Lifting assembly and semiconductor processing apparatus

Abstract

The application discloses a bearing and jacking assembly and a semiconductor processing device, and belongs to the technical field of semiconductor device manufacturing. The bearing and jacking assembly comprises a base, a carrier and a jacking piece. The base is provided with a first bearing groove and a jacking channel. The jacking channel penetrates through the base along a second direction and is communicated with the first bearing groove. The carrier comprises a first bearing part and a second bearing part. The first bearing part is in the first bearing groove, and the side, which is away from the base, of the first bearing part is provided with a second bearing groove. The second bearing part is in the second bearing groove. The jacking piece is at least partially in the jacking channel. The end of the jacking piece, which faces the carrier, penetrates through the first bearing part and abuts against the second bearing part. When the jacking piece is lifted to a first height, the second bearing part is separated from the second bearing groove. When the jacking piece is lifted to a second height, the first bearing part is separated from the first bearing groove. The assembly is matched by the base, the separate carrier and the jacking piece. The loading and unloading of a substrate are completed at the first height. The loading and unloading and maintenance of the first bearing part and the second bearing part are facilitated at the second height. The operation efficiency is optimized.

Description

Technical Field

[0001] This application relates to the field of semiconductor device manufacturing technology, and in particular to a lifting assembly and semiconductor processing equipment. Background Technology

[0002] During the operation of semiconductor processing equipment, the lifting structure is a core component that ensures the stable transfer of the substrate and the base and the processing. It needs to realize the separate lifting and lowering operations of the substrate and the base to meet the operational requirements of key links such as subsequent processing and material transfer.

[0003] The current industry standard adopts an integrated transport method for substrate and stage transport. This means that during transport, the substrate and stage are removed together and loaded into the base, and the separation operation is performed outside the reaction chamber. However, since the replacement cycles of the substrate and stage are not the same, and the replacement cycles of different components on the stage are also different, transporting these components as a whole can easily damage the environment inside the chamber. At the same time, the transport operation will occupy a lot of the actual production time of the machine, resulting in a reduction in the overall production efficiency of the machine. Utility Model Content

[0004] This application provides a lifting and supporting component, which improves the compactness of the equipment and optimizes the operating efficiency, thereby at least partially solving the above-mentioned technical problems; another objective of this application is to provide a semiconductor processing device.

[0005] To achieve the above objectives, according to a first aspect of this application, a load-bearing lifting assembly is provided, comprising: The base has a first bearing groove and a lifting channel, the lifting channel passing through the base along a second direction and communicating with the first bearing groove; The platform includes a first support portion and a second support portion. The first support portion can be received in a first support groove. The first support portion has a second support groove on the side opposite to the base. The second support portion can be received in the second support groove. A lifting member, at least a portion of which is housed within the lifting channel, and one end of the lifting member facing the platform is capable of partially passing through the first bearing portion and abutting against the second bearing portion; When the lifting member rises to the first height, the second supporting part disengages from the second supporting groove; when the lifting member rises to the second height, the first supporting part disengages from the first supporting groove.

[0006] In some embodiments, the stage further includes a cover plate, which is annular and disposed on the side of the first support portion away from the base. The cover plate covers the outer periphery of the first support portion, and the cover plate, the first support portion, and the second support portion together form a receiving groove for accommodating a substrate. The receiving groove is communicative with the second support groove. On a projection plane perpendicular to the second direction, the orthographic projection of the second support portion is located inside the inner edge of the orthographic projection of the cover plate, and the orthographic projection of the cover plate is at least partially located outside the outer edge of the first support portion. When the lifting member rises to the second height, both the first bearing part and the cover plate detach from the first bearing groove.

[0007] In some embodiments, the lifting member includes a first support portion and a second support portion connected together, the first support portion being located on the side of the second support portion away from the platform, and at least a portion of the first support portion being received within the lifting channel; The first support portion has a through hole, which is connected to the second support groove and the lifting channel respectively, and a portion of the second support portion can pass through the through hole; In the first direction perpendicular to the second direction, the size of the first support portion is larger than the size of the through hole, and the size of the through hole is larger than the size of the second support portion; When the lifting member rises to the first height, the second support portion can pass through the through hole and abut against the second bearing portion, and lift the second bearing portion to disengage from the second bearing groove.

[0008] In some embodiments, the second support portion includes a protrusion protruding toward the lifting member, the protrusion being accommodating within the through hole; When the lifting member rises to the first height, the second support portion abuts against the protrusion.

