Multi-point side-by-side modulation imaging optical system

Abstract

The application discloses a kind of multi-point parallel modulation imaging optical systems, including light source, image acquisition device, beam splitter, first lens group, second lens group, beam modulation device, fold mirror and third lens group.Illumination light is folded by beam splitter, reaches beam modulation device along first optical path;After modulation, light is illuminated sample along second optical path through fold mirror and third lens group.Signal light returned by sample is reverse propagated, again passes through second lens group to reach beam modulation device for second modulation, finally passes through second lens group, first lens group and beam splitter, and is received by image acquisition device.In the application, first optical path and second optical path share second lens group with different paths, and make light beam access beam modulation device twice, so that in a unified platform, with low cost, compact structure.

Description

Technical Field

[0001] This application relates to the field of optical imaging technology, specifically to a multi-point parallel modulation imaging optical system. Background Technology

[0002] In the field of modern optics, optical imaging systems, especially microscopic imaging systems, play a crucial role. With the continuous development of scientific research and industrial applications, the demands on optical imaging systems in terms of high resolution, high speed, and functional versatility are increasing. High-resolution imaging allows researchers to observe microscopic structures and details more clearly, providing strong support for research in fields such as biology and materials science; high-speed imaging helps capture rapidly changing dynamic processes, such as cell movement and instantaneous changes in chemical reactions; and functional versatility allows optical imaging systems to adapt to different research needs and application scenarios, such as switching between multiple imaging modes and imaging different types of samples. However, current optical imaging systems still have many shortcomings in meeting these requirements, limiting their further application in more fields.

[0003] To achieve better results in optical imaging, various techniques have traditionally been employed. Confocal microscopy is a common method that acquires sample information point-by-point through point scanning, resulting in high-contrast optical section images. This method is widely used in biomedical research, clearly displaying intracellular structures and tissue layers. Furthermore, rotating confocal microscopy is used to improve imaging speed. It achieves parallel scanning by setting multiple pinholes on a rotating disk, thus accelerating image acquisition to some extent. Additionally, traditional wide-field illumination is also a commonly used technique. It illuminates the entire sample and then directly acquires images using a camera, offering the advantage of high speed and suitability for scenarios requiring fast imaging.

[0004] However, these existing techniques have significant drawbacks. While traditional confocal microscopy can obtain high-contrast images, its scanning speed is slow, making it unsuitable for observing high-speed dynamic processes. Techniques such as rotating confocal microscopes, while increasing speed, limit system flexibility, resulting in complex optical paths that are difficult to adapt to diverse experimental needs. Traditional wide-field illumination methods, although fast, cannot finely edit the illumination light, easily producing stray light outside the focal distance, and causing severe phototoxicity due to continuous global illumination during long-term observation of live samples. Furthermore, when observing high-speed dynamic processes, researchers need to rely on expensive dedicated high-speed cameras; conventional research-grade cameras often have insufficient frame rates to capture rapidly changing events. Utility Model Content

[0005] To address the technical problems in the prior art, this application provides a multi-point parallel modulation imaging optical system.

[0006] The multi-point parallel modulation imaging optical system provided in this application adopts the following technical solution: This application provides a multi-point parallel modulation imaging optical system, including: light source; Image acquisition devices; A beam splitter is disposed in the optical path of the image acquisition device; The first lens group is disposed in the optical path of the beam splitter; The second lens group is disposed in the optical path of the first lens group; A beam modulation device is disposed in the optical path of the second lens group; A folding mirror is disposed in the optical path of the beam modulation device; The third lens group is disposed in the optical path of the folding mirror; The illumination light emitted by the light source is deflected by the beam splitter and passes sequentially through the first lens group and the second lens group along the first optical path to reach the beam modulation device. The light modulated by the beam modulation device passes through the second lens group along the second optical path and is deflected by the folding mirror to the third lens group to illuminate the sample. The signal light returning from the sample passes through the third lens group, is deflected by the folding mirror, penetrates the second lens group, and reaches the beam modulation device. The signal light modulated by the beam modulation device passes through the second lens group, the first lens group, and the beam splitter to reach the image acquisition device. Furthermore, the system is configured such that the first optical path propagates along the center of the second lens group, and the second optical path propagates along the edge of the second lens group.

