Jig for electrostatic chuck

Abstract

The utility model provides a kind of jig of electrostatic chuck, for wafer manufacturing, jig includes: connecting frame, be connected to electrostatic chuck;Sliding block, sliding connection is in connecting frame;Guide, be connected to the bottom end surface of sliding block, sliding block is in connecting frame, when sliding towards the direction close to electrostatic chuck, guide passes through the center hole of electrostatic chuck;Positioning member, be connected to the top end surface of sliding block, sliding block is in connecting frame, when sliding towards the direction away from electrostatic chuck, positioning member passes through the center hole of mechanical arm.The utility model can make the center point of mechanical arm and the center point of electrostatic chuck concentric, improve the precision of wafer processing.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a jig for an electrostatic chuck. Background Technology

[0002] A robotic arm is an automated mechanical structure used inside a semiconductor device cavity to transfer (or move) wafers to different fixed positions within the device. In existing technologies, wafer transfer using a robotic arm relies on manual observation to align the arm with an electrostatic chuck, which introduces errors and cannot guarantee concentricity between the arm's center point and the chuck's center point. When these two points are not concentric, the wafer and chuck will become misaligned, potentially leading to thin film deposition on the chuck during the deposition process. This can cause the chuck to fail to properly hold the wafer in subsequent operations. Therefore, improvements are needed. Utility Model Content

[0003] This invention provides a fixture for an electrostatic chuck to solve the technical problem that, when a robotic arm is transferring wafers, it is impossible to ensure that the center point of the robotic arm and the center point of the electrostatic chuck are concentric through manual observation.

[0004] This utility model provides an electrostatic chuck fixture for wafer manufacturing, the fixture comprising:

[0005] The connecting bracket is attached to the electrostatic chuck;

[0006] A sliding block is slidably connected to the connecting frame;

[0007] A guide member is connected to the bottom end face of the sliding block. When the sliding block slides on the connecting frame toward the electrostatic chuck, the guide member passes through the center hole of the electrostatic chuck.

[0008] A positioning element is connected to the top end face of the sliding block. When the sliding block slides on the connecting frame in a direction away from the electrostatic chuck, the positioning element passes through the central hole of the robotic arm.

[0009] In one embodiment of this utility model, the connecting frame includes:

[0010] Mounting frame;

[0011] Multiple locking pins, with the first end of each locking pin connected to the mounting frame and the second end of each locking pin connected to different pin holes of the electrostatic chuck;

[0012] The sliding block is slidably connected to the mounting frame.

[0013] In one embodiment of this utility model, the connecting frame further includes:

[0014] Multiple legs are connected to the mounting frame, and a groove is provided at the end of each leg away from the mounting frame. The first end of each locking pin is slidably disposed in the groove.

[0015] In one embodiment of this utility model, the second ends of multiple locking pins are connected to the pin holes corresponding to the same circle on the electrostatic chuck.

[0016] In one embodiment of this utility model, the mounting frame has holes, and the inner wall of the holes is provided with guide rails and / or grooves. The side wall of the sliding block is provided with grooves and / or guide rails. The guide rails on the mounting frame cooperate with the grooves on the sliding block, and the grooves on the mounting frame cooperate with the guide rails on the sliding block.

[0017] In one embodiment of the present invention, the bottom sidewall and the top sidewall of the sliding block are provided with limiting protrusions, the mounting frame is sleeved on the sidewall of the sliding block, and the mounting frame is located between the limiting protrusions on the bottom sidewall and the top sidewall of the sliding block.

[0018] In one embodiment of the present invention, the fixture further includes a crossbar connected to the top of the sliding block.

[0019] In one embodiment of this utility model, there are two crossbars, and the two crossbars are arranged symmetrically.

[0020] In one embodiment of this utility model, the positioning element is conical.

[0021] In one embodiment of this utility model, the locking pin includes a horizontal part and a vertical part, the horizontal part is connected to the mounting frame, and the vertical part is engaged with the pin hole on the electrostatic chuck.

