Chip insertion mounting jig

Abstract

The utility model relates to the technical field of semiconductor manufacturing provides a kind of wafer plug installation jig, including support, distance adjusting part and multiple plate bodies;Reference surface is provided on the plate body, the reference surface of each plate body is parallelly arranged, each plate body is set in the support along the direction perpendicular to the reference surface;The distance adjusting part is used to lock the position of the plate body along the direction perpendicular to the reference surface.The above-mentioned wafer plug installation jig can improve wafer plug installation efficiency and installation accuracy.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a die insertion mounting fixture. Background Technology

[0002] In semiconductor manufacturing, furnace tubes (such as diffusion furnaces, oxidation furnaces, and chemical vapor deposition furnaces) are key equipment for high-temperature processes. During the manufacturing process, wafers need to be placed inside the quartz furnace tube. Traditional single-arm transfer methods can only pick up and place one wafer at a time, resulting in a significant bottleneck in production capacity. To improve transfer efficiency, existing transfer methods typically pick up and place multiple wafers at once, theoretically increasing transfer efficiency several times over. This is crucial for increasing production capacity and reducing the cost per wafer.

[0003] Existing transmission structures typically involve mounting multiple interlocking plates on a base. During installation, each individual plate must be installed onto the base one by one, and after each plate is installed, its levelness must be adjusted using tools such as a level. Due to the slight interaction forces between the interlocking plates, adjusting a later plate may slightly affect the previously adjusted ones. Furthermore, the spacing between each interlocking plate must be measured individually to ensure a constant distance between adjacent plates. This transmission structure is complex and cumbersome to install, and the accumulated errors from manual spacing measurements and leveling due to the stacking effect of multiple plates can easily lead to transmission failures.

[0004] Therefore, this utility model provides a plate insertion installation fixture to improve plate insertion installation efficiency and installation accuracy. Utility Model Content

[0005] The purpose of this utility model is to provide a wafer insertion installation fixture to improve wafer insertion installation efficiency and installation accuracy.

[0006] This utility model provides a plate-mounting fixture, including: a bracket, a distance adjustment component, and multiple plates;

[0007] The plate is provided with a reference surface, and the reference surfaces of each plate are arranged in parallel. Each plate is mounted on the support in a direction perpendicular to the reference surface.

[0008] The distance adjustment component is used to adjust and lock the position of the plate body along the direction perpendicular to the reference plane.

[0009] Optionally, the bracket includes a guide post, and each of the plates is slidably sleeved on the guide post along the length direction of the guide post, the length direction of the guide post being perpendicular to the reference surface.

[0010] Optionally, multiple guide posts are provided, and the guide posts are arranged in parallel.

[0011] Optionally, the bracket includes a lead screw, the axial direction of which is perpendicular to the reference surface, the distance adjustment member is threadedly engaged with the lead screw, and the distance adjustment member is supported on the plate.

[0012] Optionally, the support includes a frame, and the lead screw is mounted on the frame with a single degree of freedom of rotation about its own central axis.

[0013] Optionally, the insert mounting fixture further includes a locking member connected to the distance adjustment member for fixing the distance adjustment member to the plate.

[0014] Optionally, the distance adjusting member is provided with a through groove, the through groove extending through the distance adjusting member along the axial direction of the lead screw, and the through groove is an arc groove arranged around the central axis of the lead screw;

[0015] The locking member passes through the through slot to fix the distance adjustment member to the plate.

[0016] Optionally, the bracket has a mounting groove along a direction parallel to the reference plane.

[0017] Optionally, the insert mounting fixture further includes a plurality of horizontal adjustment members, which are movably disposed on the bracket in a direction perpendicular to the reference surface, with one end of the horizontal adjustment member located in the mounting groove.

[0018] Optionally, the insert mounting fixture further includes a level, which is disposed on the bracket.

