A film cooling device and a film production apparatus

CN224827289UActive Publication Date: 2026-10-09JIANGMEN HUALONG MEMBRANE MATERIAL CO LTD
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Patent Information

Application Number
CN202522499024.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-11-25
Publication Date
2026-10-09
Estimated Expiration
2035-11-25

AI Technical Summary

Technical Problem

现有的薄膜生产设备一般是采用风冷的方式对薄膜进行冷却,但这种冷却方式无法很好地满足薄膜的快速冷却需求,薄膜还是可能由于过热而导致收卷时粘连在一起,影响生产的连续性,影响产品质量,降低产品良率

Benefits of technology

换热辊与驱动辊相配合转动,能够牵引薄膜不断移动,同时由于辊面接触均匀、受力柔和,不易对薄膜表面造成划伤或压痕,有利于保证薄膜的产品质量。在薄膜移动过程中,换热辊持续沿其表面滚动,通过周向交替接触的方式,不断与薄膜不同区域进行热交换,从而均匀、高效地带走薄膜表面的热量,避免局部过热。换热辊内部设有换热管道,冷却介质在管道内持续流动,冷却介质不断吸收由薄膜传导至换热辊、再通过换热辊传递至换热管道的热量,并将热量迅速带走。冷源机构能够连续向换热管道供应冷却介质,确保换热辊始终保持良好的冷却能力,实现对薄膜的连续、稳定降温。本实用新型通过驱动机构、换热机构及冷源机构的协同作用,实现了薄膜的快速、均匀冷却,换热效率显著高于传统风冷方式,有效降低了薄膜因温度过高而发生粘连的风险。

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Abstract

The utility model discloses a kind of film cooling device and film production equipment, film cooling device includes drive mechanism, heat exchange mechanism and cold source mechanism, drive mechanism includes drive roll;Heat exchange mechanism includes heat exchange roll, support shaft and heat exchange pipeline, heat exchange roll is hollowly arranged, heat exchange roll is spaced apart and arranged at the radial side of drive roll, support shaft is arranged in heat exchange roll, support shaft is rotatably connected with heat exchange roll, heat exchange pipeline is arranged in heat exchange roll inside;Cold source mechanism is communicated with heat exchange pipeline, and cold source mechanism is used to provide cooling medium to heat exchange pipeline.Film production equipment has applied the above-mentioned one kind of film cooling device, can realize the rapid cooling of film, reduce film and occur adhesion due to overheating.
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Description

Technical Field

[0001] This utility model relates to the field of thin film production technology, and in particular to a thin film cooling device and thin film production equipment. Background Technology

[0002] During film production, the film is blown out from the blown head at a temperature typically between 170 and 200 degrees Celsius. To ensure stable film formation and prevent overheated films from sticking together during winding, and to control properties such as transparency and flexibility, rapid cooling is necessary. Rapid cooling allows the film's molecular chains to be fixed under lower stress, reducing internal stress and improving dimensional stability and flatness. Existing film production equipment generally uses air cooling, but this method cannot adequately meet the rapid cooling requirements. The film may still overheat and stick together during winding, affecting production continuity, product quality, and reducing yield. Utility Model Content

[0003] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention proposes a thin film cooling device and a thin film production equipment, wherein the thin film production equipment utilizes the thin film cooling device provided in this application. The thin film cooling device can achieve rapid cooling of the thin film, reducing the possibility of the thin film sticking together due to overheating.

[0004] In a first aspect, a thin-film cooling device according to an embodiment of the present invention includes: Drive mechanism, including drive rollers; The heat exchange mechanism includes a heat exchange roller, a support shaft, and a heat exchange pipe. The heat exchange roller is hollow and is spaced apart on one radial side of the drive roller. The support shaft passes through the heat exchange roller and is rotatably connected to the heat exchange roller. The heat exchange pipe is located inside the heat exchange roller. The cooling source mechanism is connected to the heat exchange pipeline and is used to provide cooling medium to the heat exchange pipeline.

