Positioning lift and probe station inspection apparatus

Abstract

The utility model relates to the technical field of lifting platform, specifically disclose positioning lifting platform and probe platform detection equipment. The positioning lifting platform includes bottom plate, top plate and detection component, the bottom plate rotationally connects with the screw rod, and the screw rod is along vertical direction and penetrates the bottom plate, and the upper board surface of bottom plate is equipped with drive unit, and the output end of drive unit passes through the bottom plate, and the below of bottom plate is equipped with first transmission part and second transmission part, and first transmission part is connected in the output end of drive unit, and second transmission part is connected in the bottom end of screw rod, and first transmission part and second transmission part transmission cooperation, top plate is established in the above of bottom plate, and top plate can be along vertical direction and moves to bottom plate, and the screw rod forms screw rod nut cooperation with top plate, detection component is used to detect the relative position of top plate and bottom plate, and part detection component is established in the upper board surface of bottom plate, and the rest detection component is established in the lower board surface of top plate. The positioning lifting platform improves the compactness and operating speed of positioning lifting platform through the optimization design to specific structure.

Description

Technical Field

[0001] This utility model relates to the field of lifting platform technology, and in particular to positioning lifting platform and probe station testing equipment. Background Technology

[0002] High-precision positioning lifting stages are key functional components in modern industrial automation, semiconductor manufacturing and testing, and precision measurement equipment. Their performance directly affects the positioning accuracy, load-bearing capacity, and dynamic response characteristics of the entire equipment. With the increasing demands on positioning systems from semiconductor front-end processes, wafer inspection, micro-assembly, and high-end optical adjustments, high-load-bearing, high-precision, and compact lifting stages have become a key area of ​​technological development. Traditional lifting stages often employ servo motors combined with ball screws or wedge blocks for transmission. While these structures can meet basic lifting requirements under normal operating conditions, they often struggle to balance structural rigidity, accuracy retention, and dimensional compactness when faced with multiple constraints such as heavy loads, high speeds, long strokes, and limited installation space.

[0003] In existing technologies, wedge block drives are used in some lifting devices due to their simple structure and ease of fine-tuning. This structure typically converts the relative motion of wedges into vertical displacement, thereby achieving the lifting function of the platform. However, wedge block drives inherently have limited load-bearing capacity. Due to the limited contact area and significant stress concentration, they are prone to elastic deformation under heavy loads, leading to decreased positioning accuracy and making it difficult to meet the requirements of heavy-duty applications. Furthermore, to achieve longer strokes, wedge block structures usually require increased inclined surface length or the use of multi-stage wedge combinations, resulting in a significant increase in the overall structure's dimensions in both the vertical and horizontal directions, which is unfavorable for use in compact equipment layouts. On the other hand, the frictional characteristics and clearances in wedge block drives are difficult to control stably, further affecting their flatness, straightness, and repeatability, making them unsuitable for applications with stringent motion accuracy requirements, such as semiconductor testing and precision docking.

[0004] Besides the wedge block structure, conventional screw-driven lifting platforms, while offering improved precision, typically arrange the drive motor and screw coaxially or laterally, resulting in a larger axial dimension and making it difficult to achieve a compact overall structure. Especially in situations where vertical installation height is limited, such structures often cannot simultaneously meet the combined requirements of high rigidity, high load-bearing capacity, and high precision. Therefore, despite the existence of various positioning and lifting solutions in current technology, an irreconcilable contradiction remains between structural dimensions, load-bearing capacity, and motion accuracy.

[0005] In summary, existing wedge block lifting structures and some lead screw drive structures generally suffer from insufficient load-bearing capacity, excessively large structural dimensions, and difficulty in guaranteeing accuracy over long strokes, thus limiting their widespread application in high-end equipment manufacturing. Especially in applications requiring a high degree of integration of drive components, transmission mechanisms, and detection systems within a limited space, while simultaneously achieving high load, high precision, and high dynamic performance, existing technologies have yet to provide effective solutions. Utility Model Content

[0006] The purpose of this invention is to provide a positioning lifting platform and a probe station testing device to improve the compactness and operating speed of the positioning lifting platform.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] A positioning lifting platform includes a base plate, a top plate, and a detection assembly. The base plate is rotatably connected to a lead screw, which penetrates the base plate vertically. A drive unit is located on the upper surface of the base plate, with its output end passing through the base plate. A first transmission component and a second transmission component are located below the base plate. The first transmission component is connected to the output end of the drive unit, and the second transmission component is connected to the bottom end of the lead screw. The first and second transmission components are in a transmission cooperation. The top plate is located above the base plate and can move vertically relative to the base plate. The lead screw and the top plate form a lead screw-nut cooperation. The detection assembly is used to detect the relative position of the top plate and the base plate. Some of the detection components are located on the upper surface of the base plate, and the remaining components are located on the lower surface of the top plate.

