Sheet carrier and sheet handling device

Abstract

The application relates to the photovoltaic and semiconductor technical field, in particular to a sheet carrier and a sheet carrying device, which solve the problem that the sheet carrier cannot regulate the air intake. The sheet carrier comprises a bottom plate assembly, a top plate assembly, two side plate assemblies and two spraying plates. The sheet carrier realizes spraying air intake by means of the spraying plates, the passivation gas enters the first containing cavity of the sheet carrier through the air intake holes of the spraying plates, the spraying plates are detachable, so that the spraying plates with air intake holes of different diameters can be replaced according to production needs, and the purpose of timely regulating the air intake is achieved. In addition, since the sheet carrier realizes air intake by means of the air intake holes of the spraying plates, the amount of the passivation gas entering the sheet carrier can be controlled, too much passivation gas entering the first containing cavity is avoided, and the problem of sheet material winding plating is reduced.

Description

Technical Field

[0001] This application relates to the fields of photovoltaic and semiconductor technology, and specifically to a sheet carrier and sheet handling device. Background Technology

[0002] Currently, in the photovoltaic and semiconductor industries, silicon wafers are typically cut into two or more pieces to improve the conversion efficiency of products made from silicon wafers, thereby reducing costs and increasing efficiency. After the silicon wafers are cut, cross-sections are created. To ensure the conversion efficiency of the products, the industry typically uses atomic layer deposition (ALD) technology to passivate the cross-sections of the silicon wafers, forming a thin film on the cross-sections.

[0003] Currently, wafer carriers are typically used to hold silicon wafers during the passivation process. However, the air intake method of these wafer carriers in related technologies cannot control the air intake volume, which limits their use. Utility Model Content

[0004] In view of this, embodiments of this application provide a sheet carrier and a sheet handling device, which solves the problem that the sheet carrier cannot adjust the air intake.

[0005] In a first aspect, embodiments of this application provide a sheet carrier for a passivation process of a sheet material, the sheet material having a first cross-section and a second cross-section parallel to the thickness direction of the sheet material and disposed opposite to each other; wherein the sheet carrier includes: a bottom plate assembly; a top plate assembly disposed vertically opposite to the bottom plate assembly; and two side plate assemblies disposed opposite to each other along a first horizontal direction and respectively connecting the bottom plate assembly and the top plate assembly, wherein the bottom plate assembly, the top plate assembly, and the two side plate assemblies enclose a first receiving cavity having two openings disposed opposite to each other along a second horizontal direction, so that the sheet material can enter and exit the first receiving cavity through either of the openings, the first receiving cavity being configured to accommodate Multiple sheets of the aforementioned sheet material are stacked vertically, wherein, when the stacked sheets of the aforementioned sheet material are located in the first receiving cavity, the first cross-section and the second cross-section respectively face the two openings, wherein the second horizontal direction is perpendicular to the first horizontal direction; two spray plates are respectively disposed corresponding to the two openings, and the spray plates are detachably connected to one or more of the bottom plate assembly, the top plate assembly and the side plate assembly, and are configured to open or close the corresponding openings, wherein the spray plates have multiple air inlets, and passivating gas can enter the first receiving cavity through the air inlets of the two spray plates respectively to passivate the first cross-section and the second cross-section.

[0006] In some embodiments, the sheet carrier further includes at least two clamping assemblies disposed on the side plate assembly and configured to clamp the two spray plates against the corresponding side plate assembly.

[0007] In some embodiments, the spray plate has a first abutment portion on the side away from the first receiving cavity; wherein the pressing assembly includes: a snap-fit ​​seat, detachably connected to the side plate assembly and having a first mounting groove, the opening of the first mounting groove facing the side plate assembly; a snap-fit, the first end of the snap-fit ​​being located in the first mounting groove, wherein the first end of the snap-fit ​​has a shaft hole, and the second end of the snap-fit ​​has a second abutment portion; a rotating shaft, extending vertically, connected to the snap-fit ​​seat, and passing through the shaft hole, so that the snap-fit ​​can rotate around the rotating shaft; a first elastic member, disposed in the first mounting groove along the first horizontal direction, the first end of the first elastic member abutting or connecting to the bottom of the first mounting groove, and the second end of the first elastic member abutting or connecting to the snap-fit, wherein the elastic restoring force of the first elastic member drives the snap-fit ​​to rotate around the rotating shaft until the second abutment portion abuts against the corresponding first abutment portion, so as to press the spray plate against the corresponding side plate assembly.