[0019] With this configuration, the aforementioned insert mounting fixture can pre-adjust the position of the plates, ensuring a constant distance between the reference surfaces of adjacent plates. This distance equals the distance between adjacent inserts, and the reference surfaces serve as a reference for the insert mounting position. During insert fixing, the inserts are aligned with the reference surfaces and then fixed to their respective bases. This eliminates the need for individual adjustments during insert fixing, simplifying the process into a single, integrated installation, significantly streamlining the insert installation workflow. Furthermore, the positional reference provided by the fixture helps reduce installation errors, fundamentally eliminating the cumulative errors caused by manual adjustments. The relative positions between inserts are guaranteed by the fixture's reference surface positional accuracy, independent of the operator's skill level during installation, ensuring identical installation results after each maintenance and facilitating standardized insert installation. It also improves transmission malfunctions such as insert collisions caused by insufficient insert positional accuracy, shortens downtime, improves transmission efficiency, and reduces maintenance costs.

[0020] The above-mentioned interlocking mounting fixture has an adjustable plate position, and the distance between adjacent plates can be adjusted according to the process requirements, making the interlocking mounting fixture suitable for various machine models. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of a plate-mounting fixture according to an embodiment of the present invention. Figure 1 ;

[0022] Figure 2 This is a schematic diagram of the structure of a plate-mounting fixture according to an embodiment of the present invention. Figure 2 ;

[0023] Figure 3 This is a schematic diagram of the structure of a plate-mounting fixture according to an embodiment of the present invention. Figure 3 ;

[0024] Figure 4 This is a partial structural schematic diagram of a plate-mounting fixture according to an embodiment of the present invention.

[0025] In the attached diagram:

[0026] 10-Bracket; 11-Guide column; 12-Screw rod; 13-Frame body; 131-Upper horizontal plate; 132-Lower horizontal plate; 133-Upright plate; 134-Installation area; 14-Handle; 15-Installation slot;

[0027] 20 - Distance adjustment part; 21 - Through slot;

[0028] 30 - Plate body; 31 - Reference plane;

[0029] 40 - Locking element;

[0030] 50 - Leveling adjustment piece;

[0031] 60 - Level;

[0032] 70 - Outer shell. Detailed Implementation

[0033] The following detailed description, in conjunction with the accompanying drawings and specific embodiments, provides a further detailed explanation of the plate-mounting fixture proposed in this utility model. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this utility model.

[0034] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the terms “at least two” or “more than” are generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. Furthermore, the terms "installed," "connected," and "attached," as used in this utility model, and the term "set" on one element from another, should be interpreted broadly. They generally only indicate a connection, coupling, cooperation, or transmission relationship between the two elements, which can be direct or indirect through an intermediate element. They should not be construed as indicating or implying a spatial positional relationship between the two elements, meaning one element can be located inside, outside, above, below, or to one side of the other element, unless otherwise explicitly stated. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances. Additionally, directional terms such as above, below, up, down, upward, downward, left, and right are used relative to exemplary embodiments as shown in the figures, with upward or up direction pointing towards the top of the corresponding figure, and downward or down direction pointing towards the bottom of the corresponding figure.

[0035] This embodiment provides a plate-mounting fixture, including: a bracket 10, a distance adjustment component 20, and multiple plates 30;

[0036] The plate 30 is provided with a reference surface 31, and the reference surfaces 31 of each plate 30 are arranged in parallel. For example Figure 1 As shown, the upper surface of each plate 30 serves as a reference surface 31, which is used as a reference for the installation position of the insert. When the insert is installed, the lower surface of the insert can be attached to the reference surface 31. Each insert is attached to a reference surface 31, thus achieving natural positioning of the insert position and levelness.

[0037] like Figure 1 As shown, the plate 30 is set as a rectangular plate structure, so the reference surface 31 is a rectangular structure. The reference surface 31 is set horizontally, so the direction perpendicular to the reference surface 31 is the vertical direction.

[0038] Each of the plates 30 is mounted on the bracket 10 in a direction perpendicular to the reference surface 31. The position of each reference surface 31 can be adjusted by adjusting the vertical position of each plate 30 to ensure that the distance between the reference surfaces 31 of adjacent plates 30 is constant.