[0009] As an optional technical solution for the positioning lifting platform, the detection component includes a grating ruler and a reading head. The reading head is used to read the reading on the grating ruler to generate a position signal. One of the grating ruler and the reading head is located on the lower surface of the top plate, and the other is located on the upper surface of the bottom plate.

[0010] As an optional technical solution for the positioning lifting platform, the detection component includes a limiting baffle and a photoelectric limiting component; one of the limiting baffle and the photoelectric limiting component is disposed on the lower surface of the top plate, and the other is disposed on the upper surface of the bottom plate.

[0011] As an optional technical solution for the positioning lifting platform, the top plate can move relative to the bottom plate in the vertical direction between the upper limit position and the lower limit position; two photoelectric limiting members are provided. When the top plate is located at the upper limit position, the limiting baffle blocks one of the photoelectric limiting members, and when the top plate is located at the lower limit position, the limiting baffle blocks the other photoelectric limiting member.

[0012] As an optional technical solution for the positioning lifting platform, the top plate can move relative to the bottom plate in the vertical direction between the upper limit position and the lower limit position; a first limiting block is fixed to the top end of the lead screw, and when the top plate is at the upper limit position, the top plate abuts against the first limiting block; a second limiting block is provided on the lower surface of the top plate, and when the top plate is at the lower limit position, the second limiting block abuts against the bottom plate.

[0013] As an optional technical solution for the positioning lifting platform, the first transmission component includes a first pulley, and the output end of the drive unit is coaxially fixed to the first pulley; and / or, the second transmission component includes a second pulley, and the bottom end of the lead screw is coaxially fixed to the second pulley.

[0014] As an optional technical solution for the positioning lifting platform, the positioning lifting platform also includes a belt, which is sleeved on the first pulley and the second pulley, and the first pulley is connected to the second pulley for transmission through the belt.

[0015] As an optional technical solution for the positioning lifting platform, each corner of the top plate is provided with a guide sleeve, and the bottom plate is fixedly connected with a needle roller guide post. The number of needle roller guide posts is the same as the number of guide sleeves, and each needle roller guide post is in vertical transmission cooperation with one of the guide sleeves.

[0016] As an optional technical solution for the positioning lifting platform, the base plate is made of stainless steel; and / or, the top plate is made of stainless steel.

[0017] The probe station testing equipment includes the aforementioned positioning and lifting platform.

[0018] The beneficial effects of this utility model are:

[0019] This positioning lifting platform achieves a compact structure and reduced overall size by embedding the drive unit and lead screw inside the platform and coordinating with the first and second transmission components, making it suitable for confined spaces. The lead screw and top plate form a lead screw-nut engagement, providing high-precision vertical movement. This ensures the positioning lifting platform maintains high mechanical rigidity even under heavy loads, guaranteeing smooth and accurate lifting motion, and ensuring positioning accuracy and repeatability. Placing the first and second transmission components below the base plate saves space and achieves a compact structure while maintaining high transmission accuracy. This contributes to improving the overall compactness and operating speed of the positioning lifting platform, solving the problem of excessively large structural dimensions. Simultaneously, the detection component monitors the relative position of the top and bottom plates in real time, forming a closed-loop control, which significantly improves positioning accuracy, flatness, and straightness, enhancing the dynamic performance and mechanical precision of the positioning lifting platform, meeting the high-precision application requirements such as semiconductor testing.

[0020] This probe station inspection equipment integrates a high-load-bearing, high-precision positioning and lifting platform, enabling precise lifting and positioning of wafers or other workpieces. This improves inspection accuracy and efficiency, achieving high-precision inspection of semiconductor wafers and bringing significant benefits to customers. The compact design of the positioning and lifting platform optimizes the overall layout of the probe station inspection equipment, making it suitable for confined spaces. In semiconductor inspection, the high flatness and straightness of the positioning and lifting platform ensure the accuracy of test results. Attached Figure Description

[0021] Figure 1 This is a structural schematic diagram of the positioning lifting platform provided in an embodiment of the present invention from a first-view perspective;

[0022] Figure 2 This is a bottom view of the positioning lifting platform provided in this embodiment of the utility model;

[0023] Figure 3 This is a cross-sectional view of the positioning lifting platform provided in an embodiment of this utility model;

[0024] Figure 4 This is a structural schematic diagram of the positioning lifting platform provided in an embodiment of the present invention from a second-view perspective.

