A jig for a semiconductor etching apparatus

Abstract

The application provides a jig of a semiconductor etching device, and relates to the technical field of jigs.The jig comprises a rod body and a handrail part, the bottom of the rod body is provided with a threaded section, the threaded section is used for cooperating with a threaded hole on a shielding ring, the handrail part is connected with the top of the rod body, and a horizontal measurement assembly is arranged at the surface center of the handrail part; wherein, in a non-working state of the semiconductor etching device, the threaded sections of the two jigs are respectively engaged with threaded holes diagonally opposite to each other on the shielding ring, the replacement of the shielding ring is realized through the handrail part and the horizontal measurement assembly, and the jig can be used to disassemble and assemble the shielding ring, so that the damage risk of the shielding ring is reduced.

Description

Technical Field

[0001] This application relates to the field of fixture technology, and more specifically, to a fixture for a semiconductor etching apparatus. Background Technology

[0002] In semiconductor manufacturing processes, etching equipment is a key device used to precisely remove material from the surface of wafers. As an important component of etching equipment, the shielding ring's main function is to protect the internal components of the equipment from plasma erosion, while ensuring the uniformity and stability of the etching process. In order to maintain the normal operation of the equipment, the shielding ring needs to be maintained and replaced regularly.

[0003] The existing maintenance process for etching equipment usually involves manually removing the shielding ring after the equipment is shut down, cleaning the ring, and then reinstalling it. However, since the shielding ring is usually made of brittle materials such as ceramics, it may be damaged if it is tilted during manual disassembly and reassembly, which affects the efficiency of equipment maintenance and increases operating costs. Utility Model Content

[0004] The purpose of this application includes, for example, providing a fixture for a semiconductor etching apparatus that enables the assembly and disassembly of a shielding ring, thereby reducing the risk of damage to the shielding ring.

[0005] The embodiments of this application can be implemented as follows:

[0006] Embodiments of this application provide a fixture for a semiconductor etching apparatus, which can be used to replace the shielding ring in the semiconductor etching apparatus, comprising:

[0007] The rod body has a threaded section at its bottom, which is used to mate with the threaded hole on the shielding ring;

[0008] The handrail is connected to the top of the rod, and a level measuring component is provided at the center of the surface of the handrail.

[0009] In the non-operating state of the semiconductor etching device, the threaded sections of the two fixtures respectively engage with the threaded holes diagonally opposite the shielding ring, and the horizontal measuring component enables the handrail to be held horizontally to complete the replacement of the shielding ring.

[0010] Optionally, both the rod and the handrail are cylindrical, their central axes coincide, and the diameter of the handrail is larger than the diameter of the rod.

[0011] Optionally, the leveling component includes a movable water column and multiple graduated rings arranged around the water column, wherein in a horizontal state, the water column and the central axis of the handrail coincide.

[0012] Optionally, the diameter of the leveling component is smaller than the diameter of the handrail.

[0013] Optionally, a gravity sensing device is also provided inside the handrail. The gravity sensing device includes a gravity sensing part and a signal display part. The signal from the gravity sensing part is transmitted to the signal display part. The gravity sensing part is located inside the handrail, and the signal display part is located on the outer wall of the handrail.

[0014] Optionally, the gravity sensing device further includes a signal conversion circuit and a controller; the signal from the gravity sensing unit is converted into an electrical signal by the signal conversion circuit and transmitted to the controller, and the controller transmits the electrical signal to the signal display unit.

[0015] Optionally, the diameter of the handrail is 3.5 to 4.5 cm, and the diameter of the rod is 0.5 to 1.5 cm.

[0016] Optionally, the length of the handrail portion is 1.5 to 2.5 cm in the axial direction of the rod, and the length of the rod is 7.5 to 8.5 cm.

[0017] Optionally, the length of the threaded section is greater than or equal to 0.5 cm.

