A stage module for a TGV via defect inspection apparatus and an inspection apparatus

Abstract

The application relates to the technical field of TGV defect detection, in particular to a carrier module of a TGV via hole defect detection device and the detection device. The carrier module comprises a carrier base body, a reflection assembly fixedly arranged on the carrier base body, the reflection assembly comprising a supporting surface and a reflecting surface, the supporting surface being used for carrying a TGV glass substrate to be detected, and the reflecting surface being used for reflecting light to illuminate hole-in-feature of a via hole of the TGV glass substrate, so that the hole-in-feature can be recognized by a detection module of the detection device. The reflecting surface of the reflection assembly can reflect light emitted by a light source assembly of the detection module to illuminate the hole-in-feature of the via hole, especially the hole-in-feature at the bottom of the via hole, so that the visual detection assembly can complete the detection of the hole-in-feature and hole-or-feature of the via hole only by focal length adjustment, the product transfer link is reduced, the detection process is continuous, and the detection efficiency of the TGV via hole defect is improved.

Description

Technical Field

[0001] This application relates to the field of TGV defect detection technology, specifically to a platform module and detection equipment for TGV through-hole defect detection. Background Technology

[0002] As semiconductor packaging technology advances towards higher density and performance, through-glass via (TGV) packaging technology has become widely used as a core technology for achieving vertical interconnection of chips in 2.5D / 3D packaging. Because TGV packaging requires the fabrication of vias with high aspect ratios on the substrate, various defects can easily occur during the manufacturing process, such as rough hole walls, residues inside the holes, and uneven hole diameters. These defects can affect chip performance and reliability.

[0003] In the inspection process after TGV via etching, commonly used optical inspection equipment (such as optical microscopes and optical confocal microscopes) can only inspect the TGV via openings. While electron microscopes can inspect the internal morphology of the vias by scanning layer by layer, they are too expensive. Even when using an automated optical inspection (AOI) system, the inspection of vias on large-area glass substrates requires step-by-step transfer of the product for inspection of the via openings and inside the vias, resulting in a long inspection time for the entire substrate and making it difficult to meet the needs of efficient production. Utility Model Content

[0004] This application aims to improve the efficiency of TGV through-hole defect detection by providing a platform module and detection device for TGV through-hole defect detection.

[0005] According to a first aspect, one embodiment provides a platform module for a TGV through-hole defect detection device, comprising: Platform substrate; A reflective component is fixedly placed on the stage base. The reflective component includes a support surface and a reflective surface. The support surface is used to support the TGV glass substrate to be tested, and the reflective surface is used to reflect light to illuminate the internal features of the through holes of the TGV glass substrate, so that the internal features can be identified by the detection module of the detection equipment.

[0006] In one embodiment, the reflective assembly includes a reflector, with the supporting surface and the reflective surface located on opposite sides of the reflector.

[0007] In one embodiment, the stage module further includes: A product positioning component is disposed on the outer periphery of the reflective component and is used to position the TGV glass substrate placed on the reflective component so that the TGV glass substrate is in a reference position. And / or, a product fixing component, connected to the platform base, has a fixed state and an unlocked state that can be switched between each other. In the fixed state, the product fixing component holds and fixes the TGV glass substrate to the reflective component; in the unlocked state, the fixing of the TGV glass substrate is released.

[0008] According to a second aspect, one embodiment provides a TGV through-hole defect detection device, comprising: The platform module of the TGV through-hole defect detection device as described in any of the above embodiments; The motion module has mutually perpendicular X-axis, Y-axis and Z-axis motion directions, wherein the X-axis and Y-axis motion directions are parallel to the support surface, and the Z-axis motion direction is perpendicular to the support surface; The system includes a detection module connected to the motion module, which moves under the influence of the motion module. The detection module includes a vision detection component and a light source component. The light source component emits light toward the area to be detected on the TGV glass substrate disposed on the support surface. The vision detection component detects the orifice features of the through holes located in the area to be detected and receives light reflected by the reflection component to detect the internal features of the through holes.

