A wet process apparatus and a battery production line
Patent Information
- Application Number
- CN202522150371.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-11
- Publication Date
- 2026-09-29
- Estimated Expiration
- 2035-10-11
AI Technical Summary
但是这样一来,花篮和硅片上还沾附有大量的溶液,一方面该溶液进入下一工序可能会造成污染,影响产品质量,另一方面会导致溶液浪费,增加工艺成本
本实用新型提供的湿法设备,安装架连接于机械臂的自由端,安装架与花篮连接,花篮用于装载硅片,溶液槽用于盛装溶液,机械臂用于通过花篮带动硅片伸入溶液槽且与溶液接触;吹扫机构安装于安装架,且设置于花篮的上方,吹扫机构用于在机械臂通过花篮带动硅片缩出溶液槽时对花篮和硅片进行吹扫,以使花篮和硅片上沾附的溶液落回溶液槽。与现有技术相比,本实用新型提供的湿法设备由于采用了与安装架连接的花篮以及安装于安装架且设置于花篮上方的吹扫机构,所以能够有效去除花篮和硅片上沾附的溶液,避免造成污染,保证产品质量,并且避免造成溶液浪费,节约工艺成本。
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Figure CN224818530U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of battery production technology, and more specifically, to a wet process equipment and a battery production line. Background Technology
[0002] Currently, wet processing techniques are commonly used in the production of new energy batteries to clean, texturize, and polish silicon wafers, and corresponding wet processing equipment is employed in these processes. Modern wet processing equipment typically involves a robotic arm immersing a basket containing silicon wafers into a solution, allowing the solution to react with or clean the wafers. After a preset time, the robotic arm lifts the wafers from the basket and sends them to the next process. However, this process leaves a large amount of solution adhering to the basket and the wafers. This solution may contaminate the product in the next process, affecting product quality, and it also leads to solution waste and increased processing costs.
[0003] In view of this, designing and manufacturing a wet process equipment and battery production line that can guarantee product quality and save process costs is particularly important, especially in battery production. Utility Model Content
[0004] The purpose of this invention is to provide a wet process equipment that can effectively remove the solution adhering to the basket and silicon wafer, avoid pollution, ensure product quality, avoid solution waste, and save process costs.
[0005] Another objective of this invention is to provide a battery production line that can effectively remove the solution adhering to the basket and silicon wafer, avoid pollution, ensure product quality, avoid solution waste, and save process costs.
[0006] This utility model is achieved by the following technical solution.
[0007] A wet process equipment includes a robotic arm, a mounting frame, a basket, a purging mechanism, and a solution tank. The mounting frame is connected to the free end of the robotic arm and is connected to the basket. The basket is used to load silicon wafers, and the solution tank is used to hold a solution. The robotic arm is used to drive the silicon wafers into the solution tank and into contact with the solution via the basket. The purging mechanism is installed on the mounting frame and positioned above the basket. The purging mechanism is used to purge the basket and silicon wafer when the robotic arm pulls the silicon wafer out of the solution tank through the basket, so that the solution adhering to the basket and silicon wafer falls back into the solution tank.
[0008] Optionally, the purging mechanism includes an air pump, an air pipe, and an air nozzle. One end of the air pipe is connected to the air pump, and the other end is connected to the air nozzle. The air nozzle is mounted on the mounting bracket and is used to spray air towards the basket and silicon wafer.
[0009] Optionally, the purging mechanism also includes a translation component connected to the air nozzle, which is slidably engaged with the mounting bracket. The translation component is used to drive the air nozzle to slide relative to the mounting bracket.
[0010] Optionally, the translation assembly includes a drive unit, a lead screw, and a nut seat. The drive unit is mounted on a mounting bracket and connected to the lead screw. The nut seat is sleeved on the lead screw and threadedly engaged with the lead screw, and connected to an air nozzle.
[0011] Optionally, there are multiple translation components and air nozzles. The air pipe includes a main pipe and multiple branch pipes. One end of the main pipe is connected to the air pump, and the other end is connected to multiple branch pipes. Each branch pipe is connected to an air nozzle, and each air nozzle is connected to a translation component. Multiple translation components are arranged in parallel and spaced apart.
