An x-ray absorption spectroscopy device

Abstract

The utility model relates to an X -ray absorption spectrum device, including detection mechanism, light source mechanism, bent crystal subassembly and motion mechanism, light source mechanism includes light source body, and light source body is not less than two, each light source body is along vertical arrangement, bent crystal subassembly includes with the spherical surface bent crystal body of the light source body number consistent, each spherical surface bent crystal body is in turn arranged along vertical, and every light source body is used for with X -ray is shot to the central region of corresponding spherical surface bent crystal body, detection mechanism, light source mechanism and bent crystal subassembly are connected through motion mechanism, every light source body, corresponding spherical surface bent crystal body and detection mechanism constitute a Roland circle together, and the radius of all Roland circles is same, and several Roland circles intersect in the same intersection, and detection mechanism is located at the intersection point, the utility model discloses through the precise fine adjustment of each spherical surface bent crystal body and the angle of horizontal plane, can make the monochromatic X -ray beam that forms through each spherical surface bent crystal body primary bragg diffraction accurate convergence in the same detector detection point.

Description

Technical Field

[0001] This utility model relates to the field of synchrotron radiation technology, specifically to an X-ray absorption spectroscopy device. Background Technology

[0002] In recent years, laboratory-grade X-ray absorption spectrometers based on ordinary X-ray sources have gradually achieved technological breakthroughs and entered the field of application. Currently, most laboratory X-ray absorption spectrometers use a Rowland circle monochromator as their core architecture. Their working principle is as follows: the light source, analytical crystal, and photon detector are precisely arranged on a Rowland circle trajectory. By driving these three components to move along the Rowland circle, the Bragg angle at which X-rays are incident on the analytical crystal is changed, thereby achieving photon energy scanning at the photon detector and ultimately completing the X-ray spectroscopic testing experiment.

[0003] However, this type of X-ray spectroscopy experimental device has significant technical limitations: its energy scanning range is entirely determined by the type and crystal indices of the analytical crystal, and a single scan can typically only cover the testing energy range of a single element; if different energy ranges need to be tested, multiple scans must be repeated, and the analytical crystal must be replaced and its position recalibrated before each scan, resulting in a significant reduction in testing efficiency. More importantly, this device cannot simultaneously capture the spectroscopic features of multiple related elements, making it difficult to meet the experimental requirements of multi-element synergistic analysis.

[0004] Application Publication Number: CN 116106339 A, Application Date: December 30, 2022, Invention Title: An X-ray Absorption Spectrometer. This invention provides an X-ray absorption spectrometer belonging to the field of materials testing technology. The X-ray absorption spectrometer of this invention includes: an X-ray source, a spectroscopic element, and a testing system. The X-ray source emits X-rays; the spectroscopic element is disposed in the exit path of the X-rays to reflect or diffract and focus the X-rays; the testing system includes a sample holder, a first detector, and a second detector; the sample holder holds the sample in the reflected or diffracted path of the X-rays; the first detector is used to detect the intensity of the X-rays before they penetrate the sample in the reflected or diffracted path; the second detector is used to detect the intensity of the X-rays after they penetrate the sample in the reflected or diffracted path. This X-ray absorption spectrometer of the present invention, when acquiring the absorption coefficient of a single X-ray energy point, can simultaneously collect the reference intensity and the test intensity before and after the X-rays penetrate the sample, thereby effectively improving the accuracy and efficiency of the test spectral data.

[0005] The aforementioned existing technologies can generally only cover the test energy range of a single element in a single scan; if different energy ranges need to be tested, multiple scans are required, and the analysis crystal needs to be replaced and readjusted before each scan. This not only results in low testing efficiency, but also makes it impossible to capture the spectroscopic features of multiple related elements simultaneously. Utility Model Content

[0006] In view of the shortcomings of the existing technology, such as only being able to test a single element, the purpose of this utility model is to provide an X-ray absorption spectroscopy device for simultaneous measurement of XAFS spectral lines of multiple elements.

[0007] The technical solution provided by this utility model is as follows:

[0008] An X-ray absorption spectroscopy device includes a detection mechanism and further includes:

[0009] A light source mechanism, comprising at least two light source bodies arranged vertically;

[0010] A curved crystal assembly includes spherical curved crystal bodies in the same number as the light source bodies. The spherical curved crystal bodies are arranged vertically in sequence, and each light source body is used to direct X-rays toward the central region of the corresponding spherical curved crystal body.

[0011] The motion mechanism connects the detection mechanism, the light source mechanism, and the bent crystal assembly.