[0009] In one embodiment, the visual inspection component includes an inspection lens, and the light source component includes a light source element and a light guide element. The light source element is used to emit light to the light guide element, and the light guide element has a lens portion coaxially connected to the inspection lens so that the light is emitted along an optical path coaxial with the inspection lens.

[0010] In one embodiment, the light source includes a surface light source disposed above the stage module for illuminating the area to be tested on the TGV glass substrate disposed on the support surface.

[0011] In one embodiment, the light source includes an optical fiber light source.

[0012] In one embodiment, the detection module further includes a distance sensing component, which is fixed relative to the visual detection component and communicatively connected to the motion module. This component is used to detect the detection distance between the visual detection component and the TGV glass substrate, and to feed back the change in the detection distance to the motion module so that the motion module can adjust the position of the visual detection component relative to the TGV glass substrate in the Z-axis motion direction, thereby adapting the focal length of the visual detection component to the detection distance.

[0013] In one embodiment, the motion module includes: Two sets of first motion mechanisms are spaced apart on opposite sides of the reflective component along the Y-axis motion direction, and each includes a first motion stage. The two first motion mechanisms are used to drive the two first motion stages to move synchronously along the X-axis motion direction. The second motion mechanism is connected to the two first motion tables. The second motion mechanism includes a second motion table and is used to drive the second motion table to move along the Y-axis motion direction. And a third motion mechanism, connected to the second motion stage, including a third motion stage for setting the detection module, the third motion mechanism being used to drive the third motion stage to move along the Z-axis motion direction.

[0014] In one embodiment, the first motion mechanism and / or the second motion mechanism includes a linear motor; The third motion mechanism includes a rotary motor, a lead screw, and a third motion table. The lead screw is connected to the output shaft of the rotary motor so as to be driven to rotate by the rotary motor. The third motion table is threadedly engaged with the lead screw and is used to move along the Z-axis motion direction under the drive of the lead screw.

[0015] In one embodiment, the motion module further includes a motion control unit and at least one set of position feedback components; the motion control unit is communicatively connected to the first motion mechanism, the second motion mechanism, the third motion mechanism, and the at least one set of position feedback components; the position feedback components include a matching grating ruler and a grating reader. A set of the position feedback components is disposed on the first motion mechanism for collecting the first position information of the first motion platform. The motion control unit is used to receive the first position information to control the first motion mechanism to provide real-time feedback on the position of the first motion platform. And / or, a set of the position feedback components are disposed on the second motion mechanism for real-time acquisition of the second position information of the second motion platform, and the motion control unit is used to receive the second position information to control the second motion mechanism to provide real-time feedback on the position of the second motion platform; And / or, a set of the position feedback components are disposed on the third motion mechanism for real-time acquisition of the third position information of the third motion platform, and the motion control unit is used to receive the third position information to control the third motion mechanism to provide real-time feedback on the position of the third motion platform.

[0016] In one embodiment, the resolution of the grating ruler is ≤0.1μm.

[0017] In one embodiment, the detection device further includes a device base, the device base comprising: Base; A support platform is used to set up the motion module and the platform module. The support platform is made of marble, and its maximum deformation under static stress conditions is no greater than 0.001mm, and its maximum deformation under dynamic motion conditions is no greater than 0.001mm. An air-floating vibration isolation pad is placed between the base and the support platform to ensure that the vibration level of the testing equipment meets the requirements of the VC-C vibration standard.

[0018] According to the TGV through-hole defect detection equipment of the above embodiment, since the stage module is equipped with a reflective component with a supporting surface and a reflective surface, it can reflect the light emitted by the light source component of the detection module to illuminate the internal features of the through hole. This allows the vision detection component to complete the detection of the hole opening features and internal features (especially the internal features at the bottom of the through hole) by adjusting the focus alone. This helps to reduce product transfer steps, realize the continuous detection process, and improve the detection efficiency of TGV through-hole defects. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the platform module of a TGV through-hole defect detection device according to one embodiment. Figure 2 This is an optical path diagram of a stage module according to one embodiment; Figure 3 This is a three-dimensional structural schematic diagram of a TGV through-hole defect detection device according to one embodiment; Figure 4 This is a schematic diagram of the internal structure of a TGV through-hole defect detection device according to one embodiment; Figure 5 This is a schematic diagram of the structure of the third motion mechanism and detection module in one embodiment; Figure 6 This is a front view of a motion module according to one embodiment.

