patching machine

Abstract

This utility model relates to a wafer insertion machine, belonging to the field of semiconductor processing equipment technology. It includes a main body with a first base plate inside. A wafer loading / unloading conveyor mechanism is located on one side of the first base plate, and along the length of the main body, a wafer loading mechanism, a rotary chuck mechanism, a wafer transfer mechanism, and a gantry robot are sequentially arranged on the other side. The wafer loading mechanism includes a rotating component and a wafer holder component. The rotary chuck mechanism transports wafers from the wafer holder component to the wafer transfer mechanism via a chuck. The wafer transfer mechanism transports wafers into wafer holders. The gantry robot grips empty wafer holders and moves them to the end of the wafer transfer mechanism to insert wafers, then moves wafer-loaded wafer holders onto a wafer unloading conveyor belt. This utility model can automate wafer loading / unloading, transfer, and insertion, ensuring the stability and accuracy of wafers during transfer and insertion, thereby improving overall capacity and quality and meeting the needs of large-scale production.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, and in particular to a chip insertion machine. Background Technology

[0002] In the areas of wafer and wafer loading / unloading and insertion operations, manual operation accounts for a large proportion, and the connection between various processes relies on manual coordination. This is not only inefficient but also prone to wafer damage due to human factors. At the same time, the lack of efficient and precise automated transfer, adsorption, and gripping components makes it difficult to ensure the stability and accuracy of wafers during the transfer and insertion process, and the overall capacity and quality cannot meet the needs of large-scale production. Utility Model Content

[0003] To overcome the technical defects of the existing technology, this utility model provides an insert machine with a high degree of automation and good stability and accuracy.

[0004] The technical solution adopted in this utility model is: The wafer inserter includes a main body, a first base plate inside the main body, a chuck loading and unloading conveying mechanism on one side of the first base plate, and a wafer loading mechanism, a rotary chuck mechanism, a wafer conveying mechanism and a gantry robot sequentially arranged along the length of the main body on one side of the chuck loading and unloading conveying mechanism. The cassette loading and unloading conveyor mechanism includes a cassette loading conveyor belt and a cassette unloading conveyor belt with opposite directions of movement, and the cassette unloading conveyor belt is close to the wafer conveyor mechanism; The wafer loading mechanism includes a rotating component and a wafer holder assembly, which are sequentially disposed on the first base plate. The wafer holder assembly is used to place the wafer. The rotary chuck mechanism is equipped with a chuck, which is used to transport the wafers on the wafer tray assembly to the wafer transfer mechanism. The wafer conveying mechanism is provided with a main conveyor belt assembly, a limiting belt assembly and a tensioning synchronous belt assembly in sequence along the length of the main body of the equipment. The gantry robot is equipped with grippers, which are used to grip empty cassettes on the cassette loading conveyor belt and move them to the end of the wafer conveying mechanism so that the wafers are inserted into the empty cassettes, and to move cassettes containing wafers onto the cassette unloading conveyor belt.

[0005] Preferably, the wafer tray assembly includes at least four wafer trays and a plurality of limiting rods disposed around the wafer trays, and the rotating assembly includes a rotating disk and a first rotating motor connected to each other.

[0006] Preferably, the wafer loading mechanism further includes an air blowing assembly and a lifting electric cylinder. The air blowing assembly includes a first air blowing rod and a second air blowing rod. The first air blowing rod is connected to a rotating disk, and the second air blowing rod is connected to a first base plate. The lifting electric cylinder is connected to a wafer tray and is used to lift the wafer tray.

[0007] Preferably, the limiting rod is provided with a first synchronous belt, and the first pulley group on the first synchronous belt is connected to the limiting rod.