[0009] In some embodiments, the side wall of the lifting channel is provided with a stepped portion, and the stepped portion is spaced apart from the platform; The first support portion has a boss protruding from the outer periphery of the second support portion, and the boss is received in the lifting channel; in the first direction, the size of the through hole is W1, and the size of the boss is W2, satisfying W1 < W2; The boss includes a flange located on the side away from the second support portion, and when the lifting member descends to the third height, the flange abuts against the step portion.

[0010] In some embodiments, in the second direction, the minimum distance between the side of the second support portion away from the first support portion and the boss is L1, and the size of the through hole is L2, satisfying L1 > L2; The second height is higher than the first height, and the difference between the second height and the first height is not less than 8mm.

[0011] In some embodiments, the protrusion has a groove, the opening of the groove facing the lifting channel and communicating with the lifting channel; When the lifting member rises to the first height, a portion of the second support portion is received within the groove and abuts against the bottom of the groove.

[0012] In some embodiments, the base has a combination of a plurality of the first bearing grooves and the lifting channel; The load-bearing lifting assembly includes: The multiple spaced-apart platforms are each housed within a corresponding first support groove. The multiple lifting members are spaced apart, and at least a portion of the first support portion of each lifting member is housed in the corresponding lifting channel. At least a portion of the second support portion of each lifting member can pass through the first support portion of the corresponding platform and abut against the second support portion of the corresponding platform.

[0013] In some embodiments, the base has a plurality of lifting channels, and the plurality of lifting channels are respectively connected to the same first bearing groove; The platform includes a plurality of second support parts, which are spaced apart; the first support part has a plurality of second support grooves on the side away from the base, and each second support part is received in a corresponding second support groove; The lifting assembly includes a plurality of lifting members spaced apart. At least a portion of the first support portion of each lifting member is housed within the corresponding lifting channel. At least a portion of the second support portion of each lifting member can pass through the first supporting portion and abut against the corresponding second supporting portion.

[0014] According to a second aspect of this application, a semiconductor processing apparatus is provided, including any of the aforementioned support lifting components.

[0015] Several embodiments of this application have one of the following beneficial effects: The lifting assembly provided in this application includes a base, a platform, and a lifting member. The base has a first bearing groove and a lifting channel. The lifting channel penetrates the base along a second direction and communicates with the first bearing groove. The platform includes a first bearing portion and a second bearing portion. The first bearing portion can be received in the first bearing groove, and the first bearing portion has a second bearing groove on its side away from the base. The second bearing portion can be received in the second bearing groove. At least a portion of the lifting member is received in the lifting channel, and the end of the lifting member facing the platform can partially pass through the first bearing portion and abut against the second bearing portion. When the lifting component rises to the first height, the second support part disengages from the second support groove; when the lifting component rises to the second height, the first support part disengages from the first support groove. This support lifting assembly, through the cooperation of the base, the discrete platform, and the lifting component, utilizes the graded lifting design of the lifting component at the first and second heights. By lifting the lifting component to the first height, the second support part disengages from the second support groove, facilitating the placement and removal of the substrate. When the lifting component rises to the second height, it lifts the first support part out of the first support groove, making it convenient for operators to load, unload, and maintain the various components of the platform.

[0016] Other features and advantages of this application will be described in detail in the following detailed description section. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] To gain a more complete understanding of this application and its beneficial effects, the following description will be provided in conjunction with the accompanying drawings, wherein the same reference numerals in the following description denote the same parts.

[0019] Figure 1 This is a cross-sectional structural diagram of the lifting and supporting assembly provided in an exemplary embodiment of this disclosure; Figure 2 This is a cross-sectional view of the lifting assembly provided in the exemplary embodiment of this disclosure at a first height; Figure 3 This is a cross-sectional view of the lifting assembly provided in the exemplary embodiment of this disclosure at its second height; Figure 4 yes Figure 1 A magnified view of a portion of point A in the middle; Figure 5 This is a schematic diagram of the loading and unloading of the substrate when the lifting assembly provided in the exemplary embodiment of this disclosure is at a first height; Figure 6 This is a schematic diagram of the loading and unloading of the cover plate when the lifting assembly provided in the exemplary embodiment of this disclosure is at the second height; Figure 7 This is a cross-sectional structural schematic diagram of another load-bearing lifting component provided in an exemplary embodiment of this disclosure; Figure 8 This is a cross-sectional structural diagram of another load-bearing lifting component provided in an exemplary embodiment of this disclosure.

