Semiconductor test probe fixing structure and semiconductor device

Abstract

The utility model provides a kind of semiconductor test probe fixing structure and semiconductor equipment, fixing structure includes fixed seat and locking assembly, the fixed seat is hollow cylinder, its inside forms the installation cavity for accommodating the mounting seat, the locking assembly includes first locking structure and second locking structure, the first locking structure locks the mounting seat along first direction, the second locking structure locks the mounting seat along second direction, the first direction is perpendicular with the second direction, the first locking structure of this semiconductor test probe fixing structure locks mounting seat along first direction, second locking structure locks mounting seat along second direction, fixing structure can provide reliable clamping force for test probe, ensure that probe remains stable in testing process, will not occur slackening or displacement, effectively guarantee the accuracy and reliability of semiconductor test data.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor testing technology, and more specifically, it relates to a semiconductor test probe fixing structure and semiconductor equipment. Background Technology

[0002] In semiconductor manufacturing, testing the electrical parameters of wafers is a crucial step in ensuring chip performance and yield. During this process, test probes need to form precise and stable electrical contacts with the tiny pads or circuit structures on the wafer. The probe holder, as the core component for fixing and connecting test probes, directly determines the accuracy, repeatability, and operational efficiency of the test data through the reliability and convenience of its fixing method.

[0003] Currently, traditional probe holders in the industry generally use a threaded crimping method for fixation. Specifically, the probe is usually fixed by tightening a screw in the X-axis direction (i.e., laterally). Although this fixing method is simple in structure, it has significant drawbacks in practical applications: insufficient probe fixation stability. Traditional threaded fixing only applies force in a single direction (X-axis), and the probe lacks effective constraint in the Y-axis direction perpendicular to it, posing a risk of loosening. In high-speed, high-precision automated measurement processes, even micron-level loosening or displacement of the probe can lead to unstable contact resistance, thereby introducing measurement errors and seriously affecting the accuracy and reliability of test data. Utility Model Content

[0004] This invention provides a semiconductor test probe fixing structure and a semiconductor device. The fixing structure of the test probe can improve the stability of probe fixing, thereby improving the accuracy and effectiveness of test data.

[0005] The technical solution adopted by this utility model to solve its technical problem is as follows: The first aspect of this utility model provides a semiconductor test probe fixing structure. The test probe includes a mounting base and a probe mounted on the mounting base. The fixing structure includes a fixing base and a locking assembly. The fixing base is a hollow cylindrical shape, and its interior forms a mounting cavity for accommodating the mounting base. The locking assembly includes a first locking structure and a second locking structure. The first locking structure locks the mounting base along a first direction, and the second locking structure locks the mounting base along a second direction. The first direction is perpendicular to the second direction.

[0006] Preferably, the first locking structure includes a bolt or screw, and the fixing seat is provided with a first mounting hole. The bolt or screw is installed in the mounting hole to lock the mounting seat along a first direction.

[0007] Preferably, the second locking structure includes a telescopic rod and a quick-release structure. One end of the telescopic rod is fixed to the base, and the other end of the telescopic rod is fixed to the mounting base of the test probe. The quick-release structure includes a quick-release handle, a mounting shaft, and a fixing screw. The mounting shaft is provided with a second mounting hole along the second direction. The fixing screw passes through the second mounting hole to fix the quick-release handle to the telescopic rod. The quick-release handle has a pressed state and a lifted state. When the quick-release handle is in the pressed state, the quick-release handle abuts against the mounting base along the second direction.

[0008] Preferably, the quick-release structure further includes a support base located below the mounting shaft for frictional contact with the quick-release handle.

[0009] Preferably, a bushing is provided on the outer side of the support base.

[0010] Preferably, both the mounting shaft and the quick-release handle are metal parts.

[0011] Preferably, the telescopic rod includes a first rod and a second rod, the second rod being a hollow structure, the mounting base being fixed to the first end of the first rod, the second end of the first rod being sleeved inside the second rod, the first rod and the second rod being slidably connected, the second rod being provided with a positioning hole, and the first rod being provided with a ball bearing; when the ball bearing is located in the positioning hole, the first rod is in an extended state, and the mounting base is located outside the mounting cavity.

