Battery piece anti-deviation device for etching process and etching equipment

CN224818529UActive Publication Date: 2026-09-29SUZHOU KZONE EQUIP TECH
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Patent Information

Application Number
CN202522137359.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-10-10
Publication Date
2026-09-29
Estimated Expiration
2035-10-10

AI Technical Summary

Technical Problem

电池片在管式炉中进行扩散工艺之后,进入刻蚀槽内经过酸洗和碱洗对电池片背面的磷硅玻璃去除,由于电池片在刻蚀槽内通过滚轮传输,且电池片重量较轻,导致电池片在传输过程中偏移,导致电池片隐裂,甚至堵片碎片等

Benefits of technology

[0025]本实用新型公开了一种刻蚀制程的电池片防偏移装置,用于向刻蚀槽内滚轮上的电池片喷淋液体介质,刻蚀制程的电池片防偏移装置包括储液箱、动力泵和中空喷淋件,储液箱容置有液体介质,动力泵的进口通过出水管路与储液箱的出口连通,中空喷淋件包括本体部和多个十字形喷淋部,本体部通过喷淋管路与动力泵的出口连通,多个十字形喷淋部沿滚轮的轴向方向依次连接且连通,且十字形喷淋部上开设有多个喷淋孔,本体部与任意一个十字形喷淋部连接且连通,沿滚轮的轴向方向间隔排布的电池片的上方均设置有一个十字形喷淋部,喷淋孔朝向电池片。

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Abstract

The utility model belongs to wet process equipment technical field discloses a kind of etching process's battery piece anti-deviation device and etching equipment. Etching process's battery piece anti-deviation device, for the battery piece on the roller in etching groove is sprayed liquid medium, including liquid storage tank, power pump and hollow spray part, liquid storage tank is housed with liquid medium, the import of power pump is communicated with the outlet of liquid storage tank by outlet pipeline, hollow spray part includes body portion and multiple cross-shaped spray parts, body portion is communicated with the outlet of power pump by spray pipeline, multiple cross-shaped spray parts are sequentially connected and communicated along the axial direction of roller, multiple spray holes are provided on cross-shaped spray part, body portion is connected and communicated with any one cross-shaped spray part, the top of battery piece spaced apart along the axial direction of roller is provided with one cross-shaped spray part, and spray hole is towards battery piece. The etching process's battery piece anti-deviation device and etching equipment reduce the offset of battery piece transmission.
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Description

Technical Field

[0001] This utility model relates to the field of wet process equipment technology, and in particular to a battery cell anti-displacement device and etching equipment for etching process. Background Technology

[0002] In the production of solar cells, etching is one of the crucial steps. It removes the phosphosilicate glass on the back of the cell from the diffusion process, preventing short circuits in the PN junction. After diffusion in a tube furnace, the cells enter an etching tank where acid and alkali washing removes the phosphosilicate glass from the back. Because the cells are transported by rollers within the etching tank and are relatively lightweight, they can shift during transport, leading to microcracks or even cell fragmentation.

[0003] The water film device in the related technology uses a water pump and a water supply pipe to pump water from a water tank into a spray pipe. The spray pipe is connected to multiple throttling valves, which can spray water onto the solar cells to form a water film on the solar cells, thus increasing the weight of a single solar cell. However, when the water film device is powered off, the water pump stops working, and the water in the water supply pipe will generate a water hammer effect, causing the water flow to oscillate in reverse for a short time, which impacts the water pump. In addition, when spraying water onto the solar cells, the valves of multiple throttling valves need to be manually adjusted, resulting in different water flow rates through each valve. This leads to uneven water spreading on different parts of the solar cells, affecting the transmission trajectory of the solar cells.