[0007] In some embodiments, the multi-point parallel modulation imaging optical system further includes an objective lens disposed after the optical path of the third lens group for focusing light from the third lens group onto the sample. The beam modulation device is configured to achieve multi-point parallel illumination of the beam in the first optical path, and the size of its illumination unit is smaller than the Airy disk emitted through the objective lens. Furthermore, the beam modulation device is configured such that when the signal light returns, its modulation unit corresponds one-to-one with the pixel of the image acquisition device, so as to achieve confocal function and avoid stray light interference.

[0008] In some embodiments, the plane in which the modulation unit of the beam modulation device is located and the plane in which the pixels of the image acquisition device are located are configured as conjugate imaging planes by the second lens group and the first lens group.

[0009] In some embodiments, the first lens group, starting from the side closest to the beam splitter, sequentially includes: a first biconvex lens, a first cemented lens, and a second cemented lens. The first cemented lens is formed by cementing a first positive meniscus lens and a first negative meniscus lens together, and the second cemented lens is formed by cementing a first biconcave lens and a second biconvex lens together.

[0010] In some embodiments, the second lens group, starting from the side closest to the first lens group, sequentially includes: a third cemented lens, a third biconvex lens, and a second positive meniscus lens, wherein the third cemented lens is formed by cementing together a fourth biconvex lens, a second biconcave lens, a fifth biconvex lens, and a second negative meniscus lens.

[0011] In some embodiments, the third lens group, starting from the side closest to the folding mirror, sequentially includes: a fourth cemented lens and a sixth biconvex lens, wherein the fourth cemented lens is formed by cementing a seventh biconvex lens and a third biconcave lens together.

[0012] In some embodiments, the multi-point parallel modulation imaging optical system further includes a first aperture and a second aperture. The first aperture is disposed between the first lens group and the second lens group and is used to control the beam aperture of the first optical path and the signal light return optical path. The second aperture is disposed between the folding mirror and the second lens group and is used to control the beam aperture reaching the folding mirror.

[0013] In some embodiments, the beam modulation device is a digital micromirror device or a spatial light modulator.

[0014] In summary, this application includes at least one of the following beneficial technical effects: 1. The first and second optical paths share the second lens group through different paths, and the beam accesses the beam modulation device twice, thereby realizing a variety of advanced imaging functions on a unified platform with low cost and compact structure. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the optical path structure of a multi-point parallel modulation imaging optical system provided in an embodiment of this application; Figure 2 yes Figure 1 A schematic diagram of the structure of the first lens group in the diagram; Figure 3 yes Figure 1 A schematic diagram of the structure of the second lens group in the diagram; Figure 4 yes Figure 1 A schematic diagram of the structure of the third lens group in the diagram; Explanation of reference numerals in the attached figures: 1. Light source; 2. Image acquisition device; 3. Beam splitter; 4. First lens group; 41. First biconvex lens; 42. First cemented lens; 421. First positive meniscus lens; 422. First negative meniscus lens; 43. Second cemented lens; 431. First biconcave lens; 432. Second biconvex lens; 5. Second lens group; 51. Third cemented lens; 511. Fourth biconvex lens; 512. Second biconcave lens; 513. Fifth biconvex lens; 514. Second negative meniscus lens; 52. Third biconvex lens; 53. Second positive meniscus lens; 6. Beam modulation device; 7. Folding mirror; 8. Third lens group; 81. Fourth cemented lens; 811. Seventh biconvex lens; 812. Third biconcave lens; 82. Sixth biconvex lens; 9. Objective lens; 101. First aperture stop; 102. Second aperture stop. Detailed Implementation

[0016] The technical solutions in the embodiments of this utility model will be further described in detail below with reference to the accompanying drawings. The described embodiments are only possible technical implementations of this utility model, but are not limited thereto. Other embodiments obtained by those skilled in the art in conjunction with the embodiments of this utility model without creative effort are also within the protection scope of this utility model.