[0039] The distance adjustment component 20 is used to adjust and lock the position of the plate 30 along the direction perpendicular to the reference surface 31, so as to fix the position of the plate 30.

[0040] The aforementioned insert mounting fixture can pre-adjust the position of the plate 30, ensuring a constant distance between the reference surfaces 31 of adjacent plates 30. This distance is equal to the distance between adjacent inserts, and the reference surfaces 31 serve as a reference for the insert mounting position. During insert fixing, the inserts are aligned with the reference surfaces 31 and then fixed to their respective bases. This eliminates the need for individual adjustments during insert fixing, simplifying the process into a single, integrated installation, greatly streamlining the insert installation workflow. Furthermore, the positional reference provided by the fixture helps reduce installation errors, fundamentally eliminating the cumulative errors caused by manual adjustments. The relative position between inserts is guaranteed by the positional accuracy of the reference surfaces 31 of the fixture, independent of the manual skill level during installation, ensuring identical installation results after each maintenance and facilitating standardized insert installation. It also improves transmission malfunctions such as insert collisions caused by insufficient insert positional accuracy, shortens downtime, improves transmission efficiency, and reduces maintenance costs.

[0041] The position of the plate 30 in the above-mentioned interlocking mounting fixture is adjustable, and the distance between adjacent plates 30 can be adjusted according to the process requirements, making the interlocking mounting fixture suitable for various machine models.

[0042] In this embodiment, five plates 30 are provided, and five corresponding distance adjustment members 20 are also provided, that is, each plate 30 is equipped with one distance adjustment member 20. In other alternative embodiments, the number of distance adjustment members 20 and plates 30 can be set based on the actual number of inserts.

[0043] Please continue to refer to this. Figure 1 and Figure 2 As shown, the bracket 10 includes a guide post 11, and each plate 30 is slidably sleeved on the guide post 11 along the length direction of the guide post 11. The length direction of the guide post 11 is perpendicular to the reference surface 31.

[0044] In this embodiment, the guide post 11 is a cylindrical post, so in this embodiment, there are a plurality of said guide posts 11, and each of said guide posts 11 is arranged in parallel. A plurality of sliding holes matching the respective guide posts 11 one by one are adaptively provided on the plate body 30, each guide post 11 respectively passes through the corresponding sliding hole, and the aperture of the sliding hole is the same as the outer diameter of the guide post 11. The use of cylindrical guide posts 11 is beneficial to improving the sliding smoothness of the plate body 30. In addition, through the cooperation of a plurality of guide posts 11, the rotation of the plate body 30 can be restricted, so that the plate body 30 forms a single-degree-of-freedom vertical movement, which facilitates the adjustment of the position of the plate body 30. In addition, the cooperation of a plurality of guide posts 11 can also restrict the levelness of the plate body 30 and prevent the plate body 30 from tilting.

[0045] In this embodiment, there are four guide posts 11, and the four guide posts 11 are distributed at four corners of a square. In other alternative embodiments, there may be two, three or more guide posts 11. In addition, in other alternative embodiments, the guide post 11 may adopt a square rod or other non-circular rod structure, and the plate body 30 is provided with a sliding hole adapted to the cross-section of the guide post 11. In this case, only one guide post 11 is required to restrict the rotation of the plate body 30 and ensure the single-degree-of-freedom sliding movement of the plate body 30.

[0046] Please continue to refer to Figure 1 and Figure 2 as shown, in this embodiment, said support 10 includes a screw rod 12 and a frame body 13.

[0047] Wherein, the frame body 13 has an overall "C"-shaped structure. The frame body 13 includes an upper horizontal plate 131, a lower horizontal plate 132, and a vertical plate 133 connected between the upper horizontal plate 131 and the lower horizontal plate 132. The upper horizontal plate 131, the lower horizontal plate 132 and the vertical plate 133 together enclose a mounting area 134 located in the middle of the frame body 13.

[0048] The guide post 11 and a part of the screw rod 12 are mounted in the mounting area 134. The upper end and the lower end of the guide post 11 are respectively fixedly connected to the upper horizontal plate 131 and the lower horizontal plate 132.

