2) mounted on the upper end of the base (1). The upper outer wall of the base (1) is fixedly connected to a support platform (3) for placing materials; A main light source (9) is provided at the center of the front outer wall of the back plate (2); A polarization analyzer (6) is provided on the outer wall of the front end of the back plate (2) near the right side, and a polarization generator (10) is provided on the left side of the main light source (9). Its features are: The front end outer wall of the back plate (2) is provided with a sliding groove (17). The rear end outer walls of the polarization analyzer (6) and the polarization generator (10) are fixedly connected with positioning blocks (18) inserted into the sliding groove (17). The left and right sides of the two positioning blocks (18) are provided with clips (20). The two clips (20) and the positioning blocks (18) are fixedly connected with springs (21).

2. The full-spectrum ellipsometer with a high-precision compensator according to claim 1, characterized in that: The circular inner walls of both of the slides (17) are provided with guide grooves (19) for the locking head (20) to be inserted.

3. A full-spectrum ellipsometer with a high-precision compensator according to claim 1, characterized in that: The two positioning blocks (18) have grooves (22) on the inner walls of their left and right ends to limit the position of the spring (21) and provide space for the spring (21) to extend and retract.

4. A full-spectrum ellipsometer with a high-precision compensator according to claim 1, characterized in that: One end of each of the multiple card heads (20) is elliptical and has anti-slip texture on its surface.

5. A full-spectrum ellipsometer with a high-precision compensator according to claim 1, characterized in that: The base (1) has slots (23) at the four corners of the lower outer wall, and each of the slots (23) has a base plate (24) inside.

6. A full-spectrum ellipsometer with a high-precision compensator according to claim 5, characterized in that: The lower outer walls of the multiple base plates (24) are fixedly connected with vibration damping pads (25), and the lower outer walls of the multiple vibration damping pads (25) are provided with multiple vibration damping feet (26).

7. A full-spectrum ellipsometer with a high-precision compensator according to claim 1, characterized in that: The polarization analyzer (6) has an objective lens (14) inside, an analyzer body (15) is located on the right side of the objective lens (14), and a detector (16) is located on the right side of the analyzer body (15).

8. A full-spectrum ellipsometer with a high-precision compensator according to claim 1, characterized in that: The polarization generator (10) has an internal sub-light source (11), a linear polarizer (12) is provided on the right side of the sub-light source (11), and a compensator body (13) is provided on the right side of the linear polarizer (12).

9. A full-spectrum ellipsometer with a high-precision compensator according to claim 1, characterized in that: The front outer wall of the back plate (2) is fixedly connected to a fixing frame (7), and the body (8) is arranged inside the fixing frame (7) to provide different light parameters of the main light source (9).

10. A full-spectrum ellipsometer with a high-precision compensator according to claim 1, characterized in that: A central shaft (4) is provided at the center of the front outer wall of the back plate (2), and multiple positioning holes (5) are provided on the front outer wall of the back plate (2) to limit the angular position of the polarization analyzer (6) and the polarization generator (10).

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