Mirror chip fixing device for radiographic inspection

Abstract

This application relates to a mirror chip fixing device for X-ray inspection, comprising a placement plate, a plurality of sliding rods at the bottom of the placement plate, clamping arms connected to the sliding rods, a mirror chip being clamped at the top of the placement plate by the clamping arms, a connecting mechanism at the bottom of the placement plate, an offset plate below the connecting mechanism, and a tilting component at the bottom of the offset plate, with a base plate at the end of the tilting component away from the offset plate. This application utilizes the clamping plates and clamping bolts of the clamping arms to specifically fix the mirror chip. The threaded connection of the bolts allows for precise adjustment of the clamping force, ensuring that the chip does not loosen or shift during inspection, while also preventing damage to the chip due to excessive clamping. The sliding rods allow the clamping arms to flexibly adjust their position according to the size of the mirror chip, improving the versatility of the device. Stable fixing ensures that the chip's position remains unchanged during inspection, reducing image blurring or data errors caused by shaking.

Description

Technical Field

[0001] This application relates to the field of X-ray inspection technology, and in particular to a mirror chip fixing device for X-ray inspection. Background Technology

[0002] Currently, chips are a way to miniaturize circuits (mainly including semiconductor devices, but also passive components) in electronics, and are often manufactured on the surface of semiconductor wafers. Another type, thick-film integrated circuits, are miniaturized circuits composed of independent semiconductor devices and passive components integrated onto a substrate or circuit board.

[0003] In the prior art, a Chinese patent discloses a "Mirror Chip Fixing Device for X-ray Detection" with publication number "202222062928.5". This patent mainly uses a cavity with an opening at the top. Multiple rotating plates evenly distributed from left to right are arranged inside the cavity. The rotating plates are slidably connected to the cavity, allowing adjustment of the lens chip's placement angle during placement by adjusting the position and angle of the rotating plates. Furthermore, when the lens chip needs to be placed vertically and is relatively thin, the vertical placement of the mirror chip can be achieved by clamping the lens chip with two rotating plates. In summary, this reduces the difficulty of adjusting the mirror chip's placement angle, eliminating the need for multiple angle adjustments and improving detection efficiency. However, during placement, this device has a low clamping capacity for the mirror chip, and vibrations during operation can cause the mirror chip to wobble. Summary of the Invention

[0004] To address the issue that the device has low clamping capacity for mirror chips during placement, and that the mirror chips are prone to shaking during operation if vibration occurs, this application provides a mirror chip fixing device for X-ray inspection.

[0005] This application provides a mirror chip fixing device for X-ray inspection, which adopts the following technical solution: A mirror chip fixing device for X-ray inspection includes a placement plate. The bottom of the placement plate is provided with multiple sets of sliding rods, and clamping arms are connected to the sliding rods. The mirror chip is clamped on the top of the placement plate by the clamping arms. The bottom of the placement plate is provided with a connecting mechanism, and the bottom of the connecting mechanism is provided with an offset plate. The bottom of the offset plate is provided with a tilting component, and the end of the tilting component away from the offset plate is provided with a base plate. The clamping arm includes a clamping plate and a clamping bolt. The clamping bolt is used to adjust the position of the clamping plate and is threaded inside the clamping plate.

[0006] By adopting the above technical solution, the clamping plates and clamping bolts of the clamping arm can be used to fix the mirror chip in a targeted manner. The threaded connection of the bolts can precisely adjust the clamping force, ensuring that the chip does not loosen or shift during the inspection process, while avoiding damage to the chip due to excessive clamping. The sliding rod allows the clamping arm to be flexibly adjusted according to the size of the mirror chip, making it suitable for chips of different specifications and improving the versatility of the device. Stable fixation ensures that the chip's position remains unchanged during the inspection process, reducing blurry images or data errors caused by shaking. Furthermore, the potential angle adjustment function of the offset plate and tilting component allows the X-ray to irradiate the chip at a more suitable angle, improving the comprehensiveness and accuracy of the inspection.

[0007] Preferably, the clamping arm further includes a movable rod, which is fixed to the clamping plate by clamping bolts, and one end of the movable rod and the outer wall of the clamping plate are both covered with rubber sheets.

[0008] By adopting the above technical solution, the moving rod is fixed to the clamping plate by clamping bolts, and the overall clamping range can be flexibly adjusted along the sliding rod direction. Combined with the adjustment function of the sliding rod itself, it can accommodate mirror chips with larger size differences. At the same time, the rubber sheet covering the outer wall of the moving rod and clamping plate can directly buffer the impact of clamping force on the chip. The rubber material is soft and has moderate friction, which can avoid scratches and wear on the mirror surface caused by direct contact with metal parts, and also increase the stability of clamping through its own elasticity, preventing the chip from slipping due to slight vibrations during testing.