[0020] In the diagram, 1. TGV through-hole defect detection equipment; 10. Platform module; 11. Platform base; 12. Reflective component; 121. Support surface; 122. Reflective surface; 13. Product positioning component; 131. Positioning block; 14. Product fixing component; 141. Rotating pressure plate; 142. Hinge shaft; 143. Pressure head; 20. Motion module; 21. First motion mechanism; 211. First motion table; 22. Second motion mechanism; 221. Second motion table; 23. Third motion mechanism; 231. Third motion table; 232. Rotary motor; 233. Lead screw; 24. Support component; 25. Position feedback assembly; 251. Grating ruler; 252. Grating reader; 30. Detection module; 31. Visual inspection component; 311. Inspection lens; 32. Light source component; 321. Light source element; 322. Light guide element; 3221. Lens unit; 33. Distance sensing component; 40. Equipment base; 41. Base; 42. Support platform; 43. Air-floating vibration isolation pad; 50. TGV glass substrate. Detailed Implementation

[0021] The present application will now be described in further detail with reference to the accompanying drawings and specific embodiments. Similar elements in different embodiments are referred to by related similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of the present application. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, certain operations related to the present application are not shown or described in the specification. This is to avoid obscuring the core parts of the present application with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0022] Furthermore, the features, operations, or characteristics described in the specification can be combined in any suitable manner to form various embodiments. At the same time, the steps or actions in the method description can be rearranged or adjusted in a manner obvious to those skilled in the art. Therefore, the various orders in the specification and drawings are only for the clear description of a particular embodiment and do not imply a necessary order, unless otherwise stated that a particular order must be followed.

[0023] The serial numbers assigned to components in this document, such as "first" and "second," are used only to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages).

[0024] In this embodiment, since the stage module 10 is provided with a reflective component 12 having a support surface 121 and a reflective surface 122, it can reflect the light emitted by the light source component 32 of the detection module 30 to illuminate the internal features of the through hole. This allows the visual detection component 31 to complete the detection of the hole opening features and internal features (especially the internal features at the bottom of the through hole) of the through hole simply by adjusting the focal length, which helps to improve the detection efficiency of TGV through hole defects.

[0025] An embodiment of the stage module 10 of the TGV through-hole defect detection device 1 in this application:

[0026] In one embodiment, reference is made to Figure 1 and Figure 2 The stage module 10 includes a stage base 11 and a reflective component 12. The reflective component 12 is fixedly placed on the stage base 11. The reflective component 12 includes a support surface 121 and a reflective surface 122. The support surface 121 is used to support the TGV glass substrate 50 to be tested, and the reflective surface 122 is used to reflect light to illuminate the internal features of the through holes of the TGV glass substrate 50, so that the internal features can be identified by the detection module 30 of the detection device.

[0027] When the TGV glass substrate 50 is placed on the support surface 121, part of the light emitted by the light source component 32 of the detection module 30 directly illuminates the opening of the through hole, allowing the vision inspection component 31 to identify the features of the opening. The other part of the light is reflected by the reflective surface 122 and penetrates the through hole of the TGV glass substrate 50, illuminating the features inside the hole (such as foreign objects inside the hole or roughness of the hole wall) at the bottom of the hole and the hole wall. This allows the detection module 30 of the detection equipment to obtain images of the opening and inside of the hole without transferring the product, which helps to improve the detection effect and improves the process breakage problem of "the detection of the opening and the inside of the hole requires step-by-step transfer of the product". At the same time, it avoids the positioning deviation caused during the transfer process and ensures accurate recording of the defect location.

[0028] In one embodiment, reference is made to Figure 1 and Figure 2 The reflective component 12 includes a reflector, with a support surface 121 and a reflective surface 122 located on opposite sides of the reflector. For example, the reflector can be a high-reflectivity optical glass reflector (such as an aluminized reflector). The support surface 121 is the upper surface of the reflector, and its flatness allows it to stably support the large-area TGV glass substrate 50, preventing warping of the substrate due to unevenness of the support surface 121. The reflective surface 122 is the lower surface of the reflector, and a high-reflectivity layer is formed through a coating process. When light shines on the reflective surface 122, it is reflected along a preset light path into the through-hole. The reflected light has strong directionality and high uniformity, clearly revealing the fine features inside the hole and meeting the detection requirements of the TGV through-hole.

