Process system

Abstract

The application relates to the technical field of semiconductors or photovoltaics, in particular to a process system to solve the problem of large floor area of a cell production process system. The process system comprises a first process integrated production line, which comprises a first feeding conveying device, a first vapor deposition device, a first transfer conveying device, a boron diffusion device and a first discharging conveying device. The first process integrated production line integrates a first vapor deposition process production line and a boron diffusion process production line into one production line. The integrated process production line can perform both the first vapor deposition process and the boron diffusion process on the sheet material. The transition conveying device and the required conveying space between the original two process production lines corresponding to the integrated process production line are omitted, the floor area of the process system is reduced, the sheet material transfer process is reduced, the risk of sheet material breakage, sheet collapse and other abnormalities is reduced, the pollution risk of the sheet material exposed to air and in the transfer process is reduced, and the sheet material conveying efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic technology, and more particularly to a process system. Background Technology

[0002] With the booming development of the semiconductor and photovoltaic industries, solar cell manufacturing processes have undergone numerous technological innovations and upgrades. From early simple manual operations to today's automated and intelligent production, both production efficiency and product quality have been significantly improved. As the industry rapidly develops, solar cell manufacturers need to continuously expand their production scale to meet market demand.

[0003] However, existing solar cell manufacturing processes require a large land area, forcing companies to use more land resources to build production workshops, resulting in high solar cell production costs. Utility Model Content

[0004] In view of this, embodiments of this application provide a process system to solve the problem of large footprint in battery cell manufacturing process systems.

[0005] In a first aspect, one embodiment of this application provides a process system, including: a first integrated process production line, comprising a first feeding conveying device, a first vapor deposition device, a first transfer conveying device, a boron diffusion device, and a first unloading conveying device, wherein the first feeding conveying device is used to feed a sheet to the first vapor deposition device, the first transfer conveying device is used to directly transfer the sheet processed by the first vapor deposition device to the boron diffusion device, and the first unloading conveying device is used to transport the sheet processed by the boron diffusion device away from the boron diffusion device.

[0006] The process system provided in this embodiment includes a first integrated production line. This first integrated production line integrates a first vapor deposition process line and a boron diffusion process line into a single line, integrating both the first vapor deposition unit and the boron diffusion unit. It can perform both processes on the sheet material, eliminating the need for the conveying device and corresponding unloading process for the first vapor deposition unit in the first vapor deposition process line, and the conveying device and corresponding loading process for the boron diffusion unit in the boron diffusion process line. The first integrated production line also uses a first transfer conveyor within the line to transfer the sheet material between the relatively close first vapor deposition unit and the boron diffusion unit, eliminating the need for a transport vehicle to move the sheet material between the two lines and saving the space reserved for transport vehicles in both lines.

[0007] Furthermore, integrating the first vapor deposition process line and the boron diffusion process line into one production line, that is, integrating two production lines into one production line, helps to reduce the complexity and failure rate of the integrated production line and facilitates the maintenance of the process system.

[0008] In summary, the process system provided in this embodiment has a small footprint, improves the utilization rate of workshop space, reduces the sheet material transfer process, reduces the sheet material transmission distance and the handling and transfer space required between the original production lines, reduces the risk of sheet fragments, cards, scratches, microcracks, chipping and other abnormalities, and also reduces the risk of sheet material exposure to air and pollution during transfer, thus improving sheet material transportation efficiency. Attached Figure Description

[0009] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0010] Figure 1 The diagram shows the layout of a solar cell manufacturing system in a solar cell manufacturing workshop.

[0011] Figure 2 The diagram shown is a schematic diagram of the layout of a process system provided in an embodiment of this application in a process workshop.

[0012] Figure 3 The diagram shown is a structural schematic of a first process integrated production line provided in an embodiment of this application.

[0013] Figure 4 The diagram shown is a structural schematic of a second process integrated production line provided in an embodiment of this application.

[0014] Figure 5 The diagram shown is a structural schematic of a third process integrated production line provided in an embodiment of this application.

[0015] Figure 6 The diagram shown is a structural schematic of the fourth process integrated production line provided in an embodiment of this application.

[0016] Figure 7 The diagram shown is a structural schematic of the fifth process integrated production line provided in an embodiment of this application.

[0017] Figure 8 The diagram shown is a schematic diagram of a double-sided atomic layer deposition coating production line provided in an embodiment of this application.

[0018] Figure 9The diagram shown is a structural schematic of an alkaline polishing and texturing production line provided in an embodiment of this application.

[0019] Figure label: 1. Process System; 10. First Process Integrated Production Line; 100. First Side of the First Process Integrated Production Line; 101. Second Side of the First Process Integrated Production Line; 11. First Feeding Conveying Device; 12. First Vapor Deposition Unit; 13. First Transfer Conveying Device; 14. Boron Diffusion Unit; 15. First Unloading Conveying Device; 16. First Gas Inlet / Outlet Piping Device; 20. Process Subsystem; 21. Third Process Integrated Production Line; 210. Third Feeding Conveying Device; 211. Laser Borosilicate Glass Film Opening Device 212. Third transfer and conveying device; 213. Borosilicate glass alkaline polishing device; 214. Third unloading and conveying device; 22. Fourth process integrated production line; 220. Fourth loading and conveying device; 221. Second vapor deposition device; 222. Fourth transfer and conveying device; 223. Phosphorus diffusion device; 224. Fourth unloading and conveying device; 225. First side of the fourth process integrated production line; 226. Second side of the fourth process integrated production line; 227. Third gas inlet and outlet pipeline device; 23. Fifth process integrated... Production line; 230, Fifth feeding conveyor; 231, Laser phosphosilicate glass film opening device; 232, Fifth transfer conveyor; 233, Dephosphosilicate glass chain acid polishing device; 234, Fifth unloading conveyor; 24, Double-sided atomic layer deposition coating production line; 240, Double-sided atomic layer deposition coating feeding device; 241, Double-sided atomic layer deposition coating process device; 242, Double-sided atomic layer deposition coating loading and unloading device; 30, Second process integrated production line; 300, First side of the second process integrated production line. ; 301, Second side of the second process integrated production line; 31, Second feeding conveyor; 32, Front coating device; 33, Second transfer conveyor; 34, Back coating device; 35, Second unloading conveyor; 36, Second gas inlet / outlet pipeline device; 40, Backup conveyor; 50, Alkali polishing texturing production line; 51, Alkali polishing texturing feeding conveyor; 52, Alkali polishing texturing process device; 53, Alkali polishing texturing unloading conveyor; 60, Metallization production line; X1, First direction; X2, Second direction. Detailed Implementation

[0020] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0021] With the booming development of the semiconductor and photovoltaic industries, solar cell manufacturing processes have undergone numerous technological innovations and upgrades. From early simple manual operations to today's automated and intelligent production, both production efficiency and product quality have been significantly improved. As the industry rapidly develops, solar cell manufacturers need to continuously expand their production scale to meet market demand.

[0022] The process of turning solar cells into finished products requires the sequential execution of multiple processes. In existing solar cell manufacturing systems, each process line performs one process on the solar cells. These multiple process lines are arranged linearly.

[0023] Figure 1 The diagram shows the layout of a solar cell manufacturing system in a solar cell manufacturing workshop. Figure 1 As shown, the solar cell manufacturing system 8 includes multiple first process production lines 80 and multiple second process production lines 81. The multiple first process production lines 80 and multiple second process production lines 81 are arranged sequentially along a first direction X1. Each first process production line 80 includes a first loading device 800, a first processing device 801, and a first unloading device 802 arranged sequentially. The first loading device 800 transports the solar cells to the first processing device 801, whereby the first processing device 801 performs a first process on the solar cells, and the first unloading device 802 then removes the solar cells that have completed the first process from the first process device 801.