[0008] In some embodiments, the sheet carrier further includes: a sealing plate, detachably connected to the spray plate and configured to block the air inlets; wherein the side plate assembly includes: a side plate having a plurality of first air inlets, wherein a portion of the plurality of first air inlets are adjacent to one of the spray plates and arranged sequentially in a vertical direction, and another portion of the plurality of first air inlets are adjacent to another of the spray plates and arranged sequentially in a vertical direction; two air volume control plates, detachably connected to the side plate, the air volume control plates having a plurality of second air inlets, wherein one of the air volume control plates... The plurality of second air inlets are respectively connected to the plurality of first air inlets near one of the spray plates, and the plurality of second air inlets of the other air volume control plate are respectively connected to the plurality of first air inlets near the other spray plate; wherein, in the second horizontal direction, the size of the second air inlet is smaller than the size of the first air inlet; wherein, the passivation gas flows to the first cross-section from the plurality of second air inlets and the plurality of first air inlets near one spray plate, and flows to the second cross-section from the plurality of second air inlets and the plurality of first air inlets near the other spray plate.

[0009] In some embodiments, the sheet carrier further includes: a pressure plate assembly disposed on the side of the top plate assembly near the bottom plate assembly; at least one second elastic member, vertically disposed, with a first end of the second elastic member abutting or connected to the pressure plate assembly and a second end of the second elastic member abutting or connected to the top plate assembly; wherein the elastic restoring force of the second elastic member drives the pressure plate assembly to press down and compress the stacked sheet materials.

[0010] In some embodiments, a first end of the second elastic member abuts against the pressure plate assembly, and a second end of the second elastic member abuts against the top plate assembly; wherein the top plate assembly has at least one first guide hole; wherein the sheet carrier further includes: a guide plate disposed on the side of the top plate assembly away from the bottom plate assembly; at least one guide post, a first end of the guide post being connected to the pressure plate assembly, and a second end of the guide post passing through the corresponding first guide hole and being connected to the guide plate.

[0011] In some embodiments, the second elastic element includes a spring, and the guide plate has at least one second guide hole; wherein the top plate assembly includes: a top plate connected to the side plate assembly and having the first guide hole; at least one guide sleeve, a first end of which is detachably connected to the top plate assembly, a second end of which passes through a corresponding second guide hole, and the second end of which also has a third abutment portion; wherein the first end of the spring abuts against the pressure plate assembly, and the second end of the spring passes through the top plate and abuts against the third abutment portion of the corresponding guide sleeve.

[0012] In some embodiments, the pressure plate assembly includes: a pressure plate having at least one pressing surface on the side of the pressure plate near the bottom plate assembly, and a second mounting groove on the side of the pressure plate near the top plate assembly, the pressing surface being configured to press the sheet material; a mounting plate disposed on the side of the pressure plate near the top plate assembly and detachably connected to the pressure plate, wherein the mounting plate is partially located in the second mounting groove, wherein the mounting plate has at least one corresponding limiting groove and at least one mounting hole, the limiting groove being located on the side of the mounting plate near the top plate assembly, the mounting hole extending vertically to the bottom of the corresponding limiting groove, wherein a first end of the spring abuts against the bottom of the corresponding limiting groove; and at least one guide member detachably connected to the mounting plate, wherein the guide member has a guide portion and a support portion interconnected, the support portion being located in the corresponding mounting hole, the guide portion extending vertically out of the corresponding limiting groove and into the corresponding spring.

[0013] In some embodiments, the sheet carrier further includes: at least one pick-and-place block disposed on the side of the top plate assembly away from the bottom plate assembly, so as to facilitate the pick-and-place device of the sheet carrier to pick up and place the sheet carrier; and / or, the bottom plate assembly has a first positioning portion, the spray plate has a second positioning portion, and the second positioning portion cooperates with the first positioning portion for positioning.

[0014] Secondly, embodiments of this application provide a sheet handling device, comprising: the sheet carrier described in the first aspect; a boat structure having a plurality of second receiving cavities configured to receive the sheet carrier, wherein the boat structure has a third air inlet through which passivating gas can enter the second receiving cavity.

[0015] The sheet carrier provided in this embodiment utilizes a spray plate for spray air intake. Passivating gas enters the first receiving cavity of the sheet carrier through the air inlet holes of the spray plate. The spray plate is detachable, allowing for replacement with spray plates having air inlets of different diameters as needed for production, thus achieving timely control of the air intake volume. Furthermore, because the sheet carrier uses the air inlet holes of the spray plate for air intake, the amount of passivating gas entering the sheet carrier can be controlled, preventing excessive passivating gas from entering the first receiving cavity and reducing the problem of plating around the sheet material. Attached Figure Description

[0016] Figure 1 The diagram shown is a structural schematic of a sheet material and sheet carrier for removing spray plates according to an embodiment of this application.

[0017] Figure 2 The image shown is a front view of a sheet material and sheet carrier for removing spray plates according to an embodiment of this application.

[0018] Figure 3 The image shown is a side view of a sheet material and sheet carrier for removing spray plates according to an embodiment of this application.

[0019] Figure 4 The image shown is a side view of a sheet carrier provided in an embodiment of this application.

[0020] Figure 5 The diagram shown is a structural schematic of a sheet carrier provided in an embodiment of this application.

[0021] Figure 6 As shown Figure 5 The image shows a magnified view of a portion of the sheet carrier in area A.