[0012] Optionally, the mounting frame includes a top plate, a first side plate, and a second side plate. The first side plate and the second side plate are disposed opposite to each other at both ends of the top plate and are both connected to the top plate. The top plate is connected to the robotic arm. The blowing mechanism is installed on the top plate, and the flower basket is connected between the first side plate and the second side plate.
[0013] Optionally, the first side panel is provided with a first hook, the second side panel is provided with a second hook, one side of the flower basket is provided with a first hanging ring, and the other side is provided with a second hanging ring. The first hanging ring is hooked to the first hook, and the second hanging ring is hooked to the second hook.
[0014] Optionally, the solution tank includes a tank body, a first tank cover, and a second tank cover. The first tank cover and the second tank cover are disposed opposite to each other on both sides of the tank body and are both hinged to the tank body. The first tank cover and the second tank cover are used together to open or close the tank body.
[0015] Optionally, there are multiple mounting racks, flower baskets, and blowing mechanisms. Multiple mounting racks are arranged side by side, each flower basket is connected to one mounting rack, and each blowing mechanism is mounted on one mounting rack.
[0016] A battery production line includes the aforementioned wet processing equipment. The wet processing equipment includes a robotic arm, a mounting frame, a basket, a purging mechanism, and a solution tank. The mounting frame is connected to the free end of the robotic arm and is connected to the basket. The basket is used to load silicon wafers, and the solution tank is used to hold a solution. The robotic arm is used to drive the silicon wafers into the solution tank via the basket and bring them into contact with the solution. The purging mechanism is mounted on the mounting frame and positioned above the basket. The purging mechanism is used to blow the basket and silicon wafers when the robotic arm drives the silicon wafers out of the solution tank via the basket, so that the solution adhering to the basket and silicon wafers falls back into the solution tank.
[0017] The wet processing equipment and battery production line provided by this utility model have the following beneficial effects: The wet processing equipment provided by this utility model includes a mounting frame connected to the free end of a robotic arm. The mounting frame is connected to a basket for loading silicon wafers, and a solution tank for holding the solution. The robotic arm uses the basket to guide the silicon wafers into the solution tank and into contact with the solution. A purging mechanism is mounted on the mounting frame and positioned above the basket. This purging mechanism purifies the basket and silicon wafers as the robotic arm retracts the silicon wafers from the solution tank, causing the solution adhering to them to fall back into the solution tank. Compared to existing technologies, the wet processing equipment provided by this utility model, due to the use of a basket connected to the mounting frame and a purging mechanism mounted on the mounting frame and positioned above the basket, can effectively remove the solution adhering to the basket and silicon wafers, avoiding contamination, ensuring product quality, preventing solution waste, and saving process costs.
[0018] The battery production line provided by this utility model includes a wet process equipment, which can effectively remove the solution adhering to the basket and silicon wafer, avoid pollution, ensure product quality, avoid solution waste, and save process costs. Attached Figure Description
[0019] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0020] Figure 1 This is a schematic diagram of the structure of the wet processing equipment provided in an embodiment of the present utility model; Figure 2 A schematic diagram showing the connection between the mounting frame, the flower basket, and the blowing mechanism in the wet processing equipment provided in this embodiment of the utility model; Figure 3 A schematic diagram of the connection between the mounting bracket and the purging mechanism in the wet processing equipment provided in this embodiment of the utility model; Figure 4 This is a schematic diagram of the solution tank in the wet processing equipment provided in this embodiment of the utility model when it is opened.
[0021] Icons: 100-Wet process equipment; 110-Robotic arm; 120-Mounting frame; 121-Top plate; 122-First side plate; 1221-First hook; 123-Second side plate; 1231-Second hook; 130-Basket; 131-First lifting ring; 132-Second lifting ring; 140-Purge mechanism; 141-Air pump; 142-Ventilation pipe; 1421-Main pipe; 1422-Branch pipe; 143-Air nozzle; 144-Translation assembly; 1441-Drive component; 1442-Lead screw; 1443-Nut seat; 150-Solution tank; 151-Tank body; 152-First tank cover; 153-Second tank cover. Detailed Implementation
[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0023] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0024] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0025] In the description of this utility model, it should be noted that the terms "inner," "outer," "upper," "lower," "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0026] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "connected," "installed," and "connected" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0027] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the features in the following embodiments can be combined with each other.
