A tgv via defect detection apparatus

Abstract

The application relates to a TGV through-hole defect detection device, which comprises a carrier module, a motion module and a detection module, the carrier module comprises a carrier base and a transparent carrier plate, the transparent carrier plate is arranged on the carrier base, and the carrier base is provided with an accommodating space below the transparent carrier plate; the motion module is used for driving the detection module to move along the X-axis direction, the Y-axis direction and the Z-axis direction which are perpendicular to each other; the motion module comprises a second motion mechanism which is used for moving along the X-axis direction and driving the detection module to move along the Y-axis direction; the detection module is located above the transparent carrier plate and comprises a visual detection assembly; the detection device further comprises a following backlight module which comprises a following motion mechanism arranged in the accommodating space and a backlight light source assembly; the following motion mechanism is connected with the second motion mechanism to move synchronously along the X-axis direction with the second motion mechanism, the following motion mechanism comprises a following table, and the backlight light source assembly is arranged on the following table and opposite to the visual detection assembly, so that the detection efficiency of the TGV through-hole defect is improved.

Description

Technical Field

[0001] This application relates to the field of TGV defect detection technology, specifically to a TGV through-hole defect detection device. Background Technology

[0002] As semiconductor packaging technology advances towards higher density and performance, through-glass via (TGV) packaging technology has become widely used as a core technology for achieving vertical interconnection of chips in 2.5D / 3D packaging. Because TGV packaging requires the fabrication of vias with high aspect ratios on the substrate, various defects can easily occur during the manufacturing process, such as rough hole walls, residues inside the holes, and uneven hole diameters. These defects can affect chip performance and reliability.

[0003] In the inspection process after TGV via etching, commonly used optical inspection equipment (such as optical microscopes and optical confocal microscopes) can only inspect the TGV via openings. While electron microscopes can inspect the internal morphology of the vias by scanning layer by layer, they are too expensive. Even when using an automated optical inspection (AOI) system, the inspection of vias on large-area glass substrates requires step-by-step transfer of the product for inspection of the via openings and inside the vias, resulting in a long inspection time for the entire substrate and making it difficult to meet the needs of efficient production. Utility Model Content

[0004] This application provides a TGV through-hole defect detection device to improve the detection efficiency of TGV through-hole defects.

[0005] One embodiment provides a TGV through-hole defect detection device, comprising: A platform module includes a platform base and a transparent carrier plate, wherein the transparent carrier plate is disposed on the platform base, and the platform base has an accommodating space below the transparent carrier plate; The system includes a motion module and a detection module. The motion module drives the detection module to move along mutually perpendicular X-axis, Y-axis, and Z-axis directions. The X-axis and Y-axis directions are parallel to the transparent carrier plate, and the Z-axis direction is perpendicular to the transparent carrier plate. The motion module includes a second motion mechanism for moving along the X-axis direction and driving the detection module to move along the Y-axis direction. The detection module is located above the transparent carrier plate and includes a vision inspection component for detecting the aperture features of the through-holes in the area to be inspected on the TGV glass substrate disposed on the transparent carrier plate. The detection device further includes a follow-up backlight module, which includes a follow-up motion mechanism and a backlight source assembly disposed in the accommodating space. The follow-up motion mechanism is connected to the second motion mechanism to move synchronously with the second motion mechanism along the X-axis direction. The follow-up motion mechanism includes a follow-up stage for moving along the Y-axis direction. The backlight source assembly is disposed on the follow-up stage and opposite to the vision detection assembly, and is used to emit light from the bottom of the transparent carrier plate to the area to be detected of the TGV glass substrate on the transparent carrier plate to illuminate the bottom of the through hole in the area to be detected, thereby allowing the vision detection assembly to detect the internal features of the through hole.

[0006] In one embodiment, the detection module further includes an adjustable fiber optic light source disposed on one side of the vision detection component, which emits light toward the area to be detected of the TGV glass substrate disposed on the transparent carrier plate to illuminate the opening of the through hole in the area to be detected, thereby allowing the vision detection component to detect the opening feature of the through hole.

[0007] In one embodiment, the accompanying backlight module further includes a bracket connected to the second motion mechanism for setting the accompanying motion mechanism. The transparent carrier plate has a clearance channel around its periphery for the bracket to pass through, and the extension direction of the clearance channel is parallel to the X-axis direction.

[0008] In one embodiment, the motion module further includes a first motion mechanism and a third motion mechanism. The first motion mechanism includes a first motion stage for mounting the second motion mechanism, so as to drive the second motion mechanism to move along the X-axis direction via the first motion stage. The second motion mechanism includes a second motion stage for mounting the third motion mechanism, so as to drive the third motion mechanism to move along the Y-axis direction via the second motion stage. The third motion mechanism includes a third motion stage for mounting the detection module, and the third motion mechanism is used to drive the detection module to move along the Z-axis direction.

