Bi-directional RF power processor, RF power divider and combiner, radio frequency power supply

Abstract

The utility model discloses a kind of two-way RF power processor, RF power distributor and combiner, radio frequency power supply, belong to RF power combiner technical field, solve the problem that existing combiner is difficult to meet high power, multiple-port input and the application scene of strict requirement to volume and loss of problem.A kind of two-way RF power processor, the two-way RF power processor includes: N transmission line transformer, channel multiplexer;Wherein, each the transmission line transformer includes two signal input / output ports, a transmission port;Channel multiplexer includes N transmission ports, a signal input / output port;N the transmission port of the transmission line transformer with the N transmission port of channel multiplexer is connected one by one corresponding;N is the integer greater than 1.

Description

Technical Field

[0001] This utility model relates to the field of RF power combiner technology, and in particular to a bidirectional RF power processor, an RF power divider and combiner, and an RF power supply. Background Technology

[0002] In today's field of radio frequency (RF) power processing, with the ever-increasing demand for high-power output, how to efficiently and stably synthesize multiple power signals within a limited space has become a critical challenge that urgently needs to be overcome. Especially when facing application scenarios with 8-port equal power input and standard power as high as 12KW, or even 15KW or more, the limitations of traditional power processing architectures become increasingly apparent.

[0003] Traditional power processing circuits are often limited by their inherent design principles and structural layout during power processing. On the one hand, to meet high power combining requirements, traditional power processing circuits typically require complex circuit designs and a large number of component stacks, directly leading to a significant increase in size. For example, when attempting to achieve 15kW power combining, traditional power combiners often become bulky, making it difficult to meet the stringent space requirements of modern equipment. On the other hand, traditional power combiners suffer from high losses during power transmission. Due to their complex circuit structure, signals need to pass through multiple nodes and components during transmission, causing signal energy to continuously attenuate during transmission, reducing power combining efficiency, increasing system energy consumption, and posing a potential threat to system stability and reliability.

[0004] Furthermore, traditional power processors often struggle to ensure proper matching and isolation between input / output ports when processing multiple input signals. With eight ports receiving equal power input, poor matching and isolation between these ports can lead to signal interference, affecting the quality and accuracy of power combining. This signal interference not only reduces output power stability but can also cause system malfunctions, resulting in numerous inconveniences in practical applications.

[0005] In summary, existing traditional power processor architectures are no longer sufficient to meet the practical needs of applications requiring high power, multiple input / output ports, and stringent size and loss control. Therefore, there is an urgent need for a novel RF power processor architecture that can effectively reduce size and loss while maintaining power processing efficiency and quality, and optimize the matching and isolation performance between input / output ports to adapt to the development trends of modern high-power RF systems. Utility Model Content

[0006] Based on the above analysis, this utility model aims to provide a bidirectional RF power processor, an RF power divider and combiner, and an RF power supply to solve the problem that existing RF power processors are unable to meet the application scenarios with high power, multi-port input / output, and strict requirements on size and loss.

[0007] The objective of this utility model is mainly achieved through the following technical solutions: First, this utility model provides a bidirectional RF power processor, which includes: N transmission line transformers and a channel multiplexer; wherein... Each transmission line transformer includes two signal input / output ports and one transmission port; the channel multiplexer includes N transmission ports and one signal input / output port; the transmission ports of the N transmission line transformers are connected one-to-one with the N transmission ports of the channel multiplexer; N is an integer greater than 1.

[0008] Based on the above solution, the present invention also makes the following improvements: Furthermore, the bidirectional RF power processor also includes N groups of series resistors; wherein, Each of the two signal input / output ports of the transmission line transformer is connected to a series resistor group.

[0009] Furthermore, the channel multiplexer includes: N signal channels, N isolation resistors, and a capacitor module; wherein, The first port of each of the signal channels is connected to the first port of an isolation resistor, and the second ports of the N isolation resistors are interconnected. The second ports of the N signal channels are all connected to the first port of the capacitor module, and the second port of the capacitor module is grounded. The first port of each signal channel is used as a transmission port of the channel multiplexer; the connection point of the second ports of the N signal channels is used as the signal input / output port of the channel multiplexer.

[0010] Furthermore, the capacitor module includes M series capacitor groups, and the M series capacitor groups are connected in parallel; one end of the M series capacitor groups connected in parallel is used as the first port of the capacitor module, and the other end of the M series capacitor groups connected in parallel is used as the second port of the capacitor module.

[0011] Furthermore, the signal channel includes a parallel capacitor bank and a first inductor; wherein, one end of the parallel capacitor bank is used as the first port of the signal channel, one end of the parallel capacitor bank is also connected to one end of the first inductor, and the other end of the first inductor is used as the second port of the signal channel; the other end of the parallel capacitor bank is grounded.