[0012] Preferably, the inner wall of the mounting cavity has a plurality of protruding ribs that extend axially toward the mounting cavity.

[0013] A second aspect of this invention provides a semiconductor device, including a semiconductor test probe and a fixing structure, wherein the fixing structure is the semiconductor test probe fixing structure described above.

[0014] The semiconductor test probe fixing structure provided by this utility model includes a fixing base and a locking assembly. The fixing base is a hollow cylindrical shape with an internal mounting cavity for accommodating the mounting base. The locking assembly includes a first locking structure and a second locking structure. The first locking structure locks the mounting base along a first direction, and the second locking structure locks the mounting base along a second direction. The first direction is perpendicular to the second direction. The fixing structure provides a reliable clamping force for the probe, ensuring that the probe remains stable during testing and does not loosen or shift, effectively guaranteeing the accuracy and reliability of semiconductor test data. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 A schematic diagram of the semiconductor test probe fixing structure provided in this embodiment of the utility model; Figure 2 A schematic diagram of the quick-release structure of the semiconductor test probe fixing structure provided in this embodiment of the utility model.

[0017] The following are the labeling elements in the figure: 10-Test probe; 11-Mounting base; 20-Fixing structure; 21-Fixing base; 211-Mounting cavity; 22-First locking structure; 23-Second locking structure; 231-Telescopic rod; 232-Quick release structure; 2321-Quick release handle; 2322-Mounting shaft; 2323-Fixing screw; 2324-Support base; 2325-Bushing; 2311-First rod; 2312-Second rod. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0019] In the description of this utility model, it should be understood that the terms "comprising" and "having" as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0020] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0021] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. It should be understood that the term "and / or" as used herein is merely a description of the relationship between related objects, indicating that three relationships may exist. For example, A and / or B can represent: A alone, A and B simultaneously, or B alone. In the description of this utility model, unless otherwise stated, "multiple" means two or more.

[0022] Currently, traditional probe holders in the industry generally use a threaded crimping method for fixation. Specifically, the probe is usually fixed by tightening a screw in the X-axis direction (i.e., laterally). Although this fixing method is simple in structure, it has significant drawbacks in practical applications: insufficient probe fixation stability. Traditional threaded fixing only applies force in a single direction (X-axis), and the probe lacks effective constraint in the perpendicular Y-axis direction, posing a risk of loosening. In high-speed, high-precision automated measurement processes, even micron-level loosening or displacement of the probe can lead to unstable contact resistance, thereby introducing measurement errors and seriously affecting the accuracy and reliability of test data. This application addresses these problems by providing a semiconductor test probe fixing structure and semiconductor equipment.

[0023] The semiconductor test probe fixing structure and semiconductor equipment provided by this utility model will be described in detail below with reference to specific embodiments.

[0024] Figure 1 This is a schematic diagram of the semiconductor test probe fixing structure provided in an embodiment of the present invention. Figure 2 Please refer to the structural diagram of the quick-release structure of the semiconductor test probe fixing structure provided in the embodiment of this utility model. Figure 1 , Figure 2A first aspect of this utility model provides a semiconductor test probe fixing structure. The test probe 10 includes a mounting base 11 and a probe (not shown in the figure) mounted on the mounting base 11. The fixing structure 20 includes a fixing base 21 and a locking assembly. The fixing base 21 is a hollow cylindrical shape, and its interior forms a mounting cavity 211 for accommodating the mounting base. The locking assembly includes a first locking structure 22 and a second locking structure 23. The first locking structure 22 locks the mounting base along a first direction, and the second locking structure 23 locks the mounting base 11 along a second direction. The first direction is perpendicular to the second direction.

[0025] This embodiment features a semiconductor test probe fixing structure, used to stably fix the test probe 10 during semiconductor testing, ensuring test accuracy. The test probe 10 typically includes a mounting base 11 and a probe mounted on the front end of the mounting base 11.

