A high range current measurement display protection circuit for a titanium pump power supply

Abstract

The utility model discloses a kind of high-range current measurement display protection circuit for titanium pump power supply, the circuit adopts double-block position current sampling structure, through the switching of microampere file and milliammeter file, the continuous coverage of 0.1 μA to 99mA wide-range current is realized;Combining with the decimal place linkage adjustment of precision sampling resistance and voltmeter, high-precision display under different current ranges is realized.Circuit is integrated with overcurrent protection module simultaneously, can automatically match different voltage comparison threshold according to the range where it is, and suppresses transient interference through delay network, ensures that system is safe and stable operation.The utility model structure is simple, strong adaptability, widely applicable to the current detection and intelligent protection in the field such as ion pump driving system, vacuum control equipment, with good industrial practical value and popularization prospect.

Description

Technical Field

[0001] This utility model belongs to the field of voltage / current measurement technology, and in particular relates to a high-range current measurement display and protection circuit for titanium pump power supplies. Background Technology

[0002] In high vacuum systems, sputtering ion pumps are widely used in critical fields such as semiconductor manufacturing, scientific research equipment, vacuum coating, and nuclear fusion due to their oil-free, clean, and highly reliable characteristics. Titanium pumps, as the high-voltage power supply driving sputtering ion pumps, directly affect the maintenance and monitoring of the system's vacuum level. In practical applications, the current output by the titanium pump power supply is closely related to the vacuum state of the vacuum system; a higher current usually indicates a lower vacuum level. Therefore, accurately measuring and displaying this current parameter in real time is not only a guarantee of system safety but also a key basis for judging the vacuum state. However, due to the extremely wide range of current fluctuations caused by changes in vacuum state, from microamperes (<1μA) in high vacuum to tens of milliamperes (>50mA) in low vacuum, traditional current detection circuits or meter devices often struggle to cover such a large dynamic range. On the one hand, conventional measurement methods using fixed sampling resistors are prone to problems such as increased measurement errors or display distortion when faced with ultra-high or ultra-low currents. On the other hand, common voltmeters or modules on the market usually have a fixed decimal display range, which makes it difficult to balance high precision requirements with large range, further limiting their applicability in titanium pump power supply scenarios.

[0003] To address these issues, some existing technologies attempt to extend the current measurement range using external amplifiers or digital processing units. However, these solutions are often complex in structure, difficult to debug, and have limited adaptability to different operating conditions. Furthermore, in actual industrial settings, titanium pump power supplies frequently switch between maintenance and operation modes, placing higher demands on the circuit's protection capabilities. Existing protection circuits typically use fixed thresholds, making it difficult to adapt to the optimal protection point corresponding to different current levels. This leads to potential issues such as false triggering or protection lag, increasing the risk of system operation failures.

[0004] In summary, current titanium pump power supplies still suffer from technical bottlenecks in high-range current measurement and graded protection, including insufficient detection accuracy, inconvenient range switching, and a lack of flexibility in protection mechanisms. There is an urgent need for an integrated circuit solution that can cover a wide current range and flexibly adjust display accuracy and protection thresholds to meet the higher requirements of modern high-vacuum systems for measurement and control accuracy and operational safety. Utility Model Content

[0005] To solve the above-mentioned technical problems, this utility model provides a high-range current measurement, display, and protection circuit for titanium pump power supplies. Specifically, the technical solution provided by this utility model is as follows:

[0006] A high-range current measurement and display protection circuit for a titanium pump power supply includes a range switching module and a display output module connected to the Earth terminal of the titanium pump power supply current output. The range switching module includes a switch connected to the Earth terminal via a current-limiting resistor R40. The switch is used to switch between connecting a microampere range line and a milliampere range line. The milliampere range line is a grounding resistor R43, and the microampere range line includes a resistor R41 connected in series with the grounding resistor R43.

[0007] The display output module includes an operational amplifier U8A. The non-inverting input of the operational amplifier U8A is connected between the current-limiting resistor R40 and the switching switch through a resistor-capacitor network. The inverting input of the operational amplifier U8A is connected to the output of the operational amplifier U8A through a feedback resistor R42. The output is used to output a stable analog signal to drive the display of the measuring meter.