[0029] In other embodiments, the reflective component 12 may also take other forms, such as a surface-polished metal platform (e.g., a stainless steel platform), where the support surface 121 and the reflective surface 122 are the same surface, and light is directly reflected into the TGV through hole after being irradiated onto the platform surface.

[0030] In one embodiment, reference is made to Figure 1 The stage module 10 also includes a product positioning component 13, which is disposed on the outer periphery of the reflective component 12 and is used to position the TGV glass substrate 50 placed on the reflective component 12 so that the TGV glass substrate 50 is in a reference position.

[0031] For example, the product positioning component 13 may include a plurality of positioning blocks 131, which are respectively fixed on the edges of adjacent sides of the reflective component 12. When the TGV glass substrate 50 is placed on the reflective component 12, the two adjacent sides of the TGV glass substrate 50 abut against the inner sidewall of the positioning block 131, thereby achieving the reference positioning of the TGV glass substrate 50, ensuring that the substrate position is consistent each time it is tested, and avoiding deviations in the recording of defect positions.

[0032] In one embodiment, reference is made to Figure 1 The stage module 10 also includes a product fixing component 14, which is connected to the stage base 11 and has a fixed state and an unlocked state that can be switched between each other. In the fixed state, the product fixing component 14 holds and fixes the TGV glass substrate 50 against the reflective component 12; in the unlocked state, it releases the fixation of the TGV glass substrate 50.

[0033] For example, the product fixing assembly 14 includes two sets of rotating pressure plates 141. One end of the pressure plate is connected to the stage base 11 via a hinge shaft 142, and the other end is provided with a pressure head 143. After the substrate is positioned, the pressure plate is rotated around the hinge shaft 142 to above the substrate, and the pressure head 143 abuts against the non-detection area of ​​the substrate edge (such as 5mm away from the substrate edge) to achieve a fixed state. After the detection is completed, the pressure plate 141 is rotated in the opposite direction to the outside of the reflective assembly 12 to release the fixation and enter the unlocked state. The product fixing assembly 14 fixation method does not block the detection area and is suitable for fixing requirements of TGV glass substrates 50 with different thicknesses.

[0034] An embodiment of the TGV through-hole defect detection device 1 in this application:

[0035] In one embodiment, reference is made to Figures 1 to 6 The TGV through-hole defect detection device 1 includes a stage module 10 as described in any of the above embodiments, a motion module 20, and a detection module 30.

[0036] Among them, reference Figures 4 to 6 The motion module 20 has mutually perpendicular X-axis, Y-axis, and Z-axis motion directions. The X-axis and Y-axis motion directions are parallel to the support surface 121, and the Z-axis motion direction is perpendicular to the support surface 121. The detection module 30 is connected to the motion module 20 and moves under the drive of the motion module 20. The detection module 30 includes a vision detection component 31 and a light source component 32. The light source component 32 emits light toward the area to be detected on the TGV glass substrate 50 disposed on the support surface 121. The vision detection component 31 detects the aperture features of the through holes located in the area to be detected and receives the light reflected by the reflection component 12 to detect the internal features of the through holes.

[0037] The motion module 20, through the coordinated movement of the X-axis and Y-axis, can drive the detection module 30 to scan the TGV glass substrate 50 row by row and column by column along a preset path, ensuring no blind spots in the detection. The Z-axis movement direction can adjust the distance between the detection module 30 and the substrate, adapting to the detection requirements of TGV glass substrates 50 with different thicknesses. The light emitted by the light source assembly 32 is divided into two paths: one path directly illuminates the aperture, and the other path illuminates the inside of the aperture after being reflected by the reflective surface 122 of the reflective assembly 12. This facilitates the visual inspection assembly 31 to quickly acquire the features of the aperture and the inside of the aperture, helping to improve detection efficiency. The detection time for a TGV glass substrate 50 with a size of 515mm×510mm can be controlled within 4 minutes, meeting the requirements of high-efficiency production.

