A metrology reflectivity correction device

Abstract

The utility model relates to a kind of measuring object reflectivity correction devices, and the utility model discloses a kind of measuring object reflectivity correction devices, including depth measuring piece, light source transmitter, half lens module, reflectivity correction module and lens detection module;Depth measuring piece has reflecting film layer.When depth measuring piece enters to detection hole, reflecting film layer can be incident to incident light to reflecting sheet, and reflecting sheet can produce detection reflected light;And, lens detection module can receive detection reflected light to analyze the light intensity of detection reflected light, and then judge whether reflecting film layer is oxidized;Thus when the aperture depth of printed circuit board needs to be measured each time, the reflectivity precision detection of depth measuring piece can be carried out first by measuring object reflectivity correction device, to avoid using the depth measuring piece that has been oxidized, and affect the accuracy of subsequent aperture depth of printed circuit board measurement, so as to improve the accuracy of aperture depth of printed circuit board measurement, avoid the deviation of detection result.

Description

Technical Field

[0001] This utility model relates to the field of calibration device technology, and in particular to a device for calibrating the reflectance of a measuring object. Background Technology

[0002] Generally, traditional optical inspection equipment includes depth measuring devices and inspection and analysis modules. For example, depth measuring devices can be used to measure the distance between the surface copper and the inner copper layers of a printed circuit board (PCB) to calculate the aperture depth of the PCB.

[0003] However, with prolonged use, the reflective film of the depth measuring device will gradually oxidize, thereby changing the brightness of the reflected light. This change in brightness can easily cause the detection and analysis module to make a deviation in the distance conversion between the surface copper and the inner copper of the printed circuit board. As a result, after a period of use, traditional optical inspection equipment is prone to deviations in its detection results due to the oxidation of the reflective film. Utility Model Content

[0004] The purpose of this invention is to provide a device for correcting the reflectivity of a measured object, which solves the problem that traditional optical detection equipment is prone to deviations in its detection results after a period of use due to oxidation of the reflective film.

[0005] To achieve the above objectives, this utility model provides a device for correcting the reflectivity of a measuring object, including a depth measuring component, a light source emitter, a semi-transparent mirror module, a reflectivity correction module, and a lens detection module; The semi-transparent mirror module is disposed on one side of the light source emitter, the reflectivity correction module is disposed above the semi-transparent mirror module, and the lens detection module is disposed on the side of the semi-transparent mirror module facing away from the depth measuring device and is attached to the semi-transparent mirror module. The reflectivity correction module has a detection hole and a reflective sheet; The depth measuring device has a reflective film layer.

[0006] The reflectivity correction device for the measured object further includes a working stage, the reflectivity correction module is disposed on one side of the working stage, and the depth measuring component is slidably adapted to the upper part of the working stage.

[0007] The reflectivity correction module has two symmetrically arranged locking holes, and the reflectivity correction module is locked onto the work platform by means of the two locking holes.

[0008] The detection hole is located outside the working stage and is vertically aligned with the semi-transparent lens module and the reflective film layer.

[0009] The reflectivity correction module has an upper correction sheet and a lower correction sheet arranged symmetrically, and the lower correction sheet has an accommodating space corresponding to the shape of the reflective sheet.

[0010] The upper and lower correction plates are attached to the accommodating space to stabilize the reflective sheet.

[0011] The depth measuring element of the detection hole has an inclined surface, and the reflective film layer covers the inclined surface.

[0012] The depth measuring element of the detection hole has a truncated conical surface, and the reflective film layer covers the truncated conical surface.

[0013] The depth measuring element of the detection hole has a pointed conical surface, and the reflective film layer covers the pointed conical surface.