[0008] Preferably, the rotating suction cup mechanism includes a bracket, a rotating joint assembly is connected to the top of the bracket, at least four circumferentially symmetrically arranged suction cups are provided on the bracket, the rotating joint assembly is connected to an air duct, and the air duct is connected to the suction cups after passing through the rotating joint assembly; The lower end of the bracket is connected to a rotary lifting assembly, which includes a rotary shaft, a fixed plate, a guide rail, a fixed frame, a second synchronous belt, a second rotary motor, and a lifting cylinder. The lower end of the bracket is connected to the rotating shaft. One side of the fixed plate is connected to the main body of the equipment, and the other side is connected to the guide rail. The guide rail is connected to the fixed frame. A second synchronous belt is connected inside the fixed frame. The second synchronous belt is provided with a second pulley group. The second pulley group is connected to the rotating shaft and to a second rotary motor. The lower end of the fixed frame is connected to a lifting cylinder, so that the fixed frame slides along the guide rail.

[0009] Preferably, the main conveyor belt assembly includes a second base plate, which is connected to the main conveyor belt via a third pulley set. The third pulley set is connected to a servo motor via a third synchronous belt, and the servo motor and the second base plate are fixedly connected to the main body of the equipment.

[0010] Preferably, the limiting belt assembly includes a support frame, a slide rail at the lower end of the support frame, two limiting sliders on the slide rail, guide plates at the lower ends of the two limiting sliders, a limiting belt at the lower end of the guide plates, a fourth pulley set on the limiting belt, and the fourth pulley set connected to a guide motor.

[0011] Preferably, the tensioning synchronous belt assembly includes a fifth synchronous belt, the fifth synchronous belt is provided with a fifth pulley group, and the fifth pulley group is connected to the support frame through a connecting plate; An opening synchronous belt motor is fixedly installed on the connecting plate. The opening synchronous belt motor passes through the connecting plate and is connected to the fifth pulley group. A first clamping member is connected to the upper end of the fifth synchronous belt, and a second clamping member is connected to the lower end of the fifth synchronous belt. The first clamping member and the second clamping member are respectively connected to a limiting slider.

[0012] Preferably, the support frame is provided with a slotted sensor, and the first clamping member is provided with a sensing plate.