[0017] This application mainly adopts an innovative optical path design to achieve multifunctional imaging, which integrates high-speed confocal imaging, flexible illumination, and high-speed imaging capabilities of low-speed cameras. The following is a further detailed description of this application.

[0018] Example 1: Optical System Please refer to Figure 1The multi-point parallel modulation imaging optical system provided in this application includes a light source 1, an image acquisition device 2, a beam splitter 3, a first lens group 4, a second lens group 5, a beam modulator 6, a folding mirror 7, a third lens group 8, and an objective lens 9. The illumination light emitted from the light source 1 is folded by the beam splitter 3 and passes sequentially through the first lens group 4 and the second lens group 5 along a first optical path to reach the beam modulator 6. The light modulated by the beam modulator 6 passes through the second lens group 5 along a second optical path and is then folded by the folding mirror 7 to the third lens group 8, and finally passes through the objective lens 9. The sample is illuminated; the signal light returning from the sample passes through objective lens 9 and the third lens group 8, is deflected by refracting mirror 7, penetrates the second lens group 5, and reaches beam modulator 6. The modulated signal light then passes through the second lens group 5, the first lens group 4, and beam splitter 3 before reaching image acquisition device 2. The first optical path propagates along the center of the second lens group 5, and the second optical path propagates along the edge of the second lens group 5. This achieves the beneficial effect of integrating multiple functions on a single platform, such as high-speed confocal imaging, flexible and editable illumination, and the ability to achieve high-speed imaging using a low-speed camera. This is because the innovative optical path design allows the illumination light and signal light to access beam modulator 6 twice, realizing the decoupling and integration of illumination modulation and signal modulation.

[0019] Specifically, light source 1 can be a laser light source, an LED light source, etc. Laser light sources have the characteristics of high brightness, high monochromaticity, and high directionality, and can provide high-quality illumination light; LED light sources have the advantages of low energy consumption, long lifespan, and low cost, making them suitable for different application scenarios. The illumination light emitted by light source 1 has certain intensity and spectral characteristics to meet the imaging requirements of different samples.

[0020] Image acquisition device 2 can be a CCD camera, sCMOS camera, etc. CCD cameras have the advantages of high sensitivity and low noise, enabling them to acquire clear images; sCMOS cameras feature high frame rates and wide fields of view, making them suitable for high-speed imaging. The pixel size and number of the image acquisition device 2 affect the resolution and quality of the image.

[0021] The function of beam splitter 3 is to separate the illumination light path and the signal light path in this optical path. Specifically, it is configured to deflect (e.g., reflect) the illumination light from the light source 1 to the first lens group 4, while allowing the signal light returning from the sample and propagating in the opposite direction along the first lens group 4 and the second lens group 5 to pass through and reach the image acquisition device 2. In this embodiment, since the illumination light and the returned signal light (e.g., reflected light) have the same wavelength, beam splitter 3 (e.g., a polarizing beam splitter or an unpolarizing beam splitter with a specific ratio) is used to achieve the separation and coupling of the optical paths.

[0022] Please refer to Figure 1 and Figure 2The first lens group 4, starting from the side closest to the beam splitter 3, sequentially includes a first biconvex lens 41, a first cemented lens 42, and a second cemented lens 43. The first cemented lens 42 is formed by cementing a first positive meniscus lens 421 and a first negative meniscus lens 422 together, and the second cemented lens 43 is formed by cementing a first biconcave lens 431 and a second biconvex lens 432 together. The first biconvex lens 41 has the function of converging light rays, and can initially focus the light rays refracted by the beam splitter 3; the first cemented lens 42 and the second cemented lens 43 can correct aberrations and improve the image quality.