[0014] This invention discloses a reflectivity correction device for measuring objects. When the depth measuring component enters the detection hole of the reflectivity correction module, the reflective film layer of the depth measuring component allows incident light to be incident onto the reflective sheet, which in turn generates detection reflected light. Furthermore, the lens detection module receives the detection reflected light and analyzes its brightness to determine whether the reflective film layer of the depth measuring component is oxidized. In this way, each time the aperture depth of a printed circuit board needs to be measured, the reflectivity accuracy of the depth measuring component can be checked first using the reflectivity correction device. This avoids using an oxidized depth measuring component, which could affect the accuracy of subsequent aperture depth measurements of the printed circuit board. Therefore, the reflectivity correction device improves the accuracy of measuring the aperture depth of printed circuit boards and avoids deviations in the detection results. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0016] Figure 1 This is a schematic diagram of the depth measuring device of this utility model when used in printed circuit board measurement applications.

[0017] Figure 2 This is a top view of the reflectivity correction module of this utility model.

[0018] Figure 3 This is the utility model Figure 2 Enlarged view of the local structure at point A.

[0019] Figure 4 This is a schematic diagram of the reflectivity correction module of this utility model.

[0020] Figure 5 This is an exploded view of the reflectivity correction module of this utility model.

[0021] Figure 6 This is a schematic diagram of the structure of the object reflectance correction system and depth measuring device of this utility model during operation.

[0022] Figure 7 This is the utility model Figure 6 Enlarged view of the local structure at point B.

[0023] Figure 8 This is a schematic diagram of the depth measuring device of this utility model.

[0024] 110 - Light source emitter, 120 - Semi-transparent mirror module, 130 - Reflectivity correction module, 131 - Upper correction plate, 132 - Detection hole, 133 - Lower correction plate, 134 - Reflective sheet, 136 - Locking hole, 140 - Lens detection module, 200 - Depth measuring component, 210 - Reflective film layer, 220 - Inclined surface, 221 - Truncated conical surface, 222 - Sharp conical surface, 300 - Printed circuit board, 310 - Surface copper part, 320 - Inner copper part, 400 - Work stage, 410 - Accommodation space, 420 - Incident light ray, 430 - Detection reflected light ray, 440 - Vertical direction. Detailed Implementation

[0025] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, but should not be construed as limiting the present invention.

[0026] Please see Figures 1 to 8 ,in, Figure 1 This is a schematic diagram of the depth measuring device of this utility model when used in printed circuit board measurement. Figure 2 This is a top view of the reflectivity correction module of this utility model. Figure 3 This is the utility model Figure 2 Enlarged view of the local structure at point A. Figure 4 This is a schematic diagram of the reflectivity correction module of this utility model. Figure 5 This is an exploded view of the reflectivity correction module of this utility model. Figure 6 This is a schematic diagram of the structure of the object reflectance correction system and depth measuring device of this utility model during operation. Figure 7 This is the utility model Figure 6 Enlarged view of the local structure at point B. Figure 8 This is a schematic diagram of the depth measuring device of this utility model.

[0027] This utility model provides a measuring object reflectance correction device, including a depth measuring component 200, a light source emitter 110, a semi-transparent mirror module 120, a reflectance correction module 130, and a lens detection module 140; The semi-transparent mirror module 120 is disposed on one side of the light source emitter 110, the reflectivity correction module 130 is disposed above the semi-transparent mirror module 120, and the lens detection module 140 is disposed on the side of the semi-transparent mirror module 120 facing away from the depth measuring device 200 and is attached to the semi-transparent mirror module 120. The reflectivity correction module 130 has a detection hole 132 and a reflective sheet 134; The depth measuring device 200 has a reflective film layer 210.

[0028] In this embodiment, when the depth measuring device enters the detection hole of the reflectivity correction module, the reflective film layer of the depth measuring device can direct incident light onto the reflective sheet, and the reflective sheet can generate detection reflected light. Furthermore, the lens detection module can receive the detection reflected light to analyze its brightness, thereby determining whether the reflective film layer of the depth measuring device is oxidized. In this way, each time the aperture depth of a printed circuit board needs to be measured, the reflectivity accuracy of the depth measuring device can be checked first using the object reflectivity correction device, avoiding the use of an oxidized depth measuring device that could affect the accuracy of subsequent measurements of the aperture depth of the printed circuit board. Thus, the object reflectivity correction device can improve the accuracy of measuring the aperture depth of the printed circuit board and avoid deviations in the detection results.

