Optical element driver, optical element module, laser processing head and laser processing device

Abstract

The utility model discloses an optical element driver, optical element driver includes: drive module and heat protection module. Among them, drive module has output, and drive module still includes and the drive main body who is connected with output, and output is connected in optical element, to drive optical element to produce at least two degrees of freedom's swing. Or, optical element driver still includes the mirror frame, and output is connected in optical element through the mirror frame, and the mirror frame has the accommodation space to be used for accommodating heat protection module. Heat protection module is located on the key heat conduction path between optical element and drive main body, can effectively block the high heat radiation from the optical element side to the side close to drive module based on the isolation of heat protection module, prevents the high temperature damage that the heat radiation and heat conduction produced in the laser processing process cause drive main body.

Description

Technical Field

[0001] This utility model relates to the field of laser processing technology, and in particular to an optical element driver, an optical element module, a laser processing head, and a laser processing device. Background Technology

[0002] In existing technologies, the laser emitted by the laser source of a handheld laser processing head is output to the workpiece surface via optical elements to achieve processing operations such as cleaning, welding, or cutting. The optical elements are driven by an actuator to achieve multi-dimensional oscillation. However, when processing highly reflective materials, a significant amount of reflected light enters the processing head through the laser output port. After reflection or transmission on the surface of the optical elements, some of the reflected light enters the space where the actuator is located, causing the actuator to overheat or even malfunction. This not only seriously affects the processing quality but also significantly increases the maintenance cost of the processing head, requiring improvement. Utility Model Content

[0003] This invention provides an optical element driver, an optical element module, a laser processing head, and a laser processing device to reduce the impact of reflected light on the driving module in related technologies.

[0004] According to one aspect of this application, an optical element driver is provided, comprising:

[0005] The drive module includes an output end for drive connection and a drive body. The output end is used to connect to an optical element to drive the optical element to produce at least two degrees of freedom of oscillation.

[0006] The thermal protection module, located between the optical element and the drive module, is used to isolate the thermal radiation transmitted from the light-incident side of the optical element to the side of the optical element closer to the drive module.

[0007] According to one aspect of this application, an optical element driver is provided, comprising:

[0008] The drive module includes the output terminal for drive connection and the drive body;

[0009] The frame has an output end connected to the optical element via the frame, so as to drive the optical element to oscillate in at least two degrees of freedom;

[0010] The frame has a space to accommodate the thermal protection module.

[0011] In one embodiment, the optical element driver further includes a frame, the output of which is connected to the optical element via the frame, the frame having a receiving space for accommodating a thermal protection module.

[0012] In one embodiment, one end of the eyeglass frame is provided with a plurality of first positioning portions protruding from the bottom wall of the eyeglass frame, and the plurality of first positioning portions are respectively connected to the optical element;

[0013] Alternatively, one end of the frame may be provided with a plurality of first positioning portions protruding from the bottom wall of the frame and first abutting portions for supporting optical elements, the first positioning portions and the first abutting portions forming a limiting structure for the optical elements;

[0014] Multiple first positioning parts are arranged at intervals and together with the bottom wall of the frame to form the receiving space.

[0015] In one embodiment, the optical element driver further includes a connector, one end of which is connected to the output end and the other end of which passes through the first mounting channel of the frame.

[0016] The thermal protection module includes a first protective element, which is connected to the connector or the frame and is used to cover the opening of the first mounting channel.

[0017] In one embodiment, the thermal protection module includes a second protective element for cooling optical elements, the second protective element being disposed on the housing of the connector, the first protective element, the lens frame, or the laser processing head.

[0018] In one embodiment, the second protective element is located between the optical element and the first protective element, and the projected area of ​​the second protective element along the axial direction of the output end is greater than the projected area of ​​the first protective element along the axial direction of the output end.

[0019] In one embodiment, the connector and the first protective member are either integral or separate, and both are made of light-shielding and heat-conducting materials.

[0020] In one embodiment, the optical element driver includes a coating disposed on the surface of any component near the drive module side of the optical element;

[0021] Or / and, the optical element driver includes a dust cover, which is fastened to the drive module, and the output end extends from the top wall of the dust cover and is connected to the optical element.

[0022] In one embodiment, the driving body includes a base and an electromagnetic module and an elastic structure disposed on the base.

