Liquid driven venturi mechanism for exhaust gas treatment
Patent Information
- Application Number
- CN202522019652.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-19
- Publication Date
- 2026-10-09
- Estimated Expiration
- 2035-09-19
AI Technical Summary
[0002]光伏半导体生产中使用的气体如氟化氢(HF)、氯化氢(HCl)、硅烷(SiH4)、氨气(NH3)等具有强腐蚀性、毒性或易燃性,在光伏半导体行业制程中,尾气处理是保障生产安全、环境保护及工艺稳定运行的关键环节,其必要性源于尾气中含有的有毒有害或污染性物质可能引发健康风险、环境污染、设备故障及合规问题,尾气中的粉尘和颗粒物可能沉积在真空泵、管道或阀门中,导致设备磨损、堵塞或泄漏,增加维护成本并降低生产效率,未处理的尾气若在排气系统中发生非预期反应(如酸性气体与氨气中和),可能生成腐蚀性盐类,损害设备并影响产品质量
本实用新型的一种用于尾气处理的液驱文丘里机构,通过在文丘里管喉部设置一个缩口机构,在循环水进入时间,通过设置在文丘里管外侧的拨杆机构拨动缩口机构上的拨片,使拨片带动底盘转动,在底盘转动时可以通过限位块带动多个扇叶同步旋动,从而来调节出水口的大小,以此来动态匹配尾气流量,调节液体流速和流量,从而调节引射力的大小,以匹配不同的废气工况,使废气与循环水的反应接触更加充分,还可以废气与水充分接触,降低了废气的温度,维持稳定的高引射效率和污染物去除效率;
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Figure CN224822053U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of waste gas treatment technology, specifically relating to a liquid-driven venturi mechanism for exhaust gas treatment. Background Technology
[0002] Gases used in photovoltaic semiconductor manufacturing, such as hydrogen fluoride (HF), hydrogen chloride (HCl), silane (SiH4), and ammonia (NH3), are highly corrosive, toxic, or flammable. In the photovoltaic semiconductor industry, exhaust gas treatment is a critical step in ensuring production safety, environmental protection, and stable process operation. Its necessity stems from the fact that toxic, harmful, or polluting substances contained in exhaust gases may cause health risks, environmental pollution, equipment failure, and compliance issues. Dust and particulate matter in exhaust gases may accumulate in vacuum pumps, pipes, or valves, leading to equipment wear, blockage, or leakage, increasing maintenance costs, and reducing production efficiency. If untreated exhaust gases undergo unexpected reactions in the exhaust system (such as the neutralization of acidic gases with ammonia), they may generate corrosive salts, damaging equipment and affecting product quality.
[0003] Currently, when process waste gas is discharged through the equipment exhaust pipe after being washed with ordinary circulating water, some water-insoluble dust particles will accumulate at the exhaust pipe and be discharged from the equipment, resulting in blockage of the exhaust pipe and the emission of gas that does not meet environmental protection standards. Utility Model Content
[0004] The purpose of this invention is to provide a liquid-driven venturi mechanism for exhaust gas treatment. By replacing the circulating water pipe with a liquid-driven venturi pipe, the liquid is accelerated and injected to generate negative pressure at the throat to eject the gas. Water-insoluble particles are ejected to the bottom of the water tank inside the device, avoiding accumulation in the exhaust pipe and being carried out of the device. At the same time, the device allows the exhaust gas to fully contact with the water, reducing the temperature of the exhaust gas and maintaining a stable high ejection efficiency and pollutant removal efficiency.
[0005] The specific technical solution adopted by this utility model is as follows: A liquid-driven venturi mechanism for exhaust gas treatment includes a venturi tube, a constriction mechanism, a nozzle, and a lever mechanism; The Venturi tube has an air inlet and a water inlet on its side wall and top, respectively, for conveying waste gas and circulating water into the Venturi tube. The constriction mechanism can be located inside the Venturi tube and at the throat of the Venturi tube. The constriction mechanism has an outlet for adjusting the flow area of the outlet. The nozzle is located below the constriction mechanism, and a water conveying passage is formed between the nozzle and the water outlet for spraying circulating water into the interior of the venturi tube. The lever mechanism is located outside the venturi tube, and its power output end is connected to the constriction mechanism for driving the constriction mechanism to change the opening size of the outlet.