[0024] Each second process production line 81 includes a second loading device 810, a second processing device 811, and a second unloading device 812 arranged sequentially. A transport vehicle moves solar cells between production lines, transferring cells from the first unloading device 802 to the second loading device 810. The second loading device 810 transports the received solar cells to the second processing device 811, where it performs a second process. The second unloading device 812 then removes the cells that have completed the second process from the second processing device 811. The transport vehicle then transfers the cells from the second unloading device 812 to the next process production line for the next process. Furthermore, sufficient space must be reserved around each first process production line 80 and each second process production line 81 for the operation and movement of the transport vehicle, and the spacing between the production lines needs to be relatively large.

[0025] This type of solar cell manufacturing system requires a large land area, forcing companies to use more land resources to build production workshops, resulting in high solar cell production costs.

[0026] In view of this, embodiments of this application provide a process system to solve the problem of large footprint in battery cell manufacturing process systems.

[0027] Figure 2 The diagram shown is a schematic diagram of the layout of a process system provided in an embodiment of this application in a process workshop. Figure 3 The diagram shown is a structural schematic of a first process integrated production line provided in an embodiment of this application. Figure 4 The diagram shown is a structural schematic of a second process integrated production line provided in an embodiment of this application.

[0028] like Figures 2 to 4 As shown, process system 1 includes a first process integrated production line 10. Exemplarily, process system 1 is a process system for producing sheet materials. Specifically, process system 1 can be a process system for producing solar cells.

[0029] The first integrated production line 10 includes a first feeding conveyor 11, a first vapor deposition unit 12, a first transfer conveyor 13, a boron diffusion unit 14, and a first unloading conveyor 15. The first feeding conveyor 11 feeds sheet material to the first vapor deposition unit 12. The first transfer conveyor 13 directly transfers the sheet material processed by the first vapor deposition unit 12 to the boron diffusion unit 14. The first unloading conveyor 15 removes the sheet material processed by the boron diffusion unit 14 from the boron diffusion unit 14. Exemplarily, the first feeding conveyor 11, the first vapor deposition unit 12, the first transfer conveyor 13, the boron diffusion unit 14, and the first unloading conveyor 15 are arranged sequentially.

[0030] Specifically, the first vapor deposition apparatus 12 is used to perform a first vapor deposition process on the sheet. The boron diffusion apparatus 14 is used to perform a boron diffusion process on the sheet. In some applications, the first feeding conveyor 11 feeds the sheet to the first vapor deposition apparatus 12, where the first vapor deposition apparatus 12 performs the first vapor deposition process on the sheet. Then, the first transfer conveyor 13 transfers the sheet that has completed the first vapor deposition process to the boron diffusion apparatus 14. The boron diffusion apparatus 14 performs a boron diffusion process on these sheets. Finally, the first unloading conveyor 15 removes the sheet that has completed the boron diffusion process from the boron diffusion apparatus 14.

[0031] For example, the sheet material may include silicon wafers, solar cells, wafers, etc. For example, the sheet material may be a PERC (Passivated Emitter and Rear Cell) cell or a TOPCon (Tunnel Oxide Passivated Contact) cell.

[0032] Exemplarily, the number of first process integrated production lines 10 can be one or more. In one first process integrated production line 10, the number of first vapor deposition units 12 can be one or more, and the number of boron diffusion units 14 can also be one or more. Exemplarily, a first transfer conveying device 13 can be used to transfer sheets processed by multiple first vapor deposition units 12 to multiple boron diffusion units 14 respectively. Exemplarily, the number of first vapor deposition units 12 and boron diffusion units 14 can be set according to their respective capacity and required processing time.

[0033] Exemplarily, the first feeding conveyor 11, the first transfer conveyor 13, and the first unloading conveyor 15 may each include one or more combinations of pulleys and drive belts, gear sets, sprockets and chains, lead screws and guide rails, power cylinders, motors, suction cups, robotic arms, and crank-slider systems. The first vapor deposition apparatus 12 may include a low-pressure chemical vapor deposition apparatus. Exemplarily, the first transfer conveyor 13 may include one or more combinations of belt drive pairs, linear guide rails, robotic arms, gantry cranes, and suction cups. For example, the first transfer conveyor 13 may include a gantry crane, linear guide rails, and suction cups. The gantry crane is erected between the first vapor deposition apparatus 12 and the boron diffusion apparatus 14, the linear guide rail is disposed on the gantry crane, and multiple suction cups are disposed on the linear guide rails to transport the sheet processed by the first vapor deposition apparatus 12 along the linear guide rails to the boron diffusion apparatus 14.

[0034] The process system 1 provided in this embodiment includes a first integrated production line 10. The first integrated production line 10 integrates a first vapor deposition process line and a boron diffusion process line into one line, integrating a first vapor deposition device 12 and a boron diffusion device 14. It can perform both processes on the sheet material, eliminating the need for a conveyor device (equivalent to a first unloading device 802) and its corresponding unloading process for unloading the first vapor deposition device 12 in the first vapor deposition process line, and a conveyor device (equivalent to a second loading device 810) and its corresponding loading process for loading the boron diffusion device 14 in the boron diffusion process line. The first integrated production line 10 also uses a first transfer conveyor 13 within the line to transfer the sheet material between the relatively close first vapor deposition device 12 and the boron diffusion device 14, eliminating the need for a transport vehicle to move the sheet material between the first vapor deposition process line and the boron diffusion process line, thus saving the space reserved for transport vehicles in the first vapor deposition process line and the boron diffusion process line.

[0035] Furthermore, integrating the first vapor deposition process line and the boron diffusion process line into one production line, that is, integrating two production lines into one production line, helps to reduce the complexity and failure rate of the integrated production line and facilitates the maintenance of process system 1.

[0036] In summary, process system 1 occupies a small area, improves workshop space utilization, reduces sheet material transfer processes, reduces sheet material transport distance and the space required for handling vehicles and transfer between production lines, reduces the risk of sheet fragments, cards, scratches, microcracks, chipping, and other abnormalities, and also reduces the risk of sheet material exposure to air and contamination during transfer, thus improving sheet material transportation efficiency.

[0037] In some embodiments, such as Figures 2 to 4 As shown, process system 1 includes: a first process integrated production line 10, a process subsystem 20, and a second process integrated production line 30. Process subsystem 20 is adjacent to the first process integrated production line 10 and is used to receive the sheet material processed by the boron diffusion device 14 and perform intermediate processing on the sheet material processed by the boron diffusion device 14.

[0038] Specifically, after the sheet material is transported away from the boron diffusion device 14 by the first feeding conveyor 15, it is received by the process subsystem 20 and undergoes intermediate processing in the process subsystem 20. The intermediate processing may include all processes required for sheet material processing between the boron diffusion process and the front-side coating process.

[0039] The second integrated production line 30 is adjacent to the process subsystem 20 and includes a second feeding conveyor 31, a front coating unit 32, a second transfer conveyor 33, a back coating unit 34, and a second unloading conveyor 35. The second feeding conveyor 31 receives the sheet material output from the process subsystem 20 and conveys it to the front coating unit 32. The second transfer conveyor 33 directly transfers the sheet material processed by the front coating unit 32 to the back coating unit 34. The second unloading conveyor 35 removes the sheet material processed by the back coating unit 34 from the back coating unit 34. Exemplarily, the second feeding conveyor 31, the front coating unit 32, the second transfer conveyor 33, the back coating unit 34, and the second unloading conveyor 35 are arranged sequentially.