[0023] The elastic structure includes a first part and a second part connected to each other, the second part being connected to the base and forming a ring;

[0024] The electromagnetic module has an output end, and the second part has a second mounting channel. One end of the output end that connects to the optical element passes through the second mounting channel and is connected to the first part. The electromagnetic module drives the output end to move the elastic structure, the thermal protection module and the optical element synchronously through magnetic force.

[0025] In one embodiment, the optical element driver further includes an electrical module disposed on the side of the base opposite to the output end, and the electrical module includes at least one of a temperature detection unit, a swing angle detection unit, and a dust detection unit.

[0026] According to one aspect of this application, an optical element module is proposed, including an optical element and an optical element driver according to the above-described scheme, with the output end connected to the optical element.

[0027] According to one aspect of this application, a laser processing head is provided that includes an optical element driver according to the above-described scheme.

[0028] According to one aspect of this application, a laser processing apparatus is proposed, comprising the laser processing head of the above-described scheme.

[0029] The technical solution of this utility model embodiment includes an optical element driver comprising a driving module and a thermal protection module. The driving module has an output end and a driving body connected to the output end. The output end is connected to the optical element to drive the optical element to generate at least two degrees of freedom of oscillation. Alternatively, the optical element driver also includes a lens frame, with the output end connected to the optical element via the lens frame. The lens frame has a receiving space for accommodating the thermal protection module. The thermal protection module is located on the critical heat conduction path between the optical element and the driving body. Based on the isolation provided by the thermal protection module, it can effectively block high-temperature radiation conducted from the light-incident side of the optical element to the side near the driving module, preventing high-temperature damage to the driving body caused by heat radiation and heat conduction generated during laser processing, and avoiding performance degradation or structural damage due to overheating of the driving body; simultaneously, it can dissipate heat from the optical element, extending its service life.

[0030] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of this utility model, nor is it intended to limit the scope of this utility model. Other features of this utility model will become readily apparent from the following description. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 This is a side view of the optical element driver provided in the embodiment of this utility model;

[0033] Figure 2This is a side view of an embodiment of an optical element driver and an optical element assembly;

[0034] Figure 3 This is a perspective view of one embodiment of the eyeglass frame;

[0035] Figure 4 This is a perspective view of another embodiment of the eyeglass frame;

[0036] Figure 5 It is a 3D view of the connector;

[0037] Figure 6 This is a side view of the assembly of the optical element driver, optical element, and second protective component when the first connector is a split structure;

[0038] Figure 7 This is a side view of another embodiment of the assembly of the optical element driver, optical element, and second protective component;

[0039] Figure 8 This is a side view of the thermal protection module configured with a coating;

[0040] Figure 9 It is a side view of the dust cover, elastic structure, drive module and base;

[0041] Figure 10 This is a schematic diagram of the assembly of a laser processing head and an optical component driver;

[0042] Figure 11 This is a 3D view of the drive module.

[0043] Figure label:

[0044] 1. Drive module; 10. Drive body; 101. Output end; 11. Electromagnetic module; 12. Base; 13. Elastic structure; 131. First part; 1310. Fifth positioning part; 132. Second part; 1320. Second mounting channel; 1321. Fourth positioning part; 14. First magnetic component; 15. Second magnetic component; 2. Thermal protection module; 21. Connector; 210. First clamping part; 2101. Second positioning part; 2102. Second abutting part; 211. Second clamping part; 2111. Third positioning part; 2112. Third abutting part; 20. Second protective component; 22. First protective component; 3. Frame; 30. Accommodation space; 31. First positioning part; 32. First abutting part; 300. First mounting channel; 3001. Opening; 5. Optical element; 70. Working beam; 8. Dust cover; 9. Electrical module. Detailed Implementation

[0045] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0046] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this utility model described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus. Embodiments of this utility model are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout.

[0047] In the description of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0048] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0049] As defined in the text: the front side of the optical element 5 is the reflective surface (light incident side) that reflects the laser, the back side of the optical element 5 is the side opposite to the reflective surface, and the driving module 1 is located on the back side (light back side) of the optical element 5.

[0050] The axial direction of output terminal 101 is as follows: Figure 11 The height direction of the base 12 shown, or the optical axis direction of the optical element 5, can also be understood as the z-axis direction.

