A multi-cavity radio frequency processing system

Abstract

The multi-cavity radio frequency processing system belongs to the technical field of radio frequency power sources, and solves the problems of synchronous use, synchronous processing, and processing of parameters such as same power in the existing multi-cavity system. A multi-cavity radio frequency processing system comprises Q power sources, power distributors, matching modules, and N cavities; wherein the output end of each power source is connected to the input end of the power distributor one by one; each power distributor comprises N output ends; the nth output end of all power distributors is connected to the input end of the nth matching module, and the output end of the nth matching module is connected to the nth cavity; wherein at least one power source is a radio frequency bias power source, and the rest of the power sources are radio frequency power sources; Q and N are both integers greater than 1, and n is 1 to N.

Description

Technical Field

[0001] This utility model relates to the field of radio frequency power supply technology, and in particular to a multi-cavity radio frequency processing system. Background Technology

[0002] In modern industrial production, radio frequency (RF) processing technology is widely used in materials processing, surface treatment, plasma generation, and other fields. Traditional RF processing systems typically employ a single power supply and a single cavity design. While this design is simple in structure, it suffers from uneven energy distribution and low processing efficiency when handling large-area or complex-shaped workpieces. Furthermore, single-cavity systems lack flexibility when facing different materials and process requirements, making it difficult to meet diverse production needs.

[0003] With the continuous development of industrial technology, the requirements for radio frequency (RF) processing systems are becoming increasingly stringent. Especially in high-end manufacturing fields such as semiconductor manufacturing and aerospace material processing, an RF processing system capable of providing high uniformity, high efficiency, and high flexibility is needed. However, existing single-cavity RF processing systems are insufficient to meet these requirements; therefore, developing a multi-cavity RF processing system has become an important research direction.

[0004] Currently, although some systems attempt to distribute a single power supply to multiple cavities, these systems suffer from numerous problems, such as difficulty in synchronous use, processing, and power control of the cavities. These issues hinder the achievement of uniform processing in plasma technology, limiting the application of multi-cavity systems in industrial production. Utility Model Content

[0005] Based on the above analysis, this utility model aims to provide a multi-cavity radio frequency processing system to solve the problems of synchronous use, synchronous processing, and equal power parameter processing in existing multi-cavity systems.

[0006] The objective of this utility model is mainly achieved through the following technical solutions:

[0007] This invention provides a multi-cavity radio frequency processing system, the system comprising: Q power sources, a power divider, a matching module, and N cavities; wherein,

[0008] The output of each power source is connected to the input of the power divider in a one-to-one correspondence.

[0009] Each power divider includes N output terminals; the nth output terminal of all power dividers is connected to the input terminal of the nth matching module, and the output terminal of the nth matching module is connected to the nth cavity;

[0010] Among them, at least one power source is an RF bias power source, and the rest of the power sources are RF power sources; Q and N are both integers greater than 1, and n takes the range of 1 to N.

[0011] Based on the above solution, the present invention also makes the following improvements:

[0012] Furthermore, the matching module includes Q matching networks; wherein,

[0013] The nth output of each power divider is connected one-to-one with the input of the Q matching networks in the nth matching module;

[0014] The Q outputs of the Q matching networks in the nth matching module are connected to the nth cavity.

[0015] Furthermore, the power divider includes a signal receiving channel and N transmission line transformers; wherein,

[0016] The signal receiving channel includes one signal input port and N transmission ports; each transmission line transformer includes two signal output ports and one transmission port; wherein,

[0017] The N transmission ports of the signal receiving channel are connected one-to-one with the transmission ports of the N transmission line transformers.

[0018] Furthermore, the power divider also includes N groups of series resistors; wherein,

[0019] A series resistor bank is connected between each of the two signal output ports of the transmission line transformer.

[0020] Furthermore, the signal receiving channel includes: N signal channels, N isolation resistors, and a capacitor module; wherein,

[0021] The first port of each of the signal channels is connected to the first port of an isolation resistor, and the second ports of the N isolation resistors are interconnected.

[0022] The second ports of the N signal channels are all connected to the first port of the capacitor module, and the second port of the capacitor module is grounded.

