Photoresist bottle inner wall spraying preheating device

Abstract

This utility model relates to the field of photoresist bottle processing, specifically to a preheating device for spraying the inner wall of a photoresist bottle. The device includes a preheating chamber and a circulating fan mounted thereon. The device further includes: at least one heater mounted on the inner wall of the preheating chamber; a rotating shaft rotatably mounted inside the preheating chamber, its top protruding through a shaft hole at the top of the preheating chamber, and having multiple equidistant limiting grooves on at least one side of its surface; a top plate fixed to the upper end of the rotating shaft; and at least one placement plate slidably sleeved on the surface of the rotating shaft, on which multiple insertion rods for inserting photoresist bottles are fixed equidistantly along the circumference. This utility model uses the rotating shaft to drive the multi-layer placement plate to rotate, resulting in more uniform heating of the photoresist bottle; the limiting pins and spring structure facilitate adjustment of the placement plate height to accommodate different bottle heights; the insertion rods have a telescopic tensioning mechanism to effectively fix the bottle body and prevent shaking; overall, it improves preheating efficiency, temperature consistency, and operational stability, which is beneficial for improving the quality of subsequent spraying.

Description

Technical Field

[0001] This utility model relates to the field of photoresist bottle processing, and in particular to a photoresist bottle inner wall spraying preheating device. Background Technology

[0002] As a key material in microelectronics manufacturing, the stability of photoresist directly affects the precision and yield of photolithography processes. Gallon bottles are typically used as storage containers during the production and packaging of photoresist. To ensure the photoresist maintains stable performance during long-term storage, the inner wall of the bottle is often treated with fluorination or a special coating to isolate it from the ambient atmosphere and prevent solvent leakage. Before the inner wall coating process, the photoresist bottle is often preheated to remove residual moisture, enhance coating adhesion, and improve coating uniformity. Currently, common methods for preheating photoresist bottles mostly employ static ovens or fixed hot air circulation equipment. These devices typically place photoresist bottles in batches on trays or supports before heating them as a whole. However, this method has several significant drawbacks: First, traditional supports lack an effective bottle-fixing mechanism, making the bottles prone to shaking or tipping during handling or baking, leading to contamination or even breakage. Second, the photoresist bottles are stationary during preheating, resulting in uneven heating; the side furthest from the heat source has poorer preheating, easily creating temperature gradients that affect subsequent coating quality. Utility Model Content

[0003] In view of this, the purpose of this utility model is to provide a photoresist bottle inner wall spray preheating device to solve the technical problems in the prior art.

[0004] To achieve the above objectives, this utility model provides a photoresist bottle inner wall spraying preheating device, including a preheating box and a circulating fan installed thereon, and the device further includes: At least one heater installed on the inner wall of the preheating box; A rotating shaft installed inside the preheating box is rotatably mounted, with its top protruding through a shaft hole at the top of the preheating box, and multiple limiting grooves are equidistantly provided on at least one side of its surface. A top plate fixed to the upper end of the rotating shaft; At least one placement plate is slidably sleeved on the surface of the rotating shaft, and multiple insertion rods for inserting photoresist bottles are fixed at equal intervals along the circumference on the placement plate. A mounting sleeve is fixed to the bottom of the placement plate and sleeved on the outside of the rotating shaft. The inner side of the mounting sleeve has an assembly groove corresponding to the limiting groove. The assembly groove passes through the inner and outer walls of the mounting sleeve. A limiting pin is slidably provided inside the mounting sleeve. One end of the limiting pin extends into the corresponding limiting groove, and a first spring is sleeved on the limiting pin. One end of the first spring is fixed to the inner wall of the assembly groove, and the other end is fixed to the end of the limiting pin.

[0005] Preferably, the top of one end of the limiting pin is set as an inclined surface, and the top wall of the limiting groove is set as an inclined surface that cooperates with the inclined surface of one end of the limiting pin.

[0006] Preferably, the surface of the placement plate is provided with heat dissipation holes arranged in an equidistant array.

[0007] Preferably, there are multiple placement plates, which are equidistantly arranged on the surface of the lower end of the rotating shaft.

[0008] Preferably, keyways are provided on both sides of the rotating shaft surface, and a sliding key that slides in cooperation with the keyway is fixed on the inner ring of the mounting sleeve.

[0009] Preferably, a motor is fixedly installed on the top of the preheating box, and the output end of the motor is fixedly connected to the top of the rotating shaft.

[0010] Preferably, the insert has a cavity extending through its top, and a telescopic rod is slidably installed inside the cavity. A second hinge rod is symmetrically hinged to the top of the telescopic rod, and a first hinge rod is hinged to one end of the second hinge rod. One end of the first hinge rod is hinged to the side wall of the insert. A second spring is fitted onto the surface of the telescopic rod, with one end fixed to the top wall of the telescopic rod and the other end fixed to the top of the insert.