[0004] Therefore, there is an urgent need for a cell offset prevention device in the etching process to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a battery cell anti-displacement device and etching equipment for the etching process. It ensures that a uniform liquid medium is formed on the surface of each battery cell, thereby achieving a counterweight function for the battery cell, reducing the offset of the battery cell during transmission on the rollers, and avoiding deviation in the battery cell's transmission trajectory caused by uneven coverage of the liquid medium on the battery cell.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] A cell misalignment prevention device for an etching process, used to spray a liquid medium onto the cells on rollers within the etching tank, the cell misalignment prevention device for the etching process comprising:

[0008] A liquid storage tank, wherein the liquid storage tank contains the liquid medium;

[0009] A power pump, the inlet of which is connected to the outlet of the liquid storage tank via a water outlet pipe;

[0010] A hollow spraying component includes a main body and multiple cross-shaped spraying sections. The main body is connected to the outlet of the power pump through a spraying pipe. The multiple cross-shaped spraying sections are sequentially connected and communicate with each other along the axial direction of the roller. Each cross-shaped spraying section has multiple spray holes. The main body is connected and communicates with any one of the cross-shaped spraying sections. A cross-shaped spraying section is provided above each of the battery cells arranged at intervals along the axial direction of the roller, and the spray holes face the battery cells.

[0011] Preferably, the center of the cross-shaped spray section corresponds to the center of the battery cell.

[0012] Preferably, the cross-shaped spray section has twelve spray holes, with six spray holes along the axial direction of the roller and six spray holes along the transport direction of the battery cell, and the axial direction of the roller is perpendicular to the transport direction of the battery cell.

[0013] Preferably, the cell misalignment prevention device in the etching process further includes:

[0014] A liquid recovery tank, which is connected to the etching tank;

[0015] The recovery pump has its inlet connected to the liquid recovery tank via a first recovery pipeline, and its outlet connected to the liquid storage tank via a second recovery pipeline.

[0016] Preferably, the liquid storage tank includes:

[0017] The liquid storage body is connected to the second recovery pipeline, and the liquid storage body contains the liquid medium.

[0018] An overflow circuit is provided, with one end connected to the top of the liquid storage body and the other end connected to the liquid recovery tank.

[0019] Preferably, the cell anti-displacement device in the etching process further includes a filter connected to the water outlet pipe.

[0020] Preferably, the cell anti-displacement device in the etching process further includes a one-way valve, which is disposed on the spray pipeline.

[0021] Preferably, the cell anti-displacement device in the etching process further includes a flow meter, which is installed on the spray pipe.

[0022] Preferably, the cell anti-displacement device in the etching process further includes a controller, which is electrically connected to the power pump, and the flow meter is communicatively connected to the controller.

[0023] An etching apparatus, comprising an apparatus body and a cell anti-displacement device for the etching process as described above, wherein the cell anti-displacement device for the etching process is located upstream of the apparatus body along the transport direction of the cell in the etching apparatus.

[0024] The beneficial effects of this utility model are:

[0025] This utility model discloses a battery cell anti-displacement device for an etching process, used to spray liquid medium onto battery cells on rollers in an etching tank. The battery cell anti-displacement device for an etching process includes a liquid storage tank, a power pump, and a hollow spray component. The liquid storage tank contains liquid medium, and the inlet of the power pump is connected to the outlet of the liquid storage tank through a water outlet pipe. The hollow spray component includes a main body and multiple cross-shaped spray sections. The main body is connected to the outlet of the power pump through a spray pipe. The multiple cross-shaped spray sections are sequentially connected and interconnected along the axial direction of the rollers, and multiple spray holes are opened on the cross-shaped spray sections. The main body is connected and interconnected with any one of the cross-shaped spray sections. A cross-shaped spray section is provided above each of the battery cells arranged at intervals along the axial direction of the rollers, and the spray holes face the battery cells.

[0026] When the liquid medium is sprayed onto the solar cells, the power pump starts. The power pump draws the liquid medium from the storage tank through the inlet outlet pipe and, under the action of the power pump, pumps the liquid medium through the outlet spray pipe into the body of the hollow spray unit. The body evenly distributes the liquid medium into each cross-shaped spray section arranged along the roller axis. The liquid medium flows within the cross-shaped spray sections to each spray hole, and then the spray holes spray the liquid medium onto the solar cells on the lower roller, forming a uniform and continuous liquid medium on the surface of each solar cell. This setup ensures that a uniform and consistent thickness of liquid medium is formed on the surface of each solar cell, thus providing a counterweight function and indirectly increasing the weight of each solar cell. This reduces the offset of the solar cells during transmission on the roller and avoids deviation in the solar cell transmission trajectory caused by uneven liquid medium coverage. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of a battery cell anti-displacement device for an etching process provided in an embodiment of this utility model;

[0028] Figure 2 This is a schematic diagram of the movement of the battery cell on the roller provided in this embodiment of the utility model;

[0029] Figure 3 This is a first schematic diagram of the hollow spray component provided in this embodiment of the utility model;

[0030] Figure 4This is a second schematic diagram of the hollow spray component provided in this embodiment of the utility model.