[0040] Specifically, the front coating unit 32 is used to perform a front coating process on the sheet. The back coating unit 34 is used to perform a back coating process on the sheet. In some applications, the second feeding conveyor 31 feeds the sheet to the front coating unit 32, which performs the front coating process. Then, the second transfer conveyor 33 transfers the sheet that has completed the front coating process to the back coating unit 34. The back coating unit 34 performs the back coating process on these sheets. Finally, the second unloading conveyor 35 removes the sheet that has completed the boron diffusion process from the back coating unit 34.

[0041] Exemplarily, the number of second process integrated production lines 30 can be one or more. In one second process integrated production line 30, the number of front-side coating units 32 can be one or more, and the number of back-side coating units 34 can also be one or more. Exemplarily, the second transfer conveying device 33 can be used to transfer the sheets processed by the multiple front-side coating units 32 to the multiple back-side coating units 34 respectively. Exemplarily, the number of front-side coating units 32 and back-side coating units 34 can be set according to their respective capacity and required processing time.

[0042] For example, the second feeding conveyor 31, the second transfer conveyor 33, and the second unloading conveyor 35 may each include one or more combinations of pulleys and drive belts, gear sets, sprockets and chains, lead screws and guide rails, power cylinders, motors, suction cups, robotic arms, and crank-slider systems. The structure of the second transfer conveyor 33 can refer to the structure of the first transfer conveyor 13, and will not be described again here.

[0043] The process system 1 provided in this embodiment includes a first integrated process production line 10, a process subsystem 20, and a second integrated process production line 30 arranged sequentially. The first integrated process production line 10 integrates a first vapor deposition process production line and a boron diffusion process production line into one production line. At the same time, the second integrated process production line 30 integrates a front coating process production line and a back coating process production line into one production line, integrating a front coating device 32 and a back coating device 34. It can perform two processes on the sheet material, eliminating the need for the conveying device (equivalent to the first unloading device 802) and the corresponding unloading process for unloading the front coating device 32 in the front coating process production line, and the conveying device (equivalent to the second loading device 810) and the corresponding loading process for loading the back coating device 34 in the back coating process production line. The second process integrated production line 30 also uses the second transfer and conveying device 33 within this production line to transfer sheets between the relatively close front coating device 32 and back coating device 34, eliminating the need for a transport vehicle to move sheets between the front coating process production line and the back coating process production line, thus saving the space reserved for transport vehicles to move sheets in the front coating process production line and the back coating process production line.

[0044] Furthermore, integrating the first vapor deposition process line and the boron diffusion process line into one production line, and integrating the front coating process line and the back coating process line into one production line, that is, integrating two production lines into one production line, helps to reduce the complexity and failure rate of the integrated production line and facilitates the maintenance of process system 1.

[0045] In summary, the process system 1 provided in this embodiment has a small footprint, further improving the utilization rate of workshop space, reducing the sheet material transfer process, reducing the sheet material transmission distance and the handling and transfer space required between the original production lines, reducing the risk of sheet material fragments, cards, scratches, microcracks, chipping and other abnormalities, while also reducing the risk of sheet material exposure to air and pollution during transfer, and improving sheet material transportation efficiency.

[0046] Figure 5 The diagram shown is a structural schematic of a third process integrated production line provided in an embodiment of this application.

[0047] In some embodiments, such as Figure 2 and Figure 5 As shown, the process subsystem 20 may include a third integrated process line 21. The third integrated process line 21 is located between the first integrated process line 10 and the second integrated process line 30. The third integrated process line 21 includes a third feeding conveyor 210, a laser borosilicate glass film-forming device 211, a third transfer conveyor 212, a borosilicate glass alkaline polishing device 213, and a third unloading conveyor 214. The third feeding conveyor 210 is used to feed the sheet processed by the boron diffusion device 14 to the laser borosilicate glass film-forming device 211. The third transfer conveyor 212 is used to directly transfer the sheet processed by the laser borosilicate glass film-forming device 211 to the borosilicate glass alkaline polishing device 213. The third unloading conveyor 214 is used to transport the sheet processed by the borosilicate glass alkaline polishing device 213 away from the borosilicate glass alkaline polishing device 213. For example, the third feeding conveyor 210, the laser borosilicate glass film-opening device 211, the third transfer conveyor 212, the borosilicate glass alkaline polishing device 213, and the third unloading conveyor 214 are arranged in sequence.

[0048] Specifically, the laser borosilicate glass opening device 211 is used to perform a laser borosilicate glass (BSG) opening process on the sheet material. The borosilicate glass alkaline polishing device 213 is used to perform a borosilicate glass alkaline polishing process on the sheet material. Intermediate processes may include the laser borosilicate glass opening process and the borosilicate glass alkaline polishing process.

[0049] In some applications, the third feeding conveyor 210 feeds sheets to the laser borosilicate glass opening device 211, which performs the laser borosilicate glass opening process on the sheets. Then, the third transfer conveyor 212 transfers the sheets that have completed the laser borosilicate glass opening process to the borosilicate glass alkaline polishing device 213. The borosilicate glass alkaline polishing device 213 performs the borosilicate glass alkaline polishing process on these sheets. Finally, the third unloading conveyor 214 removes the sheets that have completed the borosilicate glass alkaline polishing process from the borosilicate glass alkaline polishing device 213.

[0050] Exemplarily, the number of third process integrated production lines 21 can be one or more. In one third process integrated production line 21, the number of laser borosilicate glass opening devices 211 can be one or more, and the number of borosilicate glass alkaline polishing devices 213 can also be one or more. Exemplarily, the third transfer conveying device 212 can be used to transfer the sheets processed by the multiple laser borosilicate glass opening devices 211 to the multiple borosilicate glass alkaline polishing devices 213 respectively. Exemplarily, the number of laser borosilicate glass opening devices 211 and borosilicate glass alkaline polishing devices 213 can be set according to their respective capacity and required processing time.

[0051] For example, the third feeding conveyor 210, the third transfer conveyor 212, and the third unloading conveyor 214 may each include one or more combinations of pulleys and drive belts, gear sets, sprockets and chains, lead screws and guide rails, power cylinders, motors, suction cups, robotic arms, and crank-slider systems. The structure of the third transfer conveyor 212 can refer to the structure of the first transfer conveyor 13, and will not be described again here.

[0052] The process system 1 provided in this embodiment, the third process integrated production line 21, integrates the laser borosilicate glass film-forming process production line and the borosilicate glass alkaline polishing process production line into one production line. It integrates the laser borosilicate glass film-forming device 211 and the borosilicate glass alkaline polishing device 213, and can perform two processes on the sheet. It eliminates the need for the conveying device (equivalent to the first feeding device 802) and the corresponding feeding process for unloading the laser borosilicate glass film-forming device 211 in the laser borosilicate glass film-forming process production line, and the conveying device (equivalent to the second feeding device 810) and the corresponding feeding process for loading the borosilicate glass alkaline polishing device 213 in the borosilicate glass alkaline polishing process production line. The third process integrated production line 21 also uses the third transfer and conveying device 212 within this production line to transfer sheets between the laser borosilicate glass film-opening device 211 and the borosilicate glass alkaline polishing device 213, which are relatively close to each other. This eliminates the need for a transport vehicle to transport sheets between the first vapor deposition process production line and the boron diffusion process production line, saving the space reserved for transport vehicles to transport sheets in the laser borosilicate glass film-opening process production line and the borosilicate glass alkaline polishing process production line.