[0038] In one embodiment, reference is made to Figure 5 The visual inspection component 31 includes an inspection lens 311, which can be an industrial CCD camera with more than 5 million pixels, and a high-performance industrial lens with 5x magnification, to clearly capture aperture feature parameters such as aperture diameter, roundness, and aperture center distance.

[0039] The light source assembly 32 includes a light source 321 and a light guide 322. The light source 321 is used to emit light to the light guide 322. The light guide 322 has a lens portion 3221 coaxially connected to the detection lens 311 so that the light is emitted along the optical path coaxial with the detection lens 311, thereby accurately covering the TGV through hole of the area to be detected.

[0040] In one embodiment, the light source 321 includes a surface light source disposed above the stage module 10, which is used to illuminate the area to be inspected on the TGV glass substrate 50 disposed on the support surface 121, thereby helping to improve the image acquisition quality of the vision inspection component 31.

[0041] In one embodiment, the light source 321 includes an optical fiber light source, which can be an external bright-field optical fiber light source. The output end of the optical fiber light source can be fixed to the side of the detection lens 311. The optical fiber light source has a wide range of intensity adjustment and can be flexibly adapted to the thickness of the TGV glass substrate 50: when detecting a thinner substrate, the light intensity can be reduced to avoid overexposure of the aperture; when detecting a thicker substrate, the light intensity can be increased to ensure clear aperture details.

[0042] In one embodiment, reference is made to Figure 5 The detection module 30 also includes a distance sensing component 33, which is fixed relative to the vision detection component 31 and communicates with the motion module 20. It is used to detect the detection distance between the vision detection component 31 and the TGV glass substrate 50, and to feed back the change in the detection distance to the motion module 20 so that the motion module 20 can adjust the position of the vision detection component 31 relative to the TGV glass substrate 50 in the Z-axis motion direction, so that the focal length of the vision detection component 31 is adapted to the detection distance.

[0043] For example, the distance sensing component 33 can be a laser rangefinder, such as an AF (coaxial point laser) rangefinder, which is fixedly connected to the detection lens 311 of the vision inspection component 31. The distance sensing component 33 is communicatively connected to the motion module 20. When the TGV glass substrate 50 has slight warping, or when the detection module 30 experiences slight vibrations during movement, the detection distance will change. The laser rangefinder will feed back the amount of distance change to the motion module 20 in real time. Based on the feedback signal, the motion module 20 adjusts the position of the vision inspection component 31 along the Z-axis movement direction to match the focal length of the vision inspection component 31 with the required detection distance, so as to ensure that the acquired images of the aperture and inside the aperture are always clear and to avoid image blurring and defect misjudgment caused by the change in distance.

[0044] In one embodiment, reference is made to Figures 4 to 6 The motion module 20 includes two sets of first motion mechanisms 21, second motion mechanisms 22, and third motion mechanisms 23. The two sets of first motion mechanisms 21 are spaced apart on opposite sides of the reflective component 12 along the Y-axis motion direction, and each includes a first motion stage 211. The two first motion mechanisms 21 are used to drive the two first motion stages 211 to move synchronously along the X-axis motion direction. The second motion mechanism 22 is connected to the two first motion stages 211. The second motion mechanism 22 includes a second motion stage 221. The second motion mechanism 22 is used to drive the second motion stage 221 to move along the Y-axis motion direction. The third motion mechanism 23 is connected to the second motion stage 221 and includes a third motion stage 231 for setting the detection module 30. The third motion mechanism 23 is used to drive the third motion stage 231 to move along the Z-axis motion direction.