[0006] In a preferred embodiment, the constriction mechanism includes a chassis rotatably mounted on a venturi tube. A fixing ring is fixedly connected to the outside of the chassis and to the venturi tube. An upper plate is fixedly connected inside the fixing tube. At least six fan blades are arranged between the upper plate and the chassis. The lower ends of the fan blades slide in a groove on the chassis via a limiting block, and the upper ends of each fan blade slide in a limiting groove on the upper plate.
[0007] In a preferred embodiment, the power output end of the lever mechanism is connected to the chassis transmission. When it is driven to rotate, the sliding groove and the limiting block cooperate and the limiting groove guides each fan blade to deflect synchronously, so as to gather or disperse, thereby changing the diameter of the outlet formed in the center.
[0008] In a preferred embodiment, the lever mechanism includes a fixed plate fixedly connected to the outer wall of the venturi tube. A motor is fixedly connected inside the fixed plate. A connecting rod one is fixedly connected to the output end of the motor. A connecting rod two is hinged to the other end of the connecting rod one. A fixed column is hinged to the other end of the connecting rod two. The fixed column is rotatably mounted on the fixed plate via a rotating shaft. The fixed column is fixedly connected to the chassis of the constriction mechanism or connected via a lever drive. A lever groove is provided on the side of the chassis, and the lever is slidably connected in the lever groove.
[0009] In a preferred embodiment, the motor drives a crank-rocker mechanism composed of connecting rod one and connecting rod two to drive the fixed column to swing back and forth, thereby driving the chassis to rotate in both directions.
[0010] In a preferred embodiment, the nozzle is provided with a plurality of swirling plates, which are arranged obliquely along the circumference of the nozzle to generate swirling flow when the liquid passes through, and the spray direction is at an acute angle to the axis of the venturi tube.
[0011] In a preferred embodiment, the air inlet of the venturi tube is connected to an exhaust gas source via an exhaust gas inlet pipe, and an exhaust pipe with an outlet is provided on one side of the venturi tube.
[0012] The technical effects achieved by this utility model are as follows: This utility model discloses a liquid-driven Venturi mechanism for exhaust gas treatment. By setting a constriction mechanism at the throat of the Venturi tube, when circulating water enters, a lever mechanism set on the outside of the Venturi tube actuates a paddle on the constriction mechanism, causing the paddle to drive the chassis to rotate. When the chassis rotates, a limit block can drive multiple fan blades to rotate synchronously, thereby adjusting the size of the water outlet. This dynamically matches the exhaust gas flow rate, adjusts the liquid flow rate and velocity, and thus adjusts the ejector force to match different exhaust gas conditions. This allows for more complete reaction contact between the exhaust gas and circulating water, and also allows for sufficient contact between the exhaust gas and water, reducing the temperature of the exhaust gas and maintaining a stable high ejector efficiency and pollutant removal efficiency. This utility model discloses a liquid-driven venturi mechanism for exhaust gas treatment. By setting multiple swirl plates on the nozzle below the constriction mechanism, when circulating water is sprayed out through the spray nozzle on one side of the swirl plate, the angle of the swirl plate is set to change the direction of the water flow. This not only produces an atomization effect when the liquid is sprayed out, but also forms a strong entraining airflow. Combined with the characteristics of the venturi tube itself, the liquid is accelerated and sprayed, and a negative pressure is generated at the throat to entrain the gas. Water-insoluble particles are sprayed to the bottom of the water tank in the equipment, avoiding accumulation in the exhaust pipe and being carried out of the equipment. Attached Figure Description
[0013] Figure 1 This is a perspective view of the present invention; Figure 2 This is a schematic diagram of the venturi tube connection of this utility model; Figure 3 This is a cross-sectional view of the Venturi tube of this utility model; Figure 4 This is an exploded view of the necking mechanism of this utility model; Figure 5 This is a schematic diagram of the nozzle of this utility model; Figure 6 This is a schematic diagram of the lever mechanism of this utility model.
[0014] The attached diagram lists the components represented by each number as follows: 1. Venturi tube; 11. Air inlet; 12. Water inlet; 2. Narrowing mechanism; 21. Chassis; 22. Fan blade; 23. Limiting block; 24. Upper plate; 25. Limiting groove; 26. Paddle; 27. Paddle groove; 28. Slide groove; 3. Nozzle; 31. Swirl plate; 32. Sealing port; 4. Paddle lever mechanism; 41. Fixing plate; 42. Connecting rod one; 43. Connecting rod two; 44. Fixing column; 45. Rotating shaft; 5. Water outlet; 6. Exhaust gas inlet pipe; 7. Air outlet; 8. Exhaust gas inlet. Detailed Implementation
[0015] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.