[0053] The footprint of process system 1 can be further reduced, further improving the utilization rate of workshop space and further reducing the sheet transfer process, reducing the sheet transfer distance and the space required for handling vehicles and transfer between production lines, further reducing the risk of sheet fragments, cards, scratches, microcracks, chipping and other abnormalities, while also further reducing the risk of sheet exposure to air and pollution during transfer, and further improving sheet transportation efficiency.

[0054] Figure 6The diagram shown is a structural schematic of the fourth process integrated production line provided in an embodiment of this application.

[0055] In some embodiments, such as Figure 2 and Figure 6 As shown, the process subsystem 20 may include a fourth integrated process line 22. The fourth integrated process line 22 is located between the first integrated process line 10 and the second integrated process line 30, and includes a fourth feeding conveyor 220, a second vapor deposition unit 221, a fourth transfer conveyor 222, a phosphorus diffusion unit 223, and a fourth unloading conveyor 224. The fourth feeding conveyor 220 is used to feed the sheet processed by the boron diffusion unit 14 to the second vapor deposition unit 221. The fourth transfer conveyor 222 is used to directly transfer the sheet processed by the second vapor deposition unit 221 to the phosphorus diffusion unit 223. The fourth unloading conveyor 224 is used to remove the sheet processed by the phosphorus diffusion unit 223 from the phosphorus diffusion unit 223. Exemplarily, the fourth feeding conveyor 220, the second vapor deposition unit 221, the fourth transfer conveyor 222, the phosphorus diffusion unit 223, and the fourth unloading conveyor 224 are arranged sequentially.

[0056] Specifically, the second vapor deposition apparatus 221 is used to perform a second vapor deposition process on the sheet. The phosphorus diffusion apparatus 223 is used to perform a phosphorus diffusion process on the sheet. Intermediate processes may include the second vapor deposition process and the phosphorus diffusion process.

[0057] For example, the second vapor deposition apparatus 221 may include a low-pressure chemical vapor deposition apparatus.

[0058] The fourth process integrated production line 22 integrates the second vapor deposition process production line and the phosphorus diffusion process production line. The structure, workflow, and technical effects of the fourth process integrated production line 22 can be referred to the structure, workflow, and technical effects of the first process integrated production line 10, and will not be repeated here.

[0059] Figure 7 The diagram shown is a structural schematic of the fifth process integrated production line provided in an embodiment of this application.

[0060] In some embodiments, such as Figure 2 and Figure 7As shown, the process subsystem 20 may include a fifth process integrated production line 23. The fifth process integrated production line 23 is located between the first process integrated production line 10 and the second process integrated production line 30, and includes a fifth feeding conveyor 230, a laser phosphosilicate glass film-opening device 231, a fifth transfer conveyor 232, a dephosphosilicate glass chain acid polishing device 233, and a fifth unloading conveyor 234. The fifth feeding conveyor 230 is used to feed the sheet processed by the boron diffusion device 14 to the laser phosphosilicate glass film-opening device 231. The fifth transfer conveyor 232 is used to transfer the sheet processed by the laser phosphosilicate glass film-opening device 231 to the dephosphosilicate glass chain acid polishing device 233. The fifth unloading conveyor 234 is used to transport the sheet processed by the dephosphosilicate glass chain acid polishing device 233 away from the dephosphosilicate glass chain acid polishing device 233. For example, the fifth feeding conveyor 230, the laser phosphosilicate glass film-opening device 231, the fifth transfer conveyor 232, the dephosphosilicate glass chain acid polishing device 233, and the fifth unloading conveyor 234 can be arranged in sequence.

[0061] Specifically, the laser phosphosilicate glass opening device 231 is used to perform a laser phosphosilicate glass opening process on the sheet. The dephosphosilicate glass chain acid polishing device 233 is used to perform a dephosphosilicate glass chain acid polishing process on the sheet. Intermediate processes may include the laser phosphosilicate glass opening process and the dephosphosilicate glass chain acid polishing process.

[0062] The fifth integrated production line 23 integrates a laser-driven phosphosilicate glass film-opening process production line and a chain-type acid polishing process production line for dephosphosilicate glass. The structure, workflow, and technical effects of the fifth integrated production line 23 can be referenced from the structure, workflow, and technical effects of the third integrated production line 21, and will not be repeated here.

[0063] In some embodiments, such as Figure 2 As shown, the process subsystem 20 includes a third process integrated production line 21, a fourth process integrated production line 22, and a fifth process integrated production line 23 arranged sequentially.

[0064] In other words, the laser borosilicate glass film-opening process production line and the borosilicate glass alkaline polishing process production line are integrated into one production line, the second vapor deposition process production line and the phosphorus diffusion process production line are integrated into one production line, and the laser phosphosilicate glass film-opening process production line and the phosphosilicate glass chain acid polishing process production line are also integrated into one production line. The footprint of the process subsystem 20 can be reduced to a greater extent, which is conducive to maximizing the reduction of the footprint of the process system 1, maximizing the utilization of workshop space, and minimizing the sheet transfer process, reducing the sheet transfer distance and the handling and transfer space required between the original production lines, reducing the risk of sheet fragments, cards, scratches, microcracks, edge chipping and other abnormalities, while reducing the risk of sheet exposure to air and pollution during transfer, and improving sheet transportation efficiency.

[0065] Figure 8 The diagram shown is a schematic diagram of a double-sided atomic layer deposition coating production line provided in an embodiment of this application.

[0066] In some embodiments, such as Figure 2 and Figure 8 As shown, the process subsystem 20 also includes a double-sided atomic layer deposition (ALD) coating line 24. The ALD coating line 24 is located between the first process integrated line 10 and the second process integrated line 30, and is used to perform a double-sided atomic layer deposition (ALD) coating process on the sheet material. Intermediate processes may include the ALD coating process.

[0067] In some embodiments, the first process integrated production line 10, the process subsystem 20, and the second process integrated production line 30 are arranged sequentially at intervals along the first direction X1.

[0068] The first side 100 and the second side 101 of the first integrated production line are arranged opposite each other along the first direction X1. A first feeding conveyor 11 and a first unloading conveyor 15 are located on the first side 100 of the first integrated production line and are spaced apart along the second direction X2. A first vapor deposition apparatus 12, a first transfer conveyor 13, and a boron diffusion apparatus 14 are located on the second side 101 of the first integrated production line. The first feeding conveyor 11 and the first unloading conveyor 15 are used to convey sheets along the first direction X1 or in the opposite direction of the first direction X1. The second direction X2 is perpendicular to the first direction X1. One end of the first transfer conveyor 13 is connected to the first vapor deposition apparatus 12, and the other end is connected to the boron diffusion apparatus 14.

[0069] Specifically, the first feeding conveyor 11 conveys the sheet in the opposite direction to the first unloading conveyor 15. The first vapor deposition device 12 and the boron diffusion device 14 are typically elongated. The first feeding conveyor 11 and the first unloading conveyor 15 are located on the same side of the first integrated production line 10, rather than on opposite sides of the first integrated production line 10 along the first direction X1. This avoids making the first integrated production line 10 too long along the first direction X1 and thus avoids increasing the transport distance of the sheet along the first direction X1.

