Aerostatic spindle with centrally located flying disc

CN224824568UActive Publication Date: 2026-10-09SUZHOU HANNOCK PRECISION TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202521991062.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-09-16
Publication Date
2026-10-09
Estimated Expiration
2035-09-16

AI Technical Summary

Technical Problem

1.节流稳定性差:小孔节流对气源洁净度极其敏感,易堵塞,导致气膜压力波动、刚度下降;且小孔节流本身刚性较弱

Benefits of technology

1.气膜更均匀、更稳健:前/后静压轴承的端面与径向均采用多孔质材料节流器,利用微孔实现均匀节流,形成稳定的轴向与径向静压气膜,显著提升承载与刚度、降低对气源洁净度敏感性。

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides a kind of gas static pressure main shaft of frisbee middle placement, comprising: main shaft rotor, shaft seat, front static pressure bearing, rear static pressure bearing, motor stator and motor rotor, cooling system and encoder system;The end surface and radial of front, rear static pressure bearing are provided with porous restrictor, to form uniform stable gas film;Main shaft rotor is equipped with middle placement thrust fly disc, its front and rear end surface is opposite to two static pressure bearings, constitutes symmetrical bearing surface, improves axial rigidity and thermal stability;Cooling system adopts the series connection design of bearing loop and motor loop, combined with exhaust guiding motor end heat exchange, improve overall heat dissipation effect;Main shaft rotor is hollow structure and built-in vacuum air path, for workpiece adsorption, rear end is provided with dynamic balance adjustment module, motor stator outer periphery is equipped with whole machine dynamic balance hole site, encoder system uses high-resolution circular grating, realizes high-precision positioning.The utility model has the advantages of high rigidity, good thermal stability, high rotation accuracy and adapt to ultra-precision machining.
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Description

Technical Field

[0001] This utility model relates to the field of ultra-precision high-speed spindle technology, specifically to a gas static pressure spindle with a centrally located disc. Background Technology

[0002] Single-point diamond turning (SPDT) is used for machining ultra-high surface quality parts such as optical components and laser mirrors, achieving nanometer-level surface roughness and submicron-level surface accuracy; spindle performance directly determines machining quality and efficiency. Gas hydrostatic spindles are widely used in ultra-precision machine tools due to their high rigidity, extremely low vibration, and wear-free operation.

[0003] However, in scenarios where higher precision and stability are required, traditional solutions still have several limitations, necessitating new spindle designs that simultaneously achieve breakthroughs in stiffness, thermal deformation, stability, and precision.

[0004] Inadequacy of existing technology 1. Poor throttling stability: Small-orifice throttling is extremely sensitive to the cleanliness of the gas source and is easily blocked, leading to fluctuations in gas film pressure and a decrease in stiffness; moreover, small-orifice throttling itself has relatively weak rigidity.

[0005] 2. Large thermal / mechanical coupling deformation: The motor and bearing ends are the main heat sources. Uneven heat and deformation caused by axial cutting force will damage geometric accuracy, resulting in "tilting and drifting", which will significantly affect the surface accuracy.

[0006] 3. Limited rigidity: Common "I"-shaped structures and front or rear-mounted frisbee layouts have limited angular rigidity, making it difficult to meet higher precision requirements.

[0007] Therefore, existing technologies have shortcomings and need further improvement. Utility Model Content

[0008] In view of the problems existing in the prior art, this utility model provides a gas static pressure spindle with the center of the frisbee.

[0009] To achieve the above objectives, the specific solution of this utility model is as follows: This utility model provides a gas static pressure spindle centrally located on a flying disc, comprising: The main shaft rotor has a thrust disc installed in its middle. On the main shaft rotor, front hydrostatic bearings and rear hydrostatic bearings are respectively fitted on the front and rear sides of the thrust disc. Shaft seats are fitted on the outer sides of the front hydrostatic bearings and the rear hydrostatic bearings. The front and rear end faces of the thrust disc are respectively opposite to the front hydrostatic bearings and the rear hydrostatic bearings to form symmetrical axial hydrostatic bearing surfaces, thereby improving the axial stiffness and stability of the main shaft. Both the end faces and radial surfaces of the front and rear hydrostatic bearings are provided with porous material throttles, and axial and radial hydrostatic air films are formed between the porous material throttles and the corresponding surfaces of the main shaft rotor, respectively. A motor rotor is fixedly mounted at the tail of the main spindle rotor, and a motor stator is provided on the outside of the motor rotor for driving the main spindle rotor to rotate. A coil cover is provided on the outside of the motor stator. The cooling system includes a first cooling circuit and a second cooling circuit that are interconnected. The cooling channel of the first cooling circuit is arranged around the outer periphery of the front hydrostatic bearing and the rear hydrostatic bearing. The cooling channel of the second cooling circuit is arranged around the outer periphery of the motor stator. The cooling medium outlet of the first cooling circuit is connected to the cooling medium inlet of the second cooling circuit, so as to achieve sequential cooling of the bearings first and then the motor.