[0011] Preferably, both sides of the insertion rod are provided with movable grooves, and one end of the first hinge rod is hinged to the side wall at the lower end of the movable groove.

[0012] The beneficial effects of this utility model are as follows: The photoresist bottle inner wall spraying preheating device of this utility model drives the multi-layer placement plate to rotate through the rotating shaft, so that the photoresist bottle is heated more evenly; the limiting pin and spring structure makes it easy to adjust the height of the placement plate to adapt to different bottle heights; the insertion rod is equipped with a telescopic support mechanism to effectively fix the bottle body and prevent shaking; the overall preheating efficiency, temperature consistency and operational stability are improved, which is conducive to improving the subsequent spraying quality. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only for this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a perspective view of the present utility model; Figure 2 This is a schematic diagram of the main cross-section of the present invention; Figure 3This is a partial structural cross-sectional view of the rotating shaft, placement plate, and mounting sleeve of this utility model. Figure 4 for Figure 3 Enlarged schematic diagram of the structure at point A in the middle; Figure 5 for Figure 3 Enlarged schematic diagram of the structure at point B; Figure 6 This is a schematic diagram of the insertion rod and movable groove structure of this utility model; Figure 7 This is a schematic diagram of the rotating shaft and limiting groove structure of this utility model.

[0015] The diagram is marked as follows: 1. Preheating box; 2. Circulating fan; 3. Heater; 4. Rotating shaft; 401. Limiting groove; 5. Top plate; 6. Placement plate; 7. Insert rod; 701. Cavity; 702. Movable groove; 8. Mounting sleeve; 801. Assembly groove; 9. Limiting pin; 10. First spring; 11. Motor; 12. Telescopic rod; 13. First hinge rod; 14. Second hinge rod; 15. Second spring. Detailed Implementation

[0016] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments.

[0017] It should be noted that, unless otherwise defined, the technical or scientific terms used in this utility model should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "first," "second," and similar terms used in this utility model do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0018] The first aspect of this utility model proposes a preheating device for spraying coating on the inner wall of a photoresist bottle, such as... Figure 1-7 As shown, the device includes a preheating box 1 and a circulating fan 2 mounted thereon. The device also includes: At least one heater 3 is installed on the inner wall of the preheating chamber 1; it should be added that there can be two heaters 3, which are symmetrically fixedly installed on the inner wall of the preheating chamber 1, which can further improve the preheating efficiency before the photoresist bottle is sprayed. The rotating shaft 4, which is rotatably installed inside the preheating box 1, has its top protruding through the shaft hole at the top of the preheating box 1, and at least one side of its surface is provided with multiple limiting grooves 401 at equal intervals; it should be added that the limiting grooves 401 can be set in two sets, and the two sets of limiting grooves 401 are symmetrically opened on both sides of the rotating shaft 4. By setting two sets of limiting grooves 401, the stability of the installation of the mounting sleeve 8 is further improved. Top plate 5 fixed to the upper end of rotating shaft 4; At least one placement plate 6 is slidably sleeved on the surface of the rotating shaft 4, and multiple insertion rods 7 for inserting photoresist bottles are fixed at equal intervals along the circumference of the placement plate 6. A mounting sleeve 8 is fixed to the bottom of the placement plate 6 and sleeved on the outside of the rotating shaft 4. The inner side of the mounting sleeve 8 is provided with an assembly groove 801 corresponding to the limiting groove 401. The assembly groove 801 passes through the inner and outer walls of the mounting sleeve 8. A limiting pin 9 is slidably provided inside it. One end of the limiting pin 9 extends into the corresponding limiting groove 401, and a first spring 10 is sleeved on the limiting pin 9. One end of the first spring 10 is fixed to the inner wall of the assembly groove 801, and the other end is fixed to the end of the limiting pin 9.

[0019] In the frosting and internal coating process of photoresist gallon bottles, the photoresist bottles need to be preheated. During preheating, first, the door of the preheating chamber 1 is opened, the bottle opening is aligned with the insertion rod 7, and pressed downwards to insert the photoresist bottle onto the insertion rod 7 through its opening. Then, by rotating the placement plate 6, the photoresist bottles to be preheated are placed sequentially onto the insertion rod 7. Afterwards, by pushing the placement plate 6 upwards, the limiting pins 9 on both sides inside the mounting sleeve 8 are pressed against the inclined surface of the top wall of the limiting groove 401 by the inclined surface at one end, thus... The limiting pin 9 moves and retracts into the assembly groove 801, and the first spring 10 is compressed and retracted. After the placement plate 6 is pushed to the required height, the bottom of the photoresist bottle contacts the top plate 5, and the pushing of the placement plate 6 stops. Then, the first spring 10 elastically resets and pushes one end of the limiting pin 9 to the corresponding limiting groove 401 position, so that the lower plane of one end of the limiting pin 9 overlaps the plane at the bottom of the limiting groove 401, restricting the downward movement of the mounting sleeve 8, and completing the limiting of the photoresist bottle. This method further facilitates the height adjustment of the placement plate 6.