[0045] For example, two sets of first motion mechanisms 21 are respectively installed on both sides of the reflective component 12 along the Y-axis. The two sets of first motion mechanisms 21 can be synchronously driven by the same motion control signal, ensuring that the movement speed and displacement of the two first motion stages 211 along the X-axis are completely consistent, while the speed ripple accuracy is less than two-thousandths. The two ends of the second motion mechanism 22 are respectively fixed to the top of the two first motion stages 211 by bolts, forming a "dual-drive gantry" structure, which can effectively counteract the overturning moment generated during the movement and prevent the second motion mechanism 22 from tilting when moving along the X-axis. The third motion mechanism 23 is fixed to the second motion stage 221 and moves along the Y-axis with the second motion stage 221, while driving the third motion stage 231 to rise and fall along the Z-axis. The coordinated arrangement of the first motion mechanism 21, the second motion mechanism 22, and the third motion mechanism 23 helps to achieve precise movement of the detection module 30 in three-dimensional space, ensures the straightness of the movement of the detection module 30, adapts to the motion accuracy requirements of TGV through-hole size detection, and avoids the failure of the positional accuracy of the detected product due to movement offset.

[0046] In one embodiment, reference is made to Figures 4 to 6 The first motion mechanism 21 and the second motion mechanism 22 may both include linear motors; the third motion mechanism 23 may include a lead screw slide structure fixed to the second motion stage 221. For example, the third motion mechanism 23 includes a rotary motor 232, a lead screw 233, and a third motion stage 231. The lead screw 233 is connected to the output shaft of the rotary motor 232 and is driven to rotate by the rotary motor 232. The third motion stage 231 is threadedly engaged with the lead screw 233 and is used to move along the Z-axis direction under the drive of the lead screw 233. When the rotary motor 232 drives the lead screw 233 to rotate, the third motion stage 231 moves up and down along the Z-axis direction to adapt to the detection requirements of TGV glass substrates 50 with different thicknesses, ensuring that the distance between the vision inspection component 31 and the substrate is always within the optimal imaging range.

[0047] For example, the rotary motor 232 of the third motion mechanism 23 can be a servo motor to achieve high-precision position feedback, and the lead screw 233 can be a high-precision ball screw 233 module. The third motion stage 231 is rigidly connected to the nut seat of the lead screw 233. When the rotary motor 232 drives the lead screw 233 to rotate, the third motion stage 231 moves smoothly up and down along the Z-axis to meet the focus fine adjustment requirements of the vision inspection component 31.

[0048] In one embodiment, reference is made to Figure 4 and Figure 6 The motion module 20 also includes two support members 24, which are spaced apart on both sides of the reflective component 12 along the Y-axis. Two first motion mechanisms 21 are respectively mounted on one support member 24. Exemplarily, the two support members 24 are fixedly connected to the device base 40, and the spacing along the Y-axis is adapted to the length of the reflective component 12. The two sets of first motion mechanisms 21 are respectively fixed to one support member 24 by bolts. The arrangement of the support members 24 ensures that the first motion platform 211 of the first motion mechanism 21 is at a suitable height, ensuring that the distance between the second motion mechanism 22 and the reflective component 12 after its installation meets the motion requirements of the detection module 30.

[0049] In one embodiment, reference is made to Figure 5 The motion module 20 also includes a motion control unit (not shown in the figure) and at least one set of position feedback components 25. The motion control unit is communicatively connected to the first motion mechanism 21, the second motion mechanism 22, the third motion mechanism 23, and at least one set of position feedback components 25. The motion control unit can be an ACS motion control card, which outputs high-precision motion control commands by communicating with each motion mechanism and the position feedback components 25. The position feedback components 25 include a matching grating ruler 251 and a grating reader 252.

[0050] In some embodiments, reference is made to Figure 5A set of position feedback components 25 can also be installed on the third motion mechanism 23 to collect the third position information of the third motion table 231 in real time. The motion control unit is used to receive the third position information to control the third motion mechanism 23 to provide real-time feedback on the position of the third motion table 231, and can also control the third motion mechanism 23 to correct the position of the third motion table 231.

[0051] In some embodiments not shown, a set of position feedback components 25 may be installed on the first motion mechanism 21 to collect the first position information of the first motion table 211. The motion control unit is used to receive the first position information to control the first motion mechanism 21 to provide real-time feedback on the position of the first motion table 211, and may also control the first motion mechanism 21 to correct the position of the first motion table 211.