[0013] Preferably, the gantry manipulator includes a transverse module and a lifting module connected to each other. The transverse module is fixedly connected to the main body of the equipment. The gripper is located at the lower end of the gantry manipulator and is equipped with a clamping cylinder.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows: The wafer insertion machine provided by this utility model includes a main body of equipment, a first base plate is provided inside the main body of equipment, a wafer loading and unloading conveyor mechanism is provided on one side of the first base plate, and a wafer loading mechanism, a rotary suction cup mechanism, a wafer conveying mechanism and a gantry robot are sequentially provided along the length direction of the main body of equipment on one side of the wafer loading and unloading conveyor mechanism; the wafers on the wafer loading mechanism can be transferred to the wafer conveying mechanism through the rotary suction cup mechanism; the wafer conveying mechanism is provided with a limiting belt assembly and a tensioning synchronous belt assembly, which can accurately position and straighten the wafers and improve the insertion accuracy; the gantry robot automatically picks up empty wafers on the wafer loading conveyor belt and moves them to the end of the wafer conveying mechanism to insert the wafers into the empty wafers, and moves wafer-loaded wafers to the wafer unloading conveyor belt. The wafer insertion machine is also equipped with sensors in the wafer loading mechanism, rotary chuck mechanism, wafer transfer mechanism and gantry robot, enabling the entire equipment to realize automated wafer loading, unloading, transfer and insertion, ensuring the stability and accuracy of wafers in the transfer and insertion process, so as to improve the overall capacity and quality and meet the needs of large-scale production. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the wafer loading mechanism. Figure 3 This is a schematic diagram of the rotating suction cup mechanism. Figure 4 Schematic diagram of wafer transfer mechanism structure Figure 1 ; Figure 5 Schematic diagram of wafer transfer mechanism structure Figure 2 ; Figure 6 for Figure 1 Enlarged view of point A in the middle; Figure 7 This is a schematic diagram of a gantry robot structure; Explanation of reference numerals in the attached figures: 1. Main body of the equipment; 11. First base plate; 2. Cassette loading / unloading conveyor mechanism; 21. Cassette loading conveyor belt; 22. Cassette unloading conveyor belt; 3. Wafer loading mechanism; 31. Rotating assembly; 311. Rotary disk; 312. First rotary motor; 32. Wafer tray assembly; 321. Wafer tray; 322. Limiting rod; 3221. First synchronous belt; 3222. First pulley group; 33. Air blowing assembly; 331. First air blowing rod; 332. Second air blowing rod; 34. Lifting electric cylinder; 4. Rotary suction cup mechanism; 41. Suction cup; 42. Bracket; 43. Rotary lifting assembly; 431. Rotary shaft; 432. Fixing plate; 433. Guide rail; 434. Fixing frame; 435. Second synchronous belt; 4351. Second pulley group; 436. Second rotary motor; 437. Lifting cylinder; 5. Wafer transfer mechanism; 51. Main conveyor belt assembly; 511. Second base plate; 512. Third pulley group; 513. Main conveyor belt; 514. Third synchronous belt; 52. Limiting belt assembly; 521. Support frame; 522. Slide rail; 523. Limiting slider; 524. Guide plate; 526. Fourth pulley group; 527. Guide motor; 53. Tensioning synchronous belt assembly; 531. Fifth synchronous belt; 532. Fifth pulley group; 533. Connecting plate; 534. Opening synchronous belt motor; 535. First clamping member; 536. Second clamping member; 537. Groove sensor; 538. Sensor plate; 6. Truss robot; 61. Gripper; 62. Lateral movement module; 63. Lifting module; 64. Clamping cylinder. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0018] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly include one or more of the features. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0019] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0020] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0021] The following is combined Figure 1 — Figure 7 As shown, this embodiment provides a wafer insertion machine, including a main body 1. The main body 1 has a first base plate 11. A chuck loading and unloading conveying mechanism 2 is provided on one side of the first base plate 11. Along the length of the main body 1, a wafer loading mechanism 3, a rotary suction cup mechanism 4, a wafer conveying mechanism 5, and a gantry robot 6 are sequentially provided on one side of the chuck loading and unloading conveying mechanism 2. The cassette loading and unloading conveyor mechanism 2 includes a cassette loading conveyor belt 21 and a cassette unloading conveyor belt 22 with opposite directions of movement. The cassette unloading conveyor belt 22 is close to the wafer conveyor mechanism 5. The wafer loading mechanism 3 includes a rotating component 31 and a wafer holder component 32, which are sequentially disposed on the first base plate 11. The wafer holder component 32 is used to place the wafer. The rotary chuck mechanism 4 is provided with a chuck 41, which is used to transport the wafer on the wafer tray assembly 32 to the wafer transfer mechanism 5. The wafer conveying mechanism 5 is provided with a main conveyor belt assembly 51, a limiting belt assembly 52 and a tensioning synchronous belt assembly 53 in sequence along the length of the main body 1; the main conveyor belt assembly 51 is used to convey wafers, and the limiting belt assembly 52 and the tensioning synchronous belt assembly 53 cooperate with each other to accurately position and straighten the wafers, thereby improving the accuracy of wafer insertion in subsequent processes. The gantry robot 6 is equipped with grippers 61. The gantry robot 6 is used to grip empty cassettes on the cassette loading conveyor belt 21 and move them to the end of the wafer conveying mechanism 5 so that the wafers are inserted into the empty cassettes, and to move the cassettes containing wafers to the cassette unloading conveyor belt 22.

[0022] Specifically, the wafer tray assembly 32 includes at least four wafer trays 321 and a plurality of limiting rods 322 disposed around the wafer trays 321. The rotating assembly 31 includes a rotating disk 311 and a first rotating motor 312 connected to each other. The rotating disk 311 is equipped with a sensor for detecting whether there is material on the wafer trays 321 and determining the rotation angle of the rotating disk 311.

[0023] Specifically, the wafer loading mechanism 3 further includes an air blowing assembly 33 and a lifting electric cylinder 34. The air blowing assembly 33 includes a first air blowing rod 331 and a second air blowing rod 332. The first air blowing rod 331 is connected to the rotating disk 311, and the second air blowing rod 332 is connected to the first base plate 11. The air blowing assembly 33 can be set with air pressure and angle to blow up the wafer at the top of the wafer tray 321 to prevent two wafers from sticking together. The lifting electric cylinder 34 is connected to the wafer tray 321 and is used to lift the wafer tray 321.