[0018] The beneficial effects of the assembly fixture provided in this application include: by designing a fixture consisting of a rod with a threaded section and a handrail, after connecting the threaded section to the threaded hole on the shielding ring, the handrail can be used to lift or place the shielding ring. At the same time, the horizontal measuring component is used to detect the horizontality of the shielding ring, realizing non-contact disassembly and assembly of the shielding ring, significantly reducing the probability of component damage caused by human factors and improving equipment maintenance efficiency. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram illustrating the installation position of the shielding ring in the prior art;

[0021] Figure 2 This is a schematic diagram of the fixture in the embodiments of this application;

[0022] Figure 3 This is a schematic diagram illustrating the dimensional relationship between the pole, handrail, and horizontal measuring component in an embodiment of this application;

[0023] Figure 4 This is a schematic diagram of the shielding ring in an embodiment of this application;

[0024] Figure 5 This is a schematic diagram illustrating the engagement of the fixture and the shielding ring in an embodiment of this application;

[0025] Figure 6 This is a schematic diagram of the horizontal measurement component in an embodiment of this application;

[0026] Figure 7 This is a schematic diagram of the gravity sensing device in the embodiments of this application.

[0027] Icons: 1-Jig; 11-Rod; 111-Threaded section; 12-Handrail; 121-Level measuring component; 1211-Water column; 1212-Scale ring; 13-Gravity sensor; 131-Gravity sensor unit; 132-Signal display unit; 133-Controller; 134-Signal conditioning circuit; 135-AD conversion circuit; 136-Power output unit; 137-Switch; 2-Shielding ring; 21-Threaded hole; 3-Cavity; 4-Electrostatic chuck. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0029] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0030] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0031] In the description of this application, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship that the utility model product is usually placed in during use, they are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0032] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0033] It should be noted that, where there is no conflict, the features in the embodiments of this application can be combined with each other.

[0034] As disclosed in the background art, such as Figure 1 As shown, since the shielding ring 2 is usually located in a relatively narrow space inside the cavity 3 of the etching equipment, and its inner surface is covered with a white ceramic coating, if the traditional manual handling method is used, it is very easy to accidentally touch the electrostatic chuck 4 or scrape off the coating due to the limited operating space, which may cause equipment malfunction or component scrapping. In addition, if the shielding ring 2 is tilted when it is picked up or placed, the shielding ring 2 may collide with the equipment and cause damage.

[0035] Please refer to Figures 2-7 This application provides a fixture 1 for a semiconductor etching apparatus. The fixture 1 can be used to replace the shielding ring 2 in the semiconductor etching apparatus. The fixture 1 includes a rod 11 and a handle 12. The bottom of the rod 11 is provided with a threaded section 111, which is used to engage with the threaded hole 21 on the shielding ring 2. The handle 12 is connected to the top of the rod 11, and a horizontal measuring component 121 is provided at the center of the surface of the handle 12. In the non-working state of the semiconductor etching apparatus, the threaded sections 111 of the two fixtures 1 respectively engage with the threaded holes 21 at opposite corners of the shielding ring 2. The horizontal measuring component 121 enables the handle 12 to be held horizontally to complete the replacement of the shielding ring 2.

[0036] The rod 11 serves as the main load-bearing structure, and one end of it is formed with a threaded section 111 by machining. The size of the threaded section 111 matches the threaded hole 21 provided on the shielding ring 2, ensuring that sufficient fastening force can be provided to support the overall weight of the shielding ring 2 after screwing it in. The shielding ring 2 has multiple threaded holes 21 along its circumference, for example, sixteen threaded holes 21 along its circumference.

[0037] The handle 12 is fixedly connected to the end of the rod 11 away from the threaded section 111. Its function is to provide the operator with a stable grip area. On the one hand, it is convenient to apply rotational torque so that the threaded section 111 can be smoothly screwed into or out of the threaded hole 21 of the shielding ring 2. On the other hand, after the threaded section 111 is installed in the threaded hole 21, it is convenient to lift or lower the shielding ring 2.

[0038] A leveling component 121 is positioned at the center of the surface of the handrail 12 to ensure that it accurately reflects the overall posture information of the fixture 1 during use. Since the fixture 1 is primarily used for assembling and disassembling the shielding ring 2, and the shielding ring 2 itself is a precision component, its installation must be strictly level; otherwise, it may lead to poor contact with the electrostatic chuck, uneven force distribution, or even collisions. Therefore, by integrating the leveling component 121 into the handrail 12, the operator can determine in real time whether the shielding ring 2 is level during lifting or placing, effectively preventing damage to the shielding ring 2 due to angular deviations.

