A memory chip surface cleaning pretreatment device

Abstract

The utility model discloses a kind of storage chip surface cleaning pretreatment device, it is related to chip cleaning technical field, including processing platform, adjusting frame, the one end of adjusting frame is provided with cleaning treatment component, the coupling with the limit disc and driven gear meshing rotation is rotated by being set, driven gear is meshed with gear, realize driving rack linear movement in adjusting frame inside surface, realize the use position of adjusting second positioning frame, third positioning frame, fan is set and carries out air blowing work to chip in second positioning frame by multiple air outlet, air blowing and drying work is carried out to chip after spraying, the liquid storage cavity is set, and the multiple spray nozzles at the bottom of liquid storage tube are used to spray chip, realize its surface cleaning work, the filter screen plate is set, and the liquid after cleaning is filtered and collected to the inside of third positioning frame, the recycling cavity is set, and the recycling cleaning liquid is circulated and transported to the liquid storage cavity by circulation pipe, realize the circulation use of cleaning liquid.

Description

Technical Field

[0001] This utility model relates to the field of chip cleaning technology, and in particular to a pretreatment device for cleaning the surface of a memory chip. Background Technology

[0002] With the rapid development of the semiconductor industry, the manufacturing process of memory chips is becoming increasingly complex, and the requirements for the cleanliness of the chip surface are also becoming higher. Surface cleaning is a crucial step in the chip manufacturing process, which directly affects the chip's performance and reliability. However, existing chip surface cleaning technologies have some shortcomings, such as low cleaning efficiency, serious waste of cleaning fluid, and incomplete cleaning.

[0003] To address the above issues, a surface cleaning pretreatment device for memory chips needs to be designed to overcome these problems. Utility Model Content

[0004] The main objective of this invention is to provide a surface cleaning and pretreatment device for memory chips, which can effectively solve the problems in the background art.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows: A pre-treatment device for cleaning the surface of a memory chip includes a processing table and an adjustment frame, wherein a cleaning processing component is provided at one end of the adjustment frame. The cleaning assembly includes an adjusting block disposed on the inner side of the adjusting frame. A rack is connected to one side of the adjusting block. A locking seat is connected to the end of the adjusting block away from the rack. A fixing block is connected to the end of the locking seat away from the adjusting block. A second positioning frame and a third positioning frame are respectively connected to the end of the fixing block away from the adjusting block. A liquid storage tube is connected to the top of the third positioning frame. A liquid storage chamber is connected to the end of the third positioning frame near the fixing block. Multiple spray nozzles are connected to the bottom of the liquid storage tube. A filter screen is connected to the bottom of the inner side of the third positioning frame. A recovery chamber is connected to the end of the third positioning frame away from the liquid storage chamber. A circulation pipe is connected to the top of the recovery chamber.

[0006] As a preferred embodiment of this utility model, a buffer tube is connected to the top of the second positioning frame, and multiple air vents are connected to the bottom of the buffer tube. A fan is connected to the end of the second positioning frame near the locking seat. A first positioning frame is connected to one side of the adjusting frame. A clamping plate is connected to the top inside the first positioning frame. A gear is connected to the end of the rack away from the adjusting block. Limiting discs are connected to both the upper and lower sides of the gear through connecting rods. A driven gear is connected to the outer wall of the gear. A limiting disc is connected to the end of the driven gear away from the gear. A coupling is connected to one end of the limiting disc. A drive motor is connected to one end of the coupling. A limiting block is connected to the bottom of the limiting disc near the driven gear.

[0007] As a preferred embodiment of this utility model, the two adjusting blocks are slidably connected to the inner side of the adjusting frame, the two adjusting blocks are rotatably connected to the two locking seats, the two locking seats are threadedly fixedly connected to the fixing block, and the two fixing blocks are respectively fixedly connected to the second positioning frame and the third positioning frame.

[0008] As a preferred embodiment of this utility model, the liquid storage pipe is rotatably connected to the third positioning frame via a delivery pipe, the liquid storage pipe is rotatably connected to a plurality of spray nozzles, and the filter screen is snapped into the bottom of the inner side of the third positioning frame.

