An apparatus and exhaust system for treating buildup of byproducts in a foreline

Abstract

The utility model provides a kind of device and exhaust system of processing internal accumulation by-product of foreline, wherein device includes foreline, by-product scraping mechanism, driving mechanism and collection box, foreline includes first pipeline, second pipeline and third pipeline, first pipeline includes pipeline main body part and pipeline connecting part, pipeline connecting part is coaxially integrally arranged in the lower end of pipeline main body part, by-product scraping mechanism is arranged in pipeline main body part, and is driven connection with driving mechanism;Collection box is communicated at the bottom of pipeline connecting part;Second pipeline is communicated at the outside of pipeline connecting part, third pipeline is communicated with second pipeline and collection box respectively;By-product scraping mechanism can scrape by-product on the inner wall of pipeline main body part under the driving of driving mechanism, and collection box collects scraped by-product down.Therefore, the gas flow cross section in foreline is guaranteed, and then the gas flow capacity of the rear end of molecular pump and the capacity of exhaust system are guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to an apparatus and exhaust system for treating by-products accumulated in the front-end pipeline. Background Technology

[0002] In semiconductor dry etching processes, the etching reaction generates a large number of byproducts. These byproducts need to be extracted in a timely manner by a molecular pump to ensure stable process operation. However, when the byproducts are discharged from the molecular pump and enter the pre-line pipeline, they are affected by the sudden changes in temperature and pressure within the pre-line pipeline, and gradually accumulate on the inner wall of the pipeline. Long-term accumulation will reduce the gas flow cross-section within the pipeline, decrease the gas flow capacity downstream of the molecular pump, increase the workload of the molecular pump, and consequently reduce the capacity of the exhaust system. Utility Model Content

[0003] To address the aforementioned technical problems, one embodiment of this utility model provides an apparatus for processing accumulated by-products in a pre-pipeline, comprising a pre-pipeline, a by-product scraping mechanism, a driving mechanism, and a collection box. The pre-pipeline includes a first pipe, a second pipe, and a third pipe. The first pipe includes a pipe body and a pipe connection portion, the pipe connection portion being coaxially and integrally disposed at the lower end of the pipe body. The by-product scraping mechanism is disposed within the pipe body and is drivenly connected to the driving mechanism. The collection box communicates with the bottom of the pipe connection portion. The second pipe communicates with the outside of the pipe connection portion. The third pipe communicates with both the second pipe and the collection box. The by-product scraping mechanism, driven by the driving mechanism, scrapes the by-products on the inner wall of the pipe body, and the collection box collects the scraped by-products.

[0004] Optionally, the collection box is detachably connected to the pipe connection part and the third pipe, respectively. The lower end of the pipe connection part is provided with a first isolation valve, and the third pipe is provided with a second isolation valve.

[0005] Optionally, the pipe wall of the main body of the pipe is a double-layered pipe wall, which includes an outer pipe wall and an inner pipe wall spaced apart, forming a closed coolant channel between the outer pipe wall and the inner pipe wall, and the outer pipe wall is provided with a coolant inlet and a coolant outlet.

[0006] Optionally, the coolant inlet is located at the lower end of the outer pipe wall, the coolant outlet is located at the upper end of the outer pipe wall, and the coolant inlet and the coolant outlet are located on two opposite sides of the outer pipe wall.

[0007] Optionally, an installation port is provided on the pipe wall of the pipe connection, and the drive mechanism is sealed and installed on the installation port.

[0008] Optionally, the byproduct scraping mechanism includes a rotating bracket and at least one scraper, the scraper being mounted on the rotating bracket along the axial direction of the main body of the pipe, with the blade of the scraper facing the inner wall of the main body of the pipe; the rotating bracket is drivenly connected to the driving mechanism, and the rotating bracket is capable of rotating under the drive of the driving mechanism.

