Clean square substrate centering device

Abstract

The utility model belongs to the technical field of substrate centering, specifically a clean square substrate centering device, including fixed bottom plate, sensor mounting bracket, reflection sensor group, support column group, vacuum air -exhausting column etc. Each support column group includes two support columns respectively, and the two support columns of each support column group form point contact to the corresponding corner of the applicable square substrate simultaneously. The air outlet port and a plurality of air extraction holes are respectively arranged on each vacuum air -exhausting column, and the air extraction holes on each vacuum air -exhausting column are located on the position close to the corresponding corner of the applicable square substrate. The utility model discloses the setting of support column group can realize the automatic centering of square substrate, can effectively ensure that square substrate and support column keep point contact state, reduce the damage, through the setting of vacuum air -exhausting column, can suck away the particle impurity etc. that the contact produces through the air extraction hole, and discharges from the air outlet port, fully guarantees the high cleanliness of square substrate in the process of centering.

Description

Technical Field

[0001] This utility model belongs to the field of substrate alignment technology, specifically a clean square substrate alignment device. Background Technology

[0002] In the semiconductor manufacturing process, substrates need to be aligned before entering certain process units for precise subsequent processing. When square substrates come into contact with existing alignment devices, they are more likely to be scratched and worn. Furthermore, contact or even impacts can generate a large number of particles that easily adhere to the substrate and cause contamination. Utility Model Content

[0003] To address the aforementioned problems, the purpose of this utility model is to provide a clean square substrate centering device.

[0004] The objective of this utility model is achieved through the following technical solution: A clean-type square substrate centering device includes a fixed base plate, a sensor mounting bracket, a reflective sensor group A, a support column group A, and a vacuum pumping column; The fixed base plate is provided with four support column groups A. The position of each support column group A is matched with a corresponding corner of the applicable square substrate. Each support column group A includes two support columns. The two support columns of each support column group A simultaneously form point contact with a corresponding corner of the applicable square substrate. The fixed base plate is provided with vacuum extraction columns near each support column group A. Each vacuum extraction column has an exhaust port at its lower part and several extraction holes at its upper part. The extraction holes on each vacuum extraction column are located near a corresponding corner of the applicable square substrate. Each vacuum extraction column has an extraction channel inside. The extraction channel of each vacuum extraction column is connected to the exhaust port and each extraction hole of the vacuum extraction column. The reflection sensor group A includes two light transceivers and two light reflectors. Each light transceiver of the reflection sensor group A is used in conjunction with one of the light reflectors of the reflection sensor group A. That is, each light transceiver of the reflection sensor group A emits light, which is reflected back to the original light transceiver after reaching the corresponding light reflector. The light emitted by the two light transceivers of the reflection sensor group A intersects each other and is located in the same plane A. The plane A is parallel to the plane of the fixed base plate. The two light transceivers and two light reflectors of the reflection sensor group A are respectively mounted on the fixed base plate through the sensor mounting bracket. The plane A is located above the square substrate that is supported and aligned by the support column group A, and is parallel to the plane where the aligned square substrate is located; when the square substrate supported by the support column group A fails to be aligned, the unaligned square substrate intersects with the plane A and blocks the light emitted from the two light transceivers of the reflection sensor group A.

[0005] An upper support plate is provided above the fixed base plate, and several connecting columns connect the upper support plate and the fixed base plate. The plane of the upper support plate is parallel to the plane of the fixed base plate. A placement station for a square substrate is formed on the upper and lower sides of the upper support plate. The upper support plate is provided with four support column groups B. The position of each support column group B is matched with a corresponding corner of the applicable square substrate. Each support column group B also includes two support columns. The two support columns of each support column group B simultaneously form point contact with a corresponding corner of the applicable square substrate. The fixed base plate is also provided with vacuum pumping columns near each support column group B. The outer side of the upper support plate is also provided with a reflection sensor group B, which includes two light transceivers and two light reflectors. Each light transceiver of the reflection sensor group B is used in conjunction with one of the light reflectors of the reflection sensor group B. That is, each light transceiver of the reflection sensor group B emits light, which is reflected back to the original light transceiver after reaching the corresponding light reflector. The light emitted by the two light transceivers of the reflection sensor group B intersects each other and is located in the same plane B. The plane B is parallel to the plane of the fixed base plate. The two light transceivers and two light reflectors of the reflection sensor group B are also mounted on the fixed base plate by the sensor mounting bracket. The plane B is located above the square substrate that is supported and aligned by the support column group B, and is parallel to the plane where the aligned square substrate is located; when the square substrate supported by the support column group B fails to be aligned, the unaligned square substrate intersects with the plane B and blocks the light emitted from the two light transceivers of the reflection sensor group B.

