A leveling bearing platform

Abstract

The utility model provides leveling bearing platform, include: leveling device includes locking block, floating block, fixed block, spring and screw rod, fixed block and bearing plate fixed connection, gyro wheel sets up on floating block, fixed block is provided with the slide groove along third direction, floating block is provided with first limit portion and second limit portion, first limit portion slidingly sets up in the slide groove, second limit portion sets up in the upper end of fixed block and blocks second limit portion to enter the slide groove, the first through -hole is set up along third direction on floating block, screw rod penetrates first through -hole, the upper end of screw rod and floating block fixed connection, the lower extreme of screw rod and fixed block fixed connection, spring is set on screw rod, the upper end of spring and locking block abut, the lower extreme of spring and floating block abut. For the utility model's leveling bearing platform, can effectively avoid the wobble of bearing plate and the inclination phenomenon, can also make the conveying of work piece more stable.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to a leveling support platform. Background Technology

[0002] In semiconductor conveying and processing, a high degree of levelness and a relatively stable transport process are required. However, significant wear occurs during the transport of workpieces using moving components. Especially since the load varies at different points on the moving components, uneven wear is more likely to occur, leading to workpiece non-levelness and even wobbling. Furthermore, inconsistent wear on the rollers can cause instability during transport. Therefore, a leveling platform is needed to effectively prevent wobbling and non-levelness caused by wear, and to ensure smoother workpiece transport. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a leveling support platform, which can effectively prevent the swaying and tilting of the support plate, and also make the conveying of workpieces more stable.

[0004] A leveling support platform according to a first aspect embodiment of the present invention includes: a track device, the track device including a left rail and a right rail, the left rail and the right rail being spaced apart along a first direction, the left rail and the right rail both extending along a second direction, the first direction and the second direction being both in a horizontal plane and perpendicular to each other; a support plate for supporting workpieces; a plurality of rollers, the rollers being rotatably disposed on the track device; and a plurality of leveling devices, the leveling devices corresponding one-to-one with the rollers, each leveling device including a locking block, a floating block, a fixing block, a spring and a screw, the fixing block being fixedly connected to the support plate, the rollers being disposed on the floating block, and the fixing block being arranged along a third direction. A sliding groove is provided, with the third direction being vertical. The floating block is provided with a first limiting part and a second limiting part, which are fixedly connected. The first limiting part is slidably disposed in the sliding groove, and the second limiting part is disposed at the upper end of the fixed block and prevents the second limiting part from entering the sliding groove. A first through hole is opened on the floating block along the third direction, and a screw passes through the first through hole. The upper end of the screw is fixedly connected to the locking block, and the lower end of the screw is fixedly connected to the fixed block. A spring is sleeved on the screw, with the upper end of the spring abutting against the locking block and the lower end of the spring abutting against the floating block.

[0005] The leveling support platform according to the first aspect of this utility model has at least the following beneficial effects: During prolonged operation of the leveling device, the rollers will wear down, resulting in a smaller diameter for the more severely worn rollers. To prevent the more severely worn rollers from tilting downwards, the less worn rollers will compress their corresponding springs, thus subjecting them to greater pressure. This spring compression causes the less worn rollers to move closer to the support plate, offsetting the wear of the more worn rollers and significantly reducing the tilt of the support plate, keeping it at an acceptable level. Furthermore, the less worn rollers, by compressing the springs and moving closer to the support plate, ensure that the more worn rollers fit better against the track device, preventing them from detaching and resulting in smoother workpiece transport.

[0006] According to some embodiments of the present invention, the leveling support platform includes four rollers, two of which are rotatably mounted on the left rail and two of which are rotatably mounted on the right rail.

[0007] According to some embodiments of the present invention, the leveling device includes two springs and two screws, with the springs and screws corresponding one-to-one, and the floating block having two first through holes spaced apart along the second direction.

[0008] According to some embodiments of the present invention, the roller is disposed on the first limiting part, and in the second direction, the distance between the roller and the two first through holes is equal.

[0009] According to some embodiments of the present invention, the leveling device further includes a nut, a second through hole is provided on the fixing block along a third direction, the screw passes through the second through hole, and the nut is disposed on the screw and abuts against the side of the fixing block opposite to the locking block.

[0010] According to some embodiments of the present invention, the springs have the same elastic coefficient and the compression length of the springs is the same.