[0009] Optionally, the inner walls of the upper and lower ends of the main body of the pipe are provided with annular guide grooves. The rotating bracket includes a central shaft and an upper mounting end and a lower mounting end fixedly disposed at the upper and lower ends of the central shaft. The upper mounting end and the lower mounting end each have multiple equidistant connecting parts connected to the central shaft. The upper and lower ends of any scraper are respectively connected to the ends of the connecting parts of the upper mounting end and the lower mounting end that are away from the central shaft. The connecting parts of the upper mounting end and the lower mounting end are respectively provided with guide wheels that can rotate radially along the guide groove.

[0010] Optionally, the lower end of the central shaft is further provided with a downwardly extending section, the extension section being located below the lower mounting end, and a drive gear ring being fixedly provided at the lower end of the extension section, the drive gear ring being drivenly connected to the drive mechanism.

[0011] Optionally, the distance between the scraper and the inner wall of the pipe body is 0-1 mm.

[0012] Another embodiment of the present invention provides an exhaust system, including a molecular pump, a vacuum pump and the above-described device, wherein the upper end of the main body of the pipe is connected to the exhaust end of the molecular pump, and the second pipe is connected to the suction end of the vacuum pump.

[0013] Compared with the prior art, the technical solution of this utility model embodiment has the following beneficial effects: This invention incorporates a byproduct scraping mechanism within the main body of the upstream pipeline to scrape away accumulated byproducts and collect them in a collection box. Furthermore, the pipeline body is designed with double-walled sections, forming a closed coolant channel between them. This cooling of the pipeline body accelerates byproduct accumulation, which is then centrally processed by the scraping mechanism. This design ensures adequate gas flow cross-section within the upstream pipeline, thereby guaranteeing the gas flow capacity and exhaust system capacity downstream of the molecular pump. Moreover, since the scraping of byproducts from the upstream pipeline does not require machine shutdown, it ensures extended equipment uptime. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 A structural diagram of an apparatus for treating accumulated by-products in a pre-pipeline according to an embodiment of the present invention; Figure 2 A diagram illustrating the working state of an apparatus for treating accumulated byproducts in a pre-pipeline, according to an embodiment of this utility model. Figure 3 A cross-sectional view of the main body of the pipe provided in an embodiment of this utility model; Figure 4 A structural diagram of a byproduct scraping mechanism provided in an embodiment of this utility model; Explanation of reference numerals in the attached figures: 1--First Pipeline; 101 -- Pipeline body section; 10101 -- Coolant outlet; 10102 -- Outer pipe wall; 10103 -- Coolant passage; 10104 -- Inner pipe wall; 10105 -- Coolant inlet; 102 -- Pipe connection; 2--Second pipe; 3--Third pipeline; 4--Second isolation valve; 5--Collection Box; 6--First isolation valve; 7--Drive mechanism; 8--Byproduct scraping mechanism; 801 -- Upper mounting end; 80101--Upper connecting part; 802 -- Guide wheel; 803 -- Drive gear ring; 804--Extension; 805 -- Lower installation end; 80501--Lower connecting part; 806 -- Central axis; 807 -- Scraper. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] The terms "first," "second," "third," "fourth," etc. (if present) in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that embodiments of the utility model described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus. The terms "above" and "over," and any variations thereof, are intended to describe positional relationships and do not imply direct contact between the described objects.

[0018] As described in the background art, in the semiconductor dry etching process, the etching reaction generates a large number of byproducts. When the byproducts are discharged by the molecular pump and enter the front-end pipeline, they are affected by the sudden changes in temperature and pressure in the front-end pipeline and will gradually accumulate on the inner wall of the pipeline. Long-term accumulation will reduce the gas flow cross section in the pipeline, reduce the gas flow capacity at the downstream end of the molecular pump, increase the workload of the molecular pump, and thus reduce the capacity of the exhaust system.

