Multi-angle probe base with precise adjustment

Abstract

The utility model provides a kind of multi-angle probe seat of accurate adjustment, it is related to probe seat technical field, including magnetic suction base, the upper end of the magnetic suction base is provided with fine adjustment component, the output end of the fine adjustment component is provided with fixed seat, the fixed seat is provided with coarse adjustment component, the output end of the coarse adjustment component is provided with probe arm, the output end of the probe arm is provided with probe;The utility model has multi-shaft adjusting function, the accurate adjustment of probe in multiple directions is realized by fine adjustment component, ensure that test point positioning is accurate.Fine adjustment component is composed of X-axis displacement sliding table, Y-axis displacement sliding table, Z-axis displacement sliding table, arc sliding table and Z-axis rotating table, can be respectively realized X, Y and Z axis direction translation, turnover angle adjustment and around Z-axis rotation adjustment, each adjusting shaft cooperates, can carry out all-around fine adjustment to probe in three-dimensional space, satisfy high-precision test demand.

Description

Technical Field

[0001] This utility model mainly relates to the field of probe holder technology, specifically to a multi-angle probe holder that can be precisely adjusted. Background Technology

[0002] With the rapid development of semiconductor devices and integrated circuits, chip integration is constantly increasing, and the number of pins is increasing dramatically and their arrangement is becoming more dense. In the testing of electronic components, it is not only necessary to measure multiple functional pins of a single chip, but also often necessary to simultaneously perform probe measurements on multiple test points on both sides of the sample to obtain comprehensive electrical performance data. This places higher demands on the multi-channel testing capabilities, space utilization, and operational flexibility of the probe station.

[0003] Traditional probe stations typically only accommodate a limited number of probe holders and are mostly designed for single-sided testing, making simultaneous testing on both sides difficult. When multiple probes need to be combined for testing, the operating space is limited, probes are prone to interference, and the adjustment process is complex and time-consuming. Furthermore, existing probe stations have shortcomings in areas such as microscopic observation, probe angle adjustment, and rapid fixation, affecting testing efficiency and accuracy. These problems are even more pronounced in high-density, multi-parameter testing scenarios, urgently requiring a solution that enables flexible arrangement, precise adjustment, and rapid fixation of multiple probes within a limited space to meet the diverse testing needs of modern electronic components. Utility Model Content

[0004] 1. The technical problem to be solved by the utility model: This invention provides a precisely adjustable multi-angle probe holder to solve the technical problems existing in the background art.

[0005] 2. Technical Solution: To achieve the above objectives, the technical solution provided by this utility model is as follows: a multi-angle probe holder that can be precisely adjusted, including a magnetic base, a fine adjustment component is provided at the upper end of the magnetic base, a fixed base is provided at the output end of the fine adjustment component, a coarse adjustment component is provided on the fixed base, a probe arm is provided at the output end of the coarse adjustment component, and a probe is provided at the output end of the probe arm. The fine-tuning component includes an X-axis displacement slide table disposed on the upper end of the magnetic base, a Y-axis displacement slide table disposed on the output end of the X-axis displacement slide table, an arc-shaped slide table for adjusting the flip angle disposed on the output end of the Y-axis displacement slide table, a Z-axis rotary table disposed on the output end of the arc-shaped slide table, and the output end of the Z-axis rotary table being fixedly connected to the fixed base.

[0006] Preferably, a Z-axis displacement slide is further provided between the magnetic base and the X-axis displacement slide. The Z-axis displacement slide includes a base four fixed to the upper end of the magnetic base, a mounting block fixedly installed on the base four, a mounting seat four fixedly installed on one side of the mounting block, a triangular block rotatably installed in the cavity of the mounting block, an adjusting screw four threadedly installed in the mounting seat four, a lifting slide parallel to the top of the base four, a push rod and a connecting block fixedly installed at the lower end of the lifting slide, the longitudinal section of the triangular block being a right triangle, one right-angled side contacting the end of the adjusting screw four, and the other right-angled side contacting the push rod, a guide rail two vertically fixedly installed on the base four, and the connecting block slidingly installed on the guide rail two.