[0020] In this embodiment, the top of one end of the limiting pin 9 is set as an inclined surface, and the top wall of the limiting groove 401 is set as an inclined surface that cooperates with the inclined surface of one end of the limiting pin 9. Following the above-described method of pushing the placement plate 6, after the photoresist bottle is inserted into the lower placement plate 6, the lower placement plate 6 is pushed again, causing the bottom of the photoresist bottle on the lower placement plate 6 to contact the bottom of the upper placement plate 6, thus limiting the photoresist bottle. This method facilitates the rapid upward pushing of the placement plate 6, adjusting the distance between the two placement plates 6.

[0021] In this embodiment, heat dissipation holes are evenly spaced on the surface of the placement plate 6. It should be noted that the heat dissipation holes on the surface of the placement plate 6 can accelerate the evaporation of moisture during preheating and drying, thereby improving preheating efficiency.

[0022] In this embodiment, multiple placement plates 6 are provided, and the multiple placement plates 6 are equidistantly arranged on the surface of the lower end of the rotating shaft 4. By setting multiple placement plates 6, multiple photoresist bottles can be placed simultaneously for preheating treatment. When the lower placement plate 6 moves closer to the upper placement plate 6, the bottom of the inverted photoresist bottle on the placement plate 6 is pressed against the bottom of the upper placement plate 6, further limiting the shaking of the photoresist bottle and ensuring the stability of the photoresist bottle during slow rotation.

[0023] In this embodiment, keyways are provided on both sides of the surface of the rotating shaft 4, and a sliding key that slides in cooperation with the keyway is fixed on the inner ring of the mounting sleeve 8. It should be noted that the mounting sleeve 8 is slidably mounted in the keyway on the surface of the rotating shaft 4 via the sliding key. This improves the stability of the movement of the mounting sleeve 8 and, during the rotation of the rotating shaft 4, drives the placement plate 6, which is fixedly connected to the mounting sleeve 8, to rotate, facilitating the placement of the photoresist bottle.

[0024] In this embodiment: a motor 11 is fixedly installed on the top of the preheating box 1, and the output end of the motor 11 is fixedly connected to the top of the rotating shaft 4.

[0025] During the preheating and drying of the photoresist bottle, the motor 11 is started, which drives the rotating shaft 4 to rotate slowly. At this time, the rotating shaft 4 drives the mounting sleeve 8, which is slidably mounted on the surface of the rotating shaft 4, to rotate. The mounting sleeve 8 drives the photoresist bottle placed on the placement plate 6 to rotate. By rotating the photoresist bottle, the incomplete preheating and drying of the photoresist bottle on the side away from the heater 3 can be avoided, which would lead to uneven preheating of the photoresist bottle inside the preheating chamber 1.

[0026] In this embodiment: the insert rod 7 has a cavity 701 with its top end extending through it. A telescopic rod 12 is slidably installed inside the cavity 701. A second hinge rod 14 is symmetrically hinged to the top of the telescopic rod 12. A first hinge rod 13 is hinged to one end of the second hinge rod 14. One end of the first hinge rod 13 is hinged to the side wall of the insert rod 7. A second spring 15 is fitted on the surface of the telescopic rod 12. One end of the second spring 15 is fixed to the top wall of the telescopic rod 12, and the other end is fixed to the top of the insert rod 7.

[0027] It should be noted that when the top of the telescopic rod 12 is not subjected to external pressure, the second spring 15 pushes the second hinge rod 14 hinged at the top of the telescopic rod 12 to deflect towards the side wall of the telescopic rod 12, so that the distance between the two second hinge rods 14 after they come together is less than the diameter of the photoresist bottle, so that the photoresist bottle can be fitted onto the telescopic rod 12 and the insertion rod 7. When the placement plate 6 is pushed upward, the bottom of the photoresist bottle placed upside down on the telescopic rod 12 and the insertion rod 7 on the uppermost placement plate 6 is pressed against the bottom of the top plate 5 by the upward movement of the placement plate 6, and the bottom of the photoresist bottle on the lower placement plate 6 is pressed against the bottom of the adjacent placement plate 6. This limits the position of the photoresist bottle. When the bottom of the photoresist bottle is pressed, the photoresist bottle moves closer to the insertion rod 7. At this time, the telescopic rod 12, which is slidably installed on the insertion rod 7, is pressed and moves inward into the insertion rod 7. This causes the second hinge rod 14, which is hinged to the telescopic rod 12, to deflect and push the first hinge rod 13, which is hinged at its end, to deflect. This causes the angle between the second hinge rod 14 and the first hinge rod 13 to decrease, so that the second hinge rod 14 moves closer to the inner wall of the photoresist bottle and contacts the inner wall of the photoresist bottle, supporting and positioning it. This further improves the stability of the photoresist bottle placement and ensures stability during the rotation of the photoresist bottle.