[0019] To address the aforementioned technical issues, a common practice is to heat the upstream pipeline by wrapping it with a heating tape to reduce the adhesion of byproducts. However, this method presents several problems: 1. Heating can only slow down the adhesion of by-products in the pipeline. With long-term accumulation, it will still reduce the gas flow cross-section. Therefore, it cannot fundamentally solve the problem of by-product accumulation in the pipeline. 2. Byproducts accumulated in the pipeline may be carried back into the reaction chamber due to the back pressure of the reaction chamber, contaminating the wafer surface and leading to an increase in product defect rate. 3. When too much by-product accumulates in the pipeline, the machine needs to be stopped, the upstream pipeline needs to be disassembled and cleaned, which will significantly shorten the normal operating time of the equipment. 4. Long-term operation of the heating belt poses safety hazards such as leakage and overheating.

[0020] To solve the above technical problems, please refer to Figure 1 and Figure 2 This utility model provides an apparatus for processing accumulated by-products in a pre-pipeline, including a pre-pipeline, a by-product scraping mechanism 8, a driving mechanism 7, and a collection box 5. The pre-pipeline includes a first pipe 1, a second pipe 2, and a third pipe 3. The first pipe 1 includes a pipe body 101 and a pipe connection 102. The pipe connection 102 is coaxially and integrally disposed at the lower end of the pipe body 101. The by-product scraping mechanism 8 is disposed inside the pipe body 101 and is drivenly connected to the driving mechanism 7. The collection box 5 is connected to the bottom of the pipe connection 102. The second pipe 2 is connected to the outside of the pipe connection 102. The third pipe 3 is connected to both the second pipe 2 and the collection box 5. The by-product scraping mechanism 8 can scrape the by-products on the inner wall of the pipe body 101 under the drive of the driving mechanism 7, and the collection box 5 collects the scraped by-products.

[0021] In this embodiment, by setting a byproduct scraping mechanism 8 in the pre-stage pipeline, the byproducts accumulated in the pre-stage pipeline can be scraped off and collected in the collection box 5. Therefore, the gas flow cross section in the pre-stage pipeline is guaranteed, thereby ensuring the gas flow capacity and exhaust system capacity of the downstream of the molecular pump.

[0022] The device for processing by-products accumulated in the pre-stage pipeline provided in this embodiment can be applied to etching equipment. The upper end of the main body 101 of the pipeline is connected to the exhaust end of the molecular pump below the process chamber of the etching equipment, and the second pipeline 2 is connected to the suction end of the vacuum pump. It can be used to remove by-products in the etching process from the molecular pump through the main body of the pipeline to the second pipeline 2 and then to the vacuum pump.

[0023] To facilitate the cleaning of byproducts within the collection box 5, in one embodiment, the collection box 5 is detachably connected to both the pipe connection 102 and the third pipe 3. The lower end of the pipe connection 102 is equipped with a first isolation valve 6, and the third pipe 3 is equipped with a second isolation valve 4. The working principle of this embodiment is as follows: First, the first isolation valve 6 is closed, and the second isolation valve 4 located on the third pipe 3 is opened. A vacuum pump can be installed at the end of the second pipe 2 furthest from the pipe connection 102. By evacuating the second pipe 2, and with the second isolation valve 4 open, the third pipe 3 is connected to the second pipe 2, and is also simultaneously evacuated by the vacuum pump. This reduces the pressure inside the collection box 5, preventing damage to the molecular pump caused by an excessive pressure difference between the inlet end of the first isolation valve 6 and the outlet end of the collection box 5 when the first isolation valve 6 is subsequently opened. Next, the first isolation valve 6 is opened, the drive mechanism 7 is activated, and the by-product scraping mechanism 8 is activated to scrape the by-products on the inner wall of the main body of the pipe 101. The scraped by-products fall into the collection box 5 by gravity. After the by-products on the inner wall of the main body of the pipe 101 are scraped, the drive mechanism 7 stops working, the first isolation valve 6 and the second isolation valve 4 are closed, the collection box 5 is removed and the by-products in the box are removed, and then the collection box 5 is put back.

[0024] In this embodiment, the collection box 5 is a box structure with an open top. As a specific implementation, the upper opening of the collection box 5 is detachably and sealed to the bottom of the pipe connection part 102 through a first clamp (not shown in the figure); the side of the collection box 5 is provided with a connection port for connecting to the third pipe 3, and the connection port is detachably and sealed to the third pipe 3 through a second clamp (not shown in the figure).