[0024] Specifically, the limiting rod 322 is provided with a first synchronous belt 3221, and the first pulley group 3222 on the first synchronous belt 3221 is connected to the limiting rod 322. During the lifting process, the first synchronous belt 3221 and the Teflon wafer tray 321 can be used to lift the wafer together, reducing wafer wear.

[0025] Specifically, the rotating suction cup mechanism 4 includes a bracket 42, a rotating joint assembly is connected to the top of the bracket 42, and at least four circumferentially symmetrically arranged suction cups 41 are provided on the bracket 42. The rotating joint assembly is connected to an air duct, and the air duct is connected to the suction cups 41 after passing through the rotating joint assembly. The lower end of the bracket 42 is connected to a rotary lifting assembly 43, which includes a rotary shaft 431, a fixed plate 432, a guide rail 433, a fixed frame 434, a second synchronous belt 435, a second rotary motor 436, and a lifting cylinder 437. The lower end of the bracket 42 is connected to the rotating shaft 431. One side of the fixing plate 432 is connected to the main body 1 of the equipment, and the other side is connected to the guide rail 433. The guide rail 433 is slidably connected to the fixing frame 434. A second synchronous belt 435 is connected inside the fixing frame 434. A second pulley group 4351 is provided on the second synchronous belt 435. The second pulley group 4351 is connected to the rotating shaft 431 and to the second rotary motor 436 so that the bracket 42 can rotate. The lower end of the fixing frame 434 is connected to the lifting cylinder 437 so that the fixing frame 434 slides along the guide rail 433 so that the rotary suction cup mechanism 4 can be raised and lowered.

[0026] When there are four suction cups 41, the bracket 42 can complete one suction and release of the wafer by rotating 90°, so as to improve work efficiency. The rotating suction cup mechanism 4 can also be further equipped with an origin reset sensor and a rotation positioning sensor to ensure the accuracy of the rotating suction cup mechanism 4 when rotating to grasp the wafer.

[0027] Specifically, the main conveyor belt assembly 51 includes a second base plate 511, which is connected to the main conveyor belt 513 via a third pulley group 512. The third pulley group 512 is connected to a servo motor via a third synchronous belt 514. The servo motor and the second base plate 511 are fixedly connected to the main body 1 of the equipment. Furthermore, the main conveyor belt 513 may be equipped with three sensors to ensure the accuracy of wafer entry into the main conveyor belt 513, wafer transport by the main conveyor belt 513, and wafer entry into the jammer.

[0028] Specifically, the limiting belt assembly 52 includes a support frame 521, with a slide rail 522 at its lower end. The slide rail 522 has two limiting sliders 523, each connected to a guide plate 524 at its lower end. A limiting belt 525 is located at the lower end of each guide plate 524, and a fourth pulley set 526 is mounted on the limiting belt 525. The fourth pulley set 526 is connected to a guide motor 527. The two limiting belts 525 are symmetrically arranged to better limit the wafer's movement.

[0029] Specifically, the tensioning synchronous belt assembly 53 includes a fifth synchronous belt 531, the fifth synchronous belt 531 is provided with a fifth pulley group 532, and the fifth pulley group 532 is connected to the support frame 521 through a connecting plate 533; A timing belt motor 534 is fixedly mounted on the connecting plate 533. The timing belt motor 534 passes through the connecting plate 533 and is connected to the fifth pulley group 532. A first clamping member 535 is connected to the upper end of the fifth timing belt 531, and a second clamping member 536 is connected to the lower end of the fifth timing belt 531. The first clamping member 535 and the second clamping member 536 are respectively connected to a limiting slider 523. When the timing belt motor 534 drives the fifth timing belt 531 to move, it can drive the first clamping member 535 and the second clamping member 536 to move synchronously, thereby driving the guide plate 524 to translate along the slide rail 522, realizing the switching operation between 4-inch and 6-inch wafers.

[0030] Specifically, the support frame 521 is equipped with a slotted sensor 537, and the first clamping member 535 is equipped with a sensing sheet 538, which can confirm the final wafer size to be transported.