[0022] Figure 7 The image shown is a side view of a clamping assembly provided in an embodiment of this application.

[0023] Figure 8 As shown Figure 7The clamping assembly shown is a cross-sectional view in the BB direction.

[0024] Figure 9 The image shown is an exploded view of a clamping assembly provided in an embodiment of this application.

[0025] Figure 10 The image shown is a top view of a sheet carrier provided in an embodiment of this application.

[0026] Figure 11 The image shown is a front view of a sheet material and sheet carrier for removing a portion of the spray plate, according to an embodiment of this application.

[0027] Figure 12 The image shown is a top view of a top plate assembly, a pressure plate assembly, a second elastic element, a guide plate, and a guide post provided in an embodiment of this application.

[0028] Figure 13 As shown Figure 12 The top plate assembly, pressure plate assembly, second elastic element, guide plate and guide post shown are cross-sectional views in the CC direction.

[0029] Figure 14 The image shown is a bottom view of a pressure plate provided in an embodiment of this application.

[0030] Figure 15 The diagram shown is a structural schematic of a boat structure provided in an embodiment of this application.

[0031] Figure 16 The diagram shown is a structural schematic of a sheet handling device provided in an embodiment of this application.

[0032] Figure label: 1. Sheet material handling device; 10. Sheet material carrier; 101. First receiving cavity; 1001. Opening; 100. Base plate assembly; 102. First positioning part; 200. Top plate assembly; 210. Top plate; 201. First guide hole; 220. Guide sleeve; 2201. Third abutment part; 300. Side plate assembly; 310. Side plate; 3101. First air inlet; 320. Air volume control plate; 3201. Second air inlet; 400. Spray plate; 401. Air inlet hole; 402. First abutment part; 403. Second positioning part; 500. Pressing assembly; 510. Buckle seat; 5101. First mounting groove; 520. Buckle; 5201. Shaft hole; 5202. Second abutment part; 530, Rotating shaft; 540, First elastic element; 600, Sealing plate; 700, Pressure plate assembly; 710, Pressure plate; 7101, Pressing plane; 7102, Second mounting groove; 720, Mounting plate; 7201, Limiting groove; 7202, Mounting hole; 730, Guide element; 7301, Guide part; 7302, Support part; 800, Second elastic element; 810, Spring; 900, Guide plate; 901, Second guide hole; 1000, Guide post; 1100, Pick-up and drop block; 20, Boat structure; 2001, Second receiving cavity; 2002, Third air inlet; X1, First horizontal direction; X2, Second horizontal direction; 2, Sheet material; 21, First cross-section; 22, Second cross-section. Detailed Implementation

[0033] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0034] Figure 1 The diagram shown is a structural schematic of a sheet material and sheet carrier for removing spray plates according to an embodiment of this application. Figure 2 The image shown is a front view of a sheet material and sheet carrier for removing spray plates according to an embodiment of this application. Figure 3 The image shown is a side view of a sheet material and sheet carrier for removing spray plates according to an embodiment of this application. Figure 4 The image shown is a side view of a sheet material and a sheet carrier provided in an embodiment of this application. Figure 5 The diagram shown is a structural schematic of a sheet carrier provided in an embodiment of this application.

[0035] like Figures 1 to 5As shown, the sheet carrier 10 is used in the passivation process of sheet material 2. The sheet material 2 has a first cross-section 21 and a second cross-section 22 parallel to the thickness direction of the sheet material 2 and arranged opposite to each other. The sheet carrier 10 includes a bottom plate assembly 100, a top plate assembly 200, two side plate assemblies 300, and two spray plates 400. The top plate assembly 200 is arranged vertically opposite to the bottom plate assembly 100, and the two side plate assemblies 300 are arranged opposite to each other along a first horizontal direction X1, and are respectively connected to the bottom plate assembly 100 and the top plate assembly 200. The bottom plate assembly 100, the top plate assembly 200, and the two side plate assemblies 300 enclose a first receiving cavity 101 having two openings 1001 arranged opposite to each other along a second horizontal direction X2, so that the sheet material 2 can enter and exit the first receiving cavity 101 through either opening 1001. The first receiving cavity 101 is configured to accommodate multiple sheets of sheet material 2 stacked vertically. The second horizontal direction X2 is perpendicular to the first horizontal direction X1. With multiple stacked sheet materials 2 located in the first receiving cavity 101, the first cross-section 21 and the second cross-section 22 of the sheet materials 2 face the two openings 1001 respectively. Two spray plates 400 are respectively disposed corresponding to the two openings 1001. The spray plates 400 are detachably connected to one or more of the bottom plate assembly 100, the top plate assembly 200, and the side plate assembly 300. The spray plates 400 are configured to open or close the corresponding openings 1001. The spray plates 400 have multiple air inlets 401, and passivating gas can enter the first receiving cavity 101 through the respective air inlets 401 of the two spray plates 400 to passivate the first cross-section 21 and the second cross-section 22.