[0005] A thin-film cooling device according to an embodiment of the present invention has at least the following beneficial effects: The heat exchange roller rotates in conjunction with the drive roller, continuously moving the film. Due to the uniform contact and gentle force applied to the roller surface, scratches or indentations are less likely to occur, thus ensuring product quality. During film movement, the heat exchange roller continuously rolls along the film's surface, exchanging heat with different areas of the film through alternating circumferential contact. This uniformly and efficiently removes heat from the film surface, preventing localized overheating. The heat exchange roller contains internal heat exchange pipes through which a cooling medium continuously flows. The cooling medium absorbs heat conducted from the film to the heat exchange roller and then transferred to the heat exchange pipes, rapidly removing the heat. The cooling source mechanism continuously supplies cooling medium to the heat exchange pipes, ensuring the heat exchange roller maintains good cooling capacity and achieving continuous and stable cooling of the film. This invention achieves rapid and uniform cooling of the film through the synergistic action of the drive mechanism, heat exchange mechanism, and cooling source mechanism. The heat exchange efficiency is significantly higher than traditional air cooling methods, effectively reducing the risk of film adhesion due to excessive temperature.

[0006] According to an embodiment of the present invention, a thin film cooling device includes a heat exchange pipe comprising a cooling section and a reflux section, the cooling section and the reflux section being connected, the cooling section being connected to a cold source mechanism, and both the cooling section and the reflux section being spaced apart from the inner circumferential wall of the heat exchange roller.

[0007] According to an embodiment of the present invention, a thin film cooling device is provided, wherein a heat exchange cavity is formed between the heat exchange roller and the support shaft, and a cooling section is disposed within the heat exchange cavity.

[0008] According to an embodiment of the present invention, a thin film cooling device is provided in which the cooling section is adjacent to and spaced apart from the inner peripheral wall of the heat exchange roller.

[0009] According to an embodiment of the present invention, a thin-film cooling device has a cooling section that extends spirally along the axial direction of the heat exchange roller within the heat exchange chamber.

[0010] According to an embodiment of the present invention, a thin film cooling device has a hollow support shaft, and a return flow section passes through the support shaft.

[0011] According to an embodiment of the present invention, a thin-film cooling device has heat exchange pipes at both ends connected to a cold source mechanism, and the heat exchange pipes and the cold source mechanism together form a circulation loop.

[0012] According to an embodiment of the present invention, a thin-film cooling device further includes a transfer mechanism connected to one end of a support shaft, and a cold source mechanism connected to a heat exchange pipe through the transfer mechanism.

[0013] According to an embodiment of the present invention, a thin-film cooling device includes a cold source mechanism comprising a circulating pump, a coil, and a fan. The outlet of the circulating pump is connected to one end of the coil, and the other end of the coil and the inlet of the circulating pump are respectively connected to both ends of a heat exchange pipe. The fan is located on one side of the coil and is used to blow air onto the coil to remove the heat from the coil.

[0014] Secondly, a thin film production equipment according to an embodiment of the present invention utilizes the aforementioned thin film cooling device.

[0015] The heat exchange roller rotates in conjunction with the drive roller, continuously moving the film. Due to the uniform contact and gentle force applied to the roller surface, scratches or indentations are less likely to occur, thus ensuring product quality. During film movement, the heat exchange roller continuously rolls along the film's surface, exchanging heat with different areas of the film through alternating circumferential contact. This uniformly and efficiently removes heat from the film surface, preventing localized overheating. The heat exchange roller contains internal heat exchange pipes through which a cooling medium continuously flows. The cooling medium absorbs heat conducted from the film to the heat exchange roller and then transferred to the heat exchange pipes, rapidly removing the heat. The cold source mechanism continuously supplies cooling medium to the heat exchange pipes, ensuring the heat exchange roller maintains good cooling capacity and achieving continuous and stable cooling of the film. This invention achieves rapid and uniform cooling of the film through the synergistic action of the drive mechanism, heat exchange mechanism, and cold source mechanism. The heat exchange efficiency is significantly higher than traditional air cooling methods, effectively reducing the risk of film adhesion due to excessive temperature. This improves production efficiency and product yield, and enhances production continuity.

