An electric control cabinet positive pressure protection system for a vacuum pump integrated machine

Abstract

This disclosure proposes a positive pressure protection system for the electrical control cabinet of a vacuum pump integrated machine, belonging to the technical field of electrical control cabinets. The system includes a pneumatic control component and a display component located outside the electrical control cabinet, and a data monitoring component located inside the electrical control cabinet. The pneumatic control component includes a mounting plate, a gas source pipeline, a flow meter, a micro-differential pressure sensor, and an exhaust valve. The gas source pipeline is connected to the electrical control cabinet to introduce inert gas into the cabinet. The flow meter, located on the gas source pipeline, detects the gas flow rate. The two ports of the micro-differential pressure sensor are located inside and outside the electrical control cabinet, respectively, to detect the pressure difference between the inside and outside of the cabinet. The exhaust valve is used to discharge gas from inside the electrical control cabinet. The data monitoring component is connected to the micro-differential pressure sensor and the flow meter, respectively, to determine the operating status of the vacuum pump integrated machine based on the pressure difference and the gas flow rate, and also to drive the display component to display corresponding alarm information based on the operating status of the vacuum pump integrated machine. The system provides positive pressure protection and heat dissipation for the electrical control cabinet.

Description

Technical Field

[0001] This disclosure belongs to the field of electrical control cabinet technology, specifically relating to a positive pressure protection system for an electrical control cabinet used in a vacuum pump integrated machine. Background Technology

[0002] A vacuum pump integrated machine (referred to as an integrated machine) is an integrated device that combines a vacuum pump, gas emission reduction, and gas, water, and electrical control into one unit. It is an important piece of equipment used in the semiconductor manufacturing industry. Its core function is to provide a clean and controllable vacuum environment while handling process waste, ensuring process precision and product yield. Semiconductor manufacturing is a very complex and precise process that generates various gases throughout the process, including flammable and explosive gases. These gases are uniformly fed into the integrated machine, treated, and then discharged to the plant. The machine uses pipes, connectors, reaction chambers, and other devices to transport and process the gases. When these gases leak, some cannot be promptly removed by the plant exhaust and may flow into the electrical control cabinet. The electrical control cabinet contains all electronic components, and when the concentration of these flammable and explosive gases reaches a certain level, there is a risk of fire. Utility Model Content

[0003] This disclosure aims to at least solve one of the technical problems existing in the prior art, and to provide a positive pressure protection system for the electrical control cabinet of a vacuum pump integrated machine.

[0004] This disclosure provides a positive pressure protection system for the electrical control cabinet of a vacuum pump integrated machine, including: a gas path control component and a display component located outside the electrical control cabinet, and a data monitoring component located inside the electrical control cabinet; wherein, The gas path control assembly includes a mounting plate, a gas source pipeline disposed on the mounting plate, a flow meter and a micro differential pressure sensor, and an exhaust valve located in the electrical control cabinet; The gas source pipeline is connected to the electrical control cabinet and is used to introduce inert gas into the electrical control cabinet. The flow meter is located in the gas source pipeline and is used to detect the gas source flow. The two ports of the micro differential pressure sensor are located inside and outside the electrical control cabinet, respectively, and are used to detect the pressure difference inside and outside the electrical control cabinet. The exhaust valve is used to discharge the gas inside the electrical control cabinet. The data monitoring component is connected to the micro differential pressure sensor and the flow meter respectively, and is used to determine the operating status of the vacuum pump unit based on the differential pressure and the gas source flow rate. It is also used to drive the display component to display corresponding alarm information based on the operating status of the vacuum pump unit.

[0005] Optionally, the gas source pipeline is sequentially equipped with an inlet valve, a digital display pressure regulator, the flow meter, and a flow-limiting gasket along the gas flow direction; wherein, The intake valve is used to control the inert gas source to enter the gas source pipeline, the digital display pressure regulator is used to adjust the input pressure of the inert gas source, and the flow limiting gasket is used to adjust the inert gas source flow rate according to the input pressure and gas source flow rate.