[0012] Each of the light source bodies, the corresponding spherical curved crystal bodies, and the detection mechanism together constitute a Rowland circle. All Rowland circles have the same radius, and several Rowland circles intersect at the same intersection point. The detection mechanism (1) is located at this intersection point.

[0013] Furthermore, after averaging the aforementioned Rowland circles, an average Rowland circle is formed; the orthographic projections of the aforementioned Rowland circles onto the plane containing the average Rowland circle coincide with each other.

[0014] Furthermore, the light source mechanism also includes a displacement stage that is movably connected to several light source bodies;

[0015] The displacement stage is used to drive several light source bodies to move synchronously in the vertical direction, so that the X-rays emitted by the light source bodies can be aligned with the central reflection area of ​​the corresponding curved crystal body.

[0016] Furthermore, the displacement stage includes,

[0017] Guide rail, which is mounted on the support platform;

[0018] A sliding groove, which is slidably connected to the guide rail;

[0019] A slide table, on which several of the light source bodies are fixedly connected, and the back side of the slide table, which is relatively far from the light source body, is fixedly connected to the slide groove.

[0020] Furthermore, the light source mechanism also includes a displacement stage movably connected to each light source body;

[0021] Each of the displacement stages is used to drive the corresponding light source body to move vertically, so as to adjust the spacing of the light source bodies and enable the X-rays emitted by each light source body to be aligned with the central reflection area of ​​the corresponding curved crystal body.

[0022] Furthermore, the distance between the centers of two adjacent light source bodies is equal to the distance between the centers of two corresponding adjacent curved crystal bodies.

[0023] Furthermore, the angle between each of the said Rowland circles and the average Rowland circle is no greater than 10°.

[0024] Furthermore, the detection mechanism includes a detector and a sample section located in front of the detector.

[0025] Furthermore, the sample section includes a sample stage and / or an in-situ sample cell.

[0026] Furthermore, the motion mechanism includes a driving walking mechanism, which includes a first hinge point and a second hinge point. The first hinge point is located at the center of the virtual Roland circle, and the second hinge point is located at the circumference of the virtual Roland circle.

[0027] The virtual Rowland circle and the average Rowland circle are coaxially arranged and have the same radius. The plane containing the virtual Rowland circle is parallel to the plane containing the average Rowland circle.

[0028] Compared with the prior art, the technical solution provided by this utility model has the following advantages:

[0029] (1) In this invention, multiple light source bodies are arranged vertically and together with corresponding matching spherical curved crystal bodies form a vertical array. The multicolor X-ray beam emitted by each light source body is directed to the surface of the spherical curved crystal body that matches it; by precisely adjusting the angle between each spherical curved crystal body and the horizontal plane, the monochromatic X-ray beam formed by the first-order Bragg diffraction of each spherical curved crystal body can be accurately focused at the same detector detection point.

[0030] (2) This utility model provides multiple light source bodies. Taking dual light source as an example, compared with single light source design, dual light source can deliver twice the number of effective photons to the sample action area per unit time. The measurement signal-to-noise ratio of XAFS spectral lines is positively correlated with photon flux. The increase in photon flux can significantly increase the effective signal count captured by the detector, while suppressing the interference of background noise on the signal, and ultimately greatly improving the peak clarity and characteristic peak resolution of the spectral lines. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the overall structure of the X-ray absorption spectroscopy device in one embodiment of this application;

[0032] Figure 2 This is a schematic diagram of the light source mechanism structure in one embodiment of this application;

[0033] Figure 3 This is a schematic diagram of a Rowland circle in one embodiment of this application;

[0034] Figure 4 This is a schematic diagram of the displacement stage structure in one embodiment of this application;

[0035] Figure 5 This is a schematic diagram of the bent crystal assembly structure in one embodiment of this application;

[0036] Figure 6 This is a schematic diagram of the detection mechanism structure in one embodiment of this application;

[0037] Figure 7 This is a schematic diagram of the motion mechanism structure in one embodiment of this application.

[0038] Explanation of the labels in the diagram:

[0039] Detection mechanism 1; Detector 11; Sample section 12;

[0040] Light source body 21; displacement stage 22, guide rail 221, slide groove 222, slide table 223;

[0041] Spherical curved crystal body 31; back plate 32;

[0042] Motion mechanism 4; first hinge point 41, first short connecting rod 411, second short connecting rod 412; second hinge point 42, first long connecting rod 421, second long connecting rod 422; sliding groove 43. Detailed Implementation

[0043] To further understand the content of this utility model, a detailed description of this utility model will be provided in conjunction with the accompanying drawings and embodiments.