[0031] Specifically, the limiting belt assembly 52 and the tensioning synchronous belt assembly 53 move at the same speed as the main conveyor belt 513 to reduce wafer damage and ensure that the wafer accurately enters the jam.

[0032] Specifically, the gantry robot 6 includes a transverse module 62 and a lifting module 63 connected together. The transverse module 62 is arranged along the width direction of the main body 1 and is fixedly connected to the main body 1, enabling precise horizontal movement of the gripper 61. The gripper 61 is located at the lower end of the lifting module 63, and a clamping cylinder 64 is provided on the gripper 61 for gripping or releasing the jammer. Sensors can be further installed on the gripper 61 to improve the accuracy and stability of the gripper's gripping of the jammer.

[0033] The operation of this utility model is divided into three stages: loading, transfer and insertion, and unloading. Loading stage: An empty wafer chuck is placed manually on the chuck loading conveyor belt 21, and then transported to the end of the wafer transfer mechanism 5 by the gantry robot 6. The wafer is placed manually on the wafer tray 321. Under the action of the lifting cylinder 34, the wafer tray 321 is raised by the first synchronous belt 3221. After the sensor on the rotating disk 311 detects the material condition, the air blowing assembly 33 blows up the top wafer to prevent it from sticking together. Then, the support 42 rotates, causing the suction cup 41 to rotate and pick up the wafer. During the transfer and insertion stage: the picked-up wafers are released onto the main conveyor belt 513 via the suction cup 41. Three sensors on the main conveyor belt 513 ensure accurate wafer transfer. The limit belt assembly 52 moves at the same speed as the main conveyor belt 513 to ensure that the wafers accurately enter the chuck. The gripper 61 of the gantry robot 6 uses the chuck groove to clamp the chuck with the assistance of sensors. The lifting module 63 precisely controls the lifting and lowering of the gripper 61 to complete the wafer insertion to the chuck. Material unloading stage: The cassette with the wafer is conveyed to the cassette unloading conveyor belt 22 through the transverse module 62, and the unloading is completed manually.

[0034] This invention significantly reduces manual operations during wafer and cassette loading, unloading, and insertion processes, enabling automated wafer loading, unloading, transfer, and insertion. It ensures the stability and accuracy of wafers during transfer and insertion, thereby improving overall capacity and quality and meeting the needs of large-scale production.

[0035] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A chip inserter, comprising a main body (1), characterized in that, The main body (1) of the equipment is provided with a first base plate (11), and a chuck loading and unloading conveying mechanism (2) is provided on one side of the first base plate (11). Along the length of the main body (1), the chuck loading and unloading conveying mechanism (2) is provided with a wafer loading mechanism (3), a rotary suction cup mechanism (4), a wafer conveying mechanism (5) and a gantry robot (6). The cassette loading and unloading conveyor (2) includes a cassette loading conveyor (21) and a cassette unloading conveyor (22) with opposite directions of movement. The cassette unloading conveyor (22) is close to the wafer conveyor (5). The wafer loading mechanism (3) includes a rotating component (31) and a wafer holder component (32). The rotating component (31) and the wafer holder component (32) are sequentially disposed on the first base plate (11). The wafer holder component (32) is used to place the wafer. The rotary chuck mechanism (4) is equipped with a chuck (41), which is used to transport the wafer on the wafer tray assembly (32) to the wafer transfer mechanism (5); The wafer transfer mechanism (5) is provided with a main conveyor belt assembly (51), a limiting belt assembly (52) and a tensioning synchronous belt assembly (53) in sequence along the length of the main body (1). The gantry manipulator (6) is equipped with grippers (61). The gantry manipulator (6) is used to grip empty cassettes on the cassette loading conveyor belt (21) and move them to the end of the wafer conveying mechanism (5) so that the wafer is inserted into the empty cassette, and to move the cassettes containing the wafers to the cassette unloading conveyor belt (22).

2. The chip inserter according to claim 1, characterized in that, The wafer tray assembly (32) includes at least four wafer trays (321) and a plurality of limiting rods (322) disposed around the wafer trays (321). The rotating assembly (31) includes a rotating disk (311) and a first rotating motor (312) connected to each other.