[0006] The positions of each of the support column groups B correspond one-to-one with the positions of each of the support column groups A, and the positions of each vacuum pumping column on the upper support plate correspond one-to-one with the positions of each vacuum pumping column on the fixed base plate.

[0007] The bottom end of each connecting post is threaded to the fixed base plate, and the top end of each connecting post is threaded to the upper support plate. The axis of all connecting posts is perpendicular to the plane of the fixed base plate.

[0008] The positions of the two light transceiver ends of the reflection sensor group B correspond one-to-one with the positions of the two light transceiver ends of the reflection sensor group A, and the positions of the two light reflection ends of the reflection sensor group B correspond one-to-one with the positions of the two light reflection ends of the reflection sensor group A.

[0009] The top of all the support columns is formed into a conical support head to directly make point contact with a corresponding corner of the applicable square substrate; the upper radius of the conical support head of each support column is the same as the lower radius of the conical support head of the support column.

[0010] All the support columns have a threaded connection column portion A extending downward from their bottom ends, and all the support columns have an external thread A on their outer circumferential surface of the threaded connection column portion A.

[0011] The bottom end of all the vacuum pumping columns extends downward and is provided with a threaded connection column portion B, and the outer peripheral surface of the threaded connection column portion B of all the vacuum pumping columns is provided with an external thread B.

[0012] None of the vacuum pumping columns are in contact with the square substrate.

[0013] All vacuum pumping columns have the same diameter for their extraction holes and the same diameter for their outlet ports. The diameter of the extraction hole in each vacuum pumping column is smaller than the diameter of its outlet port.

[0014] The advantages and positive effects of this utility model are as follows: 1. This utility model can achieve automatic centering of the square substrate by setting up the support column group, which can effectively ensure that the square substrate and the support column maintain point contact and reduce damage.

[0015] 2. By setting up a vacuum extraction column, this utility model can remove particulate impurities generated during contact through the extraction hole and discharge them through the outlet port, thus fully ensuring the high cleanliness of the square substrate during the alignment process. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a reference diagram showing the working structure of this utility model; Figure 3 This is a schematic diagram of the structure of the support column of this utility model; Figure 4 This is a schematic diagram of the structure of the vacuum pumping column of this utility model.

[0017] In the diagram: 1 is the fixed base plate, 2 is the sensor mounting bracket, 3 is the vacuum extraction column, 301 is the air outlet, 302 is the air extraction hole, 303 is the threaded connection column B, 4 is the support column, 401 is the conical support head, 402 is the threaded connection column A, 5 is the light transceiver end, 6 is the light reflection end, 7 is the upper support plate, and 8 is the connecting column. 001 is a square substrate. Detailed Implementation

[0018] The following is in conjunction with the appendix Figures 1-4 The present invention will be described in further detail.

[0019] A clean-type square substrate centering device, such as Figures 1-4 As shown, this embodiment includes a fixed base plate 1, a sensor mounting bracket 2, a reflection sensor group A, a support column group A, and a vacuum pumping column 3.

[0020] The fixed base plate 1 has four support column groups A. Each support column group A is positioned to match a corresponding corner of the applicable square substrate 001. Each support column group A includes two support columns 4, which simultaneously make point contact with the corresponding corner of the applicable square substrate 001. Vacuum extraction columns 3 are located near each support column group A on the fixed base plate 1. Each vacuum extraction column 3 has an outlet port 301 at its lower part and several extraction holes 302 at its upper part. The extraction holes 302 on each vacuum extraction column 3 are located near a corresponding corner of the applicable square substrate 001. Each vacuum extraction column 3 has an internal extraction channel, which is connected to both the outlet port 301 and each extraction hole 302. The outlet port 301 of each vacuum extraction column 3 is used to connect to an external extraction device via a pipe.