[0023] Please refer to Figure 1 and Figure 3 The second lens group 5, starting from the side closest to the first lens group 4, sequentially includes a third cemented lens 51, a third biconvex lens 52, and a second positive meniscus lens 53. The third cemented lens 51 is formed by cementing together a fourth biconvex lens 511, a second biconcave lens 512, a fifth biconvex lens 513, and a second negative meniscus lens 514. This combination of lenses allows for precise adjustment and focusing of light, ensuring that the illumination light accurately reaches the beam modulation device 6 while also guaranteeing the effective propagation of the signal light. The first optical path propagates along the center of the second lens group 5.

[0024] Please refer to Figure 1 The beam modulator 6 can be a digital micromirror device (DMD) or a spatial light modulator (SLM). A DMD consists of numerous tiny mirrors; by controlling the flip angle of the mirrors, beam modulation can be achieved. An SLM, on the other hand, can modulate the beam by changing the phase, amplitude, or polarization of the light. The beam modulator 6 modulates the illumination light in the first optical path to achieve multi-point parallel illumination or other advanced illumination methods; when the signal light returns, it modulates the signal light to achieve functions such as confocal filtering or high-speed encoding.

[0025] The folding mirror 7 is used to change the direction of light propagation, folding the modulated light to the third lens group 8. The folding mirror 7 typically features high reflectivity and low loss, ensuring efficient light propagation.

[0026] Please refer to Figure 1 and Figure 4 The third lens group 8, starting from the side closest to the folding mirror 7, sequentially includes a fourth cemented lens 81 and a sixth biconvex lens 82. The fourth cemented lens 81 is formed by cementing a seventh biconvex lens 811 and a third biconcave lens 812 together. The third lens group 8, in conjunction with the objective lens 9, focuses the light from the folding mirror 7 onto the sample and collects the signal light reflected back from the sample. It can further correct aberrations and improve the sharpness and contrast of the image.

[0027] Preferably, please refer to Figure 1The multi-point parallel modulation imaging optical system further includes a first aperture 101 and a second aperture 102. The first aperture 101 is disposed between the first lens group 4 and the second lens group 5 and is used to control the beam aperture of the first optical path and the signal light return optical path. The second aperture 102 is disposed between the folding mirror 7 and the second lens group 5 and is used to control the beam aperture reaching the folding mirror 7.

[0028] The implementation principle of this embodiment is as follows: This multi-point parallel modulation imaging optical system, through an innovative optical path design, allows the illumination light and signal light to pass through the beam modulator 6 twice, achieving decoupling and integration of illumination modulation and signal modulation. This design can fully utilize the function of the beam modulator 6 to realize various advanced imaging functions, such as high-speed confocal imaging, flexible and editable illumination, and high-speed imaging using a low-speed camera. Simultaneously, the rational configuration of each lens group can correct aberrations, improve imaging quality and performance, overcome the shortcomings of existing optical imaging systems in terms of high resolution, high speed, and functional diversity, and provide a new solution for the development of optical imaging technology.

[0029] The confocal imaging principle is as follows: During illumination, in the first optical path, the beam modulator 6 is configured to achieve multi-point parallel illumination of the beam. For example, some micromirrors of the digital micromirror device are "opened" to form a dot matrix, and the size of these illumination units is designed to be smaller than the Airy disk size emitted through the objective lens 9. During filtering and detection, when the signal light returns, the beam modulator 6 is configured as a "pinhole array," with its modulation units corresponding one-to-one with the pixels of the image acquisition device 2. Only signal light from the focal plane can accurately pass through the "pinholes" on the modulation units and be acquired by the corresponding CCD pixels. Stray light outside the focal plane is blocked by the modulation units, thereby achieving confocal function and effectively avoiding stray light interference. To achieve a "one-to-one correspondence," the plane where the modulation units of the beam modulator 6 are located and the plane where the pixels of the image acquisition device 2 are located are configured as conjugate imaging planes through the second lens group 5 and the first lens group 4.