[0052] In some embodiments not shown, a set of position feedback components 25 may also be installed on the second motion mechanism 22 for real-time acquisition of the second position information of the second motion stage 221. The motion control unit is used to receive the second position information to control the second motion mechanism 22 to provide real-time feedback on the position of the second motion stage 221, and may also control the second motion mechanism 22 to correct the position of the second motion stage 221.

[0053] The grating ruler 251 of the position feedback component 25 can be a stainless steel grating ruler 251, which is fixed to the fixed end of the motion mechanism by adhesive. The grating reading head 252 is fixed to the corresponding motion table (first motion table 211, second motion table 221, and third motion table 231) by a fixing bracket. The grating reading head 252 collects the scale signal of the grating ruler 251 in real time, converts it into position information and feeds it back to the motion control unit. The motion control unit compares the feedback information with the preset motion path. If there is a deviation, it outputs a correction command in real time to drive the motion mechanism to adjust the position of the motion table, forming a closed-loop control to ensure the motion positioning accuracy of the detection module 30.

[0054] In one embodiment, the resolution of the grating ruler 251 is ≤0.1μm, which can realize high-precision acquisition of the position of the motion stage. The 0.1μm resolution can ensure that the grating read head 252 can accurately capture the position change of each step, avoid the failure of hole position detection due to step error, and help meet the requirements of TGV through hole size detection.

[0055] In one embodiment, reference is made to Figure 4 and Figure 6The testing equipment also includes a base 40, which comprises a base 41, a support platform 42, and an air-floating vibration isolation pad 43. The support platform 42 is used to mount the motion module 20 and the platform module 10. The support platform 42 is made of marble, and its maximum deformation under static stress conditions is no greater than 0.001 mm, and its maximum deformation under dynamic motion conditions is no greater than 0.001 mm. The air-floating vibration isolation pad 43 is positioned between the base 41 and the support platform 42 to ensure that the vibration level of the testing equipment meets the VC-C vibration standard requirements. The high rigidity and low thermal expansion coefficient of the marble material ensure that the maximum deformation of the support platform 42 is controlled within 0.001 mm under both static stress and dynamic motion (the motion module 20 generates inertial force during high-speed movement), preventing the motion mechanism from shifting due to deformation of the support platform 42. The air-floating vibration isolation pad 43 can effectively isolate low-frequency vibrations, achieve high-precision automatic leveling, effectively isolate the impact of workshop floor vibrations (such as vibrations generated by machine tools and transportation equipment) on the detection module 30, ensure that the vision inspection component 31 can stably acquire clear images, and make the vibration level of the inspection equipment meet the VC-C vibration standard requirements.

[0056] The above examples illustrate this application only to aid understanding and are not intended to limit its scope. Those skilled in the art to which this application pertains can make various simple deductions, modifications, or substitutions based on the ideas presented.

Claims

1. A platform module for a TGV through-hole defect detection device, characterized in that, include: Platform substrate; A reflective component is fixedly placed on the stage base. The reflective component includes a support surface and a reflective surface. The support surface is used to support the TGV glass substrate to be tested, and the reflective surface is used to reflect light to illuminate the internal features of the through holes of the TGV glass substrate, so that the internal features can be identified by the detection module of the detection equipment.

2. The platform module as described in claim 1, characterized in that, The reflective assembly includes a reflector, and the supporting surface and the reflecting surface are located on opposite sides of the reflector.

3. The platform module as described in any one of claims 1 or 2, characterized in that, The platform module also includes: A product positioning component is disposed on the outer periphery of the reflective component and is used to position the TGV glass substrate placed on the reflective component so that the TGV glass substrate is in a reference position. And / or, a product fixing component, connected to the platform base, has a fixed state and an unlocked state that can be switched between each other. In the fixed state, the product fixing component holds and fixes the TGV glass substrate to the reflective component; in the unlocked state, the fixing of the TGV glass substrate is released.

4. A TGV through-hole defect detection device, characterized in that, include: The platform module of the TGV through-hole defect detection device as described in any one of claims 1 to 3; The motion module has mutually perpendicular X-axis, Y-axis and Z-axis motion directions, wherein the X-axis and Y-axis motion directions are parallel to the support surface, and the Z-axis motion direction is perpendicular to the support surface; The system includes a detection module connected to the motion module, which moves under the influence of the motion module. The detection module includes a vision detection component and a light source component. The light source component emits light toward the area to be detected on the TGV glass substrate disposed on the support surface. The vision detection component detects the orifice features of the through holes located in the area to be detected and receives light reflected by the reflection component to detect the internal features of the through holes.

