Semiconductor basket cleaning machine with drying function

Abstract

The utility model provides a semiconductor basket cleaning machine with drying function relates to the field of semiconductor basket, include: ultrasonic cleaning tank is equipped with the basket of placing in ultrasonic cleaning tank, the top of ultrasonic cleaning tank is fixed with the support, the bottom of support is equipped with the air pipe of slidable, the bottom of air pipe is connected with a plurality of blow -head, reciprocating assembly includes two support blocks, two support blocks all fixed settings in the one side of support, the reciprocating screw rod of being connected with air pipe is rotatably connected between two support blocks, the scheme, through setting up by two support blocks, reciprocating screw rod and first drive mechanism constitute reciprocating assembly, and drive and air pipe are connected with the reciprocating assembly, so that air pipe and the plurality of blow -head of bottom intercommunication can reciprocating movement above ultrasonic cleaning tank, ensure that the hot air of emitting from a plurality of blow -head can cycle, scanning formula covers each area of semiconductor basket, the even full drying of semiconductor basket is convenient, improves the drying effect of semiconductor basket.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor flower baskets, and more particularly to a semiconductor flower basket cleaning machine with drying function. Background Technology

[0002] In the semiconductor manufacturing process, the semiconductor basket, as a core tool for carrying precision devices such as wafers and chips, has its surface cleanliness directly affecting the processing quality and yield of the devices.

[0003] In related technologies, traditional semiconductor flower basket cleaning machines mainly consist of a cleaning tank, a spraying device, an ultrasonic generator, and a simple hot air drying component. Traditional hot air drying often uses a single-sided air intake method, resulting in uneven distribution of hot airflow in the cleaning tank. This leads to over-drying in some areas of the flower basket while some areas still retain moisture, which is not conducive to the thorough drying of the flower basket and reduces the drying effect.

[0004] Therefore, it is necessary to provide a semiconductor flower basket cleaning machine with drying function to solve the above problems. Utility Model Content

[0005] To solve the above-mentioned technical problems, this utility model provides a semiconductor flower basket cleaning machine with drying function.

[0006] The semiconductor flower basket cleaning machine with drying function provided by this utility model includes: an ultrasonic cleaning box, in which a flower basket is placed, a bracket is fixed at the top of the ultrasonic cleaning box, and an air duct is slidably provided at the bottom of the bracket, with multiple blowers connected to the bottom of the air duct.

[0007] A reciprocating assembly includes two support blocks, both of which are fixedly mounted on one side of a bracket. A reciprocating screw connected to a duct is rotatably connected between the two support blocks. A first drive motor is fixedly mounted on one side of one of the support blocks, and the output shaft of the first drive motor is fixedly connected to one end of the reciprocating screw.

[0008] A connecting component, which is positioned between the bracket and the duct, is used to restrict the movement of the duct.

[0009] Preferably, the connecting assembly includes two driving blocks, which are respectively fixedly disposed on both sides of the top of the duct. A first slider is fixed on the opposite side of each of the two driving blocks. A first sliding groove is provided on both sides of the bracket. The two first sliders are slidably connected to the two first sliding grooves respectively. One of the driving blocks is threadedly connected to a reciprocating lead screw.

[0010] Preferably, a fan is fixed to one side of the bracket, and the fan and the air duct are connected by a telescopic tube.

[0011] Preferably, the top of the bracket is connected to a lifting frame that is fixed to the flower basket, the flower basket is connected to the ultrasonic cleaning box through a sliding component, and the top of the bracket is provided with a lifting component that drives the lifting frame to move.

[0012] Preferably, the sliding assembly includes two second sliders, which are respectively fixedly disposed on both sides of the flower basket. The inner wall of the ultrasonic cleaning box is provided with second sliding grooves on both sides, and the two second sliders are slidably connected to the two second sliding grooves respectively.

[0013] Preferably, the lifting assembly includes two connecting rods, both of which are hinged to the bottom end of the lifting frame. A third slider is hinged to the bottom end of each of the two connecting rods. A third sliding groove is provided at the top end of the bracket. Both third sliders are slidably connected to the third sliding groove. A bidirectional lead screw that is threadedly connected to the third slider is rotatably connected inside the third sliding groove. A second drive motor is fixed to the inner wall of the third sliding groove. The output shaft of the second drive motor is fixedly connected to one end of the bidirectional lead screw.

[0014] Compared with related technologies, the semiconductor flower basket cleaning machine with drying function provided by this utility model has the following beneficial effects:

[0015] 1. By setting up a reciprocating assembly consisting of two support blocks, a reciprocating lead screw and a first drive motor, and driving the reciprocating assembly connected to the air duct, the air duct and the multiple blowers connected to its bottom end can reciprocate above the ultrasonic cleaning box, ensuring that the hot air sprayed from the multiple blowers can circulate and scan to cover all areas of the semiconductor basket, which facilitates the uniform and thorough drying of the semiconductor basket and improves the drying effect of the semiconductor basket.