[0012] Furthermore, both the parallel capacitor bank and the series capacitor bank include two or more capacitors, and the series resistor bank includes two or more resistors.

[0013] Secondly, this utility model also provides an RF power divider, which employs the aforementioned bidirectional RF power processor; wherein, The signal input / output port of the channel multiplexer is used to receive radio frequency input signals; Each of the transmission line transformers has two signal input / output ports, which are used to output radio frequency output signals.

[0014] Third, this utility model also provides an RF power combiner, which employs the aforementioned bidirectional RF power processor; wherein... Each of the transmission line transformers has two signal input / output ports, which are used to receive radio frequency input signals. The signal input / output ports of the channel multiplexer are used to output radio frequency output signals.

[0015] Fourth, this utility model also provides an RF power supply, which includes a power amplifier, a combiner, a matching unit and a cavity connected in sequence; wherein the combiner is the above-mentioned RF power combiner.

[0016] Fifth, this utility model also provides a radio frequency power supply, which includes a power amplifier, a combiner, and a cavity connected in sequence; wherein the combiner is the above-mentioned RF power combiner.

[0017] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects: First, the bidirectional RF power processor provided by this invention, through the combination of a transmission line transformer and a channel multiplexer, enables efficient signal transmission and distribution. The series resistor bank suppresses signal reflection and standing waves, improving signal transmission stability. The channel multiplexer's structural design (isolation resistor, capacitor module, parallel capacitor bank, and first inductor) optimizes signal transmission, isolation, and matching, improving power capacity and signal quality. The combination of multiple components enhances overall performance and reliability, meeting the needs of high-power, multi-port input / output applications with strict requirements on size and loss.

[0018] Secondly, the RF power divider provided by this invention, based on an optimized design of a bidirectional RF power processor, can achieve efficient distribution of radio frequency signals. It suppresses signal reflections and standing waves, ensuring stable signal quality after distribution. This improves the efficiency and reliability of power distribution, meeting the application requirements of multi-port output.

[0019] Third, the RF power combiner provided by this invention, based on an optimized design of a bidirectional RF power processor, enables efficient synthesis of radio frequency signals. By suppressing signal reflections and standing waves, it ensures stable signal quality after synthesis. This improves the efficiency and reliability of power synthesis, meeting the application requirements of high-power output.

[0020] The radio frequency power supply proposed in this utility model is based on the above-mentioned RF power combiner and has the corresponding technical effects of the RF power combiner.

[0021] In this invention, the above-described technical solutions can be combined with each other to achieve more preferred combinations. Other features and advantages of this invention will be set forth in the following description, and some advantages will become apparent from the description or be learned by practicing this invention. The objectives and other advantages of this invention can be realized and obtained from the details specifically pointed out in the text and accompanying drawings. Attached Figure Description

[0022] The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of the invention. Throughout the drawings, the same reference numerals denote the same parts.

[0023] Figure 1 A schematic diagram of the structure of the RF power processor provided in specific embodiment 1 of this utility model; Figure 2 A circuit diagram of an RF power processor with N equal to 4 is provided for a specific embodiment 1 of this utility model; Figure 3 This is a schematic diagram of the structure of an RF power divider provided in specific embodiment 2 of this utility model; Figure 4 This is a schematic diagram of the RF power combiner provided in specific embodiment 3 of the present invention; Figure 5 The circuit diagram of the RF power combiner when N is 4 is provided in specific embodiment 3 of this utility model; Figure 6 This is a schematic diagram of the structure of the radio frequency power supply provided in specific embodiment 4 of this utility model; Figure 7 This is a schematic diagram of the structure of the radio frequency power supply provided in specific embodiment 5 of this utility model. Detailed Implementation

[0024] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which constitute a part of this application and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not intended to limit the scope of the present invention.

[0025] Example 1 This embodiment provides a bidirectional RF power processor, the structural diagram of which is shown below. Figure 1 As shown, the bidirectional RF power processor includes: N transmission line transformers and a channel multiplexer; wherein each transmission line transformer includes two signal input / output ports and one transmission port; the channel multiplexer includes N transmission ports and one signal input / output port; the transmission ports of the N transmission line transformers are connected one-to-one with the N transmission ports of the channel multiplexer; N is an integer greater than 1.

