Chip positioning and carrying platform for mask aligner

Abstract

The utility model relates to mask alignment exposure machine technical field, concretely for a kind of chip positioner for mask alignment exposure machine, including placing disc and placing plate, the surface of placing disc is provided with support station, the side surface of support station is connected with the resistance pole by screw thread, the surface of support station is connected with placing plate, the surface of placing plate is opened and is placed with placing groove, the inside of placing plate is opened and is moved with moving groove, the inside of moving groove is provided with connecting plate.The utility model is connected by the connection of resistance spring and resistance plate, realizes the elastic control effect of resistance plate in the acting angle in placing groove, the use of resistance plate cooperates with limiting strip, reaches the limiting and supporting effect of chip in placing groove, avoids the situation of displacement in the processing process, under the cooperation use of support block and placing groove, it is convenient to push out the chip placed on support block from placing groove, reaches the operating effect and performance of convenient chip taking.

Description

Technical Field

[0001] This utility model relates to the field of mask alignment exposure machine technology, specifically a chip positioning support stage for a mask alignment exposure machine. Background Technology

[0002] Mask alignment exposure machines are key equipment in printed circuit board (PCB) manufacturing and integrated circuit production.

[0003] A chip positioning platform is a platform for placing chips during processing. However, when using existing chip positioning platforms, there is no limiting mechanism for the chip placement position. During placement and processing, the position is prone to deviation, affecting the accuracy and performance of the processing operation. Utility Model Content

[0004] The purpose of this invention is to provide a chip positioning support stage for a mask alignment exposure machine, so as to solve the problem mentioned in the background art that the support stage does not have a limiting mechanism for chip placement, which easily causes positional deviation during placement and processing, affecting the accuracy and performance of the processing operation.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a chip positioning support stage for a mask alignment exposure machine, comprising a placement tray and a placement plate. A support platform is provided on the surface of the placement tray, and a stop rod is threadedly connected to the side surface of the support platform. The placement plate is connected to the surface of the support platform, and a placement groove is formed on the surface of the placement plate. A moving groove is formed inside the placement plate, and a connecting plate is provided inside the moving groove. A support plate is fixedly connected to the surface of the connecting plate, and a support block is fixedly connected to the upper surface of the support plate. A support spring is fixedly connected to the lower surface of the support plate. A stop plate is provided on the inner wall of the placement groove, and a limit strip is fixedly connected to one side surface of the stop plate. A stop spring is fixedly connected to the other side surface of the stop plate.

[0006] Preferably, the upper surface of the support platform has a groove, the placement plate is fitted and connected to the surface of the support platform through the groove, and the abutment rod passes through the surface of the support platform and the surface of the placement plate to abut against each other.

[0007] Preferably, the placement grooves are evenly distributed on the surface of the placement plate, the placement grooves penetrate the placement plate and are connected to the moving groove, and the support block is fitted and connected to the placement plate through the placement grooves.

[0008] Preferably, the connecting plate has a "T" shaped cross section, the connecting plates are distributed in two groups on both sides of the support plate, and the support blocks are evenly distributed on the surface of the support plate.

[0009] Preferably, the support block and the placement slot are connected in a one-to-one correspondence, and the support plate is slidably connected to the placement plate through a moving slot.

[0010] Preferably, the two ends of the support spring are fixedly connected to the surface of the support plate and the inner wall of the moving groove, and the support plate is elastically slidably connected to the moving groove through the support spring.

[0011] Preferably, the abutment plate is elastically connected by an abutment spring and a placement groove, and the limiting strip is in the shape of a semi-circular strip and is evenly distributed on the outer surface of the abutment plate.

[0012] Compared with the prior art, the beneficial effects of this utility model are: 1. By connecting the placement plate and the support platform, and with the support platform and the abutment rod connected together, the placement plate is stably placed on the support platform. By connecting the placement plate and the placement slot, and with the placement slot and the abutment plate connected together, the abutment spring and the abutment plate are connected together to achieve elastic adjustment of the angle of the abutment plate in the placement slot. The abutment plate, in conjunction with the limit strip, achieves the limiting and supporting effect of placing the chip in the placement slot, avoiding displacement during processing.