[0021] The reflection sensor group A includes two light transceiver ends 5 and two light reflector ends 6. Each light transceiver end 5 of the reflection sensor group A is used in conjunction with one of the light reflector ends 6 of the reflection sensor group A. That is, each light transceiver end 5 of the reflection sensor group A emits light, which is reflected back to the original light transceiver end 5 after hitting the corresponding light reflector end 6. The light emitted by the two light transceiver ends 5 of the reflection sensor group A intersects each other and is located in the same plane A. Plane A is parallel to the plane of the fixed base plate 1. The two light transceiver ends 5 and the two light reflector ends 6 of the reflection sensor group A are respectively mounted on the fixed base plate 1 by the sensor mounting bracket 2 and screws.

[0022] Plane A is located above the square substrate 001, which is supported and aligned by the support column group A, and is parallel to the plane where the aligned square substrate 001 is located. When the square substrate 001 supported by the support column group A fails to be aligned, the unaligned square substrate 001 intersects with plane A and blocks the light emitted from the two light transceiver terminals 5 of the reflection sensor group A.

[0023] Specifically, in this embodiment, an upper support plate 7 is provided above the fixed base plate 1. Several connecting posts 8 connect the upper support plate 7 and the fixed base plate 1. The plane of the upper support plate 7 is parallel to the plane of the fixed base plate 1. The upper and lower sides of the upper support plate 7 each form a placement station for the square substrate 001, which facilitates the placement of square substrates 001 entering and exiting specific process units, or facilitates the temporary separation and storage of square substrates 001 that have been tested as clean and those that have been tested as having significant contamination.

[0024] The upper support plate 7 is provided with four support column groups B. The position of each support column group B matches a corresponding corner of the applicable square substrate 001. Each support column group B also includes two support columns 4. The two support columns 4 of each support column group B simultaneously form point contact with the corresponding corner of the applicable square substrate 001. Vacuum extraction columns 3 are also provided on the fixed base plate 1 near each support column group B. In this embodiment, the arrangement of the support columns 4 and vacuum extraction columns 3 on the upper support plate 7 is basically the same as the arrangement of the support columns 4 and vacuum extraction columns 3 on the fixed base plate 1.

[0025] A reflection sensor group B is also provided on the outer side of the upper support plate 7. The reflection sensor group B also includes two light transceiver ends 5 and two light reflector ends 6. Each light transceiver end 5 of the reflection sensor group B is used in conjunction with one of the light reflector ends 6 of the reflection sensor group B. That is, each light transceiver end 5 of the reflection sensor group B emits light, which is reflected back to the original light transceiver end 5 after hitting the corresponding light reflector end 6. The light emitted by the two light transceiver ends 5 of the reflection sensor group B intersects each other and is located in the same plane B. The plane B is parallel to the plane of the fixed base plate 1. The two light transceiver ends 5 and the two light reflector ends 6 of the reflection sensor group B are also mounted on the fixed base plate 1 by sensor mounting brackets 2 and screws. In this embodiment, there are four sensor mounting brackets 2.

[0026] Plane B is located above the square substrate 001, which is supported and aligned by the support column group B, and is parallel to the plane containing the aligned square substrate 001. When the square substrate 001 supported by the support column group B fails to align, the misaligned square substrate 001 intersects with plane B and blocks the light emitted from the two light transceiver ends 5 of the reflection sensor group B. In this embodiment, the light transceiver ends 5 and light reflecting ends 6 used in the reflection sensor group A and reflection sensor group B are commercially available products, and each light transceiver end 5 is connected to an external control system for communication.

[0027] The positions of each support column group B correspond vertically to the positions of each support column group A. Similarly, the positions of each vacuum extraction column 3 on the upper support plate 7 correspond vertically to the positions of each vacuum extraction column 3 on the fixed base plate 1. The positions of the two light transceiver ends 5 of the reflection sensor group B correspond vertically to the positions of the two light transceiver ends 5 of the reflection sensor group A. The positions of the two light reflection ends 6 of the reflection sensor group B correspond vertically to the positions of the two light reflection ends 6 of the reflection sensor group A, facilitating the installation of the overall structure. The bottom end of each connecting column 8 is threaded to the fixed base plate 1, and the top end of each connecting column 8 is threaded to the upper support plate 7. The axes of all connecting columns 8 are perpendicular to the plane of the fixed base plate 1, making assembly and disassembly easy.