[0010] Furthermore, the porous material throttling device has a cylindrical or block-shaped structure, is sintered using ceramic or graphite powder metallurgy, has a porosity of 20% to 40%, an average pore diameter of 5 μm to 50 μm, and is pressed into the front hydrostatic bearing and the rear hydrostatic bearing with an interference fit.

[0011] Furthermore, the porous material throttling devices respectively provided on the end faces and radial sides of the front hydrostatic bearing and the rear hydrostatic bearing, together with the front and rear end faces of the thrust disc of the main shaft rotor and the radial outer circle of the main shaft rotor, form a stable axial and radial air film, so as to simultaneously realize the axial and radial load-bearing of the main shaft.

[0012] Furthermore, the bearing seat is provided with a main air inlet, which is independently connected to the throttle module for the front hydrostatic bearing and the rear hydrostatic bearing, so as to realize independent air supply to the front hydrostatic bearing and the rear hydrostatic bearing.

[0013] Furthermore, the gas flowing out of the porous material throttle of the front hydrostatic bearing and the rear hydrostatic bearing is guided to the motor end through the exhaust channel provided in the bearing seat, and discharged after heat exchange between the motor stator and the motor rotor.

[0014] Furthermore, the main spindle rotor adopts a hollow structure, and a vacuum passage communicating with its front flange is provided inside the main spindle rotor to achieve workpiece adsorption.

[0015] Furthermore, a dynamic balance adjustment module is provided at the rear end of the main spindle rotor. The dynamic balance adjustment module includes at least 24 adjustment holes distributed along the circumference for adjusting the dynamic balance of the main spindle rotor.

[0016] Furthermore, the outer circumference of the motor stator base used to fix the motor stator is provided with two holes for overall motor balancing adjustment.

[0017] Furthermore, the second cooling circuit is arranged in a spiral shape on the outer periphery of the motor stator, and the first cooling circuit and the second cooling circuit form a series system. The cooling medium flows sequentially through the outer periphery of the front hydrostatic bearing and the rear hydrostatic bearing, as well as the outer periphery of the motor stator, and forms a circulation with the external water chiller.

[0018] Furthermore, the gas hydrostatic spindle also includes an encoder system; The encoder system is a high-resolution circular grating encoder. The grating scale is fixed to the main shaft rotor. The reading head of the encoder system is directly connected to the fixed structure at the rear end of the main shaft. The number of grating scale lines is not less than 20,000 per revolution to achieve an angle positioning accuracy within ±1 arcsecond, which is used to precisely control the rotation accuracy of the main shaft.

[0019] The technical solution of this utility model has the following beneficial effects: 1. More uniform and robust air film: The end face and radial direction of the front / rear hydrostatic bearings are made of porous material throttling device, which uses micropores to achieve uniform throttling and form a stable axial and radial hydrostatic air film, which significantly improves load-bearing capacity and stiffness and reduces sensitivity to air source cleanliness.

[0020] 2. Improved axial stiffness and thermal stability: The main shaft rotor adopts a disc-shaped central mounting, with its two end faces facing the front and rear bearings respectively, forming a symmetrical thrust air-floating surface, which improves angular stiffness and axial stiffness, and suppresses thermal attitude drift.

[0021] 3. More efficient thermal management: The first cooling circuit (surrounding the outer circumference of the bearing) and the second cooling circuit (surrounding the outer circumference of the motor stator) are connected in series, so that the cooling medium cools the bearing first and then the motor; at the same time, the exhaust gas after bearing throttling is guided to the motor end for heat exchange and then discharged, further removing heat and improving thermal stability.