[0028] Please refer to Figure 1 This utility model embodiment provides a battery production line (not shown) for producing new energy batteries. It can effectively remove the solution adhering to the basket 130 and silicon wafers, avoiding contamination, ensuring product quality, and preventing solution waste, thus saving process costs.
[0029] It should be noted that the battery production line includes a wet processing unit 100 and processing equipment (not shown in the figure). The wet processing unit 100 and the processing equipment are arranged sequentially. The wet processing unit 100 is used to clean, texturize, and polish silicon wafers using wet processes, while the processing equipment is used to perform deposition, coating, and other processing on the silicon wafers to produce new energy batteries.
[0030] The wet process equipment 100 includes a robotic arm 110, a mounting frame 120, a basket 130, a purging mechanism 140, and a solution tank 150. The mounting frame 120 is connected to the free end of the robotic arm 110 and is connected to the basket 130, which is used to load silicon wafers. The robotic arm 110 can move the basket 130 and the silicon wafers loaded in it via the mounting frame 120. The solution tank 150 is used to hold a solution. The robotic arm 110 uses the basket 130 to guide the silicon wafers into the solution tank 150 and into contact with the solution, so that the solution reacts with the silicon wafers or cleans the wafers, completing the wet process. Specifically, the purging mechanism 140 is mounted on the mounting frame 120 and positioned above the basket 130. The purging mechanism 140 is used to purge the basket 130 and the silicon wafer when the robotic arm 110 retracts the silicon wafer from the solution tank 150 via the basket 130. This allows the solution adhering to the basket 130 and the silicon wafer to fall back into the solution tank 150 under the influence of wind and gravity, thus replenishing the solution. In this way, the wet processing equipment 100 can effectively remove the solution adhering to the basket 130 and the silicon wafer after the wet process, preventing contamination as the solution enters the next process with the basket 130 and the silicon wafer, ensuring product quality, avoiding solution waste, and saving process costs.
[0031] In this embodiment, there are multiple solution tanks 150 arranged side by side. Different solution tanks 150 contain solutions of different compositions to facilitate different types of wet processing steps. Specifically, the robotic arm 110 moves the basket 130 and the silicon wafers loaded within it via the mounting frame 120, allowing the basket 130 and silicon wafers to sequentially enter multiple solution tanks 150 and come into contact with various solutions, thereby performing multiple wet processing steps on the silicon wafers and improving production efficiency. Furthermore, each time the robotic arm 110 retracts the silicon wafer from the solution tank 150 via the basket 130, the blowing mechanism 140 blows the basket 130 and silicon wafer to remove any solution adhering to them, reducing or preventing the solution from entering the next wet processing solution tank 150 along with the basket 130 and silicon wafer.
[0032] Please refer to the reference. Figure 2 and Figure 3 The purging mechanism 140 includes an air pump 141, an air pipe 142, and an air nozzle 143. One end of the air pipe 142 is connected to the air pump 141, and the other end is connected to the air nozzle 143. The air nozzle 143 is mounted on the mounting bracket 120. The air pump 141 is used to generate negative pressure to draw outside air into the air pipe 142 and through the air pipe 142 to the air nozzle 143. The air nozzle 143 is used to spray air towards the basket 130 and the silicon wafer to achieve the purging function.
[0033] Furthermore, the purging mechanism 140 also includes a translation component 144. The translation component 144 is connected to the air nozzle 143, which is slidably engaged with the mounting bracket 120. The translation component 144 is used to drive the air nozzle 143 to slide relative to the mounting bracket 120, thereby significantly increasing the jetting area of the air nozzle 143, improving the solution removal efficiency, and ensuring the solution removal effect.
[0034] The translation assembly 144 includes a drive member 1441, a lead screw 1442, and a nut seat 1443. The drive member 1441 is mounted on the mounting bracket 120 and connected to the lead screw 1442. The nut seat 1443 is sleeved on the lead screw 1442 and threadedly engaged with it, and connected to the air nozzle 143. Specifically, the drive member 1441 drives the lead screw 1442 to rotate, thereby causing the nut seat 1443 to translate axially along the lead screw 1442 through the threaded engagement between the lead screw 1442 and the nut seat 1443. This, in turn, causes the air nozzle 143 to move axially along the lead screw 1442, increasing the air jet area of the air nozzle 143.
