A heating uniform temperature plate for a cavity
Patent Information
- Application Number
- CN202522330506.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-03
- Publication Date
- 2026-09-29
- Estimated Expiration
- 2035-11-03
AI Technical Summary
然而，此种机械嵌入方式难以保证加热丝与铝板槽道之间的完美贴合，存在接触热阻，导致在真空环境下热量传递不均，均温板表面易出现热点或冷区，影响工艺一致性
[0017]与现有技术相比，本实用新型通过铝熔焊实现铠装加热管与铝合金基板的冶金结合，形成致密密封结构；彻底消除加热管与基板间的接触热阻，实现极高的温度均匀性；铝质密封层完全隔绝反应气体，根本性解决腐蚀问题；结构整体性强，机械强度与抗热冲击性能显著提升；同时兼具铠装加热管电气性能稳定、寿命长的优点，特别适用于高温腐蚀性工艺环境。
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Figure CN224818252U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of temperature equalization plate technology, specifically relating to a heating temperature equalization plate for cavities. Background Technology
[0002] In high-end manufacturing equipment such as photovoltaic PECVD (plasma-enhanced chemical vapor deposition) equipment and semiconductor thin film deposition equipment, the process chamber requires a stable and uniform high-temperature environment to ensure reaction quality. Plate heaters are a key component in achieving this environment.
[0003] Currently, there are two main types of plate heaters: one is the stainless steel plate heater, which uses armored heating wires sandwiched between stainless steel plates. Although it is resistant to high temperatures, it suffers from low thermal conductivity, poor temperature uniformity, large thermal deformation, and susceptibility to corrosion from process gases. The other is the aluminum plate heater, which utilizes the excellent thermal conductivity of aluminum alloy to embed the armored heating wires into channels on the surface of the aluminum plate. However, this mechanical embedding method makes it difficult to ensure a perfect fit between the heating wires and the channels in the aluminum plate, resulting in contact thermal resistance. This leads to uneven heat transfer in a vacuum environment, and hot or cold spots easily appear on the surface of the heat spreader, affecting process consistency.
[0004] In addition, reactive gases (such as fluorine- or chlorine-containing plasma) generated during the process can penetrate into the tiny gaps between the heating wire and the substrate, causing corrosion to the heating element and its protective layer, thus shortening the device's lifespan.
[0005] Therefore, there is an urgent need for a new type of heating heat exchanger structure that can achieve efficient and uniform heat conduction and fundamentally isolate corrosive media.
[0006] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content
[0007] The purpose of this utility model is to provide a heating heat exchange plate for cavities, which has a reasonable structure, short heat conduction path, good temperature uniformity, and excellent corrosion resistance.
[0008] To achieve the above objectives, the technical solution provided by a specific embodiment of this utility model is as follows:
[0009] A heating heat exchanger for a cavity includes an aluminum alloy substrate, a heating assembly, and a temperature measuring element. The aluminum alloy substrate has at least one continuous mounting groove. The heating assembly is an armored heating tube embedded in the mounting groove. The mounting groove and the armored heating tube embedded therein are completely covered and encapsulated by an aluminum molten metal sealing layer. The aluminum molten metal sealing layer is metallurgically bonded to the base material of the aluminum alloy substrate.
[0010] In one or more embodiments of this utility model, the diameter of the armored heating tube is no greater than 8 mm.
[0011] In one or more embodiments of this utility model, the diameter of the armored heating tube is 6 mm or 8 mm.
[0012] In one or more embodiments of this utility model, the cross-sectional shape of the mounting groove is U-shaped, trapezoidal, or rectangular.
[0013] In one or more embodiments of this utility model, the thickness of the aluminum molten metal sealing layer is not less than one-tenth of the diameter of the armored heating tube.
[0014] In one or more embodiments of this utility model, the armored heating tubes are arranged in a serpentine or spiral shape in the mounting groove, and their arrangement path is optimized by thermodynamic simulation to make the surface temperature distribution of the aluminum alloy substrate uniform.
[0015] In one or more embodiments of this utility model, the temperature sensing element is a thermocouple, and its sensing end is fixed to the aluminum alloy substrate through the aluminum molten body sealing layer.
[0016] In one or more embodiments of this utility model, the aluminum alloy substrate is made of 6061 or 7075 aluminum alloy.
[0017] Compared with existing technologies, this invention achieves metallurgical bonding between the armored heating tube and the aluminum alloy substrate through aluminum fusion welding, forming a dense and sealed structure; it completely eliminates the contact thermal resistance between the heating tube and the substrate, achieving extremely high temperature uniformity; the aluminum sealing layer completely isolates the reactive gases, fundamentally solving the corrosion problem; the structure has strong overall integrity, and its mechanical strength and thermal shock resistance are significantly improved; at the same time, it also has the advantages of stable electrical performance and long service life of armored heating tubes, making it particularly suitable for high-temperature and corrosive process environments. Attached Figure Description
[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0019] Figure 1 This is a top view of a cavity heating and temperature equalization plate according to an embodiment of the present invention;
[0020] Figure 2 This is a cross-sectional view of a heating and temperature equalization plate for a cavity in one embodiment of the present invention;
[0021] Figure 3 This utility model Figure 2 A schematic diagram of point A in the middle.
[0022] Explanation of key figure labels:
[0023] 1-Aluminum alloy substrate, 2-Sheathed heating tube, 3-Thermocouple, 4-Mounting groove, 5-Aluminum molten metal sealing layer. Detailed Implementation
[0024] To enable those skilled in the art to better understand the technical solutions in this disclosure, the technical solutions in the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments in this disclosure, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this disclosure.