[0049] The plate body 30 is provided with a through hole for the screw rod 12 to pass through. The four guide posts 11 are arranged around the screw rod 12, and the screw rod 12 is parallel to each guide post 11, so the axial direction of said screw rod 12 is also perpendicular to said reference surface 31.

[0050] The distance adjustment component 20 is threadedly engaged with the lead screw 12, and the distance adjustment component 20 is supported on the plate 30. By rotating the distance adjustment component 20, the rotational motion of the distance adjustment component 20 is converted into a vertical linear motion of the distance adjustment component 20 relative to the lead screw 12. Since the distance adjustment component 20 is supported at the bottom of the plate 30, the vertical position of the plate 30 can be adjusted by adjusting the position of the distance adjustment component 20, thereby adjusting the distance between adjacent plates 30.

[0051] Furthermore, the lead screw 12 is mounted on the frame 13 with a single degree of freedom of rotation about its own central axis.

[0052] Please continue to refer to this. Figure 1 and Figure 2 As shown, the upper horizontal plate 131 has a through hole for the lead screw 12 to pass through, and the lower end of the lead screw 12 is rotatably connected to the lower horizontal plate 132. For example, the lower end of the lead screw 12 is interference-fitted with the inner ring of the thrust bearing, and the outer ring of the thrust bearing is fixed to the lower horizontal plate 132 by interference fit or other known means, so that the lower end of the lead screw 12 is rotatably mounted on the lower horizontal plate 132. The lower end of the lead screw 12 can also be rotatably mounted on the lower horizontal plate 132 by other existing technical means, which will not be elaborated here.

[0053] A handle 14 is connected to the upper end of the lead screw 12, which facilitates the rotation of the lead screw 12. With the above structure, the distance adjustment member 20 can be rotated relative to the lead screw 12 by rotating the lead screw 12, so as to synchronously adjust the vertical position of each plate 30.

[0054] Please refer to Figure 3 and Figure 4 As shown, the insert mounting fixture also includes a locking member 40, which is connected to the distance adjustment member 20 and the plate 30. The locking member 40 is used to fix the distance adjustment member 20 to the plate 30, thereby limiting the rotation of the distance adjustment member 20 and ensuring that the distance adjustment member 20 does not rotate with the lead screw 12 when the lead screw 12 rotates. At this time, when the lead screw 12 rotates, the distance adjustment member 20 rotates relative to the lead screw 12, and the distance adjustment member 20 moves vertically relative to the lead screw 12, thus synchronously adjusting the vertical position of each plate 30.

[0055] Furthermore, in combination Figure 4 As shown, the distance adjustment component 20 is provided with a through groove 21, which extends through the distance adjustment component 20 along the axial direction of the lead screw 12. The through groove 21 is an arc groove arranged around the central axis of the lead screw 12, that is, the central axis of the through groove 21 is collinear with the central axis of the lead screw 12.

[0056] The locking member 40 passes through the through groove 21 to fix the distance adjustment member 20 to the plate 30.

[0057] In this embodiment, the locking member 40 is a bolt structure, with its stud threaded through the through groove 21 and connected to the plate 30 (the plate 30 is adapted to have a threaded hole). The head of the bolt presses upward against the locking member 40 to achieve a fixed connection between the locking member 40 and the plate 30.

[0058] In this embodiment, the through groove 21 is designed as an arc-shaped groove, and the circumferential length of the through groove 21 is greater than the outer diameter of the stud of the locking member 40. Therefore, when the locking member 40 is loosened, the distance adjusting member 20 is allowed to rotate relative to the lead screw 12 at a certain angle, and the angle of rotation is limited by the circumferential length of the through groove 21. By limiting the circumferential length of the through groove 21, the distance adjusting member 20 can be rotated slightly in the circumferential direction, thereby fine-tuning the vertical position of the plate 30. When the distance adjusting member 20 needs to be rotated over a large range to adjust the vertical position of the plate 30, the locking member 40 can be removed and pulled out of the through groove 21. After the distance adjusting member 20 has rotated, the locking member 40 is installed. At this time, the distance adjusting member 20 rotates slightly in the circumferential direction to further fine-tune the vertical position of the plate 30.