[0023] The first port of each of the signal channels is used as a transmission port of the signal receiving channel; the connection point of the second ports of the N signal channels is used as the signal input port of the signal receiving channel.

[0024] Furthermore, the capacitor module includes M series capacitor groups, and the M series capacitor groups are connected in parallel; one end of the M series capacitor groups connected in parallel is used as the first port of the capacitor module, and the other end of the M series capacitor groups connected in parallel is used as the second port of the capacitor module.

[0025] Furthermore, the signal channel includes a parallel capacitor bank and a first inductor; wherein, one end of the parallel capacitor bank is used as the first port of the signal channel, one end of the parallel capacitor bank is also connected to one end of the first inductor, and the other end of the first inductor is used as the second port of the signal channel; the other end of the parallel capacitor bank is grounded.

[0026] Furthermore, both the parallel capacitor bank and the series capacitor bank include two or more capacitors, and the series resistor bank includes two or more resistors.

[0027] Furthermore, the signal receiving channel is implemented using a 1-to-N Wilkinson splitter.

[0028] Furthermore, the system also includes a radio frequency source, a radio frequency power combiner, a broadband amplifier, and a radio frequency power splitter connected in sequence, with the radio frequency power splitter outputting the Q power sources.

[0029] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects:

[0030] The multi-cavity radio frequency processing system provided by this utility model can achieve the following technical effects:

[0031] (1) Significantly Improved Energy Distribution Uniformity: By employing multiple power sources and power dividers, combined with a carefully designed matching module, this invention ensures that each cavity receives stable and uniform RF energy. The output of each power divider is connected one-to-one with the input of the matching module, ensuring precise energy distribution. Furthermore, multiple matching networks in the matching module further optimize energy transmission efficiency, resulting in a more uniform energy distribution in each cavity, thereby significantly improving processing quality.

[0032] (2) Significantly improved processing efficiency: The multi-cavity design enables the system to process multiple workpieces or different parts of workpieces simultaneously, greatly improving processing efficiency. By rationally allocating radio frequency power, this invention achieves synchronous and efficient operation of multiple cavities, which improves processing efficiency several times compared to traditional single-cavity systems, meeting the needs of large-scale production.

[0033] (3) Significantly enhanced system flexibility: The system design of this invention is highly flexible. By adjusting the output power and frequency of the power source and the parameters of the matching module, it can easily adapt to the requirements of different materials and processes. In addition, the system can flexibly configure the number of cavities and the number of power sources according to actual needs, further improving the applicability and flexibility of the system.

[0034] (4) Significantly improved multi-cavity synchronous processing capability: Through the collaborative design of the power divider and the matching module, this invention ensures that all cavities can be used and processed synchronously, and operate under the same power and frequency parameters. The multi-output design of the power divider and the multi-matching network design of the matching module enable each cavity to obtain the same radio frequency power and frequency, thereby achieving uniform processing in plasma technology.

[0035] (5) Enhanced system stability: In the multi-cavity design, each cavity has an independent matching network, which not only improves the uniformity of energy distribution but also enhances system stability. Even if one cavity fails, the other cavities can still operate normally, thereby reducing the risk of production interruption and improving system reliability.

[0036] (6) Optimized power distribution method: This utility model can also achieve efficient power signal distribution by optimizing the design of the power distributor; at the same time, it can suppress signal reflection and standing waves, and ensure the stable signal quality after distribution; effectively improve the efficiency and reliability of distribution, and meet the application requirements of multi-port output.

[0037] In summary, the multi-cavity radio frequency processing system provided by this utility model has achieved significant improvements in energy distribution uniformity, processing efficiency, system flexibility, and multi-cavity synchronous processing capability. It can meet the high requirements of modern industrial production for radio frequency processing systems and has broad application prospects.

[0038] In this invention, the above-described technical solutions can be combined with each other to achieve more preferred combinations. Other features and advantages of this invention will be set forth in the following description, and some advantages will become apparent from the description or be learned by practicing this invention. The objectives and other advantages of this invention can be realized and obtained from the details specifically pointed out in the text and accompanying drawings. Attached Figure Description

[0039] The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of the invention. Throughout the drawings, the same reference numerals denote the same parts.