[0025] like Figures 1-3 As shown, a cavity heating uniform plate in one embodiment of the present invention includes an aluminum alloy substrate 1, a heating component and a temperature measuring element. The aluminum alloy substrate 1 is provided with at least one continuous mounting groove 4. The heating component is an armored heating tube 2 embedded in the mounting groove 4. The mounting groove 4 and the armored heating tube 2 embedded therein are completely covered and encapsulated by an aluminum molten material sealing layer 5. The aluminum molten material sealing layer 5 is metallurgically bonded to the base material of the aluminum alloy substrate 1.
[0026] The working principle of the heating plate in this cavity is as follows: the armored heating tube 2 and the aluminum alloy substrate 1 are metallurgically bonded and sealed through an aluminum fusion welding process. When current passes through the armored heating tube 2, Joule heat is generated, and the heat is efficiently conducted to the aluminum alloy substrate 1 through the zero-gap aluminum molten sealing layer 5. The sealing layer is integrated with the substrate material, eliminating the air gap thermal resistance of traditional embedding methods and achieving rapid and uniform heat diffusion. At the same time, the dense aluminum alloy sealing layer completely encapsulates the heating tube, forming a physical barrier that prevents the corrosion of corrosive gases in the process cavity. Thus, while ensuring excellent temperature uniformity, the long-term reliability of the heating plate in harsh environments is significantly improved.
[0027] Specifically, the diameter of the armored heating tube 2 is no more than 8 mm to ensure that it has good bending and forming ability and sufficient power density.
[0028] Preferably, the diameter of the armored heating tube 2 is 6 mm or 8 mm.
[0029] Preferably, the cross-sectional shape of the mounting groove 4 is U-shaped, trapezoidal, or rectangular, and its depth and width are slightly larger than the diameter of the armored heating tube 2, so as to accommodate the armored heating tube 2 and leave space for the welding material to fill.
[0030] Preferably, the thickness of the aluminum molten metal sealing layer 5 is not less than one-tenth of the diameter of the armored heating tube 2 to ensure the integrity of the seal and mechanical strength.
[0031] like Figure 1 As shown, the armored heating tubes 2 are arranged in a serpentine or spiral shape in the mounting groove 4, and their arrangement path is optimized by thermodynamic simulation to make the temperature distribution on the surface of the aluminum alloy substrate 1 uniform, so that the uniformity of the temperature field formed on the surface of the aluminum alloy substrate 1 is better than ±2℃ at the set operating temperature.
[0032] Specifically, the temperature sensing element is a thermocouple 3, and its sensing end is fixed to the aluminum alloy substrate 1 through the aluminum molten metal sealing layer 5.
[0033] Preferably, the aluminum alloy substrate 1 is made of 6061 or 7075 aluminum alloy, which gives it excellent thermal conductivity and structural strength.
[0034] Working principle: The armored heating tube 2 and the aluminum alloy substrate 1 are metallurgically bonded and sealed through an aluminum fusion welding process. When current passes through the armored heating tube 2, Joule heating is generated, and the heat is efficiently conducted to the aluminum alloy substrate 1 through the zero-gap aluminum molten sealing layer 5. The sealing layer is integrated with the substrate material, eliminating the air gap thermal resistance of traditional embedding methods and achieving rapid and uniform heat diffusion. At the same time, the dense aluminum alloy sealing layer completely encapsulates the heating tube, forming a physical barrier that prevents the corrosion of corrosive gases in the process chamber. This significantly improves the long-term reliability of the heating plate in harsh environments while ensuring excellent temperature uniformity.
[0035] It will be apparent to those skilled in the art that this disclosure is not limited to the details of the exemplary embodiments described above, and that this disclosure can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of this disclosure is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this disclosure. No reference numerals in the claims should be construed as limiting the scope of the claims.
[0036] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
Claims
1. A heating temperature equalization plate for a cavity, characterized in that, It includes an aluminum alloy substrate, a heating assembly, and a temperature measuring element; the aluminum alloy substrate has at least one continuous mounting groove; the heating assembly is an armored heating tube embedded in the mounting groove; the mounting groove and the armored heating tube embedded therein are completely covered and encapsulated by an aluminum molten material sealing layer, and the aluminum molten material sealing layer is metallurgically bonded to the base material of the aluminum alloy substrate.
2. The heating and temperature equalization plate for a cavity according to claim 1, characterized in that, The diameter of the armored heating tube is no greater than 8 mm.
3. A heating uniform plate for a cavity according to claim 2, characterized in that, The diameter of the armored heating tube is 6 mm or 8 mm.
4. A heating uniform plate for a cavity according to claim 1, characterized in that, The cross-sectional shape of the mounting groove is U-shaped, trapezoidal, or rectangular.
5. A heating uniform plate for a cavity according to claim 1, characterized in that, The thickness of the aluminum molten metal sealing layer is not less than one-tenth of the diameter of the armored heating tube.
6. A heating uniform plate for a cavity according to claim 1, characterized in that, The armored heating tubes are arranged in a serpentine or spiral shape within the mounting groove, and their arrangement path is optimized through thermodynamic simulation to ensure uniform temperature distribution on the surface of the aluminum alloy substrate.
7. A heating uniform plate for a cavity according to claim 1, characterized in that, The temperature sensing element is a thermocouple, and its sensing end is fixed to the aluminum alloy substrate through the aluminum molten metal sealing layer.
8. A heating uniform plate for a cavity according to claim 1, characterized in that, The aluminum alloy substrate is made of 6061 or 7075 aluminum alloy.