Scroll plate clamping mechanism and scroll plate processing system

Abstract

The utility model discloses a scroll disc clamping mechanism and scroll disc processing system, including fixed establishment, driving part, elastic diaphragm and clamping piece, driving part and elastic diaphragm are fixed in fixed establishment respectively, and elastic diaphragm is located the top of driving part, and clamping piece is fixed on elastic diaphragm, is used for clamping fixed scroll disc, and clamping piece includes a plurality of clamping claws, and a plurality of clamping claws are used for clamping work piece together, driving part can move under the action of external force, when driving part moves upward under the action of external force, driving part drives elastic diaphragm and occurs deformation upward, and a plurality of clamping claws tilt towards the outside to expand the region formed by a plurality of clamping claws surrounding, when driving part moves downward under the action of external force, elastic diaphragm restores deformation, and a plurality of clamping claws restore its position towards the inside to fix scroll disc. The present application can guarantee that scroll disc clamping surface stress height is even, satisfies the strict requirement of ultra -precision machining to clamping accuracy.

Description

Technical Field

[0001] This utility model relates to the field of ultra-precision machining fixture technology, and in particular to a scroll plate clamping mechanism and a scroll plate machining system. Background Technology

[0002] In the field of ultra-precision machining of scroll plates, the scroll plate, as the "heart component" of core equipment such as compressors and vacuum pumps, directly determines the compression efficiency, sealing performance, and operational stability of the entire machine through its profile accuracy and end face runout accuracy. Currently, the industry's requirements for the machining accuracy of high-end scroll plates have generally reached the micron or even sub-micron level, and the uniformity of the clamping force of the scroll plate fixture is a key prerequisite for ensuring this accuracy. If the clamping force distribution is uneven, the scroll plate will undergo non-uniform elastic deformation under the clamping force. Uneven force distribution may also cause the scroll plate's positioning reference to shift, resulting in a deviation between the actual cutting path and the designed path of the tool, ultimately affecting the meshing accuracy between the scroll plate and its mating components.

[0003] However, most traditional clamping fixtures widely used in the industry currently rely on a "multi-hydraulic cylinder + linkage transmission" structural design to achieve clamping action. This structure requires 3-6 hydraulic cylinders to output thrust synchronously, and then the thrust is transmitted to the clamping surface of the scroll plate through the linkage mechanism to achieve multi-point clamping. But from the perspective of practical application, this design has unavoidable precision shortcomings. On the one hand, because the machining accuracy of the linkage length and the clearance at the hinge are difficult to be completely consistent, the force transmitted by different linkages will have "time difference" and "force difference", causing the force at each contact point of the clamping surface to not reach the set value synchronously. On the other hand, even if the same batch of hydraulic cylinders is used, small deviations in cylinder diameter machining, individual differences in the friction of the seals, and slight unevenness in the flow distribution of the hydraulic system will cause the actual output thrust of different hydraulic cylinders to fluctuate by 5%-10%.

[0004] Therefore, in the face of the continuous upgrading of the precision of scroll wheels in ultra-precision machining, and the inherent defects of traditional fixtures in the uniformity of clamping force, the development of a new type of fixture that can achieve uniform distribution of clamping force across the entire range has become an urgent need to break through the bottleneck of precision in ultra-precision machining of scroll wheels. Summary of the Invention

[0005] The purpose of this invention is to provide a scroll plate clamping mechanism and a scroll plate processing system to improve the clamping uniformity of the scroll plate.

[0006] The objective of this utility model is achieved through the following technical solution: This utility model provides a scroll plate clamping mechanism, including a fixing mechanism, a driving component, an elastic diaphragm, and a clamping component. The driving component and the elastic diaphragm are respectively fixed to the fixing mechanism. The elastic diaphragm is located above the driving component. The clamping component is fixed on the elastic diaphragm and is used to clamp and fix the scroll plate. The clamping component includes multiple jaws, which are used together to clamp the workpiece. The driving member can move under the action of external force. When the driving member moves upward under the action of external force, the driving member drives the elastic diaphragm to deform upward, and the multiple grippers tilt outward to expand the area enclosed by the multiple grippers. When the driving member moves downward under the action of external force, the elastic diaphragm restores its deformation, and the multiple grippers return to their position inward to fix the vortex disk.

[0007] As a further improvement of one embodiment of the present invention, the plurality of grippers are arranged to form a circumferential structure, the inner diameter of the circumferential structure being equal to the diameter of the vortex disk. Each gripper has an arc surface, and the arc surfaces of multiple grippers are spaced apart and surround the circumferential surface that forms the circumferential structure.