[0040] Figure 1 This is a schematic diagram of the structure of the multi-cavity radio frequency processing system provided in an embodiment of the present invention;

[0041] Figure 2 A schematic diagram of the power divider provided in an embodiment of this utility model;

[0042] Figure 3 Circuit diagram of a power divider provided in an embodiment of this utility model;

[0043] Figure 4 A schematic diagram of the structure of a second multi-cavity radio frequency processing system (for a specific cavity) provided in an embodiment of this utility model;

[0044] Figure 5 A schematic diagram of the structure of a third multi-cavity radio frequency processing system (for a specific cavity) provided in an embodiment of this utility model;

[0045] Figure 6 A schematic diagram of the structure of the fourth multi-cavity radio frequency processing system (for a specific cavity) provided in the embodiments of this utility model;

[0046] Figure 7 A schematic diagram of the structure of the fifth multi-cavity radio frequency processing system (for a specific cavity) provided in the embodiment of this utility model;

[0047] Figure 8 A schematic diagram of the structure of the sixth multi-cavity radio frequency processing system (for a specific cavity) provided in this embodiment of the present invention;

[0048] Figure 9 A schematic diagram of the structure of the seventh multi-cavity radio frequency processing system (for a specific cavity) provided in the embodiment of this utility model;

[0049] Figure 10 A schematic diagram of the structure of the eighth multi-cavity radio frequency processing system (for a specific cavity) provided in this embodiment of the present invention;

[0050] Figure 11 A schematic diagram of the structure of the ninth multi-cavity radio frequency processing system (for a specific cavity) provided in this embodiment of the present invention;

[0051] Figure 12 A schematic diagram of the structure of the tenth multi-cavity radio frequency processing system (for a specific cavity) provided in this embodiment of the present invention;

[0052] Figure 13 A schematic diagram of the structure of the eleventh multi-cavity radio frequency processing system (for a specific cavity) provided in this embodiment of the present invention;

[0053] Figure 14 A schematic diagram of the structure of the twelfth multi-cavity radio frequency processing system (for a specific cavity) provided in this embodiment of the present invention. Detailed Implementation

[0054] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which constitute a part of this application and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not intended to limit the scope of the present invention.

[0055] A specific embodiment of this utility model discloses a multi-cavity radio frequency processing system, the structural schematic diagram of which is shown below. Figure 1 As shown, the structural schematic diagram of the second type of multi-cavity radio frequency processing system (for a specific cavity) is as follows. Figure 4 As shown. The system includes: Q power sources, power dividers, matching modules, and N cavities; wherein, the output terminal of each power source is connected to the input terminal of the power divider in a one-to-one correspondence; each power divider includes N output terminals; the nth output terminal of all power dividers is connected to the input terminal of the nth matching module, and the output terminal of the nth matching module is connected to the nth cavity; wherein, at least one power source is an RF bias power source, and the remaining power sources are RF power sources; Q and N are both integers greater than 1, and n takes values ​​from 1 to N.

[0056] It should be noted that the cavity described in this embodiment can be a single plasma cavity or one of the processing chambers of a plasma processing device with multiple processing chambers.

[0057] Preferably, the matching module includes Q matching networks; wherein, the nth output terminal of each power divider is connected one-to-one with the input terminal of the Q matching networks in the nth matching module; and the Q output terminals of the Q matching networks in the nth matching module are respectively connected to the nth cavity.

[0058] Preferably, the structural schematic diagram of the power divider is as follows: Figure 2 As shown. The power divider includes a signal receiving channel and N transmission line transformers; wherein, the signal receiving channel includes one signal input port and N transmission ports; each transmission line transformer includes two signal output ports and one transmission port; wherein, the N transmission ports of the signal receiving channel are connected one-to-one with the transmission ports of the N transmission line transformers.

[0059] Preferably, the power divider further includes N series resistor groups; wherein, a series resistor group is connected between the two signal output ports of each transmission line transformer.

