Quick positioning and clamping tool for semiconductor vacuum chamber valve plate parts

Abstract

The utility model discloses a kind of for the quick positioning clamping tool of semiconductor vacuum chamber valve plate class spare parts, including bottom plate, the support frame of being set on the upper side of the bottom plate, the support block for supporting spare part detachably set on the upper side of the bottom plate, the operating assembly detachably set on the side of the support frame, the elastic clamping assembly for clamping spare part being set on the operating assembly.The tool of the utility model is clamped by operating elastic clamping assembly to operate operating assembly to spare part, support block supports spare part, realizes quick clamping, improves production efficiency, and elastic clamping assembly has elastic buffering effect, and it is not easy to press the surface of spare part when clamping.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor component technology, specifically to a quick positioning and clamping fixture for semiconductor vacuum chamber valve plate components. Background Technology

[0002] Traditionally, semiconductor valve plate components are machined by securing the parts to a worktable with screws and then milling the surface features using a machining center. This process is prone to clamping errors, and securing the parts with screws is cumbersome, slow, and inefficient, severely impacting production efficiency and potentially damaging the component surfaces. Therefore, a new technical solution is urgently needed to address at least one of these problems. Summary of the Invention

[0003] The purpose of this invention is to provide a quick positioning and clamping fixture for semiconductor vacuum chamber valve plate components. The fixture uses an operating component to operate an elastic clamping component to clamp the component, and a support block supports the component, achieving quick clamping and improving production efficiency. The elastic clamping component has an elastic buffering effect, making it less likely to damage the surface of the component during clamping.

[0004] To achieve the above-mentioned technical objectives and requirements, the technical solution adopted by this utility model is: a quick positioning and clamping fixture for valve plate components in semiconductor vacuum chambers, characterized in that it includes a base plate, a support frame disposed on the upper side of the base plate, a support block detachably disposed on the upper side of the base plate for supporting the components, an operating component detachably disposed on one side of the support frame, and an elastic clamping component disposed on the operating component for clamping the components.

[0005] As a preferred technical solution, the support frame includes two symmetrically arranged support plates, the support plates being perpendicular to the base plate, and a first backing plate and a second backing plate being detachably provided on one vertical side of the support plate.

[0006] As a preferred technical solution, the operating component includes a mounting base detachably disposed on one side of the first back plate, a drive rod rotatably disposed on the mounting base, an operating handle rotatably disposed on the drive rod, a connecting rod rotatably disposed on the drive rod, a connecting post disposed on the connecting rod, and a sleeve fixedly disposed on the mounting frame. The connecting post is movably inserted through the sleeve, and one end of the connecting post is rotatably connected to the connecting rod.

[0007] As a preferred technical solution, the elastic clamping assembly includes a connecting upper plate, a connecting lower plate located below the connecting upper plate, two guide bolts detachably disposed on the upper side of the connecting upper plate, and a contour clamping block detachably disposed on the lower side of the connecting upper plate. The connecting column is connected to the connecting upper plate, the connecting upper plate is movably sleeved on the guide bolts, and the guide bolts are sleeved with an elastic element, which is located between the connecting upper plate and the connecting lower plate.

[0008] As a preferred technical solution, a third backing plate is detachably provided on one side of the support plate.

[0009] As a preferred technical solution, the third back plate is detachably provided with two positioning pins on the side away from the support block, and the two positioning pins abut against the two sides of the component respectively.

[0010] As a preferred technical solution, the second back plate is symmetrically provided with two guide rails on the side away from the support plate, and the connecting lower plate is symmetrically provided with two sliders on the side facing the support plate, and the sliders are slidably embedded in the guide rails.

[0011] As a preferred technical solution, the upper side of the component is provided with a spiral groove, and the lower side of the contour clamping block is provided with a spiral protrusion, the protrusion matching the spiral groove.

[0012] As a preferred technical solution, the support block is L-shaped.

[0013] As a preferred technical solution, a connecting bolt is fixedly provided at one end of the connecting column, a limiting block is detachably provided on the connecting upper plate, the limiting block is provided with a limiting groove that passes through it vertically, the connecting bolt is connected to the connecting upper plate, the connecting bolt is located in the limiting groove, and a limiting nut is detachably sleeved on the upper part of the connecting bolt, the limiting nut abuts against the upper side of the limiting block.