[0016] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0017] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of the structure of a thin-film cooling device according to an embodiment of the present invention; Figure 2 This is a schematic diagram of the heat exchange mechanism, the transfer mechanism, the first conveying pipe, and the second conveying pipe of a thin-film cooling device according to an embodiment of the present utility model. Figure 3 This is a schematic diagram of the cold source mechanism of a thin-film cooling device according to an embodiment of the present invention; Figure 4 This is a right view of the drive roller, heat exchange roller, guide roller, and thin film of a thin film cooling device according to an embodiment of the present invention.

[0018] Explanation of reference numerals in the attached figures: First rack 100; Drive mechanism 200; drive roller 210; motor 220; Heat exchange mechanism 300; heat exchange roller 310; support shaft 320; heat exchange chamber 330; heat exchange pipe 340; cooling section 341; reflux section 342; Cold source unit 400; second frame 410; coil 420; fan 430; first delivery pipe 440; second delivery pipe 450; circulating pump 460; Adapter mechanism 500; adapter 510; first adapter pipe 520; second adapter pipe 530; Guide roller 600; Film 700. Detailed Implementation

[0019] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0020] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0021] In the description of a utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. If the terms "first" and "second" are used, they are merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly specifying the number of indicated technical features or the order of the indicated technical features.

[0022] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0023] Reference Figures 1 to 4This utility model provides a thin film cooling device, including a drive mechanism 200, a heat exchange mechanism 300, a cold source mechanism 400, and a first frame 100. The drive mechanism 200 and the heat exchange mechanism 300 are both mounted on the first frame 100. The drive mechanism 200 includes a drive roller 210, which can rotate around its axial direction. Specifically, the drive mechanism 200 also includes a motor 220, the output shaft of which is connected to one end of the drive roller 210, and the motor 220 can drive the drive roller 210 to rotate axially.

[0024] The heat exchange mechanism 300 includes a heat exchange roller 310, a support shaft 320, and a heat exchange pipe 340. The heat exchange roller 310 is hollow and is spaced apart on one radial side of the drive roller 210. The support shaft 320 passes through the heat exchange roller 310 and is rotatably connected to it. The heat exchange pipe 340 is located inside the heat exchange roller 310. Specifically, refer to... Figure 4 The heat exchange rollers 310 are spaced apart and obliquely above the drive rollers 210. Specifically, each end of the heat exchange roller 310 has a rotating hole, and a support shaft 320 passes through the rotating hole. The support shaft 320 is rotatably connected to both ends of the heat exchange rollers 310 sleeved on the support shaft 320, allowing the heat exchange rollers 310 to rotate about the axis of the support shaft 320. Specifically, refer to... Figure 4 The heat exchange roller 310 and the drive roller 210 are arranged adjacent to each other but spaced apart. The space between the heat exchange roller 310 and the drive roller 210 is used to accommodate the film 700. When the drive roller 210 rotates, it can drive the film 700 to move along the tangential direction of the drive roller 210. When the film 700 moves, it can also drive the heat exchange roller 310 to rotate together. The coordinated rotation of the heat exchange roller 310 and the drive roller 210 can achieve the traction of the film 700 and is less likely to cause damage to the film 700.

[0025] A cooling source unit 400 is connected to the heat exchange pipe 340 and is used to provide a cooling medium to the heat exchange pipe 340. Specifically, the cooling medium can continuously flow within the heat exchange pipe 340. The cooling medium can be a liquid medium capable of performing a cooling function, such as room temperature water or chilled water.

