Mask material edge collapse prevention cutting device

Abstract

The utility model relates to the field of mask plate processing, concretely relates to a cutting device of mask plate material edge collapse prevention, including the shell, its installation is used for cutting the device of mask plate, the front and back side of the middle part of shell all is seted up with the mounting groove, cutting assembly, the number of cutting assembly is two. Through setting up two cutter heads of different cutting depth of front and back arrangement on cutting assembly, in the cutting process, the front cutter head is prior to the rear cutter head and carries out a shallow cut on the material surface, this shallow cut can release the partial stress on the cutting path in advance, and forms a small guide groove, when the rear cutter head carries out complete cutting along the guide groove, the stress concentration phenomenon obtains the remarkable alleviation, thereby effectively restrained the generation of the edge collapse and micro crack, simultaneously through setting up the blast pipe delivery stable airflow and blow off the cutting chip from the cutting seam with the coolant, prevent the chip to be rolled into the cutting path of cutter head and form secondary injury, thereby further protect the cutting edge quality.

Description

Technical Field

[0001] This utility model relates to the field of mask processing, specifically to a cutting device for preventing chipping of mask material. Background Technology

[0002] Masks are key components in microelectronics manufacturing and photolithography processes, and are typically made of hard and brittle materials such as quartz glass and soda glass. During mask manufacturing, large substrates often need to be cut into specific smaller sizes. Currently, diamond tools are primarily used for this cutting.

[0003] However, due to the inherent hardness and brittleness of the mask material, the stress applied by the cutting tool during the cutting process can easily cause defects such as chipping and microcracks at the cutting edge. These defects directly affect the pattern accuracy and service life of the mask, and may even lead to product scrap. Existing single-blade cutting methods are difficult to effectively solve the chipping problem. Although it can be partially improved by optimizing cutting parameters such as reducing the feed rate, it will significantly reduce processing efficiency.

[0004] Therefore, it is necessary to invent a cutting device to prevent chipping of mask material to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a cutting device for preventing chipping of mask material. By setting two cutting heads of different heights at the front and rear, the shallower cutting head can make shallow cuts on the surface of the mask to release some stress, and then the deeper cutting head can make deeper cuts. This can effectively reduce the phenomenon of stress concentration and solve the problem in the prior art that the stress applied by the cutting tool during the cutting process can easily cause chipping and micro-cracks in the material at the cutting edge.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a cutting device for preventing chipping of mask material, comprising... The housing is mounted on a device for cutting a mask, and mounting grooves are provided on both the front and rear sides of the middle portion of the housing; The cutting assembly comprises two components, which are respectively installed at the front and rear of the housing and arranged in a forward-backward direction. Each cutting assembly includes a blade head, the cutting depth of which is less than that of the blade head at the rear. The blade head penetrates the housing and is movably connected to it. A blade holder is fixedly connected to the top of the blade head, a connecting strip is fixedly connected to the top of the blade holder, a connecting sleeve is slidably connected to the outside of the connecting strip, a mounting block is fixedly connected to the top of the connecting sleeve, and an adjusting screw is installed in the middle of the mounting block. The adjusting screw penetrates the housing and is rotatably connected to it. The cooling assembly, located on the right side of the housing, is used to cool the cutting area and the blade.

[0007] Preferably, a connector is fixedly connected to the top of the outer shell, and a nozzle is fixedly connected to the lower part of the connector, with the nozzle penetrating through and fixedly connected to the outer shell.

[0008] Preferably, the inner wall of the mounting groove is provided with sliding grooves on both the left and right sides.

[0009] Preferably, the top of the tool holder is inclined.

[0010] Preferably, the outer wall of the adjusting screw is threaded with a limiting nut, and the limiting nut is connected to the mounting block through and fixedly.

[0011] Preferably, the mounting block is fixedly connected to sliders on both the left and right sides, and the sliders are slidably connected to the grooves.

[0012] Preferably, the cooling assembly includes a main pipe, which is fixedly connected to the outer casing, a water inlet pipe is fixedly connected to the rear of the main pipe, and two spray pipes are fixedly connected to the bottom of the main pipe.