[0014] The beneficial effects of this utility model are: 1) The elastic clamping component is operated by the manipulation component to clamp the parts. The support block supports the parts, realizing fast clamping and improving production efficiency. The elastic clamping component has an elastic buffering effect, and it is not easy to damage the surface of the parts when clamping. 2) The operator manually rotates the control handle, which drives the connecting rod and the connecting rod to move the connecting column along the sleeve, thereby clamping or releasing the elastic clamping component; 3) The upper plate compresses the elastic element, which pushes the lower plate. The lower plate then drives the contour clamping block to clamp the upper side of the component. This forms an elastic buffer clamping, preventing the contour clamping block from damaging the surface of the component. The guide bolts ensure good guidance during the movement of the upper plate. 4) Two locating pins can quickly position parts, improving production efficiency and reducing machining errors; 5) The combination of the groove and the protrusion provides good positioning and clamping effect, and is less likely to damage the surface of the parts, thus reducing machining errors; 6) The combination of the limit nut and the connecting bolt improves the connection strength and makes it less likely to fall off. Attached Figure Description

[0015] Figure 1 This is a structural diagram of a tooling provided in one embodiment of the present invention; exist Figure 1 In the middle, 1. Base plate; 2. Support frame; 201. Support plate; 202. First back plate; 203. Second back plate; 204. Third back plate; 3. Support block; 4. Operating assembly; 401. Mounting base; 402. Drive rod; 403. Operating handle; 404. Connecting rod; 405. Connecting column; 406. Sleeve; 5. Elastic clamping assembly; 501. Connecting upper plate; 502. Connecting lower plate; 503. Guide bolt; 504. Contouring clamping block; 5041. Protrusion; 505. Elastic element; 506. Connecting bolt; 507. Limiting block; 5071. Limiting groove; 508. Limiting nut; 6. Positioning pin; 7. Guide rail; 8. Slider; 9. Components; 901. U-shaped groove. Detailed Implementation

[0016] The present invention will now be further described with reference to the accompanying drawings.

[0017] In the accompanying drawings of this utility model, the same or similar reference numerals correspond to the same or similar components. In the description of this utility model, it should be understood that if terms such as "head," "tail," "top," "bottom," "left," "right," "front," "rear," "inner," and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing this utility model, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0018] Please see Figure 1This utility model provides a quick positioning and clamping fixture for a semiconductor vacuum chamber valve plate component 9, including a base plate 1, a support frame 2 disposed on the upper side of the base plate 1, a support block 3 detachably disposed on the upper side of the base plate 1 for supporting the component 9, an operating component 4 detachably disposed on one side of the support frame 2, and an elastic clamping component 5 disposed on the operating component 4 for clamping the component 9. The operating component 4 operates the elastic clamping component 5 to clamp the component 9. The support block 3 supports the component 9, achieving quick clamping and improving production efficiency. The elastic clamping component 5 has an elastic buffering effect, making it less likely to damage the surface of the component 9 during clamping.

[0019] like Figure 1 As shown, the support frame 2 includes two symmetrically arranged support plates 201. The support plates 201 are perpendicular to the base plate 1. A first backing plate 202 and a second backing plate 203 are detachably provided on one vertical side of the support plate 201. The support plate 201 has a simple structure and good support. The first backing plate 202 and the second backing plate 203 provide installation space. Compared with setting a continuous plate in the support plate 201, it can reduce the weight.

[0020] like Figure 1 As shown, the operating assembly 4 includes a mounting base 401 detachably mounted on one side of the first backing plate 202, a drive rod 402 rotatably mounted on the mounting base 401, an operating handle 403 rotatably mounted on the drive rod 402, a connecting rod 404 rotatably mounted on the drive rod 402, a connecting post 405 mounted on the connecting rod 404, and a sleeve 406 fixedly mounted on the mounting bracket. The connecting post 405 is movably inserted through the sleeve 406, and one end of the connecting post 405 is rotatably connected to the connecting rod 404. When the operator manually rotates the operating handle 403, the operating handle 403 drives the connecting post 405 to move along the sleeve 406 via the drive rod 402 and the connecting rod 404, thereby clamping or releasing the elastic clamping assembly 5. This achieves rapid clamping.

[0021] like Figure 1As shown, the elastic clamping assembly 5 includes a connecting upper plate 501, a connecting lower plate 502 located below the connecting upper plate 501, two guide bolts 503 detachably disposed on the upper side of the connecting upper plate 501, and a contour clamping block 504 detachably disposed on the lower side of the connecting upper plate 501. The connecting post 405 is connected to the connecting upper plate 501. The connecting upper plate 501 is movably sleeved on the guide bolts 503. The guide bolts 503 are sleeved with elastic elements 505. The elastic element 505 is located between the upper connecting plate 501 and the lower connecting plate 502. The connecting column 405 drives the upper connecting plate 501 to compress the elastic element 505. The elastic element 505 pushes the lower connecting plate 502. The lower connecting plate 502 drives the contour clamping block 504 to clamp the upper side of the component 9. This forms an elastic buffer clamping to prevent the contour clamping block 504 from damaging the surface of the component 9. The guide bolt 503 ensures good guidance during the movement of the upper connecting plate 501. Specifically, the elastic element 505 is a buffer spring.

[0022] like Figure 1 As shown, a third backing plate 204 is detachably provided on one vertical side of the support plate 201. Furthermore, two positioning pins 6 are detachably provided on the side of the third backing plate 204 away from the support block 3. The two positioning pins 6 abut against the two sides of the component 9 respectively. The two positioning pins 6 can quickly position the component 9, improve production efficiency, and reduce processing errors.