[0036] The sheet carrier 10 utilizes a spray plate 400 for spray air intake. Passivating gas enters the first receiving cavity 101 of the sheet carrier 10 through the air inlet 401 of the spray plate 400. The spray plate 400 is detachable, allowing for replacement with spray plates 400 having different orifice diameters of the air inlet 401 as needed for production, thus achieving timely control of the air intake. Furthermore, because the sheet carrier 10 uses the air inlet 401 of the spray plate 400 for air intake, the amount of passivating gas entering the sheet carrier 10 can be controlled, preventing excessive passivating gas from entering the first receiving cavity 101 and reducing the problem of plating around the sheet material 2.

[0037] For example, the spray plate 400 and the side plate assembly 300 can be detachably connected by screws, clips, or other means.

[0038] For example, the sheet material 2 can be a silicon wafer, a solar panel, a glass substrate, etc.

[0039] In some embodiments, such as Figures 4 to 6As shown, the sheet carrier 10 also includes at least two clamping assemblies 500, which are disposed on the side plate assembly 300 and configured to clamp the two spray plates 400 onto the corresponding side plate assembly 300.

[0040] The spray plate 400 is pressed against the corresponding side plate assembly 300 by the clamping assembly 500. Compared with the traditional screw connection method, it is easier to disassemble and assemble the spray plate 400, which further improves the convenience of disassembling and assembling the spray plate 400, further improves the replacement efficiency of the spray plate 400, and thus further improves the efficiency of the sheet carrier 10 in regulating the air intake.

[0041] For example, the clamping assembly 500 is detachably connected to the side plate assembly 300 to facilitate replacement and maintenance of the clamping assembly 500.

[0042] For example, the clamping assembly 500 and the side panel assembly 300 can be detachably connected by means of screws, clips, magnets, etc.

[0043] In some embodiments, such as Figures 5 to 10 As shown, the spray plate 400 has a first abutment portion 402 on the side away from the first receiving cavity 101. The clamping assembly 500 includes a snap-fit ​​seat 510, a snap-fit ​​520, a rotating shaft 530, and a first elastic member 540. The snap-fit ​​seat 510 is detachably connected to the side plate assembly 300 and has a first mounting groove 5101, the opening of which faces the side plate assembly 300. The first end of the snap-fit ​​520 is located in the first mounting groove 5101, and the first end of the snap-fit ​​520 has a shaft hole 5201. The second end of the snap-fit ​​520 has a second abutment portion 5202. The rotating shaft 530 extends vertically, connects to the snap-fit ​​seat 510, and passes through the shaft hole 5201, so that the snap-fit ​​520 can rotate around the rotating shaft 530. A first elastic element 540 is disposed in a first mounting groove 5101 along a first horizontal direction X1. The first end of the first elastic element 540 abuts against or connects to the bottom of the first mounting groove 5101, and the second end of the first elastic element 540 abuts against or connects to a buckle 520. The elastic restoring force of the first elastic element 540 drives the buckle 520 to rotate around the pivot 530 until the second abutting part 5202 abuts against the corresponding first abutting part 402, thereby pressing the spray plate 400 against the corresponding side plate assembly 300. The pressing assembly 500 has a simple structure, and the pressing method is simple and reliable.

[0044] For example, the first elastic element 540 may be a compression spring, a rubber pad, etc.

[0045] For example, the first end of the first elastic member 540 abuts against the bottom of the first mounting groove 5101, and the second end of the first elastic member 540 abuts against the buckle 520, so as to facilitate the replacement and maintenance of the first elastic member 540.

[0046] For example, such as Figure 5 , Figure 6 and Figure 10 As shown, the spray plate 400 has two first abutment portions 402 on the side away from the first receiving cavity 101, and the two first abutment portions 402 are respectively located on both sides of the spray plate 400 in the first horizontal direction X1. Each side plate assembly 300 is provided with two pressing assemblies 500, and the two pressing assemblies 500 on the two side plate assemblies 300 respectively press the two first abutment portions 402 of the corresponding spray plate 400, further improving the stability of pressing the spray plate 400.

[0047] In some embodiments, such as Figure 5 and Figure 11 As shown, the sheet carrier 10 also includes a sealing plate 600, which is detachably connected to the spray plate 400 and is configured to block the air inlet 401.