[0009] In one embodiment, the first motion mechanism includes two sets, which are spaced apart on opposite sides of the transparent carrier plate along the Y-axis direction. The two sets of first motion mechanisms are used to drive their respective first motion platforms to move synchronously along the X-axis direction. The second motion mechanism is mounted and fixed on the two first motion platforms.

[0010] In one embodiment, the motion module includes two support members, which are spaced apart on both sides of the transparent carrier plate along the Y-axis direction. The two first motion mechanisms are respectively mounted on one of the support members, and the accompanying motion mechanism is mounted between the two support members.

[0011] In one embodiment, the first motion mechanism, the second motion mechanism, and / or the following motion mechanism include a linear motor; The third motion mechanism includes a rotary motor, a lead screw, and a third motion table. The lead screw is connected to the output shaft of the rotary motor so as to be driven to rotate by the rotary motor. The third motion table is threadedly engaged with the lead screw and is used to move along the Z-axis direction under the drive of the lead screw.

[0012] In one embodiment, the motion module further includes a motion control unit and at least one set of position feedback components; the motion control unit is communicatively connected to the first motion mechanism, the second motion mechanism, the third motion mechanism, and the at least one set of position feedback components; the position feedback components include a matching grating ruler and a grating reader.

[0013] A set of the position feedback components is installed on the first motion mechanism for collecting the first position information of the first motion platform. The motion control unit is used to receive the first position information to control the first motion mechanism to provide real-time feedback on the position of the first motion platform. And / or, a set of the position feedback components are installed on the second motion mechanism for real-time acquisition of the second position information of the second motion platform, and the motion control unit is used to receive the second position information to control the second motion mechanism to provide real-time feedback on the position of the second motion platform; And / or, a set of the position feedback components are installed on the third motion mechanism for real-time acquisition of the third position information of the third motion platform, and the motion control unit is used to receive the third position information to control the third motion mechanism to provide real-time feedback on the position of the third motion platform.

[0014] In one embodiment, the resolution of the grating ruler is ≤0.1μm.

[0015] In one embodiment, the detection module further includes a distance sensing component, which is fixed relative to the visual detection component and communicatively connected to the motion module. This component is used to detect the detection distance between the visual detection component and the TGV glass substrate, and to feed back the change in the detection distance to the motion module so that the motion module can adjust the position of the visual detection component relative to the TGV glass substrate in the Z-axis direction, thereby adapting the focal length of the visual detection component to the detection distance.

[0016] In one embodiment, the stage module further includes: The product positioning component is disposed on the outer periphery of the transparent carrier plate and is used to position the TGV glass substrate placed on the transparent carrier plate so that the TGV glass substrate is in a reference position. And / or, a product fixing component, connected to the platform base, has a fixed state and an unlocked state that can be switched between each other. In the fixed state, the product fixing component holds and fixes the TGV glass substrate to the transparent carrier plate; in the unlocked state, the fixing of the TGV glass substrate is released.

[0017] In one embodiment, the detection device further includes a device base, the device base comprising: Base; A support platform is used to set up the motion module and the platform module. The support platform is made of marble, and its maximum deformation under static stress conditions is no greater than 0.001mm, and its maximum deformation under dynamic motion conditions is no greater than 0.001mm. An air-floating vibration isolation pad is placed between the base and the support platform to ensure that the vibration level of the testing equipment meets the requirements of the VC-C vibration standard.

[0018] According to the TGV through-hole defect detection equipment of the above embodiment, since the stage module is provided with a transparent carrier plate, and a follow-up backlight module connected to the second motion mechanism of the motion module is provided below the transparent carrier plate, the backlight source component in the follow-up backlight module can always maintain a position relative to the vision detection component under the drive of the second motion mechanism and the follow-up motion mechanism. This allows the vision detection module to detect both the orifice features of the through hole and the internal features of the through hole (especially the internal features at the bottom of the through hole) under the supplementary lighting of the backlight source component. This helps to reduce product transfer links, realize continuous detection process, and improve the detection efficiency of TGV through-hole defects. Attached Figure Description

[0019] Figure 1 This is a three-dimensional structural schematic diagram of a TGV through-hole defect detection device according to one embodiment; Figure 2 This is a schematic diagram of the internal structure of a TGV through-hole defect detection device according to one embodiment; Figure 3 This is a three-dimensional structural diagram of a motion module according to one embodiment; Figure 4 This is a schematic diagram of the structure of the third motion mechanism and detection module in one embodiment; Figure 5 This is a schematic diagram of the platform module in one embodiment; Figure 6 This is a front view of a motion module according to one embodiment.