[0029] Furthermore, the reflectivity correction device also includes a work platform, with the reflectivity correction module disposed on one side of the work platform, and the depth measuring element slidingly adapted to the upper part of the work platform. The depth measuring element of the detection hole has an inclined surface, and the reflective film layer covers the inclined surface.

[0030] In this embodiment, when the reflective film layer of the depth measuring device is free of oxidation, the detected reflected light received by the lens detection module has a first brightness. When the reflective film layer of the depth measuring device is oxidized, the detected reflected light received by the lens detection module has a second brightness, and the first brightness is different from the second brightness. The reflective film layer 210 of the depth measuring device 200 is used to enter the printed circuit board 300, and the reflective film layer 210 of the depth measuring device 200 passes through the surface copper portion 310 and the inner copper portion 320 of the printed circuit board 300 at a fixed speed. When passing through the surface copper portion 310 and the inner copper portion 320, it will reflect two rays of light respectively. The analysis module can calculate the aperture depth of the printed circuit board 300 based on the time difference between the two rays. Therefore, the reflection effect of the depth measuring device 200 directly affects the accuracy of measuring the aperture depth of the printed circuit board 300.

[0031] Furthermore, the reflectivity correction module has two symmetrically arranged locking holes, and the reflectivity correction module is locked onto the working stage by means of the two locking holes. The detection hole is located outside the working stage and is vertically aligned with the semi-transparent lens module and the reflective film layer.

[0032] In this embodiment, the light source emitter 110 emits incident light 420. A semi-transparent mirror module 120 is disposed on one side of the light source emitter 110 and is used to receive and reflect the incident light 420. A reflectivity correction module 130 is disposed above the semi-transparent mirror module 120 and has a detection aperture 132 and a reflective sheet 134 exposed from the detection aperture 132. It is worth noting that when the depth measuring element 200 enters the detection aperture 132 of the reflectivity correction module 130, the reflective film layer 210 of the depth measuring element 200 can receive the incident light 420 reflected by the semi-transparent mirror module 120 and can direct the incident light 420 onto the reflective sheet 134 of the reflectivity correction module 130.

[0033] Furthermore, the reflectivity correction module has an upper correction sheet and a lower correction sheet symmetrically arranged, and the lower correction sheet has an accommodating space corresponding to the shape of the reflective sheet. The upper correction sheet and the lower correction sheet are attached to the accommodating space to secure the reflective sheet.

[0034] In this embodiment, the reflective sheet 134 of the reflectivity correction module 130 can further reflect the incident light 420 to generate the detection reflected light 430. The lens detection module 140 is disposed on the side of the semi-transparent mirror module 120 facing away from the depth measuring device 200, and the lens detection module 140 is attached to the semi-transparent mirror module 120. The lens detection module 140 can receive the detection reflected light 430 to analyze the brightness of the detection reflected light 430, and then determine whether the reflective film layer 210 of the depth measuring device 200 is oxidized. Specifically, when the reflective film layer 210 of the depth measuring device 200 is not oxidized, the detection reflected light 430 received by the lens detection module 140 has a first brightness (e.g., a maximum brightness of 25,800 lumens), while when the reflective film layer 210 of the depth measuring device 200 is oxidized, the detection reflected light 430 received by the lens detection module 140 has a second brightness (e.g., a maximum brightness of 22,000 lumens), and the first brightness is different from the second brightness. In other words, the oxidized reflective film 210 affects the brightness of light, thus affecting the accuracy of the depth measuring device 200 when used to measure the aperture depth of the printed circuit board 300. Specifically, the reflectivity correction module 130 of the measurement object reflectivity correction system 100 has a detection hole 132 and a reflective sheet 134 exposed through the detection hole 132. When the depth measuring device 200 enters the detection hole 132 of the reflectivity correction module 130, the reflective film 210 of the depth measuring device 200 can direct the incident light 420 onto the reflective sheet 134, and the reflective sheet 134 can generate detection reflected light 430. Furthermore, the lens detection module 140 can receive the detection reflected light 430 to analyze the brightness of the detection reflected light 430, thereby determining whether the reflective film 210 of the depth measuring device 200 is oxidized. In this way, whenever the aperture depth of the printed circuit board 300 needs to be measured, the reflectivity accuracy of the depth measuring element 200 can be checked first by the measurement object reflectivity correction system 100 to avoid using an oxidized depth measuring element 200, which would affect the accuracy of subsequent measurements of the aperture depth of the printed circuit board 300. In this way, the measurement object reflectivity correction system 100 can improve the accuracy of measuring the aperture depth of the printed circuit board 300.