[0022] 4. Adjustable dynamic balance: The rear end is equipped with a dynamic balance adjustment module and a double hole on the outer circle of the stator seat, which facilitates the dynamic balance correction of the whole shaft and reduces vibration. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the gas static pressure spindle centrally located on the flying disc according to an embodiment of the present invention; Figure 2 This is a cross-sectional view of the hydrostatic spindle in an embodiment of the present utility model; Figure 3 This is a schematic diagram of the specific structure of the main shaft rotor in this embodiment of the present invention; Figure 4 This is an external view of the coil cover in an embodiment of the present utility model; Figure 5 This is a perspective view of the rear hydrostatic bearing in an embodiment of this utility model.

[0024] Attached image captions: 1. Front flange; 2. Front hydrostatic bearing; 3. Shaft seat; 4. Spacing ring; 5. Rear hydrostatic bearing; 6. Coil cover; 7. Rear cover; 8. Rear cover plate; 9. Vacuum sleeve; 10. Grating seat; 11. Motor stator; 12. Motor mover; 13. Inlet pipe; 14. Main shaft rotor; 15. Vacuum pipe; 16. Front mounting plate; 17. Dynamic balancing hole; 18. Rotor fly disc; 19. Cooling water inlet; 20. Cooling water outlet; 21. First dynamic balancing adjustment hole; 22. Second dynamic balancing adjustment hole; 23. Porous throttle. Detailed Implementation

[0025] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0026] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0027] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0028] In the description of this embodiment, the terms "upper," "lower," "front," "rear," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0029] Combination Figures 1-5 As shown, this utility model provides a gas static pressure spindle centrally located on a flying disc, comprising: The main shaft rotor 14 has a thrust disc 18 installed in its middle; On the main shaft rotor 14, a front hydrostatic bearing 2 and a rear hydrostatic bearing 5 are respectively fitted on the front and rear sides of the thrust disc 18. A bearing seat 3 is fitted on the outer side of the front hydrostatic bearing 2 and the rear hydrostatic bearing 5. The front and rear end faces of the thrust disc 18 are respectively opposite to the front hydrostatic bearing 2 and the rear hydrostatic bearing 5 to form symmetrical axial hydrostatic bearing surfaces, thereby improving the axial stiffness and stability of the main shaft. Both the end faces and radial surfaces of the front hydrostatic bearing 2 and the rear hydrostatic bearing 5 are provided with porous material throttles, and axial and radial hydrostatic air films are formed between the porous material throttles and the corresponding surfaces of the main shaft rotor 14, respectively. A motor rotor 12 is fixedly installed at the tail of the main shaft rotor 14. A motor stator 11 is provided on the outside of the motor rotor 12 for driving the main shaft rotor 14 to rotate. A coil cover 6 is provided on the outside of the motor stator 11. The cooling system includes a first cooling circuit and a second cooling circuit that are interconnected. The cooling channel of the first cooling circuit is arranged around the outer periphery of the front hydrostatic bearing 2 and the rear hydrostatic bearing 5. The cooling channel of the second cooling circuit is arranged around the outer periphery of the motor stator 11. The cooling medium outlet of the first cooling circuit is connected to the cooling medium inlet of the second cooling circuit, so as to achieve sequential cooling of the bearings first and then the motor.

[0030] The porous material throttling device has a cylindrical or block structure, is sintered using ceramic or graphite powder metallurgy, has a porosity of 20% to 40%, an average pore diameter of 5 μm to 50 μm, and is pressed into the front hydrostatic bearing 2 and the rear hydrostatic bearing 5 with an interference fit.

[0031] The porous material throttling devices respectively provided on the end faces and radial sides of the front hydrostatic bearing 2 and the rear hydrostatic bearing 5, together with the front and rear end faces of the thrust disc 18 of the main shaft rotor 14 and the radial outer circle of the main shaft rotor 14, form a stable axial and radial air film, so as to realize the bearing capacity of the main shaft in both axial and radial directions.

[0032] The bearing seat 3 is provided with a main air inlet, which is independently connected to the throttle module for the front hydrostatic bearing 2 and the rear hydrostatic bearing 5, so as to realize independent air supply to the front hydrostatic bearing 2 and the rear hydrostatic bearing 5.

[0033] The gas flowing out of the porous material throttle of the front hydrostatic bearing 2 and the rear hydrostatic bearing 5 is guided to the motor end through the exhaust channel provided in the bearing seat 3, and discharged after exchanging heat with the motor stator 11 and the motor rotor 12.

[0034] The main spindle rotor 14 has a hollow structure, and a vacuum passage is provided inside the main spindle rotor 14 to communicate with its front flange 1, so as to achieve workpiece adsorption.