[0022] The beneficial effects of this utility model are as follows: This utility model proposes a fixture for an electrostatic chuck. An unexpected technical effect is achieved by connecting the electrostatic chuck to a connecting frame, on which a sliding block is attached. The sliding block is movable within the connecting frame. Positioning elements are provided on the top and bottom surfaces of the sliding block. During the movement of the sliding block, the positioning elements can be moved accordingly. Furthermore, when the sliding block slides on the mounting frame towards the electrostatic chuck, a guide element passes through the central hole of the electrostatic chuck. When the robotic arm moves above the electrostatic chuck, the sliding block is slid away from the electrostatic chuck, and when the positioning element passes through the central hole of the robotic arm, the center point of the robotic arm is aligned with the center point of the electrostatic chuck. This utility model can improve the accuracy of wafer processing and avoid the problem of thin film deposition on the electrostatic chuck during subsequent wafer deposition processes. Attached Figure Description

[0023] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. It is obvious that the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.

[0024] In the attached diagram:

[0025] Figure 1 This is a schematic diagram of the fixture provided in one embodiment of the present invention.

[0026] Figure 2 This is a schematic diagram showing the connection between the fixture and the electrostatic chuck provided in one embodiment of the present invention.

[0027] Figure 3 This is a schematic diagram of the structure of an electrostatic chuck provided in one embodiment of the present invention.

[0028] Figure 4 This is a schematic diagram of the connecting frame provided in one embodiment of the present invention.

[0029] Figure 5 This is a schematic diagram of the structure of the sliding block provided in one embodiment of the present invention.

[0030] Figure 6 This is a perspective view of the sliding block provided in one embodiment of the present invention.

[0031] Figure 7 This is a schematic diagram of the structure of the locking pin provided in one embodiment of the present invention.

[0032] Figure 8This is a perspective view of the locking pin provided in one embodiment of the present invention.

[0033] The attached figures are labeled as follows:

[0034] 100. Electrostatic chuck; 101. Ejector pin hole; 102. Center hole;

[0035] 10. Connecting bracket; 11. Mounting frame; 12. Support leg; 110. Guide rail; 120. Groove; 13. Locking pin; 131. Horizontal part; 132. Vertical part;

[0036] 20. Sliding block; 210. Slide groove; 220. Limiting protrusion; 230. Crossbar;

[0037] 30. Positioning component; 40. Guide component. Detailed Implementation

[0038] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0039] It should be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of the present invention. The drawings only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components. In actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0040] In the following description, numerous details are explored to provide a more thorough explanation of embodiments of the present invention. However, it will be apparent to those skilled in the art that embodiments of the present invention may be practiced without these specific details. In other embodiments, well-known structures and devices are shown in block diagram form rather than in detail to avoid obscuring embodiments of the present invention.

[0041] Please see Figures 1 to 8This invention proposes a jig for an electrostatic chuck, applicable to the semiconductor field. For example, it uses an electrostatic chuck (E-chuck) 100 to pick up wafers, and with the movement of a robotic arm, transports the wafers to different fixed positions within the semiconductor equipment cavity. The jig of this invention ensures that the center hole of the robotic arm and the center hole 102 of the electrostatic chuck 100 are aligned on the same vertical line; that is, in the vertical direction, the center hole of the robotic arm and the center hole 102 of the electrostatic chuck 100 are concentric. Detailed description follows with specific embodiments.

[0042] Please see Figure 1 , Figure 2 and Figure 3 In one embodiment of this utility model, a fixture for an electrostatic chuck is provided, which may include a connecting frame 10, a sliding block 20, a positioning member 30, and a guide member 40.

[0043] Among them, such as Figure 1 and Figure 2 As shown, the connecting frame 10 serves as the mounting body of the fixture and can be used to mount the sliding block 20 and the positioning element 30. The connecting frame 10 can be connected to the electrostatic chuck 100, which can be located at the bottom of the connecting frame 10.

[0044] like Figure 3 As shown, the electrostatic chuck 100, based on Coulomb's law and the principle of electromagnetic force, can stably grip wafers in atmospheric or vacuum environments. It generates a uniform adsorption force through a high-voltage electrostatic magnetic field, avoiding damage to the wafer caused by traditional mechanical clamping. The electrostatic chuck 100 may have multiple lift pin holes 101, which can be distributed on different concentric circles. The connecting frame 10 connects to the electrostatic chuck 100 by connecting to the lift pin holes 101.

[0045] like Figure 1 and Figure 2 As shown, the sliding block 20 is slidably connected to the connecting frame 10, and the sliding direction can be vertical. The connecting frame 10 has a central through hole, which matches the sliding block 20, and the sliding block 20 slides up and down along the through hole.