[0008] As a further improvement of one embodiment of the present invention, the fixing mechanism includes a fixed seat and a base that are fixedly connected. The base includes a support part and an extension part that are connected to each other. The extension part is located above the support part. A first through hole is provided at the center of the fixed seat. The base is located in the first through hole. The support part is fixedly connected to the bottom end of the fixed seat. The extension part extends out of the first through hole and is connected to the driving member.

[0009] As a further improvement of one embodiment of the present utility model, a second through hole is provided at the center of the driving member, the driving member is disposed in the fixed base, and the extension passes through the second through hole; The driving component includes a first driving part and a second driving part connected to each other. The first driving part is located above the second driving part. Both the first driving part and the second driving part are cylindrical structures, and the circumferential diameter of the first driving part is smaller than the circumferential diameter of the second driving part. The outer circumference of the first driving part has a stepped structure at the end away from the second driving part.

[0010] As a further improvement of one embodiment of the present invention, the thickness of the outer circumferential portion of the second driving part gradually decreases in the direction away from the center of the second driving part.

[0011] As a further improvement of one embodiment of the present invention, a third through hole is provided at the center of the elastic diaphragm, and the extension portion also passes through the third through hole; The outer circumferential portion of the elastic diaphragm is fixedly connected to the fixing base, and the inner circumferential region of the elastic diaphragm near the third through hole is mounted on the stepped structure.

[0012] As a further improvement of one embodiment of the present utility model, the outer surface of the fixing base is provided with a first air hole and a second air hole, and the first air hole and the second air hole are connected to the first through hole. Along the axial direction of the drive member, the first air hole is located below the second drive part, and the second air hole is located above the second drive part; When air enters the first through hole through the first air hole, the second driving part is pushed upward by the air pressure, so as to drive the first driving part to drive the elastic diaphragm to deform upward; when air enters the first through hole through the second air hole, the second driving part is pushed downward by the air pressure, so as to drive the first driving part to move downward, and the elastic diaphragm restores its deformation.

[0013] As a further improvement of one embodiment of this utility model, the driving component is a pneumatic piston.

[0014] As a further improvement of one embodiment of the present utility model, the clamping mechanism further includes a moving disk support seat, which is located within the circumferential structure formed by the plurality of clamping claws, and the moving disk support seat is fixed above the extension for placing the vortex disk. There is a first gap between the upper surface of the moving disk support and the upper surface of the gripper, and there is a second gap between the lower surface of the moving disk support and the lower surface of the gripper.

[0015] This utility model also provides a scroll plate processing system, including the scroll plate clamping mechanism described above.

[0016] Compared with the prior art, the beneficial effects of this utility model include at least the following: This utility model provides a scroll plate clamping mechanism. When the driving component moves upward under the action of external force, the driving component drives the elastic diaphragm to deform upward, and multiple grippers tilt outward to expand the area enclosed by the multiple grippers. When the driving component moves downward under the action of external force, the elastic diaphragm returns to its original deformation, and the multiple grippers return to their original position inward to fix the scroll plate. This utility model utilizes the driving component to drive the elastic diaphragm to deform in order to open and close the grippers, thereby achieving the clamping and fixing of the scroll plate. From the structural root, it avoids the problem of uneven force distribution caused by multiple power sources and multiple linkages, ensuring that the force distribution on the clamping surface of the scroll plate is highly uniform, and meeting the stringent requirements of ultra-precision machining for clamping accuracy. Attached Figure Description

[0017] Figure 1This is a schematic diagram of the structure of a vortex disk clamping mechanism according to an embodiment of the present invention from a first perspective. Figure 2 This is a top view of a scroll plate clamping mechanism according to one embodiment of the present utility model; Figure 3 It corresponds Figure 2 A cross-sectional view along the A'B direction; Figure 4 yes Figure 3 A magnified view of the central region S; Figure 5 It corresponds Figure 2 A cross-sectional view along the AA' direction; Figure 6 This is a schematic diagram of the structure of a vortex disk clamping mechanism according to an embodiment of the present invention from a second perspective; Figure 7 It corresponds Figure 6 Exploded view of the structure.