[0020] Explanation of reference numerals in the attached figures: X - First direction; Y - Second direction; 100 - Base; 110 - First bearing groove; 120 - Lifting channel; 130 - Step section; 200 - Platform; 210 - First support portion; 211 - Second support groove; 212 - Through hole; 220 - Second support portion; 221 - Protrusion; 2211 - Insertion groove; 230 - Cover plate; 240 - Receiving groove; 300 - Lifting component; 310 - First support part; 320 - Second support part; 330 - Boss; 331 - Flange; 400-substrate; 500-robotic arm. Detailed Implementation

[0021] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0022] In the description of this application, it should be understood that the terms "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Unless otherwise expressly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a connection that allows communication; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two elements or an interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances. Furthermore, although the terms "first," "second," etc., may be used herein to describe various components, these components should not be limited by these terms. These terms are used to distinguish one component from another. Therefore, the first component discussed below may be referred to as the second component without departing from the teachings of this application. As used herein, the term "and / or" includes all combinations of any one and more of the associated listed items.

[0023] In the description of this application, "multiple" means two or more, and "at least one" means one, two, or more, unless otherwise explicitly specified. In the description of this application, "perpendicular" means completely perpendicular to 90° or nearly completely perpendicular, for example, an angle of 80° to 100° is considered perpendicular. Similarly, "parallel" means completely parallel or nearly completely parallel, for example, a perfectly parallel angle of 10° is considered parallel.

[0024] It should also be noted that in the accompanying drawings of the embodiments of this application, the arrows marked X and Y respectively represent the first direction X and the second direction Y. The description of this application introduces the first direction X and the second direction Y to more clearly express the relative positional relationship involved in the lifting component in this application. The first direction X and the second direction Y are two relative directions that intersect each other, rather than absolute directions. In practical applications, the first direction X and the second direction Y can point to any direction in space, as long as the intersection relationship between the two is maintained.

[0025] In some examples, the first direction X refers to the length direction of the base 100, and the second direction Y refers to the vertical direction.

[0026] The following disclosure provides many different implementations or examples for carrying out different structures of this application. To simplify the disclosure of this application, the components and arrangements of specific examples are described below. Of course, these are merely examples and are not intended to limit this application.

[0027] During the operation of semiconductor processing equipment, the lifting structure is a core component that ensures the stable transfer of the substrate and the base and the processing. It needs to realize the separate lifting and lowering operations of the substrate and the base to meet the operational requirements of key links such as subsequent processing and material transfer.

[0028] The current industry standard adopts an integrated transport method for substrate and stage transport. This means that during transport, the substrate and stage are removed together and loaded into the base, and the separation operation is performed outside the reaction chamber. However, since the replacement cycles of the substrate and stage are not the same, and the replacement cycles of different components on the stage are also different, transporting these components as a whole can easily damage the environment inside the chamber. At the same time, the transport operation will occupy a lot of the actual production time of the machine, resulting in a reduction in the overall production efficiency of the machine.

[0029] In view of this, embodiments of this application provide a load-bearing lifting assembly to solve at least part of the above-mentioned technical problems.

[0030] According to the first aspect of this application, please refer to Figure 1 , Figure 2 , Figure 3 , Figure 5 and Figure 6 This application provides a support and lifting assembly for supporting a substrate 400 and driving the substrate 400 to move up and down. The substrate 400 can be a wafer, etc. The support and lifting assembly includes a base 100, a stage 200, and a lifting member 300. The base 100 has a first support groove 110 and a lifting channel 120. The lifting channel 120 penetrates the base 100 along a second direction Y and communicates with the first support groove 110. It should be noted that the first support groove 110 is located on the side of the base 100 away from the lifting member 300 in the second direction Y, and is used to accommodate the stage 200. The lifting channel 120 penetrates the base 100 and extends to communicate with the first support groove 110.

[0031] The stage 200, located away from the lifting member 300, is used to place the substrate 400. The stage 200 includes a first support portion 210 and a second support portion 220. The first support portion 210 is accommodated within a first support groove 110, and the first support portion 210 has a second support groove 211 formed on its side away from the base 100. The second support portion 220 is accommodated within the second support groove 211. The first support portion 210 and the second support portion 220 together constitute the accommodating space for the substrate 400.

[0032] At least a portion of the lifting member 300 is housed within the lifting channel 120, and the end of the lifting member 300 facing the platform 200 can partially pass through the first support portion 210 and abut against the second support portion 220. It should be noted that the lifting member 300 can reciprocate along the axial direction of the lifting channel 120. Specifically, the lifting member 300 can move to the point where it partially passes through the first support portion 210 and abuts against the second support portion 220, or it can move to the point where it does not contact either the first support portion 210 or the second support portion 220.