[0007] Preferably, the probe arm includes a fixed arm and a movable arm. One end of the fixed arm is fixedly connected to the output end of the coarse adjustment component, and the other end of the fixed arm has a mounting groove. The movable arm has a connecting protrusion at the end near the mounting groove. The connecting protrusion and the mounting groove are rotatably connected by a locking screw. One end of the locking screw extends out of the outside of the mounting groove, and the extended end is threaded with a nut for locking the relative position of the connecting protrusion and the fixed arm. The end of the movable arm away from the fixed arm is fixedly connected to the probe.

[0008] Preferably, the coarse adjustment component includes a U-shaped block, one end of which is fixedly connected to a fixed base. A transverse rod is slidably installed in the U-shaped groove of the U-shaped block. A fixed groove is provided on the transverse rod. The transverse rod is locked in relative position with the U-shaped block by the fixed groove and a locking screw. A locking screw is threaded onto the end of the U-shaped block away from the fixed base. A lifting rod is slidably mounted on the end of the transverse rod away from the U-shaped block. A fixed groove is provided on the lifting rod. The lifting rod is locked in relative position with the transverse rod by the fixed groove and the locking screw. The lower end of the lifting rod is connected to the probe arm by an elbow clamp.

[0009] Preferably, the coarse adjustment component includes a fixing block, the lower end of which is fixedly connected to the upper surface of the fixing seat. The fixing block has a vertically opening lifting groove, and the side wall of the fixing block has a locking hole communicating with the lifting groove. The locking hole is connected to a locking screw four by a thread. A lifting block is slidably connected in the lifting groove. The lifting block has a vertically opening fixing groove three. The lifting block is locked in relative position with the fixing block through the fixing groove three, the locking hole, and the locking screw four. The upper end of the lifting block is connected to the probe arm through an elbow clamp.

[0010] Preferably, the X-axis displacement slide and the Y-axis displacement slide have the same structure, and their displacement directions are perpendicular to each other. The X-axis displacement slide includes a base, and a transverse slide is provided above the base. Two parallel guide rails are fixed on the upper surface of the base. The lower surface of the transverse slide slide slides in sliding engagement with the guide rails. A mounting seat is fixed at one end of the base. An adjusting screw is threaded through the mounting seat. A push block is fixed at one end of the transverse slide slide. The end of the adjusting screw abuts against the side wall of the push block.

[0011] Preferably, the arc-shaped slide includes a second base, an arc-shaped track is provided at the upper center of the arc-shaped surface, a flipping table is slidably connected on the arc-shaped track, the upper surface of the second base and the lower surface of the flipping table are provided with matching arc-shaped surfaces, an adjusting screw two is threaded through the second base, the adjusting screw two drives the flipping table to flip through the adjusting seat, a locking screw one is threaded through the side wall of the flipping table, one end of the locking screw one extends into the arc-shaped track and abuts against the side wall of the arc-shaped track.

[0012] Preferably, the Z-axis rotary table includes a base three, a rotating platform rotatably connected to the upper surface of the base three, a mounting seat two and a mounting seat three fixed on one side of the base three, a connecting rod fixed to the side wall of the rotating platform, an adjusting screw three threaded through the mounting seat two, one end of the adjusting screw three abutting against the side wall of the connecting rod, a spring adjusting screw threaded through the mounting seat three, a spring sleeved on the end of the spring adjusting screw near the connecting rod, one end of the spring adjusting screw being fixedly connected to the spring adjusting screw, and the other end abutting against the side wall of the connecting rod.

[0013] 3. Beneficial effects: Compared with the prior art, the technical solution provided by this utility model has the following advantages: This invention features multi-axis adjustment capabilities, enabling precise probe adjustment in multiple directions via a fine-tuning component to ensure accurate test point positioning. The fine-tuning component comprises an X-axis displacement slide, a Y-axis displacement slide, a Z-axis displacement slide, an arc-shaped slide, and a Z-axis rotary stage. These components allow for translation along the X, Y, and Z axes, adjustment of the flip angle, and rotation around the Z-axis. The coordinated adjustment axes enable omnidirectional fine-tuning of the probe in three-dimensional space, meeting high-precision testing requirements.