[0048] like Figure 1 and Figure 4 As shown, the side panel assembly 300 includes a side panel 310 and two air volume control plates 320. The side panel 310 has a plurality of first air inlets 3101. A portion of the first air inlets 3101 are located near one spray plate 400 and arranged sequentially in the vertical direction. Another portion of the first air inlets 3101 are located near another spray plate 400 and arranged sequentially in the vertical direction. The two air volume control plates 320 are detachably connected to the side panel 310. Each air volume control plate 320 has a plurality of second air inlets 3201. The plurality of second air inlets 3201 of one air volume control plate 320 are connected one-to-one with the plurality of first air inlets 3101 located near one spray plate 400, and the plurality of second air inlets 3201 of the other air volume control plate 320 are connected one-to-one with the plurality of first air inlets 3101 located near the other spray plate 400. In the second horizontal direction X2, the size of the second air inlet 3201 is smaller than the size of the first air inlet 3101. The passivating gas flows from the plurality of second air inlets 3201 and the plurality of first air inlets 3101 near one spray plate 400 to the first section 21, and from the plurality of second air inlets 3201 and the plurality of first air inlets 3101 near the other spray plate 400 to the second section 22.

[0049] With the sealing plate 600 blocking all the air inlets 401 of the spray plate 400, the passivating gas enters the first receiving cavity 101 sequentially through the second air inlet 3201 and the first air inlet 3101 of the side plate assembly 300. In the second horizontal direction X2, the size of the second air inlet 3201 is smaller than that of the first air inlet 3101, and the air volume control plate 320 is detachable, so that the air volume control plate 320 with different sizes of the second air inlet 3201 can be replaced according to production needs, thereby achieving the purpose of timely control of the air intake.

[0050] In addition, since the size of the second air inlet 3201 is smaller than that of the first air inlet 3101 in the second horizontal direction X2, the amount of passivation gas entering the sheet carrier 10 can be controlled, avoiding excessive passivation gas entering the first receiving cavity 101 and reducing the problem of plating around the sheet material 2.

[0051] For example, there are multiple sealing plates 600, each of which can block part of the air inlet 401 of the spray plate 400. By providing multiple detachable sealing plates 600, it is convenient to disassemble or install some or all of the sealing plates 600 according to production needs, so as to achieve the purpose of regulating the air intake.

[0052] According to actual production needs, some or all of the sealing plates 600 can be disassembled to expose some or all of the air inlets 401 of the spray plate 400, so as to realize the air intake by combining the spray plate 400 with the side plate assembly 300.

[0053] For example, the gas volume control plate 320 and the side plate 310 can be detachably connected by screws, clips, magnets, etc.

[0054] In some embodiments, such as Figure 2 and Figure 11 As shown, the sheet carrier 10 also includes a pressure plate assembly 700 and at least one second elastic member 800. The pressure plate assembly 700 is disposed on the side of the top plate assembly 200 near the bottom plate assembly 100. The second elastic member 800 is vertically disposed, with its first end abutting or connecting to the pressure plate assembly 700 and its second end abutting or connecting to the top plate assembly 200. The elastic restoring force of the second elastic member 800 drives the pressure plate assembly 700 to press down on the stacked sheet materials 2, preventing the sheet materials 2 from shifting within the sheet carrier 10 and improving the consistency of the sheet carrier 10 in bearing the sheet materials 2.

[0055] Load-bearing consistency refers to the degree of consistency in the placement position and angle of the multiple sheet materials 2 within the sheet carrier 10. If the consistency in the placement position and angle of the multiple sheet materials 2 within the sheet carrier 10 is good, the load-bearing consistency of the sheet carrier 10 on the sheet materials 2 can be considered good. If the consistency in the placement position and angle of the multiple sheet materials 2 within the sheet carrier 10 is poor, the load-bearing consistency of the sheet carrier 10 on the sheet materials 2 can be considered poor. Specifically, when the load-bearing consistency of the sheet carrier 10 on the sheet materials 2 is good, the consistency in the coating quality of the first cross-section 21 and the second cross-section 22 of the multiple sheet materials 2 is also good.

[0056] For example, there are multiple second elastic elements 800, which are arranged sequentially along the first horizontal direction X1, further improving the stability of pressing the sheet material 2.

[0057] For example, the second elastic element 800 may be a compression spring, a rubber pad, etc.

[0058] In some embodiments, such as Figure 12 and Figure 13 As shown, the first end of the second elastic member 800 abuts against the pressure plate assembly 700, and the second end of the second elastic member 800 abuts against the top plate assembly 200. The top plate assembly 200 has at least one first guide hole 201, and the sheet carrier 10 further includes a guide plate 900 and at least one guide post 1000. The guide plate 900 is disposed on the side of the top plate assembly 200 away from the bottom plate assembly 100, the first end of the guide post 1000 is connected to the pressure plate assembly 700, and the second end of the guide post 1000 passes through the corresponding first guide hole 201 and is connected to the guide plate 900.

[0059] The guide post 1000 and the first guide hole 201 are used to guide the movement of the pressure plate assembly 700 in the vertical direction, which further improves the accuracy of the movement of the pressure plate assembly 700.

[0060] In addition, when the first end of the second elastic member 800 abuts against the pressure plate assembly 700 and the second end of the second elastic member 800 abuts against the top plate assembly 200, the guide plate 900 supports the guide column 1000 and the pressure plate assembly 700, thus preventing the pressure plate assembly 700 from falling when it fails to press the sheet material 2.