[0033] The lifting member 300 can move to two preset heights, namely a first height and a second height. Specifically, when the lifting member 300 rises to the first height, the second supporting part 220 disengages from the second supporting groove 211; when the lifting member 300 rises to the second height, the first supporting part 210 disengages from the first supporting groove 110. It should be noted that, with Figure 1 Taking the vertical and horizontal orientation as an example, the first height is lower than the second height. When the substrate 400 needs to be placed in the receiving space, the lifting member 300 rises to the first height, causing the second support part 220 to disengage from the second support groove 211. The external robotic arm 500 grasps the substrate 400 and places it on the second support part 220. The lifting member 300 descends, causing the second support part 220 to be received in the second support groove 211, so that the substrate 400 falls into the receiving space. When the substrate 400 needs to be removed, the lifting member 300 rises to the first height, causing the second support part 220 to disengage from the second support groove 211, thereby pushing the substrate 400 out of the receiving space. The robotic arm 500 removes the substrate 400 from the second support part 220, thus removing the substrate 400. When the lifting member 300 rises to the second height, the first bearing part 210 is lifted by the lifting member 300 until it is separated from the first bearing groove 110, so that the robot arm 500 can load and unload the second bearing part 220 or the first bearing part 210.

[0034] As can be seen from the above technical solution, this support and lifting assembly, through the base 100, the discrete platform 200 and the lifting component 300 that can move back and forth along the lifting channel 120, achieves stable support of the substrate 400 and the first support part 210 and the second support part 220 by means of the lifting component 300's staged lifting design at the first height and the second height. At the same time, the second support part 220 can be disengaged from the second support groove 211 by the lifting component 300 being lifted to the first height, which facilitates the placement and removal of the substrate 400. At the same time, the first support part 210 can be lifted from the first support groove 110 by the lifting component 300 being lifted to the second height, which facilitates the operation of the first support part 210 or the second support part 220 for loading, unloading and maintenance. The overall structural design is reasonable and effectively improves the convenience, pertinence and efficiency of substrate 400 support, loading and unloading and component maintenance.

[0035] In some embodiments, please refer to Figure 1 , Figure 2 , Figure 3 , Figure 5 and Figure 6 The lifting assembly is housed within the process cavity. During the processing of the substrate 400, some byproducts accumulate on the first support portion 210, requiring frequent replacement and increasing process costs. To address this, the stage 200 is equipped with a replaceable cover plate 230. The cover plate 230 is annular and located on the side of the first support portion 210 away from the base 100, covering the outer periphery of the first support portion 210. The cover plate 230, the first support portion 210, and the second support portion 220 together form a receiving groove 240 for accommodating the substrate 400. The second support groove 211 is located at the bottom of the receiving groove 240. It is understood that the receiving groove 240 provides a more precise placement space for the substrate 400. During processing, the substrate 400 is housed within the receiving tank 240, and a cover plate 230 covers the outer periphery of the first support portion 210. During the processing of the substrate 400, most parasites are deposited on the cover plate 230, with only a small amount depositing on the first support portion 210 or the second support portion 220, ensuring the cleanliness of the first support portion 210 or the second support portion 220. In actual production, frequent replacement of the first support portion 210 or the second support portion 220 is unnecessary; only the cover plate 230 needs to be replaced periodically. This allows for more targeted maintenance of components within the cavity, reducing equipment maintenance time and improving production efficiency. Furthermore, the cover plate 230 can be independently made of a higher-quality material with a single-crystal surface. Such materials help reduce parasite deposition, further reducing the frequency of maintenance for the cover plate 230.

[0036] On a projection plane perpendicular to the second direction Y, the orthographic projection of the second support portion 220 is located inside the inner edge of the orthographic projection of the cover plate 230, and the orthographic projection of the cover plate 230 is at least partially located outside the outer edge of the outer edge of the first support portion 210. It is understood that on the projection plane perpendicular to the second direction Y, the orthographic projection of the second support portion 220 does not overlap with the orthographic projection of the cover plate 230, but the orthographic projection of the cover plate 230 partially overlaps with the orthographic projection of the first support portion 210.

[0037] When the lifting member 300 rises to the second height, it lifts the first supporting part 210. Because the cover plate 230 overlaps with the first supporting part 210, the lifting member 300 simultaneously lifts both the first supporting part 210 and the cover plate 230, causing both to detach from the first supporting groove 110. The cover plate 230 can be loaded and unloaded by an external robotic arm 500.