[0026] The fixing structure 20 in this embodiment is typically made of rigid materials such as stainless steel or aluminum alloy, and can be stably installed on the workbench of the testing equipment. The fixing base 21 in this embodiment is preferably a hollow cylindrical shape, with an internal mounting cavity 211 for accommodating the mounting base 11 of the test probe 10. The shape of the mounting cavity 211 is adapted to the outer shape of the mounting base 11, serving to initially position and support the mounting base 11.

[0027] The locking component in this embodiment includes a first locking structure 22 and a second locking structure 23. The first locking structure 22 is used for locking along a first direction (e.g., Figure 1 The second locking structure 23 is used to lock the mounting base 11 in the horizontal direction (radial direction). The second locking structure 23 is used to lock the mounting base 11 along the second direction (e.g., radial direction). Figure 1 The mounting base 11 is locked in the vertical direction (axial direction). The first direction and the second direction are perpendicular to each other. The locking force in these two vertical directions forms a solid spatial lock, which can effectively prevent the probe 10 from loosening or displacing in any direction.

[0028] The fixing structure 20 provided in this embodiment, by setting a first locking structure 22 and a second locking structure 23 that are perpendicular to each other, can simultaneously apply clamping force to the mounting base of the test probe 10 from two dimensions (radial and axial). This design overcomes the shortcomings of traditional single locking methods and provides extremely reliable fixation for the probe. During high-speed or long-term testing, the probe 10 can always maintain a stable position and contact posture, fundamentally avoiding test signal drift or poor contact caused by loosening of the probe 10, thereby greatly ensuring the accuracy and reliability of semiconductor test data. The semiconductor test probe fixing structure provided in this embodiment includes a fixing base and a locking assembly. The fixing base is a hollow cylindrical shape with an internal mounting cavity for accommodating the mounting base. The locking assembly includes a first locking structure and a second locking structure. The first locking structure locks the mounting base along a first direction, and the second locking structure locks the mounting base along a second direction. The first direction is perpendicular to the second direction. The fixing structure provides a reliable clamping force for the probe, ensuring that the test probe remains stable during testing and does not loosen or shift, effectively guaranteeing the accuracy and reliability of semiconductor test data.

[0029] Please see Figure 1 , Figure 2 In one specific embodiment, the first locking structure 22 includes a bolt or screw, and the fixing seat 21 is provided with a first mounting hole. The bolt or screw is installed in the mounting hole to lock the mounting seat 11 in a first direction. In this embodiment, the first locking structure 22 may include a bolt or screw, and correspondingly, a first mounting hole is provided on the side wall of the fixing seat 21. The bolt or screw is installed in the first mounting hole. When the bolt or screw is tightened, its end will directly abut against the mounting seat 11 placed in the mounting cavity 211 in the first direction (radial), thereby achieving a radial and firm locking. This structure is simple, reliable, and easy to adjust.

[0030] Further, the second locking structure 23 includes a telescopic rod 231 and a quick-release structure 232. One end of the telescopic rod 231 is fixed to the fixed base 21, and the other end of the telescopic rod 231 is fixed to the mounting base 11 of the test probe. The quick-release structure 232 includes a quick-release handle 2321, a mounting shaft 2322, and a fixing screw 2323. The mounting shaft 2322 is provided with a second mounting hole along the second direction. The fixing screw 2323 passes through the second mounting hole to fix the quick-release handle 2321 to the telescopic rod 231. The quick-release handle 2321 has a pressed state and a lifted state. When the quick-release handle 2321 is in the pressed state, the quick-release handle 2321 abuts against the mounting base 11 along the second direction.

[0031] For example, one end of the telescopic rod 231 is fixed to the fixed base 21 by means of threads or welding. The other end of the telescopic rod 231 is fixedly connected to the mounting base 11 of the test probe 10. The function of the telescopic rod 231 is to allow the test probe 10 and its mounting base 11 to be pulled out or pushed back into the mounting cavity 211 in the axial direction, which facilitates the replacement or initial positioning of the probe.