[0014] The probe arm of this invention adopts a multi-angle bending and steering structure design. The fixed arm and the movable arm are connected by a locking screw, allowing for flexible adjustment of the probe angle according to testing needs. Combined with a quick-locking elbow clamp mechanism, the position can be quickly locked after adjustment, ensuring both ease of operation and improved work efficiency.

[0015] This invention employs a dual adjustment method, combining coarse and fine adjustment to ensure both adjustment range and accuracy. The coarse adjustment component provides a wide range of rapid adjustments, quickly moving the probe to the vicinity of the target test point; the fine adjustment component achieves high-precision fine-tuning, ensuring accurate alignment between the probe and the test point. This tiered adjustment method significantly shortens positioning time and improves testing efficiency.

[0016] The probe holder of this invention is quickly fixed by a magnetic base and can be flexibly placed at any position on the test bench without drilling or other complicated installation steps. The magnetic fixing method ensures sufficient stability and allows for easy adjustment of the probe holder position according to testing needs, improving the flexibility and adaptability of the equipment.

[0017] Each adjustment component of this utility model is equipped with a locking mechanism, such as the adjusting screws of the X-axis displacement slide and the Y-axis displacement slide, the locking screw one of the arc slide, and the adjusting screw three of the Z-axis rotary table, to ensure the stability of the probe position during the test, avoid position displacement caused by external vibration or operation, and ensure the reliability of the test data.

[0018] This invention is highly adaptable and suitable for various scenarios requiring multi-probe, high-precision, and multi-angle testing. It is particularly suitable for dual-sided synchronous testing. The appropriate coarse adjustment component structure and whether to equip it with a Z-axis displacement slide can be selected according to specific testing requirements to achieve flexible and diverse testing configurations and meet the needs of different types of samples and testing projects. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the overall structure of this utility model from another angle; Figure 3 This is a schematic diagram of one embodiment of the present invention; Figure 4 This is a schematic diagram of another embodiment of the present invention; Figure 5 This is a schematic diagram of the X-axis displacement slide structure of this utility model; Figure 6 This is a schematic diagram of the external structure of the arc-shaped slide table of this utility model; Figure 7 This is a schematic diagram of the internal structure of the arc-shaped slide table of this utility model; Figure 8 This is a schematic diagram of the Z-axis rotary table structure of this utility model; Figure 9 This is a schematic diagram of the internal structure of the Z-axis rotary table of this utility model; Figure 10 This is a schematic diagram of the Z-axis displacement slide structure of this utility model; Figure 11 This is a schematic diagram of the internal structure of the Z-axis displacement slide of this utility model; Figure 12 This is a schematic diagram of one embodiment of the coarse adjustment component of this utility model; Figure 13 This is a schematic diagram of another embodiment of the coarse adjustment component of this utility model.

[0020] Figure label: 1. Magnetic base; 2. Fine-tuning assembly; 21. X-axis displacement slide; 211. Base 1; 212. Horizontal slide; 213. Guide rail 1; 214. Mounting base 1; 215. Adjusting screw 1; 216. Push block; 22. Y-axis displacement slide; 23. Arc-shaped slide; 231. Base 2; 232. Arc-shaped surface; 233. Arc-shaped track; 234. Tilting table; 235. Adjusting screw 2; 236. Adjusting seat; 237. Locking screw 1; 24. Z-axis rotary table; 241. Base 3; 242. Rotary platform; 243. Mounting base 2; 244. Mounting base 3; 245. Connecting rod; 246. Adjusting screw 3; 247. Spring adjustment screw; 248. Spring; 25. Z-axis displacement slide; 251 1. Base 4; 252. Mounting block; 253. Mounting seat 4; 254. Triangular block; 255. Adjusting screw 4; 256. Lifting slide; 257. Push rod; 258. Guide rail 2; 259. Connecting block; 3. Fixed seat; 4. Coarse adjustment assembly; 411. U-shaped block; 412. Horizontal movement rod; 413. Fixed groove 1; 414. Locking screw 2; 415. Lifting rod; 416. Fixed groove 2; 417. Locking screw 3; 421. Fixed block; 422. Lifting groove; 423. Locking hole; 424. Lifting block; 425. Fixed groove 3; 426. Locking screw 4; 5. Probe arm; 51. Fixed arm; 52. Mounting groove; 53. Movable arm; 54. Connecting protrusion; 55. Locking screw 5; 6. Probe. Detailed Implementation