[0025] In the picture:

[0026] Z, vertical direction;

[0027] 1. Base plate; 2. Bearing end cover; 3. Drive unit; 4. Mounting plate; 5. Needle roller guide post; 6. Lead screw; 7. First limit block; 8. First pulley; 9. Belt; 10. Second pulley; 11. Photoelectric limit component; 12. Limiting baffle; 13. Grating ruler; 14. Reading head; 15. Reading head bracket; 16. Bearing; 17. Top plate; 18. Second limit block; 19. Guide sleeve. Detailed Implementation

[0028] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0029] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions. Moreover, "above," "on top of," and "over" the first feature in relation to the second feature includes the first feature directly above and diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature includes the first feature directly below and diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0030] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0031] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0032] like Figures 1 to 4 As shown, this utility model provides a positioning lifting platform, including a base plate 1, a top plate 17, and a detection assembly. A lead screw 6 is rotatably connected to the base plate 1, and the lead screw 6 passes through the base plate 1 in the vertical direction Z. A drive unit 3 is provided on the upper surface of the base plate 1, and the output end of the drive unit 3 passes through the base plate 1. A first transmission component and a second transmission component are provided below the base plate 1. The first transmission component is connected to the output end of the drive unit 3, and the second transmission component is connected to the bottom end of the lead screw 6. The first transmission component and the second transmission component are in a transmission cooperation. The top plate 17 is located above the base plate 1 and can move relative to the base plate 1 in the vertical direction Z. The lead screw 6 and the top plate 17 form a lead screw-nut cooperation. The detection assembly is used to detect the relative position of the top plate 17 and the base plate 1. Some of the detection components are located on the upper surface of the base plate 1, and the remaining detection components are located on the lower surface of the top plate 17.

[0033] This positioning lifting platform achieves a compact structure and reduced overall size by embedding the drive unit 3 and lead screw 6 within the platform itself and coordinating with the first and second transmission components. This makes it suitable for confined spaces. The lead screw 6 forms a lead screw-nut engagement with the top plate 17, providing high-precision vertical Z-axis movement. This ensures the positioning lifting platform maintains high mechanical rigidity under heavy loads, guaranteeing smooth and accurate lifting motion, and ensuring positioning accuracy and repeatability. By placing the first and second transmission components below the base plate 1, space is saved, achieving a compact structure while maintaining high transmission accuracy. This contributes to improving the overall compactness and operating speed of the positioning lifting platform, solving the problem of excessively large structural dimensions. Simultaneously, the detection component monitors the relative position of the top plate 17 and the base plate 1 in real time, forming a closed-loop control. This significantly improves positioning accuracy, flatness, and straightness, enhancing the dynamic performance and mechanical precision of the positioning lifting platform, meeting the high-precision application requirements such as semiconductor testing.

[0034] Compared with the shortcomings of existing technologies, the positioning lifting platform described above solves the problems of low load-bearing capacity, large structural size, and poor accuracy of existing wedge block structures, and can be widely used in fields that require high-precision positioning, such as wafer transfer and semiconductor probe inspection.

[0035] With the above improvements, the overall flatness of the positioning lifting platform can reach within 10µm, the straightness can reach 2µm, and the maximum load can reach 700kg.

[0036] For example, the positioning lifting platform also includes a mounting plate 4. The mounting plate 4 locks the drive unit 3 to the base plate 1. Specifically, the drive unit 3 is a servo motor.

[0037] In this embodiment, the positioning lifting platform also includes a bearing 16 and a bearing end cover 2. The bearing end cover 2 locks the outer ring of the bearing 16 onto the base plate 1, so that the base plate 1 and the outer ring of the bearing 16 are fixedly connected. The inner ring of the bearing 16 is fixedly connected to the lead screw 6.

[0038] In this embodiment, the detection component includes a grating ruler 13 and a reading head 14. The reading head 14 is used to read the reading on the grating ruler 13 to generate a position signal. One of the grating ruler 13 and the reading head 14 is located on the lower surface of the top plate 17, and the other is located on the upper surface of the bottom plate 1.