[0039] When installing the shielding ring 2, the operator inserts the threaded sections 111 of the two jigs 1 diagonally into the two threaded holes 21 on the shielding ring 2. Simultaneously, by rotating the handle 12, the threaded sections 111 of the rod 11 are screwed in until they are fully inserted into the threaded holes 21, ensuring that the rods 11 of the two jigs 1 engage with the threaded holes 21 of the shielding ring 2. The level measuring component 121 on the handle 12 determines whether the shielding ring 2 held by the jigs 1 is horizontal. Then, by holding the handle 12 as a whole, the shielding ring 2 is smoothly and horizontally moved to the predetermined installation position and placed slowly. The disassembly process is the reverse: first, the jigs 1 are screwed into the threaded holes 21, and the jigs 1 engage with the shielding ring 2. The level measuring component 121 on the handle 12 determines whether the shielding ring 2 held by the jigs 1 is horizontal. Then, by lifting the handle 12, the shielding ring 2 is smoothly and horizontally removed from the cavity. This design effectively avoids the risk of direct manual contact with the shielding ring 2, improves operational safety and stability, and the level measuring component 121 can detect the levelness of the shielding ring 2 during installation and disassembly to prevent the shielding ring 2 from tilting excessively, thereby reducing the risk of collision damage between the shielding ring 2 and other components.

[0040] By designing a fixture 1 consisting of a rod 11 with a threaded section 111 and a handrail 12, and using a level measuring component 121 to detect the levelness of the shielding ring 2, non-contact disassembly and assembly of the shielding ring 2 is achieved, which significantly reduces the probability of component damage caused by human factors and improves equipment maintenance efficiency.

[0041] In this embodiment, both the rod 11 and the handrail 12 are cylindrical, the central axes of the rod 11 and the handrail 12 coincide, and the diameter D1 of the handrail 12 is larger than the diameter D2 of the rod 11.

[0042] Since the rod 11 primarily serves as a connector and load-bearer, its diameter is relatively small to accommodate confined operating spaces and minimize interference with surrounding equipment structures. The handle 12, on the other hand, serves as the operator's grip, and its larger diameter allows for a more secure hold, enabling the operator to apply sufficient torque when screwing into or out of the threaded section 111 without slippage. Furthermore, the handle 12 and rod 11 are coaxially aligned, which not only improves the overall structural rigidity but also prevents stress concentration caused by eccentricity during rotation, thereby extending the lifespan and operational accuracy of the fixture 1.

[0043] In other embodiments, the rod 11 can also adopt other regular geometric shapes, such as prisms (e.g., hexagonal prisms, square prisms, etc.). Similarly, the armrest 12, as the part for the operator to hold, serves to provide sufficient contact area and a good grip. Therefore, its shape can also be adjusted according to ergonomic principles, such as being set as an elliptical cylinder, a frustum, or other asymmetrical structures that conform to the hand's grip curve. In certain special application scenarios, the armrest 12 can be a column with a surface textured for anti-slip properties, thereby improving friction and stability during operation.

[0044] In this embodiment, the diameter D1 of the handrail 12 is 3.5 to 4.5 cm, and the diameter D2 of the rod 11 is 0.5 to 1.5 cm.

[0045] The armrest 12 is coaxially arranged with the rod 11, and the diameter D1 of the armrest 12 is larger than the diameter D2 of the rod 11. The armrest 12 extends radially outward relative to the rod 11 to form an effective grip space. The distance from the side of the armrest 12 to the side of the rod 11 is sufficient to accommodate the natural gripping posture of a person's fingers or palm.

[0046] The diameter of the handrail 12 is in the range of 3.5 to 4.5 cm, which makes it easy for people to hold and also allows for flexible rotation in a small space without affecting the freedom of operation due to excessive size. At the same time, the diameter of the rod 11 is controlled between 0.5 and 1.5 cm, which ensures that the threaded section 111 at its end can be smoothly screwed into the threaded hole 21 on the shielding ring 2, while also taking into account the balance between strength and lightness.

[0047] For example, the diameter D1 of the armrest 12 is 4cm and the diameter D2 of the rod 11 is 1cm. At this time, the distance from the side of the armrest 12 to the side of the rod 11 is 1.5cm, and this 1.5cm area can be used by a person to hold it stably.

[0048] In this embodiment, the horizontal measuring component 121 includes a movable water column 1211 and a plurality of scale rings 1212 arranged around the water column 1211. In the horizontal state, the central axis of the water column 1211 and the handrail 12 coincide.