[0060] Preferably, the circuit diagram of the power divider is as follows: Figure 3 As shown. The signal receiving channel includes: N signal channels, N isolation resistors, and a capacitor module; wherein, the first port of each signal channel is connected to the first port of an isolation resistor, and the second ports of the N isolation resistors are interconnected; the second ports of the N signal channels are all connected to the first port of the capacitor module, and the second port of the capacitor module is grounded; the first port of each signal channel is used as a transmission port of the signal receiving channel; and the connection point of the second ports of the N signal channels is used as the signal input port of the signal receiving channel.

[0061] Preferably, the capacitor module includes M series capacitor groups connected in parallel; one end of the parallel connection of the M series capacitor groups serves as the first port of the capacitor module, and the other end serves as the second port of the capacitor module. By setting the series capacitor groups, the overall voltage across the series capacitor groups is the sum of the voltages across each capacitor within the series capacitor group, thereby further enhancing the voltage carrying capacity of the power divider and preventing breakdown. Preferably, the signal channel includes a parallel capacitor group and a first inductor; wherein one end of the parallel capacitor group serves as the first port of the signal channel, one end of the parallel capacitor group is also connected to one end of the first inductor, and the other end of the first inductor serves as the second port of the signal channel; the other end of the parallel capacitor group is grounded. By setting the parallel capacitor group, the overall current across the parallel capacitor group is the sum of the currents across each capacitor within the parallel capacitor group, thereby further enhancing the current carrying capacity of the power divider. Preferably, both the parallel capacitor group and the series capacitor group include two or more capacitors, and the series resistor group includes two or more resistors. exist Figure 3 In the circuit diagram of the power divider shown, the series resistor group includes two resistors, denoted as R1 and R2, with equal resistance values. The parallel capacitor group includes two capacitors, denoted as C1 and C2, whose capacitance values ​​may vary depending on the situation. The series capacitor group includes two capacitors, denoted as C3 and C4, whose capacitance values ​​may vary depending on the situation, but it is necessary to ensure that the equivalent capacitance of each parallel series capacitor group is the same.

[0062] Preferably, the transmission line transformer adopts a microstrip line structure, a coaxial line structure, or a waveguide structure. Preferably, the signal receiving channel is implemented using a 1-to-N Wilkinson splitter.

[0063] Preferably, the system further includes a radio frequency (RF) source, an RF power combiner, a broadband amplifier, and an RF power splitter connected in sequence, with the RF power splitter outputting the Q power sources. Specifically, this embodiment provides multiple methods for generating power sources to allow technicians to select the appropriate method based on specific application scenarios, as detailed below.

[0064] The structural diagram of the third type of multi-cavity radio frequency processing system (for a specific cavity) is shown below. Figure 5 As shown. In Figure 5In this system, a single RF power source provides RF power at multiple frequencies. Specifically, the controller controls RF signal generators F1, F2, and F3 to provide RF signals at frequencies f1, f2, and f3, respectively. The outputs of the three RF signal generators are then combined by a broadband power combiner and sent to a broadband power amplifier. The broadband power amplifier amplifies the combined RF signal and outputs a combined and amplified RF signal with three frequencies f1, f2, and f3. This combined and amplified RF signal is then used by an RF power splitter to obtain different frequency outputs. The RF power splitter can be a low-pass filter, a band-pass filter, and a high-pass filter. Then, the outputs of different filters, such as f1, f2, and f3, are applied to the corresponding power dividers F1, F2, and F3, respectively. In this way, the system can provide three RF power signals using only one amplifier. In use, the controller is used to control the excitation of the RF signal generators.

[0065] The structural diagram of the fourth type of multi-cavity radio frequency processing system (for a specific cavity) is shown below. Figure 6 As shown. Figure 6 and Figure 5 The difference lies in the fact that the outputs of RF signal generators F1 and F2 are combined by a broadband power combiner and then sent to a broadband power amplifier for RF signal amplification. Low-pass and band-pass filters are used to filter the signals to obtain f1 and f2, which are then applied to their respective power dividers F1 and F2. RF signal generator F3, on the other hand, is directly connected to power divider F3 via a separate power amplifier.