[0020] In the diagram, 1. TGV through-hole defect detection equipment; 10. Platform module; 11. Platform base; 12. Transparent carrier plate; 13. Clearance channel; 14. Product positioning component; 141. Positioning block; 15. Product fixing component; 151. Rotating pressure plate; 152. Hinge shaft; 153. Pressure head; 20. Motion module; 21. First motion mechanism; 211. First motion table; 22. Second motion mechanism; 221. Second motion table; 23. Third motion mechanism; 231. Third motion table; 232. Rotary motor; 233. Lead screw; 24. Support component; 25. Position feedback assembly; 251. Grating ruler; 252. Grating reader; 30. Detection module; 31. Vision inspection component; 311. Industrial CCD camera; 32. Adjustable fiber optic light source; 33. Light guide component; 34. Distance sensing component; 40. Follow-up backlight module; 41. Follow-up motion mechanism; 411. Follow-up platform; 42. Backlight source assembly; 43. Bracket; 431. Connecting plate; 50. Equipment base; 51. Base; 52. Support platform; 53. Air-floating vibration isolation pad; 60. TGV glass substrate. Detailed Implementation

[0021] The present application will now be described in further detail with reference to specific embodiments and accompanying drawings. Similar elements in different embodiments are referred to by related similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of the present application. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, certain operations related to the present application are not shown or described in the specification. This is to avoid obscuring the core parts of the present application with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0022] Furthermore, the features, operations, or characteristics described in the specification can be combined in any suitable manner to form various embodiments. At the same time, the steps or actions in the method description can be rearranged or adjusted in a manner obvious to those skilled in the art. Therefore, the various orders in the specification and drawings are only for the clear description of a particular embodiment and do not imply a necessary order, unless otherwise stated that a particular order must be followed.

[0023] The serial numbers assigned to components in this document, such as "first" and "second," are used only to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages).

[0024] In this embodiment, the stage module 10 is provided with a transparent carrier plate 12, and a follow-up backlight module 40 connected to the second motion mechanism 22 of the motion module 20 is provided below the transparent carrier plate 12. The backlight source component 42 in the follow-up backlight module 40 can always maintain a position relative to the vision inspection component 31 under the drive of the second motion mechanism 22 and the follow-up motion mechanism 41. This allows the vision inspection module 30 to detect both the orifice features of the through hole and the internal features of the through hole (especially the internal features at the bottom of the through hole) under the supplementary lighting of the backlight source component 42. This helps to reduce product transfer steps, realize continuous inspection process, and improve the detection efficiency of TGV through hole defects.

[0025] In one embodiment, reference is made to Figures 1 to 6 The TGV through-hole defect detection device 1 includes a stage module 10, a motion module 20, a detection module 30, and a following backlight module 40.

[0026] Among them, reference Figures 2 to 4 The platform module 10 includes a platform base 11 and a transparent carrier plate 12. The transparent carrier plate 12 is disposed on the platform base 11, and the platform base 11 has a receiving space (not shown in the figure) below the transparent carrier plate 12. For example, the transparent carrier plate 12 can be made of high light transmittance quartz glass, and is embedded in the upper part of the platform base 11 through a support structure on the platform base 11. The height of the support structure forms a stable receiving space between the transparent carrier plate 12 and the bottom of the platform base 11 for the installation of the accompanying backlight module 40.

[0027] Reference Figures 2 to 4 The motion module 20 is used to drive the detection module 30 to move along mutually perpendicular X-axis, Y-axis, and Z-axis directions. The motion module 20 includes a second motion mechanism 22 for moving along the X-axis and driving the detection module 30 to move along the Y-axis. The second motion mechanism 22 can be a linear drive mechanism, such as a linear motor drive module. The motion module 20 can control the second motion mechanism 22 to reciprocate along the X-axis. The second motion mechanism 22 includes a second motion stage 221 and can drive the second motion stage 221 to reciprocate along the Y-axis. The detection module 30 is connected to the second motion stage 221, thereby moving along the X and Y directions under the drive of the second motion mechanism 22.

[0028] Reference Figure 2 and Figure 4The detection module 30 is located above the transparent carrier plate 12 and includes a vision inspection component 31. The vision inspection component 31 is used to detect the aperture features of the through holes in the area to be inspected on the TGV glass substrate 60 disposed on the transparent carrier plate 12. The vision inspection component 31 can adopt an industrial CCD camera 311, equipped with a 5x high-performance industrial lens, with a camera resolution of not less than 5 million pixels, to clearly capture the aperture diameter, roundness, edge roughness and other features of the through hole aperture, meeting the detection requirements of micro-nano TGV through holes.