[0049] The handrail 12, which is the part for the operator to hold, may have a mounting groove at the end away from the rod 11 for securely connecting the level measuring component 121 to the handrail 12, for example, embedding the level measuring component 121 into the mounting groove; or, the level measuring component 121 may be integrally disposed on the surface of the handrail 12.

[0050] The horizontal measuring component 121 is arranged on the side of the handrail 12 away from the rod 11, which helps to keep the horizontal measuring component 121 within the operator's field of vision during operation, facilitating quick reading and response.

[0051] The horizontal measuring component 121 can be a universal level. The thickness of the horizontal measuring component 121 can be 0.5 cm, and the metric of the hole positions of the horizontal measuring component 121 is 1.5 mm. The multiple scale rings 1212 of the horizontal measuring component 121 correspond to multiple tilt angles, of which the maximum tilt angle is 5° and the minimum tilt angle is 1°. The optimal position is when the water column 1211 is at the center of the horizontal measuring component 121. By observing whether the water column 1211 of the horizontal measuring component 121 is at the center of the horizontal measuring component 121, it can be determined whether the shielding ring 2 is tilted.

[0052] In this embodiment, the diameter D3 of the horizontal measuring component 121 is smaller than the diameter D1 of the handrail portion 12.

[0053] Since the horizontal measuring component 121 is located on the side of the armrest 12 away from the rod 11, and its central axis coincides with the armrest 12, if the diameter D3 of the horizontal measuring component 121 is too large, it may affect the comfort of operation during gripping or even cause accidental touches, thereby affecting the safety and accuracy of the fixture 1. Therefore, by setting the diameter D3 of the horizontal measuring component 121 to be smaller than the diameter D1 of the armrest 12, the horizontal measuring component 121 is located entirely within the outline of the armrest 12, thereby ensuring its visibility and functionality while avoiding interference with the gripping area.

[0054] This design allows the operator to naturally rest their hand on the surface of the handle 12 when assembling or disassembling the shielding ring 2 without having to deliberately avoid the horizontal measuring component 121. At the same time, the smaller diameter of the horizontal measuring component 121 also helps to maintain the simplicity and compactness of the fixture 1's shape, avoiding unnecessary space occupation or the risk of accidental collisions caused by the protruding horizontal measuring component 121.

[0055] In this embodiment, the diameter D3 of the horizontal measuring component 121 is 2.5 to 3.5 cm, and the diameter D1 of the handrail 12 is 3.5 to 4.5 cm.

[0056] For example, the diameter D3 of the horizontal measuring component 121 is 2.5cm, 3cm or 3.5cm, and the diameter D1 of the armrest 12 is 3.5cm, 4cm or 4.5cm. It is understood that the diameter D3 of the horizontal measuring component 121 and the diameter D1 of the armrest 12 can be selected within the above range, as long as the horizontal measuring component 121 does not affect the normal grip of the armrest 12.

[0057] In this embodiment, the accuracy of the horizontal measuring component 121 is ±1.5mm / 5m.

[0058] It should be noted that the fixture 1 uses a leveling component 121 on the handle 12 to monitor the installation posture of the shielding ring 2 in real time, ensuring that it remains nearly horizontal during lifting or placement. Since the shielding ring 2 is a critical component in the etching equipment, a significant deviation in its installation angle could lead to serious problems such as poor contact with the electrostatic chuck, uneven force distribution, or even collisions, thus affecting the stability of the equipment and the yield rate. Therefore, the leveling component 121 used must have sufficient detection accuracy to meet the sensitive feedback requirements for minute changes in tilt angle during actual operation.

[0059] The accuracy of the horizontal measuring component 121 is ±1.5mm / 5m, which means that on a reference surface with a measurement length of 5 meters, the maximum height difference that the horizontal measuring component 121 can indicate does not exceed 1.5 mm, which is equivalent to an inclination angle of about 0.017 degrees, belonging to a high-precision level of horizontal detection capability.

[0060] Operators can accurately determine whether fixture 1 is in a stable horizontal state using this high-precision leveling component 121, thereby improving the control accuracy and operational safety during the installation and removal of the shielding ring 2. At the same time, this leveling accuracy is also highly practical in real-world applications, avoiding misjudgments due to excessive sensitivity and providing effective warnings even for minute tilts that are difficult to detect with the naked eye, ensuring the reliability of the shielding ring 2 installation.