[0032] The quick-release structure 232 of this embodiment includes a quick-release handle 2321, a mounting shaft 2322, and a fixing screw 2323. The mounting shaft 2322 is laterally fixed to the top end of the telescopic rod 231. A second mounting hole extending along the second direction (axial direction) is provided on the mounting shaft 2322. The fixing screw 2323 passes through the second mounting hole, rotatably (or pivotally) mounting the quick-release handle 2321 on the mounting shaft 2322. In this embodiment, the quick-release handle 2321 is mounted on the telescopic rod 231. The quick-release handle 2321 of this embodiment is designed to have two working states: a pressed state and a lifted state. When the quick-release handle 2321 is pressed down to the pressed state, it acts as a lever, and its end acts as a force application point, forcefully pressing or pushing against the mounting seat 11 along the second direction (axial direction), thereby axially locking the mounting seat 11 within the mounting cavity 211. When the probe needs to be replaced, simply lift the quick-release handle 2321 to release the axial lock, and then pull out the entire probe assembly via the telescopic rod 231.

[0033] Preferably, such as Figure 2 As shown, the quick-release structure 232 also includes a support base 2324. The support base 2324 is located below the mounting shaft 2322 and is used to generate frictional contact when the quick-release handle 2321 is in the pressed state. This design can provide additional damping and locking stability, preventing the quick-release handle 2321 from accidentally popping open due to vibration.

[0034] Furthermore, in order to reduce wear and ensure smooth operation, a bushing 2325 is provided on the outer side of the support base 2324 that contacts the quick-release handle 2321 in this embodiment.

[0035] In order to ensure structural strength and durability, both the mounting shaft 2322 and the quick-release handle 2321 in this embodiment can be made of metal, such as heat-treated high-carbon steel or stainless steel.

[0036] In one specific embodiment, please refer to Figure 1 , Figure 2The telescopic rod 231 includes a first rod 2311 and a second rod 2312. In this embodiment, the second rod 2312 is a hollow tubular structure. The mounting base 11 described in this embodiment is fixed to the first end (front end) of the first rod 2311, and the second end (rear end) of the first rod 2312 is sleeved in the cavity of the second rod 2312, so that the first rod 2311 and the second rod 2312 can slide relative to each other along the axial direction. In order to achieve telescopic positioning, one or more positioning holes are provided on the tube wall of the second rod 2312. At the same time, a positioning mechanism consisting of a spring and a ball is provided on the first rod 2311. When the probe needs to be pulled out for maintenance, the first rod 2311 is pulled outward. When the ball on it is inserted into the positioning hole of the second rod 2312 under the action of the spring, the first rod 2311 is locked in the extended state. At this time, the entire mounting base 11 is completely located outside the mounting cavity 211, with a large operating space, which facilitates the disassembly and assembly of the probe.

[0037] In one specific embodiment, the inner wall of the mounting cavity 211 has multiple protruding ribs extending towards the center, and these ribs extend axially toward the mounting cavity 211. This embodiment optimizes the mounting cavity 211 by machining multiple protruding ribs on its inner wall, which extend axially along the mounting cavity. In this embodiment, the protruding ribs form line contact or small-area contact with the outer wall of the mounting base 11, increasing the pressure per unit area and making the radial locking of the first locking structure 22 more effective. The rib design reduces the total contact area between the mounting base 11 and the inner wall of the mounting cavity 211, thereby reducing the risk of the mounting base not being fully installed due to machining errors or impurities, and improving the fault tolerance and assembly smoothness.

[0038] The semiconductor test probe fixing structure provided in this embodiment includes a fixing base and a locking assembly. The fixing base is a hollow cylindrical shape with an internal mounting cavity for accommodating the mounting base. The locking assembly includes a first locking structure and a second locking structure. The first locking structure locks the mounting base along a first direction, and the second locking structure locks the mounting base along a second direction. The first direction is perpendicular to the second direction. The fixing structure provides a reliable clamping force for the probe, ensuring that the probe remains stable during testing and does not loosen or shift, effectively guaranteeing the accuracy and reliability of semiconductor test data.