[0026] The heat exchange roller 310 and the drive roller 210 cooperate and rotate synchronously, enabling the film 700 to be smoothly and continuously pulled forward for discharge. Simultaneously, due to the uniform contact and gentle force applied to the roller surface, scratches or indentations on the film 700 surface are less likely, thus ensuring the product quality of the film 700. During the movement of the film 700, the heat exchange roller 310 continuously rolls along its surface, exchanging heat with different areas of the film 700 through alternating circumferential contact. This uniformly and efficiently removes heat from the surface of the film 700, preventing localized overheating. The heat exchange roller 310 has an internal heat exchange pipe 340, within which a cooling medium continuously flows. The cooling medium continuously absorbs heat conducted from the film 700 to the heat exchange roller 310 and then transferred through the heat exchange roller 310 to the heat exchange pipe 340, and rapidly removes the heat. The cold source mechanism 400 continuously supplies cooling medium to the heat exchange pipe 340, ensuring that the heat exchange roller 310 maintains good cooling capacity and achieves continuous and stable cooling of the film 700. This invention achieves rapid and uniform cooling of the film 700 through the synergistic effect of the drive mechanism 200, the heat exchange mechanism 300, and the cold source mechanism 400. The heat exchange efficiency is significantly higher than that of the traditional air cooling method, effectively reducing the risk of the film 700 sticking together due to excessive temperature.

[0027] According to some embodiments of this application, refer to Figure 2 The heat exchange pipe 340 includes a cooling section 341 and a reflux section 342, which are connected. The cooling section 341 is also connected to the cold source mechanism 400. Both the cooling section 341 and the reflux section 342 are spaced apart from the inner circumferential wall of the heat exchange roller 310. The cooling section 341 and the reflux section 342 do not rotate with the heat exchange roller 310, nor do they obstruct the rotation of the heat exchange roller 310 itself. In some embodiments, the cold source mechanism 400 provides a cooling medium to the cooling section 341. After heat exchange, the cooling medium flows to the reflux section 342 and is finally discharged to the outside from the end of the reflux section 342 away from the cooling section 341.

[0028] It is understood that in some other embodiments, the return section 342 is connected to the storage tank, and the cold source mechanism 400 is also connected to the storage tank. The cooling medium after heat exchange can be discharged to the storage tank and eventually returned to the cold source mechanism 400 for recycling.

[0029] Furthermore, referring to Figure 2 A heat exchange cavity 330 is formed between the heat exchange roller 310 and the support shaft 320, and a cooling section 341 is disposed within the heat exchange cavity 330. The cooling medium continuously flows through the cooling section 341, which can continuously cool the air in the heat exchange cavity 330, thereby improving the cooling effect on the heat exchange roller 310.

[0030] Furthermore, referring to Figure 2The cooling section 341 is located adjacent to and spaced apart from the inner peripheral wall of the heat exchange roller 310. The proximity of the cooling section 341 to the inner peripheral wall of the heat exchange roller 310 further enhances the cooling effect on the heat exchange roller 310.

[0031] Furthermore, referring to Figure 2 The cooling section 341 extends spirally along the axial direction of the heat exchange roller 310 within the heat exchange chamber 330. The spirally extended cooling section 341 can extend a longer length within the heat exchange chamber 330 to increase the flow time of the cooling medium within the heat exchange chamber 330, thereby achieving sufficient heat exchange between the cooling medium and the heat exchange roller 310 and improving heat exchange efficiency.

[0032] According to some embodiments of this application, refer to Figure 2 The support shaft 320 is hollow, and the return section 342 passes through the support shaft 320. Specifically, the return section 342 and the cooling section 341 are separated by the surface of the support shaft 320. The cooling medium, after sufficient heat exchange, can flow to the return section 342 located inside the support shaft 320. The return section 342 and the cooling section 341 located outside the support shaft 320 are isolated by the support shaft 320, reducing the transfer of heat from the return section 342 to the cooling section 341.

[0033] According to some embodiments of this application, refer to Figure 1 and Figure 2 Both ends of the heat exchange pipe 340 are connected to the cold source mechanism 400, and the heat exchange pipe 340 and the cold source mechanism 400 together form a circulation loop. Specifically, the ends of the return section 342 and the cooling section 341 that are far apart from each other are connected to the cold source mechanism 400 to form a circulation loop.