[0021] To facilitate understanding of this utility model, a more comprehensive description of the utility model will be given below with reference to the accompanying drawings, which show several embodiments of the utility model. However, the utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of the utility model will be more thorough and complete.

[0022] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "page", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0023] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0024] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," "fixing," and "equipped with" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0025] It should be noted that the structures not described in this utility model are the same as or can be implemented using existing technology, and will not be elaborated here, as they do not involve the design points and improvement directions of this utility model. Example

[0026] See attached document Figures 1-13 A multi-angle probe holder that can be precisely adjusted includes a magnetic base 1, a fine adjustment component 2 is provided at the upper end of the magnetic base 1, a fixed base 3 is provided at the output end of the fine adjustment component 2, a coarse adjustment component 4 is provided on the fixed base 3, a probe arm 5 is provided at the output end of the coarse adjustment component 4, and a probe 6 is provided at the output end of the probe arm 5. The fine-tuning component 2 includes an X-axis displacement slide 21 mounted on the upper end of the magnetic base 1, a Y-axis displacement slide 22 mounted on the output end of the X-axis displacement slide 21, an arc-shaped slide 23 for adjusting the flip angle mounted on the output end of the Y-axis displacement slide 22, and a Z-axis rotary table 24 mounted on the output end of the arc-shaped slide 23. The output end of the Z-axis rotary table 24 is fixedly connected to the fixed base 3. The magnetic base 1 is placed in an appropriate position on the test stage and quickly fixed using magnetic force.

[0027] The probe arm 5 includes a fixed arm 51 and a movable arm 53. One end of the fixed arm 51 is fixedly connected to the output end of the coarse adjustment component 4, and the other end of the fixed arm 51 has a mounting groove 52. The movable arm 53 has a connecting protrusion 54 near the mounting groove 52. The connecting protrusion 54 and the mounting groove 52 are rotatably connected by a locking screw 55. One end of the locking screw 55 extends out of the mounting groove 52, and the extended end is threaded with a nut for locking the relative position of the connecting protrusion 54 and the fixed arm 51. The end of the movable arm 53 away from the fixed arm 51 is fixedly connected to the probe 6. The probe arm 5 is made of copper. Loosen the locking screw 55, adjust the relative angle between the fixed arm 51 and the movable arm 53 so that the probe 6 roughly points to the target test point, and then tighten the locking screw 55 to fix it.

[0028] The coarse adjustment component 4 includes a U-shaped block 411. One end of the U-shaped block 411 is fixedly connected to the fixed base 3. A transverse rod 412 is slidably installed in the U-shaped groove of the U-shaped block 411. A first fixed groove 413 is provided on the transverse rod 412. The transverse rod 412 is locked to its relative position with the U-shaped block 411 through the first fixed groove 413 and the second locking screw 414. A third locking screw 417 is provided on the end of the U-shaped block 411 away from the fixed base 3 through a thread. A lifting rod 415 is slidably sleeved on the end of the transverse rod 412 away from the U-shaped block 411. A second fixed groove 416 is provided on the lifting rod 415. The lifting rod 415 is locked to its relative position with the transverse rod 412 through the second fixed groove 416 and the third locking screw 417. The lower end of the lifting rod 415 is connected to the probe arm 5 through an elbow clamp. Adjust the position of the horizontal moving rod 412 within the U-shaped block 411 and fix it with locking screw 414; adjust the height of the lifting rod 415 and fix it with locking screw 417.