[0009] Preferably, the mirror chip is located on the outer wall of a pair of rods and a clamping piece, and the clamping piece and the moving rod together clamp the mirror chip.

[0010] By adopting the above technical solution, the coordinated clamping of the clamping plate and the moving rod can keep the detection surface of the mirror chip flat and in the optimal detection position, avoiding abnormal X-ray penetration path caused by chip tilting and ensuring the accuracy of detection data.

[0011] Preferably, the end of the movable rod is provided with a connecting sleeve, which is sleeved on the outer wall of the slide rod, and the inner wall of the connecting sleeve is threaded with a positioning screw, which contacts the slide rod.

[0012] By adopting the above technical solution, the connecting sleeve is fitted onto the outer wall of the slide rod to form a stable surface contact connection, avoiding wobbling or offset between the moving rod and the slide rod. At the same time, the positioning screw is threaded onto the top slide rod. Simply loosen the positioning screw to push the moving rod to slide freely along the slide rod. Adjust to the target position and then tighten the positioning screw to fix it. The operation is simple and efficient and can quickly adapt to mirror chips of different sizes.

[0013] Preferably, the connecting mechanism includes a mounting sleeve and a plug rod inserted inside the mounting sleeve. The mounting sleeve is fixedly connected to the lower surface of the placement plate, and the plug rod is fixedly connected to the upper surface of the offset plate.

[0014] By adopting the above technical solution, the mounting sleeve and the plug rod are connected by a plug-in joint to form a stable connection for axial positioning. This allows for the rapid assembly or disassembly of the placement plate and the offset plate. Compared with bolt fixing, no auxiliary tools are required to complete the docking, which greatly simplifies the installation and disassembly of the device and facilitates later maintenance or component replacement.

[0015] Preferably, the tilting assembly includes multiple push rods and rotating balls fixed at both ends of the push rods. Multiple cups are fixedly provided on the lower surface of the offset plate and the upper surface of the base plate, and the rotating balls are sleeved on the inner wall of the cups.

[0016] By adopting the above technical solution, multiple push rods form a multi-point support structure. With the surface contact between the rotating ball and the cup, the load above can be evenly distributed to the bottom plate, avoiding component deformation caused by excessive local stress. At the same time, the ball surface contact itself has an automatic centering characteristic, which can buffer the instantaneous stress during the adjustment process and ensure the overall stability of the device without obvious shaking when tilting.

[0017] Preferably, a support rod is fixedly provided on the upper surface of the base plate, the support rod is located at the center of the base plate, and a support structure is provided at the top of the support rod.

[0018] By adopting the above technical solution, the central support rod and the multi-point support of the tilting component complement each other and jointly bear the weight above. When the tilting component adjusts its angle or bears instantaneous stress, the central support can share part of the load, reduce the stress on components such as push rods and rotating balls in the tilting component, extend their service life, and avoid structural failure caused by single-point overload.

[0019] Preferably, the support structure includes a support ball and a support bowl sleeved on the outer wall of the support ball, the support ball being fixedly connected to the top of the support rod, and the support bowl being fixedly connected to the lower surface of the offset plate.

[0020] By adopting the above technical solution, the spherical contact between the support ball and the support bowl is a point-to-surface sliding fit, which can achieve 0° relative rotation without dead angles; when the offset plate is tilted at multiple angles or shifted horizontally through the tilting component, the two can automatically adapt to the displacement and angle changes of the offset plate, without rigidly constraining the tilting, shifting and other adjustment actions, ensuring that the adjustment flexibility of functional components such as the tilting component and the offset structure is not affected.

[0021] In summary, this application includes at least one of the following beneficial technical effects: 1. The clamping arms, with their clamping plates and bolts, can precisely fix the mirror-finished chip. The threaded connection of the bolts allows for precise adjustment of the clamping force, ensuring that the chip does not loosen or shift during inspection while preventing damage due to excessive clamping. The sliding rod allows the clamping arms to be flexibly adjusted according to the size of the mirror-finished chip, making it suitable for chips of different specifications and improving the device's versatility. Stable fixation ensures that the chip remains in the same position during inspection, reducing image blurring or data errors caused by shaking. Furthermore, the potential angle adjustment function of the offset plate and tilting assembly allows the X-ray to illuminate the chip at a more suitable angle, improving the comprehensiveness and accuracy of the inspection. 2. The moving rod is fixed to the clamping plate by clamping bolts, allowing for flexible adjustment of the overall clamping range along the sliding rod direction. Combined with the sliding rod's own adjustment function, it can accommodate mirror-finished chips with larger size differences. Simultaneously, the rubber sheet covering the outer wall of the moving rod and clamping plate directly buffers the impact of clamping force on the chip. The rubber material is soft and has moderate friction, preventing scratches and wear on the mirror surface caused by direct contact with metal parts, while its elasticity increases clamping stability, preventing the chip from slipping due to slight vibrations during testing. 3. By using the insertion fit between the mounting sleeve and the plug rod, a stable connection with axial positioning is formed, which can quickly realize the assembly or disassembly of the placement plate and the offset plate. Compared with the bolt fixing method, no auxiliary tools are required to complete the docking, which greatly simplifies the installation and disassembly of the device and facilitates later maintenance or component replacement. Attached Figure Description