[0031] In the picture:

[0032] 1. Liquid storage tank; 11. Liquid storage body;

[0033] 2. Power pump;

[0034] 3. Hollow spray component; 31. Main body; 32. Cross-shaped spray section; 321. Spray hole;

[0035] 4. Water outlet pipe; 5. Sprinkler pipe; 6. Flow meter; 7. Check valve;

[0036] 20. Roller; 30. Battery cell. Detailed Implementation

[0037] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar parts or parts having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0038] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection or a detachable connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0039] In the description of this utility model, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0040] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0041] This embodiment provides a device for preventing battery cell misalignment during an etching process, used to spray a liquid medium onto the battery cell 30 on the roller 20 within the etching groove, such as... Figure 1 and Figure 2 As shown, the anti-displacement device for the battery cells in the etching process includes a liquid storage tank 1, a power pump 2, and a hollow spray component 3. The liquid storage tank 1 contains a liquid medium. The inlet of the power pump 2 is connected to the outlet of the liquid storage tank 1 through a water outlet pipe 4. The hollow spray component 3 includes a body part 31 and multiple cross-shaped spray parts 32. The body part 31 is connected to the outlet of the power pump 2 through a spray pipe 5. The multiple cross-shaped spray parts 32 are connected and communicated sequentially along the axial direction of the roller 20. Multiple spray holes 321 are opened on the cross-shaped spray parts 32. The body part 31 is connected and communicated with any one of the cross-shaped spray parts 32. A cross-shaped spray part 32 is provided above each of the battery cells 30 arranged at intervals along the axial direction of the roller 20, and the spray holes 321 face the battery cells 30.

[0042] When the liquid medium is sprayed onto the battery cell 30, the power pump 2 is activated. The power pump 2 draws the liquid medium from the storage tank 1 through the inlet outlet pipe 4. Under the action of the power pump 2, the liquid medium is pumped into the body part 31 of the hollow spraying component 3 through the outlet spray pipe 5. The body part 31 evenly distributes the liquid medium into each cross-shaped spray section 32 arranged along the axial direction of the roller 20. The liquid medium flows into each spray hole 321 within the cross-shaped spray section 32. Then, the spray holes 321 spray the liquid medium onto the battery cell 30 on the lower roller 20, forming a uniform and continuous liquid medium on the surface of each battery cell 30. Through the above settings, a uniform and consistent thickness of liquid medium is formed on the surface of each battery cell 30, thereby achieving the counterweight function of the battery cell 30, indirectly increasing the weight of each battery cell 30, reducing the offset of the battery cell 30 during transmission on the roller 20, and avoiding the deviation of the transmission trajectory of the battery cell 30 caused by uneven coverage of the liquid medium on the battery cell 30.

[0043] Specifically, in this embodiment, the liquid medium is pure water. In other embodiments, the liquid medium may be recycled pure water, recycled acid, or recycled alkali, etc. No limitations are imposed here.

[0044] Specifically, in this embodiment, the size of the battery cell 30 is 210mm x 210mm. In other embodiments, the size of the battery cell 30 is 182mm x 182.2mm, or the size of the battery cell 30 is 183mm x 182mm, etc. No limitation is made here.

[0045] Specifically, the weight of a single battery cell 30 is 8g, and the weight of a single battery cell 30 sprayed with a liquid medium of uniform thickness is 108g, which significantly increases the friction between the battery cell 30 and the roller 20, thereby reducing the risk of the battery cell 30 shifting during transmission on the roller 20.