[0028] Specifically, such as Figure 4 As shown, in this embodiment, the top of all support columns 4 is formed with a conical support head 401 to directly form point contact with a corresponding corner of the applicable square substrate 001. The upper radius of the conical support head 401 of each support column 4 is the same as the lower radius of the conical support head 401 of the same support column 4, in order to ensure reliable point contact as much as possible and reduce the probability of contact with the square substrate 001 and scratches or wear on the square substrate 001. The bottom end of all support columns 4 extends downward to provide a threaded connection column portion A 402, and the outer circumferential surface of the threaded connection column portion A 402 of all support columns 4 is provided with external threads A, so as to detach and connect to the fixed base plate 1 or the upper support plate 7 respectively. In this embodiment, all support columns 4 have the same structural dimensions, which facilitates parts replacement and maintenance.

[0029] Specifically, such as Figure 3As shown, in this embodiment, all vacuum pumping columns 3 have a threaded connection column portion B 303 extending downwards from their bottom ends. The outer circumferential surface of the threaded connection column portion B 303 of all vacuum pumping columns 3 has an external thread B, allowing for detachable connection and assembly with the fixed base plate 1 or the upper support plate 7. None of the vacuum pumping columns 3 are in contact with the square substrate 001. The diameter of the suction holes 302 of all vacuum pumping columns 3 is the same, and the diameter of the outlet ports 301 of all vacuum pumping columns 3 is also the same. The diameter of the suction hole 302 of each vacuum pumping column 3 is smaller than the diameter of the outlet port 301. In this embodiment, the diameter of the suction hole 302 is 0.5 mm, and the diameter of the outlet port 301 is 2 mm, but this can be reasonably designed according to usage requirements. The identical structural dimensions of all vacuum pumping columns 3 in this embodiment facilitate parts replacement and maintenance.

[0030] Working principle: Once the alignment process begins, the external robotic arm clamps the square substrate 001 above either support column group A or support column group B of the device, and then releases the clamp, allowing the square substrate 001 to slide down along the conical support head 401 at the top of the support column 4, thus achieving automatic alignment. If the alignment is accurate, the square substrate 001 will be parallel to the adjacent light source, i.e., plane A or plane B, and will not block the light from the light transceiver 5. At this time, the external exhaust device is activated, allowing the exhaust holes 302 of the vacuum exhaust column 3 to suck away particulate impurities generated during contact, which are then discharged through the exhaust port 301. This structural method effectively ensures that the square substrate 001 maintains point contact with the support column 4, reducing damage and guaranteeing the high cleanliness of the square substrate 001.

Claims

1. A clean-type square substrate centering device, characterized in that: Includes a fixed base plate (1), a sensor mounting bracket (2), a reflection sensor group A, a support column group A, and a vacuum pumping column (3); The fixed base plate (1) is provided with four support column groups A. The position of each support column group A is matched with a corresponding corner of the applicable square substrate (001). Each support column group A includes two support columns (4). The two support columns (4) of each support column group A simultaneously form point contact with a corresponding corner of the applicable square substrate (001). The fixed base plate (1) is provided with vacuum extraction columns (3) near each support column group A. Each vacuum extraction column (3) has... The lower part is provided with an air outlet port (301), and the upper part of each vacuum pump column (3) is provided with a plurality of air extraction holes (302). The air extraction holes (302) on each vacuum pump column (3) are located at a corresponding corner near the applicable square substrate (001). Each vacuum pump column (3) has an air extraction channel inside. The air extraction channel of each vacuum pump column (3) is connected to the air outlet port (301) and each air extraction hole (302) of the vacuum pump column (3). The reflection sensor group A includes two light transceiver ends (5) and two light reflector ends (6). Each light transceiver end (5) of the reflection sensor group A is used in conjunction with one of the light reflector ends (6) of the reflection sensor group A. That is, each light transceiver end (5) of the reflection sensor group A emits light, which is reflected back to the original light transceiver end (5) after reaching the corresponding light reflector end (6). The light emitted by the two light transceiver ends (5) of the reflection sensor group A intersects each other and is located in the same plane A. The plane A is parallel to the plane of the fixed base plate (1). The two light transceiver ends (5) and the two light reflector ends (6) of the reflection sensor group A are respectively mounted on the fixed base plate (1) through the sensor mounting bracket (2). The plane A is located above the square substrate (001) supported by the support column group A and aligned, and is parallel to the plane where the aligned square substrate (001) is located; when the square substrate (001) supported by the support column group A fails to be aligned, the unaligned square substrate (001) intersects with the plane A and blocks the light emitted by the two light transceiver ends (5) of the reflection sensor group A.