[0034] Furthermore, referring to Figures 1 to 2 It also includes a transfer mechanism 500, which is connected to one end of the support shaft 320. The cold source mechanism 400 is connected to the heat exchange pipe 340 through the transfer mechanism 500. Specifically, refer to... Figure 2 The adapter mechanism 500 includes an adapter 510, a first adapter pipe 520, and a second adapter pipe 530. Both the first and second adapter pipes 520 are inserted into the adapter 510, which is connected to one end of a support shaft 320. The first and second adapter pipes 520 extend into the hollow support shaft 320. One end of the first adapter pipe 520 is connected to the cooling section 341, and one end of the second adapter pipe 530 is connected to the return section 342. Specifically, the other ends of the first and second adapter pipes 520 and 530 are respectively connected to the cold source mechanism 400. The adapter mechanism 500 improves the ease of connection between the cold source mechanism 400 and the heat exchange pipe 340.

[0035] Furthermore, referring to Figure 3The cooling source mechanism 400 includes a circulating pump 460, a coil 420, and a fan 430. The outlet of the circulating pump 460 is connected to one end of the coil 420, and the other end of the coil 420 and the inlet of the circulating pump 460 are connected to both ends of the heat exchange pipe 340, respectively. The fan 430 is located on one side of the coil 420 and is used to blow air into the coil 420 to remove heat from it. Specifically, refer to... Figure 3 The fan 430 is located on the upper side of the coil 420.

[0036] Specifically, refer to Figures 1 to 3 The cooling source mechanism 400 also includes a second frame 410, a first delivery pipe 440, and a second delivery pipe 450. A circulating pump 460, a coil 420, and a fan 430 are all installed within the second frame 410. The first delivery pipe 440 and the second delivery pipe 450 are installed on the side wall of the second frame 410. The two ends of the first delivery pipe 440 are connected to a first transfer pipe 520 and the coil 420, respectively. The two ends of the second delivery pipe 450 are connected to a second transfer pipe 530 and the inlet of the circulating pump 460, respectively. The outlet of the circulating pump 460, the coil 420, the first delivery pipe 440, the first transfer pipe 520, the cooling section 341, the return section 342, the second transfer pipe 530, the second delivery pipe 450, and the inlet of the circulating pump 460 are sequentially connected to form a circulation loop.

[0037] It is understood that, in some other embodiments, reference is made to... Figure 1 and Figure 4 A guide roller 600 is rotatably connected to the first frame 100, and the guide roller 600 is spaced apart and obliquely above the drive roller 210. The guide roller 600 is used to guide the movement of the film 700 and provide expansion force to the film 700 to prevent the film 700 from sticking together.

[0038] Working principle: Motor 220 drives drive roller 210 to rotate, causing film 700 to move along the tangential direction of drive roller 210. As film 700 moves, it also drives heat exchange roller 310 to rotate. The circulating pump 460 of the cold source mechanism 400 drives the cooling medium to flow within coil 420. Fan 430 blows air into coil 420 to remove heat from coil 420 and the cooling medium within it. The cooled medium is then driven to flow sequentially through first conveying pipe 440, first transfer pipe 520, and heat exchange pipe 340. Within heat exchange pipe 340, it absorbs heat from heat exchange roller 310 and film 700, and finally returns to circulating pump 460, forming a circulation loop. The continuous rotation of drive roller 210 and heat exchange roller 310, along with the continuous flow of cooling medium, achieves continuous and efficient cooling of heat exchange roller 310 and film 700.

[0039] This application also provides a film production apparatus that utilizes the film cooling device of this application, further comprising a blown film head and a film winding device. The blown film head is used to supply film 700 to the film cooling device, and the film winding device is used to wind up the cooled film 700.