[0039] The cooperation of the grating ruler 13 and the reading head 14 achieves high-precision position feedback, enabling real-time detection of the movement position of the top plate 17. The grating ruler 13 provides micron-level scale, and the reading head 14 reads and generates position signals, forming a closed-loop control with micron-level precision, further improving the repeatability and dynamic performance of the positioning lifting platform. This design ensures stable accuracy even during high-speed lifting, superior to the open-loop control of traditional wedge block structures. By placing the grating ruler 13 and the reading head 14 on the top plate 17 and the bottom plate 1 respectively, external interference is reduced, improving detection stability and reliability. This feedback mode enhances positioning accuracy, improves the stability and reliability of the positioning lifting platform, and avoids cumulative errors, making it suitable for high-precision applications such as wafer transfer and probe inspection.

[0040] Specifically, the grating ruler 13 is fixed to the upper surface of the base plate 1, and the reading head 14 is fixed to the lower surface of the top plate 17 via the reading head bracket 15. The specific structure and working principle of the grating ruler 13 and the reading head 14 are common knowledge in the art and are not the focus of this embodiment, so they will not be described in detail here.

[0041] For example, the detection component includes a limiting baffle 12 and a photoelectric limiting member 11; one of the limiting baffle 12 and the photoelectric limiting member 11 is disposed on the lower surface of the top plate 17, and the other is disposed on the upper surface of the bottom plate 1.

[0042] The limit stop 12 and photoelectric limit component 11 provide a reliable safety limit function, preventing the top plate 17 from exceeding the safe range during movement, avoiding mechanical collisions or damage, and improving the service life and reliability of the equipment. The photoelectric limit structure has a fast response speed and high reliability, triggering a signal promptly when the top plate 17 moves to its limit position. It is also easily integrated into the compact positioning lifting platform, with a simple structure that does not add extra space, conforming to the compact design concept. This non-contact limit method reduces mechanical wear, enhances the safety and service life of the positioning lifting platform, and is especially suitable for high-frequency lifting scenarios. It solves the accuracy loss problem caused by imperfect limit mechanisms in existing technologies, ensuring stability under heavy-load environments.

[0043] Specifically, the photoelectric limiting member 11 is fixed to the upper surface of the base plate 1, and the limiting baffle 12 is fixed to the lower surface of the top plate 17. The specific structure and working principle of the limiting baffle 12 and the photoelectric limiting member 11 are common knowledge in the field and are not the focus of this embodiment, so they will not be described in detail here.

[0044] The aforementioned detection components adopt a dual feedback mode, and the above structure ensures the high precision and heavy load capacity of the overall positioning lifting platform structure.

[0045] Furthermore, the top plate 17 can move relative to the bottom plate 1 in the vertical direction Z between the upper limit position and the lower limit position; there are two photoelectric limiting members 11. When the top plate 17 is in the upper limit position, the limiting baffle 12 blocks one photoelectric limiting member 11, and when the top plate 17 is in the lower limit position, the limiting baffle 12 blocks the other photoelectric limiting member 11.

[0046] By setting two photoelectric limiters 11 corresponding to the upper and lower limit positions respectively, precise stroke control is achieved, ensuring that the positioning lifting platform operates within a safe range. When the top plate 17 reaches the upper or lower limit position, the limit baffle 12 blocks the corresponding photoelectric limiter 11, triggering a stop signal to prevent overshoot or undershoot, providing double-end limit protection and ensuring that the positioning lifting platform operates within a safe range, thus improving the safety and service life of the equipment. This design avoids mechanical overshoot, improves the stability and reliability of equipment operation, compensates for the shortcomings of traditional structures that are prone to inaccuracy under long strokes, and avoids structural deformation or accuracy loss caused by overtravel.

[0047] In this embodiment, the top plate 17 can move relative to the bottom plate 1 in the vertical direction Z between the upper limit position and the lower limit position; the top end of the lead screw 6 is fixedly connected to the first limiting block 7, and when the top plate 17 is in the upper limit position, the top plate 17 abuts against the first limiting block 7; the lower plate surface of the top plate 17 is provided with a second limiting block 18, and when the top plate 17 is in the lower limit position, the second limiting block 18 abuts against the bottom plate 1.

[0048] The first limit block 7 and the second limit block 18 provide mechanical hard limits as redundant protection for photoelectric limits. When the top plate 17 reaches the upper or lower limit position, a physical stop is achieved through mechanical contact, further stabilizing the terminal position of the positioning lifting platform, improving repeatability, and ensuring that the equipment operates within a safe range. This physical limit ensures that equipment damage is prevented even in the event of an electrical system failure. The mechanical limit structure is simple and reliable, has strong impact resistance, is suitable for heavy-duty conditions, prevents structural overload deformation, further enhances the safety of the positioning lifting platform under heavy-duty conditions, and does not affect the overall compactness.

