A high-efficiency air flow organization workbench for a hundred-level clean shed
Patent Information
- Application Number
- CN202522359152.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-06
- Publication Date
- 2026-10-09
- Estimated Expiration
- 2035-11-06
AI Technical Summary
[0005]本实用新型目的是要提供一种用于百级洁净棚的高效气流组织工作台，解决了传统实心台面阻碍气流、污染物颗粒不易排出的技术问题，实现了工作区域内气流组织的优化与污染物颗粒的快速清除
本实用新型的一种用于百级洁净棚的高效气流组织工作台，通过在人工检测台台面开设镂空排气孔，与顶部风机过滤单元协同工作，形成了从顶部送风至底部排气的垂直贯通式定向层流。解决了传统实心台面造成的气流阻碍，有效消除了台面下方的气流死区与涡流，使得工作区域内产生的污染物颗粒能被洁净气流直接、快速地向下携带排出，极大降低了颗粒物在工作区的悬浮与二次沉降概率，从而确保了百级洁净棚内局部洁净环境的持续稳定。
Smart Images
Figure CN224826494U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of industrial clean environment technology, and in particular to a high-efficiency airflow organization workbench for a Class 100 cleanroom. Background Technology
[0002] In industries such as semiconductors, display panels, and precision electronics, diaphragm products require transfer and manual inspection in a Class 100 or higher cleanroom environment during production. This work is typically performed on workbenches within a cleanroom connected to the main cleanroom. Traditional workbenches often feature solid tabletops with fan-filter units (FFUs) at the top providing a vertically downward, unidirectional flow of clean air to create a localized high-cleanliness environment.
[0003] However, traditional solid work surfaces obstruct the smooth flow of vertical airflow, easily creating dead zones or eddies beneath the surface. Contaminant particles generated during operation (such as dust, fibers, and electrostatically adsorbed particles) cannot be quickly carried away; instead, they may remain suspended and accumulate in the eddies, eventually settling back onto the product surface, leading to decreased product contamination and yield. Furthermore, solid work surfaces hinder the rapid dissipation of static charges within the operating area, increasing the risk of electrostatic adsorption contamination and electrostatic discharge damage.
[0004] Therefore, the main problem with the existing technology is that in a Class 100 cleanroom, the traditional solid workbench surface hinders the effective organization of vertical laminar flow, resulting in the inability of pollutant particles to be quickly and directly discharged from the work area, which affects the stability of the local clean environment and the product yield. Utility Model Content
[0005] The purpose of this invention is to provide a high-efficiency airflow organization workbench for Class 100 cleanrooms, which solves the technical problems of traditional solid workbenches obstructing airflow and making it difficult to remove pollutant particles, and achieves the optimization of airflow organization and rapid removal of pollutant particles in the work area.
[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows: This utility model provides a high-efficiency airflow organization workbench for a Class 100 cleanroom, comprising: The operating box has a diaphragm feeding channel on one side and a manual inspection table on the other side. The surface of the manual inspection table has several hollowed-out exhaust holes. A fan filter unit is disposed at the top of the operating box and is used to provide clean airflow vertically downward into the operating box. An ion fan static eliminator unit is located at the top inside the operating box and is used to eliminate static electricity from the membrane in the working area. A lighting unit is disposed at the top interior of the operating housing and is used to provide lighting for the operating area.
[0007] Furthermore, a conveyor belt is provided downstream of the membrane feeding channel, and a receiving platform is provided at the end of the conveyor belt, on which the conveyed membrane falls for manual handling.
[0008] Furthermore, the vertical airflow provided by the fan filtration unit, in conjunction with several perforated exhaust holes on the manual inspection platform, forms a directional airflow that runs through the working area, used to discharge pollutant particles on the manual inspection platform downwards.
[0009] Furthermore, the ion fan static elimination unit and the lighting unit are located downstream of the air outlet of the fan filter unit.
[0010] Furthermore, the perforated exhaust holes on the manual testing platform are evenly distributed.
[0011] Furthermore, an exhaust duct is provided below the manual testing station, and the exhaust duct is connected to the exhaust system of the cleanroom.
[0012] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art: This invention relates to a high-efficiency airflow organization workbench for Class 100 cleanrooms. By creating perforated exhaust holes on the surface of the manual inspection table, and working in conjunction with a top-mounted fan and filter unit, it forms a vertically continuous directional laminar flow from top to bottom. This solves the airflow obstruction caused by traditional solid tabletops, effectively eliminating dead zones and eddies below the tabletop. This allows contaminant particles generated within the work area to be directly and quickly carried downwards and discharged by the clean airflow, greatly reducing the probability of particulate matter suspension and secondary settling in the work area, thereby ensuring the continuous stability of the local clean environment within the Class 100 cleanroom.
[0013] Furthermore, the electrostatic elimination unit of the ion fan is placed downstream of the fan filter unit to purify the air while removing static charge from the surface of the membrane product. Attached Figure Description
[0014] The following sections will describe some specific embodiments of the present invention in a detailed manner by way of example and not limitation, with reference to the accompanying drawings. The same reference numerals in the drawings denote the same or similar parts or components. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings: Figure 1 This is a schematic diagram of the structure of a high-efficiency airflow organization workbench for a Class 100 cleanroom provided by this utility model; Figure 2 This is a schematic diagram of the structure of the manual inspection station provided by this utility model; Figure 3 This is a flowchart of the operation of the high-efficiency airflow organization workbench provided by this utility model; The reference numerals in the attached figures are explained as follows: 1. Operating box; 10. Diaphragm feeding channel; 11. Manual inspection table; 110. Hollowed-out exhaust hole; 12. Receiving table; 2. Fan filter unit; 3. Ionizing fan static elimination unit; 4. Lighting unit. Detailed Implementation
[0015] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.