[0013] 2. By connecting the placement plate and the moving slot, the moving slot enables the support plate to slide within the placement plate. The connection between the support plate and the support block, and the connection between the support plate and the support spring, achieves the elastic sliding effect of the support plate within the placement plate. With the cooperation of the support block and the placement slot, it is convenient to push the chip placed on the support block out of the placement slot, achieving an easy chip retrieval operation and performance. Attached Figure Description

[0014] Figure 1 This is a three-dimensional front view of the structure of this utility model; Figure 2 This is a frontal three-dimensional exploded view of the structure of this utility model; Figure 3 This is a partial sectional perspective view of the structure of the placement plate of this utility model; Figure 4 This is a partial three-dimensional exploded view of the structure of the placement plate of this utility model; Figure 5 This is a partial three-dimensional schematic diagram of the structure of the placement plate of this utility model.

[0015] In the diagram: 1. Placement plate; 2. Support platform; 21. Support rod; 3. Placement plate; 31. Placement slot; 4. Connecting plate; 41. Moving slot; 42. Support plate; 43. Support block; 44. Support spring; 5. Support plate; 51. Limiting strip; 52. Support spring. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] Please see Figure 1-5 One embodiment provided by this utility model: A chip positioning support stage for a mask alignment exposure machine includes a placement tray 1 and a placement plate 3. A support platform 2 is disposed on the surface of the placement tray 1. A stop rod 21 is threadedly connected to the side surface of the support platform 2. The placement plate 3 is connected to the surface of the support platform 2. A placement groove 31 is formed on the surface of the placement plate 3. A moving groove 41 is formed inside the placement plate 3. A connecting plate 4 is disposed inside the moving groove 41. A support plate 42 is fixedly connected to the surface of the connecting plate 4. A support block 43 is fixedly connected to the upper surface of the support plate 42. A support spring 44 is fixedly connected to the lower surface of the support plate 42. The inner wall of the placement slot 31 is provided with a backing plate 5. A limiting strip 51 is fixedly connected to one side surface of the backing plate 5, and a backing spring 52 is fixedly connected to the other side surface of the backing plate 5. Through the connection between the placement plate 1 and the support platform 2, the support platform 2 achieves the effect of supporting and limiting the placement position of the placement plate 3. With the cooperation of the support block 43 and the placement slot 31, it is convenient to limit and support the chip placement. The placement plate 1 and the support platform 2 are existing parts on the existing mask alignment exposure machine. Their specific installation positions and application ranges are all existing technologies and will not be described in detail here.

[0018] Furthermore, a groove is provided on the upper surface of the support platform 2, and the placement plate 3 is fitted and connected to the surface of the support platform 2 through the groove. The abutment rod 21 passes through the support platform 2 and abuts against the surface of the placement plate 3. The groove on the support platform 2 facilitates the placement of the placement plate 3 on the support platform 2. Under the action of the abutment rod 21, the placement of the placement plate 3 in the groove can be abutted, thereby improving the stability of the placement of the placement plate 3 on the support platform 2.

[0019] Furthermore, the placement slots 31 are evenly distributed on the surface of the placement plate 3. The placement slots 31 pass through the placement plate 3 and are connected to the moving slot 41. The support block 43 is connected to the placement plate 3 through the placement slots 31. Through the connection between the placement plate 3 and the placement slots 31, the chip can be placed on the placement plate 3 under the action of the placement slots 31.

[0020] Furthermore, the connecting plate 4 has a "T" shaped cross section, and the connecting plates 4 are distributed in two groups on both sides of the support plate 42. The support blocks 43 are evenly distributed on the surface of the support plate 42. Through the connection of the connecting plate 4 and the support plate 42, and the connection of the moving groove 41 and the placement plate 3, the sliding control effect of the support plate 42 in the placement plate 3 is realized.

[0021] Furthermore, the support block 43 and the placement slot 31 are connected in a one-to-one correspondence. The support plate 42 is slidably connected to the placement plate 3 through the moving slot 41. Through the connection between the support plate 42 and the support block 43, the chip placement position is limited by the interlocking connection between the support block 43 and the placement slot 31.