[0035] The rear end of the main spindle rotor 14 is provided with a dynamic balance adjustment module, which includes at least 24 adjustment holes 17 distributed along the circumference for adjusting the dynamic balance of the main spindle rotor 14.

[0036] The outer circumference of the motor stator base used to fix the motor stator 11 is provided with two holes 17 for overall motor balance adjustment.

[0037] The second cooling circuit is arranged in a spiral shape on the outer periphery of the motor stator 11. The first cooling circuit and the second cooling circuit form a series system. The cooling medium flows sequentially through the outer periphery of the front hydrostatic bearing 2 and the rear hydrostatic bearing 5 and the outer periphery of the motor stator 11, and forms a circulation with the external water chiller.

[0038] The gas static pressure spindle also includes an encoder system; The encoder system is a high-resolution circular grating encoder. The grating scale is fixed to the main shaft rotor 14. The reading head of the encoder system is directly connected to the fixed structure at the rear end of the main shaft. The number of grating scale lines is not less than 20,000 per revolution to achieve an angle positioning accuracy within ±1 arcsecond, which is used to precisely control the rotation accuracy of the main shaft.

[0039] The principle of this utility model is as follows: The core of this invention is to achieve high-precision spindle rotation through gas static pressure support. Combined with motor drive, staged cooling, and multiple auxiliary functions, it ensures the spindle's rigidity, stability, and positioning accuracy. Its working principle can be broken down into functional modules as follows: I. Core Concept: Static pressure support and load-bearing principle (achieving non-contact, high-precision load bearing) This spindle achieves contactless support through "gas throttling-gas film formation," which is the core of ensuring accuracy and rigidity. The specific process is as follows: 1. Component Collaboration Basics A thrust disc 18 is provided in the middle of the main shaft rotor 14, with a front hydrostatic bearing 2 and a rear hydrostatic bearing 5 respectively fitted on its front and rear sides. The front and rear end faces of the thrust disc 18 are opposite to the end faces of the two hydrostatic bearings, forming a symmetrical axial hydrostatic bearing surface. At the same time, the inner circumference of the two hydrostatic bearings is opposite to the radial outer circle of the main shaft rotor 14, forming a radial bearing surface.

[0040] 2. The function of porous flow regulators Both the front hydrostatic bearing 2 and the rear hydrostatic bearing 5 have built-in porous material throttling devices on their end faces (corresponding to the axial direction) and radial direction. Throttling device structure: It is cylindrical or block-shaped and made of ceramic / graphite powder metallurgy sintering. The porosity is 20%~40% and the average pore size is 5μm~50μm. It is pressed into the bearing through interference fit and can accurately control the gas outflow.

[0041] Independent air supply guarantee: The bearing seat 3 is equipped with a main air inlet, which is independently connected to the throttle modules of the front static pressure bearing 2 and the rear static pressure bearing 5, respectively, to achieve "independent air supply" to the two bearings and avoid the impact of unilateral air supply fluctuation on support stability.

[0042] 3. Air film formation and support After the compressed gas enters the porous mass throttle through the main inlet, it flows out evenly through the micropores of the throttle, forming a stable static pressure gas film at two key locations: Axial film gas: Gas is formed between the front and rear end faces of the thrust disc 18 and the end faces of the front hydrostatic bearing 2 / rear hydrostatic bearing 5, bearing the axial load of the spindle. The symmetrical structure can offset the axial force and greatly improve the axial stiffness and stability of the spindle. Radial gas film: Gas is formed between the radial outer circle of the main shaft rotor 14 and the inner circumference of the front hydrostatic bearing 2 / rear hydrostatic bearing 5, bearing the radial load of the main shaft and avoiding direct contact between the rotor and the bearing.

[0043] The two air films work together to enable the spindle to bear loads in both the axial and radial directions simultaneously, without mechanical friction, thus reducing wear and vibration at the source.

[0044] 4. Secondary utilization of exhaust gas After passing through the throttle and forming a gas film, the gas is guided to the motor end through the pre-set exhaust channel in the bearing seat 3. Before being discharged, it exchanges heat with the motor stator 11 and motor rotor 12 to help the motor cool down and realize "secondary utilization of gas energy".