3. The chip inserter according to claim 1 or 2, characterized in that, The wafer loading mechanism (3) further includes an air blowing assembly (33) and a lifting electric cylinder (34). The air blowing assembly (33) includes a first air blowing rod (331) and a second air blowing rod (332). The first air blowing rod (331) is connected to the rotating disk (311), and the second air blowing rod (332) is connected to the first base plate (11). The lifting electric cylinder (34) is connected to the wafer tray (321) and is used to lift the wafer tray (321).

4. The inserter according to claim 2, characterized in that, The limiting rod (322) is provided with a first synchronous belt (3221), and the first pulley group (3222) on the first synchronous belt (3221) is connected to the limiting rod (322).

5. The chip inserter according to claim 1, characterized in that, The rotating suction cup mechanism (4) includes a bracket (42), a rotating joint assembly is connected to the top of the bracket (42), and at least four circumferentially symmetrically arranged suction cups (41) are provided on the bracket (42). The rotating joint assembly is connected to an air pipe, and the air pipe is connected to the suction cups (41) after passing through the rotating joint assembly. The lower end of the bracket (42) is connected to a rotary lifting assembly (43), which includes a rotating shaft (431), a fixed plate (432), a guide rail (433), a fixed frame (434), a second synchronous belt (435), a second rotary motor (436), and a lifting cylinder (437). The lower end of the bracket (42) is connected to the rotating shaft (431). One side of the fixed plate (432) is connected to the main body of the equipment (1), and the other side is connected to the guide rail (433). The guide rail (433) is slidably connected to the fixed frame (434). A second synchronous belt (435) is connected inside the fixed frame (434). The second synchronous belt (435) is provided with a second pulley group (4351). The second pulley group (4351) is connected to the rotating shaft (431) and to the second rotary motor (436). The lower end of the fixed frame (434) is connected to the lifting cylinder (437) so that the fixed frame (434) slides along the guide rail (433).

6. The chip inserter according to claim 1, characterized in that, The main conveyor belt assembly (51) includes a second base plate (511), which is connected to the main conveyor belt (513) via a third pulley group (512). The third pulley group (512) is connected to the servo motor via a third synchronous belt (514). The servo motor and the second base plate (511) are fixedly connected to the main body of the equipment (1).

7. The chip inserter according to claim 6, characterized in that, The limiting belt assembly (52) includes a support frame (521), the lower end of the support frame (521) is provided with a slide rail (522), the slide rail (522) is provided with two limiting sliders (523), the lower ends of the two limiting sliders (523) are respectively connected to guide plates (524), the lower end of the guide plate (524) is provided with a limiting belt (525), the limiting belt (525) is provided with a fourth pulley group (526), ​​and the fourth pulley group (526) is connected to a guide motor (527).

8. The inserter according to claim 7, characterized in that, The tensioning synchronous belt assembly (53) includes a fifth synchronous belt (531), the fifth synchronous belt (531) is provided with a fifth pulley group (532), and the fifth pulley group (532) is connected to the support frame (521) through a connecting plate (533); An opening synchronous belt motor (534) is fixedly installed on the connecting plate (533). The opening synchronous belt motor (534) passes through the connecting plate (533) and is connected to the fifth pulley group (532). The upper end of the fifth synchronous belt (531) is connected to a first clamping member (535), and the lower end of the fifth synchronous belt (531) is connected to a second clamping member (536). The first clamping member (535) and the second clamping member (536) are respectively connected to a limiting slider (523).

9. The inserter according to claim 8, characterized in that, The support frame (521) is provided with a slotted sensor (537), and the first clamping member (535) is provided with a sensing sheet (538).

10. The chip inserter according to claim 1, characterized in that, The gantry manipulator (6) includes a transverse module (62) and a lifting module (63) connected to each other. The transverse module (62) is fixedly connected to the main body of the equipment (1). The gripper (61) is located at the lower end of the gantry manipulator (6). The gripper (61) is equipped with a clamping cylinder (64).

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