[0066] The structural diagram of the fifth type of multi-cavity radio frequency processing system (for a specific cavity) is shown below. Figure 7 As shown. Figure 7 and Figure 5 The difference lies in the fact that the outputs of the low-pass and band-pass filters are connected to a switching circuit, and the output of the switching circuit is then connected to power dividers F1 and F2, respectively. The output of the high-pass filter, however, is directly connected to power divider F3. The switching circuit includes a switch and a shunt capacitor connected to the inputs of the two power dividers F1 and F2. This circuit enables switching between the two frequencies f1 and f2, and matching between the RF power generator and the plasma reaction chamber, transmitting the power from the RF power generator to the plasma reaction chamber and the plasma with minimal reflected power. Through the switching circuit, different frequency combinations f1 and f3 or f2 and f3 can be obtained according to the actual application or process requirements of the plasma reaction.

[0067] The structural diagram of the sixth type of multi-cavity radio frequency processing system (for a specific cavity) is shown below. Figure 8 As shown. Figure 8exist Figure 6 Building upon this foundation, a switching switch directly controlled by the controller is added. This switch is located at the output of the broadband power amplifier and is used to switch between frequencies f1 and f2. The output of the switching switch is connected to a low-pass filter and a band-pass filter, respectively. Using this configuration, the two frequencies can be generated using a common AC-DC power source, a common RF power amplifier, and a common communication system, thereby reducing costs.

[0068] The structural diagram of the seventh type of multi-cavity radio frequency processing system (for a specific cavity) is shown below. Figure 9 As shown. Figure 9 exist Figure 5 Based on this, RF signal generators F2 and F3 are replaced with frequency multipliers / dividers F2 and F3, respectively. The signal from RF signal generator F1 is split, with one part provided to the broadband power combiner and the other part loaded onto the (RF frequency) frequency multiplier / divider F2. The RF frequency multiplier / divider is a device that generates an output signal with a frequency multiplied by a preset factor compared to the corresponding input signal frequency. The output signal frequency of frequency multiplier / divider F2 is f2, part of which is input to the broadband power combiner, and the other part is input to frequency multiplier or divider F3. The output of frequency multiplier / divider F3 is also simultaneously input to the broadband power combiner. For example... Figure 5 In the embodiment shown, the output signal of the broadband power combiner is then amplified and filtered.

[0069] The structural diagram of the eighth type of multi-cavity radio frequency processing system (for a specific cavity) is shown below. Figure 10 As shown. Figure 10 exist Figure 9 Based on this, the signal from the RF signal generator F1 is split, with one part provided to the broadband power synthesizer, and the other part divided into two parts, which are respectively loaded onto the (RF frequency) multipliers / dividers F2 and F3. The multipliers / dividers F2 and F3 are no longer directly connected.

[0070] The structural diagram of the ninth type of multi-cavity radio frequency processing system (for a specific cavity) is shown below. Figure 11 As shown. In Figure 11 In the process, the radio frequency signal generators F1, F2, and F3 are implemented using a 13.56M signal generator, a 27.12M second-harmonic signal generator, and a 40.68M third-harmonic signal generator, respectively.

[0071] The structural diagram of the tenth type of multi-cavity radio frequency processing system (for a specific cavity) is shown below. Figure 12 As shown. Figure 10 and Figure 6 This combination creates a new variation. Specific implementation methods and effects can be based on... Figure 10 and Figure 6As is foreseeable, I will not elaborate further here.

[0072] The structural schematic diagram of the eleventh type of multi-cavity radio frequency processing system (for a specific cavity) is shown below. Figure 13 As shown. Figure 13 exist Figure 12 Based on this, the frequency multiplier / divider F3 is replaced with the radio frequency power source F3, which is directly controlled by the controller and is no longer controlled by the radio frequency signal generator F1.

[0073] The structural diagram of the twelfth type of multi-cavity radio frequency processing system (for a specific cavity) is shown below. Figure 14 As shown. Figure 14 An implementation of a multi-frequency system without using a synthesizer is provided. Figure 14 In this configuration, an RF signal generator provides an RF signal with a frequency of f1, which is sent to a power amplifier and then to a frequency multiplier / divider F2 via a separate switch. The output of this power amplifier is connected to a power divider F1. The frequency multiplier / divider F2 provides an RF output f2, which is a multiple or division of frequency f1. The frequency-multiplied or divided signal f2 is then sent to another power amplifier via another switch, the output of which is connected to the power divider F2. In this configuration, one, two, or three frequency signals can be sent to the reaction chamber.