[0045] II. Power: Motor drive principle (to achieve spindle rotation) The rotational power of the main shaft is provided by the "motor rotor 12-stator 11" assembly, specifically: The motor rotor 12 is fixedly installed at the tail of the main shaft rotor 14, and the motor stator 11 is set on the outside of the motor rotor 12 (the stator is protected by a coil cover 6). When the motor stator 11 is energized, it generates an alternating magnetic field. The magnetic field drives the motor rotor 12 to rotate, which in turn drives the main shaft rotor 14, which is fixed to it, to rotate synchronously, thereby realizing the power output of the main shaft.

[0046] III. Protection: Staged cooling principle (controlling temperature and preventing thermal deformation) To address the impact of bearing and motor heating on accuracy during spindle operation, a series dual cooling circuit was designed to achieve "bearing-priority cooling," as detailed below: 1. Composition of the cooling circuit The cooling system includes a first cooling circuit and a second cooling circuit, which are interconnected to form a series system and connected to an external water chiller to form a circulating cooling system.

[0047] 2. Cooling sequence and path First cooling circuit: The cooling channels are arranged around the outer periphery of the front hydrostatic bearing 2 and the rear hydrostatic bearing 5, and prioritize cooling the bearings that affect the support accuracy to avoid changes in the air film thickness caused by bearing heating. Second cooling circuit: The cooling channel is spiral-shaped and surrounds the outer periphery of the motor stator 11 (the spiral structure can increase the heat exchange area) to receive the cooling medium of the first circuit; Cooling medium flow direction: After flowing out from the external water chiller, it first flows through the first circuit to cool the bearing, then enters the second circuit to cool the motor stator 11, and finally flows back to the water chiller, realizing the sequential cooling of "bearing → motor" and prioritizing the temperature stability of the core support components.

[0048] IV. Principles of Auxiliary Functions (Improving Practicality and Accuracy Stability) To further ensure the spindle's operational adaptability, rotational stability, and positioning accuracy, four auxiliary functions are designed: 1. Workpiece adsorption function The main spindle rotor 14 adopts a hollow structure with a pre-set "vacuum air passage" that connects to the front flange 1. During operation, the vacuum air passage is evacuated, and the workpiece (such as thin or precision parts) is adsorbed through the front flange 1 to achieve rapid positioning and fixation of the workpiece.

[0049] 2. Dynamic balance adjustment function To address the issue of "eccentric vibration" during spindle rotation, a two-stage dynamic balancing adjustment is implemented: The rear end of the main spindle rotor 14 is provided with a dynamic balance adjustment module, which includes at least 24 adjustment holes 17 distributed along the circumference, and the rotor's dynamic balance can be adjusted by adding or removing counterweights; Two adjustment holes 17 are provided on the outer circumference of the "motor stator seat" that fixes the motor stator 11, which are used for overall motor balancing calibration to avoid mutual interference between the vibration of the motor and the spindle.

[0050] 3. High-precision positioning and control function The spindle is equipped with a high-resolution circular encoder system: The grating ruler is fixed to the main shaft rotor 14 (rotating synchronously with the rotor), and the encoder reading head is directly connected to the fixed structure at the rear end of the main shaft (not rotating with the rotor). The grating ruler has a minimum of 20,000 lines per revolution, achieving an angle positioning accuracy within ±1 arcsecond. It provides real-time feedback on the spindle rotation angle, enabling precise control of the spindle's rotational position and speed, and ensuring the positioning accuracy of machining / inspection.

[0051] V. Overall Collaborative Workflow 1. Before starting: Vacuum the air circuit to adsorb the workpiece; adjust the dynamic balance hole position 17 of the main spindle rotor 14 and the motor stator to complete the pre-balancing.

[0052] 2. Start running: The main air inlet supplies air independently to the throttles of the front static pressure bearing 2 and the rear static pressure bearing 5, forming an axial and radial static pressure air film to support the main shaft rotor 14. When the motor stator 11 is energized, it drives the motor rotor 12 to rotate synchronously with the main shaft rotor 14. The cooling system starts, and the cooling medium circulates in the order of "bearing → motor" to control the temperature of the components; The encoder system acquires the spindle rotation angle in real time, provides feedback and calibrates the speed and positioning to ensure accuracy.

[0053] 3. During operation: The air film continuously bears the load, the exhaust assists the motor to cool down, and the dynamic balance and encoder continuously ensure stability and accuracy.

[0054] In summary, this spindle achieves high precision, high rigidity, and high stability rotational output through the synergy of "hydrostatic support non-contact bearing + motor drive + staged cooling + multiple auxiliary calibrations," making it suitable for scenarios with stringent spindle precision requirements (such as precision machining and testing equipment).

[0055] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the protection scope of the present utility model.