[0029] Reference Figure 2 and Figure 3 The accompanying backlight module 40 includes an accompanying motion mechanism 41 and a backlight source assembly 42 disposed in the accommodating space (i.e., located below the transparent carrier plate 12); the accompanying motion mechanism 41 is connected to the second motion mechanism 22 to move synchronously with the second motion mechanism 22 along the X-axis direction, ensuring that there is no relative displacement when the accompanying motion mechanism 41 and the second motion mechanism 22 move along the X-axis direction.

[0030] The following motion mechanism 41 includes a following stage 411 for moving along the Y-axis. A backlight source assembly 42 is disposed on the following stage 411 and opposite to the vision inspection assembly 31. It emits light from the bottom of the transparent carrier plate 12 to the area to be inspected on the TGV glass substrate 60 on the transparent carrier plate 12 to illuminate the bottom of the through hole in the area to be inspected, so that the vision inspection assembly 31 can detect the internal features of the through hole. The following motion mechanism 41 may include a linear motor. The backlight source assembly 42 may be an array-type LED surface light source with a light emission uniformity of not less than 90%, so that the light can illuminate the bottom and wall of the through hole after penetrating the transparent carrier plate 12, enabling the vision inspection assembly 31 to simultaneously identify defects such as foreign objects, rough hole walls, and etched defects in the hole.

[0031] When the testing equipment is working, the motion module 20 can first drive the testing module 30 to detect the orifice features of the through holes of the TGV glass substrate 60 set on the transparent carrier plate 12. After the orifice feature detection is completed, the bottom and internal features of the through holes can be detected under the illumination of the backlight source assembly 42, which helps to shorten the overall testing time. For example, the testing time of a 515mm×510mm board-level or wafer-level TGV glass substrate 60 can be controlled within 4 minutes, thus improving the testing efficiency.

[0032] In one embodiment, reference is made to Figure 2 and Figure 3 The accompanying backlight module 40 also includes a bracket 43, which is connected to the second motion mechanism 22 and is used to set the accompanying motion mechanism 41. The transparent carrier plate 12 has a clearance channel 13 around its periphery for the bracket 43 to pass through, and the extension direction of the clearance channel 13 is parallel to the X-axis direction.

[0033] For example, the bracket 43 may include two connecting plates 431 spaced apart on both sides of the second motion mechanism 22 along the Y-axis direction. The accompanying motion mechanism 41 is installed between the two connecting plates 431 to achieve a stable connection between the accompanying motion mechanism 41 and the second motion mechanism 22. The connecting plates 431 may be configured as a bent structure so that the accompanying motion mechanism 41 is offset from directly below the second motion mechanism 22 and is positioned opposite to the detection module 30. This allows the backlight source assembly 42 to be opposite to the vision detection assembly 31, and the emitted light is directed towards the detection coverage area of ​​the vision detection assembly 31, which helps to improve the detection quality.

[0034] The clearance channel 13 around the transparent carrier plate 12 is specifically an elongated notch opened on both sides of the transparent carrier plate 12 along the X-axis direction. The width of the notch can be slightly larger than the thickness of the bracket 43 along the Y-axis direction. When the bracket 43 moves back and forth along the X-axis direction with the second motion mechanism 22, it can move freely in the clearance channel 13 to avoid mechanical interference with the transparent carrier plate 12. Furthermore, the clearance channel 13 is located in the non-detection area at the edge of the transparent carrier plate 12, so it does not affect the bearing area of ​​the TGV glass substrate 60, ensuring that the bearing function of the stage module 10 and the movement function of the accompanying backlight module 40 do not conflict with each other.

[0035] In one embodiment, reference is made to Figure 4 The detection module 30 also includes an adjustable fiber optic light source 32, which is disposed on one side of the vision inspection component 31. The adjustable fiber optic light source 32 emits light towards the area to be inspected on the TGV glass substrate 60 disposed on the transparent carrier plate 12, illuminating the opening of the through-hole in the area to be inspected, thereby allowing the vision inspection component 31 to detect the opening features of the through-hole. The light from the adjustable fiber optic light source 32 complements the light from the bottom of the accompanying backlight module 40. The light from the upper adjustable fiber optic light source 32 focuses on illuminating the opening features, while the light from the lower accompanying backlight module 40 focuses on illuminating the features inside the hole, enabling the vision inspection component 31 to simultaneously acquire high-quality images of both the opening and the inside of the hole, improving the comprehensiveness of defect identification.

[0036] For example, the adjustable fiber optic light source 32 can be an external bright-field fiber optic cable fixed around the lens of the industrial CCD camera 311 of the vision inspection assembly 31. Furthermore, the inspection module 30 may also include a light guide 33, the light-emitting end of which is coaxially arranged with the lens of the industrial CCD camera 311. The adjustable fiber optic light source 32 is used to emit light from the light guide 33, and the light guide 33 guides the light so that the light from the external bright-field fiber optic cable can be emitted along the optical path coaxial with the lens of the industrial CCD camera 311, accurately covering the opening of the area to be inspected.