[0025] As one embodiment, the gas discharged from the molecular pump can be rapidly cooled within the pipe body 101 by cooling the pipe wall, thereby accelerating the accumulation of by-products on the inner wall of the pipe body 101. This facilitates centralized treatment of the by-products. For details, please refer to... Figure 3 The pipe body 101 has a double-layered wall, comprising an outer wall 10102 and an inner wall 10104 spaced apart. A closed coolant channel 10103 is formed between the outer wall 10102 and the inner wall 10104. The outer wall 10102 has a coolant inlet 10105 and a coolant outlet 10101. The specific method for cooling the pipe wall of the pipe body 101 using coolant is as follows: coolant enters the coolant channel 10103 from the coolant inlet 10105 and then exits from the coolant outlet 10101, thereby cooling the pipe wall of the pipe body 101.

[0026] Furthermore, the coolant inlet 10105 is located at the lower end of the outer pipe wall 10102, and the coolant outlet 10101 is located at the upper end of the outer pipe wall 10102. The coolant inlet 10105 and the coolant outlet 10101 are located on two opposite sides of the outer pipe wall 10102, in order to ensure that the coolant introduced can be distributed throughout the pipe wall of the entire pipe body 101.

[0027] In one specific implementation, the coolant is cooling water.

[0028] This utility model does not impose specific restrictions on the installation position of the drive mechanism 7. The drive mechanism 7 can be installed inside the pipe, outside the pipe, or on the pipe. As one embodiment, an installation port is provided on the pipe wall of the pipe connection 102, and the drive mechanism 7 is sealed and installed on the installation port. Therefore, the drive mechanism 7 can achieve the purpose of driving the by-product scraping mechanism 8 without occupying space inside the pipe.

[0029] This invention does not limit the specific structure of the by-product scraping mechanism 8, as long as it can scrape away the by-products accumulated on the inner wall of the main pipe body 101. As one embodiment, please refer to... Figure 4 The by-product scraping mechanism 8 includes a rotating bracket and at least one scraper 807. The scraper 807 is mounted on the rotating bracket along the axial direction of the main body 101 of the pipe, and the blade of the scraper 807 faces the inner wall of the main body 101 of the pipe. The rotating bracket is driven by the driving mechanism 7 and can rotate under the drive of the driving mechanism 7, thereby driving the scraper 807 to rotate, so as to scrape off the by-products accumulated on the inner wall of the main body 101 of the pipe.

[0030] As one embodiment, an annular guide groove is provided on the inner wall of the upper and / or lower end of the main body of the pipe 101, and a guide wheel 802 corresponding to the guide groove is provided on the rotating bracket. The guide wheel 802 can roll radially along the guide groove, so as to ensure that the rotating bracket can move along a specific rotation trajectory and ensure the accuracy and stability of its movement.

[0031] In one specific embodiment, annular guide grooves are provided on the inner walls of both the upper and lower ends of the pipe body 101. The rotating support includes a central shaft 806 and an upper mounting end 801 and a lower mounting end 805 fixedly disposed at the upper and lower ends of the central shaft 806. The central shaft 806 is coaxial with the pipe body 101. The upper mounting end 801 and the lower mounting end 805 each have multiple equidistant connecting parts connected to the central shaft 806. The upper and lower ends of any scraper 807 are respectively connected to the ends of the connecting parts of the upper mounting end 801 and the lower mounting end 805 away from the central shaft 806. Guide wheels 802 are rotatably disposed on the connecting parts of the upper mounting end 801 and the lower mounting end 805, and the guide wheels 802 can roll radially along the guide groove. Specifically, the upper mounting end 801 and the lower mounting end 805 are centrally connected to the central axis 806. The upper mounting end 801 has multiple outwardly radiating, spaced-apart upper connecting portions 80101, and the lower mounting end 805 has multiple outwardly radiating, spaced-apart lower connecting portions 80501. The upper mounting end 801 and the lower mounting end 805 are vertically symmetrical. The end of each upper connecting portion 80101 of the upper mounting end 801 and each lower connecting portion 80501 of the lower mounting end 805, away from the central axis 806, is connected to the upper and lower ends of the scraper 807, respectively. Preferably, the upper mounting end 801 has three upper connecting portions 80101, which are triangular in shape and are equidistantly distributed; the lower mounting end 805 has three lower connecting portions 80501, which are triangular in shape and are equidistantly distributed. Each corresponding upper connecting part 80101 and lower connecting part 80501 is connected to a scraper 807. Correspondingly, each upper connecting part 80101 of the upper mounting end 801 is provided with a guide wheel 802 on the upper surface of its tail end away from the center, and each lower connecting part 80501 of the lower mounting end 805 is provided with a guide wheel 802 on the lower surface of its tail end away from the center.