[0016] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.
[0017] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in a preferred embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments.
[0018] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not adhering to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.
[0019] like Figures 1 to 3 As shown, a liquid-driven venturi mechanism for exhaust gas treatment includes a venturi tube 1, a constriction mechanism 2, a nozzle 3, and a lever mechanism 4. The side wall and top of the Venturi tube 1 are respectively provided with an air inlet 11 and a water inlet 12 for conveying waste gas and circulating water into the Venturi tube 1; The constriction mechanism 2 can be located inside the venturi tube 1 and at the throat of the venturi tube 1. The constriction mechanism 2 has an outlet 5 for adjusting the flow area of the outlet 5. The nozzle 3 is located below the constriction mechanism 2, and a water conveying passage is formed between the nozzle 3 and the outlet 5 for spraying circulating water into the interior of the venturi tube 1. The lever mechanism 4 is located outside the venturi tube 1, and its power output end is connected to the constriction mechanism 2 for driving the constriction mechanism 2 to change the opening size of the outlet 5.
[0020] In the above embodiment, when the device is needed, exhaust gas enters the Venturi tube 1 through the exhaust gas inlet pipe 6 and the inlet 11. At this time, circulating water is injected into the Venturi tube 1 through the water inlet 12. When injecting circulating water, the size of the water outlet 5 is adjusted according to the intake air volume by the narrowing mechanism 2. During adjustment, the size of the exposed water outlet 5 is controlled by adjusting the lever mechanism 4 outside the Venturi tube 1 to adjust the lever plate 26 on the narrowing mechanism 2. After the size of the water outlet 5 is adjusted, the circulating water enters the Venturi tube 1 through the water inlet 12 and then... The adjusted water outlet 5 enters the nozzle 3. Multiple swirl plates 31 are obliquely arranged on the nozzle 3. Each swirl plate 31 has a spray nozzle on its inner side. When water is sprayed out from the spray nozzle, the spray direction is at a specific acute angle with the axis of the venturi tube 1. This makes the liquid spray not only produce an atomization effect, but also allows the exhaust gas, pollutants and atomized droplets to be fully mixed, collided and condensed in the throat and diffuser section. The pollutants are captured by the droplets. Finally, the gas-liquid mixture enters the downstream demister for separation. The purified gas is discharged, and the wastewater is collected and treated to complete the exhaust gas treatment. It should be further explained that the lever mechanism 4 is located in the upper half of the venturi tube 1, and the mixing of exhaust gas and circulating water takes place in the lower half of the venturi tube 1. If the reaction generates heat, it will not affect the operation of the motor in the lever mechanism 4.
[0021] like Figure 4 As shown, the constriction mechanism 2 includes a base 21, which is rotatably mounted on the venturi tube 1. A fixing ring is fixedly connected to the outside of the base 21 and to the venturi tube 1. An upper plate 24 is fixedly connected inside the fixing tube. At least six fan blades 22 are arranged between the upper plate 24 and the base 21. The lower end of the fan blades 22 slides in cooperation with a sliding groove 28 opened on the base 21 through a limiting block 23, and the upper end of the fan blades 22 slides in cooperation with a limiting groove 25 opened on the upper plate 24.
[0022] In the above embodiment, each fan blade 22 is arranged in a circumferential pattern between the upper plate 24 and the base plate 21. When the fan blade 22 rotates to the maximum position, the outer side of the fan blade 22 will not exceed the fixing ring. The limiting groove 25 opened in the upper plate 24 and the sliding groove 28 opened in the base plate 21 are parallel to each other, so that the fan blade 22 is not obstructed when rotating.
[0023] like Figure 2 and Figure 6As shown, the power output end of the lever mechanism 4 is connected to the chassis 21 for transmission. When it is driven to rotate, the sliding groove 28 and the limiting block 23 cooperate with each other and the limiting groove 25 guide each fan blade 22 to deflect synchronously, so as to gather or disperse, thereby changing the diameter of the outlet 5 formed in the center. The lever mechanism 4 includes a fixed plate 41, which is fixedly connected to the outer wall of the venturi tube 1. A motor is fixedly connected inside the fixed plate 41. The output end of the motor is fixedly connected to a connecting rod 42, and the other end of the connecting rod 42 is hinged. A second connecting rod 43 is connected to the other end of the connecting rod 43, which is hinged to a fixed post 44. The fixed post 44 is rotatably mounted on the fixed plate 41 via a rotating shaft 45. The fixed post 44 is fixedly connected to the chassis 21 of the narrowing mechanism 2 or is driven by a paddle 26. A paddle groove 27 is provided on the side of the chassis 21, and the paddle 26 is slidably connected in the paddle groove 27. The motor drives the fixed post 44 to swing back and forth through the crank rocker mechanism composed of the first connecting rod 42 and the second connecting rod 43, thereby driving the chassis 21 to rotate in both directions.