[0006] Optionally, the mounting plate is further provided with the pneumatic control component, which is connected to the air inlet valve and the data monitoring component respectively, and is used to control the state of the air inlet valve according to the operating state of the vacuum pump integrated machine. The state of the air inlet valve is any one of open, closed, and transition.

[0007] Optionally, the pneumatic control component is a valve island.

[0008] Optionally, the display component includes a tower light; wherein, When the integrated vacuum pump is operating normally, the tower light displays the first color; When the vacuum pump unit is operating abnormally, the tower light displays a second color, which is different from the first color. Optionally, the display component further includes a first alarm, which emits a first alarm signal when the vacuum pump unit malfunctions.

[0009] Optionally, the display component further includes a second alarm that emits a second alarm signal when the pressure inside the electrical control cabinet drops to a minimum threshold.

[0010] Optionally, the display component further includes an operation panel connected to the data monitoring component for displaying the operating status, differential pressure, and gas source flow of the integrated vacuum pump.

[0011] Optionally, the exhaust valve is an exhaust speed control valve, which is configured to limit the flow rate of the gas source flowing out of the electrical control cabinet to be less than the flow rate of the gas source flowing in.

[0012] Optionally, the data monitoring component includes a CPU, a data transmission module, a relay, and a power supply; wherein, The data transmission module is connected to the differential pressure sensor, the flow meter, the CPU, the relay, and the display component, respectively. The relay is also connected to the pneumatic control component; The power supply is used to supply power to the CPU, the data transmission module, and the relay.

[0013] This disclosure proposes a positive pressure protection system for the electrical control cabinet of a vacuum pump integrated machine, comprising: a gas path control component and a display component located outside the electrical control cabinet, and a data monitoring component located inside the electrical control cabinet; wherein, the gas path control component includes a mounting plate, a gas source pipeline disposed on the mounting plate, a flow meter and a micro differential pressure sensor, and an exhaust valve located on the top of the electrical control cabinet; the gas source pipeline is connected to the electrical control cabinet for introducing inert gas into the electrical control cabinet, the flow meter is located on the gas source pipeline for detecting the gas source flow rate, the two ports of the micro differential pressure sensor are respectively located inside and outside the electrical control cabinet for detecting the pressure difference inside and outside the electrical control cabinet, and the exhaust valve is used to discharge gas inside the electrical control cabinet; the data monitoring component is connected to the micro differential pressure sensor and the flow meter respectively, for determining the operating status of the vacuum pump integrated machine based on the pressure difference and the gas source flow rate, and also for driving the display component to display corresponding alarm information based on the operating status of the vacuum pump integrated machine. The positive pressure protection system of this disclosure provides positive pressure protection for the electrical control cabinet and also has a heat dissipation function, replacing the current structure of the cabinet's internal cooling fan. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the positive pressure protection system for the electrical control cabinet according to a specific embodiment of this disclosure. Detailed Implementation

[0015] To enable those skilled in the art to better understand the technical solutions of this disclosure, the disclosure will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain this disclosure and represent a part of the embodiments of this disclosure, not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the protection scope of this disclosure.