[0022] Figure 1 This is a three-dimensional structural diagram of a mirror chip fixing device for X-ray inspection. Figure 2 This is a cross-sectional schematic diagram of the slide bar of the mirror chip fixing device for X-ray inspection; Figure 3 This is a bottom-view three-dimensional structural diagram of the mounting plate for the mirror chip fixing device for X-ray inspection; Figure 4 This is a cross-sectional structural diagram of the clamping arm of the mirror chip fixing device for X-ray inspection.

[0023] Reference numerals: 1. Placement plate; 2. Slide rod; 3. Clamping arm; 31. Clamping piece; 32. Clamping bolt; 33. Moving rod; 34. Rubber sheet; 35. Connecting sleeve; 36. Positioning screw; 4. Mirror chip; 5. Connecting mechanism; 51. Mounting sleeve; 52. Insertion rod; 6. Offset plate; 7. Tilt assembly; 71. Push rod; 72. Rotating ball; 73. Cup; 8. Base plate; 9. Support rod; 10. Support structure; 101. Support ball; 102. Support cup. Detailed Implementation

[0024] The following is in conjunction with the appendix Figure 1 -Appendix Figure 4 This application will be described in further detail.

[0025] This application discloses a mirror chip fixing device for X-ray inspection.

[0026] Reference Figures 1 to 4 A mirror chip fixing device for X-ray inspection includes a placement plate 1, a plurality of slide rods 2 are provided at the bottom of the placement plate 1, and clamping arms 3 are connected to the outer walls of the slide rods 2. The mirror chip 4 is clamped at the top of the placement plate 1 by the clamping arms 3. A connecting mechanism 5 is provided at the bottom of the placement plate 1, and an offset plate 6 is provided below the connecting mechanism 5. An tilting component 7 is provided at the bottom of the offset plate 6, and a base plate 8 is provided at the other end of the tilting component 7. The clamping arm 3 includes a clamping plate 31 and a clamping bolt 32. The clamping bolt 32 is threaded inside the clamping plate 31 and is used to adjust the position of the clamping plate 31. The clamping arm 3 also includes a movable rod 33, which is fixed to the clamping plate 31 by clamping bolts 32. One end of the movable rod 33 and the outer wall of the clamping plate 31 are both covered with rubber sheets 34. The mirror chip 4 is located on the outer wall of the moving rod 33 and the clamping piece 31, and the clamping piece 31 and the moving rod 33 together clamp the mirror chip 4; The connecting mechanism 5 includes a mounting sleeve 51 and a plug rod 52 inserted inside the mounting sleeve 51. The mounting sleeve 51 is fixedly connected to the lower surface of the placement plate 1, and the plug rod 52 is fixedly connected to the upper surface of the offset plate 6.

[0027] The technical effect achieved by the above embodiment is as follows: In use, first push the clamping arm 3 outward to provide sufficient clamping space for the mirror chip 4, and then clamp and fix the mirror chip 4. First push the clamping arm 3 inward, so that the mirror chip 4 is located on the inner wall of the moving rod 33 and the clamping piece 31. After the mirror chip 4 is located on the inner wall of the clamping piece 31 on all sides, rotate the clamping bolt 32 to make the clamping piece 31 clamp the mirror chip 4. During clamping, the rubber piece 34 contacts the mirror chip 4 to avoid contact with hard objects and cause scratches. After correct clamping, rotate the positioning screw 36 to fix the clamping arm 3 and the slide rod 2 to prevent the clamping arm 3 from sliding accidentally. After clamping, insert the plug rod 52 at the bottom of the placement plate 1 into the inside of the mounting sleeve 51 to connect the placement plate 1 with the offset plate 6 and the base plate 8.

[0028] Example 2 like Figures 2 to 4As shown, a mirror chip fixing device for X-ray detection includes all the contents of the embodiments. In addition, the tilting component 7 includes multiple push rods 71 ​​and rotating balls 72 fixedly connected to both ends of the push rods 71. Multiple sleeves 73 are fixedly provided on the lower surface of the offset plate 6 and the upper surface of the base plate 8. The rotating balls 72 are sleeved on the inner wall of the sleeves 73.