[0044] The structures, proportions, and sizes illustrated in the accompanying drawings are merely for illustrative purposes and to aid those skilled in the art in understanding and reading the invention. They are not intended to limit the scope of the invention and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, without affecting the effectiveness and purpose of the invention, should still fall within the scope of the technical content disclosed in this utility model. Furthermore, terms such as "upper," "lower," "left," "right," and "middle" used in this specification are merely for clarity and not intended to limit the scope of implementation. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of the invention's implementation.

[0045] X-ray absorption spectroscopy setup is a core experimental device used to analyze the atomic / electronic structure, chemical environment, and local coordination information of matter. The core principle is to utilize the interaction between X-rays and the inner-shell electrons of atoms in matter. When the X-ray energy is exactly equal to the energy difference of an electron transitioning from an inner shell (such as the K or L shell) to an empty orbit or free state, significant absorption occurs. By detecting the change in absorption intensity with X-ray energy, information about the microstructure of the matter can be obtained.

[0046] XAFS (X-ray Absorption Fine Structure) spectral lines refer to the curves showing the absorption coefficient of a substance to be analyzed as the energy of the incident X-rays changes, exhibiting an initial abrupt change followed by fluctuations.

[0047] The X-ray absorption spectroscopy device disclosed in this application mainly consists of a detection mechanism 1, a light source mechanism, a bent crystal assembly, and a motion mechanism 4. The mechanisms work together to realize the emission, conduction, sample interaction, and signal detection of X-rays.

[0048] Among them, the light source mechanism is the core of the X-ray emission of the device, and its structural design directly affects the X-ray output efficiency. Specifically, it includes at least two light source bodies 21, all of which are arranged vertically to ensure that the X-rays emitted by each light source can be accurately matched with the bent crystal assembly in the subsequent transmission path, thus avoiding mutual interference of X-rays.

[0049] Each light source body 21 has an independent X-ray generation and control function. Its emission direction is precisely calibrated so that the generated X-ray beam can be accurately directed along a preset optical path to the central region of the corresponding spherical curved crystal body 31 in the curved crystal assembly, providing a stable and directional incident source for subsequent X-ray focusing and monochromatic processing.

[0050] This application employs a configuration of multiple light source bodies 21, which can achieve a superimposed doubling of the X-ray photon flux incident on the sample section 12 by deploying two independent X-ray sources at the light source end to work synchronously.

[0051] Taking dual light sources as an example, compared with the single light source design, dual light sources can deliver twice the number of effective photons to the sample action area per unit time. The signal-to-noise ratio of XAFS spectral lines is positively correlated with photon flux. The increase in photon flux can significantly increase the effective signal count captured by detector 11, while suppressing the interference of background noise on the signal. Ultimately, it greatly improves the peak clarity and characteristic peak resolution of the spectral lines, which is especially suitable for experimental scenarios with high signal-to-noise ratio requirements, such as low-concentration sample analysis and rapid dynamic process tracking. It effectively shortens the measurement time and improves data reliability.

[0052] The light source mechanism also includes a displacement stage 22 that is movably connected to the light source body 21. One of its optional configuration methods is: only one displacement stage 22 is set, and all light source bodies 21 are synchronously connected to the displacement stage 22. The core function of the displacement stage 22 is to drive all light source bodies 21 to move synchronously in the vertical direction, thereby ensuring that the X-rays emitted by each light source body 21 can be accurately aligned with the central reflection area of ​​the corresponding spherical curved crystal body 31.

[0053] More specifically, the displacement stage 22 is composed of a guide rail 221, a slide groove 222 and a slide table 223. The assembly relationship of each component is as follows: the guide rail 221 is fixedly installed on the support platform of the device; the slide groove 222 is slidably connected to the guide rail 221 and can slide stably along the extension direction of the guide rail 221.

[0054] The slide 223 forms two opposing surfaces along its own thickness direction, which are defined as the first surface and the second surface, respectively. The second surface is positioned facing the support platform and guide rail 221 of the device (i.e., it is in a state of being opposite to the support platform and guide rail 221).

[0055] Several light source bodies 21 are fixed to the first surface of the slide table 223 by fastening structures such as bolts and buckles, ensuring that the light source bodies 21 move synchronously with the slide table 223; the slide groove 222 is fixed to the second surface of the slide table 223, so that the slide table 223 can drive all the light source bodies 21 to achieve stable vertical displacement adjustment through the sliding cooperation between the slide groove 222 and the guide rail 221.