[0035] Specifically, there are multiple translation components 144 and multiple air nozzles 143. The vent pipe 142 includes a main pipe 1421 and multiple branch pipes 1422. One end of the main pipe 1421 is connected to the air pump 141, and the other end is connected to multiple branch pipes 1422. Each branch pipe 1422 is connected to one air nozzle 143, and each air nozzle 143 is connected to one translation component 144. The multiple translation components 144 are arranged in parallel and spaced apart. Specifically, multiple lead screws 1442 in the multiple translation components 144 are arranged in parallel and spaced apart. Each air nozzle 143 can move along the axial direction of one lead screw 1442. The multiple air nozzles 143 work together to further increase the air jet area, so that the basket 130 and the silicon wafer can be thoroughly purged, improving the solution removal effect.
[0036] The mounting frame 120 includes a top plate 121, a first side plate 122, and a second side plate 123. The first side plate 122 and the second side plate 123 are disposed opposite to each other at both ends of the top plate 121 and are both connected to the top plate 121. The top plate 121 is connected to a robotic arm 110, and the robotic arm 110 can synchronously drive the first side plate 122 and the second side plate 123 to move through the top plate 121. Specifically, a blowing mechanism 140 is mounted on the top plate 121, and a basket 130 is connected between the first side plate 122 and the second side plate 123, so that the blowing mechanism 140 is positioned above the basket 130, which facilitates the blowing mechanism 140 to blow downwards the basket 130 and the silicon wafers loaded in the basket 130, thereby blowing the solution adhering to the basket 130 and the silicon wafers into the solution tank 150.
[0037] Furthermore, the first side plate 122 is provided with a first hook 1221, and the second side plate 123 is provided with a second hook 1231; one side of the flower basket 130 is provided with a first hanging ring 131, and the other side is provided with a second hanging ring 132; the first hanging ring 131 is hooked to the first hook 1221, and the second hanging ring 132 is hooked to the second hook 1231, so as to hang the flower basket 130 between the first side plate 122 and the second side plate 123, which facilitates the installation and removal of the flower basket 130. The first side plate 122 and the second side plate 123 work together to limit the flower basket 130, prevent the flower basket 130 from shaking or tilting, and improve the stability of the flower basket 130 during transportation.
[0038] Please refer to Figure 4The solution tank 150 includes a tank body 151, a first tank cover 152, and a second tank cover 153. The first tank cover 152 and the second tank cover 153 are disposed opposite each other on both sides of the tank body 151 and are hinged to the tank body 151. The tank body 151 is used to hold the solution. Specifically, both the first tank cover 152 and the second tank cover 153 are rotatable relative to the tank body 151, and are used together to open or close the tank body 151. When the first tank cover 152 and the second tank cover 153 open the tank body 151 together, the robotic arm 110 can use the basket 130 to pull the silicon wafer into the tank body 151; when the first tank cover 152 and the second tank cover 153 close the tank body 151 together, it can prevent external impurities from entering the tank body 151 and contaminating the solution.
[0039] Please continue to refer to Figure 1 It should be noted that there are multiple mounting frames 120, baskets 130, and purging mechanisms 140. Multiple mounting frames 120 are arranged side by side, each basket 130 is connected to one mounting frame 120, and each purging mechanism 140 is mounted on one mounting frame 120. The robotic arm 110 can simultaneously drive multiple baskets 130 into the solution tank 150 through multiple mounting frames 120. Each purging mechanism 140 can purge one basket 130 and the silicon wafer loaded in the basket 130, thereby improving the efficiency of the wet process.
[0040] In this embodiment, there are two of each of the mounting bracket 120, flower basket 130, and blowing mechanism 140, but it is not limited to this. In other embodiments, there may be three or four of each of the mounting bracket 120, flower basket 130, and blowing mechanism 140. The number of each of the mounting bracket 120, flower basket 130, and blowing mechanism 140 is not specifically limited.
