A vertical silicon carbide boat tooling fixture

Abstract

The utility model relates to the field of semiconductor ceramics discloses a vertical silicon carbide boat frock clamp, including flat plate base, L type support board, left support board and right support board, its characterized in that: the inner wall of flat plate base top is provided with lower mounting plate, the lower mounting plate top is fixedly connected with a plurality of tooth bars, the tooth bar top is fixedly connected with upper mounting plate, the flat plate base top is provided with a plurality of sliding slots, the sliding slot inner wall all has two support side plates, and adjacent two support side plate junctions all are connected through two L type support boards. In the utility model, the tooth bar of silicon carbide boat is clamped and fastened through installing left support board and right support board respectively, utilizes the vertical structure of Z type support board, realizes the tooth bar clamping fastening and makes it have high perpendicularity and does not shift, Z type support board plane and tooth bar side surface contact, avoid the problem that traditional point locking and bolt clamping work piece bring, and the assembly precision is higher, and the operation is convenient.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor ceramics, and in particular to a vertical silicon carbide boat tooling fixture. Background Technology

[0002] Vertical silicon carbide boats are specialized support equipment in high-temperature semiconductor wafer processes. They feature a vertical structure and are assembled from upper and lower mounting plates and multiple toothed bars with precision grooves. Wafers can be vertically inserted into the grooves to achieve single-wafer isolation. The main body is made of high-purity silicon carbide material. With its high temperature resistance, chemical corrosion resistance, and excellent thermal stability, it can stably support wafers in high-temperature furnace tube processes such as diffusion, oxidation, and CVD, while ensuring uniform heating and process cleanliness. It is a key auxiliary component for improving wafer manufacturing yield and efficiency.

[0003] The assembly and fixing method of vertical silicon carbide boats directly affects the heat resistance and structural stability of the workpiece after sintering. Vertical silicon carbide boats mainly employ a mechanical structure consisting of pressure plates and side plates connected by bolts. Positioning and fixing the vertical silicon carbide boat are achieved by manually tightening and loosening the bolts. This point-by-point tightening and loosening of the bolts is cumbersome. Even with a specific tightening sequence, it is difficult to ensure uniform pressure at all points, which may lead to excessive localized stress and deformation of the vertical silicon carbide boat. Furthermore, operational errors in tightening the bolts can result in insecure clamping, affecting its vertical accuracy and performance. Simultaneously, it can damage the surface of the vertical silicon carbide boat, leaving scratches or indentations. In fields with extremely high surface quality requirements, such as semiconductor manufacturing, this can affect product yield. Therefore, this application proposes a tooling fixture for vertical silicon carbide boats to address this technical problem. Utility Model Content

[0004] The purpose of this utility model is to address the shortcomings of existing technologies by proposing a vertical silicon carbide boat tooling fixture. The toothed bar of the silicon carbide boat is clamped and secured by installing left and right support plates respectively. The vertical structure of the Z-shaped support plates achieves high verticality in clamping and securing the toothed bar without deviation. The plane of the Z-shaped support plate is in contact with the side of the toothed bar, avoiding the problems caused by traditional point-by-point locking and loosening of bolts to clamp the workpiece. The assembly accuracy is high and the operation is convenient.

[0005] To achieve the above objectives, the present invention provides the following technical solution: A vertical silicon carbide boat fixture includes a flat base, an L-shaped support plate, a left support plate, and a right support plate. The flat base has a lower mounting plate on its inner top wall, multiple toothed rods are fixedly connected to the top of the lower mounting plate, and an upper mounting plate is fixedly connected to the top of each toothed rod. The flat base has multiple sliding grooves, each with two supporting side plates engaged on its inner wall. Adjacent supporting side plates are connected by two L-shaped support plates. The top of each upper supporting side plate has a U-shaped support plate, and one inward-facing end of each supporting side plate has a Z-shaped support plate.

[0006] Furthermore, the inner wall of the top of the flat plate base is provided with multiple limiting holes, and the bottom of the lower mounting plate is provided with multiple positioning holes that match the limiting holes.