[0038] As can be seen from the above technical solution, the bearing lifting assembly of this embodiment, by adding an annular cover plate 230, together with the first bearing part 210 and the second bearing part 220, encloses a receiving groove 240 for placing the substrate 400 with more precise positioning and more reliable placement. Due to the obstruction of the cover plate 230, parasites in the process are less likely to corrode the first bearing part 210 or the second bearing part 220, effectively ensuring the cleanliness of the first bearing part 210 or the second bearing part 220 and avoiding frequent replacement. Only the cover plate 230 needs to be replaced to complete the maintenance of the cavity environment. At the same time, the structure of the cover plate 230 not only ensures that it is compatible with the structure of the first bearing part 210 and the second bearing part 220, but also can detach from the first bearing groove 110 together with the first bearing part 210 when the lifting part 300 is raised to the second height, without affecting the maintenance operation of the bearing lifting assembly, thus taking into account the reliability, economy and maintenance convenience.

[0039] In some embodiments, please refer to Figure 4 The lifting member 300 includes a first support portion 310 and a second support portion 320 connected to each other. The first support portion 310 is located on the side of the second support portion 320 opposite to the platform 200, and at least a portion of the first support portion 310 is received within the lifting channel 120. The first support portion 210 has a through hole 212, which connects to the second support groove 211 and the lifting channel 120 respectively. A portion of the second support portion 320 can pass through the through hole 212. In the first direction X, the size of the first support portion 310 is larger than the size of the through hole 212, and the size of the through hole 212 is larger than the size of the second support portion 320.

[0040] It should be noted that when the lifting member 300 rises to the first height, the second support portion 320 can pass through the through hole 212 and abut against the second bearing portion 220, thus lifting the second bearing portion 220 to disengage from the second bearing groove 211. At this time, apart from the abutment between the second support portion 320 and the second bearing portion 220, the lifting member 300 does not contact other components of the platform 200. The first bearing portion 210 remains housed within the first bearing portion 210. When the lifting member 300 rises to the second height, the first support portion 310 abuts against the first bearing portion 210, thus lifting the first bearing portion 210 to disengage from the first bearing groove 110.

[0041] As can be seen from the above technical solution, the lifting member 300 in this embodiment, through the segmented structural design of the first support part 310 and the second support part 320, combined with the through hole 212 on the first bearing part 210 connecting the second bearing groove 211 and the lifting channel 120, and with the size gradient configuration of the first support part 310, the through hole 212 and the second support part 320 in the first direction X, achieves that when the lifting member 300 rises to the first height, only the second support part 320 passes through the through hole 212 and abuts against the second bearing part 220 to lift it off the second bearing groove 211. Moreover, the lifting member 300 does not contact other parts of the platform 200, and the first bearing part 210 remains in a receiving state, ensuring the accuracy and smoothness of the first stage of the graded lifting action.

[0042] In some embodiments, please refer to Figure 4 To improve the stability of the second support 320 during lifting and lowering and prevent it from shifting, the second support 220 is provided with a protrusion 221 protruding towards the lifting member 300. The protrusion 221 can be received within the through hole 212. It should be noted that the size of the protrusion 221 is slightly smaller than the through hole 212 on the first support 210 so that it can be received within the through hole 212 and form a stable fit. Through the fitting and guidance of the protrusion 221 and the through hole 212, the second support 220 and the second support groove 211 can be quickly positioned without repeated calibration during docking, which significantly improves the convenience of docking and greatly reduces the accuracy requirements of the docking operation. Even if there is a slight misalignment, the protrusion 221 can be automatically corrected by the limiting effect of the through hole 212, which effectively improves the assembly efficiency and operational error tolerance.

[0043] It should be noted that when the lifting member 300 rises to the first height, the second support part 320 will move upward along the lifting channel 120, gradually penetrating the through hole 212 and abutting against the protrusion 221 housed in the through hole 212. As the lifting member 300 continues to rise, the second support part 320 will steadily support the protrusion 221 and move upward synchronously until at least a portion of the second support part 320 is completely housed in the through hole 212. At this time, the second bearing part 220, driven by the protrusion 221, completely disengages from the second bearing groove 211, achieving separation from the first bearing part 210.

[0044] As can be seen from the above technical solution, this embodiment, through the coordinated cooperation of the protrusion 221, the through hole 212, and the second support 320, not only enhances the stability of the second support 220 during the lifting process and prevents it from shifting or shaking, but also further optimizes the continuity and accuracy of the lifting action, making the substrate 400 pick-up and drop process smoother and more reliable. At the same time, the assembly and use difficulty of the overall support lifting assembly is reduced through structural optimization.

[0045] In some embodiments, please refer to Figure 3and Figure 4 To further enhance the stability of the second support 320 during lifting and lowering, prevent it from shifting, and also prevent the second bearing 220 from deflecting after being lifted, the protrusion 221 has a groove 2211. The opening of the groove 2211 faces the lifting channel 120 and communicates with it. It should be noted that the size of the groove 2211 is adapted to the second support 320, and it can accommodate a portion of the second support 320 within it.