[0056] Another optional configuration of the displacement stage 22 is to be movably connected to a light source body 21. The number of displacement stages 22 is consistent with the format of the light source body 21. Each displacement stage 22 is used to drive the corresponding light source body 21 to move in the vertical direction, so as to adjust the spacing of several light source bodies 21, so that the X-rays emitted by each light source body 21 can be aligned with the central reflection area of ​​the corresponding curved crystal body.

[0057] The curved crystal assembly structure is strictly matched with the light source mechanism, including spherical curved crystal bodies 31 in number identical to the light source body 21. All spherical curved crystal bodies 31 are also arranged vertically, and the central region of each spherical curved crystal body 31 is aligned with the ray emission direction of the corresponding light source body 21.

[0058] Preferably, the spacing between adjacent spherical curved crystal bodies 31 is kept consistent to ensure that the X-rays emitted by each light source body 21 can enter the effective working area of ​​the corresponding spherical curved crystal body 31 synchronously. Through the focusing and monochromatic processing of the spherical curved crystal, multiple incident X-rays are converted into parallel beams with uniform energy and uniform direction, and then coordinatingly transmitted to the sample section 12, providing a high-quality X-ray source for subsequent sample processing and signal detection.

[0059] The distance between the centers of two adjacent light source bodies 21 is equal to the distance between the centers of two adjacent spherical curved crystal bodies 31 along the vertical arrangement direction. It is worth noting that the optical system design of the device follows the Rowland circle principle: each light source body 21, its corresponding spherical curved crystal body 31, and the detector 11 together constitute an independent Rowland circle; all such Rowland circles have the same design radius, and several Rowland circles intersect at the same fixed intersection point. The detection mechanism 1 is located at this intersection point to ensure that the X-rays transmitted by each light source-curved crystal combination can accurately act on the same position of the sample.

[0060] Furthermore, by taking a weighted average of the geometric parameters of all independent Rowland circles, an average Rowland circle can be obtained; the orthographic projections of all Rowland circles onto the plane containing the average Rowland circle completely coincide, and the common intersection point of all the aforementioned Rowland circles falls on the circumference of the average Rowland circle.

[0061] The detection mechanism 1 includes a detector 11 and a sample section 12 disposed in front of the detector 11. It should be noted that the orientation of "in front" here is defined based on the propagation path of X-rays, meaning that the sample section 12 is located closer to the bent crystal assembly than the detector 11. That is, the X-rays transmitted by the bent crystal assembly will first act on the sample section 12, and then the detector 11 will receive the X-ray signal after penetration or scattering.

[0062] Furthermore, the sample section 12 serves as the carrier for the interaction between X-rays and the analyte, and its structural design needs to be adapted to different experimental requirements, specifically including two core forms: a sample stage and / or an in-situ sample cell.

[0063] The sample stage is mainly used to support solid samples (such as block, powder, and thin film samples). It is usually made of highly stable metal or ceramic materials and has horizontal displacement adjustment and angle fine adjustment functions. It can achieve precise positioning of the sample in the X-ray action area through the linkage of motion mechanism 4. It is suitable for static sample analysis that needs to be carried out in a specific temperature or low oxygen environment, such as valence state analysis of metal materials and crystal structure characterization of catalysts.

[0064] The in-situ sample cell is designed for liquid samples, volatile samples, or samples requiring dynamic reaction conditions. It can control the reaction environment of the sample in real time and is suitable for in-situ tracking of chemical reaction processes (such as ion migration in battery electrolytes and structural changes in biomolecules) and dynamic analysis of elemental valence states in liquid samples. It can capture the X-ray absorption characteristics of samples under real reaction conditions, providing key data support for dynamic process research.

[0065] The detection mechanism 1, the light source mechanism, and the bent crystal assembly are connected by the motion mechanism 4, which includes a drive walking mechanism, a short link assembly, and a long link assembly.

[0066] The drive mechanism is equipped with a first hinge point 41 and a second hinge point 42. The first hinge point is located at the center of the virtual Rowland circle, and the second hinge point is located on the circumference of the virtual Rowland circle. It is worth noting that the virtual Rowland circle referred to here is located directly below the average Rowland circle. The two are not only coaxially arranged, but also have the same radius. Furthermore, the planes in which the virtual Rowland circle and the average Rowland circle are located are parallel to each other.