[0059] In other alternative embodiments, the locking member 40 can also be disposed at the bottom of the plate 30, and the locking member 40 can be moved along the plate 30 in a direction perpendicular to the axial direction of the lead screw 12. For example, a protrusion is provided on the lower surface of the plate 30, the locking member 40 is a bolt and is horizontally disposed, the bolt is threadedly connected to the protrusion, and the horizontal movement of the bolt is achieved by rotating the bolt. By pressing the bolt horizontally against the outer peripheral surface of the distance adjusting member 20, the rotation of the distance adjusting member 20 relative to the plate 30 is limited, thereby fixing the distance adjusting member 20 to the plate 30. The specific structural form of the locking member 40 can be set according to actual needs.

[0060] In other alternative embodiments, the locking member 40 can also be provided on the distance adjustment member 20. For example, a protrusion is provided on the lower surface of the plate 30, the locking member 40 is a bolt and is horizontally arranged, the bolt is threadedly connected to the distance adjustment member 20, and the horizontal movement of the bolt is achieved by rotating the bolt. By pressing the bolt horizontally against the protrusion on the lower surface of the plate 30, the rotation of the distance adjustment member 20 relative to the plate 30 is limited, thereby fixing the distance adjustment member 20 to the plate 30.

[0061] In this embodiment, the distance adjustment member 20 has a circular structure, and the threaded hole in the middle of the distance adjustment member 20 is coaxially arranged with the distance adjustment member 20 itself. In other alternative embodiments, the outer contour shape of the distance adjustment member 20 can be square or other structures, and the specific structure of the locking member 40 can also be adaptively adjusted based on the outer contour shape of the distance adjustment member 20.

[0062] In this embodiment, each distance adjustment component 20 is provided with two through slots 21, which are symmetrically arranged around the central axis of the lead screw 12. Each through slot 21 is provided with a locking component 40. The two through slots 21 and the two locking components 40 ensure the uniformity of the circumferential force on the distance adjustment component 20 when locked. In other alternative embodiments, the number of through slots 21 can be set to one or more.

[0063] Please continue to refer to this. Figures 1 to 3 As shown, the bracket 10 has a mounting groove 15 along a direction parallel to the reference surface 31.

[0064] Specifically, the mounting groove 15 is formed on the lower horizontal plate 132, and the opening direction of the mounting groove 15 is opposite to the opening direction of the mounting area 134. Figure 1 and Figure 2 In the middle, the mounting slot 15 opens to the left, and the mounting area 134 opens to the right. The mounting slot 15 is along... Figure 1 The middle section extends perpendicularly to the paper surface and runs through the lower horizontal plate 132.

[0065] Combination Figure 1 As shown, the mounting slot 15 is provided for the interposer mounting fixture to mate with the interposer conveying structure. The edge of the housing 70 of the interposer conveying structure is inserted into the mounting slot 15 to achieve assembly between the interposer mounting fixture and the housing 70. At this time, the base of the interposer conveying structure is positioned relative to the interposer mounting fixture, facilitating positional reference for the interposers to be installed on the base.

[0066] In other alternative embodiments, the housing 70 of the insert conveyor structure can also be assembled using other mounting structures, such as connecting rods, flanges, etc.

[0067] Please continue to refer to this. Figure 1 As shown, the insert mounting fixture also includes a plurality of horizontal adjustment members 50, which are mounted on the bracket 10 in a direction perpendicular to the reference surface 31, with one end of the horizontal adjustment member 50 located in the mounting groove 15.

[0068] like Figure 1 and Figure 2 As shown, in this embodiment, the horizontal adjustment component 50 is a set screw. Multiple threaded holes are formed at the bottom of the lower horizontal plate 132, and these threaded holes communicate with the mounting groove 15. Each threaded hole is connected to a set screw, the upper end of which is located within the mounting groove 15. The upper end of the set screw rests against the bottom of the outer casing 70. The coordinated operation of multiple set screws can be used to adjust the position of the frame 13 relative to the casing 70, thereby adjusting the levelness of the plate 30 to keep the frame 13 horizontal.