[0074] Those skilled in the art will understand that the programs / software involved in the controllers in the above embodiments are common methods in the prior art. For example, existing methods of generating radio frequency signals by controlling a radio frequency signal generator based on control signals can be run in the controller. This utility model does not involve any software improvements. This utility model only requires connecting the various systems with corresponding functions through the connection relationships given in the embodiments of this utility model, which does not involve any program or software improvements. As for the connection methods between the various hardware systems with corresponding functions, they can all be implemented by those skilled in the art using existing technology, and will not be described in detail here.

[0075] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model should be included within the protection scope of the present utility model.

Claims

1. A multi-cavity radio frequency processing system, characterized in that, The system includes: Q power sources, a power distributor, a matching module, and N cavities; wherein, The output of each power source is connected to the input of the power divider in a one-to-one correspondence. Each power divider includes N output terminals; the nth output terminal of all power dividers is connected to the input terminal of the nth matching module, and the output terminal of the nth matching module is connected to the nth cavity; Among them, at least one power source is an RF bias power source, and the rest of the power sources are RF power sources; Q and N are both integers greater than 1, and n takes the range of 1 to N.

2. The multi-cavity radio frequency processing system according to claim 1, characterized in that, The matching module includes Q matching networks; wherein... The nth output of each power divider is connected one-to-one with the input of the Q matching networks in the nth matching module; The Q outputs of the Q matching networks in the nth matching module are connected to the nth cavity.

3. The multi-cavity radio frequency processing system according to claim 1 or 2, characterized in that, The power divider includes a signal receiving channel and N transmission line transformers; wherein... The signal receiving channel includes one signal input port and N transmission ports; each transmission line transformer includes two signal output ports and one transmission port; wherein, The N transmission ports of the signal receiving channel are connected one-to-one with the transmission ports of the N transmission line transformers.

4. The multi-cavity radio frequency processing system according to claim 3, characterized in that, The power divider also includes N groups of series resistors; wherein... A series resistor bank is connected between each of the two signal output ports of the transmission line transformer.

5. The multi-cavity radio frequency processing system according to claim 4, characterized in that, The signal receiving channel includes: N signal channels, N isolation resistors, and a capacitor module; wherein, The first port of each of the signal channels is connected to the first port of an isolation resistor, and the second ports of the N isolation resistors are interconnected. The second ports of the N signal channels are all connected to the first port of the capacitor module, and the second port of the capacitor module is grounded. The first port of each of the signal channels is used as a transmission port of the signal receiving channel; the connection point of the second ports of the N signal channels is used as the signal input port of the signal receiving channel.

6. The multi-cavity radio frequency processing system according to claim 5, characterized in that, The capacitor module includes M series capacitor groups, and the M series capacitor groups are connected in parallel; one end of the M series capacitor groups connected in parallel is used as the first port of the capacitor module, and the other end of the M series capacitor groups connected in parallel is used as the second port of the capacitor module.

7. The multi-cavity radio frequency processing system according to claim 6, characterized in that, The signal channel includes a parallel capacitor bank and a first inductor; wherein, one end of the parallel capacitor bank is used as the first port of the signal channel, one end of the parallel capacitor bank is also connected to one end of the first inductor, and the other end of the first inductor is used as the second port of the signal channel; the other end of the parallel capacitor bank is grounded.

8. The multi-cavity radio frequency processing system according to claim 7, characterized in that, The parallel capacitor bank and the series capacitor bank each include two or more capacitors, and the series resistor bank includes two or more resistors.

9. The multi-cavity radio frequency processing system according to claim 3, characterized in that, The signal receiving channel is implemented using a 1-to-N Wilkinson splitter.

10. The multi-cavity radio frequency processing system according to claim 1, characterized in that, The system also includes a radio frequency source, a radio frequency power combiner, a broadband amplifier, and a radio frequency power splitter connected in sequence, with the radio frequency power splitter outputting the Q power sources.

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