[0009] In a preferred embodiment of this utility model, the recovery chamber is connected to one end of the third positioning frame via a water outlet pipe, the recovery chamber is rotatably connected to the circulation pipe, and the end of the circulation pipe away from the recovery chamber is connected to the top of the liquid storage chamber. In a preferred embodiment of this utility model, the clamping plate is connected to the first positioning frame via fastening bolts, the rack and the gear mesh with each other, and the gear and the two limiting discs are rotatably connected via connecting rods.

[0010] In a preferred embodiment of this utility model, the drive motor is connected to a drive gear via a coupling, the drive gear meshes with the driven gear of the coupling, and the driven gear meshes with the outer wall of the gear. Beneficial effects

[0011] Compared with the prior art, the present invention has the following beneficial effects: This memory chip surface cleaning pretreatment device uses a coupling and a limiting plate to mesh with a driven gear for rotation. The driven gear meshes with the gear, causing the rack to move linearly within the adjusting frame, thus adjusting the positions of the second and third positioning frames. A locking seat fixes the second and third positioning frames to one side of two adjusting blocks. The first positioning frame uses adjusting bolts to adjust the distance between the clamping plate and the bottom of the inner side of the first positioning frame to clamp the chip. A fan blows air through multiple air outlets into the chip within the second positioning frame to dry the sprayed chip. A liquid storage chamber sprays cleaning fluid onto the chip through multiple spray nozzles at the bottom of the storage pipe, cleaning its surface. A filter screen filters and collects the cleaned liquid into the third positioning frame. A recovery chamber circulates the recovered cleaning fluid back to the storage chamber through a circulation pipe, enabling the recycling of the cleaning fluid. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the gear mounting structure of this utility model; Figure 3 This is a schematic diagram of the second and third positioning frames of this utility model; Figure 4 This is a schematic diagram of the liquid storage tube and buffer tube structure of this utility model.

[0013] In the diagram: 1. Processing table; 2. Adjusting frame; 3. Cleaning processing component; 4. Gear; 5. Limiting block; 6. Limiting disc; 7. Driven gear; 8. Driving gear; 9. Coupling; 10. Drive motor; 301. Adjusting block; 302. Rack; 303. First positioning frame; 304. Clamping plate; 305. Locking seat; 306. Fixing block; 307. Second positioning frame; 308. Third positioning frame; 309. Buffer tube; 310. Fan; 311. Air outlet; 312. Liquid storage tube; 313. Spray nozzle; 314. Filter screen; 315. Liquid storage chamber; 316. Recovery chamber; 317. Circulation tube. Detailed Implementation