[0037] In one embodiment, reference is made to Figures 2 to 4The motion module 20 also includes a first motion mechanism 21 and a third motion mechanism 23. The first motion mechanism 21 includes a first motion table 211 for mounting the second motion mechanism 22, so as to drive the second motion mechanism 22 to move along the X-axis direction. The second motion mechanism 22 includes a second motion table 221 for mounting the third motion mechanism 23, so as to drive the third motion mechanism 23 to move along the Y-axis direction. The third motion mechanism 23 includes a third motion table 231 for mounting the detection module 30, and the third motion mechanism 23 is used to drive the detection module 30 to move along the Z-axis direction.

[0038] In one embodiment, the first motion mechanism 21 and the second motion mechanism 22 can be linear drive mechanisms, such as linear motors. Linear motors have the advantages of fast response speed and no mechanical transmission backlash, which can significantly improve the motion efficiency of the detection module 30 while ensuring motion accuracy (such as repeatability accuracy ±1μm). The first motion mechanism 21 drives the first motion stage 211 to move along the X-axis direction through the guide rail. The bottom of the second motion mechanism 22 is fixed to the first motion stage 211 by bolts and moves synchronously with the first motion stage 211 along the X-axis. The second motion stage 221 of the second motion mechanism 22 moves along the Y-axis direction through the guide rail. The housing of the third motion mechanism 23 is fixed to the second motion stage 221 and moves along the Y-axis with the second motion stage 221.

[0039] In one embodiment, reference is made to Figure 4 The third motion mechanism 23 may include a lead screw and slide structure. For example, the third motion mechanism 23 includes a rotary motor 232, a lead screw 233, and a third motion stage 231. The lead screw 233 is connected to the output shaft of the rotary motor 232 and is driven to rotate by the rotary motor 232. The third motion stage 231 is threadedly engaged with the lead screw 233 and is used to move along the Z-axis under the drive of the lead screw 233. When the rotary motor 232 drives the lead screw 233 to rotate, the third motion stage 231 rises and falls along the Z-axis, achieving height adjustment within the range of 0-50mm. This adapts to the inspection requirements of TGV glass substrates 60 with different thicknesses, ensuring that the distance between the vision inspection component 31 and the substrate is always within the optimal imaging range.

[0040] For example, the rotary motor 232 of the third motion mechanism 23 can be a servo motor to achieve high-precision position feedback, and the lead screw 233 can be a high-precision ball screw 233 module. The third motion stage 231 is rigidly connected to the nut seat of the lead screw 233. When the rotary motor 232 drives the lead screw 233 to rotate, the third motion stage 231 rises and falls smoothly along the Z-axis direction to meet the focus fine adjustment requirements of the vision inspection component 31.

[0041] In one embodiment, reference is made to Figure 2 and Figure 3The first motion mechanism 21 comprises two sets, which are spaced apart along the Y-axis on opposite sides of the transparent carrier plate 12. The two sets of first motion mechanisms 21 drive their respective first motion stages 211 to move synchronously along the X-axis. The second motion mechanism 22 is mounted and fixed on the two first motion stages 211. The two sets of first motion mechanisms 21 can have identical structures and are respectively installed on opposite sides of the transparent carrier plate 12 along the Y-axis. The two sets of first motion mechanisms 21 can be synchronously driven by the same motion control signal, ensuring that the movement speed and displacement of the two first motion stages 211 along the X-axis are completely consistent, while the speed ripple accuracy is less than two-thousandths. The two ends of the second motion mechanism 22 are fixed to the top of the two first motion stages 211 by bolts, forming a "dual-drive gantry" structure. This effectively counteracts the overturning moment generated during movement, preventing the second motion mechanism 22 from tilting when moving along the X-axis, ensuring the straightness of the movement of the detection module 30, adapting to the motion accuracy requirements of TGV through-hole size detection, and preventing positional failure of the detected product due to movement offset.

[0042] In one embodiment, reference is made to Figure 2 and Figure 3 The motion module 20 includes two support members 24, which are spaced apart along the Y-axis on both sides of the transparent carrier plate 12. Two first motion mechanisms 21 are respectively mounted on one support member 24, and a following motion mechanism 41 is mounted between the two support members 24. Exemplarily, the two support members 24 are fixedly connected to the equipment base 50, and the spacing along the Y-axis is adapted to the length of the transparent carrier plate 12; the two sets of first motion mechanisms 21 are respectively fixed to one support member 24 by bolts. The arrangement of the support members 24 ensures that the first motion platform 211 of the first motion mechanism 21 is at a suitable height, ensuring that the distance between the second motion mechanism 22 and the transparent carrier plate 12 after its installation meets the motion requirements of the detection module 30.