[0018] In the figure: 1. Fixing mechanism; 11. Fixing base; 111. First through hole; 112. First air hole; 113. Second air hole; 114. Blocking part; 12. Base; 121. Support part; 122. Extension part; 2. Driving component; 21. Second through hole; 22. First driving part; 221. Step structure; 23. Second driving part; 3. Elastic diaphragm; 31. Third through hole; 4. Clamping component; 41. Claw; 411. Arc surface; 412. Fixing end; 413. Clamping end; 5. Sealing ring; 6. Moving plate support base. Detailed Implementation

[0019] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete, and to fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore repeated descriptions of them will be omitted.

[0020] The terms used to describe position and direction in this utility model are illustrated with the accompanying drawings, but changes can be made as needed, and all such changes are included within the scope of protection of this utility model.

[0021] See also Figures 1-6This utility model provides a scroll plate clamping mechanism, including a fixing mechanism 1, a driving component 2, an elastic diaphragm 3, and a clamping component 4. The driving component 2 and the elastic diaphragm 3 are respectively fixed to the fixing mechanism 1, with the elastic diaphragm 3 located above the driving component 2. The clamping component 4 is fixed to the elastic diaphragm 3 and is used to clamp and fix the scroll plate. The clamping component 4 includes multiple jaws 41, which are used together to clamp the workpiece.

[0022] The driving component 2 can move under external force. When the driving component 2 moves upward under external force, it drives the elastic diaphragm 3 to deform upward, and the multiple grippers 41 tilt outward to expand the area enclosed by the multiple grippers 41. When the driving component 2 moves downward under external force, the elastic diaphragm 3 returns to its original deformation, and the multiple grippers 41 return to their original position inward to fix the scroll plate. In this way, the opening and closing of the multiple grippers 41 can be controlled by the process of the driving component 2 driving the elastic diaphragm 3 to deform and return to its original deformation, thereby achieving clamping of the scroll plate. This avoids the problem of uneven force distribution caused by multiple power sources and multiple linkages from the structural source, ensuring that the force on the clamping surface of the scroll plate is highly uniform and meeting the stringent requirements of ultra-precision machining for clamping accuracy.

[0023] See Figure 1 and Figure 2 Multiple grippers 41 are spaced apart and arranged to form a circular structure, the inner diameter of which is equal to the diameter of the vortex disk. Specifically, the multiple grippers 41 are evenly arranged on the circumference.

[0024] Each gripper 41 has an arc surface 411, which is the side of the gripper 41 facing the center of the circumferential structure. Correspondingly, the arc surfaces 411 of multiple grippers 41 are spaced apart and the arc surfaces 411 of multiple grippers 41 surround the circumferential surface of the circumferential structure.

[0025] Each gripper 41 is fixed to the elastic diaphragm 3. Each gripper 41 includes a fixed end 412 and a clamping end 413. The fixed end 412 is detachably mounted to the elastic diaphragm 3 via a connector (such as a bolt), and the clamping end 413 is detachably mounted to the fixed end 412 via a connector. The top portion of the clamping end 413 extends towards the center of the circumferential structure, forming a clamping portion. Except for the clamping portion, the fixed end 412 and the clamping end 413 are connected and fixed to form a cuboid structure. The diameter of the circumferential structure formed by the extensions of the multiple grippers 41 is smaller than the diameter of the circumferential structure formed by the fixed end 412 and the clamping end 413 (excluding the clamping portion). The arc surface 411 is the side of the clamping portion facing the center of the circumferential structure; that is, the arc surface 411 of the clamping portion is the clamping surface for holding the scroll plate. The diameter of the circumferential structure formed by the arc surface 411 is equal to the diameter of the scroll plate.

[0026] In this embodiment, the number of grippers 41 is set to six. The six grippers 41 are spaced apart and form a circumferential structure, and are evenly distributed on the circumference. Correspondingly, the arc surfaces 411 of the six grippers 41 are spaced apart and form a circumferential surface that surrounds the circumferential structure.

[0027] In this embodiment, the gripper 41 is made of hard and wear-resistant SKD11 material and has undergone heat treatment to ensure its wear resistance and deformation resistance during the clamping process of the scroll plate, which is beneficial to maintaining the clamping accuracy of the clamping mechanism.

[0028] This utility model does not limit the axial extension thickness of the clamping part (i.e., the axial extension length of the arc surface 411), the number of jaws 41, or the diameter of the circumferential structure formed by the jaws 41. The design can be adjusted according to the characteristics of the vortex disc product that needs to be clamped.