[0030] In this embodiment, high-speed multi-point parallel confocal imaging is achieved by setting the objective lens 9 and employing a specific beam modulation method. This confocal imaging method can effectively avoid stray light interference outside the focal plane, improve the contrast and clarity of the image, and provide more accurate image information for research in fields such as biomedicine. Simultaneously, by utilizing the conjugate imaging relationship between the beam modulation device 6 and the image acquisition device 2, accurate acquisition of the signal light is ensured, further improving the quality and efficiency of the imaging. Furthermore, the system is configured such that the first optical path propagates along the center of the second lens group 5, and the second optical path propagates along the edge of the second lens group 5. This optical path design allows the two optical paths to share the same second lens group 5, thus eliminating the need for separate lens groups for each. This design significantly reduces the total number of optical elements, thereby achieving the dual advantages of reducing equipment costs and making the system structure more compact.

[0031] Example 2: Multi-point parallel confocal imaging method The multi-point parallel modulation imaging method provided in this application includes the following steps: S1 provides the aforementioned multi-point parallel modulation imaging optical system. This system is the foundation for realizing the imaging method, and the rational configuration and coordinated operation of its various optical elements provide the necessary conditions for subsequent imaging steps.

[0032] S2, the light source 1 emits illumination light, which is refracted by the beam splitter 3 and passes sequentially through the first lens group 4 and the second lens group 5 along the first optical path, reaching the beam modulation device 6. In this process, the beam splitter 3 changes the direction of light propagation, and the first lens group 4 and the second lens group 5 focus and adjust the light so that the illumination light can accurately reach the beam modulation device 6.

[0033] S3, the illumination light is modulated into a multi-point parallel illumination beam using the beam modulator 6. The beam passes through the second lens group 5 along the second optical path and is then deflected by the refracting mirror 7 to the third lens group 8 to illuminate the sample. The beam modulator 6 can modulate the illumination light according to different needs, achieving various advanced illumination methods, such as selecting the illumination area, changing the phase or polarization characteristics of the illumination light, etc. The second optical path propagates along the edge of the second lens group 5, ensuring that the illumination light can illuminate the sample at a suitable angle and intensity.

[0034] S4, the signal light returning from the sample passes through the third lens group 8, is deflected by the folding mirror 7, and then passes through the second lens group 5 to reach the beam modulation device 6. The third lens group 8 focuses and collects the signal light returning from the sample, and the folding mirror 7 changes the propagation direction of the signal light so that it can reach the beam modulation device 6 for further processing.

[0035] S5, the returned signal light is modulated using the beam modulator 6. In this mode, the beam modulator 6 is configured as a "pinhole array". The pixels of the image acquisition device 2 are configured in a one-to-one correspondence with the modulation units of the beam modulator 6. Preferably, the modulation unit plane of the modulator and the pixel plane of the image acquisition device 2 are configured as conjugate imaging planes via the second lens group 5 and the first lens group 4. Only signal light from the focal plane can accurately pass through the "pinhole" on the modulation unit and be acquired by the corresponding CCD pixel. Stray light outside the focal plane is blocked by the modulation unit (e.g., a micromirror "off" in the DMD).

[0036] S6: The image acquisition device 2 is used to acquire the filtered signal light, and only the information of the corresponding pixel is acquired, thereby avoiding stray light interference and realizing high-speed multi-point parallel confocal imaging.

[0037] The implementation principle of this embodiment is as follows: This multi-point parallel modulation imaging method utilizes innovative optical path design and beam modulation technology to achieve independent modulation of the illumination light and the return signal light twice, thereby integrating multiple advanced imaging functions. Through reasonable step arrangement and the coordinated work of optical components, it overcomes the shortcomings of existing imaging methods in terms of high resolution, high speed, and functional diversity. It can realize high-speed confocal imaging, flexible and editable illumination, and high-speed imaging using a low-speed camera on a single platform, providing a wider range of applications for optical imaging technology.

[0038] Example 3: Editable Lighting Method This embodiment further defines one implementation method of step S3 in embodiment 2: an editable lighting method.