[0043] In one embodiment, reference is made to Figure 4 The motion module 20 also includes a motion control unit (not shown in the figure) and at least one set of position feedback components 25. The motion control unit is communicatively connected to the first motion mechanism 21, the second motion mechanism 22, the third motion mechanism 23, and at least one set of position feedback components 25. The motion control unit can be an ACS motion control card, which outputs high-precision motion control commands by communicating with each motion mechanism and the position feedback components 25. The position feedback components 25 include a matching grating ruler 251 and a grating reader 252.

[0044] In some embodiments, reference is made to Figure 4A set of position feedback components 25 can also be installed on the third motion mechanism 23 to collect the third position information of the third motion table 231 in real time. The motion control unit is used to receive the third position information to control the third motion mechanism 23 to provide real-time feedback on the position of the third motion table 231, and can also control the third motion mechanism 23 to correct the position of the third motion table 231.

[0045] In some embodiments not shown, a set of position feedback components 25 may be installed on the first motion mechanism 21 to collect the first position information of the first motion table 211. The motion control unit is used to receive the first position information to control the first motion mechanism 21 to provide real-time feedback on the position of the first motion table 211, and may also control the first motion mechanism 21 to correct the position of the first motion table 211.

[0046] In some embodiments not shown, a set of position feedback components 25 may also be installed on the second motion mechanism 22 for real-time acquisition of the second position information of the second motion stage 221. The motion control unit is used to receive the second position information to control the second motion mechanism 22 to provide real-time feedback on the position of the second motion stage 221, and may also control the second motion mechanism 22 to correct the position of the second motion stage 221.

[0047] The grating ruler 251 of the position feedback component 25 can be a stainless steel grating ruler 251, which is fixed to the fixed end of the motion mechanism by adhesive. The grating reading head 252 is fixed to the corresponding motion table (first motion table 211, second motion table 221, and third motion table 231) by a fixing bracket. The grating reading head 252 collects the scale signal of the grating ruler 251 in real time, converts it into position information and feeds it back to the motion control unit. The motion control unit compares the feedback information with the preset motion path. If there is a deviation, it outputs a correction command in real time to drive the motion mechanism to adjust the position of the motion table, forming a closed-loop control to ensure the motion positioning accuracy of the detection module 30.

[0048] In one embodiment, the resolution of the grating ruler 251 is ≤0.1μm, which can realize high-precision acquisition of the position of the motion stage. The 0.1μm resolution can ensure that the grating read head 252 can accurately capture the position change of each step, avoid the failure of hole position detection due to step error, and help meet the requirements of TGV through hole size detection.

[0049] In one embodiment, reference is made to Figure 4The detection module 30 also includes a distance sensing component 34, which is fixed relative to the vision detection component 31 and communicatively connected to the motion module 20. This component detects the detection distance between the vision detection component 31 and the TGV glass substrate 60, and feeds back the change in the detection distance to the motion module 20. The motion module 20 then adjusts the position of the vision detection component 31 relative to the TGV glass substrate 60 in the Z-axis direction, ensuring that the focal length of the vision detection component 31 matches the detection distance. The distance sensing component 34 can be a laser rangefinder, such as an AF (coaxial point laser) rangefinder, and is fixedly connected to the lens of the industrial CCD camera 311 of the vision detection component 31. The distance sensing component 34 is communicatively connected to the motion control unit of the motion module 20. When the TGV glass substrate 60 has slight warping, or when the detection module 30 experiences slight vibrations during movement, the detection spacing will change. The laser rangefinder will feed back the spacing change to the motion control unit in real time. Based on the feedback signal, the motion control unit will drive the servo motor of the third motion mechanism 23 to rotate and adjust the Z-axis position of the third motion stage 231 so that the distance between the vision detection component 31 and the position to be detected is always kept near the focal length of the lens. This ensures that the acquired images of the opening and inside the hole are always clear and avoids blurry images and misjudgments of defects caused by spacing changes.

[0050] In one embodiment, reference is made to Figure 5 The stage module 10 also includes a product positioning component 14, which is disposed on the outer periphery of the transparent carrier plate 12 and is used to position the TGV glass substrate 60 placed on the transparent carrier plate 12 so that the TGV glass substrate 60 is in a reference position.