[0061] Along the axial direction of the rod 11, the length L1 of the handrail 12 is 1.5 to 2.5 cm, and the length L2 of the rod 11 is 7.5 to 8.5 cm.

[0062] It should be noted that the length L2 of the rod 11 directly affects the axial spatial distance between the user's hand and the shielding ring 2. If the user's hand gets too close to the shielding ring 2 during operation, accidental contact or friction may cause the coating to peel off or even lead to component failure. Therefore, setting the length of the rod 11 within the range of 7.5 to 8.5 cm can effectively extend the physical distance between the user's hand and the shielding ring 2, thereby avoiding direct contact between the hand and the shielding ring 2. At the same time, the length L1 of the armrest 12 is controlled between 1.5 and 2.5 cm, which provides sufficient grip area to ensure operational stability without increasing overall dimensional redundancy or affecting operational flexibility due to excessive length.

[0063] In the diagonal synchronous operation scenario, the two fixtures 1 are respectively installed in the threaded holes 21 at symmetrical positions of the shielding ring 2. When the operator holds the handle 12 and lifts or lowers the shielding ring 2 along the axial direction of the rod 11, the longer length of the rod 11 can effectively prevent the hand from contacting the shielding ring 2, thereby significantly reducing the risk of accidental collision caused by improper operation.

[0064] For example, the length L1 of the handrail 12 is 2cm and the length L2 of the rod 11 is 8cm. At this time, the axial space distance between the person's hand and the shielding ring 2 is 8cm, which effectively avoids the hand from contacting the shielding ring 2.

[0065] In this embodiment, the length L3 of the threaded segment 111 is greater than or equal to 0.5cm.

[0066] It should be noted that the threaded section 111, as the core component establishing the connection between fixture 1 and shielding ring 2, directly affects the reliability and load-bearing capacity of the connection. If the threaded section 111 is too short, it may result in insufficient screw-in depth, thereby reducing the connection strength and increasing the risk of stripping, disengagement, or even breakage during operation. Especially when diagonal synchronous operation is required, the forces on the two fixtures 1 must be highly consistent. If one fixture is not securely connected due to an excessively short threaded section 111, it can easily cause the shielding ring 2 to tilt or be unbalanced, leading to installation failure or damage to critical components such as the electrostatic chuck.

[0067] Setting the length L3 of the threaded section 111 to be greater than or equal to 0.5 cm ensures that the connection has sufficient tensile and torsional strength while meeting the requirements for effective engagement with the threaded hole 21 of the shielding ring 2. This length range can accommodate the depth requirements of the threaded hole 21 of the conventional shielding ring 2, and also provide sufficient engagement length in actual operation to withstand dynamic loads during lifting or placing.

[0068] For example, the length L3 of the threaded segment 111 is 0.5cm, 0.6cm or 0.7cm. It can be understood that the length L3 of the threaded segment 111 is greater than or equal to 0.5cm and can be matched with the depth of the threaded hole 21 on the shielding ring 2.

[0069] In an optional embodiment, a gravity sensing device 13 is also provided inside the armrest 12. Figure 2 (Not shown), the gravity sensing device 13 is composed as follows: Figure 7 As shown, the gravity sensing device 13 includes a gravity sensing unit 131 and a signal display unit 132. The signal from the gravity sensing unit 131 is transmitted to the signal display unit 132. The gravity sensing unit 131 is disposed inside the handrail part 12, and the signal display unit 132 is disposed on the outer wall of the handrail part 12.

[0070] It should be noted that the gravity sensor 13 is a miniature weighing device capable of measuring the weight of an object. This gravity sensor 13 can measure the weight of a shielding ring 2 less than 5 kg. The gravity sensor 13 is integrated into the handrail 12 and is used to perform real-time weight detection of the shielding ring 2 during its installation and removal. The gravity sensor 13 is located inside the handrail 12 and below the horizontal measuring component 121. The gravity sensor 131 can be a load cell, and the signal display 132 can be a display screen located on the outer wall of the handrail 12, allowing for real-time viewing of the gravity value detected by the gravity sensor 13.