[0022] Furthermore, the two ends of the support spring 44 are fixedly connected to the surface of the support plate 42 and the inner wall of the moving groove 41. The support plate 42 is elastically slidably connected to the moving groove 41 through the support spring 44. Through the connection between the support plate 42 and the support spring 44, the support plate 42 can achieve an elastic sliding effect in the moving groove 41 under the action of the support spring 44.

[0023] Furthermore, the abutment 5 is elastically connected to the placement groove 31 via the abutment spring 52. The limiting strip 51 is semi-circular in shape and is evenly distributed on the outer surface of the abutment 5. With the connection between the placement groove 31 and the abutment 5, and through the connection between the abutment 5 and the limiting strip 51, and with the connection between the abutment spring 52 and the abutment 5, the elastic control effect of the angle of action of the abutment 5 in the placement groove 31 is achieved, thereby improving the stability of the chip placed in the placement groove 31.

[0024] Working principle: When processing and placing the chip, the chip is placed in the placement slot 31. Under the action of the abutment plate 5 and the limiting strip 51, the chip is placed stably in the placement slot 31. After the chip is placed, the placement plate 3 is placed on the support platform 2. The abutment rod 21 is rotated to make the placement plate 3 stable on the surface of the support platform 2. When the processing is completed or the chip needs to be removed, the placement plate 3 is removed from the support platform 2. Then, the connecting plate 4 is pulled upward. At this time, the support plate 42 drives the support block 43 to slide in the placement slot 31, pushing out the chip in the placement slot 31, so as to facilitate the removal. Finally, the connecting plate 4 is released, and the support plate 42 is reset under the action of the support spring 44.

[0025] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A chip positioning support stage for a mask alignment exposure machine, comprising a placement disk (1) and a placement plate (3), characterized in that: The surface of the placement tray (1) is provided with a support platform (2), and the side surface of the support platform (2) is connected with a stop rod (21) by a thread. The surface of the support platform (2) is connected with a placement plate (3), and the surface of the placement plate (3) is provided with a placement groove (31). The interior of the placement plate (3) is provided with a moving groove (41), and the interior of the moving groove (41) is provided with a connecting plate (4). The surface of the connecting plate (4) is fixedly connected with a support plate (42), the upper surface of the support plate (42) is fixedly connected with a support block (43), and the lower surface of the support plate (42) is fixedly connected with a support spring (44). The inner wall of the placement groove (31) is provided with a stop plate (5), one side surface of the stop plate (5) is fixedly connected with a limit strip (51), and the other side surface of the stop plate (5) is fixedly connected with a stop spring (52).

2. The chip positioning support stage for a mask alignment exposure machine according to claim 1, characterized in that: The upper surface of the support platform (2) is provided with a groove, and the placement plate (3) is connected to the surface of the support platform (2) through the groove. The abutment rod (21) passes through the surface of the support platform (2) and the placement plate (3) and abuts against each other.

3. A chip positioning support stage for a mask alignment exposure machine according to claim 1, characterized in that: The placement grooves (31) are evenly distributed on the surface of the placement plate (3). The placement grooves (31) penetrate the placement plate (3) and are connected to the moving groove (41). The support block (43) is fitted and connected to the placement plate (3) through the placement grooves (31).

4. A chip positioning support stage for a mask alignment exposure machine according to claim 1, characterized in that: The connecting plate (4) has a "T" shaped cross section. The connecting plate (4) is distributed in two groups on both sides of the support plate (42). The support blocks (43) are evenly distributed on the surface of the support plate (42).

5. A chip positioning support stage for a mask alignment exposure machine according to claim 1, characterized in that: The support block (43) and the placement groove (31) are connected in a one-to-one correspondence, and the support plate (42) is slidably connected to the placement plate (3) through the moving groove (41).

6. A chip positioning support stage for a mask alignment exposure machine according to claim 1, characterized in that: The two ends of the support spring (44) are fixedly connected to the surface of the support plate (42) and the inner wall of the moving groove (41). The support plate (42) is elastically slidably connected to the moving groove (41) through the support spring (44).

7. A chip positioning support stage for a mask alignment exposure machine according to claim 1, characterized in that: The abutment plate (5) is elastically connected by a spring (52) and a placement groove (31). The limiting strip (51) is semi-circular in shape and is evenly distributed on the outer surface of the abutment plate (5).

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