[0051] X-axis direction: such as Figure 11 The length direction of the base 12 shown.

[0052] Y-axis direction: such as Figure 11 The width direction of the base 12 shown.

[0053] The connections involved in this application include, but are not limited to, connections made by means of glue, heat welding, welding, interference fit, fastener connection, etc.

[0054] The thermally conductive connection involved in this application can be either direct contact or non-contact thermal conduction.

[0055] like Figure 1 As shown, the optical element driver is used to drive the optical element 5 within the laser processing head. The optical element driver includes a drive module 1 and a thermal protection module 2. The drive module 1 has an output terminal 101 and also includes a drive body 10 connected to the output terminal 101. The output terminal 101 is connected to the optical element 5 to drive the optical element 5 to oscillate with at least two degrees of freedom. The thermal protection module 2 is located between the optical element 5 and the drive body 10, and is used to isolate thermal radiation transmitted from the reflective surface or incident light side of the optical element 5 to the side of the optical element 5 closest to the drive module 1 (which can be understood as the backlight side; when the optical element 5 is located beside the drive module 1, it can be understood as the periphery of the optical element 5).

[0056] In summary, the thermal protection module 2 is located on the critical heat conduction path between the optical element 5 and the drive body 10. Based on the isolation provided by the thermal protection module 2, it effectively blocks high-temperature radiation conducted from the light-incident side of the optical element 5 to the side near the drive module 1, preventing high-temperature damage to the drive body 10 caused by heat radiation and heat conduction during laser processing, and avoiding performance degradation or structural damage due to overheating of the drive body 10. Simultaneously, it cools and dissipates heat from the optical element 5, extending its service life. This design significantly improves the reliability and accuracy of the oscillation control of the optical element 5, ensuring stable operation of the laser processing system under long-term, high-load conditions, and providing a solid technical guarantee for precision laser processing.

[0057] In one embodiment, refer to Figure 11The driving body 10 includes a base 12, an electromagnetic module 11 and an elastic structure 13 disposed on the base 12. The elastic structure 13 includes a first part 131 and a second part 132 connected to each other. The first part 131 is connected to the output terminal 101, and the second part 132 is connected to the base 12.

[0058] Reference Figure 11 The drive module 1 has an output terminal 101, and the first part 131 has a second mounting channel 1320. The output terminal 101 passes through the second mounting channel 1320 and is connected to the first part 131. The base 12 is connected to the second part 132.

[0059] The electromagnetic module 11 includes a first magnetic component 14 and a second magnetic component 15. The first magnetic component 14 includes at least one magnet and a coil arranged around the magnet. Figure 11 As can be seen by the reader, it is shown as a wound coil; the magnet is not shown. The second magnetic component 15 includes at least one magnet and a coil arranged around the magnet. Figure 11 As the reader can see, it is displayed as a magnet (the coil is not shown). The number of the first magnetic component 14 and the second magnetic component 15 is each set to two. A set of the first magnetic component 14 is arranged along... Figure 11 The base 12 shown is symmetrically arranged along its length; a group of second magnetic components 15 are arranged along the length of the base 12 as shown. Figure 11 The base 12 shown is symmetrically arranged in the width direction, and the two sets of magnetic components are arranged around the output end 101. After being powered on, the output end 101 is driven by magnetic force, and the output end 101 drives the elastic structure 13 and the optical element 5 to swing synchronously in both the width direction and the length direction of the base 12.

[0060] In other embodiments, a set of magnetic components can be provided to drive the output terminal 101 to synchronously move the elastic structure 13 and the optical element 5 along the height direction of the base 12, i.e., the optical axis direction. The arrangement of this structure can refer to the prior art, and those skilled in the art can obtain the arrangement of this set of magnetic components through the principles of the prior art, which will not be described in detail in this application.

[0061] Among them, reference Figure 11 The elastic structure 13 includes a first part 131 and a second part 132 connected together. The second part 132 is a ring-shaped structure, and the first part 131 is a spring arm structure extending inward from the inner ring of the second part 132. Optionally, the second part 132 has a circular, square, elliptical, or geometric ring shape. Optionally, the spring arm can be an S-shaped spring arm or a spring arm with multiple bends. The S-shaped or bends can reduce the stress on the spring arm, greatly improving the deformation resistance of the elastic structure, making the swing stability of the entire elastic structure 13 stronger and more precise.