[0016] 2. By fixing the lifting frame to the flower basket, the lifting frame moves under the drive of the lifting component, and the sliding component is used to smoothly lift or lower the flower basket, thereby facilitating the rapid cleaning and drying of the semiconductor flower basket and improving the cleaning and drying efficiency of the semiconductor flower basket. Attached Figure Description

[0017] Figure 1 A schematic diagram provided for this utility model;

[0018] Figure 2 This is a cross-sectional schematic diagram of the ultrasonic cleaning box provided by this utility model;

[0019] Figure 3 A schematic diagram of the bracket provided by this utility model;

[0020] Figure 4 Provided by this utility model Figure 3 A magnified view of a portion of point A in the middle.

[0021] The diagram is labeled as follows: 1. Ultrasonic cleaning box; 2. Flower basket placement; 3. Support; 4. Air duct; 5. Air blower head; 6. Reciprocating assembly; 61. Support block; 62. Reciprocating lead screw; 63. First drive motor; 7. Connecting assembly; 71. Drive block; 72. First slider; 73. First slide groove; 8. Fan; 9. Telescopic tube; 10. Lifting frame; 11. Sliding assembly; 111. Second slider; 112. Second slide groove; 12. Lifting assembly; 121. Connecting rod; 122. Third slider; 123. Third slide groove; 124. Bidirectional lead screw; 125. Second drive motor. Detailed Implementation

[0022] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0023] Please refer to the following: Figures 1 to 4 A semiconductor flower basket cleaning machine with drying function includes: an ultrasonic cleaning box 1, a flower basket 2 placed inside the ultrasonic cleaning box 1, a bracket 3 fixed at the top of the ultrasonic cleaning box 1, an air duct 4 slidably provided at the bottom of the bracket 3, and multiple blower heads 5 connected to the bottom of the air duct 4.

[0024] The reciprocating assembly 6 includes two support blocks 61, both of which are fixedly mounted on one side of the bracket 3. A reciprocating screw 62 connected to the air duct 4 is rotatably connected between the two support blocks 61. A first drive motor 63 is fixedly mounted on one side of one of the support blocks 61, and the output shaft of the first drive motor 63 is fixedly connected to one end of the reciprocating screw 62.

[0025] The connecting component 7 is disposed between the bracket 3 and the duct 4 to restrict the movement of the duct 4.

[0026] In this embodiment, firstly, the operator places the semiconductor basket to be cleaned into the placement basket 2. After starting the equipment, the ultrasonic cleaning chamber 1 begins operation, using the ultrasonic cavitation effect to thoroughly clean the semiconductor basket. After the cleaning process is completed, the drying stage begins. First, the placement basket 2 is pulled upwards to the top of the ultrasonic cleaning chamber 1. At this time, the first drive motor 63 is started. The first drive motor 63 drives the reciprocating lead screw 62 fixed at its output shaft end to rotate between the two support blocks 61. Since the air duct 4 is connected to the bracket 3 through the connecting component 7 and its degree of freedom of movement is restricted by the connecting component 7, the air... Driven by the reciprocating screw 62, the tube 4 reciprocates linearly along its axis. During this process, dry hot air supplied by an external hot air source is transported through the tube 4 and evenly blown onto the surface of the semiconductor basket below via multiple blowers 5 connected to its bottom end. Since the tube 4 and its multiple blowers 5 are continuously reciprocating under the drive of the reciprocating assembly 6, rather than remaining stationary, the hot airflow can dynamically and scanningly cover the entire surface and complex internal structure of the semiconductor basket, avoiding the existence of dead airflow corners, facilitating the thorough drying of the semiconductor basket, and improving the drying effect of the semiconductor basket.

[0027] In a further embodiment, such as Figure 4 As shown, the connecting component 7 includes two driving blocks 71, which are fixedly installed on both sides of the top of the air duct 4. A first slider 72 is fixed on the opposite side of each of the two driving blocks 71. A first groove 73 is opened on both sides of the bracket 3. The two first sliders 72 are slidably connected to the two first grooves 73 respectively. One of the driving blocks 71 is threadedly connected to the reciprocating screw 62.

[0028] In this embodiment, by fixing two drive blocks 71 in the connecting component 7 to the top two sides of the air duct 4 respectively, and by sliding the first slider 72 fixed on the two drive blocks 71 with the first slide groove 73 opened on both sides of the bracket 3, and by setting one of the drive blocks 71 to be threadedly connected to the reciprocating screw 62, when the reciprocating screw 62 is driven to rotate by the first drive motor 63, it can be accurately converted into a stable, linear reciprocating motion of the air duct 4 along the direction of the first slide groove 73. This effectively restricts the degree of freedom of the air duct 4 and prevents it from deflecting or shaking during operation, thereby ensuring that the air outlet trajectory of the blower head 5 is stable and reliable and improving the drying uniformity.