[0046] Specifically, when the liquid medium is sprayed onto the battery cell 30 through the spray hole 321, the impurities attached to the upper surface of the battery cell 30 are removed by the impact force and dissolving effect of the water flow, thereby achieving efficient cleaning of the upper surface of the battery cell 30.

[0047] Specifically, such as Figure 1 As shown, in this embodiment, specifically, the power pump 1 is a first diaphragm pump. In other embodiments, the power pump 2 is a first plunger pump or a first gear pump, etc. No limitation is made here.

[0048] Specifically, in this embodiment, such as Figure 2 As shown, the center of the cross-shaped spray section 32 corresponds to the center of the battery cell 30. This corresponding arrangement ensures that the spray intensity at the four corners and the center of the battery cell 30 is consistent, and the spray area of ​​the liquid medium symmetrically covers the entire battery cell 30, improving the spray uniformity of the battery cell 30 and avoiding deviation of the transmission trajectory of the battery cell 30 on the roller 20 caused by uneven coverage of the liquid medium on the battery cell 30. In other embodiments, the center of the cross-shaped spray section 32 corresponds to a position slightly to the left or right of the center of the battery cell 30.

[0049] Specifically, such as Figure 3 As shown, in this embodiment, the cross-shaped spray section 32 has twelve spray holes 321. Six of the spray holes 321 are arranged along the axial direction of the roller 20 and six along the transport direction of the battery cell 30. The axial direction of the roller 20 is perpendicular to the transport direction of the battery cell 30. Through the synergistic effect of the multiple spray holes 321 in two perpendicular directions, the liquid medium forms a dense and uniform coverage area on the surface of the battery cell 30, improving the efficiency and uniformity of the liquid medium formation on the battery cell 30. In other embodiments, the cross-shaped spray section 32 has ten spray holes 321, with five spray holes 321 along the axial direction of the roller 20 and five spray holes 321 along the transport direction of the battery cell 30. Alternatively, the cross-shaped spray section 32 has sixteen spray holes 321, with eight spray holes 321 along the axial direction of the roller 20 and eight spray holes 321 along the transport direction of the battery cell 30, and so on. No limitation is made here.

[0050] More specifically, in this embodiment, the diameter of the spray hole 321 is 0.5 mm, and the distance between the centers of two adjacent spray holes 321 along the axial direction of the roller 20 is 30 mm, and the distance between the centers of two adjacent spray holes 321 along the transport direction of the battery cell 30 is also 30 mm. In other embodiments, the diameter of the spray hole 321 is 0.5 mm, and the distance between the centers of two adjacent spray holes 321 along the axial direction of the roller 20 is 25 mm, and the distance between the centers of two adjacent spray holes 321 along the transport direction of the battery cell 30 is also 25 mm; or the diameter of the spray hole 321 is 1 mm, and the distance between the centers of two adjacent spray holes 321 along the axial direction of the roller 20 is 30 mm, and the distance between the centers of two adjacent spray holes 321 along the transport direction of the battery cell 30 is also 30 mm, etc. No limitations are imposed here.

[0051] Optionally, in this embodiment, the cell misalignment prevention device in the etching process further includes a liquid recovery tank and a recovery pump. The liquid recovery tank and the etching tank are connected. The inlet of the recovery pump is connected to the liquid recovery tank through a first recovery pipeline, and the outlet of the recovery pump is connected to the storage tank 1 through a second recovery pipeline. By utilizing the liquid medium recovered in the liquid recovery tank, the amount of liquid medium replenishment is significantly reduced, thereby reducing raw material consumption costs and waste liquid discharge.

[0052] Specifically, the etching tank includes a mixed acid tank, a pure water tank, an acid pickling tank, and an alkaline washing tank that are not interconnected. The liquid recovery tank is connected to any one of the mixed acid tank, the pure water tank, the acid pickling tank, and the alkaline washing tank. More specifically, in this embodiment, the liquid recovery tank is connected to the pure water tank. In other embodiments, the liquid recovery tank is connected to the mixed acid tank, or the liquid recovery tank is connected to the acid pickling tank, or the liquid recovery tank is connected to the alkaline washing tank, etc. No limitations are imposed here.