[0029] See Figure 3 , Figure 5 and Figure 7 The fixing mechanism 1 includes a fixed base 11 and a base 12 that are fixedly connected. The base 12 includes a support portion 121 and an extension portion 122 that are connected to each other. The extension portion 122 is located above the support portion 121. A first through hole 111 is provided at the center of the fixed base 11. The support portion 121 of the base 12 is located in the first through hole 111 and is fixedly connected to the bottom end of the fixed base 11. The extension portion 122 extends out of the first through hole 111 and is connected to the driving member 2.

[0030] Specifically, the support portion 121 and the first through hole 111 are dimensionally matched, meaning that the outer surface of the support portion 121 is connected to the inner surface of the first through hole 111 without any gap between them, and the support portion 121 and the fixing seat 11 are connected by a sealing ring 5. The extension portion 122 has a cylindrical structure, and the outer diameter of the extension portion 122 is smaller than the inner diameter of the first through hole 111, that is, there is a certain space between the outer surface of the extension portion 122 and the inner surface of the first through hole 111.

[0031] In this embodiment, the materials of both the fixing base 11 and the base 12 are preferably 45 steel, and both have undergone heat treatment.

[0032] The driving member 2 has a second through hole 21 at its center. The driving member 2 is disposed within the first through hole 111 of the fixed base 11, and the extension 122 also passes through the second through hole 21. Specifically, the outer diameter of the extension 122 is equal to the inner diameter of the second through hole 21. That is, the driving member 2 is located within the first through hole 111, and is disposed on the support 121 through its second through hole 21 and is fitted and connected to the extension 122. Under the action of external force, the driving member 2 can move up and down along the extending direction of the extension 122. More specifically, the extension 122 extends out of the second through hole 21.

[0033] The driving component 2 includes a first driving part 22 and a second driving part 23 connected to each other, with the first driving part 22 located above the second driving part 23. Both the first driving part 22 and the second driving part 23 are cylindrical structures, and the circumferential diameter of the first driving part 22 is smaller than that of the second driving part 23, while the axial extension length of the first driving part 22 is greater than that of the second driving part 23. The second driving part 23 is disposed on the upper surface of the support part 121, and its lower surface is in contact with the upper surface of the support part 121. The outer circumferential surface of the second driving part 23 is in contact with the inner circumferential surface of the first through hole 111. The inner circumferential surface of the first driving part 22 is in contact with the outer circumferential surface of the extension part 122.

[0034] Specifically, in combination Figure 4 The outer circumference of the first drive unit 22 is provided with a stepped structure 221 at the end away from the second drive unit 23.

[0035] More specifically, the thickness of the outer circumferential region of the second drive unit 23 gradually decreases in the direction away from the center of the second drive unit 23. That is, there is a gap between the lower surface of the region where the thickness of the outer circumferential region of the second drive unit 23 gradually decreases and the upper surface of the support unit 121.

[0036] In this embodiment, the driving component 2 is a pneumatic piston, which can be driven by gas to move up and down along the axial direction of the extension 122.

[0037] The drive component 2 is preferably made of 45 steel and undergoes a heat treatment process.

[0038] See also Figure 3 , Figure 5 and Figure 7 The elastic diaphragm 3 has a third through hole 31 at its center, and the extension 122 also passes through the third through hole 31. Specifically, the outer circumferential portion of the elastic diaphragm 3 is fixedly connected to the fixing base 11, and the inner circumferential region of the elastic diaphragm 3 near the third through hole 31 is mounted on the stepped structure 221 of the first drive unit 22.

[0039] Of course, the inner circumferential region of the elastic diaphragm 3 near the third through hole 31 and the first drive part 22 are also connected by a sealing ring 5.

[0040] In this embodiment, the elastic diaphragm 3 is made of high-strength spring steel and heat-treated, with its thickness error strictly controlled within 0.005mm. The elastic diaphragm 3 converts the linear motion of the drive component 2 along the axial direction into the clamping / releasing action of the gripper 41 through its own elastic deformation, and uses the force generated by the spring steel's restoring deformation to achieve uniform clamping of the scroll plate.

[0041] Furthermore, the outer surface of the fixing base 11 is provided with a first vent 112 and a second vent 113, which communicate with the first through hole 111. Along the axial direction of the driving member 2, the first vent 112 is located below the second driving part 23, and the second vent 113 is located above the second driving part 23. Because there is a gap between the lower surface of the area where the thickness of the outer circumference of the second driving part 23 gradually decreases and the upper surface of the support part 121, the gap between the first vent 112 and the lower surface of the outer circumference region of the second driving part 23 and the upper surface of the support part 121 is connected.