[0035] Furthermore, the depth measuring element of the detection hole has a truncated conical surface, and the reflective film layer covers the truncated conical surface. Alternatively, the depth measuring element of the detection hole may have a pointed conical surface, and the reflective film layer covers the pointed conical surface.

[0036] In this embodiment, the reflective sheet 134 is annular, but its shape is not limited to this. In other embodiments, the reflective sheet 134 can be of any shape. Furthermore, the reflective sheet 134 of the reflectivity correction module 130 can be made of gold or other metals that are less prone to oxidation, to reduce the degree of oxidation of the reflective sheet 134. The depth measuring element 200 of the detection aperture 132 of the reflectivity correction module 130 has an inclined surface 220, and the reflective film layer 210 of the depth measuring element 200 covers the inclined surface 220.

[0037] The above-disclosed embodiments are merely one or more preferred embodiments of this application and should not be construed as limiting the scope of this application. Those skilled in the art will understand that all or part of the processes for implementing the above embodiments and equivalent variations made in accordance with the claims of this application are still within the scope of this application.

Claims

1. A device for correcting the reflectance of a measuring object, characterized in that, This includes a depth measuring device, a light source emitter, a semi-transparent mirror module, a reflectivity correction module, and a lens detection module; The semi-transparent mirror module is disposed on one side of the light source emitter, the reflectivity correction module is disposed above the semi-transparent mirror module, and the lens detection module is disposed on the side of the semi-transparent mirror module facing away from the depth measuring device and is attached to the semi-transparent mirror module. The reflectivity correction module has a detection hole and a reflective sheet; The depth measuring device has a reflective film layer.

2. The reflectance correction device for measuring objects as described in claim 1, characterized in that, The reflectivity correction device for the measured object also includes a working stage, the reflectivity correction module is disposed on one side of the working stage, and the depth measuring component is slidably adapted to the upper part of the working stage.

3. The reflectance correction device for measuring objects as described in claim 2, characterized in that, The reflectivity correction module has two symmetrically arranged locking holes, and the reflectivity correction module is locked onto the work platform by means of the two locking holes.

4. The reflectance correction device for measuring objects as described in claim 3, characterized in that, The detection hole is located outside the work platform and is vertically aligned with the semi-transparent lens module and the reflective film layer.

5. The reflectance correction device for measuring objects as described in claim 4, characterized in that, The reflectivity correction module has an upper correction plate and a lower correction plate arranged symmetrically, and the lower correction plate has an accommodating space corresponding to the shape of the reflective sheet.

6. The reflectance correction device for measuring objects as described in claim 5, characterized in that, The upper and lower correction plates are attached to the accommodating space to secure the reflective sheet.

7. The reflectance correction device for measuring objects as described in claim 6, characterized in that, The depth measuring element of the detection hole has an inclined surface, and the reflective film layer covers the inclined surface.

8. The object reflectance correction device as described in claim 7, characterized in that, The depth measuring element of the detection hole has a truncated conical surface, and the reflective film layer covers the truncated conical surface.

9. The object reflectance correction device as described in claim 8, characterized in that, The depth measuring element of the detection hole has a pointed conical surface, and the reflective film layer covers the pointed conical surface.

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