[0053] Specifically, in this embodiment, the recovery pump is a second diaphragm pump. In other embodiments, the recovery pump is a second plunger pump or a second gear pump, etc. No limitation is made here.

[0054] Specifically, taking an etching tank with 13,500 cells / hour and 210mm x 210mm cells with a front-to-back distance of 30mm as an example, the total flow rate of the liquid medium required is 2.156L / min. Based on an average daily operating time of 22 hours, 2845.9L of water can be saved per day.

[0055] Specifically, such as Figure 1 As shown, the liquid storage tank 1 includes a liquid storage body 11 and an overflow circuit. The second recovery pipeline is connected to the liquid storage body 11, and the liquid storage body 11 contains a liquid medium. One end of the overflow circuit is connected to the top of the liquid storage body 11, and the other end of the overflow circuit is connected to the liquid recovery tank.

[0056] When the recovery pump pumps the recovered liquid medium into the liquid storage body 11, the second recovery pipeline transports the recovered liquid medium from the liquid recovery tank to the liquid storage body 11. When the liquid level in the liquid storage body 11 exceeds the top threshold, the excess liquid medium will automatically enter the overflow circuit and flow back to the liquid recovery tank through the overflow circuit. This ensures the safe operation of the liquid storage tank 1 and realizes the recovery of the liquid medium.

[0057] Optionally, such as Figure 1 As shown, the anti-displacement device for the solar cell during the etching process also includes a filter (not shown in the figure), which is connected to the water outlet pipe 4. The filter can filter impurities in the liquid medium, preventing impurities from clogging the spray holes 321 or from being sprayed from the spray holes 321 onto the solar cell 30.

[0058] It should be noted that, given the existing filter structure, the filter in this embodiment can be any type of filter from the prior art. Further details will not be provided here.

[0059] Optionally, as shown in Figure 1, the anti-deviation device for the battery cell during the etching process also includes a one-way valve 7, which is installed on the spray pipe 5. When the power pump 2 is de-energized, the liquid medium in the spray pipe 5 will generate a water hammer effect. The one-way valve 7 prevents the liquid medium in the spray pipe 5 from flowing back, thus avoiding damage to the front pump body due to the reverse impact of the liquid medium, and also preventing partial interruption of the liquid medium sprayed from the spray hole 321 when the power pump 2 is re-energized. This ensures the stability of the spray pressure and flow rate of the liquid medium, guarantees the uniformity of the liquid medium on the surface of the battery cell 30, and ensures the movement trajectory of the battery cell 30.

[0060] Optionally, such as Figure 1 As shown, the anti-deviation device for the battery cells during the etching process also includes a flow meter 6, which is installed on the spray pipe 5. The flow meter 6 is installed to monitor the flow rate of the liquid medium flowing from the spray pipe 5 into the hollow spray element 3.

[0061] Specifically, such as Figure 1 As shown, the anti-deviation device for the solar cells during the etching process also includes a controller (not shown in the figure). The controller is electrically connected to the power pump 2, and the flow meter 6 is communicatively connected to the controller. With this setup, after receiving the real-time flow data from the flow meter 6, the controller compares it with the preset target flow parameters. If the actual flow deviates from the target value, the controller immediately sends an adjustment signal to the power pump 2 to correct its operating parameters until the actual flow returns to the target range. This ensures that the liquid medium sprayed onto each solar cell 30 is uniform and of consistent thickness, guaranteeing a consistent movement trajectory for each solar cell 30.

[0062] It should be noted that in this embodiment, the controller is a programmable logic controller (PLC). In other embodiments, the controller may be a distributed control system or a microcontroller, etc. No limitations are imposed here.

[0063] This embodiment also provides an etching apparatus, which includes an apparatus body and a cell anti-displacement device for the etching process. Along the transport direction of the cell 30 in the etching apparatus, the cell anti-displacement device is located upstream of the apparatus body. By setting the cell anti-displacement device upstream of the apparatus body, a uniform liquid medium is formed on the surface of each cell 30, thereby achieving a counterweight function for the cell 30. This indirectly increases the weight of each cell 30, reduces the offset of the cell 30 during transport on the rollers, and avoids deviation of the cell 30's transport trajectory due to uneven coverage of the liquid medium on the cell 30.