[0007] Furthermore, the top of each U-shaped support plate is located at the bottom of the upper mounting plate, and a square through hole is opened on the upper front side of each of the upper support side plates, and a square through hole is opened on the lower front side of each of the lower support side plates.

[0008] Furthermore, each of the Z-shaped support plates is composed of a left support plate and a right support plate, and the outward end of each toothed rod is engaged with the inward end of the Z-shaped support plate.

[0009] Furthermore, the outward end of each of the left support plates is engaged with the left side of the inward end of each of the support side plates, and the outward end of each of the right support plates is engaged with the right side of the inward end of each of the support side plates.

[0010] This utility model has the following beneficial effects: 1. In this utility model, the toothed bar of the silicon carbide boat is clamped and fastened by installing the left support plate and the right support plate respectively. The vertical structure of the Z-shaped support plate is used to clamp and fasten the toothed bar, so that it has high verticality and does not shift. The plane of the Z-shaped support plate is in contact with the side of the toothed bar, avoiding the problems caused by the traditional point-by-point locking and loosening of bolts to clamp the workpiece. The assembly accuracy is high and the operation is convenient.

[0011] 2. In this utility model, when assembling the vertical silicon carbide boat, the flat base and the supporting side plate are vertically connected by bolts and nuts. The vertical fixed connection between the upper and lower supporting side plates and the L-shaped support plate allows for the detachment and replacement of the support plate to meet the usage requirements under different conditions, and has high reliability. Attached Figure Description

[0012] Figure 1 This is a perspective view of a vertical silicon carbide boat tooling fixture proposed in this utility model. Figure 2 This is a schematic diagram of the flat plate base in a vertical silicon carbide boat tooling fixture proposed in this utility model; Figure 3 This is a schematic diagram of the Z-shaped support plate in a vertical silicon carbide boat tooling fixture proposed in this utility model. Figure 4 This is a schematic diagram of the supporting side plate in a vertical silicon carbide boat tooling fixture proposed in this utility model.