[0011] According to some embodiments of the present invention, the leveling support platform further includes a guiding device, which includes a connecting plate and a guide wheel. The connecting plate is fixedly mounted on the support plate, and the guide wheel is rotatably mounted on the connecting plate and abuts against the side of the track device.

[0012] According to some embodiments of the present invention, the guide device is provided on both sides of the support plate along the first direction, and the guide device includes two guide wheels arranged along the second direction.

[0013] According to some embodiments of the present invention, the left rail includes a left bottom and a left stop, the left stop being disposed on the side of the left bottom opposite to the right rail, the roller abutting against the left bottom, and the guide wheel abutting against the side of the left stop opposite to the left bottom. The right rail includes a right bottom and a right stop, the right stop being disposed on the side of the right bottom opposite to the left rail, the roller abutting against the right bottom, and the guide wheel abutting against the side of the right stop opposite to the right bottom.

[0014] According to some embodiments of the present invention, the leveling support platform further includes a pressure sensor, which is disposed on the fixed block and is used to check the pressure between the fixed block and the second limiting part.

[0015] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of a leveling support platform according to the present invention; Figure 2 This is a schematic diagram of the leveling device for a leveling support platform according to the present invention. Figure 3 This is a schematic diagram of the structure of a leveling support platform with a guide device according to the present invention.

[0017] Icon labels: 1. Track device; 11. Left rail; 12. Right rail; 13. Left bottom; 14. Left stop; 15. Right bottom; 16. Right stop; 2. Roller; 3. Bearing plate; 4. Leveling device; 41. Locking block; 42. Floating block; 421. First limiting part; 422. Second limiting part; 43. Fixing block; 44. Spring; 45. Screw; 46. First through hole; 47. Nut; 48. Slide groove; 5. Guide device; 51. Connecting plate; 52. Guide wheel. Detailed Implementation

[0018] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0019] In the description of this utility model, it should be understood that the orientation descriptions, such as up and down, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0020] In the description of this utility model, "multiple" refers to two or more. The use of "first" and "second" is for distinguishing technical features only and should not be construed as indicating or implying relative importance, or implicitly indicating the number of technical features or their sequential relationship.

[0021] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0022] In semiconductor manufacturing processes, maintaining the levelness of the carrier plate and ensuring stable semiconductor transport are crucial for the quality of semiconductor processing. Semiconductor manufacturing demands extremely high precision, and the levelness of the carrier plate, as the platform supporting the semiconductor, directly impacts this precision. Insufficient levelness of the carrier plate can lead to deviations in chip processing and stress concentration, thus affecting the semiconductor's performance and quality. Stable carrier plate transport better ensures the stability of semiconductor processing, reduces vibration of both the carrier plate and the semiconductor, and effectively protects the chip from damage. Furthermore, stable semiconductor transport helps improve product yield and prevents decreased processing precision or even chip scrap due to unstable transport.

[0023] Reference Figure 1 , Figure 2 and Figure 3The leveling support platform in the first embodiment of this utility model includes: a track device 1, several rollers 2, a support plate 3, and several leveling devices 4. The track device 1 includes a left rail 11 and a right rail 12, which are spaced apart along a first direction and both extend along a second direction. The first and second directions are both in a horizontal plane and perpendicular to each other. The support plate 3 is used to support the workpiece. The rollers 2 are rolled on the track device 1. The leveling devices 4 correspond one-to-one with the rollers 2. The leveling devices 4 include a locking block 41, a floating block 42, a fixing block 43, a spring 44, and a screw 45. The fixing block 43 is fixedly connected to the support plate 3. The rollers 2 are disposed on the floating block 42. The fixing block 43 is provided with a sliding surface along a third direction. The groove 48 is vertical in the third direction. A first limiting part 421 and a second limiting part 422 are provided on the floating block 42. The first limiting part 421 and the second limiting part 422 are fixedly connected. The first limiting part 421 is slidably disposed within the groove 48. The second limiting part 422 is disposed at the upper end of the fixed block 43 and prevents the second limiting part 422 from entering the groove 48. A first through hole 46 is provided on the floating block 42 along the third direction. A screw 45 passes through the first through hole 46. The upper end of the screw 45 is fixedly connected to the floating block 42, and the lower end of the screw 45 is fixedly connected to the fixed block 43. A spring 44 is sleeved on the screw 45. The upper end of the spring 44 abuts against the locking block 41, and the lower end of the spring 44 abuts against the floating block 42. The leveling device 4 can be provided in two, four, or other configurations. Specifically, taking a platform with four leveling devices 4 as an example, the corresponding leveling support table includes four rollers 2. Two rollers 2 are rolled on the left rail 11, and two rollers 2 are rolled on the right rail 12. In the leveling device 4, the weight of the workpiece and the support plate 3 is applied to the fixed block 43, while the screw 45 drives the locking block 41 to move downward. At this time, the locking block 41 and the floating block 42 will compress the spring 44. Under this compressed state of the spring 44, the support plate 3 is adjusted to a horizontal state.