[0008] Furthermore, the RC network includes resistors R38 and R39 connected end-to-end between the current-limiting resistor R40 and the non-inverting input terminal of the operational amplifier U8A, and a grounding capacitor R35 is connected between resistors R38 and R39; it also includes capacitors C33 and C34 connected end-to-end between the current-limiting resistor R40 and the non-inverting input terminal of the operational amplifier U8A, and capacitors C33 and C34 are connected to the output terminal of the operational amplifier U8A through resistor R37.

[0009] Furthermore, the circuit also includes a protection control module, which includes an operational amplifier U8B. The non-inverting input of the operational amplifier U8B is connected to the output of the operational amplifier U8A through a potentiometer RV5, and the inverting input of the operational amplifier U8B is connected to the output of the operational amplifier U8B. The output of the operational amplifier U8B outputs a protection control signal through a resistor R44.

[0010] Furthermore, the grounding resistor R43 is connected in parallel with a filter capacitor C37, and a Zener diode D17 and a clamping capacitor C36 are also connected in parallel between the Earth terminal and the grounding terminal.

[0011] Preferably, the measuring meter is a voltmeter with a range of 0-9.999V and a decimal point that is switched by a jumper, and its jumper is replaced by the switching switch. The resistance of resistor R41 is 9.9KΩ and the resistance of resistor R43 is 100Ω. The current range corresponding to the voltmeter when switched to the microampere range is 0-999.9μA, and the current range corresponding to the milliampere range is 0-99.99mA.

[0012] Compared to traditional current detection schemes that are only applicable to narrow-range fixed sampling resistors, this invention uses dual-level sampling switching to flexibly match the measurement accuracy and protection requirements under different current conditions. This not only significantly improves the adaptability of the measurement system to low and high currents, but also enables dynamic matching of display accuracy, achieving a resolution of up to 0.1μA. This effectively meets the detection requirements of titanium pump power supplies for weak current changes in high vacuum environments. Attached Figure Description

[0013] The accompanying drawings are provided to further understand the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation thereof.

[0014] Figure 1 This is a circuit diagram provided in an embodiment of the present invention. Detailed Implementation

[0015] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0016] This embodiment provides a high-range current measurement, display, and protection circuit for titanium pump power supplies, such as... Figure 1 As shown, the high-voltage current of the titanium pump power supply flows from the Earth terminal to the GND terminal, and the circuit includes two settings:

[0017] In the microampere setting, the high-voltage circuit current flows from the Earth terminal through resistor R40, then through the gear shifting contact 13-11, and finally through resistors R41 and R43 to the GND terminal. At this time, the current sampling resistor is the resistor formed by the series connection of resistors R41 and R43.

[0018] In the milliampere setting, the high-voltage circuit current flows from the Earth terminal through resistor R40, then through the gear shifting contact 13-9, and finally through resistor R43 to the GND terminal. At this time, the current sampling resistor is R43.

[0019] The display meter uses a common four-digit voltmeter with a range of 0-9.999V. Its decimal point can be switched using a jumper cap. In this circuit, the jumper cap is replaced with a toggle switch for easy switching to the corresponding decimal point when changing ranges. In the microamplitude range, R41 uses a 9.9KΩ / 0.1% accuracy resistor, and R43 uses a 100Ω / 0.1% accuracy resistor, for a total resistance of 10KΩ. With the voltmeter range of 0-9.999V, the corresponding sampling current range is 0-999.9uA. At this time, the decimal point on the meter is switched to one decimal place. When the current is larger, exceeding the microamplitude range, it switches to the milliamp range. In this case, the sampling resistor is R43, the voltmeter range is 0-9.999V, and the corresponding sampling current range is 0-99.99mA. At this time, the decimal point on the meter is switched to two decimal places. By using the above-mentioned gear switching method, a high range of current sampling for the titanium pump power supply can be displayed, and the highest display accuracy can reach 0.1uA.

[0020] The circuit starts from the current input terminal, with the main current path flowing from the Earth terminal to the GND terminal. The current first enters the gear shifting module through the current-limiting resistor R40. Gear shifting is achieved through the switch and the 2510-6A socket P9: one end of pin 5 of P9 is connected to GND through resistor R43, and the other end extends to conductive contact 9; one end of pin 4 of P9 is connected to GND through resistors R41 and R43, and the other end extends to conductive contact 11; one end of pin 6 of P9 is connected to R40 as the common terminal for gear input, and the other end is connected to contact 13 of the switch. The switch is used to switch the connection between contact 13 and contact 11 and contact 9. When contact 13 and 11 are connected, it is the microamplitude range; when contact 13 and 9 are connected, it is the milliamplitude range.