[0042] When air enters through the first vent 112 into the first through hole 111, that is, when air enters through the first vent 112 into the gap between the lower surface of the outer circumferential region of the second drive part 23 and the upper surface of the support part 121, the second drive part 23 is pushed upward by the air pressure, thereby causing the first drive part 22 to drive the elastic diaphragm 3 to deform upward. When air enters through the second vent 113 into the first through hole 111, the second drive part 23 is pushed downward by the air pressure, thereby causing the first drive part 22 to move downward, and the elastic diaphragm 3 returns to its original deformation.

[0043] Further, see Figures 3-5 A blocking portion 114 extends inward from a portion of the fixed base 11 located above the second drive unit 23 to limit the upward movement distance of the drive member 2 under the action of external gas and control the opening degree of the gripper 41. This blocking portion 114 extends inward, and the side of the blocking portion 114 away from the fixed base 11 is in contact with the outer circumferential surface of the first drive unit 22. That is, when air is introduced into the first through hole 111 using the first air hole 112 and the second air hole 113, the second drive unit 23 only moves up and down within the space between the upper surface of the support portion 121 and the lower surface of the blocking portion 114.

[0044] Specifically, there is a certain distance between the lower surface of the blocking part 114 and the upper surface of the second driving part 23, and the second air hole 113 is connected to the gap between the lower surface of the blocking part 114 and the upper surface of the second driving part 23.

[0045] Furthermore, see Figure 3 , Figure 5 and Figure 7 The clamping mechanism also includes a moving plate support 6, which is located within a circumferential structure formed by multiple grippers 41 and is fixed above the extension 122 for placing the vortex disk.

[0046] Specifically, the moving plate support 6 is fixedly mounted on the upper surface of the extension 122.

[0047] There is a first gap between the upper surface of the moving plate support 6 and the upper surface of the gripper 41, and there is a second gap between the lower surface of the moving plate support 6 and the lower surface of the gripper 41, that is, there is a second gap between the lower surface of the moving plate support 6 and the upper surface of the elastic diaphragm 3.

[0048] Specifically, the moving plate support 6 is a cylindrical structure located in the space between the elastic diaphragm 3 and the clamping portion of the gripper 41. The surface area of ​​the moving plate support 6 is larger than the surface area of ​​the circumferential structure formed by the arc surfaces 411 of the multiple grippers 41, and smaller than the surface area of ​​the circumferential structure formed by the fixed ends 412 and the clamping ends 413 (excluding the clamping portion) of the multiple grippers 41.

[0049] Of course, the surface area of ​​the moving plate support 6 is larger than the surface area of ​​the top of the extension 122, and the moving plate support 6 and the extension 122 are also connected by a sealing ring.

[0050] More specifically, there is a third gap between the upper surface of the moving plate support 6 and the lower surface of the clamping part of the gripper 41.

[0051] Thus, when the vortex disk needs to be fixed using the clamping mechanism, air is introduced into the first through hole 111 through the first air hole 112. The second drive unit 23 is pushed upward along the extension direction of the extension 122 by the air pressure below it. That is, the first drive unit 22 moves upward along the extension direction of the extension 122 at the same time. The peripheral area of ​​the elastic diaphragm 3 near the third through hole 31 slowly deforms upward under the drive of the first drive unit 22. The multiple grippers 41 gradually tilt outward in the direction of the outer circumference. That is, the arc surface 41 of the multiple grippers 41 As the area enclosed by the enclosure increases, the periphery of the elastic diaphragm 3 near the third through hole 31 gradually deforms upward, causing the multiple grippers 41 to gradually enter the "open" state. At this time, the vortex disk is placed on the moving disk support 6, the first air hole 112 is stopped, and the second air hole 113 is ventilated, so that the second drive part 23 is driven by the air pressure above it to move downward along the extension direction of the extension part 122. The elastic diaphragm 3 gradually recovers its deformation, and the multiple grippers 41 also return to their initial positions, clamping and fixing the vortex disk.

[0052] This utility model also provides a scroll plate processing system, characterized in that it includes the scroll plate clamping mechanism described in any of the above embodiments.