[0016] like Figure 1As shown, this disclosure proposes a positive pressure protection system for the electrical control cabinet of a vacuum pump integrated machine. The positive pressure protection system includes: a pneumatic control component 110 and a display component 120 located outside the electrical control cabinet 100, and a data monitoring component 130 located inside the electrical control cabinet 100. The pneumatic control component 110 includes a mounting plate 111, a gas source pipeline mounted on the mounting plate 111, a flow meter 115, and a micro-differential pressure sensor 118, as well as an exhaust valve 119 located inside the electrical control cabinet 100. One end of the gas source pipeline is provided with a gas source interface 112 for introducing an inert gas source, and the other end is connected to the interior of the electrical control cabinet 100. The flow meter 115 is located in the gas source pipeline and is used to detect the gas flow rate in the gas source pipeline. The two ports of the micro differential pressure sensor 118 are located inside and outside the electrical control cabinet 100, respectively, and are used to detect the pressure difference inside and outside the electrical control cabinet 100. The exhaust valve 119 is used to discharge the gas inside the electrical control cabinet 100. The data monitoring component 130 is connected to the micro differential pressure sensor 118 and the flow meter 115, respectively, and is used to determine the operating status of the vacuum pump unit based on the pressure difference and the gas source flow rate. It is also used to drive the display component 120 to display corresponding alarm information based on the operating status of the vacuum pump unit.

[0017] In response to the various gases generated during semiconductor manufacturing processes, and to prevent some gases from entering the electrical control cabinet, this embodiment adds a gas path control component and other structures to the outside of the electrical control cabinet. This allows an inert gas source to be continuously supplied to the electrical control cabinet, forming a gas barrier. At the same time, the gas inside the electrical control cabinet is discharged outward, forming a directional flow to prevent the intrusion of external dangerous gases and to remove the heat generated by electronic components.

[0018] Furthermore, such as Figure 1 As shown, the gas source pipeline is sequentially equipped with a gas source interface 112, an inlet valve 113, a digital display pressure regulator 114, a flow meter 115, and a flow-limiting gasket 116 along the gas source flow direction. The gas source interface 112 serves as the inlet for the inert gas source. The inlet valve 113 controls the inert gas source entering the gas source pipeline. The digital display pressure regulator 114 adjusts the input pressure of the inert gas source. The flow meter 115 detects the inert gas flow rate in the gas source pipeline. The digital display pressure regulator 114 adjusts the gas source flow rate based on the input pressure and gas source flow rate. The flow-limiting gasket 116 works in conjunction with the digital display pressure regulator 114 and the flow meter 115 to adjust the inert gas flow rate.

[0019] It should be noted that nitrogen can be used as the inert gas source in this embodiment. Nitrogen continuously flows into the electrical control cabinet through the gas path control component, maintaining a positive pressure by ensuring the internal pressure is slightly higher than the external environment. This pressure difference ensures that external gases cannot seep into the cabinet through gaps or openings. Simultaneously, a micro-pressure differential sensor monitors the pressure in real time and dynamically adjusts the nitrogen flow rate to maintain a stable positive pressure. Furthermore, the nitrogen carries away heat generated by the electronic components inside the electrical control cabinet during its flow.

[0020] It should be further noted that this embodiment does not specifically limit the mounting plate, such as stainless steel plate, etc., for supporting the flow meter, air source interface, micro differential pressure sensor, digital display pressure regulator, etc.

[0021] Furthermore, such as Figure 1 As shown, the mounting plate 111 is also provided with a pneumatic control component 117, which is connected to the air intake valve 113 and the data monitoring component 130 respectively, and is used to control the state of the air intake valve 113 according to the operating status of the vacuum pump integrated machine. The state of the air intake valve is any one of open, closed and transition.

[0022] It should be noted that this embodiment does not specifically limit the intake valve, exhaust valve, and pneumatic control components. For example, the intake valve can be a diaphragm valve, and the exhaust valve can be an exhaust speed control valve. This exhaust speed control valve is configured to limit the flow rate of the air source flowing out of the control cabinet to be less than the flow rate of the air source flowing in, ensuring the internal pressure of the cabinet while also having a heat dissipation function to prevent the internal temperature of the cabinet from becoming too high. The pneumatic control components are valve islands.

[0023] It should be noted that, for better sealing, sealing strips can be installed at the cabinet door of the electrical control cabinet, and through-core connectors or through-plate connectors can be used at the openings.