[0071] The gravity sensing device 13 also includes a signal conversion circuit and a controller 133. The signal conversion circuit includes a signal conditioning circuit 134 and an AD conversion circuit 135. The gravity sensing unit 131 can collect load data acting on the fixture 1. The signal from the gravity sensing unit 131 is converted into an electrical signal by the signal conversion circuit and transmitted to the controller 133. The controller then transmits the electrical signal to the signal display unit 132 for external display. Since the shielding ring 2 is a high-value precision part, its quality status needs to be assessed before cleaning, rework, or replacement. If the quality is abnormal due to surface contamination, foreign matter adhesion, or structural damage, it may affect the stability of subsequent processes. Therefore, the design of the gravity sensing device 13 built into the armrest 12 allows operators to make a preliminary judgment on the quality of the shielding ring 2 while performing disassembly and assembly tasks without adding extra operating steps, thereby improving the efficiency and accuracy of the overall maintenance process. At the same time, to facilitate data reading, the signal display unit is usually located on the outer wall of the armrest 12 for easy observation.

[0072] The gravity sensor 13 also includes a power control terminal, which includes a power output section 136 and a switch 137. The power output section 136 provides power to the gravity sensor 13, and the switch 137 is located on the outer wall of the handrail section 12. The switch 137 can switch the power supply state of the power output section 136. As a specific embodiment, the power output section 136 can be powered by a battery. The power output section 136 includes a battery and a groove for accommodating the battery. The groove can be located on the outer wall of the handrail section 12 to allow for periodic battery replacement and ensure the normal operation of the gravity sensor 13.

[0073] In summary, this application provides a fixture 1, which includes a rod 11 with a threaded section 111 and a handrail 12. The handrail 12 is provided with a level measuring component 121. After connecting the threaded section 111 to the threaded hole 21 on the shielding ring 2, the level measuring component 121 on the handrail 12 determines whether the fixture 1 and the shielding ring are in a horizontal state. By holding the handrail 12, the shielding ring 2 can be lifted or placed, realizing non-contact disassembly and assembly of the shielding ring 2, significantly reducing the probability of component damage caused by human factors and improving equipment maintenance efficiency.

[0074] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A fixture for a semiconductor etching apparatus, characterized in that, It can be used to replace the shielding ring in the semiconductor etching apparatus, including: The rod body has a threaded section at its bottom, which is used to mate with the threaded hole on the shielding ring; The handrail is connected to the top of the rod, and a level measuring component is provided at the center of the surface of the handrail. In the non-operating state of the semiconductor etching device, the threaded sections of the two fixtures respectively engage with the threaded holes diagonally opposite the shielding ring, and the horizontal measuring component enables the handrail to be held horizontally to complete the replacement of the shielding ring.

2. The fixture according to claim 1, characterized in that, Both the rod and the handrail are cylindrical, with their central axes coinciding. The diameter of the handrail is larger than that of the rod.

3. The fixture according to claim 2, characterized in that, The leveling component includes a movable water column and multiple graduated rings surrounding the water column. In a horizontal state, the water column and the central axis of the handrail coincide.

4. The fixture according to claim 3, characterized in that, The diameter of the horizontal measuring component is smaller than the diameter of the handrail.

5. The fixture according to claim 1, characterized in that, The handrail is also equipped with a gravity sensor, which includes a gravity sensor and a signal display. The signal from the gravity sensor is transmitted to the signal display. The gravity sensor is located inside the handrail, and the signal display is located on the outer wall of the handrail.

6. The fixture according to claim 5, characterized in that, The gravity sensing device further includes a signal conversion circuit and a controller; the signal from the gravity sensing unit is converted into an electrical signal by the signal conversion circuit and transmitted to the controller, and the controller transmits the electrical signal to the signal display unit.

7. The fixture according to claim 6, characterized in that, The gravity sensing device also includes a power control terminal, which provides power to the gravity sensing device. The power control terminal includes a power output section and a switch, which is disposed on the outer wall of the handrail.

8. The fixture according to claim 2, characterized in that, The diameter of the handrail is 3.5 to 4.5 cm, and the diameter of the rod is 0.5 to 1.5 cm.

9. The fixture according to claim 1, characterized in that, Along the axial direction of the rod, the length of the handrail is 1.5 to 2.5 cm, and the length of the rod is 7.5 to 8.5 cm.

10. The fixture according to claim 1, characterized in that, The length of the threaded section is greater than or equal to 0.5 cm.

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