Claims

1. A gas static pressure spindle centrally located on a flying disc, characterized in that, include: The main shaft rotor has a thrust disc installed in its middle. On the main shaft rotor, front hydrostatic bearings and rear hydrostatic bearings are respectively fitted on the front and rear sides of the thrust disc. Shaft seats are fitted on the outer sides of the front hydrostatic bearings and the rear hydrostatic bearings. The front and rear end faces of the thrust disc are respectively opposite to the front hydrostatic bearings and the rear hydrostatic bearings to form symmetrical axial hydrostatic bearing surfaces, thereby improving the axial stiffness and stability of the main shaft. Both the end faces and radial surfaces of the front and rear hydrostatic bearings are provided with porous material throttles, and axial and radial hydrostatic air films are formed between the porous material throttles and the corresponding surfaces of the main shaft rotor, respectively. A motor rotor is fixedly mounted at the tail of the main spindle rotor, and a motor stator is provided on the outside of the motor rotor for driving the main spindle rotor to rotate. A coil cover is provided on the outside of the motor stator. The cooling system includes a first cooling circuit and a second cooling circuit that are interconnected. The cooling channel of the first cooling circuit is arranged around the outer periphery of the front hydrostatic bearing and the rear hydrostatic bearing. The cooling channel of the second cooling circuit is arranged around the outer periphery of the motor stator. The cooling medium outlet of the first cooling circuit is connected to the cooling medium inlet of the second cooling circuit, so as to achieve sequential cooling of the bearings first and then the motor.

2. The gas static pressure spindle according to claim 1, characterized in that, The porous material throttling device has a cylindrical or block structure, is sintered using ceramic or graphite powder metallurgy, has a porosity of 20% to 40%, an average pore diameter of 5 μm to 50 μm, and is press-fitted into the front hydrostatic bearing and the rear hydrostatic bearing with an interference fit.

3. The gas static pressure spindle according to claim 1, characterized in that, The porous material throttling devices respectively provided on the end faces and radial sides of the front hydrostatic bearing and the rear hydrostatic bearing, together with the front and rear end faces of the thrust disc of the main shaft rotor and the radial outer circle of the main shaft rotor, form a stable axial and radial air film, so as to realize the axial and radial load-bearing of the main shaft at the same time.

4. The gas static pressure spindle according to claim 1, characterized in that, The bearing seat is provided with a main air inlet, which is independently connected to the throttle module for the front hydrostatic bearing and the rear hydrostatic bearing, so as to realize independent air supply to the front hydrostatic bearing and the rear hydrostatic bearing.

5. The gas static pressure spindle according to claim 1, characterized in that, The gas flowing out of the porous material throttle of the front hydrostatic bearing and the rear hydrostatic bearing is guided to the motor end through the exhaust channel provided in the bearing seat, and then discharged after exchanging heat between the motor stator and the motor rotor.

6. The gas hydrostatic spindle according to claim 1, characterized in that, The main spindle rotor has a hollow structure, and a vacuum passage is provided inside the main spindle rotor to communicate with its front flange, which is used to achieve workpiece adsorption.

7. The gas static pressure spindle according to claim 1, characterized in that, The rear end of the main spindle rotor is provided with a dynamic balance adjustment module, which includes at least 24 adjustment holes distributed along the circumference for adjusting the dynamic balance of the main spindle rotor.

8. The gas hydrostatic spindle according to claim 1, characterized in that, The outer circumference of the motor stator mount used to fix the motor stator is provided with two holes for overall motor balance adjustment.

9. The gas hydrostatic spindle according to claim 1, characterized in that, The second cooling circuit is arranged in a spiral shape on the outer periphery of the motor stator. The first cooling circuit and the second cooling circuit form a series system. The cooling medium flows sequentially through the outer periphery of the front hydrostatic bearing and the rear hydrostatic bearing, as well as the outer periphery of the motor stator, and forms a circulation with the external water chiller.

10. The gas hydrostatic spindle according to claim 1, characterized in that, The gas static pressure spindle also includes an encoder system; The encoder system is a high-resolution circular grating encoder, which includes a grating ruler and a reading head. The grating ruler is fixed to the main shaft rotor, and the reading head of the encoder system is directly connected to the fixed structure at the rear end of the main shaft. The grating ruler has no less than 20,000 lines per revolution to achieve an angle positioning accuracy within ±1 arcsecond, which is used to precisely control the rotation accuracy of the main shaft.