[0013] Legend: 1. Flat base; 2. Lower mounting plate; 3. Z-shaped support plate; 4. Toothed rod; 5. L-shaped support plate; 6. Support side plate; 7. Upper mounting plate; 8. U-shaped support plate; 9. Square through hole; 10. Sliding groove; 11. Limiting hole; 12. Left support plate; 13. Right support plate. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0015] Reference Figure 1-4 An embodiment of this utility model provides a vertical silicon carbide boat tooling fixture, including a flat base 1, an L-shaped support plate 5, a left support plate 12 and a right support plate 13. A lower mounting plate 2 is provided on the inner wall of the top of the flat base 1. Multiple limiting holes 11 are provided on the inner wall of the top of the flat base 1. Multiple positioning holes matching the limiting holes 11 are provided on the bottom of the lower mounting plate 2. Multiple toothed rods 4 are fixedly connected to the top of the lower mounting plate 2. An upper mounting plate 7 is fixedly connected to the top of the toothed rods 4. Multiple sliding grooves 10 are provided on the top of the flat base 1. Two support side plates 6 are snapped into the inner wall of each sliding groove 10. The connection between two adjacent support side plates 6 is connected by two L-shaped support plates 5. A square through hole 9 is provided on the upper side of the front end of the upper support side plate 6. A square through hole 9 is provided on the lower side of the front end of the lower support side plate 6. Specifically, the flat base 1 is square with a circular groove in the center and several limiting holes 11 on it, which match the positioning holes of the mounting plate 2 under the silicon carbide boat. Each square through hole 9 has a threaded hole inside. The flat base 1 has several limiting holes 11 with threaded holes, which match the threaded holes on the square through holes 9 in the support side plate 6. In use, the support side plate 6 is inserted into the limiting holes 11 of the mounting platform, and a 90° installation is achieved using bolts, nuts, washers, and a torque wrench. When connecting the upper and lower support side plates 6, take… The L-shaped support plate 5 has several threaded holes. Align one end of the L-shaped support plate 5 with the upper threaded hole of the lower support side plate 6, insert bolts, and tighten them to a fixed torque using a torque wrench. Ensure the L-shaped support plate 5 is perpendicular to the lower support side plate 6, and use a right-angle ruler to calibrate and ensure the perpendicularity error is within an acceptable range. Next, align the lower threaded hole of the upper support side plate 6 with the other end of the L-shaped support plate 5, insert bolts, and tighten them to a fixed torque. At this point, the upper and lower support side plates 6 must remain parallel. Use a dial indicator to check the parallelism of the side plates, ensuring the error is within an acceptable range. The top of the upper support side plate 6 is provided with a U-shaped support plate 8, and the top of the U-shaped support plate 8 is provided at the bottom of the upper mounting plate 7. The inner end of the support side plate 6 is provided with a Z-shaped support plate 3, which is composed of a left support plate 12 and a right support plate 13. The outer end of the toothed rod 4 is engaged with the inner end of the Z-shaped support plate 3. The outer end of the left support plate 12 is engaged with the left side of the inner end of the support side plate 6, and the outer end of the right support plate 13 is engaged with the right side of the inner end of the support side plate 6. Specifically, when installing the toothed rod 4, first align the threaded holes at both ends of the left support plate 12 with the corresponding threaded holes of the upper and lower support side plates 6, insert the bolts, and tighten them to the fixed torque using a torque wrench. Then, place the left side of the toothed rod 4 against the right-angle side of the left support plate 12. Next, align the threaded holes at both ends of the right support plate 13 with the corresponding threaded holes of the upper and lower support side plates 6, insert the bolts, and tighten them to the fixed torque using a torque wrench. During the tightening process, tighten the upper bolts first and then the lower bolts to avoid stress on the toothed rod 4. After installing each set of Z-shaped support plates 3, use a dial indicator to check the verticality of the toothed rod 4. The measurement positions are the top and bottom of the toothed rod 4. Ensure that the verticality error is within an acceptable range. If it exceeds the tolerance, the right-angle side of the detachable Z-shaped support plate 3 can be machined until the accuracy meets the standard. Then, align the threaded hole at one end of the U-shaped support plate 8 with the corresponding threaded hole on the upper support side plate 6, insert the bolt, and tighten it to the fixed torque using a torque wrench. Then, align the mounting plate 7 on the silicon carbide boat with the mounting groove at the top of the toothed rod 4, and slowly press it down so that the upper mounting plate 7 and the toothed rod 4 are completely in contact, and the U-shaped support plate 8 supports the upper mounting plate 7. At this time, it is necessary to check the coaxiality of the upper mounting plate 7 and the lower mounting plate 2. Working Principle: In this embodiment, all workpieces are made of graphite. In practical use, first, the lower mounting plate 2 of the silicon carbide boat is placed in the circular groove at the top of the flat base 1, and the positioning holes on the lower mounting plate 2 are matched with the multiple limiting holes 11 on the flat base 1. Then, the graphite positioning pin is inserted along the positioning holes on the lower mounting plate 2 into the limiting holes 11, thereby installing the lower mounting plate 2 onto the flat base 1. After installation, the support side plate 6 is inserted into the sliding groove 10 on the flat base 1, and the threaded holes inside the square through holes 9 on the support side plate 6 are aligned with the threaded holes on the surface of the sliding groove 10. Bolts, washers, and nuts are installed, and tightened to a fixed torque using a torque wrench. The support side plate 6 is installed at a 90° angle on the flat base 1. The support side plate 6 is then removed and placed on top of the already installed support side plate 6. Next, an L-shaped support plate 5 with several threaded holes is taken, and one end is connected to the lower support... Align the upper threaded holes of the support side plate 6, insert bolts, and tighten them to a fixed torque using a torque wrench. Ensure that the L-shaped support plate 5 is perpendicular to the lower support side plate 6, and use a right-angle ruler to calibrate and ensure that the perpendicularity error is within an acceptable range. Next, align the lower threaded holes of the upper support side plate 6 with the other end of the L-shaped support plate 5, insert bolts, and tighten them to a fixed torque. At this time, the upper and lower support side plates 6 must be kept parallel. Use a dial indicator to check the parallelism of the side plates and ensure that the error is within an acceptable range. Then, align the threaded holes at both ends of the left support plate 12 with the corresponding threaded holes of the upper and lower support side plates 6, insert bolts, and tighten them to a fixed torque using a torque wrench. Install the toothed bar 4 so that its left side is completely attached to the right-angled side of the left support plate 12. Then, align the threaded holes at both ends of the right support plate 13 with the corresponding threaded holes of the upper and lower support side plates 6, insert bolts, and tighten them to a fixed torque using a torque wrench. During the tightening process, tighten the upper bolts first and then the lower bolts to avoid stress on the toothed bar 4. After installing each set of Z-shaped support plates 3, use a dial indicator to check the verticality of the toothed bar 4. The measurement positions are the top and bottom of the toothed bar 4. Ensure that the verticality error is within an acceptable range. If it exceeds the tolerance, the right-angle side of the detachable Z-shaped support plate 3 can be processed until the accuracy meets the standard. Then, align the threaded hole at one end of the U-shaped support plate 8 with the corresponding threaded hole on the upper support side plate 6, insert the bolt, and tighten it to the fixed torque using a torque wrench. Then, align the mounting plate 7 on the silicon carbide boat with the mounting groove at the top of the toothed bar 4 and slowly press it down so that the upper mounting plate 7 and the toothed bar 4 are completely in contact, and the U-shaped support plate 8 supports the upper mounting plate 7. At this time, it is necessary to check the coaxiality of the upper mounting plate 7 and the lower mounting plate 2. Finally, in the order of "lower support side plate 6 first → L-shaped support plate 5 → Z-shaped support plate 3 → U-shaped support plate 8", use a torque wrench to retighten all bolts to the same torque as during installation to avoid loosening of bolts during assembly.