2. The clean-type square substrate alignment device according to claim 1, characterized in that: An upper support plate (7) is provided above the fixed base plate (1). Several connecting columns (8) are connected between the upper support plate (7) and the fixed base plate (1). The plane of the upper support plate (7) is parallel to the plane of the fixed base plate (1). A placement station for a square base plate (001) is formed on the upper and lower sides of the upper support plate (7). The upper support plate (7) is provided with four support column groups B. The position of each support column group B is matched with a corresponding corner of the applicable square substrate (001). Each support column group B also includes two support columns (4). The two support columns (4) of each support column group B simultaneously form point contact with a corresponding corner of the applicable square substrate (001). The fixed base plate (1) is also provided with vacuum pumping columns (3) near each support column group B. The outer side of the upper support plate (7) is also provided with a reflection sensor group B, which includes two light transceiver ends (5) and two light reflection ends (6). Each light transceiver end (5) of the reflection sensor group B is used in conjunction with one of the light reflection ends (6) of the reflection sensor group B. That is, each light transceiver end (5) of the reflection sensor group B emits light, which is reflected back to the original light transceiver end (5) after reaching the corresponding light reflection end (6). The light emitted by the two light transceiver ends (5) of the reflection sensor group B intersects each other and is located in the same plane B. The plane B is parallel to the plane of the fixed base plate (1). The two light transceiver ends (5) and the two light reflection ends (6) of the reflection sensor group B are also installed on the fixed base plate (1) through the sensor mounting bracket (2). The plane B is located above the square substrate (001) supported by the support column group B and aligned, and is parallel to the plane where the aligned square substrate (001) is located; when the square substrate (001) supported by the support column group B fails to be aligned, the unaligned square substrate (001) intersects with the plane B and blocks the light emitted by the two light transceivers (5) of the reflection sensor group B.

3. The clean-type square substrate centering device according to claim 2, characterized in that: The positions of each of the support column groups B correspond one-to-one with the positions of each of the support column groups A, and the positions of each vacuum pumping column (3) on the upper support plate (7) correspond one-to-one with the positions of each vacuum pumping column (3) on the fixed base plate (1).

4. The clean-type square substrate centering device according to claim 2, characterized in that: The bottom end of each of the connecting columns (8) is connected to the fixed base plate (1) by a thread, and the top end of each of the connecting columns (8) is connected to the upper support plate (7) by a thread. The axis of all the connecting columns (8) is perpendicular to the plane of the fixed base plate (1).

5. A clean-type square substrate centering device according to claim 2, characterized in that: The positions of the two light transceiver ends (5) of the reflection sensor group B correspond one-to-one with the positions of the two light transceiver ends (5) of the reflection sensor group A. The positions of the two light reflection ends (6) of the reflection sensor group B correspond one-to-one with the positions of the two light reflection ends (6) of the reflection sensor group A.

6. A clean-type square substrate alignment device according to claim 1 or 2, characterized in that: The top of all the support columns (4) are formed into a conical support head (401) to directly form a point contact with a corresponding corner of the applicable square substrate (001); the upper radius of the conical support head (401) of each support column (4) is the same as the lower radius of the conical support head (401) of the support column (4).

7. A clean-type square substrate alignment device according to claim 1 or 2, characterized in that: All the support columns (4) have a threaded connection column A (402) extending downward from the bottom end, and all the support columns (4) have an external thread A on the outer circumferential surface of the threaded connection column A (402).

8. A clean-type square substrate centering device according to claim 1 or 2, characterized in that: All of the vacuum pumping columns (3) have a threaded connection column portion B (303) extending downward at the bottom end, and all of the vacuum pumping columns (3) have an external thread B on the outer circumferential surface of the threaded connection column portion B (303).

9. A clean-type square substrate centering device according to claim 1 or 2, characterized in that: None of the vacuum pumping columns (3) are in contact with the square substrate (001).

10. A clean-type square substrate centering device according to claim 1 or 2, characterized in that: All vacuum pumping columns (3) have the same diameter of the evacuation port (302) and the same diameter of the outlet port (301) of all vacuum pumping columns (3). The diameter of the evacuation port (302) of each vacuum pumping column (3) is smaller than the diameter of the outlet port (301) of that vacuum pumping column (3).

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