[0061] For example, there are multiple first guide holes 201 and multiple guide posts 1000. The multiple first guide holes 201 and multiple guide posts 1000 are arranged sequentially along the first horizontal direction X1 and are set in a one-to-one correspondence. By using the one-to-one correspondence between the multiple first guide holes 201 and the multiple guide posts 1000, the accuracy of guiding the pressure plate assembly 700 is further improved.

[0062] In some embodiments, such as Figures 11 to 13As shown, the second elastic element 800 includes a spring 810, and the guide plate 900 has at least one second guide hole 901. The top plate assembly 200 includes a top plate 210 and at least one guide sleeve 220. The top plate 210 is connected to the side plate assembly 300 and has a first guide hole 201. A first end of the guide sleeve 220 is detachably connected to the top plate assembly 200, and a second end of the guide sleeve 220 passes through a corresponding second guide hole 901. The second end of the guide sleeve 220 also has a third abutment portion 2201. The first end of the spring 810 abuts against the pressure plate assembly 700, and the second end of the spring 810 passes through the top plate 210 and abuts against the third abutment portion 2201 of the corresponding guide sleeve 220.

[0063] The use of guide sleeve 220 to install spring 810 further improves the installation stability of spring 810. In addition, guide sleeve 220 can guide spring 810 during compression or extension, further improving the stability and accuracy of spring 810 during compression or extension.

[0064] In addition, the guide sleeve 220 and the second guide hole 901 are used to guide the vertical movement of the guide plate 900, which further improves the accuracy of the movement of the guide plate 900 and the pressure plate assembly 700.

[0065] For example, there are multiple second guide holes 901 and multiple guide sleeves 220, and the multiple springs 810, multiple second guide holes 901, and multiple guide sleeves 220 are arranged sequentially along the first horizontal direction X1 and are configured in a one-to-one correspondence. By utilizing the corresponding cooperation of multiple second guide holes 901 and multiple guide sleeves 220, the accuracy of guiding the guide plate 900 is further improved, thereby further improving the accuracy of the movement of the guide plate 900 and the pressure plate assembly 700.

[0066] In some embodiments, such as Figures 11 to 14As shown, the pressure plate assembly 700 includes a pressure plate 710, a mounting plate 720, and at least one guide member 730. The pressure plate 710 has at least one pressing surface 7101 on the side near the bottom plate assembly 100, and a second mounting groove 7102 on the side near the top plate assembly 200. The pressing surface 7101 is configured to press the sheet-like material 2. The mounting plate 720 is disposed on the side of the pressure plate 710 near the top plate assembly 200 and is detachably connected to the pressure plate 710. A portion of the mounting plate 720 is located in the second mounting groove 7102. The mounting plate 720 has at least one corresponding limiting groove 7201 and at least one mounting hole 7202. The limiting groove 7201 is located on the side of the mounting plate 720 near the top plate assembly 200, and the mounting hole 7202 extends vertically to the bottom of the corresponding limiting groove 7201. The first end of the spring 810 abuts against the bottom of the corresponding limiting groove 7201. The guide member 730 is detachably connected to the mounting plate 720. The guide member 730 has a guide part 7301 and a support part 7302 that are connected to each other. The support part 7302 is located in the corresponding mounting hole 7202. The guide part 7301 extends through the corresponding limiting groove 7201 in the vertical direction and extends into the corresponding spring 810.

[0067] The guide member 730 is used to guide the movement of the first end of the spring 810 to ensure that the first end of the spring 810 is compressed in the vertical direction, thus preventing the first end of the spring 810 from bending and coming out of the limiting groove 7201 during the compression process.

[0068] In addition, the guide member 730 is installed using the mounting plate 720. The support part 7302 of the guide member 730 is located between the mounting hole 7202 of the mounting plate 720 and the pressure plate 710, which can prevent the guide member 730 from being exposed, thereby preventing the guide member 730 from contaminating the sheet material 2 when the pressure plate assembly 700 presses the sheet material 2.

[0069] In addition, the mounting plate 720 is detachably connected to the pressure plate 710, and the guide 730 is detachably connected to the mounting plate 720, which further improves the ease of assembly and disassembly of the pressure plate assembly 700.

[0070] For example, there are multiple guide members 730, and each guide member 730 is provided in a one-to-one correspondence with a multiple spring 810.

[0071] For example, there are multiple pressing surfaces 7101, which are arranged sequentially along the first horizontal direction X1. By using multiple pressing surfaces 7101 to press the sheet material 2, the stability of pressing the sheet material 2 is further improved.

[0072] In some embodiments, such as Figure 5 , Figure 10 , Figure 11 and Figure 13As shown, the sheet carrier 10 also includes at least one pick-and-place block 1100. The pick-and-place block 1100 is disposed on the side of the top plate assembly 200 away from the bottom plate assembly 100 to facilitate the pick-and-place device of the sheet carrier 10.