[0039] Selecting an illumination area for tracking dynamic targets. The step of selecting the illumination area is an adaptive illumination step, including: a) In frame t, an image I is acquired using an image acquisition device. t (x,y); b) Using the first control calculation unit, image I is processed according to a preset standard (e.g., brightness threshold T or target recognition algorithm). t Analyze (x, y) to determine the region of interest (ROI). t ; c) The first control computing unit generates a binary illumination mask M t+1 ; d) In frame t+1, apply the illumination mask M t+1 The beam is loaded onto a beam modulator to illuminate only the updated region of interest, thereby enabling tracking illumination of a dynamic target.

[0040] Wavefront shaping is used to correct aberrations or achieve deep focusing within a scattering medium, such as biological tissue. When the beam modulator is a spatial light modulator (SLM), this step includes: a) Measure the wavefront distortion φ introduced by the sample or optical system using an image acquisition device or a dedicated wavefront sensor. aberr (x,y); b) Using the second control calculation unit, a phase conjugate diagram φ is generated. corr (x,y) = -φ aberr (x,y); c) The phase conjugate diagram φ corr (x,y) is loaded onto the spatial light modulator to pre-correct the illumination light in the first optical path, so that after passing through the distortion medium of the sample, a diffraction-limited focused spot is formed inside the sample.

[0041] Holographic pattern generation is used to generate complex three-dimensional illumination patterns. When the beam modulator is a phase modulator, this step includes: a) Define a target three-dimensional lighting intensity pattern A target (u,v,w), such as light sheets, Bessel beam arrays, or arbitrary three-dimensional spatial lattices; b) Using the third control computing unit, the required phase hologram φ is calculated through an iterative Fourier transform algorithm (e.g., the Gerchberg-Saxton algorithm). holo (x,y); c) The phase hologram φ holo (x,y) is applied to the beam modulation device to generate the target three-dimensional illumination pattern on the sample.

[0042] Example 4: High-speed imaging method This embodiment describes a method for achieving high-speed imaging using this system. This method can be combined with the confocal method of Embodiment 2 to achieve high-speed confocal imaging.

[0043] The core of this method lies in the special configuration of step S5 (signal modulation): High-speed modulation: The returned signal light is modulated at a first speed (e.g., on the order of kHz) using a beam modulator. Here, modulation is no longer a simple "switching" filter, but rather the loading of a series of rapidly changing spatially encoded patterns.

[0044] Low-speed acquisition: The modulated signal light is acquired using an image acquisition device at a second speed (e.g., at the 100Hz level) lower than the first speed. The acquired image consists of one or more frames that are compressed using temporal-spatial co-coding.

[0045] Image reconstruction: The method also includes using a reconstruction computing unit to inversely solve a high-speed dynamic image of the sample based on the acquired signal light and known modulation information.

[0046] Reconstruction Algorithm: Preferably, the reconstruction computing unit executes a compressed sensing-based reconstruction algorithm to reconstruct the image by solving the following optimization problem:

[0047] Where S is the acquired signal vector, and H is the sensing matrix including the modulation information. Let O be the sparse transform basis, and let O be the sample image to be reconstructed. This is the noise threshold.

[0048] The beneficial effects of the technical solution provided in this application include: (1) The first and second optical paths share the second lens group through different paths (center / edge) and allow the beam to access the beam modulation device twice, thereby realizing a variety of advanced imaging functions on a unified platform with low cost and compact structure.

[0049] (2) By using the modulation device as a programmable pinhole array and corresponding one-to-one with the detector pixel, stray light can be effectively filtered out, and high-speed, non-moving confocal imaging can be achieved.

[0050] (3) By modulating the illumination light, adaptive illumination, wavefront shaping to correct aberrations, or holographic generation of three-dimensional structured light can be achieved.

[0051] (4) By performing high-speed coding and modulation on the returned signal light and combining it with a reconstruction algorithm, the system is able to capture high-speed dynamic processes using a camera with a conventional frame rate. This application overcomes the shortcomings of existing technologies in that it is difficult to achieve speed, resolution and functional flexibility simultaneously, and provides a powerful imaging solution for fields such as biomedicine and materials science.

[0052] The specific embodiments described above do not constitute a limitation on the scope of protection of this application. Any other corresponding changes and modifications made based on the technical concept of this application should be included within the scope of protection of this application.