[0040] The heat exchange roller 310 and the drive roller 210 cooperate and rotate synchronously, enabling the film 700 to be smoothly and continuously pulled forward for discharge. Simultaneously, due to the uniform contact and gentle force applied to the roller surface, scratches or indentations on the film 700 surface are less likely, thus ensuring the product quality of the film 700. During the movement of the film 700, the heat exchange roller 310 continuously rolls along its surface, exchanging heat with different areas of the film 700 through alternating circumferential contact. This uniformly and efficiently removes heat from the surface of the film 700, preventing localized overheating. The heat exchange roller 310 has an internal heat exchange pipe 340, within which a cooling medium continuously flows. The cooling medium continuously absorbs heat conducted from the film 700 to the heat exchange roller 310 and then transferred through the heat exchange roller 310 to the heat exchange pipe 340, and rapidly removes the heat. The cold source mechanism 400 continuously supplies cooling medium to the heat exchange pipe 340, ensuring that the heat exchange roller 310 maintains good cooling capacity and achieves continuous and stable cooling of the film 700. This invention achieves rapid and uniform cooling of the film 700 through the synergistic effect of the drive mechanism 200, the heat exchange mechanism 300, and the cold source mechanism 400. The heat exchange efficiency is significantly higher than that of traditional air cooling, effectively reducing the risk of film 700 sticking due to excessive temperature. This is beneficial to improving production efficiency and product yield, as well as production continuity.

[0041] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0042] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A thin-film cooling device, characterized in that, include: The drive mechanism (200) includes a drive roller (210); The heat exchange mechanism (300) includes a heat exchange roller (310), a support shaft (320), and a heat exchange pipe (340). The heat exchange roller (310) is hollow and is spaced apart on one radial side of the drive roller (210). The support shaft (320) passes through the heat exchange roller (310) and is rotatably connected to the heat exchange roller (310). The heat exchange pipe (340) is located inside the heat exchange roller (310). A cold source mechanism (400) is connected to the heat exchange pipe (340) and is used to provide a cooling medium to the heat exchange pipe (340).

2. The thin-film cooling device according to claim 1, characterized in that, The heat exchange pipe (340) includes a cooling section (341) and a return section (342). The cooling section (341) and the return section (342) are connected. The cooling section (341) is connected to the cold source mechanism (400). The cooling section (341) and the return section (342) are both spaced apart from the inner peripheral wall of the heat exchange roller (310).

3. A thin-film cooling device according to claim 2, characterized in that, A heat exchange cavity (330) is formed between the heat exchange roller (310) and the support shaft (320), and the cooling section (341) is disposed in the heat exchange cavity (330).

4. A thin-film cooling device according to claim 3, characterized in that, The cooling section (341) is adjacent to and spaced apart from the inner peripheral wall of the heat exchange roller (310).

5. A thin-film cooling device according to claim 4, characterized in that, The cooling section (341) extends spirally along the axial direction of the heat exchange roller (310) within the heat exchange chamber (330).

6. A thin-film cooling device according to claim 3, characterized in that, The support shaft (320) is hollow, and the return section (342) passes through the support shaft (320).

7. A thin-film cooling device according to claim 1, characterized in that, Both ends of the heat exchange pipe (340) are connected to the cold source mechanism (400), and the heat exchange pipe (340) and the cold source mechanism (400) together form a circulation loop.

8. A thin-film cooling device according to claim 7, characterized in that, It also includes a transfer mechanism (500), which is connected to one end of the support shaft (320), and the cold source mechanism (400) is connected to the heat exchange pipe (340) through the transfer mechanism (500).

9. A thin-film cooling device according to claim 7, characterized in that, The cold source mechanism (400) includes a circulating pump (460), a coil (420), and a fan (430). The outlet of the circulating pump (460) is connected to one end of the coil (420), and the other end of the coil (420) and the inlet of the circulating pump (460) are connected to both ends of the heat exchange pipe (340). The fan (430) is located on one side of the coil (420) and is used to blow air into the coil (420) to remove the heat from the coil (420).

10. A thin film production equipment, characterized in that, Includes a thin-film cooling device as described in any one of claims 1 to 9.