[0029] The X-axis displacement slide 21 and the Y-axis displacement slide 22 have the same structure, and their displacement directions are perpendicular to each other. The X-axis displacement slide 21 includes a base 211, and a transverse slide 212 is arranged above the base 211. Two parallel guide rails 213 are fixed on the upper surface of the base 211. The lower surface of the transverse slide 212 slides in cooperation with the guide rails 213. A mounting base 214 is fixed to one end of the base 211. An adjusting screw 215 is threaded through the mounting base 214. A push block 216 is fixed to one end of the transverse slide 212. The end of the adjusting screw 215 abuts against the side wall of the push block 216. Adjusting the X-axis displacement slide 21: Rotating the adjusting screw 215 pushes the push block 216, causing the transverse slide 212 to move along the guide rails 213, thus achieving fine adjustment in the X direction. Adjusting the Y-axis displacement slide 22: Fine adjustment in the Y direction is achieved in the same way as the X-axis displacement slide 21.

[0030] The arc-shaped slide 23 includes a base 231, an arc-shaped track 233 at the center of the upper end of the arc-shaped surface 232, and a tilting table 234 slidably connected to the arc-shaped track 233. The upper surface of the base 231 and the lower surface of the tilting table 234 have matching arc-shaped surfaces 232. An adjusting screw 235 is threaded through the base 231, and the adjusting screw 235 drives the tilting table 234 to tilt via an adjusting seat 236. A locking screw 237 is threaded through the side wall of the tilting table 234, with one end extending into the arc-shaped track 233 and abutting against its side wall. Rotating the adjusting screw 235 drives the tilting table 234 to slide along the arc-shaped track 233 via the adjusting seat 236, changing the tilting angle of the probe. After adjustment, the locking screw 237 is tightened to fix the tilting table.

[0031] The Z-axis rotary table 24 includes a base 241, with a rotary platform 242 rotatably connected to its upper surface. Mounting seats 243 and 244 are fixed to one side of the base 241. A connecting rod 245 is fixed to the side wall of the rotary platform 242. An adjusting screw 246 is threaded through the mounting seat 243, with one end abutting against the side wall of the connecting rod 245. A spring-loaded adjusting screw 247 is threaded through the mounting seat 244, with a spring 248 fitted onto the end of the spring-loaded adjusting screw 247 near the connecting rod 245. One end of the spring 248 is fixedly connected to the spring-loaded adjusting screw 247, and the other end abuts against the side wall of the connecting rod 245. Rotating the adjusting screw 246 pushes the connecting rod 245, causing the rotary platform 242 to rotate, thus achieving fine-tuning of the probe's rotation around the Z-axis. The spring 248 and the spring-loaded adjusting screw 247 provide a stable rebound force, ensuring smooth adjustment.

[0032] The difference between Embodiment 2 and Embodiment 1 is that a Z-axis displacement slide 25 is also provided between the magnetic base 1 and the X-axis displacement slide 21. Figure 4 , Figure 10 as well as Figure 11As shown, the Z-axis displacement slide 25 includes a base 251 fixed to the upper end of the magnetic base 1, a mounting block 252 fixedly mounted on the base 251, a mounting seat 253 fixedly mounted on one side of the mounting block 252, a triangular block 254 rotatably mounted in the cavity of the mounting block 252, an adjusting screw 255 threadedly mounted in the mounting seat 253, a lifting slide 256 parallelly arranged directly above the base 251, a push rod 257 and a connecting block 259 fixedly mounted at the lower end of the lifting slide 256, the longitudinal section of the triangular block 254 is a right triangle, one right-angled side of which contacts the end of the adjusting screw 255, and the other right-angled side contacts the push rod 257, a guide rail 258 is vertically fixedly mounted on the base 251, and the connecting block 259 is slidably mounted on the guide rail 258. Rotate the adjusting screw 255 to drive the triangular block 254 to rotate, which in turn drives the lifting slide 256 to move up and down along the guide rail 258 via the push rod 257, thus achieving fine adjustment of the height in the Z direction.