[0024] It should be noted that this embodiment does not impose specific limitations on the connection methods of the gas source pipeline, the micro differential pressure sensor, and the exhaust valve to the electrical control cabinet, as long as they are connected and sealed. For example, the gas source pipeline can be connected to the electrical control cabinet using a through-plate connector, and the micro differential pressure sensor can be connected to the electrical control cabinet using a through-core connector. In this way, by installing through-plate connectors at the wiring holes or gas pipe openings in the electrical control cabinet, external flammable and explosive gases can be effectively prevented from seeping into the cabinet through gaps, ensuring the reliability of the positive pressure protection system, while allowing gas or cables to pass through the cabinet without compromising the protection level. The exhaust valve can be an exhaust speed control valve with a built-in connector, which achieves both sealing of the cabinet and timely gas discharge.

[0025] Furthermore, such as Figure 1 As shown, the display component 120 includes a tower light 121; wherein, when the vacuum pump unit is operating normally, the tower light 121 displays a first color; when the vacuum pump unit is operating abnormally, the tower light 121 displays a second color, which is different from the first color.

[0026] It should be understood that the tower light can be located on top of the electrical control cabinet, or it can be installed in other locations, as long as it is easily visible to staff. Additionally, the primary color can be green, and the secondary color can be red.

[0027] Furthermore, such as Figure 1As shown, the display component 120 also includes a first alarm 122, which emits a first alarm signal when the vacuum pump unit is in an abnormal operating state.

[0028] Furthermore, such as Figure 1 As shown, the display component 120 also includes a second alarm 123, which emits a second alarm signal when the internal pressure of the electrical control cabinet 100 drops to the lowest threshold.

[0029] It should be noted that the first and second alarms in this embodiment can also be located on the top of the electrical control cabinet or in other locations. In addition, the first and second alarms can be set up separately or integrated into one alarm. The alarm signal can be a buzzer or other alarm methods. Of course, the first and second alarms can also be integrated into the tower light. For example, when the system is abnormal, the tower light displays red and emits a buzzer alarm signal.

[0030] Furthermore, such as Figure 1 As shown, the display component 120 also includes an operation panel 124 connected to the data monitoring component 130, which is used to display the operating status of the vacuum pump unit, differential pressure and gas source flow. Of course, it can also be used to display information such as the operating status of the electrical control cabinet equipment.

[0031] It should be noted that the operation panel includes a display module, an input module, and a communication interface. The display module can be a touch screen or an LCD screen, used to display the real-time operating status of the vacuum pump unit, including the pressure difference between inside and outside the cabinet, the pressure inside the cabinet, the air source flow rate, the working mode of the electrical control cabinet equipment, and the status of the positive pressure protection system. The input module can be a touch button or a physical button. For example, the pressure difference data and the minimum pressure threshold can be preset through the input module. The communication interface connects with the data monitoring component to achieve bidirectional data transmission.

[0032] Furthermore, such as Figure 1As shown, the data monitoring component 130 includes a CPU 131, a communication module 132, an input / output module (IO module) 133, an analog input module (AI module) 134, a switch 135, a 24V power supply 136, and a relay 137. The IO module 133 and AI module 134 serve as data transmission modules. The AI ​​module 134 is used to connect to the micro differential pressure sensor 118 and the CPU, respectively, to transmit differential pressure information to the CPU 131. Furthermore, the IO module 133 is used to communicate with the flow meter 115, the CPU 131, and the relay. The flow meter is connected to module 137 to transmit its detection data to the CPU, which then transmits the processed data to a relay. The relay then controls the pneumatic control components. The CPU is also connected to switch 135 via communication module 132, and switch 135 is connected to display module 120 via communication module 132. This allows the CPU to transmit processed data, such as air flow data detected by the flow meter, differential pressure data detected by the differential pressure sensor, and equipment operating data, to the display module's control panel for real-time monitoring. Additionally, a 24V power supply 136 powers the CPU 131, IO module 133, AI module 134, and relay 137.