[0064] Optionally, in this embodiment, the etching equipment further includes a feeding mechanism. Along the transmission direction of the battery cell 30 in the etching equipment, the feeding mechanism is located upstream of the battery cell anti-displacement device in the etching process. The feeding mechanism can place the battery cell 30 onto the roller 20. The feeding mechanism is electrically connected to the controller. When the feeding mechanism continuously places the battery cell 30 onto the roller 20, the programmable logic controller transmits a feeding signal to the power pump 2. Then, the power pump 2 pumps the liquid medium into the cross-shaped spray section 32, and then sprays it out from the spray hole 321. When the feeding mechanism stops placing the battery cell 30 onto the roller 20, the programmable logic controller transmits a signal to the power pump 2, and the power pump 2 stops working.

[0065] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A device for preventing cell misalignment during etching, used to spray a liquid medium onto the cell (30) on a roller (20) in an etching tank, characterized in that, The cell misalignment prevention device in the etching process includes: A liquid storage tank (1) contains the liquid medium; The power pump (2) has its inlet connected to the outlet of the liquid storage tank (1) via the water outlet pipe (4); Hollow spray component (3), the hollow spray component (3) includes a body part (31) and a plurality of cross-shaped spray parts (32). The body part (31) is connected to the outlet of the power pump (2) through a spray pipe (5). The plurality of cross-shaped spray parts (32) are connected and communicated sequentially along the axial direction of the roller (20). The cross-shaped spray parts (32) are provided with a plurality of spray holes (321). The body part (31) is connected and communicated with any one of the cross-shaped spray parts (32). A cross-shaped spray part (32) is provided above each of the battery cells (30) arranged at intervals along the axial direction of the roller (20). The spray holes (321) face the battery cells (30).

2. The battery cell anti-displacement device for etching process according to claim 1, characterized in that, The center of the cross-shaped spray section (32) corresponds to the center of the battery cell (30).

3. The cell anti-displacement device for the etching process according to claim 1, characterized in that, The cross-shaped spray section (32) has twelve spray holes (321), and six of the spray holes (321) are arranged along the axial direction of the roller (20) and along the transmission direction of the battery cell (30). The axial direction of the roller (20) is perpendicular to the transmission direction of the battery cell (30).

4. The cell anti-displacement device for the etching process according to claim 1, characterized in that, The cell misalignment prevention device in the etching process also includes: A liquid recovery tank, which is connected to the etching tank; The inlet of the recovery pump is connected to the liquid recovery tank through a first recovery pipeline, and the outlet of the recovery pump is connected to the liquid storage tank (1) through a second recovery pipeline.

5. The cell anti-displacement device for the etching process according to claim 4, characterized in that, The liquid storage tank (1) includes: The liquid storage body (11) is connected to the second recovery pipeline, and the liquid storage body (11) contains the liquid medium. An overflow circuit is provided, with one end connected to the top of the liquid storage body (11) and the other end connected to the liquid recovery tank.

6. The cell anti-displacement device for the etching process according to any one of claims 1-5, characterized in that, The battery cell anti-displacement device in the etching process also includes a filter, which is connected to the water outlet pipe (4).

7. The cell anti-displacement device for the etching process according to any one of claims 1-5, characterized in that, The battery cell anti-displacement device in the etching process also includes a one-way valve (7), which is disposed on the spray pipe (5).

8. The cell anti-displacement device for the etching process according to any one of claims 1-5, characterized in that, The battery cell anti-displacement device in the etching process also includes a flow meter (6), which is installed on the spray pipe (5).

9. The cell anti-displacement device for etching process according to claim 8, characterized in that, The battery cell anti-displacement device in the etching process also includes a controller, which is electrically connected to the power pump (2), and the flow meter (6) is communicatively connected to the controller.

10. Etching equipment, characterized in that, The etching equipment includes an equipment body and a cell anti-displacement device for the etching process as described in any one of claims 1-9. Along the transmission direction of the cell (30) in the etching equipment, the cell anti-displacement device for the etching process is located upstream of the equipment body.