Claims

1. A multi-point parallel modulation imaging optical system, characterized in that, include: Light source (1); Image acquisition device (2); A beam splitter (3) is disposed in the optical path of the image acquisition device (2); The first lens group (4) is disposed in the optical path of the beam splitter (3); The second lens group (5) is disposed in the optical path of the first lens group (4); A beam modulation device (6) is disposed in the optical path of the second lens group (5); A folding mirror (7) is disposed in the optical path of the beam modulation device (6); The third lens group (8) is disposed in the optical path of the folding mirror (7); The illumination light emitted by the light source (1) is deflected by the beam splitter (3) and passes through the first lens group (4) and the second lens group (5) in sequence along the first optical path, and reaches the beam modulation device (6); the light light modulated by the beam modulation device (6) passes through the second lens group (5) along the second optical path and is deflected by the folding mirror (7) to the third lens group (8) to illuminate the sample; The signal light returning from the sample passes through the third lens group (8), is refracted by the refracting mirror (7), penetrates the second lens group (5), and reaches the beam modulator (6). The signal light modulated by the beam modulator (6) passes through the second lens group (5), the first lens group (4), and the beam splitter (3) and reaches the image acquisition device (2). Furthermore, the system is configured such that the first optical path propagates along the center of the second lens group (5), and the second optical path propagates along the edge of the second lens group (5).

2. The multi-point parallel modulation imaging optical system according to claim 1, characterized in that, It also includes an objective lens (9) disposed after the optical path of the third lens group (8) for focusing light from the third lens group (8) onto the sample; the beam modulation device (6) is configured to achieve multi-point parallel illumination of the beam in the first optical path, and the size of its illumination unit is smaller than the Airy disk emitted through the objective lens (9); and the beam modulation device (6) is configured such that when the signal light returns, its modulation unit corresponds one-to-one with the pixel of the image acquisition device (2).

3. The multi-point parallel modulation imaging optical system according to claim 2, characterized in that, The plane in which the modulation unit of the beam modulation device (6) is located and the plane in which the pixels of the image acquisition device (2) are located are configured as conjugate imaging planes through the second lens group (5) and the first lens group (4).

4. The multi-point parallel modulation imaging optical system according to claim 1, characterized in that, The first lens group (4) includes, in sequence, the following components from the side closest to the beam splitter (3): a first biconvex lens (41), a first cemented lens (42), and a second cemented lens (43). The first cemented lens (42) is formed by cementing a first positive meniscus lens (421) and a first negative meniscus lens (422). The second cemented lens (43) is formed by cementing a first biconcave lens (431) and a second biconvex lens (432).

5. The multi-point parallel modulation imaging optical system according to claim 1, characterized in that, The second lens group (5) includes, in sequence, the following components from the side closest to the first lens group (4): a third cemented lens (51), a third biconvex lens (52), and a second positive meniscus lens (53). The third cemented lens (51) is formed by cementing together a fourth biconvex lens (511), a second biconcave lens (512), a fifth biconvex lens (513), and a second negative meniscus lens (514).

6. The multi-point parallel modulation imaging optical system according to claim 1, characterized in that, The third lens group (8) includes, in sequence, a fourth cemented lens (81) and a sixth biconvex lens (82) starting from the side closest to the folding mirror (7). The fourth cemented lens (81) is formed by cementing together a seventh biconvex lens (811) and a third biconcave lens (812).

7. The multi-point parallel modulation imaging optical system according to claim 1, characterized in that, It also includes a first aperture (101) and a second aperture (102). The first aperture (101) is disposed between the first lens group (4) and the second lens group (5) to control the beam aperture of the first optical path and the signal light return optical path. The second aperture (102) is disposed between the folding mirror (7) and the second lens group (5) to control the beam aperture reaching the folding mirror (7).

8. The multi-point parallel modulation imaging optical system according to claim 1, characterized in that, The beam modulation device (6) is a digital micromirror device or a spatial light modulator.

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