[0033] The difference between Example 3 and Examples 1 and 2 lies in the different structure of the coarse adjustment component 4, such as... Figure 13 As shown, the coarse adjustment component 4 includes a fixing block 421. The lower end of the fixing block 421 is fixedly connected to the upper surface of the fixing base 3. The fixing block 421 has a vertically oriented lifting groove 422. The side wall of the fixing block 421 has a locking hole 423 communicating with the lifting groove 422. The locking hole 423 is connected to the locking screw 426 by threads. A lifting block 424 is slidably connected in the lifting groove 422. The lifting block 424 has a vertically oriented fixing groove 425. The lifting block 424 is locked in relative position with the fixing block 421 by the fixing groove 425, the locking hole 423, and the locking screw 426. The upper end of the lifting block 424 is connected to the probe arm 5 by an elbow clamp. The height of the lifting block 424 in the fixing block 421 is adjusted and fixed by the locking screw 426.

[0034] like Figure 1 and Figure 2 As shown, different embodiments of this utility model can be freely combined and used according to testing needs, thereby forming flexible and diverse testing configurations. This combined use can give full play to the advantages of each embodiment, meet the needs of different test point positions, different test angles and different adjustment accuracies, realize efficient multi-probe testing of samples, and meet the needs of double-sided multi-probe testing.

[0035] The above-described embodiments are merely illustrative of certain implementations of this utility model, and their descriptions are relatively specific and detailed. However, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A multi-angle probe holder with precise adjustment, characterized in that: It includes a magnetic base (1), a fine adjustment component (2) is provided at the upper end of the magnetic base (1), a fixed seat (3) is provided at the output end of the fine adjustment component (2), a coarse adjustment component (4) is provided on the fixed seat (3), a probe arm (5) is provided at the output end of the coarse adjustment component (4), and a probe (6) is provided at the output end of the probe arm (5). The fine-tuning component (2) includes an X-axis displacement slide (21) disposed on the upper end of the magnetic base (1), a Y-axis displacement slide (22) disposed on the output end of the X-axis displacement slide (21), an arc-shaped slide (23) for adjusting the flip angle disposed on the output end of the Y-axis displacement slide (22), a Z-axis rotary table (24) disposed on the output end of the arc-shaped slide (23), and the output end of the Z-axis rotary table (24) is fixedly connected to the fixed base (3).

2. The precisely adjustable multi-angle probe holder according to claim 1, characterized in that: A Z-axis displacement slide (25) is also provided between the magnetic base (1) and the X-axis displacement slide (21). The Z-axis displacement slide (25) includes a base four (251) fixed to the upper end of the magnetic base (1). A mounting block (252) is fixedly installed on the base four (251). A mounting seat four (253) is fixedly installed on one side of the mounting block (252). A triangular block (254) is rotatably installed in the cavity of the mounting block (252). An adjusting screw four (255) is threadedly installed in the mounting seat four (253). A lifting slide (256) is arranged parallel to the top of the base four (251). A push rod (257) and a connecting block (259) are fixedly installed at the lower end of the lifting slide (256). The longitudinal section of the triangular block (254) is a right triangle. One right-angled side of the triangular block is in contact with the end of the adjusting screw four (255), and the other right-angled side is in contact with the push rod (257). A guide rail two (258) is vertically fixed on the base four (251), and the connecting block (259) is slidably installed on the guide rail two (258).

3. The precisely adjustable multi-angle probe holder according to claim 1, characterized in that: The probe arm (5) includes a fixed arm (51) and a movable arm (53). One end of the fixed arm (51) is fixedly connected to the output end of the coarse adjustment component (4). The other end of the fixed arm (51) is provided with a mounting groove (52). The movable arm (53) is provided with a connecting protrusion (54) at the end near the mounting groove (52). The connecting protrusion (54) and the mounting groove (52) are rotatably connected by a locking screw (55). One end of the locking screw (55) extends out of the outside of the mounting groove (52), and the extended end is threaded with a nut for locking the relative position of the connecting protrusion (54) and the fixed arm (51). The end of the movable arm (53) away from the fixed arm (51) is fixedly connected to the probe (6).