[0033] It should be noted that the communication module in this embodiment can be a network cable, used to connect devices such as the communication module switch, operation panel, and CPU. When using a network cable, a through-core connector can be used for connection. Of course, the communication module can also be a WiFi router.

[0034] It should be further noted that, in this embodiment, the data monitoring component can be installed separately inside the electrical control cabinet, or it can be integrated into the control unit built into the electrical control cabinet, meaning that the positive pressure protection system of the electrical control cabinet is shared with the main control unit of the equipment. In other words, this embodiment mainly adds structures such as air path control components and display components to the outside of the electrical control cabinet, and ensures that external gas cannot enter the electrical control cabinet by using directional air flow, while ensuring the heat dissipation and positive pressure protection requirements of the electrical control cabinet.

[0035] The positive pressure protection system disclosed herein has both positive pressure protection and heat dissipation functions. It can also be linked to the equipment operating status, reducing equipment disassembly and restoration time and facilitating later maintenance and upkeep. Furthermore, the air source treatment entering the cabinet is in a continuous flow state, replacing the function of the cabinet cooling fan.

[0036] The working process of the positive pressure protection system for the electrical control cabinet will be further explained below with reference to specific embodiments: Example 1 Combined Figure 1 As shown, the working process of the positive pressure protection system of the electrical control cabinet is as follows: 1. Nitrogen flows into the gas source pipeline through the gas source interface 112. When it reaches the inlet of the inlet valve 113, it waits for the inlet valve 113 to open. The inlet valve is preferably a diaphragm valve. 2. The two ports of the micro differential pressure sensor 118 are located inside and outside the electrical control cabinet 100, respectively, to detect the pressure difference inside and outside the electrical control cabinet 100 in real time, and transmit the pressure difference data to the CPU 131 through the AI ​​module 134; 3. When the differential pressure detection value of the micro differential pressure sensor 118 does not reach the set value on the operation panel 124, the CPU 131 issues a command, which is transmitted to the relay 137 through the IO module 133. The relay 137 then controls the pneumatic control component 117, which preferably controls the valve island, and the valve island then controls the diaphragm valve to open. 4. When the diaphragm valve opens, nitrogen flows sequentially along the gas source pipeline into the digital display pressure regulator 114, flow meter 115, and flow limiting gasket 116. The pressure and flow rate are fed back to the CPU 131 in real time through the IO module 133. The CPU 131 judges the operating status of the vacuum pump unit based on the previously issued instructions, the received feedback, and the current operating status of the electrical control cabinet equipment. If it is normal, the tower light 121 displays green; if it is abnormal, the tower light 121 displays red and emits a buzzer.

[0037] 5. The top of the electrical control cabinet is equipped with an adjustable speed exhaust valve 119, which makes the inflow gas velocity greater than the outflow gas velocity, ensuring the pressure difference while also dissipating heat from inside the cabinet. 6. After the electrical control cabinet equipment is operating normally, the system will continuously monitor it. If the pressure drops to the low alarm threshold, the control system will issue an early warning, prompting the operator to check the gas source or for leaks.

[0038] It should be noted that the operating status of the electrical control cabinet equipment includes the following modes: production operation, standby, shutdown, maintenance, and upkeep. The operating status of the integrated vacuum pump includes the overall operating status of the electrical control cabinet equipment and the positive pressure protection system. The integrated vacuum pump operating status includes the following two normal modes: First, when the electrical control cabinet equipment is in production operation or standby mode, the CPU of the positive pressure protection system issues a command to open the diaphragm valve, introducing nitrogen gas. Simultaneously, data feedback is received: the differential pressure value detected by the micro-differential pressure sensor is within the range, and the gas source flow rate detected by the flow meter is within the range. In this case, the integrated vacuum pump operating status is normal. Second, when the electrical control cabinet equipment is in shutdown, maintenance, or upkeep mode, the CPU of the positive pressure protection system issues a command to close the diaphragm valve, stopping the nitrogen gas supply. Simultaneously, data feedback is received: the differential pressure data detected by the micro-differential pressure sensor is not evaluated, and the flow meter reading is 0. In this case, the integrated vacuum pump operating status is normal. Apart from the above two situations, the integrated vacuum pump operating status is abnormal under all other conditions. In other words, the tower light will display green in the two situations mentioned above, and will display red and sound an alarm in other situations.