[0062] The spring arm is provided with a connecting part (unlabeled) for connecting the output end 101. The connecting part can be glue, fastener, positioning post or other forms, which makes it convenient for users to replace damaged parts, while reducing the thickness of the entire drive module 1 and improving the overall miniaturization of the driver.

[0063] The second part 132 is provided with a second installation channel 1320, and the first part 131 is located at the spatial opening of the second installation channel 1320.

[0064] The outer diameter edge of the second part 132 is provided with an S-shaped elastic arm extending outward, and a fourth positioning part 1321 connected to the elastic arm. The fourth positioning part 1321 can be a positioning post, a positioning buckle, glue, welding, a fastener, or a third-party component. The fourth positioning part 1321 must be designed to position the elastic structure 13 while also ensuring the flexibility of the elastic structure 13's swing.

[0065] In other embodiments, the first part 131 may also be a ring structure. In this case, the outer diameter of the first part 131 and the inner diameter of the second part 132 are connected by an S-shaped or multiple bent elastic arms. In this case, the number of elastic arms is preferably set to an even number and is evenly arranged around the second part 132.

[0066] In this embodiment, the first part 131 is directly configured as an S-shaped or spring arm structure with multiple bends. The first part 131 is provided with a fifth positioning part 1310, which is connected to the output end 10. The fifth positioning part 1310 can be a positioning post, a positioning buckle, glue, welding, fastener, or a third-party component.

[0067] In one embodiment, such as Figure 8 As shown, the optical element driver is equipped with a coating 4. In one case, the coating 4 is provided on the back side of the optical element 5, that is, on the side of the optical element 5 closest to the driving body 10. And / or, in another case, the surface of the driving body 10 is at least partially provided with the coating 4, which can block the heat radiation transmitted from the reflective surface of the optical element 5 to the side of the optical element 5 closest to the driving module 1. Preferably, the coating 4 is provided on the side of the surface of the driving body 10 closest to the optical element 5, mainly for blocking the retroreflected light or stray light transmitted or reflected from the optical element 5.

[0068] In other embodiments, the coating 4 is also provided on the bottom wall of the drive body 10 (i.e., the side wall opposite to the optical element 5). For example, in the scheme described later, the electrical module 9 is disposed on the bottom wall of the drive body 10 (i.e., the side wall of the base 12 opposite to the optical element 5), and the coating 4 is provided on the surface of the electrical module 9 to prevent stray light from damaging the electrical module 9. The coating 4 has properties such as light shielding, heat dissipation, and heat insulation.

[0069] In one embodiment, such as Figure 2 As shown, the optical element driver includes a frame 3, with an output terminal 101 connected to the bottom of the frame 3. The frame 3 supports the optical element 5 to enhance its stability. The output terminal 101 drives the frame 3 and the optical element 5 to simultaneously oscillate in at least two degrees of freedom.

[0070] Among them, such as Figure 2 As shown, the frame 3 has a receiving space 30 for accommodating the thermal protection module 2 (here, "accommodating" can be understood as the optical element 5 being suspended within the receiving space 30 and only connected to the frame 3; it can also be connected to the frame 3 through a component). Specifically, while the output end 101 drives the frame 3 and the optical element 5 to swing, the thermal protection module 2 also swings synchronously, thus isolating the reflected or transmitted laser light as the optical element 5 vibrates. During the long-term reflection of laser light, the surface of the optical element 5 accumulates heat due to energy absorption. The thermal protection module 2, while dissipating heat from the surface of the optical element 5, effectively blocks heat radiated to the surface of the drive module 1, and also effectively blocks heat radiated from the surface of the drive module 1 to the surface of the optical element 5. Therefore, the thermal protection module 2 is positioned as close as possible to the optical element 5 for better blocking effect.

[0071] It is understood that the optical element 5 is mounted on the frame 3, and the optical element 5 and the output end 101 may not be in a completely directly facing orientation. The optical element 5 may include a reflective part and a connecting part, which is connected to the output end 101 and is directly facing the output end 101. In the figures of this application, the entire optical element 5 and the output end 101 are completely directly facing and connected.