[0046] It should be noted that when the lifting member 300 rises to the first height, the second support part 320 will pass through the groove 2211 and abut against the bottom of the groove 2211. At this time, the groove 2211 forms a circumferential limit on the second support part 320, effectively constraining the horizontal displacement of the second support part 320. At the same time, the surface contact between the second support part 320 and the bottom of the groove 2211, combined with the guiding effect of the protrusion 221 and the through hole 212, further restricts the deflection tendency of the second bearing part 220 after being lifted, making the lifting action of the second bearing part 220 more stable and the positioning more accurate.

[0047] As can be seen from the above technical solution, this embodiment, through the interlocking structure of the groove 2211 and the second support 320, not only enhances the stability of force transmission during the lifting process and reduces the shaking or misalignment between components, but also provides more reliable structural support for the loading and unloading operation of the substrate 400, further improving the operating accuracy and durability of the entire load-bearing lifting assembly.

[0048] In some embodiments, please refer to Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6 The lifting channel 120 has a stepped portion 130 on its side wall, which is spaced apart from the platform 200, meaning the lifting channel 120 is a variable-diameter channel. Correspondingly, the first support portion 310 has a protruding boss 330 relative to the outer periphery of the second support portion 320, and the boss 330 is housed within the lifting channel 120. In the first direction X, the through hole 212 has a size of W1, and the boss 330 has a size of W2, satisfying W1 < W2. That is, the boss 330 cannot pass through the through hole 212, thus providing a structural basis for subsequent operations.

[0049] The boss 330 includes a flange 331 located on the side away from the second support portion 320. The flange 331 refers to the end face of the boss 330 facing away from the second support portion 320. When the lifting member 300 descends to the third height, the flange 331 abuts against the step portion 130. At this time, the step portion 130 provides rigid support to the flange 331, directly restricting the lifting member 300 from moving further downward. Therefore, the third height becomes the lowest position that the lifting member 300 can descend to. It should be noted that the heights from highest to lowest are the second height, the first height, and the third height.

[0050] As can be seen from the above technical solution, this embodiment sets a lower limit for the descent stroke of the lifting member 300 by cooperating with the step portion 130 and the flange 331, avoiding unnecessary collisions between the lifting member 300 and the bottom of the lifting channel 120 or other components due to excessive descent, thus ensuring the safety of the lifting assembly. At the same time, the dimensional relationship of W1 < W2 further enhances the reliability of the structural limit. Combined with the fitting relationship between the boss 330 and the lifting channel 120, the lifting member 300 maintains stable axial movement during the lifting process, reducing offset or jamming, and providing a guarantee for the operation of the entire lifting assembly.

[0051] In some embodiments, please refer to Figure 4 In the second direction Y, the minimum distance between the side of the second support 320 away from the first support 310 (i.e., the top of the second support 320) and the boss 330 is L1, and the size of the through hole 212 is L2, satisfying L1 > L2. It can be understood that this size design provides sufficient movement margin for the lifting member 300 to rise to the first height. When the lifting member 300 moves from the initial position to the first height, the second support 320 needs to pass through the recessed groove 2211 and lift the second bearing member 220. The design that L1 is greater than L2 ensures that the boss 330 will not prematurely contact and interfere with the bottom of the first bearing member 210, allowing the second support 320 to smoothly complete the independent lifting action of the second bearing member 220, avoiding jamming or incomplete action due to insufficient space. This ensures the accuracy and smoothness of the first height lifting stage, providing reliable structural support for the stable placement and removal of the substrate 400. It should be noted that the initial position can be any height between the height at which the second support 320 fits into the groove bottom of the groove 2211 and the third height.

[0052] To ensure clear differentiation of the tiered lifting action and operational safety, the second height is higher than the first height, and the difference between the two heights is no less than 8mm. In other words, the difference between the second and first heights is greater than or equal to 8mm. It should be noted that the maximum difference between the second and first heights must be less than the distance between the supporting lifting component and the top of its chamber. This height difference design provides sufficient space for operation under different working conditions.

[0053] When the lifting component 300 is at the first height, the second support portion 220 disengages from the second support groove 211, which meets the needs of external equipment (such as the robotic arm 500) for picking up and placing the substrate 400, avoiding interference with the first support portion 210 during operation. When the lifting component 300 rises to the second height, the first support portion 210 disengages from the first support groove 110 along with the lifting component 300. The sufficient height difference allows operators to easily load, unload, maintain, or replace the second support portion 220 without worrying about space constraints causing operational inconvenience. At the same time, the sufficient height difference further enhances the independence of the two lifting stages, preventing component collisions or operational malfunctions caused by overlapping height ranges, effectively improving the reliability and practicality of the entire support lifting assembly.