[0026] Compared to existing technologies, the bidirectional RF power processor provided in this embodiment utilizes multiple transmission line transformers to jointly process power, effectively distributing the power load and preventing saturation or damage to individual components due to excessive power, thereby achieving higher power output. The channel multiplexer integrates the power from N transmission line transformers and outputs it through its signal input / output ports. This integration method improves the overall power output capability, meeting the needs of high-power applications and stably outputting high-power signals. Furthermore, the transmission line transformers themselves possess excellent electromagnetic isolation characteristics. Signal transmission is achieved through electromagnetic coupling between their two signal input / output ports, and this coupling method can isolate interference between different signals to a certain extent. In the bidirectional RF power processor, each transmission line transformer processes different signal channels, and the signals between different transmission line transformers are independent, thus achieving effective signal isolation. Inside the channel multiplexer, even with the convergence of multiple signal channels, because the signals of each channel have already undergone isolation processing by the transmission line transformers, mutual interference between signals can be further reduced, ensuring signal purity and integrity, and enhancing system reliability.

[0027] Preferably, the bidirectional RF power processor further includes N series resistor groups; wherein one series resistor group is connected between each of the two signal input / output ports of each transmission line transformer. By setting the series resistor groups, high isolation between signals from different input / output ports can be achieved, ensuring that signals from different input / output ports do not interfere with each other.

[0028] Preferably, the channel multiplexer includes: N signal channels, N isolation resistors, and a capacitor module; wherein, the first port of each signal channel is connected to the first port of an isolation resistor, and the second ports of the N isolation resistors are interconnected; the second ports of the N signal channels are connected to the first port of the capacitor module, and the second port of the capacitor module is grounded; the first port of each signal channel is used as a transmission port of the channel multiplexer; and the connection point of the second ports of the N signal channels is used as the signal input / output port of the channel multiplexer.

[0029] Preferably, the capacitor module includes M series capacitor groups connected in parallel; one end of the parallel connection of the M series capacitor groups is used as the first port of the capacitor module, and the other end is used as the second port of the capacitor module. By setting the series capacitor groups, the overall voltage borne by the series capacitor groups is the sum of the voltages borne by each capacitor in the series capacitor group, thereby further enhancing the voltage carrying capacity of the bidirectional RF power processor and preventing breakdown.

[0030] Preferably, the signal channel includes a parallel capacitor bank and a first inductor; wherein one end of the parallel capacitor bank serves as the first port of the signal channel, one end of the parallel capacitor bank is also connected to one end of the first inductor, and the other end of the first inductor serves as the second port of the signal channel; the other end of the parallel capacitor bank is grounded. In this embodiment, the parallel capacitor bank is used to achieve impedance matching. Simultaneously, by setting up the parallel capacitor bank, the total current carried by the parallel capacitor bank is the sum of the currents carried by each capacitor within the parallel capacitor bank, thereby further enhancing the current carrying capacity of the bidirectional RF power processor.

[0031] Preferably, the parallel capacitor bank and the series capacitor bank each include two or more capacitors, and the series resistor bank includes two or more resistors.

[0032] Preferably, the transmission line transformer adopts a microstrip line structure, a coaxial line structure, or a waveguide structure.

[0033] The circuit diagram of the bidirectional RF power processor with N=4 is as follows: Figure 2 As shown. In Figure 2 In a series capacitor bank, there are two resistors, denoted as R1 and R2, with equal resistance values. Similarly, there are two capacitors, denoted as C1 and C2, whose capacitance values ​​may vary depending on the specific configuration. Finally, there are two capacitors, denoted as C3 and C4, whose capacitance values ​​may vary depending on the specific configuration, but it is essential that the equivalent capacitance of all parallel series capacitors is the same.

[0034] Example 2 This embodiment provides an RF power divider, the structural diagram of which is shown below. Figure 3 As shown, the RF power divider adopts the bidirectional RF power processor in Embodiment 1; wherein, the signal input / output port of the channel multiplexer is used to receive RF input signals; and the two signal input / output ports of each transmission line transformer are used to output RF output signals respectively.

[0035] Preferably, the channel multiplexer can also be implemented using a 1-to-N Wilkinson power divider.

[0036] Example 3 This embodiment provides an RF power combiner, the structural schematic of which is shown below. Figure 4 As shown, the RF power combiner uses the bidirectional RF power processor in Embodiment 1; wherein, the two signal input / output ports of each transmission line transformer are used to receive RF input signals respectively; the signal input / output ports of the channel multiplexer are used to output RF output signals.

[0037] The circuit diagram of the RF power combiner when N is 4 is as follows: Figure 5 As shown. In the specific implementation process, the eight input signals are of the same frequency, phase, and amplitude.

[0038] Preferably, the channel multiplexer can also be implemented using an N-in-one Wilkinson power divider.