[0014] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0015] like Figures 1-4 As shown, a surface cleaning pretreatment device for memory chips includes a processing table 1 and an adjustment frame 2, with a cleaning processing component 3 disposed at one end of the adjustment frame 2. The cleaning component 3 includes an adjusting block 301 disposed on the inner side of the adjusting frame 2. A rack 302 is connected to one side of the adjusting block 301. A locking seat 305 is connected to the end of the adjusting block 301 away from the rack 302. A fixing block 306 is connected to the end of the locking seat 305 away from the adjusting block 301. A second positioning frame 307 and a third positioning frame 308 are respectively connected to the end of the fixing block 306 away from the adjusting block 301. A liquid storage tube 312 is connected to the top of the third positioning frame 308. A liquid storage chamber 315 is connected to the end of the third positioning frame 308 near the fixing block 306. Multiple spray nozzles 313 are connected to the bottom of the liquid storage tube 312. A filter screen plate 314 is connected to the bottom of the inner side of the third positioning frame 308. A recovery chamber 316 is connected to the end of the third positioning frame 308 away from the liquid storage chamber 315. A circulation pipe 317 is connected to the top of the recovery chamber 316. The top of the second positioning frame 307 is connected to a buffer tube 309, and the bottom of the buffer tube 309 is connected to multiple air inlets 311. The end of the second positioning frame 307 near the locking seat 305 is connected to a fan 310. One side of the adjusting frame 2 is connected to the first positioning frame 303. The top of the inside of the first positioning frame 303 is connected to a clamping plate 304. The end of the rack 302 away from the adjusting block 301 is connected to a gear 4. Both the upper and lower sides of the gear 4 are connected to a limit plate 6 through a connecting rod. The outer wall of the gear 4 is connected to a driven gear 7. The end of the driven gear 7 away from the gear 4 is connected to the limit plate 6. One end of the limit plate 6 is connected to a coupling 9. One end of the coupling 9 is connected to a drive motor 10. The bottom of the limit plate 6 near the driven gear 7 is connected to a limit block 5. Two adjusting blocks 301 are slidably connected to the inner side of the adjusting frame 2. The two adjusting blocks 301 are rotatably connected to two locking seats 305. The two locking seats 305 are threadedly fixed to the fixing blocks 306. The two fixing blocks 306 are respectively fixedly connected to the second positioning frame 307 and the third positioning frame 308. The liquid storage pipe 312 is rotatably connected to the third positioning frame 308 via a delivery pipe. The liquid storage pipe 312 is rotatably connected to multiple spray nozzles 313. The filter screen 314 is snapped onto the bottom of the inner side of the third positioning frame 308. The recovery chamber 316 is connected to the third positioning frame 308 via a water outlet pipe. One end of the positioning frame 308 is connected to the recovery chamber 316 and the circulation pipe 317. The end of the circulation pipe 317 away from the recovery chamber 316 is connected to the top of the liquid storage chamber 315 as a preferred embodiment of this utility model. The clamping plate 304 is connected to the first positioning frame 303 by fastening bolts. The rack 302 meshes with the gear 4. The gear 4 is rotatably connected to the two limiting discs 6 by connecting rods. The drive motor 10 is connected to the drive gear 8 through the coupling 9. The drive gear 8 meshes with the driven gear 7 of the coupling 9. The driven gear 7 meshes with the outer wall of the gear 4. The memory chip is placed in the first positioning frame 303, and the position of the clamping plate 304 is adjusted by adjusting bolts to firmly clamp the chip. The drive motor 10 is started, which drives the drive gear 8 to rotate through the coupling 9. The drive gear 8 meshes with the driven gear 7, causing the driven gear 7 to rotate. The outer wall of the driven gear 7 meshes with the gear 4, causing the gear 4 to rotate. The gear 4 meshes with the rack 302, causing the rack 302 to move linearly on the inner side of the adjusting frame 2. The movement of the rack 302 causes the adjusting block 301 to move, which in turn causes the locking seat 305 and the fixing block 306 to move. The movement of the fixing block 306 causes the second positioning frame 307 and the third positioning frame 308 to move. When the positions are adjusted, and the second positioning frame 307 and the third positioning frame 308 are moved to the appropriate positions, the cleaning fluid in the liquid storage chamber 315 is sprayed onto the chip surface through multiple spray nozzles 313 at the bottom of the liquid storage pipe 312 to perform cleaning. After the chip surface is sprayed with cleaning fluid, the fan 310 is started, and the chip in the second positioning frame 307 is blown through the air outlet 311 to dry the cleaning fluid on the chip surface. The cleaned liquid is filtered through the filter screen plate 314, and the filtered cleaning fluid is collected inside the third positioning frame 308. The recovery chamber 316 transports the recovered cleaning fluid back to the liquid storage chamber 315 through the circulation pipe 317 to realize the recycling of the cleaning fluid.

[0016] It should be noted that this utility model is a pre-treatment device for cleaning the surface of a memory chip. In use, firstly, the memory chip is placed inside the first positioning frame 303. The distance between the clamping plate 304 and the bottom of the inner side of the first positioning frame 303 is adjusted using adjusting bolts to ensure the chip is firmly clamped within the first positioning frame 303, preparing for subsequent cleaning work. Then, the drive motor 10 is started, driving the drive gear 8 to rotate via the coupling 9. The drive gear 8 meshes with the driven gear 7, causing the driven gear 7 to rotate. The outer wall of the driven gear 7 meshes with the gear 4, causing the gear 4 to rotate. The gear 4 meshes with the rack 302, causing the rack 302 to move linearly along the inner side of the adjusting frame 2. The movement of the rack 302 moves the adjusting block 301, which in turn moves the locking seat 305 and the fixing block 306. The movement of the fixed block 306 adjusts the positions of the second positioning frame 307 and the third positioning frame 308. When the second positioning frame 307 and the third positioning frame 308 move to the appropriate position, the cleaning fluid in the liquid storage chamber 315 is sprayed onto the chip surface through multiple spray nozzles 313 at the bottom of the liquid storage pipe 312 for cleaning. After the chip surface is sprayed with cleaning fluid, the fan 310 is started. The fan 310 blows air onto the chip in the second positioning frame 307 through multiple air vents 311 to dry the cleaning fluid on the chip surface. The cleaned liquid is filtered through the filter plate 314 and the filtered cleaning fluid is collected inside the third positioning frame 308. The recovery chamber 316 transports the recovered cleaning fluid back to the liquid storage chamber 315 through the circulation pipe 317 to realize the recycling of the cleaning fluid and reduce waste.