[0051] For example, the product positioning component 14 includes a plurality of positioning blocks 141, which are respectively fixed to one side edge of the transparent carrier plate 12 along the X-axis direction and one side edge along the Y-axis direction. When the TGV glass substrate 60 is placed on the transparent carrier plate 12, the two adjacent sides of the TGV glass substrate 60 abut against the inner sidewall of the positioning block 141, thereby achieving reference positioning in the X-axis and Y-axis directions, ensuring that the substrate position is consistent during each inspection, and avoiding deviation in the recording of defect positions.

[0052] In one embodiment, reference is made to Figure 5 The stage module 10 also includes a product fixing component 15, which is connected to the stage base 11 and has a fixed state and an unlocked state that can be switched between each other. In the fixed state, the product fixing component 15 holds and fixes the TGV glass substrate 60 against the transparent carrier plate 12; in the unlocked state, it releases the fixation of the TGV glass substrate 60.

[0053] For example, the product fixing assembly 15 includes two sets of rotating pressure plates 151. One end of the pressure plate is connected to the stage base 11 via a hinge shaft 152, and the other end is provided with a pressure head 153. After the substrate is positioned, the pressure plate is rotated around the hinge shaft 152 to the top of the substrate, and the pressure head 153 abuts against the non-detection area of ​​the substrate edge (such as 5mm away from the substrate edge) to achieve a fixed state. After the detection is completed, the pressure plate 151 is rotated in the opposite direction to the outside of the transparent carrier plate 12 to release the fixation and enter the unlocked state. The product fixing assembly 15 fixation method does not block the detection area and is suitable for fixing requirements of TGV glass substrates 60 of different thicknesses.

[0054] In one embodiment, reference is made to Figure 2 and Figure 6 The testing equipment also includes a base 50, which comprises a base 51, a support platform 52, and an air-floating vibration isolation pad 53. The support platform 52 is used to mount the motion module 20 and the platform module 10. The support platform 52 is made of marble, and its maximum deformation under static stress conditions is no greater than 0.001 mm, and its maximum deformation under dynamic motion conditions is no greater than 0.001 mm. The air-floating vibration isolation pad 53 is placed between the base 51 and the support platform 52 to ensure that the vibration level of the testing equipment meets the VC-C vibration standard requirements. The high rigidity and low thermal expansion coefficient of the marble material ensure that the maximum deformation of the support platform 52 is controlled within 0.001 mm under both static stress and dynamic motion (the motion module 20 generates inertial force during high-speed movement), preventing the motion mechanism from shifting due to deformation of the support platform 52. The air-floating vibration isolation pad 53 can effectively isolate low-frequency vibrations, achieve high-precision automatic leveling, effectively isolate the impact of workshop floor vibrations (such as vibrations generated by machine tools and transportation equipment) on the detection module 30, ensure that the vision inspection component 31 can stably acquire clear images, and make the vibration level of the inspection equipment meet the VC-C vibration standard requirements.

[0055] The above examples illustrate this application only to aid understanding and are not intended to limit its scope. Those skilled in the art to which this application pertains can make various simple deductions, modifications, or substitutions based on the ideas presented.

Claims

1. A TGV through-hole defect detection device, characterized in that, include: A platform module includes a platform base and a transparent carrier plate, wherein the transparent carrier plate is disposed on the platform base, and the platform base has an accommodating space below the transparent carrier plate; The system includes a motion module and a detection module. The motion module drives the detection module to move along mutually perpendicular X-axis, Y-axis, and Z-axis directions. The X-axis and Y-axis directions are parallel to the transparent carrier plate, and the Z-axis direction is perpendicular to the transparent carrier plate. The motion module includes a second motion mechanism for moving along the X-axis direction and driving the detection module to move along the Y-axis direction. The detection module is located above the transparent carrier plate and includes a vision inspection component for detecting the aperture features of the through-holes in the area to be inspected on the TGV glass substrate disposed on the transparent carrier plate. The detection device further includes a follow-up backlight module, which includes a follow-up motion mechanism and a backlight source assembly disposed in the accommodating space. The follow-up motion mechanism is connected to the second motion mechanism to move synchronously with the second motion mechanism along the X-axis direction. The follow-up motion mechanism includes a follow-up stage for moving along the Y-axis direction. The backlight source assembly is disposed on the follow-up stage and opposite to the vision detection assembly, and is used to emit light from the bottom of the transparent carrier plate to the area to be detected of the TGV glass substrate on the transparent carrier plate to illuminate the bottom of the through hole in the area to be detected, thereby allowing the vision detection assembly to detect the internal features of the through hole.

2. The TGV through-hole defect detection equipment as described in claim 1, characterized in that, The detection module also includes an adjustable fiber optic light source, which is disposed on one side of the vision detection component and is used to emit light toward the area to be detected of the TGV glass substrate disposed on the transparent carrier plate, so as to illuminate the opening of the through hole in the area to be detected, thereby allowing the vision detection component to detect the opening feature of the through hole.