[0039] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of this disclosure, and this disclosure is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and substance of this disclosure, and these modifications and improvements are also considered to be within the scope of protection of this disclosure.

Claims

1. A positive pressure protection system for the electrical control cabinet of a vacuum pump integrated machine, characterized in that, include: The pneumatic control and display components are located outside the electrical control cabinet, while the data monitoring components are located inside the electrical control cabinet; among them, The gas path control assembly includes a mounting plate, a gas source pipeline disposed on the mounting plate, a flow meter and a micro differential pressure sensor, and an exhaust valve located in the electrical control cabinet; The gas source pipeline is connected to the electrical control cabinet and is used to introduce inert gas into the electrical control cabinet. The flow meter is located in the gas source pipeline and is used to detect the gas source flow. The two ports of the micro differential pressure sensor are located inside and outside the electrical control cabinet, respectively, and are used to detect the pressure difference inside and outside the electrical control cabinet. The exhaust valve is used to discharge the gas inside the electrical control cabinet. The data monitoring component is connected to the micro differential pressure sensor and the flow meter respectively, and is used to determine the operating status of the vacuum pump unit based on the differential pressure and the gas source flow rate. It is also used to drive the display component to display corresponding alarm information based on the operating status of the vacuum pump unit.

2. The system according to claim 1, characterized in that, The gas source pipeline is sequentially equipped with an inlet valve, a digital pressure regulator, the flow meter, and a flow-limiting gasket along the gas flow direction; wherein... The intake valve is used to control the inert gas source to enter the gas source pipeline, the digital display pressure regulator is used to adjust the input pressure of the inert gas source, and the flow limiting gasket is used to adjust the inert gas source flow rate according to the input pressure and gas source flow rate.

3. The system according to claim 2, characterized in that, The mounting plate is also provided with a pneumatic control component, which is connected to the air inlet valve and the data monitoring component respectively, and is used to control the state of the air inlet valve according to the operating status of the vacuum pump integrated machine. The state of the air inlet valve is any one of open, closed, and transition.

4. The system according to claim 3, characterized in that, The pneumatic control component is a valve island.

5. The system according to claim 1, characterized in that, The display component includes a tower light; wherein... When the integrated vacuum pump is operating normally, the tower light displays the first color; When the vacuum pump unit is operating abnormally, the tower light displays a second color, which is different from the first color.

6. The system according to claim 1, characterized in that, The display component includes a first alarm, which emits a first alarm signal when the vacuum pump unit malfunctions.

7. The system according to claim 1, characterized in that, The display component includes a second alarm that emits a second alarm signal when the pressure inside the electrical control cabinet drops to a minimum threshold.

8. The system according to claim 1, characterized in that, The display component includes an operation panel connected to the data monitoring component, used to display the operating status, differential pressure, and gas source flow of the integrated vacuum pump.

9. The system according to claim 1, characterized in that, The exhaust valve is an exhaust speed control valve, which is configured to limit the flow rate of the gas source flowing out of the electrical control cabinet to be less than the flow rate of the gas source flowing in.

10. The system according to claim 3, characterized in that, The data monitoring component includes a CPU, a data transmission module, a relay, and a power supply; wherein, The data transmission module is connected to the differential pressure sensor, the flow meter, the CPU, the relay, and the display component, respectively. The relay is also connected to the pneumatic control component; The power supply is used to supply power to the CPU, the data transmission module, and the relay.

Images