[0070] Exemplarily, the first vapor deposition device 12 and the boron diffusion device 14 may be arranged along the second direction X2. Exemplarily, the first vapor deposition device 12 and the boron diffusion device 14 may both extend along the first direction X1.

[0071] In some embodiments, the first side 300 of the second process integrated production line and the second side 301 of the second process integrated production line are disposed opposite to each other along a first direction X1. A second loading conveyor 31 and a second unloading conveyor 35 are located on the first side 300 of the second process integrated production line and are spaced apart along a second direction X2. A front coating device 32, a second transfer conveyor 33, and a back coating device 34 are located on the second side 301 of the second process integrated production line. The second loading conveyor 31 and the second unloading conveyor 35 are used to convey sheets along the first direction X1 or in the opposite direction of the first direction X1. One end of the second transfer conveyor 33 is connected to the front coating device 32, and the other end is connected to the back coating device 34.

[0072] Specifically, the second feeding conveyor 31 conveys the sheet in the opposite direction to the second unloading conveyor 35. The front coating device 32 and the back coating device 34 are typically elongated. The second feeding conveyor 31 and the second unloading conveyor 35 are located on the same side of the second process integrated production line 30, rather than on opposite sides of the second process integrated production line 30 along the first direction X1. This avoids the second process integrated production line 30 from becoming too long along the first direction X1, thus preventing an increase in the transport distance of the sheet along the first direction X1.

[0073] Exemplarily, the front coating device 32 and the back coating device 34 may be arranged along the second direction X2. Exemplarily, the front coating device 32 and the back coating device 34 may both extend along the first direction X1.

[0074] In some embodiments, such as Figure 2 and Figure 8 As shown, the double-sided atomic layer deposition (ALD) coating production line 24 includes: an ALD loading device 240, an ALD process device 241, and an ALD unloading device 242. The ALD loading device 240 is used to transport the sheet material to the ALD process device 241. The ALD process device 241 is used to perform the ALD coating process on the sheet material. The ALD unloading device 242 is used to remove the sheet material processed by the ALD process device 241 from the ALD process device 241.

[0075] Exemplarily, the double-sided atomic layer deposition (ALD) loading device 240 and the double-sided ALD loading / unloading device 242 are located on the side of the double-sided ALD loading / unloading device 242 facing the fifth process integrated production line 23, while the double-sided ALD process device 241 is located on the side of the double-sided ALD loading / unloading device 242 away from the fifth process integrated production line 23. Exemplarily, the double-sided ALD loading / unloading device 240 and the double-sided ALD loading / unloading device 242 are used to transport sheets along a first direction X1 or the opposite direction of the first direction X1. The double-sided ALD loading / unloading device 240 and the double-sided ALD loading / unloading device 242 transport sheets in opposite directions.

[0076] For example, there are multiple double-sided atomic layer deposition (ALD) coating production lines 24, which are arranged at intervals along the second direction X2. For example, the first process integrated production line 10, the third process integrated production line 21, the fourth process integrated production line 22, the fifth process integrated production line 23, the double-sided atomic layer deposition (ALD) coating production line 24, and the second process integrated production line 30 are arranged sequentially along the first direction X1.

[0077] In some embodiments, such as Figure 2 and Figure 3 As shown, the first process integrated production line 10 also includes a first gas inlet / outlet pipeline device 16. The first gas inlet / outlet pipeline device 16 is located on the second side 101 of the first process integrated production line. The first gas inlet / outlet pipeline device 16 can be connected to the first vapor deposition device 12 for conveying or discharging the first gas to or from the first vapor deposition device 12. The first gas inlet / outlet pipeline device 16 can also be connected to the boron diffusion device 14 for conveying or discharging the first gas to or from the boron diffusion device 14.

[0078] The number of first process integrated production lines 10 is three or more. Multiple first process integrated production lines 10 are arranged at intervals along a first direction X1, and in at least one pair of adjacent first process integrated production lines 10, the first sides 100 of the two first process integrated production lines are opposite to each other along the first direction X1. Simultaneously, multiple first process integrated production lines 10 are arranged at intervals along a second direction X2, and the second sides 101 of the multiple first process integrated production lines are arranged on the same side.

[0079] In other words, multiple first process integrated production lines 10 are spaced apart along a first direction X1, and also spaced apart along a second direction X2. Among the multiple first process integrated production lines 10 spaced apart along the first direction X1, the first side 100 of the first first process integrated production line, the second side 101 of the first first process integrated production line, the second side 101 of the second first process integrated production line, and the first side 100 of the second first process integrated production line are sequentially arranged along the first direction X1. Among the multiple first process integrated production lines 10 spaced apart along the second direction X2, the second sides 101 of the multiple first process integrated production lines are located on the same side.

[0080] For example, the first gas inlet / outlet pipeline device 16 may include a gas pipeline and a gas distribution plate.

[0081] The process system 1 provided in this embodiment includes a first integrated production line 10, which further includes a first gas inlet / outlet pipeline device 16. The first gas inlet / outlet pipeline device 16 is located on the second side 101 of the first integrated production line, and the number of first integrated production lines 10 is three or more. The first integrated production lines 10 can be arranged as follows: multiple first integrated production lines 10 are spaced apart along a first direction X1; in at least one pair of adjacent first integrated production lines 10, the first sides 100 of the two first integrated production lines are opposite to each other along the first direction X1; simultaneously, multiple first integrated production lines 10 are spaced apart along a second direction X2, and the second sides 101 of the multiple first integrated production lines are arranged on the same side. This arrangement of the first integrated production lines 10 makes the positions of the first gas inlet / outlet pipeline devices 16 of these first integrated production lines 10 relatively concentrated, so as to supply or exhaust gas to the first gas inlet / outlet pipeline devices 16.

[0082] In some embodiments, such as Figure 2 and Figure 4 As shown, the second process integrated production line 30 also includes a second gas inlet / outlet pipeline device 36. The second gas inlet / outlet pipeline device 36 is located on the second side 301 of the second process integrated production line. The second gas inlet / outlet pipeline device 36 can be connected to the front coating unit 32 for supplying or discharging the second gas to or from the front coating unit 32. The second gas inlet / outlet pipeline device 36 can also be connected to the back coating unit 34 for supplying or discharging the second gas to or from the back coating unit 34.

[0083] The number of second process integrated production lines 30 is three or more. Multiple second process integrated production lines 30 are arranged at intervals along a first direction X1, and in at least one pair of adjacent second process integrated production lines 30, the first sides 300 of the two second process integrated production lines are opposite to each other along the first direction X1. Simultaneously, multiple second process integrated production lines 30 are arranged at intervals along a second direction X2, and the second sides 301 of the multiple second process integrated production lines are arranged on the same side.

[0084] For example, the second gas inlet / outlet conduit device 36 may include a gas conduit and a gas distribution plate.

[0085] The arrangement and technical effects of the second process integrated production line 30, which includes three or more second gas inlet / outlet pipeline devices 36, provided in this embodiment can be referenced to the arrangement and technical effects of the first process integrated production line 10, which includes three or more first gas inlet / outlet pipeline devices 16, and will not be repeated here.

[0086] In some embodiments, the first process integrated production line 10, the process subsystem 20, and the second process integrated production line 30 are arranged sequentially along the first direction X1.