[0073] For example, there are two pick-and-place blocks 1100, which are arranged opposite each other along the first horizontal direction X1 and are close to the two side plate assemblies 300, respectively, which further improves the stability of the carrier pick-and-place device for picking up and placing sheet carrier 10. For example, the pick-and-place blocks 1100 are detachably connected to the top plate 210 of the top plate assembly 200 to facilitate the replacement and maintenance of the pick-and-place blocks 1100.

[0074] In some embodiments, such as Figure 5 and Figure 11 As shown, the base plate assembly 100 has a first positioning part 102, and the spray plate 400 has a second positioning part 403. The second positioning part 403 cooperates with the first positioning part 102 for positioning, thereby improving the accuracy of the installation of the spray plate 400.

[0075] For example, there are multiple first positioning parts 102 and multiple second positioning parts 403, and the multiple first positioning parts 102 and multiple second positioning parts 403 are arranged sequentially along the first horizontal direction X1. The multiple first positioning parts 102 and multiple second positioning parts 403 are positioned in a one-to-one correspondence, which further improves the accuracy of the spray plate 400 installation.

[0076] For example, the first positioning part 102 is a positioning protrusion protruding in the direction from the bottom plate assembly 100 to the top plate assembly 200, and the second positioning part 403 is a positioning groove with the slot facing downward. During the installation of the spray plate 400, the positioning protrusion is inserted into the positioning groove to achieve mating positioning.

[0077] Figure 15 The diagram shown is a structural schematic of a boat structure provided in an embodiment of this application. Figure 16 The diagram shown is a structural schematic of a sheet handling device provided in an embodiment of this application.

[0078] like Figure 15 and Figure 16 As shown, the sheet handling device 1 includes the sheet carrier 10 and boat structure 20 mentioned in the above embodiments. The boat structure 20 has a plurality of second receiving cavities 2001 configured to receive the sheet carrier 10. The boat structure 20 has a third air inlet 2002 through which passivating gas can enter the second receiving cavities 2001.

[0079] Since the sheet handling device 1 includes the sheet carrier 10, all the technical features and effects of the sheet handling device 1 including the sheet carrier 10 will not be described in detail here.

[0080] In the embodiments of this application, unless otherwise specified, the connection can be a detachable connection using bolts, nuts, screws, clips, magnets, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, etc.

[0081] The terms "an embodiment" or "embodiment" used in this specification indicate that the described embodiment may include a specific feature, structure, or characteristic, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Additionally, when a specific feature, structure, or characteristic is described in connection with an embodiment, implementing such a feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not, is within the knowledge scope of those skilled in the art.

[0082] It should be understood that the terms “on,” “above,” and “on top of” in this application should be interpreted in the broadest possible way, such that “on” means not only “directly on something” but also “on something” with an intermediate feature or layer therebetween, and that “above” or “on top of” means not only “on top of something” but also “on top of something” without an intermediate feature or layer therebetween (i.e., directly on something).

[0083] Furthermore, for ease of explanation, spatial relative terms such as "below," "below," "under," "above," and "above" may be used to describe the relationship of a component or feature relative to other components or features as shown in the figures. Spatial relative terms are intended to encompass different orientations of components in use or operation other than those shown in the figures. Devices may have other orientations (rotated 90 degrees or in other orientations), and the spatial relative descriptive terms used herein may be interpreted accordingly.

[0084] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0085] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications or equivalent substitutions made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A sheet carrier, characterized in that, A passivation process applied to sheet materials, wherein the sheet material has a first cross-section and a second cross-section parallel to the thickness direction of the sheet material and disposed opposite to each other; wherein the sheet carrier includes: Base plate assembly; The top plate assembly is vertically positioned opposite the bottom plate assembly. Two side plate assemblies are disposed opposite each other along a first horizontal direction and are respectively connected to the bottom plate assembly and the top plate assembly. The bottom plate assembly, the top plate assembly, and the two side plate assemblies enclose a first receiving cavity having two openings disposed opposite each other along a second horizontal direction, so that the sheet material can enter and exit the first receiving cavity through either of the openings. The first receiving cavity is configured to accommodate a plurality of sheets of the sheet material stacked vertically. When the plurality of sheets of the sheet material are located in the first receiving cavity, the first cross-section and the second cross-section face the two openings respectively. The second horizontal direction is perpendicular to the first horizontal direction. Two spray plates are respectively disposed corresponding to the two openings. The spray plates are detachably connected to one or more of the bottom plate assembly, the top plate assembly, and the side plate assembly, and are configured to open or close the corresponding openings. The spray plates have multiple air inlets, and passivating gas can enter the first receiving cavity through the air inlets of the two spray plates respectively to passivate the first cross-section and the second cross-section.

2. The sheet carrier according to claim 1, characterized in that, Also includes: At least two clamping components are disposed on the side plate assembly and are configured to clamp the two spray plates onto the corresponding side plate assembly.