3. The TGV through-hole defect detection equipment as described in claim 1, characterized in that, The accompanying backlight module also includes a bracket, which is connected to the second motion mechanism and is used to set the accompanying motion mechanism. The transparent carrier plate has a clearance channel on its periphery for the bracket to pass through, and the extension direction of the clearance channel is parallel to the X-axis direction.

4. The TGV through-hole defect detection equipment as described in claim 1, characterized in that, The motion module further includes a first motion mechanism and a third motion mechanism. The first motion mechanism includes a first motion platform for mounting the second motion mechanism, so as to drive the second motion mechanism to move along the X-axis direction via the first motion platform. The second motion mechanism includes a second motion platform for mounting the third motion mechanism, so as to drive the third motion mechanism to move along the Y-axis direction via the second motion platform. The third motion mechanism includes a third motion platform for mounting the detection module, and the third motion mechanism is used to drive the detection module to move along the Z-axis direction.

5. The TGV through-hole defect detection device as described in claim 4, characterized in that, The first motion mechanism includes two sets, which are spaced apart along the Y-axis on opposite sides of the transparent carrier plate. The two sets of first motion mechanisms are used to drive their respective first motion platforms to move synchronously along the X-axis. The second motion mechanism is mounted and fixed on the two first motion platforms.

6. The TGV through-hole defect detection device as described in claim 5, characterized in that, The motion module includes two support members, which are arranged at intervals along the Y-axis on both sides of the transparent carrier plate. The two first motion mechanisms are respectively mounted on one of the support members, and the accompanying motion mechanism is mounted between the two support members.

7. The TGV through-hole defect detection device as described in claim 4, characterized in that, The first motion mechanism, the second motion mechanism, and / or the following motion mechanism include a linear motor; The third motion mechanism includes a rotary motor, a lead screw, and a third motion table. The lead screw is connected to the output shaft of the rotary motor so as to be driven to rotate by the rotary motor. The third motion table is threadedly engaged with the lead screw and is used to move along the Z-axis direction under the drive of the lead screw.

8. The TGV through-hole defect detection device as described in claim 4, characterized in that, The motion module further includes a motion control unit and at least one set of position feedback components; the motion control unit is communicatively connected to the first motion mechanism, the second motion mechanism, the third motion mechanism, and the at least one set of position feedback components; the position feedback components include a matching grating ruler and a grating reader; A set of the position feedback components is installed on the first motion mechanism for collecting the first position information of the first motion platform. The motion control unit is used to receive the first position information to control the first motion mechanism to provide real-time feedback on the position of the first motion platform. And / or, a set of the position feedback components are installed on the second motion mechanism for real-time acquisition of the second position information of the second motion platform, and the motion control unit is used to receive the second position information to control the second motion mechanism to provide real-time feedback on the position of the second motion platform; And / or, a set of the position feedback components are installed on the third motion mechanism for real-time acquisition of the third position information of the third motion platform, and the motion control unit is used to receive the third position information to control the third motion mechanism to provide real-time feedback on the position of the third motion platform.

9. The TGV through-hole defect detection device as described in claim 8, characterized in that, The resolution of the grating ruler is ≤0.1μm.

10. The TGV through-hole defect detection device as described in any one of claims 1 to 9, characterized in that, The detection module further includes a distance sensing component, which is fixed relative to the vision detection component and communicatively connected to the motion module. It is used to detect the detection distance between the vision detection component and the TGV glass substrate, and to feed back the change in the detection distance to the motion module so that the motion module can adjust the position of the vision detection component relative to the TGV glass substrate in the Z-axis direction, so that the focal length of the vision detection component is adapted to the detection distance.

11. The TGV through-hole defect detection device as described in any one of claims 1 to 9, characterized in that, The platform module also includes: The product positioning component is disposed on the outer periphery of the transparent carrier plate and is used to position the TGV glass substrate placed on the transparent carrier plate so that the TGV glass substrate is in a reference position. And / or, a product fixing component, connected to the platform base, has a fixed state and an unlocked state that can be switched between each other. In the fixed state, the product fixing component holds and fixes the TGV glass substrate to the transparent carrier plate; in the unlocked state, the fixing of the TGV glass substrate is released.

12. The TGV through-hole defect detection device as described in any one of claims 1 to 9, characterized in that, The detection device also includes a device base, the device base comprising: Base; A support platform is used to set up the motion module and the platform module. The support platform is made of marble, and its maximum deformation under static stress conditions is no greater than 0.001mm, and its maximum deformation under dynamic motion conditions is no greater than 0.001mm. An air-floating vibration isolation pad is placed between the base and the support platform to ensure that the vibration level of the testing equipment meets the requirements of the VC-C vibration standard.

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