[0039] It should be noted that in RF circuit design, the input impedance of an RF power combiner typically needs to match the output impedance of the signal source to achieve maximum power transfer. Specifically, if the output impedance of the signal source is 50 ohms (a common standard impedance in RF systems), then the input impedance of the combiner should also be designed to be 50 ohms to ensure that the signal can be transmitted without reflection. In practice, the input terminal of the RF power combiner exhibits an equivalent resistance of 50 ohms at the RF signal frequency. This impedance characteristic is achieved through a combination of resistors and transmission line transformers to ensure effective signal transmission and optimized system performance. In summary, the RF power combiner provided in this embodiment, with appropriate input signal settings, can achieve a maximum output power of 15KW after combining, with a rated power of 12KW.

[0040] Example 4 This embodiment provides a radio frequency power supply, the structural schematic diagram of which is shown below. Figure 6 As shown, the RF power supply includes a power amplifier, a combiner, a matching unit, and a cavity connected in sequence; wherein, the combiner is the RF power combiner in Embodiment 3.

[0041] Example 5 This embodiment provides a radio frequency power supply, the structural schematic diagram of which is shown below. Figure 7 As shown, the radio frequency power supply includes a power amplifier, a combiner, and a cavity connected in sequence; wherein, the combiner is the RF power combiner in Embodiment 3.

[0042] It should be noted that the cavity described in this embodiment can be a single plasma cavity or one of the processing chambers of a plasma processing device with multiple processing chambers.

[0043] The radio frequency power supplies provided in specific embodiments 4 and 5 of this utility model are based on the RF power combiner in embodiment 3 above and have the corresponding technical effects of the RF power combiner.

[0044] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model should be included within the protection scope of the present utility model.

Claims

1. A bidirectional RF power processor, characterized in that, The bidirectional RF power processor includes: N transmission line transformers and a channel multiplexer; wherein... Each transmission line transformer includes two signal input / output ports and one transmission port; the channel multiplexer includes N transmission ports and one signal input / output port; the transmission ports of the N transmission line transformers are connected one-to-one with the N transmission ports of the channel multiplexer; N is an integer greater than 1.

2. The bidirectional RF power processor according to claim 1, characterized in that, The bidirectional RF power processor also includes N groups of series resistors; wherein... Each of the two signal input / output ports of the transmission line transformer is connected to a series resistor group.

3. The bidirectional RF power processor according to claim 2, characterized in that, The channel multiplexer includes: N signal channels, N isolation resistors, and a capacitor module; wherein, The first port of each of the signal channels is connected to the first port of an isolation resistor, and the second ports of the N isolation resistors are interconnected. The second ports of the N signal channels are all connected to the first port of the capacitor module, and the second port of the capacitor module is grounded. The first port of each signal channel is used as a transmission port of the channel multiplexer; the connection point of the second ports of the N signal channels is used as the signal input / output port of the channel multiplexer.

4. The bidirectional RF power processor according to claim 3, characterized in that, The capacitor module includes M series capacitor groups, and the M series capacitor groups are connected in parallel; one end of the M series capacitor groups connected in parallel is used as the first port of the capacitor module, and the other end of the M series capacitor groups connected in parallel is used as the second port of the capacitor module.

5. The bidirectional RF power processor according to claim 4, characterized in that, The signal channel includes a parallel capacitor bank and a first inductor; wherein, one end of the parallel capacitor bank is used as the first port of the signal channel, one end of the parallel capacitor bank is also connected to one end of the first inductor, and the other end of the first inductor is used as the second port of the signal channel; the other end of the parallel capacitor bank is grounded.

6. The bidirectional RF power processor according to claim 5, characterized in that, The parallel capacitor bank and the series capacitor bank each include two or more capacitors, and the series resistor bank includes two or more resistors.

7. An RF power divider, characterized in that, The RF power divider employs a bidirectional RF power processor as described in any one of claims 1-6; wherein... The signal input / output port of the channel multiplexer is used to receive radio frequency input signals; Each of the transmission line transformers has two signal input / output ports, which are used to output radio frequency output signals.

8. An RF power combiner, characterized in that, The RF power combiner employs any one of claims 1-6; wherein... Each of the transmission line transformers has two signal input / output ports, which are used to receive radio frequency input signals. The signal input / output ports of the channel multiplexer are used to output radio frequency output signals.

9. A radio frequency power supply, characterized in that, The radio frequency power supply includes a power amplifier, a combiner, a matching unit, and a cavity connected in sequence; wherein the combiner is the RF power combiner as described in claim 8.

10. A radio frequency power supply, characterized in that, The radio frequency power supply includes a power amplifier, a combiner, and a cavity connected in sequence; wherein the combiner is the RF power combiner as described in claim 8.

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