[0041] The wet processing equipment 100 provided in this embodiment of the utility model has a mounting frame 120 connected to the free end of a robotic arm 110. The mounting frame 120 is connected to a basket 130, which is used to load silicon wafers. A solution tank 150 is used to hold solution. The robotic arm 110 is used to drive the silicon wafers into the solution tank 150 and into contact with the solution through the basket 130. A purging mechanism 140 is mounted on the mounting frame 120 and positioned above the basket 130. The purging mechanism 140 is used to purge the basket 130 and the silicon wafers when the robotic arm 110 drives the silicon wafers out of the solution tank 150 through the basket 130, so that the solution adhering to the basket 130 and the silicon wafers falls back into the solution tank 150. Compared with existing technologies, the wet processing equipment 100 provided by this utility model, due to the use of a basket 130 connected to the mounting frame 120 and a blowing mechanism 140 installed on the mounting frame 120 and positioned above the basket 130, can effectively remove the solution adhering to the basket 130 and the silicon wafer, avoiding contamination, ensuring product quality, and preventing solution waste, thus saving process costs. This results in high-quality products and high economic benefits for the battery production line.
[0042] The above are merely preferred embodiments of this utility model and are not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.
Claims
1. A wet process equipment, characterized in that, The device includes a robotic arm, a mounting frame, a basket, a purging mechanism, and a solution tank. The mounting frame is connected to the free end of the robotic arm and is connected to the basket. The basket is used to load silicon wafers, and the solution tank is used to hold a solution. The robotic arm is used to drive the silicon wafers through the basket into the solution tank and into contact with the solution. The blowing mechanism is installed on the mounting frame and positioned above the basket. The blowing mechanism is used to blow the basket and the silicon wafer out of the solution tank when the robotic arm moves the silicon wafer out of the solution tank through the basket, so that the solution adhering to the basket and the silicon wafer falls back into the solution tank.
2. The wet processing equipment according to claim 1, characterized in that, The purging mechanism includes an air pump, an air pipe, and an air nozzle. One end of the air pipe is connected to the air pump, and the other end is connected to the air nozzle. The air nozzle is mounted on the mounting bracket and is used to spray air towards the flower basket and silicon wafer.
3. The wet processing equipment according to claim 2, characterized in that, The purging mechanism further includes a translation component, which is connected to the air nozzle. The air nozzle is slidably engaged with the mounting bracket, and the translation component is used to drive the air nozzle to slide relative to the mounting bracket.
4. The wet processing equipment according to claim 3, characterized in that, The translation assembly includes a drive unit, a lead screw, and a nut seat. The drive unit is mounted on the mounting bracket and connected to the lead screw. The nut seat is sleeved on the lead screw and threadedly engaged with the lead screw, and connected to the air nozzle.
5. The wet process equipment according to claim 3, characterized in that, The number of translation components and air nozzles are both multiple. The air pipe includes a main pipe and multiple branch pipes. One end of the main pipe is connected to the air pump, and the other end is connected to multiple branch pipes. Each branch pipe is connected to one air nozzle, and each air nozzle is connected to one translation component. The multiple translation components are arranged in parallel at intervals.
6. The wet process equipment according to claim 1, characterized in that, The mounting frame includes a top plate, a first side plate, and a second side plate. The first side plate and the second side plate are disposed opposite to each other at both ends of the top plate and are both connected to the top plate. The top plate is connected to the robotic arm. The blowing mechanism is installed on the top plate. The flower basket is connected between the first side plate and the second side plate.
7. The wet processing equipment according to claim 6, characterized in that, The first side panel is provided with a first hook, the second side panel is provided with a second hook, one side of the flower basket is provided with a first hanging ring, and the other side is provided with a second hanging ring. The first hanging ring is hooked to the first hook, and the second hanging ring is hooked to the second hook.
8. The wet process equipment according to claim 1, characterized in that, The solution tank includes a tank body, a first tank cover, and a second tank cover. The first tank cover and the second tank cover are disposed opposite each other on both sides of the tank body and are hinged to the tank body. The first tank cover and the second tank cover are used together to open or close the tank body.
9. The wet process equipment according to claim 1, characterized in that, There are multiple mounting frames, flower baskets, and blowing mechanisms. Multiple mounting frames are arranged side by side, each flower basket is connected to one mounting frame, and each blowing mechanism is mounted on one mounting frame.
10. A battery production line, characterized in that, Includes the wet processing equipment as described in any one of claims 1-9.