[0087] like Figure 2 and Figure 5 As shown, when the process subsystem 20 includes a third process integrated production line 21, the third feeding conveyor 210, the laser borosilicate glass film-forming device 211, the borosilicate glass alkaline polishing device 213, and the third unloading conveyor 214 are arranged sequentially along the first direction X1. The dimensions of the laser borosilicate glass film-forming device 211 and the borosilicate glass alkaline polishing device 213 along the first direction X1 and the second direction X2 are usually small. The third feeding conveyor 210, the laser borosilicate glass film-forming device 211, the borosilicate glass alkaline polishing device 213, and the third unloading conveyor 214 are arranged sequentially along the first direction X1. The dimension of the third process integrated production line 21 along the first direction X1 is usually not too large, and this arrangement facilitates the connection of the third feeding conveyor 210 to the upstream process production line and the third unloading conveyor 214 to the downstream process production line.

[0088] For example, the third feeding conveyor 210 can be used to transport the sheet material to the laser borosilicate glass opening device 211 along the first direction X1. The third unloading conveyor 214 can be used to transport the sheet material away from the borosilicate glass alkaline polishing device 213 along the first direction X1. This helps to reduce the transport path of the sheet material and improve transport efficiency.

[0089] like Figure 2 and Figure 6As shown, when the process subsystem 20 includes a fourth process integrated production line 22, the first side 225 and the second side 226 of the fourth process integrated production line are arranged opposite each other along the first direction X1. The fourth feeding conveyor 220 and the fourth unloading conveyor 224 are located on the first side 225 of the fourth process integrated production line and are spaced apart along the second direction X2. The second vapor deposition device 221, the fourth transfer conveyor 222, and the phosphorus diffusion device 223 are located on the second side 226 of the fourth process integrated production line. The fourth feeding conveyor 220 and the fourth unloading conveyor 224 are used to convey sheets along the first direction X1 or in the opposite direction of the first direction X1. The second direction X2 is perpendicular to the first direction X1. For example, one end of the fourth transfer conveyor 222 is connected to the second vapor deposition device 221, and the other end is connected to the phosphorus diffusion device 223.

[0090] Specifically, the fourth feeding conveyor 220 conveys the sheet in the opposite direction to the fourth unloading conveyor 224. The second vapor deposition unit 221 and the phosphorus diffusion unit 223 are typically elongated. The fourth feeding conveyor 220 and the fourth unloading conveyor 224 are located on the same side of the fourth process integrated production line 22, rather than on opposite sides of the fourth process integrated production line 22 along the first direction X1. This avoids making the fourth process integrated production line 22 too long along the first direction X1, thus preventing an increase in the sheet's transport distance along the first direction X1.

[0091] For example, the second vapor deposition device 221 and the phosphorus diffusion device 223 may be arranged along the second direction X2. For example, the second vapor deposition device 221 and the phosphorus diffusion device 223 may both extend along the first direction X1.

[0092] like Figure 2 and Figure 7 As shown, when the process subsystem 20 includes the fifth process integrated production line 23, the fifth feeding conveyor 230, the laser phosphosilicate glass film-opening device 231, the dephosphosilicate glass chain acid polishing device 233, and the fifth unloading conveyor 234 are arranged sequentially along the first direction X1. The dimensions of the laser phosphosilicate glass film-opening device 231 and the dephosphosilicate glass chain acid polishing device 233 along the first direction X1 and the second direction X2 are usually small. The fifth feeding conveyor 230, the laser phosphosilicate glass film-opening device 231, the dephosphosilicate glass chain acid polishing device 233, and the fifth unloading conveyor 234 are arranged sequentially along the first direction X1. The dimension of the fifth process integrated production line 23 along the first direction X1 is usually not too large. Moreover, this arrangement facilitates the connection of the fifth feeding conveyor 230 to the upstream process production line and the fifth unloading conveyor 234 to the downstream process production line.

[0093] For example, the fifth feeding conveyor 230 can be used to transport the sheet material to the laser phosphosilicate glass opening device 231 along the first direction X1. The fifth unloading conveyor 234 can be used to transport the sheet material away from the phosphosilicate glass chain acid polishing device 233 along the first direction X1. This helps to reduce the transport path of the sheet material and improve transport efficiency.

[0094] In some embodiments, such as Figure 2 and Figure 5 As shown, when the process subsystem 20 includes a third process integrated production line 21, there are multiple third process integrated production lines 21, which are spaced apart along the second direction X2. This arrangement facilitates the connection of the third feeding conveyor 210 of the multiple third process integrated production lines 21 to the upstream process production line, and the connection of the third unloading conveyor 214 of the multiple third process integrated production lines 21 to the downstream process production line, thus shortening the transfer path of the sheet material between the third process integrated production line 21 and adjacent production lines and improving the transfer efficiency of the sheet material between adjacent production lines.

[0095] In some embodiments, such as Figure 2 and Figure 5 As shown, when the process subsystem 20 includes a fourth process integrated production line 22, the fourth process integrated production line 22 further includes a third gas inlet / outlet piping device 227. The third gas inlet / outlet piping device 227 is located on the second side 226 of the fourth process integrated production line. The third gas inlet / outlet piping device 227 can be connected to the second vapor deposition unit 221 for supplying or discharging the third gas to or from the second vapor deposition unit 221. The third gas inlet / outlet piping device 227 can also be connected to the phosphorus diffusion unit 223 for supplying or discharging the third gas to or from the phosphorus diffusion unit 223.

[0096] The number of fourth process integrated production lines 22 is three or more. Multiple fourth process integrated production lines 22 are arranged at intervals along a first direction X1, and in at least one pair of adjacent fourth process integrated production lines 22, the first sides 225 of the two fourth process integrated production lines are opposite to each other along the first direction X1. Simultaneously, multiple fourth process integrated production lines 22 are arranged at intervals along a second direction X2, and the second sides 226 of the multiple fourth process integrated production lines are arranged on the same side.

[0097] For example, the third gas inlet / outlet conduit device 227 may include a gas conduit and a gas distribution plate.

[0098] The arrangement and technical effects of the fourth process integrated production line 22, which includes three or more third gas inlet / outlet pipeline devices 227, provided in this embodiment can be referenced to the arrangement and technical effects of the first process integrated production line 10, which includes three or more first gas inlet / outlet pipeline devices 16, and will not be repeated here.

[0099] like Figure 2 and Figure 6 As shown, when the process subsystem 20 includes a fifth process integrated production line 23, there are multiple fifth process integrated production lines 23, which are spaced apart along the second direction X2. This arrangement facilitates the connection of the fifth feeding conveyor 230 of the multiple fifth process integrated production lines 23 to the upstream process production line, and the connection of the fifth unloading conveyor 234 of the multiple fifth process integrated production lines 23 to the downstream process production line, thus shortening the transfer path of the sheet material between the third process integrated production line 21 and adjacent production lines and improving the transfer efficiency of the sheet material between adjacent production lines.

[0100] like Figures 3 to 7 As shown, in some embodiments, the process system 1 further includes at least one backup conveying device 40. The backup conveying device 40 may be located in the first process integration line 10 and may be used to deliver or transport sheets to or from the first process integration line 10, or to deliver or transport carriers for loading sheets to or from the first process integration line 10.