3. The sheet carrier according to claim 2, characterized in that, The spray plate has a first abutting portion on the side away from the first receiving cavity; The clamping assembly includes: The buckle seat is detachably connected to the side panel assembly and has a first mounting groove, the opening of the first mounting groove facing the side panel assembly; A buckle, wherein the first end of the buckle is located in the first mounting groove, wherein the first end of the buckle has a shaft hole, and the second end of the buckle has a second abutment portion; A rotating shaft extends vertically, connects to the buckle seat, and passes through the shaft hole so that the buckle can rotate around the rotating shaft; A first elastic element is disposed in a first mounting groove along the first horizontal direction. The first end of the first elastic element abuts or connects to the bottom of the first mounting groove, and the second end of the first elastic element abuts or connects to the buckle. The elastic restoring force of the first elastic element drives the buckle to rotate around the pivot until the second abutting part abuts against the corresponding first abutting part, so as to press the spray plate tightly against the corresponding side plate assembly.

4. The sheet carrier according to claim 1, characterized in that, Also includes: A sealing plate, detachably connected to the spray plate, is configured to block the air inlet; The side panel assembly includes: The side panel has a plurality of first air inlets, wherein a portion of the plurality of first air inlets are close to one of the spray plates and are arranged sequentially in the vertical direction, and another portion of the plurality of first air inlets are close to another of the spray plates and are arranged sequentially in the vertical direction. Two air volume control plates are detachably connected to the side plate. Each air volume control plate has multiple second air inlets. The multiple second air inlets of one air volume control plate are respectively connected to multiple first air inlets near one of the spray plates. The multiple second air inlets of the other air volume control plate are respectively connected to multiple first air inlets near another spray plate. In the second horizontal direction, the size of the second air inlet is smaller than the size of the first air inlet; The passivating gas flows to the first cross-section through a plurality of second air inlets and a plurality of first air inlets near one spray plate, and flows to the second cross-section through a plurality of second air inlets and a plurality of first air inlets near another spray plate.

5. The sheet carrier according to any one of claims 1 to 4, characterized in that, Also includes: A pressure plate assembly is disposed on the side of the top plate assembly near the bottom plate assembly; At least one second elastic element is vertically arranged, with a first end of the second elastic element abutting or connected to the pressure plate assembly, and a second end of the second elastic element abutting or connected to the top plate assembly. The elastic restoring force of the second elastic element drives the pressure plate assembly to press down and tighten the multiple stacked sheet materials.

6. The sheet carrier according to claim 5, characterized in that, The first end of the second elastic member abuts against the pressure plate assembly, and the second end of the second elastic member abuts against the top plate assembly; wherein the top plate assembly has at least one first guide hole; The sheet carrier further includes: A guide plate is disposed on the side of the top plate assembly away from the bottom plate assembly; At least one guide post, the first end of which is connected to the pressure plate assembly, and the second end of which passes through the corresponding first guide hole and is connected to the guide plate.

7. The sheet carrier according to claim 6, characterized in that, The second elastic element includes a spring, and the guide plate has at least one second guide hole; The top plate assembly includes: The top plate is connected to the side plate assembly and has the first guide hole; At least one guide sleeve, the first end of which is detachably connected to the top plate assembly, the second end of which passes through a corresponding second guide hole, and the second end of which also has a third abutment portion; The first end of the spring abuts against the pressure plate assembly, and the second end of the spring passes through the top plate and abuts against the third abutting part of the corresponding guide sleeve.

8. The sheet carrier according to claim 7, characterized in that, The pressure plate assembly includes: A pressure plate having at least one pressing surface on the side near the bottom plate assembly and a second mounting groove on the side near the top plate assembly, the pressing surface being configured to press the sheet material; A mounting plate is disposed on the side of the pressure plate near the top plate assembly and is detachably connected to the pressure plate. The mounting plate is partially located in the second mounting groove. The mounting plate has at least one corresponding limiting groove and at least one mounting hole. The limiting groove is located on the side of the mounting plate near the top plate assembly. The mounting hole extends vertically to the bottom of the corresponding limiting groove. The first end of the spring abuts against the bottom of the corresponding limiting groove. At least one guide member is detachably connected to the mounting plate, wherein the guide member has a guide portion and a support portion connected to each other, the support portion is located in the corresponding mounting hole, the guide portion extends vertically out of the corresponding limiting groove, and extends into the corresponding spring.

9. The sheet carrier according to claim 8, characterized in that, Also includes: At least one pick-and-place block is disposed on the side of the top plate assembly away from the bottom plate assembly to facilitate the pick-and-place device of the sheet carrier; And / or, The base plate assembly has a first positioning part, and the spray plate has a second positioning part, which cooperates with the first positioning part for positioning.

10. A sheet material handling device, characterized in that, include: The sheet carrier according to any one of claims 1 to 9; The boat structure has multiple second receiving cavities configured to receive the sheet carrier, wherein the boat structure has a third air inlet through which passivating gas can enter the second receiving cavities.

Images