[0024] The four rollers 2 are divided into a first roller 2, a second roller 2, a third roller 2, and a fourth roller 2. When the first roller 2 wears significantly, its diameter decreases, which can cause the support plate 3 to tilt or the first roller 2 to disengage from the track device 1. When the first roller 2 disengages from the track device 1, the workpiece conveying becomes unstable. Therefore, when the first roller 2 wears significantly, the second, third, and fourth rollers experience greater pressure, compressing their corresponding springs 44. This compression partially offsets the wear of the first roller 2, allowing it to better conform to the track and maintain the levelness of the support plate 3 to a greater extent. At this point, compared to the first roller 2, the second, third, and fourth rollers exert greater force to compress the spring 44, resulting in greater wear on the second, third, and fourth rollers. After the second, third, and fourth rollers experience greater wear, their wear can offset the wear of the first roller 2, thus restoring the compression of the spring 44 by the second, third, and fourth rollers to its initial state. In this cyclical state, the support plate 3 is dynamically maintained within the allowable level.

[0025] The engagement of the first limiting block with the slide groove 48 and the engagement of the through hole with the screw 45 ensures smoother relative movement between the floating block 42 and the fixed block 43. The second limiting block also prevents the first limiting block from detaching from the slide groove 48. Furthermore, the placement of two rollers 2 on the left rail 11 and right rail 12 respectively further stabilizes the load-bearing structure of the support platform.

[0026] According to some embodiments of this utility model, the leveling device 4 includes two springs 44 and two screws 45, with each spring 44 and screw 45 corresponding to the other. The floating block 42 has two first through holes 46 spaced apart along the second direction. To ensure a more balanced compressive force on the springs 44 and prevent torque jamming, the two spaced springs 44 work together to drive the device. This makes the movement of the floating block 42 relative to the fixed block 43 smoother and more fluid. Furthermore, a roller 2 is mounted on the first limiting part 421, and the distance between the roller 2 and the two first through holes 46 is equal in the second direction. This makes the force on the floating block 42 more stable.

[0027] According to some embodiments of this utility model, the leveling device 4 further includes a nut 47. A second through hole is provided on the fixing block 43 along a third direction, through which the screw 45 passes. The nut 47 is disposed on the screw 45 and abuts against the side of the fixing block 43 facing away from the locking block 41. By connecting with the nut 47, the position between the fixing block 43 and the locking block 41 can be better adjusted by rotating the nut 47. This not only makes disassembly more convenient but also makes it easier to adjust the bearing plate 3 to a horizontal state when setting the initial state.

[0028] According to some embodiments of this utility model, the multiple springs 44 have the same elastic coefficient and the same compression length. When the springs 44 among the multiple leveling devices 4 are in the same state, not only can the horizontal state be better set, but the height fluctuation of the multiple rollers 2 can also be reduced, thereby maintaining a high levelness.

[0029] According to some embodiments of this utility model, the leveling support platform further includes a guide device 5, which includes a connecting plate 51 and a guide wheel 52. The connecting plate 51 is fixedly mounted on the support plate 3, and the guide wheel 52 is rotatably mounted on the connecting plate 51 and abuts against the side of the track device 1. By setting the guide device 5, the roller 2 can roll more smoothly and accurately on the track device 1, thereby making the conveying of the workpiece more stable. Furthermore, guide devices 5 are provided on both sides of the support plate 3 along the first direction, and the guide device 5 includes two guide wheels 52 arranged along the second direction. By clamping the track device 1 from both sides by the two guide devices 5, the rolling of the roller 2 on the track device 1 is made more stable. Specifically, the left rail 11 includes a left bottom 13 and a left stop 14. The left stop 14 is located on the side of the left bottom 13 opposite to the right rail 12. The roller 2 abuts against the left bottom 13, and the guide wheel 52 abuts against the side of the left stop 14 opposite to the left bottom 13. The right rail 12 includes a right bottom 15 and a right stop 16. The right stop 16 is located on the side of the right bottom 15 opposite to the left rail 11. The roller 2 abuts against the right bottom 15, and the guide wheel 52 abuts against the side of the right stop 16 opposite to the right bottom 15.