[0072] In one embodiment, the gap between the frame 3 and the optical element 5 is small to ensure that the overall thickness of the driver is as thin as possible. The accommodating space 30 is located on the side of the frame 3 away from the optical element 5. In another embodiment, the accommodating space 30 is located on the side of the frame 3 closer to the optical element 5. To reduce the overall size of the driver module 1, the accommodating space 30 is directly reserved on the frame 3 to house the connecting member 21, the second protective member 20, and the first protective member 22 (described later). This improves heat dissipation and light-shielding efficiency, and its proximity to the optical element 5 ensures optimal cooling for the optical element 5.

[0073] In one embodiment, such as Figure 3As shown, one end of the eyeglass frame 3 is provided with a plurality of first positioning portions 31. The first positioning portions 31 protrude relative to the bottom wall of the eyeglass frame 3. The first positioning portions 31 are arranged at intervals and together with the bottom wall of the eyeglass frame 3 to form a receiving space 30, which is used to accommodate the thermal protection module 2. In one embodiment, the eyeglass frame 3 is also provided with a first abutment portion 32, which is located between two adjacent first positioning portions 31 and is used to support the optical element 5. Figure 2 As shown, the first positioning part 31 abuts against the front, back, or peripheral sidewall of the optical element 5, and the first abutting part 32 extends towards or away from the center of the optical element 5 to form a supporting surface (not shown). The supporting surface (not shown) contacts the back of the optical element 5 (in other embodiments, the first abutting part 32 may be connected to the back or front of the optical element 5). Optionally, the above connection can be made by means of glue, heat welding, etc.

[0074] The first abutting part 32 and the first positioning part 31 form a clamping abutting structure. This connection can effectively suppress the lateral displacement of the optical element 5 during the swinging process, significantly improve its mechanical stability, thereby reducing the system error in the laser beam scanning process, while reserving sufficient degrees of freedom for the optical element 5.

[0075] In one embodiment, a 90-degree angle is formed between the first abutting portion 32 and the first positioning portion 31 (e.g., Figure 3 As shown, the angle can be less than 90 degrees, that is, a slot space is formed between the first abutting part 32 and the first positioning part 31 for clamping the optical element 5.

[0076] In one embodiment, such as Figure 4 As shown, one end of the frame 3 is provided with multiple first positioning parts 31. The first positioning parts 31 protrude relative to the bottom wall of the frame 3, and the side wall of the first positioning part 31 is provided with a slot (unlabeled). The edge of the optical element 5 is engaged in the slot (unlabeled) of the first positioning part 31, which helps to improve the stability and swing accuracy of the optical element 5. In other embodiments, in addition to the edge of the optical element 5 being engaged in the slot (unlabeled) of the first positioning part 31, glue or other fixing methods can also be used. Alternatively, the slot (unlabeled) can be omitted, and the optical element 5 can be directly connected by dispensing glue, which will not be described in detail here.

[0077] In one embodiment, the frame 3 can be configured as a spring structure consistent with the elastic structure 13, which can reduce the stress during the vibration of the optical element 5 and improve the accuracy of laser beam scanning.

[0078] In one embodiment, the thermal protection module 2 includes a connector 21, which can be configured as a metal baffle with good thermal conductivity and high light-blocking performance. It can rapidly transfer heat while also blocking reflected laser light. In another embodiment, to improve the stability and accuracy of the optical element 5's oscillation, the connector 21 is made of a lightweight plastic material. Based on this, a first protective element 22 is required to prevent the connector 21 from being exposed to laser radiation.

[0079] In one embodiment, such as Figure 3 As shown, the frame 3 may be provided with a first mounting channel 300 for the connector 21 to pass through.

[0080] In one embodiment, one end of the connector 21 passes through the first mounting channel 300 and is then connected to the frame 3. The other end is connected to the output end 101 and can be nested with the output end 101 to form a quick-release structure.

[0081] In one embodiment, one end of the output end 101 (the end connected to the optical element 5) passes through the first mounting channel 300 and is then connected to the frame 3. The other end of the output end 101 (the end connected to the optical element 5) extends out of the first mounting channel 300 and is then connected to the connector 21. Of course, in other embodiments, quick-release methods such as snap-fit, magnetic adsorption, and threads can also be used for connection.