[0049] Moreover, the combination of mechanical limiters and the aforementioned non-contact limiters forms multiple layers of protection, preventing equipment damage even in the event of electronic system failure.

[0050] In one embodiment of this invention, the first transmission component includes a first pulley 8, and the output end of the drive unit 3 is coaxially fixed to the first pulley 8; and the second transmission component includes a second pulley 10, and the bottom end of the lead screw 6 is coaxially fixed to the second pulley 10.

[0051] The transmission design of the first pulley 8 and the second pulley 10 achieves efficient power transmission between the drive unit 3 and the lead screw 6, providing buffering and shock absorption, reducing vibration and noise, and improving transmission smoothness. Belt drive provides buffering and shock absorption, reducing motion impact and noise, while allowing for a certain degree of installation error, thus improving system reliability and maintainability. This structure simplifies the transmission chain, allowing the drive unit 3 and lead screw 6 to be spatially separated, thereby optimizing the internal layout, making the drive layout more flexible, facilitating embedded design, and helping to reduce the overall size, making the positioning lifting platform structure more compact. This transmission method is easy to maintain, has low cost, and is suitable for high-speed operation, improving the dynamic performance of the positioning lifting platform.

[0052] Furthermore, the positioning lifting platform also includes a belt 9, which is sleeved on the first pulley 8 and the second pulley 10. The first pulley 8 is connected to the second pulley 10 via the belt 9.

[0053] Belt 9 connects the first pulley 8 and the second pulley 10, further optimizing power transmission efficiency. Belt 9 provides smooth transmission and adjustable tension, offering flexible and reliable power delivery. It absorbs impact loads, reducing impact on the lead screw 6 and drive unit 3, thus extending equipment life. Simultaneously, belt 9 allows for a certain degree of installation error, lowering manufacturing and assembly precision requirements while maintaining high transmission efficiency.

[0054] The lightweight and high-speed operation of belts helps improve the dynamic performance of positioning lifting platforms while maintaining low wear. Compared to existing gear drives, belt drives are quieter, reducing noise pollution and making them suitable for clean environments such as semiconductor manufacturing.

[0055] In another embodiment of this invention, the first transmission component is limited to including the first pulley 8, and the output end of the drive unit 3 is coaxially fixedly connected to the first pulley 8. In yet another embodiment of this invention, the second transmission component is limited to including the second pulley 10, and the bottom end of the lead screw 6 is coaxially fixedly connected to the second pulley 10.

[0056] In this embodiment, each corner of the top plate 17 is provided with a guide sleeve 19, and a needle roller guide post 5 is fixedly connected to the bottom plate 1. The number of needle roller guide posts 5 and guide sleeves 19 is the same, and each needle roller guide post 5 is engaged with a guide sleeve 19 in a vertical Z-direction transmission. Specifically, the top plate 17 is rectangular, and there are four guide sleeves 19 and four needle roller guide posts 5.

[0057] The needle roller guide post 5 has high rigidity, high guiding accuracy and high load capacity. By setting the needle roller guide post 5 and guide sleeve 19 at each corner, it provides high-precision guidance, evenly distributes the load, reduces wear, extends service life, and ensures that the top plate 17 moves smoothly in the vertical Z direction, reducing off-center load and sway, thereby improving straightness and flatness. It is suitable for high-frequency lifting scenarios and improves the durability and accuracy retention of the equipment.

[0058] In one embodiment of this example, both the base plate 1 and the top plate 17 are made of stainless steel.

[0059] Stainless steel, with its high strength, corrosion resistance, and thermal stability, enhances the rigidity of the overall structure, reduces the impact of temperature changes on precision, and is suitable for industrial environments with varying conditions. This material choice enhances the durability and reliability of the equipment, reduces maintenance costs, and is particularly suitable for high-cleanliness requirements such as in semiconductor and 3C automation. It ensures that the structure does not deform under heavy loads, maintains long-term precision stability, and preserves high flatness and straightness.

[0060] In another embodiment of this invention, only the material of the base plate 1 is limited to stainless steel. In yet another embodiment of this invention, only the material of the top plate 17 is limited to stainless steel.

[0061] This embodiment also provides a probe station testing device, including the aforementioned positioning lifting platform.