4. The precisely adjustable multi-angle probe holder according to claim 1, characterized in that: The coarse adjustment component (4) includes a U-shaped block (411), one end of which is fixedly connected to a fixed base (3). A transverse rod (412) is slidably installed in the U-shaped groove of the U-shaped block (411). A fixed groove (413) is provided on the transverse rod (412). The transverse rod (412) is locked to its relative position with the U-shaped block (411) by the fixed groove (413) and the locking screw (414). The U-shaped block (411) is away from the fixed base (3). 3) One end is provided with a locking screw three (417) by a thread. The end of the transverse rod (412) away from the U-shaped block (411) is fitted with a lifting rod (415) that slides up and down. The lifting rod (415) is provided with a fixing groove two (416). The lifting rod (415) is locked to the relative position with the transverse rod (412) by the fixing groove two (416) and the locking screw three (417). The lower end of the lifting rod (415) is connected to the probe arm (5) by an elbow clamp.

5. The precisely adjustable multi-angle probe holder according to claim 1, characterized in that: The coarse adjustment component (4) includes a fixing block (421), the lower end of which is fixedly connected to the upper surface of the fixing seat (3). The fixing block (421) has a vertical lifting groove (422), and the side wall of the fixing block (421) has a locking hole (423) communicating with the lifting groove (422). The locking hole (423) is connected to the locking screw (426) by a thread. A lifting block (424) is slidably connected in the lifting groove (422). The lifting block (424) has a vertical fixing groove (425), and the lifting block (424) is locked to the relative position with the fixing block (421) by the fixing groove (425), the locking hole (423) and the locking screw (426). The upper end of the lifting block (424) is connected to the probe arm (5) by an elbow clamp.

6. The precisely adjustable multi-angle probe holder according to claim 1, characterized in that: The X-axis displacement slide (21) and the Y-axis displacement slide (22) have the same structure and their displacement directions are perpendicular to each other. The X-axis displacement slide (21) includes a base (211), and a transverse slide (212) is provided above the base (211). Two parallel guide rails (213) are fixed on the upper surface of the base (211). The lower surface of the transverse slide (212) slides in cooperation with the guide rails (213). A mounting seat (214) is fixed at one end of the base (211). An adjusting screw (215) is threaded through the mounting seat (214). A push block (216) is fixed at one end of the transverse slide (212). The end of the adjusting screw (215) abuts against the side wall of the push block (216).

7. The precisely adjustable multi-angle probe holder according to claim 1, characterized in that: The arc-shaped slide (23) includes a base two (231), an arc-shaped track (233) is provided at the upper center of the arc-shaped surface (232), a flipping table (234) is slidably connected on the arc-shaped track (233), the upper surface of the base two (231) and the lower surface of the flipping table (234) are provided with matching arc-shaped surfaces (232), an adjusting screw two (235) is threaded through the base two (231), the adjusting screw two (235) drives the flipping table (234) to flip through the adjusting seat (236), a locking screw one (237) is threaded through the side wall of the flipping table (234), one end of the locking screw one (237) extends into the arc-shaped track (233) and abuts against the side wall of the arc-shaped track (233).

8. The precisely adjustable multi-angle probe holder according to claim 1, characterized in that: The Z-axis rotary table (24) includes a base three (241), a rotating platform (242) is rotatably connected to the upper surface of the base three (241), a mounting seat two (243) and a mounting seat three (244) are fixed on one side of the base three (241), a connecting rod (245) is fixed to the side wall of the rotating platform (242), an adjusting screw three (246) is threaded through the mounting seat two (243), one end of the adjusting screw three (246) abuts against the side wall of the connecting rod (245), a spring adjusting screw (247) is threaded through the mounting seat three (244), a spring (248) is sleeved on one end of the spring adjusting screw (247) near the connecting rod (245), one end of the spring (248) is fixedly connected to the spring adjusting screw (247), and the other end abuts against the side wall of the connecting rod (245).

Images