[0024] In the above embodiment, by starting the motor installed in the fixed plate 41, the first connecting rod 42 is driven to rotate around the rotating column. When rotating, the first connecting rod 42 is driven to swing, which in turn drives the second connecting rod 43 to swing. When the second connecting rod 43 swings, it can drive the fixed column 44 connected to its other end to swing. Since the fixed column 44 is connected to the fixed plate 41 through the rotating shaft 45, when the second connecting rod 43 drives the fixed column 44, the fixed column 44 swings left and right, which in turn drives the lever 26 connected to the fixed column 44 to move left and right, thereby controlling the size of the exposed water outlet 5.
[0025] like Figure 5 As shown, the nozzle 3 is provided with several swirling plates 31, each swirling plate 31 is arranged obliquely along the circumference of the nozzle 3, so that the liquid generates swirling flow when it passes through, and its spray direction is at an acute angle to the axis of the venturi tube 1.
[0026] In the above embodiment, a plurality of swirl plates 31 are obliquely arranged on the nozzle 3, and a water spray nozzle is provided on the inner side of each swirl plate 31. When water is sprayed out from the water spray nozzle, the spray direction is made to form a specific acute angle with the axis of the venturi tube 1, so that the liquid sprays out not only produces an atomization effect, but also forms a strong jet airflow. After the circulating water is atomized into tiny droplets, the exhaust gas, pollutants and atomized droplets are fully mixed, collided and condensed in the throat and diffuser section. The pollutants are captured by the droplets. Finally, the gas-liquid mixture enters the downstream demister for separation, the purified gas is discharged, and the wastewater is collected and treated to complete the exhaust gas treatment.
[0027] like Figure 3 As shown, the air inlet 11 of the venturi tube 1 is connected to the exhaust gas source through an exhaust gas inlet pipe 6, and an exhaust pipe with an exhaust outlet 7 is provided on one side of the venturi tube 1.
[0028] In the above embodiment, when treating exhaust gas, the exhaust gas enters below the throat of the venturi tube 1 through the air inlet 11, and waits for circulating water to enter for the exhaust gas treatment step.
[0029] The working principle of this utility model is as follows: When the device is needed, exhaust gas enters the Venturi tube 1 through the exhaust gas inlet pipe 6 and the inlet 11. At this time, circulating water is injected into the Venturi tube 1 through the water inlet 12. When injecting circulating water, the size of the water outlet 5 is adjusted according to the intake air volume. During adjustment, the motor installed in the fixed plate 41 drives the connecting rod 42 to rotate around the rotating column. When rotating, the connecting rod 42 swings, which in turn drives the connecting rod 43 to swing. When the connecting rod 43 swings, it can drive the connecting rod 43 to swing. The fixed column 44 connected to the other end swings. Because the fixed column 44 is connected to the fixed plate 41 through the rotating shaft 45, when the connecting rod 43 drives the fixed column 44, the fixed column 44 swings left and right, which in turn drives the lever 26 connected to the fixed column 44 to move left and right to control the size of the exposed water outlet 5. When the lever 26 swings left and right, it drives the chassis 21 to rotate. The fan blade 22 is equipped with multiple limit blocks 23, each of which corresponds to a slide groove 28. When the chassis 21 rotates, the limit blocks... The limiting block 23 slides within the slide groove 28, thereby driving the fan blade 22 to rotate. Simultaneously, the upper end of the limiting block 23 slides within the limiting groove 25 on the upper plate 24, further restricting the rotation path of the fan blade 22 and preventing the limiting block 23 from shifting. The limiting groove 25 and slide groove 28 are aligned in each direction. After adjusting the size of the outlet 5, the circulating water enters the venturi tube 1 through the inlet 12 and then enters the nozzle 3 through the adjusted outlet 5. Multiple swirl plates 31 are obliquely arranged on the nozzle 3. Each swirl plate... The inner side of 31 is equipped with water spray nozzles. When water is sprayed from the nozzles, the spray direction is at a specific acute angle to the axis of the Venturi tube 1. This not only produces an atomization effect when the liquid is sprayed out, but also forms a strong jet airflow. After the circulating water is atomized into tiny droplets, the exhaust gas, pollutants and atomized droplets are fully mixed, collided and condensed in the throat and diffuser section. The pollutants are captured by the droplets. Finally, the gas-liquid mixture enters the downstream demister for separation. The purified gas is discharged, and the wastewater is collected and treated to complete the exhaust gas treatment.