[0030] According to some embodiments of this utility model, the leveling support platform also includes a pressure sensor, which is mounted on the fixed block 43. The pressure sensor is used to check the pressure between the fixed block 43 and the second limiting part 422. By detecting the pressure between the fixed block 43 and the second limiting part 422 through the pressure sensor, in the initial preset state, the pressure sensor value can be adjusted to a state close to zero by adjusting the distance between the fixed block 43 and the locking block 41, or even making a small gap between the fixed block 43 and the second limiting part 422, so that the pressure sensor value is zero. At this time, the compression force of the spring 44 and the load of the roller 2 are balanced. After one of the rollers 2 is subjected to greater pressure or is slightly tilted, the floating block 42 can more sensitively move upward relative to the fixed block 43, thereby making the support plate 3 better maintain a higher level.

[0031] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A leveling support platform, characterized in that, include: A track device, comprising a left rail and a right rail, the left rail and the right rail being spaced apart along a first direction, the left rail and the right rail both extending along a second direction, the first direction and the second direction being both in a horizontal plane and perpendicular to each other; The support plate is used to support the workpiece; A plurality of rollers are rotatably mounted on the track device; A plurality of leveling devices are provided, each corresponding to a roller. Each leveling device includes a locking block, a floating block, a fixing block, a spring, and a screw. The fixing block is fixedly connected to the bearing plate. The rollers are disposed on the floating block. The fixing block has a groove along a third direction, which is vertical. The floating block has a first limiting part and a second limiting part, which are fixedly connected. The first limiting part is slidably disposed in the groove. The second limiting part is disposed at the upper end of the fixing block and prevents the second limiting part from entering the groove. The floating block has a first through hole along the third direction, through which the screw passes. The upper end of the screw is fixedly connected to the locking block, and the lower end of the screw is fixedly connected to the fixing block. The spring is sleeved on the screw, with the upper end of the spring abutting against the locking block and the lower end of the spring abutting against the floating block.

2. The leveling support platform according to claim 1, characterized in that, The leveling support platform includes four rollers, two of which are rolled on the left rail and two of which are rolled on the right rail.

3. The leveling support platform according to claim 1, characterized in that, The leveling device includes two springs and two screws, with each spring and screw corresponding to the other. The floating block has two first through holes spaced apart along the second direction.

4. The leveling support platform according to claim 3, characterized in that, The roller is disposed on the first limiting part, and in the second direction, the distance between the roller and the two first through holes is equal.

5. The leveling support platform according to claim 1, characterized in that, The leveling device also includes a nut, and a second through hole is provided on the fixing block along a third direction, through the fixing block, the screw passes through the second through hole, and the nut is disposed on the screw and abuts against the side of the fixing block opposite to the locking block.

6. The leveling support platform according to claim 1, characterized in that, The springs have the same spring constant and the springs have the same compression length.

7. The leveling support platform according to claim 1, characterized in that, The leveling support platform also includes a guiding device, which includes a connecting plate and a guide wheel. The connecting plate is fixedly mounted on the support plate, and the guide wheel is rotatably mounted on the connecting plate and abuts against the side of the track device.

8. The leveling support platform according to claim 7, characterized in that, The guide device is provided on both sides of the support plate along the first direction, and the guide device includes two guide wheels arranged along the second direction.

9. The leveling support platform according to claim 8, characterized in that, The left rail includes a left bottom and a left stop, the left stop being disposed on the side of the left bottom opposite to the right rail, the roller abutting against the left bottom, and the guide wheel abutting against the side of the left stop opposite to the left bottom. The right rail includes a right bottom and a right stop, the right stop being disposed on the side of the right bottom opposite to the left rail, the roller abutting against the right bottom, and the guide wheel abutting against the side of the right stop opposite to the right bottom.

10. The leveling support platform according to claim 1, characterized in that, The leveling support platform also includes a pressure sensor, which is mounted on the fixed block and is used to check the pressure between the fixed block and the second limiting part.

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