[0046] like Figure 5 and Figure 6 As shown, the guide 40 is connected to the bottom end face of the sliding block 20. When the sliding block 20 slides on the connecting frame 10 toward the direction close to the electrostatic chuck 100, the guide 40 passes through the central hole 102 of the electrostatic chuck 100.

[0047] like Figure 1 and Figure 2As shown, the positioning member 30 is connected to the top end face of the sliding block 20. When the sliding block 20 slides on the connecting frame 10 in a direction away from the electrostatic chuck 100, the positioning member 30 passes through the central hole of the robotic arm.

[0048] Specifically, when the sliding block 20 slides on the connecting frame 10 in a direction away from the electrostatic chuck 100, the positioning member 30 passes through the central hole of the robotic arm. Since the robotic arm is movable, to avoid errors in the installation of the robotic arm and the electrostatic chuck 100 due to manual observation, the sliding block 20 can be moved in a direction away from the electrostatic chuck 100, that is, moved vertically upwards. When the positioning member 30 passes through the central hole of the robotic arm, the central hole of the robotic arm and the central hole 102 of the electrostatic chuck 100 are concentric.

[0049] Please see Figure 4 In one embodiment of this utility model, the connecting frame 10 includes a mounting frame 11 and a locking pin 13. The mounting frame 11 has a central through hole, which matches the sliding block 20, and the sliding block 20 slides up and down along the through hole.

[0050] Specifically, such as Figure 2 As shown, by connecting the connecting frame 10 to the corresponding pin hole 101 on the electrostatic chuck 100, the center of the connecting frame 10 and the center hole 102 of the electrostatic chuck 100 can be made concentric in the vertical direction. By placing the sliding block 20 at the center of the connecting frame 10, and placing the positioning member 30 at the center of the top end face of the sliding block 20, the central axis of the positioning member 30 can be made the same as the central axis of the center hole 102 of the electrostatic chuck 100.

[0051] The device comprises multiple locking pins 13, with the first end of each pin connected to the mounting frame 11 and the second end of each pin connected to a different pin hole 101 in the electrostatic chuck 100. A sliding block 20 is slidably connected to the mounting frame 11.

[0052] Specifically, the mounting frame 11 is used to fix the first ends of multiple locking pins 13, and a sliding connection is formed between the mounting frame 11 and the sliding block 20 to ensure that the sliding block 20 moves stably along a preset straight trajectory.

[0053] The first ends of the multiple locking pins 13 are connected to the mounting frame 11, so that the multiple locking pins 13 will not move relative to the mounting frame 11. When the second ends of the multiple locking pins 13 are connected to the pin holes 101 of the same circle on the electrostatic chuck 100, the center of the mounting frame 11 and the center hole 102 of the electrostatic chuck 100 can be made concentric in the vertical direction.

[0054] Please see Figure 4In one embodiment of this utility model, the connecting frame 10 may further include a support leg 12.

[0055] The mounting frame 11 has multiple legs 12, and is a flat circular ring. The multiple legs 12 are respectively connected to the side wall of the mounting frame 11. The ends of the multiple legs 12 away from the mounting frame 11 have grooves 120. The number of multiple locking pins 13 is the same as the number of legs 12, and the first end of each locking pin 13 is slidably disposed in the groove 120.

[0056] Specifically, such as Figure 2 and Figure 4 As shown, since the multiple pin holes 101 on the electrostatic chuck 100 are distributed on different concentric circles, in order to connect the second ends of the multiple locking pins 13 to the pin holes 101 corresponding to the same circle on the electrostatic chuck 100, the first end of each locking pin 13 can be slidably set in the groove 120, and the sliding length of each locking pin 13 in the groove 120 is limited to be the same.

[0057] Please see Figure 4 and Figure 5 In one embodiment of the present invention, the mounting frame 11 has a hole, and the inner wall of the hole is provided with a guide rail 110 and / or a sliding groove (not shown in the figure). The side wall of the sliding block 20 is provided with a sliding groove 210 and / or a guide rail (not shown in the figure).

[0058] Specifically, the guide rail 110 on the mounting frame 11 engages with the slide groove 210 on the sliding block 20, and the slide groove on the mounting frame 11 engages with the guide rail on the sliding block 20. Through the sliding engagement of the guide rail 110 and the slide groove 210, it is ensured that the sliding block 20 can only move stably along the preset straight trajectory on the mounting frame 11.