[0039] A second aspect of this embodiment provides a semiconductor device, including a semiconductor test probe and a fixing structure, wherein the fixing structure is the semiconductor test probe fixing structure described in the above embodiment.

[0040] For example, a semiconductor test probe fixing structure includes a base, on which a fixing seat and a locking assembly are provided. The fixing seat is a hollow cylindrical shape, and its interior forms a mounting cavity for accommodating the mounting seat. The locking assembly includes a first locking structure and a second locking structure. The first locking structure locks the mounting seat along a first direction, and the second locking structure locks the mounting seat along a second direction. The first direction is perpendicular to the second direction.

[0041] The semiconductor device of this embodiment includes a semiconductor test probe and a semiconductor test probe holder. The semiconductor test probe holder structure includes a holder and a locking assembly. The holder is a hollow cylinder with an internal mounting cavity for accommodating the holder. The locking assembly includes a first locking structure and a second locking structure. The first locking structure locks the holder along a first direction, and the second locking structure locks the holder along a second direction. The first direction is perpendicular to the second direction. The semiconductor test probe holder structure provides a reliable clamping force for the probe, ensuring that the probe remains stable during testing and does not loosen or shift, effectively guaranteeing the accuracy and reliability of the semiconductor test data.

[0042] In the above description, the terms "an embodiment," "some embodiments," "example," "specific example," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0043] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A semiconductor test probe fixing structure, the test probe comprising a mounting base and a probe mounted on the mounting base, characterized in that: The fixing structure includes a fixing seat and a locking assembly. The fixing seat is a hollow cylindrical shape with an internal mounting cavity for accommodating the mounting seat. The locking assembly includes a first locking structure and a second locking structure. The first locking structure locks the mounting seat along a first direction, and the second locking structure locks the mounting seat along a second direction. The first direction is perpendicular to the second direction.

2. The semiconductor test probe fixing structure according to claim 1, characterized in that: The first locking structure includes a bolt or screw, and the fixing seat is provided with a first mounting hole. The bolt or screw is installed in the mounting hole to lock the mounting seat in a first direction.

3. The semiconductor test probe fixing structure according to claim 2, characterized in that: The second locking structure includes a telescopic rod and a quick-release structure. One end of the telescopic rod is fixed to the fixed base, and the other end of the telescopic rod is fixed to the mounting base of the test probe. The quick-release structure includes a quick-release handle, a mounting shaft, and a fixing screw. The mounting shaft is provided with a second mounting hole along the second direction. The fixing screw passes through the second mounting hole to fix the quick-release handle to the telescopic rod. The quick-release handle has a pressed state and a lifted state. When the quick-release handle is in the pressed state, the quick-release handle abuts against the mounting base along the second direction.

4. The semiconductor test probe fixing structure according to claim 3, characterized in that: The quick-release structure also includes a support base located below the mounting shaft for frictional contact with the quick-release handle.

5. The semiconductor test probe fixing structure according to claim 4, characterized in that: A bushing is provided on the outer side of the support base.

6. The semiconductor test probe fixing structure according to claim 3, characterized in that: Both the mounting shaft and the quick-release handle are metal parts.

7. The semiconductor test probe fixing structure according to claim 3, characterized in that: The telescopic rod includes a first rod and a second rod. The second rod has a hollow structure. The mounting base is fixed to the first end of the first rod. The second end of the first rod is sleeved inside the second rod. The first rod and the second rod are slidably connected. The second rod is provided with a positioning hole. The first rod is provided with a ball. When the ball is located in the positioning hole, the first rod is in the extended state. The mounting base is located outside the mounting cavity.

8. The semiconductor test probe fixing structure according to any one of claims 1-7, characterized in that: The inner wall of the mounting cavity has multiple protruding ribs that extend axially toward the mounting cavity.

9. A semiconductor device, characterized in that: It includes a semiconductor test probe and a fixing structure, wherein the fixing structure is the semiconductor test probe fixing structure according to any one of claims 1-8.

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