[0013] The technical effects and advantages provided by this utility model in the above technical solution are as follows: This invention features two cutting heads arranged front to back with different cutting depths on a cutting assembly. During the cutting process, the front cutting head makes a shallow cut on the material surface before the rear cutting head. This shallow cut can release some of the stress on the cutting path in advance and form a tiny guide groove. When the rear cutting head makes a complete cut along this guide groove, the stress concentration phenomenon is significantly alleviated, thereby effectively suppressing the generation of chipping and micro-cracks. At the same time, a nozzle is set to deliver a stable airflow to blow away coolant and chips from the cutting kerf, preventing debris from being drawn into the cutting path of the cutting head and causing secondary damage, thereby further protecting the quality of the cut edge. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0015] Figure 1 This is a three-dimensional structural diagram of the front side of the overall device in this utility model; Figure 2 This is a three-dimensional structural diagram of the rear side of the overall device in this utility model; Figure 3 This is a cross-sectional three-dimensional structural diagram of the outer shell in this utility model; Figure 4 This is a three-dimensional structural diagram of the disassembled cutting component in this utility model.

[0016] Legend: 1. Outer shell; 2. Cutting assembly; 3. Cooling assembly; 11. Connector; 12. Spray pipe; 13. Mounting groove; 14. Slide groove; 21. Cutter head; 22. Cutter holder; 23. Connecting strip; 24. Connecting sleeve; 25. Mounting block; 26. Adjusting screw; 251. Slider; 261. Limit nut; 31. Main pipe; 32. Water inlet pipe; 33. Spray pipe. Detailed Implementation

[0017] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0018] This utility model provides, for example Figures 1-3 The cutting device for preventing chipping of mask material shown includes a housing 1, a cutting assembly 2, and a cooling assembly 3; The outer casing 1 is mounted on a device for cutting a mask and is used to connect various components. The cutting device is equipped with a drive structure for driving the outer casing 1 and a clamp for fixing the mask. The outer casing 1 has mounting grooves 13 on both the front and rear sides of its middle section for mounting the cutting assembly 2. The top of the outer casing 1 is fixedly connected to a connector 11, which is connected to an air pump through a pipeline for delivering clean gas. The lower part of the connector 11 is fixedly connected to a nozzle 12 for spraying gas to clean the cutting area. The nozzle 12 penetrates and is fixedly connected to the outer casing 1. The inner walls of the mounting grooves 13 have sliding grooves 14 on both the left and right sides for connecting the mounting block 25.

[0019] like Figures 3-4As shown, there are two cutting components 2, which are respectively installed at the front and rear of the outer casing 1. The two cutting components 2 are arranged in a front-to-back direction along the cutting direction. Each cutting component 2 includes a cutter head 21 with a diamond cutting end. The cutting depth of the cutter head 21 at the front is less than that at the rear. The cutter head 21 at the front is used for shallow cutting, pre-releasing some stress on the cutting path, and forming a tiny guide groove to guide the cutter head 21 during cutting. The cutter head 21 is connected to the outer casing 1 through and movably. A cutter holder 22 is fixedly connected to the top of the cutter head 21 for connecting various components. The top of the cutter holder 22 is inclined. A connecting strip 23 is fixedly connected to the top of 22. The cross-section of the connecting strip 23 is an inverted trapezoid. A connecting sleeve 24 is slidably connected to the outside of the connecting strip 23, which is adapted to the connecting strip 23. A mounting block 25 is fixedly connected to the top of the connecting sleeve 24. An adjusting screw 26 is installed in the middle of the mounting block 25. The adjusting screw 26 passes through and is rotatably connected to the outer shell 1. A limit nut 261 is threadedly connected to the outer wall of the adjusting screw 26. The adjusting screw 26 and the limit nut 261 cooperate to adjust the height of the cutter head 21. The limit nut 261 passes through and is fixedly connected to the mounting block 25. Slider blocks 251 are fixedly connected to both the left and right sides of the mounting block 25. The sliders 251 are slidably connected to the slide groove 14.

[0020] like Figure 1 As shown, the cooling assembly 3 is located on the right side of the housing 1 and is used to cool the cutting position and the blade 21. The cooling assembly 3 includes a main pipe 31, which is used to deliver coolant to two spray pipes 33. The main pipe 31 is fixedly connected to the housing 1. A water inlet pipe 32 is fixedly connected to the rear of the main pipe 31, which provides a pipeline for connection to a water pump. Two spray pipes 33 are fixedly connected to the bottom of the main pipe 31, which are used to cool the two blades 21 and the cutting position to reduce the problem of edge chipping.