[0067] The driving mechanism comprises a motor, a lead screw slide, and a walking mechanism, wherein the walking mechanism can move linearly along the guide rail of the lead screw slide; the first hinge point 41 and the second hinge point 42 are specifically located on the upper surface of the walking mechanism.

[0068] Its movement principle is as follows: The motor outputs rotational motion as a power source, and transmits the power to the lead screw of the lead screw slide through the coupling (or gear transmission assembly), so that the lead screw generates rotational motion, which drives the walking mechanism to move linearly along the lead screw slide, thereby realizing the smooth movement of the walking mechanism.

[0069] It should be noted that the above-described combination of motor and lead screw slide is merely an exemplary configuration for achieving smooth linear motion of the traveling mechanism and is not intended to limit the scope of protection of this application. Any structural form capable of driving the traveling mechanism to achieve smooth linear motion (such as synchronous belt drive mechanisms, gear and rack drive mechanisms, direct linear motor drive, etc.) falls within the scope of protection of this application.

[0070] The bent crystal assembly includes a back plate 32, and the spherical bent crystal body 31 is fixed to the drive walking mechanism through the back plate 32. The center of the spherical bent crystal body 31 is located at a set position above the second hinge point 42, so that when the walking mechanism moves in a straight line, the spherical bent crystal body 31 can move on the corresponding Roland circles.

[0071] The short link assembly includes two short links 411 and 412 of equal length. The connection between the two is as follows: one end of the first short link 411 is hinged to the first hinge point 41, and the other end is hinged to the light source mechanism; one end of the second short link 412 is also hinged to the first hinge point 41, and the other end is hinged to the detection mechanism 1.

[0072] The motion mechanism 4 also includes a sliding groove 43, to which both the light source mechanism and the detection mechanism 1 are slidably connected. Based on the above structure, when the first short link 411 and the second short link 412 are linked by the walking drive mechanism, the light source mechanism and the detection mechanism 1 will move relative to each other synchronously along the length direction of the sliding groove 43, either approaching or moving away from each other. At the same time, since the two short links are of equal length and both are fixed at the first hinge point 41 (the center of the virtual Rowland circle), they will also drive the light source mechanism and the detection mechanism 1 to always move on their respective Rowland circles.

[0073] The long link assembly has two long links, a first long link 421 and a second long link 422, whose lengths can change as the walking mechanism moves. One end of the first long link 421 is hinged to the second hinge point 42, and the other end is hinged to the light source mechanism. One end of the second long link 422 is hinged to the second hinge point 42, and the other end is hinged to the detection mechanism 1.

[0074] The long link assembly plays a cooperative constraint role in the overall motion system: on the one hand, since the second hinge point 42 is located on the circumference of the virtual Rowland circle, and the first long link 421 and the second long link 422 are respectively connected to the second hinge point 42 and the light source mechanism and the detection mechanism 1, the adaptive adjustment of its length can cooperate with the movement of the walking mechanism and dynamically compensate for the positional deviation caused by the guide of the short link assembly and the sliding groove 43; on the other hand, when the short link assembly drives the light source mechanism and the detection mechanism 1 to move closer or further away along the sliding groove 43, the long link assembly can further constrain the motion trajectory of the two mechanisms through the fixed hinge relationship with the second hinge point 42, ensuring that the two always accurately fit their respective Rowland circles while moving along the sliding groove 43, thereby maintaining the relative positional accuracy between the light source mechanism, the detection mechanism 1 and the bent crystal assembly, and ensuring the stability and trajectory accuracy of the overall motion of the system.

[0075] This invention proposes a multi-Loran circle X-ray optical configuration, the core feature of which is that multiple Loran circles achieve spatial convergence with the detector point as a common intersection. In this configuration, multiple light source bodies 21 and corresponding spherical curved crystal bodies 31 are arranged in a vertical array. The multicolor X-ray beam emitted by each X-ray source is directed to the surface of the matching spherical curved crystal body 31. By precisely adjusting the angle between each spherical curved crystal and the horizontal plane, the monochromatic X-ray beam formed by first-order Bragg diffraction of the spherical curved crystal is accurately converged to the same detector point.

[0076] The sample is fixedly positioned in the confocal optical path in front of the detector, ensuring that all monochromatic beams reflected from the spherical curved crystals pass through the same detection point on the sample, thus guaranteeing the consistency of measurement conditions for each element. To achieve synchronous resolution of signals from multiple energy channels, the system employs a detector with photon energy resolution capabilities (such as a silicon drift detector array). This detector can accurately distinguish the characteristic monochromatic beam signals generated by different spherical curved crystals based on photon energy differences, and count the X-ray photons in the corresponding energy range for each measured element.