[0028] In this embodiment, movable slots 702 are provided on both sides of the insertion rod 7, and one end of the first hinge rod 13 is hinged to the side wall at the lower end of the movable slot 702. By providing the movable slots 702, when the first hinge rod 13 deflects, and the two first hinge rods 13 swing upwards at their hinge points with the insertion rod 7 and gradually approach the insertion rod 7, the movable slots 702 prevent interference caused by the deflection of the first hinge rod 13.

[0029] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the present invention (including the claims) is limited to these examples; within the framework of the present invention, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in the details for the sake of brevity.

[0030] This utility model is intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A photoresist bottle inner wall spraying preheating device, comprising a preheating box (1) and a circulating fan (2) installed thereon, characterized in that, The device also includes: At least one heater (3) installed on the inner wall of the preheating box (1); Rotary shaft (4) installed inside the preheating box (1) is rotated, with its top protruding through the shaft hole at the top of the preheating box (1), and multiple limiting grooves (401) are equidistantly provided on at least one side of its surface. Top plate (5) fixed to the upper end of the rotating shaft (4); At least one placement plate (6) is slidably sleeved on the surface of the rotating shaft (4), and multiple insertion rods (7) for inserting photoresist bottles are fixed at equal intervals along the circumference of the placement plate (6). An installation sleeve (8) is fixed to the bottom of the placement plate (6) and sleeved on the outside of the rotating shaft (4). The inner side of the installation sleeve (8) is provided with an assembly groove (801) corresponding to the limiting groove (401). The assembly groove (801) penetrates the inner and outer walls of the installation sleeve (8). A limiting pin (9) is slidably provided inside the mounting sleeve (8). One end of the limiting pin (9) extends into the corresponding limiting groove (401), and a first spring (10) is sleeved on the limiting pin (9). One end of the first spring (10) is fixed to the inner wall of the assembly groove (801), and the other end is fixed to the end of the limiting pin (9).

2. The photoresist bottle inner wall spraying preheating device according to claim 1, characterized in that, The top of one end of the limiting pin (9) is set as an inclined surface, and the top wall of the limiting groove (401) is set as an inclined surface that cooperates with the inclined surface of one end of the limiting pin (9).

3. The photoresist bottle inner wall spraying preheating device according to claim 1, characterized in that, The surface of the placement plate (6) is provided with heat dissipation holes arranged in an equidistant array.

4. The photoresist bottle inner wall spraying preheating device according to claim 1, characterized in that, The placement plate (6) is provided in multiple ways, and the multiple placement plates (6) are equidistantly arranged on the surface of the lower end of the rotating shaft (4).

5. The photoresist bottle inner wall spraying preheating device according to claim 1, characterized in that, The rotating shaft (4) has keyways on both sides of its surface, and the inner ring of the mounting sleeve (8) is fixed with a sliding key that slides in cooperation with the keyway.

6. The photoresist bottle inner wall spraying preheating device according to claim 1, characterized in that, A motor (11) is fixedly installed on the top of the preheating box (1), and the output end of the motor (11) is fixedly connected to the top of the rotating shaft (4).

7. The photoresist bottle inner wall spraying preheating device according to claim 1, characterized in that, The insert rod (7) has a cavity (701) with its top end extending through it. A telescopic rod (12) is slidably installed inside the cavity (701). A second hinge rod (14) is symmetrically hinged to the top of the telescopic rod (12). A first hinge rod (13) is hinged to one end of the second hinge rod (14). One end of the first hinge rod (13) is hinged to the side wall of the insert rod (7). A second spring (15) is fitted on the surface of the telescopic rod (12). One end of the second spring (15) is fixed to the top wall of the telescopic rod (12), and the other end is fixed to the top of the insert rod (7).

8. The photoresist bottle inner wall spraying preheating device according to claim 7, characterized in that, Both sides of the insertion rod (7) are provided with movable grooves (702), and one end of the first hinge rod (13) is hinged to the side wall at the lower end of the movable groove (702).

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