[0059] Please see Figure 5 and Figure 6 In one embodiment of this utility model, a guide member 40 is connected to the bottom end face of the sliding block 20. When the sliding block 20 slides on the mounting frame 11 toward the electrostatic chuck 100, the guide member 40 passes through the central hole 102 of the electrostatic chuck 100. The guide member 40 may be located at the center of the bottom end face of the sliding block 20, and the central axis of the mounting frame 11 may be the same as the central axis of the sliding block 20.

[0060] Specifically, in order to ensure that the center of the mounting frame 11 is concentric with the center hole 102 of the electrostatic chuck 100, the sliding block 20 can be slid towards the electrostatic chuck 100 on the mounting frame 11, causing the guide member 40 to pass through the center hole 102 of the electrostatic chuck 100. At this time, the center of the mounting frame 11 is concentric with the center hole 102 of the electrostatic chuck 100. Afterwards, the first end of each locking pin 13 can be slid within the groove 120, and the second end of each locking pin 13 can be connected to the ejector pin hole 101 on the electrostatic chuck 100.

[0061] Since the center of the mounting frame 11 is concentric with the center hole 102 of the electrostatic chuck 100, the second ends of multiple locking pins 13 can be connected to the pin holes 101 corresponding to the same circle on the electrostatic chuck 100, or the second ends of multiple locking pins 13 can be connected to the pin holes 101 corresponding to different circles on the electrostatic chuck 100.

[0062] It can be seen that the role of the guide 40 is to quickly make the center of the mounting frame 11 concentric with the center hole 102 of the electrostatic chuck 100, thereby speeding up the installation between the connecting frame 10 and the electrostatic chuck 100.

[0063] Please see Figure 5 and Figure 6 In one embodiment of the present invention, the bottom sidewall and top sidewall of the sliding block 20 extend outward to form a limiting protrusion 220, and the mounting frame 11 is sleeved on the sidewall of the sliding block 20, and the mounting frame 11 is located between the limiting protrusion 220 of the bottom sidewall and the limiting protrusion 220 of the top sidewall of the sliding block 20.

[0064] Specifically, when the sliding block 20 slides toward the electrostatic chuck 100, the limiting protrusion 220 on the top side wall of the sliding block 20 will eventually contact the top end face of the mounting frame 11. This contact will prevent the sliding block 20 from moving further downward and prevent it from falling off the bottom of the mounting frame 11.

[0065] When the sliding block 20 slides upward, the limiting protrusion 220 on the bottom side wall of the sliding block 20 will eventually contact the bottom end face of the mounting frame 11. This contact will prevent the sliding block 20 from continuing to move upward and prevent it from falling off the top of the mounting frame 11.

[0066] Please see Figure 5 and Figure 6 In one embodiment of this utility model, the fixture further includes a crossbar 230, which is connected to the top of the sliding block 20. For example, the crossbar 230 is connected to a limiting protrusion 220 on the top side wall of the sliding block 20.

[0067] Specifically, there are two crossbars 230, and the two crossbars 230 are symmetrically arranged on the top of the sliding block 20.

[0068] For example, when the crossbar 230 is connected to the limiting protrusion 220 on the top side wall of the sliding block 20, there may be at least two limiting protrusions 220 on the top side wall of the sliding block 20, and the number of crossbars 230 is two. The two crossbars 230 are respectively connected to the two limiting protrusions 220, and the two crossbars 230 are arranged symmetrically, for example, the two crossbars 230 are located on the same horizontal line.

[0069] Specifically, the main function of the crossbar 230 is as a handle for manual operation or equipment docking. Connected to the two limiting protrusions 220 on the top of the sliding block 20, it provides the operator with a sturdy and ergonomic grip point, facilitating manual application of force to push or pull the sliding block 20. Furthermore, the collinear arrangement of the two crossbars 230 ensures even distribution of force, preventing the sliding block 20 from jamming or tilting during movement, thus facilitating operation and protecting the mechanism's precision.

[0070] Please see Figure 5 and Figure 6 In one embodiment of this utility model, the positioning member 30 and the guide member 40 may be conical, such as conical or pyramidal.