[0023] like Figure 1 As shown, the second back plate 203 has two guide rails 7 symmetrically arranged on the side away from the support plate 201, and the connecting lower plate 502 has two sliders 8 symmetrically arranged on the side facing the support plate 201. The sliders 8 can be slidably embedded in the guide rails 7, which improves the stability of movement and provides good guidance.

[0024] like Figure 1 As shown, the upper side of the component 9 is provided with a spiral groove 901, and the lower side of the contour clamping block 504 is provided with a spiral protrusion 5041. The protrusion 5041 matches the spiral groove 901. The contour clamping block 504 has a T-shaped stepped structure. The two positioning pins 6 can quickly position the component 9, improve production efficiency, and reduce processing errors.

[0025] like Figure 1 As shown, the support block 3 is L-shaped, and together with the positioning pin 6, it provides good support and positioning for the component 9.

[0026] like Figure 1As shown, a connecting bolt 506 is fixedly installed at one end of the connecting column 405. A limiting block 507 is detachably installed on the connecting upper plate 501. The limiting block 507 is provided with a limiting groove 5071 that passes through it vertically. The connecting bolt 506 is connected to the connecting upper plate 501. The connecting bolt 506 is located in the limiting groove 5071. A limiting nut 508 is detachably sleeved on the upper part of the connecting bolt 506. The limiting nut 508 abuts against the upper side of the limiting block 507. The limiting nut 508 and the connecting bolt 506 cooperate to improve the connection strength and prevent it from falling off.

[0027] The above embodiments are merely descriptions for clearly illustrating the present utility model, and are not intended to limit the implementation. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all implementations here, and the obvious variations or modifications derived therefrom are still within the protection scope of the present utility model.

Claims

1. A quick-positioning clamping fixture for valve plate-type components in semiconductor vacuum chambers, characterized in that, It includes a base plate, a support frame disposed on the upper side of the base plate, a support block detachably disposed on the upper side of the base plate for supporting components, an operating component detachably disposed on one side of the support frame, and an elastic clamping component disposed on the operating component for clamping components.

2. The quick positioning and clamping fixture for semiconductor vacuum chamber valve plate components according to claim 1, characterized in that, The support frame includes two symmetrically arranged support plates, which are perpendicular to the base plate. A first backing plate and a second backing plate are detachably provided on one vertical side of each support plate.

3. The quick positioning and clamping fixture for semiconductor vacuum chamber valve plate components according to claim 2, characterized in that, The control assembly includes a mounting base detachably disposed on one side of the first back plate, a drive rod rotatably disposed on the mounting base, a control handle rotatably disposed on the drive rod, a connecting rod rotatably disposed on the drive rod, a connecting post disposed on the connecting rod, and a sleeve fixedly disposed on the mounting base. The connecting post is movably inserted through the sleeve, and one end of the connecting post is rotatably connected to the connecting rod.

4. A quick-positioning clamping fixture for semiconductor vacuum chamber valve plate components according to claim 3, characterized in that, The elastic clamping assembly includes an upper connecting plate, a lower connecting plate located below the upper connecting plate, two guide bolts detachably disposed on the upper side of the upper connecting plate, and a contour clamping block detachably disposed on the lower side of the upper connecting plate. The connecting column is connected to the upper connecting plate. The upper connecting plate is movably sleeved on the guide bolts. An elastic element is sleeved on the guide bolts. The elastic element is located between the upper connecting plate and the lower connecting plate.

5. A quick-positioning clamping fixture for semiconductor vacuum chamber valve plate components according to claim 2, characterized in that, A third backing plate is detachably installed on one vertical side of the support plate.

6. A quick-positioning clamping fixture for semiconductor vacuum chamber valve plate components according to claim 5, characterized in that, The third back plate is detachably provided with two positioning pins on the side away from the support block, and the two positioning pins abut against the two sides of the component respectively.

7. A quick-positioning clamping fixture for semiconductor vacuum chamber valve plate components according to claim 4, characterized in that, The second back plate has two guide rails symmetrically arranged on the side away from the support plate, and the connecting lower plate has two sliders symmetrically arranged on the side facing the support plate. The sliders are slidably embedded in the guide rails.

8. A quick-positioning clamping fixture for semiconductor vacuum chamber valve plate components according to claim 4, characterized in that, The component has a spiral groove on its upper side, and the contour clamping block has a spiral protrusion on its lower side, the protrusion matching the spiral groove.

9. A quick-positioning clamping fixture for semiconductor vacuum chamber valve plate components according to claim 1, characterized in that, The support block is L-shaped.

10. A quick-positioning clamping fixture for semiconductor vacuum chamber valve plate components according to claim 4, characterized in that, A connecting bolt is fixedly installed at one end of the connecting column. A limiting block is detachably installed on the connecting upper plate. The limiting block is provided with a limiting groove that passes through it vertically. The connecting bolt is connected to the connecting upper plate. The connecting bolt is located in the limiting groove. A limiting nut is detachably sleeved on the upper part of the connecting bolt. The limiting nut abuts against the upper side of the limiting block.

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