[0053] In summary, this utility model provides a scroll plate clamping mechanism. When the driving component moves upward under external force, it drives the elastic diaphragm to deform upward, and multiple grippers tilt outward to expand the area enclosed by the grippers. When the driving component moves downward under external force, the elastic diaphragm returns to its original deformation, and the grippers return to their original position inward to fix the scroll plate. This utility model utilizes the deformation of the elastic diaphragm driven by the driving component to open and close the grippers, thus achieving the clamping and fixing of the scroll plate. It avoids the uneven force distribution caused by multiple power sources and multiple linkages from a structural perspective, ensuring uniform force distribution on the clamping surface of the scroll plate and meeting the stringent requirements of ultra-precision machining for clamping accuracy.

[0054] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and alterations to the above embodiments within the scope of the present invention without departing from the principles and spirit of the present invention, and all such changes should fall within the protection scope of the claims of the present invention.

Claims

1. A scroll plate clamping mechanism, characterized in that, The device includes a fixing mechanism, a driving component, an elastic diaphragm, and a clamping component. The driving component and the elastic diaphragm are respectively fixed to the fixing mechanism. The elastic diaphragm is located above the driving component. The clamping component is fixed on the elastic diaphragm and is used to clamp and fix the scroll plate. The clamping component includes multiple jaws, which are used together to clamp the workpiece. The driving member can move under the action of external force. When the driving member moves upward under the action of external force, the driving member drives the elastic diaphragm to deform upward, and the multiple grippers tilt outward to expand the area enclosed by the multiple grippers. When the driving member moves downward under the action of external force, the elastic diaphragm restores its deformation, and the multiple grippers return to their position inward to fix the vortex disk.

2. The scroll plate clamping mechanism according to claim 1, characterized in that, The multiple grippers are arranged to form a circular structure, the inner diameter of which is equal to the diameter of the vortex disk; Each gripper has an arc surface, and the arc surfaces of multiple grippers are spaced apart and surround the circumferential surface that forms the circumferential structure.

3. The scroll plate clamping mechanism according to claim 1, characterized in that, The fixing mechanism includes a fixed seat and a base that are fixedly connected. The base includes a support part and an extension part that are connected to each other. The extension part is located above the support part. A first through hole is provided at the center of the fixed seat. The base is located in the first through hole. The support part is fixedly connected to the bottom end of the fixed seat. The extension part extends out of the first through hole and is connected to the driving member.

4. The scroll plate clamping mechanism according to claim 3, characterized in that, The driving component has a second through hole at its center, the driving component is disposed in the fixed base, and the extension passes through the second through hole; The driving component includes a first driving part and a second driving part connected to each other. The first driving part is located above the second driving part. Both the first driving part and the second driving part are cylindrical structures, and the circumferential diameter of the first driving part is smaller than the circumferential diameter of the second driving part. The outer circumference of the first driving part has a stepped structure at the end away from the second driving part.

5. The scroll plate clamping mechanism according to claim 4, characterized in that, The thickness of the outer circumferential region of the second drive unit gradually decreases in the direction away from the center of the second drive unit.

6. The scroll plate clamping mechanism according to claim 4, characterized in that, The elastic diaphragm has a third through hole at its center, and the extension also passes through the third through hole; The outer circumferential portion of the elastic diaphragm is fixedly connected to the fixing base, and the inner circumferential region of the elastic diaphragm near the third through hole is mounted on the stepped structure.

7. The scroll plate clamping mechanism according to claim 4, characterized in that, The outer surface of the fixing base is provided with a first air hole and a second air hole, and the first air hole and the second air hole are connected to the first through hole; Along the axial direction of the drive member, the first air hole is located below the second drive part, and the second air hole is located above the second drive part; When air enters the first through hole through the first air hole, the second driving part is pushed upward by the air pressure, so as to drive the first driving part to drive the elastic diaphragm to deform upward; when air enters the first through hole through the second air hole, the second driving part is pushed downward by the air pressure, so as to drive the first driving part to move downward, and the elastic diaphragm restores its deformation.

8. The scroll plate clamping mechanism according to claim 4, characterized in that, The driving component is a pneumatic piston.

9. The scroll plate clamping mechanism according to claim 4, characterized in that, The clamping mechanism further includes a movable disk support base, which is located within the circumferential structure formed by the plurality of clamping claws, and the movable disk support base is fixed above the extension for placing the vortex disk. There is a first gap between the upper surface of the moving disk support and the upper surface of the gripper, and there is a second gap between the lower surface of the moving disk support and the lower surface of the gripper.

10. A scroll disk machining system, characterized in that, Includes the scroll plate clamping mechanism as described in any one of claims 1-9.

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