[0082] In one embodiment, the thermal protection module 2 includes a first protective member 22, which covers the opening 3001 of the first mounting channel 300 to prevent laser light reflected or transmitted from the incident surface of the optical element 5 from being transmitted to the drive module 1. In this embodiment, the output end 101 is hollow, and the first protective member 22 can be configured as a cover. The first protective member 22 is fastened to the top of the connector 21 and covers the gap between the peripheral sidewall of the connector 21 and the inner wall of the first mounting channel 300.

[0083] Of course, in other embodiments, the output terminal 101 is a solid structure. The first protective member 22 only needs to cover the gap between the output terminal 101 and the inner wall of the first mounting channel 300. If the output terminal 101 is made of a material that is easily damaged by laser radiation, the first protective member 22 needs to completely cover the gap between the output terminal 101 and the inner wall of the first mounting channel 300 and the end face of the output terminal 101.

[0084] Optionally, the first protective component 22, the frame 3, the second protective component 20, and the connector 21 can all be configured as metal baffles with good thermal conductivity and high light-blocking performance, which can quickly transfer heat while blocking reflected laser light. For example, the first protective component 22 can be made of aluminum with good thermal conductivity, and its surface can be plated with gold, copper, etc.

[0085] In this embodiment, the connector 21 consists of two detachable components, including a first clamping part 210 and a second clamping part 211 connected to each other. The first clamping part 210 includes a second positioning part 2101 that is axially protruding and a second abutting part 2102 that is radially extending; the second clamping part 211 includes a third positioning part 2111 that is axially protruding and a third abutting part 2112 that is radially extending. The third positioning part 2111 is fitted inside the first mounting channel 300 and inside the output end 101, such that the outer side of the bottom wall of the frame 33 abuts against the upper surface of the third abutting part 2112.

[0086] In this embodiment, the second positioning part 2101 is connected to the third positioning part 2111, and the connection can be made by means of quick release such as threads or fasteners. The lower end face of the second abutting part 2102 of the first clamping part 210 abuts against the inner side of the bottom wall of the frame 3. Thus, the first clamping part 210 and the second clamping part 211 form a clamping and positioning mechanism to fix the frame 3 and the output end 101.

[0087] In another embodiment, the first clamping part 210 and the second clamping part 211 are integrally formed. The connector 21 passes through and is connected to the first mounting channel 300 and then connected to the output end 101. The upper end face of the output end 101 abuts against the outer side of the bottom wall of the frame 3. The top of the connector 21 is provided with a radially protruding abutment part, and the lower end face of the abutment part abuts against the inner side of the bottom wall of the frame 3.

[0088] Furthermore, the connector 21 can be disposed on the receiving space 30 on the side of the frame 3 that is close to or away from the optical element 5.

[0089] Without considering miniaturization of the driver, in one embodiment, the optical element driver further includes at least one of a cooling body for conveying cooling medium and a fan for cooling the optical element 5 and / or the drive module 1. The cooling body for conveying cooling medium may be a liquid-cooled plate with flow channels.

[0090] In some embodiments, the second protective element 20 is a fan that blows cool air toward the drive module 1 and the optical element 5, or it uses a suction method to remove heat from the vicinity of the optical element 5 and / or the drive module 1. Of course, the above structure can also be housed within the casing of the product containing the driver. For example, by providing a set of air passages inside the processing head housing, cooling gas is delivered toward the optical element 5 to achieve cooling and heat dissipation.

[0091] In one embodiment, the thermal protection module 2 includes a second protective element 20 for conducting heat to the optical element 5. The output terminal 101 passes sequentially through the second mounting channel 1310 and the first mounting channel 300, and is then connected to the second protective element 20. Figure 2As shown, the second protective member 20 may be disposed close to the optical element 5, but there is a gap between them to ensure that the second protective member 20 does not obstruct the swing of the optical element 5.

[0092] Optionally, the second protective element 20 may be made of a material with high thermal conductivity and light-shielding or light-absorbing properties, such as a gold-plated material or aluminum with high thermal conductivity.

[0093] Of course, in other embodiments, the second protective member 20 may be directly in contact with the back of the optical element 5, provided that both can swing flexibly and synchronously.