[0021] The working principle of this device is as follows: During operation, the mask material is first placed on the cutting device, and the position of the mask is restricted by a limiting structure such as a vacuum suction cup or a positioning clamp. The pre-cutting depth of the two cutter heads 21 is set according to the material characteristics. During adjustment, the adjusting screw 26 is rotated, which will drive the external limiting nut 261 to move. The limiting nut 261 will then drive the mounting block 25 fixed to it to move, thereby changing the position of the connecting sleeve 24. Since the top of the cutter holder 22 is inclined, when the connecting sleeve 24 moves, the connecting strip 23 connected to it will drive the cutter holder 22 to move up or down, thereby adjusting the height of the cutter head 21 to determine its pre-cutting depth. After the height of the cutter head 21 is adjusted, the drive structure on the device will drive the outer shell 1 and the cutting component 2 and cooling component 3 fixed to it to move and cut the mask.

[0022] During the cutting process, the drive structure drives the cutter head 21 to move forward along the predetermined cutting path. During the movement, the cutter head 21 at the front will scratch a shallow groove on the material surface to release stress and form a guide. The cutter head 21 at the rear will complete the final full-depth cut along the shallow groove. Since the stress has been released in advance, the edge stress condition of the cutter head 21 during cutting is improved, thereby effectively avoiding the generation of chipping and cracks.

[0023] During the cutting process, coolant will be sprayed onto the cutter head 21 and the cutting area through the spray pipe 33 to cool them, while the spray pipe 12 will blow out clean gas to clean up the debris and coolant at the cutting area, preventing debris from being rolled into the cutting path of the cutter head 21 and causing secondary damage.

[0024] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A cutting device for preventing chipping of mask material, characterized in that: include The housing (1) is mounted on a device for cutting a mask, and mounting grooves (13) are provided on both the front and rear sides of the middle part of the housing (1). The cutting assembly (2) consists of two parts, which are respectively installed at the front and rear of the outer shell (1). The two cutting assemblies (2) are arranged in a front-to-back manner along the cutting direction. Each cutting assembly (2) includes a blade (21). The cutting depth of the blade (21) at the front is less than that of the blade (21) at the rear. The blade (21) penetrates through the outer shell (1) and is movably connected. A blade holder (22) is fixedly connected to the top of the blade (21). A connecting strip (23) is fixedly connected to the top of the blade holder (22). A connecting sleeve (24) is slidably connected to the outside of the connecting strip (23). A mounting block (25) is fixedly connected to the top of the connecting sleeve (24). An adjusting screw (26) is installed in the middle of the mounting block (25). The adjusting screw (26) penetrates through the outer shell (1) and is rotatably connected. A cooling assembly (3) is located on the right side of the housing (1) and is used to cool the cutting position and the blade (21).

2. The cutting device for preventing chipping of mask material according to claim 1, characterized in that: The top of the outer shell (1) is fixedly connected to a connector (11), and the lower part of the connector (11) is fixedly connected to a nozzle (12). The nozzle (12) penetrates and is fixedly connected to the outer shell (1).

3. The cutting device for preventing chipping of mask material according to claim 1, characterized in that: The inner wall of the mounting groove (13) is provided with sliding grooves (14) on both the left and right sides.

4. The cutting device for preventing chipping of mask material according to claim 1, characterized in that: The top of the tool holder (22) is inclined.

5. The cutting device for preventing chipping of mask material according to claim 1, characterized in that: The outer wall of the adjusting screw (26) is threaded with a limiting nut (261), and the limiting nut (261) is connected to the mounting block (25) through and fixedly connected.

6. The cutting device for preventing chipping of mask material according to claim 3, characterized in that: The mounting block (25) is fixedly connected to sliders (251) on both the left and right sides, and the sliders (251) are slidably connected to the grooves (14).

7. The cutting device for preventing chipping of mask material according to claim 3, characterized in that: The cooling assembly (3) includes a main pipe (31), which is fixedly connected to the outer shell (1). A water inlet pipe (32) is fixedly connected to the rear of the main pipe (31), and two spray pipes (33) are fixedly connected to the bottom of the main pipe (31).

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