[0101] Exemplarily, the backup conveying device 40 can be used to transport sheets requiring rework from the first vapor deposition unit 12 or the boron diffusion unit 14. Exemplarily, the backup conveying device 40 can cooperate with the first feeding conveying device 11 to jointly transport sheets to the first vapor deposition unit 12. Exemplarily, the backup conveying device 40 can transport sheets that have completed the first vapor deposition process from outside the production line to the boron diffusion unit 14. This avoids the boron diffusion unit 14 of the production line from being idle, enabling the production line to cooperate with other first process integrated production lines 10 in production. It can also be used to perform the process when the boron diffusion unit 14 of other first process integrated production lines 10 is under maintenance, repair, or malfunctions, thereby improving the utilization rate of the process system 1. Exemplarily, the backup conveying device 40 can transport sheets that have completed the first vapor deposition process from the production line away from the production line. When the boron diffusion device 14 of this production line is under repair, maintenance or malfunction, the boron diffusion device 14 of other first process integrated production lines 10 can be used for the process. This can also avoid the first vapor deposition device 12 of other first process integrated production lines 10 being idle after completing a process cycle, so that this production line can cooperate with other first process integrated production lines 10 to improve the utilization rate of process system 1.

[0102] For example, the carrier for carrying the sheet material may include a flower basket or a small boat. The small boat may include a graphite boat or a quartz boat. For example, the spare conveying device 40 may be used to remove idle carriers for carrying sheet material from the first process integration production line 10, or to transport carriers for carrying sheet material to the first process integration production line 10, so that the first process integration production line 10 has more carriers to carry sheet material.

[0103] For example, the backup conveying device 40 may include one or more combinations of pulleys and drive belts, gear sets, sprockets and chains, lead screws and guides, power cylinders, motors, suction cups, robotic arms, and crank-slider systems.

[0104] Exemplarily, the backup conveying device 40 is used to convey sheets and / or carriers for loading sheets along the first direction X1 or the opposite direction of the first direction X1. Exemplarily, the backup conveying device 40 may be arranged at intervals with the first loading conveying device 11 along the second direction X2, or it may be arranged at intervals with the first unloading conveying device 15 along the second direction X2. Exemplarily, the backup conveying device 40 may be located on the first side 100 of the first process integration production line.

[0105] The process system 1 provided in this embodiment also includes at least one backup conveying device 40. The backup conveying device 40 can be set in the first process integrated production line 10. It can replenish the first process integrated production line 10 with sheets and carriers, and can also transport the sheets that need to be reworked or the excess carriers away from the first process integrated production line 10. This increases the flexibility and scalability of the operation of the process system 1 and improves the utilization rate of each process device of the process system 1.

[0106] like Figures 5 to 7 As shown, the backup conveying device 40 can also be installed in the process subsystem 20, and can be used to send the sheet to or away from the process subsystem 20, or to send the carrier used to load the sheet to or away from the process subsystem 20.

[0107] For example, the backup conveying device 40 may be provided in one or more combinations of the third process integrated production line 21, the fourth process integrated production line 22, the fifth process integrated production line 23 and the double-sided atomic layer deposition coating production line 24.

[0108] like Figure 4 As shown, the backup conveying device 40 can also be installed in the second process integrated production line 30, and can be used to deliver or transport the sheet to or from the second process integrated production line 30, or to deliver or transport the carrier used to load the sheet to or from the second process integrated production line 30.

[0109] The structure, location, working principle, and technical effects of the backup conveying device 40 installed in the process subsystem 20, as well as the structure, location, working principle, and technical effects of the backup conveying device 40 installed in the second process integrated production line 30, can be referred to the structure, location, working principle, and technical effects of the backup conveying device 40 installed in the first process integrated production line 10, and will not be repeated here.

[0110] Figure 9 The diagram shown is a structural schematic of an alkaline polishing and texturing production line provided in an embodiment of this application.

[0111] In some embodiments, such as Figure 2 and Figure 9 As shown, process system 1 also includes an alkaline polishing and texturing production line 50. The alkaline polishing and texturing production line 50 is adjacent to the first process integrated production line 10 and is used to perform alkaline polishing and texturing processes on sheets.

[0112] For example, the alkali-polished texturing production line 50 may include an alkali-polished texturing feeding conveyor 51, an alkali-polished texturing process unit 52, and an alkali-polished texturing unloading conveyor 53. The alkali-polished texturing feeding conveyor 51 is used to transport the sheet material to the alkali-polished texturing process unit 52. The alkali-polished texturing process unit 52 is used to perform the alkali-polished texturing process on the sheet material. The alkali-polished texturing unloading conveyor 53 is used to transport the sheet material processed by the alkali-polished texturing process unit 52 away from the alkali-polished texturing process unit 52.

[0113] For example, the alkali-polished texturing feeding conveyor 51, the alkali-polished texturing process device 52, and the alkali-polished texturing unloading conveyor 53 are arranged sequentially along the first direction X1. For example, there are multiple alkali-polished texturing production lines 50, which are arranged at intervals along the second direction X2. For example, a spare conveying device 40 may also be provided at the alkali-polished texturing production line 50, which can be used to feed or transport sheets to or from the alkali-polished texturing production line 50, and can also be used to feed or transport carriers for loading sheets to or from the alkali-polished texturing production line 50.

[0114] In some embodiments, process system 1 further includes a metallization line 60. The metallization line 60 is adjacent to the second process integration line 30 and is used to perform metallization processes on sheets.

[0115] The structure and layout of the metallization production line 60 can be referenced from the structure and layout of the alkali polishing and texturing production line 50, and will not be repeated here.

[0116] For example, along the first direction X1, the alkali polishing texturing production line 50, the first process integrated production line 10, the process subsystem 20, and the second process integrated production line 30 are arranged in sequence at intervals.

[0117] In some embodiments, process system 1 further includes one or more combinations of Automated Guided Vehicles (AGVs), suspended tracks and suspended transport devices mounted on the suspended tracks, and ground tracks and ground transport devices mounted on the ground tracks, for transporting sheets between various production lines. Exemplarily, the suspended transport devices and ground transport devices may include transport vehicles or transport grippers.

[0118] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0119] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “featuring,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0120] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, the features that define "first" and "second" may explicitly or implicitly include at least one of those features.

[0121] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0122] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0123] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A process system, characterized in that, include: The first integrated production line includes a first feeding conveyor, a first vapor deposition unit, a first transfer conveyor, a boron diffusion unit, and a first unloading conveyor. The first feeding conveyor is used to feed sheets into the first vapor deposition unit. The first transfer conveyor is used to directly transfer the sheets processed by the first vapor deposition unit to the boron diffusion unit. The first unloading conveyor is used to transport the sheets processed by the boron diffusion unit away from the boron diffusion unit.

2. The process system according to claim 1, characterized in that, The process system also includes: The process subsystem, adjacent to the first process integrated production line, is used to receive the sheet material after the boron diffusion device process and to perform intermediate processes on the sheet material after the boron diffusion device process. The second integrated production line is adjacent to the process subsystem and includes a second feeding conveyor, a front coating device, a second transfer conveyor, a back coating device, and a second unloading conveyor. The second feeding conveyor is used to receive the sheet material output from the process subsystem and convey it to the front coating device. The second transfer conveyor is used to directly transfer the sheet material processed by the front coating device to the back coating device. The second unloading conveyor is used to remove the sheet material processed by the back coating device from the back coating device.