[0054] In some embodiments, please refer to Figure 7 The base 100 has a combined structure of multiple first bearing grooves 110 and lifting channels 120. It should be noted that the distribution of these combined structures is flexible and diverse. They can be arranged neatly in a rectangular matrix or distributed in a circular matrix, as long as the combined structures maintain a uniform interval to ensure that the workstations are independent and do not interfere with each other.

[0055] Correspondingly, the supporting lifting assembly is equipped with multiple spaced-apart platforms 200 and multiple spaced-apart lifting members 300. All platforms 200 and lifting members 300 are spaced apart, forming a one-to-one independent working unit. Each platform 200 is housed in a corresponding first supporting groove 110, and each supports the substrate 400 and performs corresponding actions; at least a portion of the first support portion 310 of each lifting member 300 is housed in a corresponding lifting channel 120, and at least a portion of the second support portion 320 of each lifting member 300 can pass through the first support portion 210 of the corresponding platform 200 and abut against the second support portion 220 of the corresponding platform 200.

[0056] It should be noted that each independent assembly structure has a corresponding cover plate 230, thereby forming a corresponding receiving groove 240, and each receiving groove 240 can accommodate a substrate 400.

[0057] As can be seen from the above technical solution, by setting up multiple independent combined structures in parallel, multiple substrates 400 can be carried and processed at the same time, which greatly improves the efficiency of the process and is especially suitable for mass production scenarios. On the other hand, the stage 200 and lifting component 300 of each combined structure operate independently, which not only ensures the accuracy of processing a single substrate 400, but also avoids mutual interference between the combined structures.

[0058] In some embodiments, please refer to Figure 8The base 100 has multiple lifting channels 120, each of which is connected to the same first bearing groove 110. In other words, the base 100 adopts a single-groove, multi-channel design, with only one first bearing groove 110 and multiple lifting channels 120. All lifting channels 120 are connected to the single first bearing groove 110, forming a combined structure of centralized bearing and decentralized lifting.

[0059] Correspondingly, the supporting lifting assembly includes only one platform 200, which is entirely housed within a single first supporting groove 110. The platform 200 includes multiple second supporting portions 220, spaced apart. Multiple second supporting grooves 211 are formed on the side of the first supporting portion 210 opposite to the base 100, with each second supporting portion 220 housed within its corresponding second supporting groove 211. Simultaneously, the supporting lifting assembly includes multiple spaced-apart lifting members 300. At least a portion of the first support portion 310 of each lifting member 300 is housed within a corresponding lifting channel 120, and at least a portion of the second support portion 320 of each lifting member 300 can pass through the first supporting portion 210 and abut against the corresponding second supporting portion 220.

[0060] It should be noted that the cover plate 230, the first support part 210, and the multiple second support parts 220 of the stage 200 together form a receiving groove 240 for accommodating the substrate 400.

[0061] During operation, multiple lifting components 300 cooperate through corresponding lifting channels 120 to synchronously drive multiple second support parts 220 to lift and lower the same substrate 400. This multi-point support design can evenly distribute the force on the substrate 400, effectively preventing the substrate 400 from shifting or tilting due to uneven force during lifting and lowering, thus improving the stability of the substrate 400 lifting and lowering.

[0062] A second aspect of this application provides a semiconductor processing apparatus that includes all the technical features and beneficial effects of the aforementioned lifting and supporting components, which will not be repeated here.

[0063] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0064] The above provides a detailed description of a lifting and supporting component and a semiconductor processing device provided in the embodiments of this application. Specific examples have been used in this application to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the technical solutions and core ideas of this application. Those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. These modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A load-bearing lifting assembly, characterized in that, include: A base (100) having a first bearing groove (110) and a lifting channel (120) extending through the base (100) along a second direction (Y) and communicating with the first bearing groove (110); The platform (200) includes a first support part (210) and a second support part (220). The first support part (210) can be received in the first support groove (110). The first support part (210) has a second support groove (211) on the side opposite to the base (100). The second support part (220) can be received in the second support groove (211). A lifting member (300) is at least partially housed within the lifting channel (120), and one end of the lifting member (300) facing the platform (200) is capable of partially passing through the first support portion (210) and abutting against the second support portion (220). When the lifting member (300) rises to the first height, the second bearing part (220) disengages from the second bearing groove (211); when the lifting member (300) rises to the second height, the first bearing part (210) disengages from the first bearing groove (110).