[0062] This probe station inspection equipment integrates a high-load-bearing, high-precision positioning and lifting platform, enabling precise lifting and positioning of wafers or other workpieces. This improves inspection accuracy and efficiency, achieving high-precision inspection of semiconductor wafers and bringing significant benefits to customers. The compact design of the positioning and lifting platform optimizes the overall layout of the probe station inspection equipment, making it suitable for confined spaces. In semiconductor inspection, the high flatness and straightness of the positioning and lifting platform ensure the accuracy of test results.

[0063] The above applications demonstrate the wide applicability of the positioning lifting platform and its excellent user experience. It is not limited to probe station testing equipment, but can also be extended to wafer transfer, positioning, semiconductor probe testing, 3C automation and other industrial fields and scientific research projects that require heavy load and high precision positioning accuracy, such as scientific research equipment and automated production lines.

[0064] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A positioning lifting platform, characterized in that, include: A base plate (1) is rotatably connected to a lead screw (6), which passes through the base plate (1) in a vertical direction (Z). A drive unit (3) is provided on the upper surface of the base plate (1), and the output end of the drive unit (3) passes through the base plate (1). A first transmission member and a second transmission member are provided below the base plate (1). The first transmission member is connected to the output end of the drive unit (3), and the second transmission member is connected to the bottom end of the lead screw (6). The first transmission member and the second transmission member are in transmission cooperation. A top plate (17) is provided above the bottom plate (1). The top plate (17) can move relative to the bottom plate (1) in the vertical direction (Z). The lead screw (6) and the top plate (17) form a lead screw nut engagement. The detection components are used to detect the relative position of the top plate (17) and the bottom plate (1). Some of the detection components are located on the upper surface of the bottom plate (1), and the rest of the detection components are located on the lower surface of the top plate (17).

2. The positioning lifting platform according to claim 1, characterized in that, The detection component includes a grating ruler (13) and a reading head (14). The reading head (14) is used to read the reading on the grating ruler (13) to generate a position signal. One of the grating ruler (13) and the reading head (14) is located on the lower surface of the top plate (17), and the other is located on the upper surface of the bottom plate (1).

3. The positioning lifting platform according to claim 1, characterized in that, The detection component includes a limiting baffle (12) and a photoelectric limiting component (11); one of the limiting baffle (12) and the photoelectric limiting component (11) is located on the lower surface of the top plate (17), and the other is located on the upper surface of the bottom plate (1).

4. The positioning lifting platform according to claim 3, characterized in that, The top plate (17) can move relative to the bottom plate (1) in the vertical direction (Z) between the upper limit position and the lower limit position; there are two photoelectric limiting members (11). When the top plate (17) is located at the upper limit position, the limiting baffle (12) blocks one of the photoelectric limiting members (11). When the top plate (17) is located at the lower limit position, the limiting baffle (12) blocks the other photoelectric limiting member (11).

5. The positioning lifting platform according to claim 1, characterized in that, The top plate (17) can move relative to the bottom plate (1) in the vertical direction (Z) between the upper limit position and the lower limit position; the top end of the lead screw (6) is fixedly connected to the first limiting block (7), and when the top plate (17) is located at the upper limit position, the top plate (17) abuts against the first limiting block (7); the lower plate surface of the top plate (17) is provided with a second limiting block (18), and when the top plate (17) is located at the lower limit position, the second limiting block (18) abuts against the bottom plate (1).

6. The positioning lifting platform according to claim 1, characterized in that, The first transmission component includes a first pulley (8), and the output end of the drive unit (3) is coaxially fixed to the first pulley (8); and / or, The second transmission component includes a second pulley (10), and the bottom end of the lead screw (6) is coaxially fixed to the second pulley (10).

7. The positioning lifting platform according to claim 6, characterized in that, The positioning lifting platform also includes a belt (9), which is sleeved on the first pulley (8) and the second pulley (10). The first pulley (8) is connected to the second pulley (10) through the belt (9).

8. The positioning lifting platform according to claim 1, characterized in that, Each corner of the top plate (17) is provided with a guide sleeve (19), and a needle roller guide post (5) is fixedly connected to the bottom plate (1). The number of needle roller guide posts (5) is the same as the number of guide sleeves (19), and each needle roller guide post (5) is engaged with a guide sleeve (19) in a vertical direction (Z).

9. The positioning lifting platform according to any one of claims 1-8, characterized in that, The base plate (1) is made of stainless steel; and / or, The top plate (17) is made of stainless steel.

10. A probe station testing device, characterized in that, Includes the positioning lifting platform as described in any one of claims 1-9.

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