[0021] A capacitor C37 is connected in parallel across resistor R43 for filtering the sampling node voltage. Additionally, a Zener diode D17 and a clamping capacitor C36 are connected in parallel between the Earth terminal and the GND terminal, forming a ground clamping filter circuit for voltage protection and stabilization.

[0022] After being protected and filtered, the voltage signal enters operational amplifier U8A via an RC network (R38, R39, C33, C34). This op-amp buffers or amplifies the input sampled signal to output a stable analog signal to drive the digital voltmeter display. R42 in its internal feedback path is a negative feedback resistor used to set the gain of U8A; R38 and R39 also participate in gain adjustment and simultaneously construct the current-limiting and voltage-dividing network at the input. C33 and C34 are coupling capacitors used for AC isolation and signal path stabilization; C35 is a filter capacitor to ground, used to further improve the system's anti-interference capability. A current-limiting resistor R37 is connected in series at the output of op-amp U8A to protect the display input and control the output impedance. Although the display section is not... Figure 1 The digital voltmeter, which is directly drawn in the diagram but is known to have a range of 0-9.999V, has its decimal point setting controlled by a switch to achieve accurate display at different ranges.

[0023] The circuit also includes a protection control section. The output of operational amplifier U8A is grounded through potentiometer RV5. The center tap (sliding terminal) of RV5 is connected to the non-inverting input of operational amplifier U8B, and the non-inverting input of U8B is also grounded through capacitor C38. The inverting input of U8B is connected to the output of U8B, and the output of U8B outputs a protection control signal through resistor R44. This protection output can drive a relay, buzzer, or host computer alarm system.

[0024] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it; under the concept of this utility model, the technical features of the above embodiments or different embodiments can also be combined, and there are many other variations of different aspects of this utility model as described above. For the sake of brevity, they are not provided in detail; although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A high-range current measurement, display, and protection circuit for a titanium pump power supply, characterized in that, The system includes a range switching module and a display output module connected to the Earth terminal of the titanium pump power supply current output. The range switching module includes a switch connected to the Earth terminal via a current-limiting resistor R40. The switch is used to switch between connecting a microampere range line and a milliampere range line. The milliampere range line is a grounding resistor R43, and the microampere range line includes a resistor R41 connected in series with the grounding resistor R43. The display output module includes an operational amplifier U8A. The non-inverting input of the operational amplifier U8A is connected between the current-limiting resistor R40 and the switching switch through a resistor-capacitor network. The inverting input of the operational amplifier U8A is connected to the output of the operational amplifier U8A through a feedback resistor R42. The output is used to output a stable analog signal to drive the display of the measuring meter.

2. The high-range current measurement display and protection circuit as described in claim 1, characterized in that, The RC network includes resistors R38 and R39 connected end-to-end between the current-limiting resistor R40 and the non-inverting input terminal of the operational amplifier U8A, with a grounding capacitor R35 connected between resistors R38 and R39; it also includes capacitors C33 and C34 connected end-to-end between the current-limiting resistor R40 and the non-inverting input terminal of the operational amplifier U8A, with capacitors C33 and C34 connected to the output terminal of the operational amplifier U8A through resistor R37.

3. The high-range current measurement display and protection circuit as described in claim 1, characterized in that, It also includes a protection control module, which includes an operational amplifier U8B. The non-inverting input of the operational amplifier U8B is connected to the output of the operational amplifier U8A through potentiometer RV5, and the inverting input of the operational amplifier U8B is connected to the output of the operational amplifier U8B. The output of the operational amplifier U8B outputs a protection control signal through resistor R44.

4. The high-range current measurement display and protection circuit as described in claim 1, characterized in that, The grounding resistor R43 is connected in parallel with a filter capacitor C37, and a Zener diode D17 and a clamping capacitor C36 are also connected in parallel between the Earth terminal and the ground terminal.

5. The high-range current measurement display and protection circuit as described in claim 1, characterized in that, The measuring meter is a voltmeter with a range of 0-9.999V and a decimal point that is switched by a jumper cap. The jumper cap is replaced with the switching switch. The resistance of resistor R41 is 9.9KΩ and the resistance of resistor R43 is 100Ω. The current range corresponding to the voltmeter when switched to the microampere range is 0-999.9μA, and the current range corresponding to the milliampere range is 0-99.99mA.

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