[0032] In one specific embodiment, the lower end of the central shaft 806 is further provided with a downwardly extending extension section 804, the extension section 804 being located below the lower mounting end 805, and a drive gear ring 803 being fixedly provided at the lower end of the extension section 804, the drive gear ring 803 being drivenly connected to the drive mechanism 7.

[0033] This embodiment does not limit the specific type of the drive mechanism 7, such as a motor, cylinder, hydraulic cylinder, etc. As a specific embodiment, the drive mechanism 7 is a motor, and the output shaft of the motor is provided with a gear that meshes with the drive gear ring 803. When the motor is working, the output shaft rotates and drives the gear to rotate, which in turn drives the drive gear ring 803 to rotate.

[0034] In one specific embodiment, the distance between the scraper 807 and the inner wall of the pipe body 101 is 0-1mm, the purpose of which is to ensure that the scraper 807 can scrape off as much of the by-products accumulated on the inner wall of the pipe body 101 as possible.

[0035] In summary, by setting a by-product scraping mechanism 8 in the pre-stage pipeline, this utility model can scrape off the by-products accumulated in the pre-stage pipeline and collect them in the collection box 5. Therefore, it ensures the gas flow cross-section in the pre-stage pipeline, thereby ensuring the gas flow capacity and exhaust system capacity of the downstream of the molecular pump.

[0036] Furthermore, the collection box 5 is detachable to facilitate the cleaning of byproducts inside. Since the interior of the pre-pipeline is a vacuum environment and the exterior is an atmospheric environment, to prevent external atmosphere from entering the pre-pipeline after the collection box 5 is removed, a first isolation valve 6 is installed at the lower end of the pipe connection 102, and a second isolation valve 4 is installed on the third pipe 3. The first isolation valve 6 and the second isolation valve 4 isolate the vacuum section (inside the first pipe 1, the second pipe 2, and the third pipe 3) from the atmospheric environment, preventing byproducts inside the collection box 5 from being blown into the pre-pipeline due to pressure changes when the collection box 5 is removed.

[0037] Furthermore, the pipe wall of the main body 101 is a double-layered pipe wall, which includes an outer pipe wall 10102 and an inner pipe wall 10104 spaced apart. A closed coolant channel 10103 is formed between the outer pipe wall 10102 and the inner pipe wall 10104. The outer pipe wall 10102 is provided with a coolant inlet 10105 and a coolant outlet 10101. The coolant enters the coolant channel 10103 from the coolant inlet 10105 and is discharged from the coolant outlet 10101, thereby cooling the pipe wall of the main body 101. This allows the gas discharged by the molecular pump to cool down rapidly in the main body 101, accelerating the accumulation of by-products on the inner wall of the main body 101. The purpose is to facilitate the centralized treatment of by-products by the by-product scraping mechanism 8.

[0038] Furthermore, since the machine does not need to be stopped when the by-product scraping mechanism 8 scrapes away the by-products accumulated in the upstream pipeline, the uptime of the equipment is guaranteed.

[0039] Another embodiment of the present invention provides an exhaust system, including a molecular pump, a vacuum pump, and the above-mentioned device for treating by-products accumulated in the pre-treatment pipeline. The upper end of the main body 101 of the pipeline is connected to the exhaust end of the molecular pump, and the second pipeline 2 is connected to the suction end of the vacuum pump.