[0016] See Figures 1 to 3 This example provides a high-efficiency airflow organization workbench for a Class 100 cleanroom. The workbench includes an operating cabinet 1, a fan and filter unit 2, an ion fan and static elimination unit 3, and a lighting unit 4. By integrating these components, a Class 100 clean, anti-static, and appropriately lit working environment is created for the membrane inspection process.
[0017] Specifically, a membrane feeding channel 10 is provided on one side of the operating box 1. The membrane feeding channel 10 is connected to the upstream production line equipment and is used to feed the conveyed membrane into the operating box 1. A manual inspection table 11 is provided on the other side of the operating box 1 (i.e., the opposite side of the membrane feeding channel) to facilitate the operator to inspect the membrane.
[0018] Downstream of the aforementioned membrane feeding channel 10, there is a conveyor belt (not shown in the figure), and at the end of the conveyor belt, there is a receiving platform 12. After the conveyed membrane falls onto the receiving platform 12, the operator can pick it up for testing.
[0019] In this example, the aforementioned manual testing platform 11 has several evenly distributed perforated exhaust holes 110. The size of the perforated exhaust holes 110 and the opening ratio on the testing platform can be flexibly adjusted according to actual working conditions and airflow balance requirements. An exhaust duct (not shown in the figure) is provided below the manual testing platform 11. This exhaust duct is connected to the exhaust system of the cleanroom, thus providing a path for the orderly discharge of pollutant particles.
[0020] The fan filter unit 2, located at the top of the operating housing 1, provides a vertically downward clean airflow into the operating housing 1. This vertical airflow, in conjunction with several perforated exhaust holes 110 on the manual inspection platform 11, creates a top-down, directional airflow barrier in the inspection area. This airflow effectively captures and carries away any contaminant particles that may be generated during operation, allowing them to be rapidly discharged downwards through the perforated exhaust holes 110, thereby significantly reducing the risk of contaminant particles remaining in critical working areas.
[0021] The ion fan static eliminator unit 3 and the lighting unit 4 are both located inside the top of the operating housing 1, downstream of the fan filter unit 2. The ion fan static eliminator unit 3 neutralizes the static charge carried on the membrane surface in the working area, preventing static electricity from attracting dust that may interfere with testing or damage the product. The lighting unit 4 provides sufficient illumination, ensuring visibility and accuracy of the testing operation, effectively reducing operator fatigue and improving testing accuracy.
[0022] In summary, the high-efficiency airflow organization workbench for a Class 100 cleanroom provided in this example integrates the vertical laminar flow generated by the fan filter unit 2, the perforated exhaust vents 110 of the manual inspection table 11, and the exhaust channel below it to construct a stable unidirectional directional airflow system. Within the Class 100 cleanroom environment, this creates a locally ultra-clean, anti-static, and appropriately illuminated highly reliable working environment for the critical process of membrane inspection, effectively ensuring product quality and operational efficiency.
[0023] The above embodiments are only for illustrating the technical concept and features of this utility model. Their purpose is to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be used to limit the protection scope of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the protection scope of this utility model.
Claims
1. A high-efficiency airflow organization workbench for a Class 100 cleanroom, characterized in that, include: The operating box (1) has a diaphragm feeding channel (10) on one side and a manual inspection table (11) on the other side. Several hollowed-out exhaust holes (110) are opened on the table surface of the manual inspection table (11). Fan filter unit (2), the fan filter unit (2) is located on the top of the operating box (1) and is used to provide vertically downward clean airflow into the operating box (1); Ion fan static elimination unit (3), the ion fan static elimination unit (3) is set at the top inside the operating box (1) for static elimination of the membrane in the working area; Lighting unit (4), which is located at the top of the inside of the operating box (1), is used to provide lighting for the operating area.
2. The high-efficiency airflow organization workbench for a Class 100 cleanroom according to claim 1, characterized in that, A conveyor belt is provided downstream of the membrane feeding channel (10), and a receiving platform (12) is provided at the end of the conveyor belt. The conveyed membrane falls onto the receiving platform (12) for manual handling.
3. The high-efficiency airflow organization workbench for a Class 100 cleanroom according to claim 1, characterized in that, The vertical airflow provided by the fan filter unit (2) works in conjunction with several hollowed-out exhaust holes (110) on the manual inspection platform (11) to form a directional airflow that runs through the working area, which is used to discharge pollutant particles on the manual inspection platform (11) downwards.
4. The high-efficiency airflow organization workbench for a Class 100 cleanroom according to claim 1, characterized in that, The ion fan static elimination unit (3) and the lighting unit (4) are located downstream of the air outlet of the fan filter unit (2).
5. The high-efficiency airflow organization workbench for a Class 100 cleanroom according to claim 1, characterized in that, The hollowed-out exhaust holes on the manual testing platform (11) are evenly distributed.
6. The high-efficiency airflow organization workbench for a Class 100 cleanroom according to claim 1, characterized in that, An exhaust duct is provided below the manual testing station (11), and the exhaust duct is connected to the exhaust system of the cleanroom.