5. The TGV through-hole defect detection device as described in claim 4, characterized in that, The visual inspection component includes an inspection lens, and the light source component includes a light source element and a light guide element. The light source element is used to emit light to the light guide element, and the light guide element has a lens portion coaxially connected to the inspection lens so that the light is emitted along an optical path coaxial with the inspection lens.

6. The TGV through-hole defect detection device as described in claim 5, characterized in that, The light source includes a surface light source disposed above the stage module, used to illuminate the area to be tested of the TGV glass substrate disposed on the support surface.

7. The TGV through-hole defect detection device as described in claim 5, characterized in that, The light source includes an optical fiber light source.

8. The TGV through-hole defect detection device as described in claim 4, characterized in that, The detection module further includes a distance sensing component, which is fixed relative to the vision detection component and communicatively connected to the motion module. It is used to detect the detection distance between the vision detection component and the TGV glass substrate, and to feed back the change in the detection distance to the motion module so that the motion module can adjust the position of the vision detection component relative to the TGV glass substrate in the Z-axis motion direction, so that the focal length of the vision detection component is adapted to the detection distance.

9. The TGV through-hole defect detection device as described in any one of claims 4 to 8, characterized in that, The motion module includes: Two sets of first motion mechanisms are spaced apart on opposite sides of the reflective component along the Y-axis motion direction, and each includes a first motion stage. The two first motion mechanisms are used to drive the two first motion stages to move synchronously along the X-axis motion direction. The second motion mechanism is connected to the two first motion tables. The second motion mechanism includes a second motion table and is used to drive the second motion table to move along the Y-axis motion direction. And a third motion mechanism, connected to the second motion stage, including a third motion stage for setting the detection module, the third motion mechanism being used to drive the third motion stage to move along the Z-axis motion direction.

10. The TGV through-hole defect detection device as described in claim 9, characterized in that, The first motion mechanism and / or the second motion mechanism includes a linear motor; The third motion mechanism includes a rotary motor, a lead screw, and a third motion table. The lead screw is connected to the output shaft of the rotary motor so as to be driven to rotate by the rotary motor. The third motion table is threadedly engaged with the lead screw and is used to move along the Z-axis motion direction under the drive of the lead screw.

11. The TGV through-hole defect detection device as described in claim 9, characterized in that, The motion module further includes a motion control unit and at least one set of position feedback components; the motion control unit is communicatively connected to the first motion mechanism, the second motion mechanism, the third motion mechanism, and the at least one set of position feedback components; the position feedback components include a matching grating ruler and a grating reader; A set of the position feedback components is disposed on the first motion mechanism for collecting the first position information of the first motion platform. The motion control unit is used to receive the first position information to control the first motion mechanism to provide real-time feedback on the position of the first motion platform. And / or, a set of the position feedback components are disposed on the second motion mechanism for real-time acquisition of the second position information of the second motion platform, and the motion control unit is used to receive the second position information to control the second motion mechanism to provide real-time feedback on the position of the second motion platform; And / or, a set of the position feedback components are disposed on the third motion mechanism for real-time acquisition of the third position information of the third motion platform, and the motion control unit is used to receive the third position information to control the third motion mechanism to provide real-time feedback of the position of the third motion platform.

12. The TGV through-hole defect detection device as described in claim 11, characterized in that, The resolution of the grating ruler is ≤0.1μm.

13. The TGV through-hole defect detection device as described in any one of claims 4 to 8, characterized in that, The detection device also includes a device base, the device base comprising: Base; A support platform is used to set up the motion module and the platform module. The support platform is made of marble, and its maximum deformation under static stress conditions is no greater than 0.001mm, and its maximum deformation under dynamic motion conditions is no greater than 0.001mm. An air-floating vibration isolation pad is placed between the base and the support platform to ensure that the vibration level of the testing equipment meets the requirements of the VC-C vibration standard.

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