[0077] Because the spatial angle between adjacent Rowland circles in the Doroland circle configuration is designed to be a small angle (not exceeding 10°), the system can drive the relevant optical components through a set of precision scanning mechanisms to achieve approximately synchronous Bragg angle scanning on multiple Rowland circle trajectories. This design preserves the independence of each element measurement while simplifying the system structure through mechanical linkage, significantly improving the synchronous measurement efficiency of multi-element XAFS spectral lines, and is particularly suitable for rapid synchronous analysis of multiple components in complex samples.

[0078] The present invention and its embodiments have been described above illustratively. This description is not restrictive, and the figures shown are only one embodiment of the present invention; the actual structure is not limited thereto. Therefore, if those skilled in the art are inspired by this description and design similar structures and embodiments without departing from the inventive spirit of the present invention, such designs should fall within the protection scope of the present invention.

Claims

1. An X-ray absorption spectroscopy device, comprising a detection mechanism (1), characterized in that: It also includes, The light source mechanism includes a light source body (21), and there are at least two light source bodies (21), each of which is arranged vertically. The curved crystal assembly includes spherical curved crystal bodies (31) in the same number as the light source bodies (21), each of the spherical curved crystal bodies (31) is arranged vertically in sequence, and each of the light source bodies (21) is used to direct X-rays to the central region of the corresponding spherical curved crystal body (31). The motion mechanism (4) connects the detection mechanism (1), the light source mechanism, and the bent crystal assembly. Each of the light source bodies (21), the corresponding spherical curved crystal bodies (31), and the detection mechanism (1) together constitute a Rowland circle. All Rowland circles have the same radius, and several Rowland circles intersect at the same intersection point. The detection mechanism (1) is located at this intersection point.

2. The X-ray absorption spectroscopy device according to claim 1, characterized in that: The Roland circles are averaged to form an average Roland circle; the orthographic projections of the Roland circles onto the plane containing the average Roland circle coincide with each other.

3. The X-ray absorption spectroscopy device according to claim 1, characterized in that: The light source mechanism also includes a displacement stage (22) that is movably connected to a plurality of light source bodies (21); The displacement stage (22) is used to drive several light source bodies (21) to move synchronously in the vertical direction so that the X-rays emitted by the light source bodies (21) can be aligned with the central reflection area of ​​the corresponding curved crystal body (31).

4. An X-ray absorption spectroscopy device according to claim 3, characterized in that: The displacement stage (22) includes, Guide rail (221), the guide rail (221) is mounted on the support platform; A sliding groove (222) is slidably connected to a guide rail (221); The slide (223) is fixedly connected to several of the light source bodies (21), and the back side of the slide (223) that is relatively far away from the light source body (21) is fixedly connected to the slide groove (222).

5. An X-ray absorption spectroscopy device according to claim 1, characterized in that: The light source mechanism also includes a displacement stage (22) movably connected to each light source body (21); Each of the displacement stages (22) is used to drive the corresponding light source body (21) to move in the vertical direction to adjust the spacing of the light source bodies (21) so that the X-rays emitted by each light source body (21) can be aligned with the central reflection area of ​​the corresponding curved crystal body (31).

6. An X-ray absorption spectroscopy device according to claim 1, characterized in that: The distance between the centers of two adjacent light source bodies (21) is equal to the distance between the centers of the corresponding two adjacent curved crystal bodies (31).

7. An X-ray absorption spectroscopy device according to claim 2, characterized in that: The angle between each of the stated Rowland circles and the average Rowland circle is no greater than 10°.

8. An X-ray absorption spectroscopy device according to claim 1, characterized in that: The detection mechanism (1) includes a detector (11) and a sample section (12) located in front of the detector (11).

9. An X-ray absorption spectroscopy device according to claim 8, characterized in that: The sample section (12) includes a sample stage and / or an in-situ sample pool.

10. An X-ray absorption spectroscopy device according to claim 1, characterized in that: The motion mechanism (4) includes a driving walking mechanism, which includes a first hinge point (41) and a second hinge point (42). The first hinge point (41) is located at the center of the virtual Roland circle, and the second hinge point (42) is located at the circumference of the virtual Roland circle. The virtual Rowland circle and the average Rowland circle are coaxially arranged and have the same radius. The plane containing the virtual Rowland circle is parallel to the plane containing the average Rowland circle.

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