[0029] In a further embodiment, such as Figure 3 As shown, a fan 8 is fixed on one side of the bracket 3, and the fan 8 and the air duct 4 are connected by a telescopic pipe 9.

[0030] In this embodiment, the fan 8 is fixed on one side of the bracket 3, and a telescopic pipe 9 is connected between the fan 8 and the air duct 4. This allows the hot drying air generated by the fan 8 to be smoothly introduced into the air duct 4 through the telescopic pipe 9. At the same time, the structural characteristics of the telescopic pipe 9 can adapt to the reciprocating movement of the air duct 4 and freely expand and contract, ensuring the continuity and sealing of the air supply connection. This achieves the effect of providing a continuous and stable hot air source for the drying process without affecting the normal movement of the air duct 4.

[0031] In a further embodiment, such as Figure 2 As shown, the top of the bracket 3 is connected to a lifting frame 10 that is fixed to the flower basket 2. The flower basket 2 is connected to the ultrasonic cleaning box 1 through a sliding component 11. The top of the bracket 3 is provided with a lifting component 12 that drives the lifting frame 10 to move.

[0032] In this embodiment, the lifting frame 10 is fixed to the flower basket 2, so that when the lifting frame 10 moves under the drive of the lifting component 12, the sliding component 11 is used to smoothly lift or lower the flower basket 2, thereby facilitating the rapid cleaning and drying of the semiconductor flower basket and improving the cleaning and drying efficiency of the semiconductor flower basket.

[0033] In a further embodiment, such as Figure 2 As shown, the sliding assembly 11 includes two second sliders 111, which are fixedly disposed on both sides of the flower basket 2. The inner wall of the ultrasonic cleaning box 1 has two second sliding grooves 112 on both sides, and the two second sliders 111 are slidably connected to the two second sliding grooves 112 respectively.

[0034] In this embodiment, by sliding the two second sliders 111 fixed on both sides of the flower basket 2 in the sliding assembly 11 to the two second slide grooves 112 opened on both sides of the inner wall of the ultrasonic cleaning box 1, the lifting frame 10 can smoothly lift or lower the flower basket 2 through the guiding effect of the second sliders 111 and the second slide grooves 112 when it moves under the drive of the lifting assembly 12. This achieves the effect of ensuring that the flower basket 2 moves smoothly and is accurately positioned when entering and leaving the cleaning box, and avoids jamming or tilting.

[0035] In a further embodiment, such as Figure 3 As shown, the lifting assembly 12 includes two connecting rods 121, both of which are hinged to the bottom end of the lifting frame 10. A third slider 122 is hinged to the bottom end of each of the two connecting rods 121. A third slide groove 123 is provided at the top of the bracket 3. Both third sliders 122 are slidably connected to the third slide groove 123. A bidirectional lead screw 124, which is threadedly connected to the third slider 122, is rotatably connected inside the third slide groove 123. A second drive motor 125 is fixed to the inner wall of the third slide groove 123. The output shaft of the second drive motor 125 is fixedly connected to one end of the bidirectional lead screw 124.

[0036] In this embodiment, the third slider 122, which is hinged to the bottom of the two connecting rods 121 in the lifting assembly 12, slides in the third groove 123 opened at the top of the bracket 3. The third slider 122 is threadedly connected to the bidirectional lead screw 124 rotatably connected in the third groove 123, and the bidirectional lead screw 124 is driven to rotate by the second drive motor 125. When the second drive motor 125 is working, it can drive the bidirectional lead screw 124 to rotate, causing the two third sliders 122 to move synchronously towards or away from each other. Thus, the lifting frame 10 and the flower basket 2 fixed thereto are pushed or pulled by the hinged connecting rods 121 to complete the smooth lifting action. This achieves the effect of automatically lifting and lowering the flower basket 2, which facilitates loading and unloading and process connection, and improves the automation level of the equipment.

[0037] The working principle of the semiconductor flower basket cleaning machine with drying function provided by this utility model is as follows:

[0038] First, the operator places the semiconductor basket to be cleaned into the placement basket 2. After starting the equipment, the lifting assembly 12 begins to work. Specifically, the second drive motor 125 starts, driving the bidirectional lead screw 124, whose output shaft is fixed, to rotate within the third slide groove 123. The two third sliders 122, threadedly connected to the bidirectional lead screw 124, then move synchronously in opposite directions or in opposite directions within the third slide groove 123. This, in turn, drives the lifting frame 10 to move smoothly up and down through the two hinged connecting rods 121. Since the lifting frame 10 is fixed to the placement basket 2, and the placement basket 2 is slidably connected to the second slide grooves 112 on both sides of the inner wall of the ultrasonic cleaning chamber 1 via the second sliders 111 fixed on both sides, the placement basket 2 can smoothly descend into the cleaning station within the ultrasonic cleaning chamber 1 under the guidance of the second slide grooves 112, driven by the lifting frame 10. Subsequently, the ultrasonic cleaning chamber 1 starts, using ultrasonic waves to thoroughly clean the semiconductor basket. After the cleaning process is completed, the ultrasonic cleaning stops, and the lifting assembly 12 moves again to lift the placement basket 2. The basket is raised to a suitable draining or drying station, and then the drying stage begins. The fan 8 starts to generate hot air, which is delivered to the air duct 4 through the telescopic pipe 9 and finally blown out by multiple blowers 5 connected to the bottom of the air duct 4. At the same time, the first drive motor 63 of the reciprocating assembly 6 starts, driving the reciprocating screw 62 to rotate between two support blocks 61. Due to the setting of the connecting assembly 7, that is, the two drive blocks 71 are respectively fixed on both sides of the top of the air duct 4. The first slider 72 on the drive block 71 is slidably connected to the first sliding groove 73 on both sides of the bracket 3, and one of the drive blocks 71 is threadedly connected to the reciprocating screw 62, so that the rotational motion of the reciprocating screw 62 is converted into a stable linear reciprocating motion of the air duct 4 along the direction of the first sliding groove 73. During this process, the hot air sprayed from the multiple blowers 5 can dynamically and scanningly cover the entire surface of the basket as the air duct 4 moves back and forth, ensuring that the hot airflow is evenly distributed without dead corners, thereby achieving efficient and uniform drying of the semiconductor basket until the moisture is completely evaporated, completing the entire cleaning and drying process.

[0039] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A semiconductor flower basket cleaning machine with drying function, characterized in that, include: An ultrasonic cleaning box (1) is provided with a flower basket (2) inside the ultrasonic cleaning box (1). A bracket (3) is fixed at the top of the ultrasonic cleaning box (1). A duct (4) is slidably provided at the bottom of the bracket (3). Multiple blowers (5) are connected to the bottom of the duct (4). The reciprocating assembly (6) includes two support blocks (61), both of which are fixedly mounted on one side of the bracket (3). A reciprocating screw (62) connected to the air duct (4) is rotatably connected between the two support blocks (61). A first drive motor (63) is fixedly mounted on one side of one of the support blocks (61). The output shaft of the first drive motor (63) is fixedly connected to one end of the reciprocating screw (62). A connecting component (7) is disposed between the bracket (3) and the duct (4) to restrict the movement of the duct (4).

2. The semiconductor flower basket cleaning machine with drying function according to claim 1, characterized in that, The connecting component (7) includes two drive blocks (71), which are fixedly installed on both sides of the top of the air duct (4). A first slider (72) is fixed on the opposite side of each of the two drive blocks (71). A first groove (73) is provided on both sides of the bracket (3). The two first sliders (72) are slidably connected to the two first grooves (73) respectively. One of the drive blocks (71) is threadedly connected to the reciprocating screw (62).

3. The semiconductor flower basket cleaning machine with drying function according to claim 2, characterized in that, A fan (8) is fixed on one side of the bracket (3), and the fan (8) and the air duct (4) are connected by a telescopic pipe (9).

4. The semiconductor flower basket cleaning machine with drying function according to claim 1, characterized in that, The top of the bracket (3) is connected to a lifting frame (10) that is fixed to the flower basket (2). The flower basket (2) is connected to the ultrasonic cleaning box (1) through a sliding component (11). The top of the bracket (3) is provided with a lifting component (12) that drives the lifting frame (10) to move.

5. The semiconductor flower basket cleaning machine with drying function according to claim 4, characterized in that, The sliding assembly (11) includes two second sliders (111), which are fixedly disposed on both sides of the flower basket (2). The inner walls of the ultrasonic cleaning box (1) are provided with second sliding grooves (112) on both sides, and the two second sliders (111) are slidably connected to the two second sliding grooves (112) respectively.

6. The semiconductor flower basket cleaning machine with drying function according to claim 5, characterized in that, The lifting assembly (12) includes two connecting rods (121), both connecting rods (121) are hinged to the bottom end of the lifting frame (10), and the bottom end of both connecting rods (121) is hinged to a third slider (122). The top end of the bracket (3) is provided with a third slide groove (123), and both third sliders (122) are slidably connected to the third slide groove (123). A bidirectional lead screw (124) that is threadedly connected to the third slider (122) is rotatably connected in the third slide groove (123). A second drive motor (125) is fixed on the inner wall of the third slide groove (123), and the output shaft of the second drive motor (125) is fixedly connected to one end of the bidirectional lead screw (124).

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