[0030] The above description is merely a preferred embodiment of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model. Structures, devices, and operating methods not specifically described or explained in this utility model, unless otherwise specified or limited, shall be implemented using conventional methods in the field.
Claims
1. A liquid-driven venturi mechanism for exhaust gas treatment, characterized in that: It includes a venturi tube (1), a constriction mechanism (2), a nozzle (3), and a lever mechanism (4); The Venturi tube (1) has an air inlet (11) and a water inlet (12) on its side wall and top, respectively, for conveying waste gas and circulating water into the Venturi tube (1); The constriction mechanism (2) can be located inside the Venturi tube (1) and at the throat of the Venturi tube (1). The constriction mechanism (2) has an outlet (5) for adjusting the flow area of the outlet (5). The nozzle (3) is located below the constriction mechanism (2), and a water conveying passage is formed between the nozzle (3) and the water outlet (5) for spraying circulating water into the interior of the venturi tube (1). The lever mechanism (4) is located outside the venturi tube (1), and its power output end is connected to the constriction mechanism (2) for driving the constriction mechanism (2) to change the opening size of the outlet (5).
2. The liquid-driven venturi mechanism for exhaust gas treatment according to claim 1, characterized in that: The constriction mechanism (2) includes a chassis (21), which is rotatably mounted on a venturi tube (1). A fixing ring is fixedly connected to the outside of the chassis (21), and the fixing ring is fixedly connected to the venturi tube (1). An upper plate (24) is fixedly connected inside the fixing ring. At least six fan blades (22) are provided between the upper plate (24) and the chassis (21). The lower end of each fan blade (22) is slidably engaged with a sliding groove (28) opened on the chassis (21) by a limiting block (23), and the upper end of each fan blade (22) is slidably engaged with a limiting groove (25) opened on the upper plate (24).
3. A liquid-driven venturi mechanism for exhaust gas treatment according to claim 2, characterized in that: The power output end of the lever mechanism (4) is connected to the chassis (21) for transmission. When it is driven to rotate, the sliding groove (28) and the limiting block (23) cooperate and the limiting groove (25) guide each fan blade (22) to deflect synchronously, so as to gather or disperse, thereby changing the aperture of the water outlet (5) formed in the center.
4. A liquid-driven venturi mechanism for exhaust gas treatment according to claim 1, characterized in that: The lever mechanism (4) includes a fixed plate (41), which is fixedly connected to the outer wall of the venturi tube (1). A motor is fixedly connected inside the fixed plate (41). A connecting rod (42) is fixedly connected to the output end of the motor. A connecting rod (43) is hinged to the other end of the connecting rod (42). A fixed column (44) is hinged to the other end of the connecting rod (43). The fixed column (44) is rotatably mounted on the fixed plate (41) via a rotating shaft (45). The fixed column (44) is fixedly connected to the chassis (21) of the narrowing mechanism (2) or driven by a lever (26). A lever groove (27) is provided on the side of the chassis (21). The lever (26) is slidably connected in the lever groove (27).
5. A liquid-driven venturi mechanism for exhaust gas treatment according to claim 4, characterized in that: The motor drives the fixed column (44) to swing back and forth through the crank rocker mechanism composed of connecting rod one (42) and connecting rod two (43), thereby driving the chassis (21) to rotate in both directions.
6. A liquid-driven venturi mechanism for exhaust gas treatment according to claim 1, characterized in that: The nozzle (3) is provided with several swirling plates (31), each of which is arranged obliquely along the circumference of the nozzle (3) so that the liquid generates swirling flow when it passes through, and its spray direction is at an acute angle to the axis of the venturi tube (1).
7. A liquid-driven venturi mechanism for exhaust gas treatment according to claim 1, characterized in that: The air inlet (11) of the Venturi tube (1) is connected to the exhaust gas source through an exhaust gas inlet pipe (6), and an exhaust pipe with an outlet (7) is provided on one side of the Venturi tube (1).