[0029] The technical effect achieved by the above embodiment is that, since each push rod 71 is provided with a cup 73 and a rotating ball 72, after multiple push rods 71 ​​output different lengths, the offset plate 6 can be offset at a certain angle, so that the mirror chip 4 can be used at various angles, and the rotating ball 72 and the cup 73 will not restrict the change of the angle of the offset plate 6.

[0030] Example 3 like Figures 2 to 4 As shown, a mirror chip fixing device for X-ray detection includes all the contents of the embodiments. In addition, a support rod 9 is fixedly provided on the upper surface of the base plate 8. The support rod 9 is located at the center of the base plate 8. A support structure 10 is provided at the top of the support rod 9. The support structure 10 includes a support ball 101 and a support bowl 102 sleeved on the outer wall of the support ball 101. The support ball 101 is fixedly connected to the top of the support rod 9, and the support bowl 102 is fixedly connected to the lower surface of the offset plate 6.

[0031] The technical effect achieved by the above embodiment is that it provides sufficient support for the offset plate 6. When the angle of the offset plate 6 changes, the support rod 9 and its top support bowl 102 and support ball 101 can prevent the offset plate 6 from moving accidentally, making the angle change of the offset plate 6 more accurate and smoother.

[0032] The implementation principle of this application embodiment is as follows: In implementation, the mirror chip 4 is placed on the placement plate 1, and the mirror chip 4 is clamped on the clamping arm 3. The clamping bolt 32 is rotated, and the clamping piece 31 clamps and fixes the mirror chip 4, so that the mirror chip 4 is fixed on the placement plate 1, making the mirror chip 4 more stable. At the same time, in cooperation with the connecting mechanism 5 and the tilting component 7, the shaking and offset can be adjusted, so that the placement plate 1 remains stable, and the mirror chip 4 is more stable.

[0033] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A mirror chip fixing device for X-ray inspection, comprising a placement plate (1), characterized in that, The bottom of the placement plate (1) is provided with multiple sets of slide rods (2), and clamping arms (3) are connected to the slide rods (2). The mirror chip (4) is clamped on the top of the placement plate (1) by the clamping arms (3). The bottom of the placement plate (1) is provided with a connecting mechanism (5), and an offset plate (6) is provided below the connecting mechanism (5). The bottom of the offset plate (6) is provided with a tilting component (7), and a base plate (8) is provided at the end of the tilting component (7) away from the offset plate (6). The clamping arm (3) includes a clamping plate (31) and a clamping bolt (32). The clamping bolt (32) is used to adjust the position of the clamping plate (31), and the clamping bolt (32) is threaded inside the clamping plate (31).

2. The mirror chip fixing device for X-ray inspection according to claim 1, characterized in that, The clamping arm (3) also includes a moving rod (33), which is fixed to the clamping plate (31) by a clamping bolt (32). One end of the moving rod (33) and the outer wall of the clamping plate (31) are both covered with rubber sheets (34).

3. The mirror chip fixing device for X-ray inspection according to claim 1, characterized in that, The mirror chip (4) is located on the outer wall of a pair of rods and a clamping piece (31), and the clamping piece (31) and the moving rod (33) together clamp the mirror chip (4).

4. The mirror chip fixing device for X-ray inspection according to claim 1, characterized in that, The end of the moving rod (33) is provided with a connecting sleeve (35), which is sleeved on the outer wall of the slide rod (2). The inner wall of the connecting sleeve (35) is threaded with a positioning screw (36), which is in contact with the slide rod (2).

5. The mirror chip fixing device for X-ray inspection according to claim 1, characterized in that, The connecting mechanism (5) includes a mounting sleeve (51) and a plug rod (52) inserted inside the mounting sleeve (51). The mounting sleeve (51) is fixedly connected to the lower surface of the placement plate (1), and the plug rod (52) is fixedly connected to the upper surface of the offset plate (6).

6. The mirror chip fixing device for X-ray inspection according to claim 1, characterized in that, The tilting assembly (7) includes multiple push rods (71) and rotating balls (72) fixed at both ends of the push rods (71). Multiple sleeves (73) are fixedly provided on the lower surface of the offset plate (6) and the upper surface of the base plate (8). The rotating balls (72) are sleeved on the inner wall of the sleeves (73).

7. The mirror chip fixing device for X-ray inspection according to claim 1, characterized in that, A support rod (9) is fixedly provided on the upper surface of the base plate (8). The support rod (9) is located at the center of the base plate (8). A support structure (10) is provided at the top of the support rod (9).

8. The mirror chip fixing device for X-ray inspection according to claim 1, characterized in that, The support structure (10) includes a support ball (101) and a support bowl (102) sleeved on the outer wall of the support ball (101). The support ball (101) is fixedly connected to the top of the support rod (9), and the support bowl (102) is fixedly connected to the lower surface of the offset plate (6).

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