3. The process system according to claim 2, characterized in that, The process subsystem includes: The third integrated production line, located between the first and second integrated production lines, includes a third feeding conveyor, a laser borosilicate glass film-forming device, a third transfer conveyor, a borosilicate glass alkaline polishing device, and a third unloading conveyor. The third feeding conveyor is used to feed the sheet processed by the boron diffusion device to the laser borosilicate glass film-forming device. The third transfer conveyor is used to directly transfer the sheet processed by the laser borosilicate glass film-forming device to the borosilicate glass alkaline polishing device. The third unloading conveyor is used to remove the sheet processed by the borosilicate glass alkaline polishing device from the borosilicate glass alkaline polishing device; and / or, A fourth integrated production line, located between the first and second integrated production lines, includes a fourth feeding conveyor, a second vapor deposition unit, a fourth transfer conveyor, a phosphorus diffusion unit, and a fourth unloading conveyor. The fourth feeding conveyor is used to feed the sheet processed by the boron diffusion unit to the second vapor deposition unit. The fourth transfer conveyor is used to directly transfer the sheet processed by the second vapor deposition unit to the phosphorus diffusion unit. The fourth unloading conveyor is used to remove the sheet processed by the phosphorus diffusion unit from the phosphorus diffusion unit; and / or, The fifth process integrated production line is located between the first process integrated production line and the second process integrated production line, and includes a fifth feeding conveyor, a laser phosphosilicate glass film-opening device, a fifth transfer conveyor, a dephosphosilicate glass chain acid polishing device, and a fifth unloading conveyor. The fifth feeding conveyor is used to feed the sheet processed by the boron diffusion device to the laser phosphosilicate glass film-opening device. The fifth transfer conveyor is used to directly transfer the sheet processed by the laser phosphosilicate glass film-opening device to the dephosphosilicate glass chain acid polishing device. The fifth unloading conveyor is used to transport the sheet processed by the dephosphosilicate glass chain acid polishing device away from the dephosphosilicate glass chain acid polishing device.

4. The process system according to claim 3, characterized in that, The process subsystem includes the third process integrated production line, the fourth process integrated production line, and the fifth process integrated production line arranged sequentially.

5. The process system according to claim 2, characterized in that, The process subsystem also includes: A double-sided atomic layer deposition coating production line is located between the first process integration production line and the second process integration production line, and is used to perform a double-sided atomic layer deposition coating process on the sheet.

6. The process system according to any one of claims 2 to 5, characterized in that, The first process integrated production line, the process subsystem, and the second process integrated production line are arranged at intervals along a first direction; The first side and the second side of the first process integrated production line are arranged opposite each other along the first direction. The first feeding conveyor and the first unloading conveyor are located on the first side of the first process integrated production line and are spaced apart along the second direction. The first vapor deposition device, the first transfer conveyor and the boron diffusion device are located on the second side of the first process integrated production line. The first feeding conveyor and the first unloading conveyor are used to convey the sheet material along the first direction or the opposite direction of the first direction. The second direction is perpendicular to the first direction. One end of the first transfer conveyor is connected to the first vapor deposition device and the other end is connected to the boron diffusion device. And / or, The first side and the second side of the second process integrated production line are arranged opposite each other along the first direction. The second feeding conveyor and the second unloading conveyor are located on the first side of the second process integrated production line and are spaced apart along the second direction. The front coating device, the second transfer conveyor and the back coating device are located on the second side of the second process integrated production line. The second feeding conveyor and the second unloading conveyor are used to convey the sheet material along the first direction or in the opposite direction of the first direction. One end of the second transfer conveyor is connected to the front coating device and the other end is connected to the back coating device.

7. The process system according to claim 6, characterized in that, The first process integrated production line also includes a first gas inlet / outlet pipeline device, which is located on the second side of the first process integrated production line and is connected to the first vapor deposition device and / or the boron diffusion device, for conveying the first gas to or discharging the first gas to or from the first vapor deposition device and / or the boron diffusion device. The number of the first process integrated production lines is three or more; Multiple first process integrated production lines are arranged at intervals along the first direction, and in at least one pair of adjacent first process integrated production lines, the first sides of the two first process integrated production lines are opposite to each other along the first direction. Multiple first process integrated production lines are arranged at intervals along the second direction, and the second sides of the multiple first process integrated production lines are arranged on the same side; And / or, The second process integrated production line also includes a second gas inlet / outlet pipeline device, which is located on the second side of the second process integrated production line and is connected to the front coating device and / or the back coating device, for conveying or discharging the second gas to or from the front coating device and / or the back coating device. The number of the second process integrated production lines is three or more; Multiple second process integrated production lines are arranged at intervals along the first direction, and in at least one pair of adjacent second process integrated production lines, the first sides of the two second process integrated production lines are opposite to each other along the first direction; Multiple second process integrated production lines are arranged at intervals along the second direction, and the second sides of the multiple second process integrated production lines are arranged on the same side.

8. The process system according to claim 3 or 4, characterized in that, The first integrated production line, the process subsystem, and the second integrated production line are arranged sequentially along a first direction; In the case where the process subsystem includes the third process integrated production line, the third feeding conveyor, the laser borosilicate glass film-opening device, the borosilicate glass alkaline polishing device, and the third unloading conveyor are arranged sequentially along the first direction; In the case where the process subsystem includes the fourth process integrated production line, the first side and the second side of the fourth process integrated production line are arranged opposite to each other along the first direction, the fourth feeding conveyor and the fourth unloading conveyor are located on the first side of the fourth process integrated production line and are spaced apart along the second direction, the second vapor deposition device, the fourth transfer conveyor and the phosphorus diffusion device are located on the second side of the fourth process integrated production line, and the fourth feeding conveyor and the fourth unloading conveyor are used to convey the sheet along the first direction or the opposite direction of the first direction, the second direction being perpendicular to the first direction; In the case where the process subsystem includes the fifth process integrated production line, the fifth feeding conveyor, the laser phosphosilicate glass film opening device, the dephosphosilicate glass chain acid polishing device, and the fifth unloading conveyor are arranged sequentially along the first direction.

9. The process system according to claim 8, characterized in that, When the process subsystem includes the third process integrated production line, there are multiple third process integrated production lines, and the multiple third process integrated production lines are arranged at intervals along the second direction; In the case where the process subsystem includes the fourth process integrated production line, the fourth process integrated production line further includes a third gas inlet / outlet pipeline device. The third gas inlet / outlet pipeline device is located on the second side of the fourth process integrated production line and is connected to the second vapor deposition device and / or the phosphorus diffusion device, for conveying or discharging the third gas to or from the second vapor deposition device and / or the phosphorus diffusion device. The number of the fourth process integrated production lines is three or more; Multiple fourth process integrated production lines are arranged at intervals along the first direction, and in at least one pair of adjacent fourth process integrated production lines, the first sides of the two fourth process integrated production lines are opposite to each other along the first direction. Multiple fourth process integrated production lines are arranged at intervals along the second direction, and the second sides of the multiple fourth process integrated production lines are arranged on the same side; When the process subsystem includes the fifth process integrated production line, there are multiple fifth process integrated production lines, and these multiple fifth process integrated production lines are spaced apart along the second direction.

10. The process system according to any one of claims 2 to 5, characterized in that, Also includes: At least one backup conveyor; The backup conveying device is located in the first integrated production line and is used to deliver the sheet and / or the carrier for loading the sheet to or from the first integrated production line; and / or, The backup conveying device is located in the process subsystem and is used to deliver or transport the sheet and / or the carrier for loading the sheet to or from the process subsystem; and / or, The backup conveying device is located in the second process integration production line and is used to deliver the sheet and / or the carrier used to load the sheet to or from the second process integration production line.

11. The process system according to any one of claims 2 to 5, characterized in that, Also includes: An alkaline polishing and texturing production line is adjacent to the first process integrated production line and is used to perform an alkaline polishing and texturing process on the sheet material. And / or, The metallization production line, adjacent to the second process integration production line, is used to perform the metallization process on the sheet material.

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