[0094] Optionally, while maintaining a gap between the second protective member 20 and the optical element 5, the second protective member 20 can also be connected to the housing of the product on which the optical film assembly is mounted, such as the housing of the laser processing head described in this application. By conducting heat from the vicinity of the optical element 5 to the housing of the laser processing head (generally made of metal), and then to the outside, the heat accumulation on the surface of the optical element 5 is greatly improved, which helps to extend its service life. Simultaneously, it helps to reduce the load on the lens holder 3 and improve its swing flexibility and accuracy.

[0095] When the frame 3 has accommodating spaces 30 on both sides along the axial direction of the output end 101, the second protective member 20 and the first protective member can be located on the same side or both sides of the frame 3 along the extension direction of the output end 101. The second protective member 20 is connected to the connector 21 or the frame 3.

[0096] like Figure 2 , 6 As shown in Figures 7 and 8, when the frame 3 has a receiving space 30 on only one side, the second protective member 20 is connected to the connector 21 and is located between the optical element 5 and the first clamping part 210 of the connector 21.

[0097] In order to completely block the laser reflected or transmitted by the optical element 5, the projected area of ​​the frame 3 along the axial direction of the output end 101 must be greater than or equal to the projected area of ​​the drive body 10 in that direction, so as to block the reflected and transmitted laser as much as possible in real time.

[0098] The second protective component 20 is placed in the housing space 30 near the optical element 5. This design combines laser shielding function with heat dissipation efficiency to assist the heat conduction of the optical element 5.

[0099] According to one aspect of this application, an optical element module is provided, comprising an optical element 5 and the aforementioned optical element driver, with an output terminal 101 connected to the optical element 5. The optical element 5 is a reflector or other lens that functions similarly to a reflector.

[0100] In one embodiment, the optical element driver further includes an electrical module 9, which includes at least one unit selected from a temperature sensor, a wobbling angle sensor, and a dust detection sensor. The electrical module 9 is disposed on the base 12 on a side opposite to the optical element 5.

[0101] In one embodiment, the optical element driver further includes a dust cover 8, which is fastened to the drive module 1, and the output end 101 extends from the top wall of the dust cover 8 and connects to the optical element 5, so that a sealed cavity is formed inside the base 12 to ensure that dust, reflected light, or stray light will not damage the internal drive module 1. Furthermore, the dust cover 8 is configured to be made of a material with good light-shielding properties and high thermal conductivity.

[0102] Optionally, such as Figure 9 As shown, the base 12 has a stepped surface (not labeled), and the lower end face of the dust cover 8 abuts against the stepped surface of the base 12, forming a sealing structure. The bottom of the base 12 is mounted on the inner wall of the laser processing head housing.

[0103] In other embodiments, the dust cover 8 can provide full-coverage protection for the base 12, achieving laser isolation and dust protection for the electrical module 9 and electromagnetic module 11 inside the base 12, which can effectively reduce the loss of electrical modules, lines, etc. and extend their service life.

[0104] In one embodiment, the projected area of ​​the light-shielding surface of the second protective member 20 on the surface of the optical element 5 is larger than the projected area of ​​the light-shielding surface of the connector 21 on the surface of the optical element 5. The second protective member 20 absorbs most of the laser light from the optical element 5, thus isolating and blocking the laser light as much as possible. The first protective member 22 mainly prevents light leakage from the gap between the output end 101 and the second mounting channel 1310 of the frame 33.

[0105] Figure 10 As shown, according to one aspect of this application, a laser processing head is provided, the laser processing head including the aforementioned optical element driver, and a base 12 of the drive module 1 ( Figure 1 (As shown) Connecting to the inner wall of the processing head housing, the thermal protection module 2 isolates the light transmitted from the light-incident side of the optical element 5 to the side of the optical element 5 near the drive module 1, so as to protect the optical element driver from the thermal radiation of the laser beam, thereby improving its lifespan and reliability.

[0106] Alternatively, the inner wall of the processing head housing is provided with a coating 4 ( Figure 10 (Not shown in the image), this coating 4 can be used to absorb stray and reflected light without affecting the normal transmission of the working beam 70. For example... Figure 10 As shown, 70 represents the working beam.