[0071] Specifically, by setting the positioning member 30 and the guide member 40 to be conical, the positioning member 30 can be adapted to different sizes of central holes corresponding to different robotic arms, and the guide member 40 can be adapted to different sizes of central holes 102 corresponding to different electrostatic chucks 100.

[0072] Please see Figure 7 and Figure 8 In one embodiment of the present invention, the locking pin 13 may include a horizontal part 131 and a vertical part 132. The horizontal part 131 is connected to the mounting frame 11, and the vertical part 132 is engaged with the pin hole 101 on the electrostatic chuck 100.

[0073] Specifically, by setting the mounting frame 11 into a flat ring shape, and connecting the horizontal part 131 of the locking pin 13 to the mounting frame 11, and the vertical part 132 of the locking pin 13 to the electrostatic chuck 100, the mounting frame 11 and the locking pin 13 can be made to be flat overall, so that the size of the connecting frame 10 and the electrostatic chuck 100 can be matched.

[0074] In summary, this invention proposes a fixture for an electrostatic chuck. An unexpected technical advantage is that a connecting frame connects to the electrostatic chuck, and a sliding block is attached to the connecting frame, allowing the sliding block to move within the frame. Positioning elements are located on the top and bottom surfaces of the sliding block, allowing the positioning elements to move as the sliding block moves. Furthermore, when the sliding block slides on the mounting frame towards the electrostatic chuck, a guide element passes through the central hole of the electrostatic chuck. When the robotic arm moves above the electrostatic chuck, the sliding block is slid away from the chuck, and when the positioning element passes through the central hole of the robotic arm, the center point of the robotic arm is aligned with the center point of the electrostatic chuck. This invention improves the accuracy of wafer processing and avoids the problem of thin film deposition on the electrostatic chuck during subsequent wafer deposition processes.

[0075] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A fixture for an electrostatic chuck, characterized in that, For wafer fabrication, the fixture includes: The connecting bracket is attached to the electrostatic chuck; A sliding block is slidably connected to the connecting frame; A guide member is connected to the bottom end face of the sliding block. When the sliding block slides on the connecting frame toward the electrostatic chuck, the guide member passes through the center hole of the electrostatic chuck. A positioning element is connected to the top end face of the sliding block. When the sliding block slides on the connecting frame in a direction away from the electrostatic chuck, the positioning element passes through the central hole of the robotic arm.

2. The fixture for the electrostatic chuck according to claim 1, characterized in that, The connecting frame includes: Mounting frame; Multiple locking pins, with the first end of each locking pin connected to the mounting frame and the second end of each locking pin connected to different pin holes of the electrostatic chuck; The sliding block is slidably connected to the mounting frame.

3. The fixture for the electrostatic chuck according to claim 2, characterized in that, The connecting frame also includes: Multiple legs are connected to the mounting frame, and a groove is provided at the end of each leg away from the mounting frame. The first end of each locking pin is slidably disposed in the groove.

4. The fixture for the electrostatic chuck according to claim 2 or 3, characterized in that, The second ends of multiple locking pins are connected to the pin holes corresponding to the same circle on the electrostatic chuck.

5. The fixture for the electrostatic chuck according to claim 2, characterized in that, The mounting frame has holes, and the inner wall of the holes is provided with guide rails and / or grooves. The side wall of the sliding block is provided with grooves and / or guide rails. The guide rails on the mounting frame cooperate with the grooves on the sliding block, and the grooves on the mounting frame cooperate with the guide rails on the sliding block.

6. The fixture for the electrostatic chuck according to claim 5, characterized in that, The bottom and top sidewalls of the sliding block are provided with limiting protrusions. The mounting frame is sleeved on the sidewalls of the sliding block, and the mounting frame is located between the limiting protrusions on the bottom and top sidewalls of the sliding block.

7. The fixture for the electrostatic chuck according to claim 1, characterized in that, The fixture also includes a crossbar connected to the top of the sliding block.

8. The fixture for the electrostatic chuck according to claim 7, characterized in that, The number of crossbars is two, and the two crossbars are arranged symmetrically.

9. The fixture for the electrostatic chuck according to claim 2, characterized in that, The positioning element is conical.

10. The fixture for the electrostatic chuck according to claim 2, characterized in that, The locking pin includes a horizontal part and a vertical part. The horizontal part is connected to the mounting frame, and the vertical part is connected to the pin hole on the electrostatic chuck.

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