[0017] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A surface cleaning pretreatment device for memory chips, comprising a processing stage (1) and an adjustment frame (2), characterized in that: A cleaning component (3) is provided at one end of the adjustment frame (2); The cleaning component (3) includes an adjusting block (301) disposed on the inner side of the adjusting frame (2). A rack (302) is connected to one side of the adjusting block (301). A locking seat (305) is connected to one end of the adjusting block (301) away from the rack (302). A fixing block (306) is connected to one end of the locking seat (305) away from the adjusting block (301). A second positioning frame (307) and a third positioning frame (308) are respectively connected to one end of the fixing block (306) away from the adjusting block (301). The top of the third positioning frame (308) is connected to a liquid storage pipe (312), and the end of the third positioning frame (308) near the fixed block (306) is connected to a liquid storage chamber (315). The bottom of the liquid storage pipe (312) is connected to multiple spray nozzles (313). The bottom of the inner side of the third positioning frame (308) is connected to a filter screen plate (314). The end of the third positioning frame (308) away from the liquid storage chamber (315) is connected to a recovery chamber (316), and the top of the recovery chamber (316) is connected to a circulation pipe (317).

2. The memory chip surface cleaning pretreatment device according to claim 1, characterized in that: The top of the second positioning frame (307) is connected to a buffer tube (309), and the bottom of the buffer tube (309) is connected to multiple air inlets (311). A fan (310) is connected to one end of the second positioning frame (307) near the locking seat (305). A first positioning frame (303) is connected to one side of the adjusting frame (2). A clamping plate (304) is connected to the top inside the first positioning frame (303). The rack (302) is located away from the adjusting block (301). One end is connected to a gear (4), and the upper and lower sides of the gear (4) are connected to a limiting disk (6) via a connecting rod. The outer wall of the gear (4) is connected to a driven gear (7), and the end of the driven gear (7) away from the gear (4) is connected to the limiting disk (6). One end of the limiting disk (6) is connected to a coupling (9), and one end of the coupling (9) is connected to a drive motor (10). The bottom of the limiting disk (6) near the driven gear (7) is connected to a limiting block (5).

3. The memory chip surface cleaning pretreatment device according to claim 1, characterized in that: The two adjusting blocks (301) are slidably connected to the inner side of the adjusting frame (2), the two adjusting blocks (301) are rotatably connected to the two locking seats (305), the two locking seats (305) are threadedly fixedly connected to the fixing block (306), and the two fixing blocks (306) are respectively fixedly connected to the second positioning frame (307) and the third positioning frame (308).

4. The memory chip surface cleaning pretreatment device according to claim 1, characterized in that: The liquid storage pipe (312) is rotatably connected to the third positioning frame (308) through the delivery pipe. The liquid storage pipe (312) is rotatably connected to multiple spray nozzles (313). The filter screen (314) is snapped into the bottom of the inner side of the third positioning frame (308).

5. The memory chip surface cleaning pretreatment apparatus according to claim 1, characterized in that: The recovery chamber (316) is connected to one end of the third positioning frame (308) through a water outlet pipe. The recovery chamber (316) is rotatably connected to the circulation pipe (317). The end of the circulation pipe (317) away from the recovery chamber (316) is connected to the top of the liquid storage chamber (315).

6. The memory chip surface cleaning pretreatment apparatus according to claim 2, characterized in that: The clamping plate (304) is connected to the first positioning frame (303) by fastening bolts, the rack (302) meshes with the gear (4), and the gear (4) is rotatably connected to the two limiting discs (6) by connecting rods.

7. The memory chip surface cleaning pretreatment device according to claim 2, characterized in that: The drive motor (10) is connected to the drive gear (8) via the coupling (9). The drive gear (8) meshes with the driven gear (7) of the coupling (9). The driven gear (7) meshes with the outer wall of the gear (4).

Images