2. The load-bearing lifting assembly according to claim 1, characterized in that, The stage (200) also includes a cover plate (230), which is annular and located on the side of the first support portion (210) away from the base (100). The cover plate (230) covers the outer periphery of the first support portion (210). The cover plate (230), the first support portion (210) and the second support portion (220) together form a receiving groove (240) for accommodating the substrate (400). The receiving groove (240) can communicate with the second support groove (211). On the projection plane perpendicular to the second direction (Y), the orthographic projection of the second support portion (220) is located inside the inner edge of the orthographic projection of the cover plate (230), and the orthographic projection of the cover plate (230) is at least partially located outside the outer edge of the first support portion (210). When the lifting member (300) rises to the second height, the first bearing part (210) and the cover plate (230) are both disengaged from the first bearing groove (110).

3. The load-bearing lifting assembly according to claim 2, characterized in that, The lifting member (300) includes a first support portion (310) and a second support portion (320) connected to each other. The first support portion (310) is located on the side of the second support portion (320) away from the platform (200). At least a portion of the first support portion (310) is received in the lifting channel (120). The first support part (210) has a through hole (212), which is connected to the second support groove (211) and the lifting channel (120) respectively. A portion of the second support part (320) can pass through the through hole (212). In the first direction (X) perpendicular to the second direction (Y), the size of the first support (310) is larger than the size of the through hole (212), and the size of the through hole (212) is larger than the size of the second support (320); When the lifting member (300) rises to the first height, the second support part (320) can pass through the through hole (212) and abut against the second bearing part (220), and lift the second bearing part (220) to disengage from the second bearing groove (211).

4. The load-bearing lifting assembly according to claim 3, characterized in that, The second support portion (220) includes a protrusion (221) protruding toward the lifting member (300), the protrusion (221) being able to be received within the through hole (212); When the lifting member (300) rises to the first height, the second support (320) abuts against the protrusion (221).

5. The load-bearing lifting assembly according to claim 4, characterized in that, The lifting channel (120) has a stepped section (130) on its side wall, and the stepped section (130) is spaced apart from the platform (200); The first support portion (310) has a boss (330) protruding from the outer periphery of the second support portion (320), and the boss (330) is received in the lifting channel (120); in the first direction (X), the size of the through hole (212) is W1, and the size of the boss (330) is W2, satisfying W1 < W2; The boss (330) includes a flange (331) located on the side away from the second support (320), and when the lifting member (300) descends to the third height, the flange (331) abuts against the step (130).

6. The load-bearing lifting assembly according to claim 5, characterized in that, In the second direction (Y), the minimum distance between the side of the second support (320) away from the first support (310) and the boss (330) is L1, and the size of the through hole (212) is L2, satisfying L1>L2; The second height is higher than the first height, and the difference between the second height and the first height is not less than 8mm.

7. The load-bearing lifting assembly according to claim 4, characterized in that, The protrusion (221) has a groove (2211) with the opening of the groove (2211) facing the lifting channel (120) and communicating with the lifting channel (120); When the lifting member (300) rises to the first height, a portion of the second support (320) is received in the groove (2211) and abuts against the bottom of the groove (2211).

8. The load-bearing lifting assembly according to claim 3, characterized in that, The base (100) has a combination of a plurality of the first bearing grooves (110) and the lifting channel (120); The load-bearing lifting assembly includes: The multiple spaced-apart platforms (200) are housed within a corresponding first support groove (110); The lifting members (300) are arranged at intervals. At least a portion of the first support portion (310) of each lifting member (300) is housed in the corresponding lifting channel (120). At least a portion of the second support portion (320) of each lifting member (300) can pass through the first support portion (210) of the corresponding platform (200) and abut against the second support portion (220) of the corresponding platform (200).

9. The load-bearing lifting assembly according to claim 3, characterized in that, The base (100) has a plurality of lifting channels (120), and the plurality of lifting channels (120) are respectively connected to the same first bearing groove (110); The platform (200) includes a plurality of second support parts (220), which are spaced apart; the first support part (210) has a plurality of second support grooves (211) on the side away from the base (100), and each second support part (220) is received in the corresponding second support groove (211); The lifting assembly includes a plurality of lifting members (300) spaced apart. At least a portion of the first support portion (310) of each lifting member (300) is housed in the corresponding lifting channel (120). At least a portion of the second support portion (320) of each lifting member (300) can pass through the first support portion (210) and abut against the corresponding second support portion (220).

10. A semiconductor processing apparatus, characterized in that, Includes the load-bearing lifting assembly as described in any one of claims 1 to 9.

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