[0107] According to one aspect of this application, a laser processing apparatus is provided, including the aforementioned laser processing head.

[0108] Furthermore, the aforementioned laser processing head can be used for laser welding, cutting, marking, or cleaning, without any limitations.

[0109] The specific embodiments described above do not constitute a limitation on the scope of protection of this utility model. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. An optical element driver, characterized in that, include: The drive module (1) includes an output terminal (101) for drive connection and a drive body (10). The output terminal (101) is used to connect to an optical element (5) to drive the optical element (5) to generate at least two degrees of freedom of swing. A thermal protection module (2) is located between the optical element (5) and the drive module (1) for isolating thermal radiation transmitted from the light-incident side of the optical element (5) to the side of the optical element (5) near the drive module (1).

2. The optical element driver according to claim 1, characterized in that, The optical element driver also includes a frame (3), the output terminal (101) is connected to the optical element (5) through the frame (3), and the frame (3) has a receiving space (30) for accommodating the thermal protection module (2).

3. The optical element driver according to claim 2, characterized in that, One end of the eyeglass frame (3) is provided with a plurality of first positioning parts (31) protruding from the bottom wall of the eyeglass frame (3), and the plurality of first positioning parts (31) are respectively connected to the optical element (5); Alternatively, one end of the frame (3) is provided with a plurality of first positioning portions (31) protruding from the bottom wall of the frame (3) and a first abutting portion (32) for supporting the optical element (5), the first positioning portions (31) and the first abutting portion (32) forming a limiting structure for the optical element (5); In this arrangement, a plurality of the first positioning parts (31) are spaced apart and together with the bottom wall of the frame (3) to form the receiving space (30).

4. The optical element driver according to claim 3, characterized in that, The optical element driver also includes a connector (21), one end of which is connected to the output end (101), and the other end is disposed through the first mounting channel (300) of the frame (3); The thermal protection module (2) includes a first protective member (22), which is connected to the connector (21) or the frame (3) and is used to cover the opening (3001) of the first mounting channel (300).

5. The optical element driver according to claim 4, characterized in that, The thermal protection module (2) includes a second protective component (20), which is disposed on the housing of the connector (21), the first protective component (22), the frame (3), or the laser processing head.

6. The optical element driver according to claim 5, characterized in that, The second protective element (20) is located between the optical element (5) and the first protective element (22), and the projected area of ​​the second protective element (20) along the axial direction of the output end (101) is greater than the projected area of ​​the first protective element (22) along the axial direction of the output end (101).

7. The optical element driver according to claim 4, characterized in that, The connector (21) and the first protective component (22) are either integral or separate, and both are made of light-shielding and heat-conducting materials.

8. The optical element driver according to claim 3, characterized in that, The optical element driver includes a coating (4) disposed on the surface of any component of the optical element (5) near the drive module (1). Or / and, the optical element driver includes a dust cover (8) which is fastened to the drive module (1), and the output end (101) extends from the top wall of the dust cover (8) and is connected to the optical element (5).

9. The optical element driver according to claim 3, characterized in that, The driving body (10) includes a base (12) and an electromagnetic module (11) and an elastic structure (13) disposed on the base (12). The elastic structure (13) includes a first part (131) and a second part (132) connected to each other, the second part (132) being connected to the base (12), and the second part (132) being ring-shaped; The electromagnetic module (11) has the output terminal (101), and the second part (132) has a second mounting channel (1320). One end of the output terminal (101) that connects to the optical element (5) passes through the second mounting channel (1320) and is connected to the first part (131). The electromagnetic module (11) drives the output terminal (101) to drive the elastic structure (13), the thermal protection module (2) and the optical element (5) to swing synchronously through magnetic force.

10. The optical element driver according to claim 9, characterized in that, The optical element driver also includes an electrical module (9), which is located on the side of the base (12) away from the output terminal (101). The electrical module (9) includes at least one of a temperature detection unit, a swing angle detection unit, and a dust detection unit.

11. An optical element module, comprising an optical element (5) and an optical element driver as described in claim 3, characterized in that, The output terminal (101) is connected to the optical element (5).

12. A laser processing head, characterized in that, Includes the optical element driver as described in claim 3.

13. A laser processing apparatus, characterized in that, Includes the laser processing head as described in claim 12.

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