[0069] In this embodiment, three leveling members 50 are provided, arranged in a triangular pattern. In other alternative embodiments, the number of leveling members 50 can be adjusted based on actual usage requirements. Furthermore, in other alternative embodiments, the leveling members 50 can also employ other known leveling mechanisms, such as shims placed between the bottom of the mounting groove 15 and the outer casing 70 to adjust the levelness of the frame 13.

[0070] Furthermore, the insert mounting fixture also includes a level 60. For example... Figure 1 As shown, the level 60 is mounted on the bracket 10. In this embodiment, the upper level plate 131 is parallel to the plate body 30, and the level 60 is mounted on the top of the upper level plate 131 to facilitate viewing the levelness of the plate body 30. The level 60 facilitates precise measurement of the levelness of the bracket 10 during the adjustment process of the leveling component 50.

[0071] The level 60 can be a strip bubble level, which consists of a V-shaped base and a parallel level. The straightness of its working plane and the parallelism between the level and the working plane are precisely machined to ensure accuracy. When the level is horizontal, the bubble in the level is perfectly centered. The bubble in the level's glass tube has lines engraved at both ends, with at least eight divisions, each 2mm apart. If there is a slight deviation between the base of the level and the horizontal position, i.e., a difference in height between the two ends of the base, the bubble in the level will move towards the highest side due to gravity. This movement is proportional to the difference in height between the two ends. The specific structure and usage of the strip bubble level are existing technology and will not be described further here.

[0072] In other alternative embodiments, the level 60 may be a laser level or an electronic level. The specific type of level 60 can be an existing product purchased based on usage requirements. The structure and installation method of the level 60 are existing technologies and will not be described in detail here.

[0073] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0074] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A plate-mounting fixture, characterized in that, include: Support bracket, distance adjustment components, and multiple plates; The plate is provided with a reference surface, and the reference surfaces of each plate are arranged in parallel. Each plate is mounted on the support in a direction perpendicular to the reference surface. The distance adjustment component is used to adjust and lock the position of the plate body along the direction perpendicular to the reference plane.

2. The interlocking mounting fixture as described in claim 1, characterized in that, The bracket includes a guide post, and each of the plates is slidably sleeved on the guide post along the length direction of the guide post, the length direction of the guide post being perpendicular to the reference surface.

3. The interlocking mounting fixture as described in claim 2, characterized in that, The guide post is provided in multiple forms, and the guide posts are arranged in parallel.

4. The interlocking mounting fixture as described in any one of claims 1 to 3, characterized in that, The bracket includes a lead screw, the axial direction of which is perpendicular to the reference surface. The distance adjustment component is threadedly engaged with the lead screw and is supported on the plate.

5. The interlocking mounting fixture as described in claim 4, characterized in that, The support also includes a frame, and the lead screw is mounted on the frame with a single degree of freedom of rotation about its own central axis.

6. The interlocking mounting fixture as described in claim 5, characterized in that, The insert mounting fixture further includes a locking member, which is connected to the distance adjustment member and / or the plate body, for fixing the distance adjustment member to the plate body.

7. The interlocking mounting fixture as described in claim 6, characterized in that, The distance adjustment component is provided with a through groove, which extends through the distance adjustment component along the axial direction of the lead screw, and the through groove is an arc groove arranged around the central axis of the lead screw; The locking member passes through the through slot to fix the distance adjustment member to the plate.

8. The interlocking mounting fixture as described in claim 1, characterized in that, The bracket has a mounting groove along a direction parallel to the reference plane.

9. The plate-mounting fixture as described in claim 8, characterized in that, The insert mounting fixture also includes multiple horizontal adjustment components, which are mounted on the bracket in a direction perpendicular to the reference surface, with one end of each horizontal adjustment component located within the mounting groove.

10. The interlocking mounting fixture as described in claim 1, characterized in that, The plate-mounting fixture also includes a level, which is mounted on the bracket.

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