[0040] The exhaust system provided in this embodiment can be applied to etching equipment. The molecular pump is connected below the process chamber of the etching equipment and can be used to remove byproducts from the process chamber during the etching process from the molecular pump, through the main pipe body 101, to the second pipe 2, and then to the vacuum pump. The exhaust system provided in this embodiment can also be applied to other semiconductor equipment, and there are no limitations on its application here.

[0041] The structure, working principle, specific implementation method and beneficial effects of the exhaust system in this utility model embodiment can be found in the device for treating the accumulated by-products in the pre-pipeline in this utility model embodiment, and will not be repeated here.

[0042] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. An apparatus for treating accumulated by-products in upstream pipelines, characterized in that, The system includes a pre-pipeline, a by-product scraping mechanism, a drive mechanism, and a collection box. The pre-pipeline includes a first pipe, a second pipe, and a third pipe. The first pipe includes a main pipe body and a connecting pipe body. The connecting pipe body is coaxially and integrally disposed at the lower end of the main pipe body. The by-product scraping mechanism is disposed inside the main pipe body and is driven and connected to the drive mechanism. The collection box is connected to the bottom of the connecting pipe body. The second pipe is connected to the outside of the connecting pipe body. The third pipe is connected to both the second pipe and the collection box. The by-product scraping mechanism can scrape the by-products on the inner wall of the main pipe body under the drive of the drive mechanism. The collection box collects the scraped by-products.

2. The apparatus according to claim 1, characterized in that, The collection box is detachably connected to the pipe connection part and the third pipe respectively. The lower end of the pipe connection part is provided with a first isolation valve, and the third pipe is provided with a second isolation valve.

3. The apparatus according to claim 1, characterized in that, The pipe body has a double-walled structure, consisting of an outer wall and an inner wall spaced apart. A closed coolant channel is formed between the outer wall and the inner wall. The outer wall has a coolant inlet and a coolant outlet.

4. The apparatus according to claim 3, characterized in that, The coolant inlet is located at the lower end of the outer pipe wall, and the coolant outlet is located at the upper end of the outer pipe wall, with the coolant inlet and the coolant outlet located on opposite sides of the outer pipe wall.

5. The apparatus according to claim 1, characterized in that, An installation port is provided on the pipe wall of the pipe connection part, and the drive mechanism is sealed and installed on the installation port.

6. The apparatus according to claim 1, characterized in that, The byproduct scraping mechanism includes a rotating bracket and at least one scraper. The scraper is mounted on the rotating bracket along the axial direction of the main body of the pipe, with the blade facing the inner wall of the main body of the pipe. The rotating bracket is driven by the driving mechanism and can rotate under the drive of the driving mechanism.

7. The apparatus according to claim 6, characterized in that, The inner walls of the upper and lower ends of the main body of the pipe are provided with annular guide grooves. The rotating bracket includes a central shaft and an upper mounting end and a lower mounting end fixedly disposed at the upper and lower ends of the central shaft. The upper mounting end and the lower mounting end each have multiple equidistant connecting parts connected to the central shaft. The upper and lower ends of any scraper are respectively connected to the ends of the connecting parts of the upper mounting end and the lower mounting end that are away from the central shaft. The connecting parts of the upper mounting end and the lower mounting end are respectively provided with guide wheels that can rotate radially along the guide groove.

8. The apparatus according to claim 7, characterized in that, The lower end of the central shaft is also provided with a downwardly extending section, which is located below the lower mounting end. A drive gear ring is fixedly installed at the lower end of the extension section, and the drive gear ring is drivenly connected to the drive mechanism.

9. The apparatus according to claim 6, characterized in that, The distance between the scraper and the inner wall of the main body of the pipe is 0-1mm.

10. An exhaust system, characterized in that, The device includes a molecular pump, a vacuum pump, and the apparatus according to any one of claims 1 to 9, wherein the upper end of the main body of the pipe is connected to the exhaust end of the molecular pump, and the second pipe is connected to the suction end of the vacuum pump.

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