[0016] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A vertical silicon carbide boat tooling fixture, comprising a flat base (1), an L-shaped support plate (5), a left support plate (12), and a right support plate (13), characterized in that: The top inner wall of the flat base (1) is provided with a lower mounting plate (2), and the top of the lower mounting plate (2) is fixedly connected with multiple toothed rods (4). The top of the toothed rods (4) is fixedly connected with an upper mounting plate (7). The top of the flat base (1) is provided with multiple sliding grooves (10). The inner wall of each sliding groove (10) is fitted with two supporting side plates (6). The connection between two adjacent supporting side plates (6) is connected by two L-shaped support plates (5). The top of the upper supporting side plate (6) is provided with a U-shaped support plate (8). The inner end of each supporting side plate (6) is provided with a Z-shaped support plate (3).

2. The vertical silicon carbide boat tooling fixture according to claim 1, characterized in that: The top inner wall of the flat plate base (1) is provided with multiple limiting holes (11), and the bottom end of the lower mounting plate (2) is provided with multiple positioning holes that match the limiting holes (11).

3. The vertical silicon carbide boat tooling fixture according to claim 1, characterized in that: The top of each U-shaped support plate (8) is located at the bottom of the upper mounting plate (7). The upper support side plate (6) has a square through hole (9) on the upper side and the lower support side plate (6) has a square through hole (9) on the lower side.

4. The vertical silicon carbide boat tooling fixture according to claim 1, characterized in that: The Z-shaped support plate (3) is composed of a left support plate (12) and a right support plate (13), and the outward end of the toothed rod (4) is engaged with the inward end of the Z-shaped support plate (3).

5. A vertical silicon carbide boat tooling fixture according to claim 4, characterized in that: The left support plate (12) is snapped outward at one end to the left side of the support side plate (6) at one end inward, and the right support plate (13) is snapped outward at one end to the right side of the support side plate (6) at one end inward.

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