Carrying mechanism and laser ablation apparatus

CN224831143UActive Publication Date: 2026-10-09SHENZHEN HANS SEMICONDUCTOR EQUIPMENT TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202521301387.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-06-24
Publication Date
2026-10-09
Estimated Expiration
2035-06-24

AI Technical Summary

Technical Problem

但是,当需要对与正面两面相邻的侧面进行加工时,需要使工件翻转90°后放置在另一个工位的支撑台上,目前的搬运机构在能够实现翻转功能下,在不同工位之间转移工件的效率低

Benefits of technology

[0006]可看出,本申请的搬运机构中,第一驱动组件与第一吸附组件连接,使第一吸附组件能够进行沿竖直方向移动,第二驱动组件与第二吸附组件驱动连接,使第二吸附组件能够沿竖直方向以及翻转运动,与此同时,位移组件能够驱动第一驱动组件和第二驱动组件至少在水平方向上独立运动,且能够使第一驱动组件和第二驱动组件之间能够相互靠近或远离,当第一吸附组件和第二吸附组件相互靠近时,在第一驱动组件和第二驱动组件的作用下能够实现第一吸附组件和第二吸附组件的对接,当工件的其中一个表面加工后,第二吸附组件可对该工件进行翻转后转移至第一吸附组件上,此时,第一吸附组件可在位移组件的作用下将工件转移至其它工位进行工件另一表面的加工,而第二吸附组件还可在位移组件的作用下继续对工件进行取料并将该工件转移至加工工位进行加工。也就是说,本申请的第一吸附组件和第二吸附组件既能够实现对工件的翻转,同时,第一吸附组件和第二吸附组件还能够单独带动工件移动至不同的工位,该方式可以减少等待的时间,提升加工的效率。

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Abstract

The utility model provides a kind of carrying mechanism and laser ablation equipment, comprising: displacement component;First drive component and second drive component are respectively set in the displacement component, and the displacement component drives the first drive component and second drive component at least independent motion in horizontal direction;First suction component and second suction component, the first suction component and second suction component are respectively used to adsorb workpiece, the first suction component is connected with the first drive component, and the second suction component is connected with the second drive component;The first drive component drives the first suction component to move along vertical direction, the second drive component drives the second suction component to move along vertical direction, and the second drive component can also drive the second suction component to overturn motion.This application's carrying mechanism can reduce the time of waiting, improve the efficiency of processing.
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Description

Technical Field

[0001] This utility model belongs to the field of material handling mechanism technology, and more specifically, it relates to a material handling mechanism and a laser ablation device. Background Technology

[0002] When machining multiple sides of a workpiece, it needs to be flipped. Currently, this is typically done by first using one robotic arm to remove the workpiece from the support table, then cooperating with another robotic arm to flip the workpiece, and finally placing the flipped workpiece back onto the support table, thus flipping both sides of the workpiece. However, when machining sides adjacent to the front two sides, the workpiece needs to be flipped 90° and placed on a support table at another station. Current handling mechanisms, even with the flipping function, have low efficiency in transferring workpieces between different stations. Utility Model Content

[0003] The present invention provides a conveying mechanism and a laser ablation device. The conveying mechanism can not only flip the workpiece, but also transfer the workpiece between different workstations with high efficiency.

[0004] The technical solution of this application is to provide a conveying mechanism, including:

[0005] Displacement components; The first driving component and the second driving component are respectively disposed on the displacement component, and the displacement component drives the first driving component and the second driving component to move independently at least in the horizontal direction, and enables the first driving component and the second driving component to move closer to or further away from each other. A first adsorption component and a second adsorption component are used to adsorb workpieces, the first adsorption component is connected to the first driving component, and the second adsorption component is connected to the second driving component. The first driving component drives the first adsorption component to move vertically, and the second driving component drives the second adsorption component to move vertically, so that the first adsorption component and the second adsorption component can dock, and the second driving component can also drive the second adsorption component to perform a flipping motion.

[0006] As can be seen, in the conveying mechanism of this application, the first driving component is connected to the first adsorption component, enabling the first adsorption component to move vertically. The second driving component is driven and connected to the second adsorption component, enabling the second adsorption component to move vertically and flip. Simultaneously, the displacement component can drive the first and second driving components to move independently, at least horizontally, and allows them to move closer or further apart. When the first and second adsorption components approach each other, they can dock under the action of the first and second driving components. After one surface of the workpiece is processed, the second adsorption component can flip the workpiece and transfer it to the first adsorption component. At this time, the first adsorption component can transfer the workpiece to another station for processing the other surface under the action of the displacement component. The second adsorption component can also continue to pick up the workpiece and transfer it to the processing station for processing under the action of the displacement component. In other words, the first and second adsorption components of this application can not only flip the workpiece, but also independently move the workpiece to different stations. This method can reduce waiting time and improve processing efficiency.

[0007] Optionally, the displacement component is a multi-movement drive device, wherein the first drive component and the second drive component are respectively connected to a corresponding mover.

[0008] Optionally, it further includes a first extension member, one end of which is connected to the first driving assembly, and the other end of which extends toward the second driving assembly, with the first adsorption assembly connected to the end of the first extension member away from the first driving assembly; and / or It also includes a second extension, one end of which is connected to the second drive assembly, and the other end of which extends toward the end closer to the first drive assembly. The second adsorption assembly is connected to the end of the second extension away from the first drive assembly.

[0009] Optionally, the second driving component includes a second lifting driving member and a rotating driving member. The second lifting driving member is connected to the displacement component. One end of the second extension is connected to the second lifting driving member, and the other end of the second extension extends toward the end closer to the first driving component. The rotating driving member is connected to the end of the second extension away from the second lifting driving member, and the rotating driving member is connected to the second adsorption component.

[0010] Optionally, it also includes a collision avoidance sensor, which includes a sensor and a sensed element, one of which is disposed in the first drive assembly and the other in the second drive assembly. When the first drive assembly and the second drive assembly are close to each other, the sensor can sense the sensed element.

[0011] Optionally, the first adsorption component includes a first mounting component and a plurality of first adsorption components. The first mounting component is connected to the first driving component, and the plurality of first adsorption components are disposed on the first mounting component to cooperate in adsorbing the workpiece.

[0012] Optionally, the second adsorption component includes a connector, a first adsorption part, and a second adsorption part. The connector is connected to the second driving component, and the first adsorption part and the second adsorption part are disposed opposite to each other on the connector.

[0013] Optionally, the first adsorption part includes a second mounting member and a plurality of second adsorption members. The second mounting member is disposed on the first surface of the connector, and the plurality of second adsorption members are disposed on the second mounting member to cooperate in adsorbing the workpiece. The second adsorption part includes a third mounting member and a plurality of third adsorption members. The third mounting member is disposed on the second surface of the connector opposite to the first surface, and the plurality of second adsorption members are disposed on the third mounting member to cooperate in adsorbing the workpiece.

[0014] Optionally, the first mounting component is provided with a plurality of first assembly slots, the plurality of first assembly slots being distributed radially, each first assembly slot being provided with a first adsorption component, and the first adsorption component being adjustable within the first assembly slot. The second mounting component is provided with a plurality of second assembly slots, which are distributed radially. Each second assembly slot is provided with a second adsorption component, and the second adsorption component is adjustable within the second assembly slot. The third mounting component is provided with a plurality of third assembly slots, which are distributed radially. Each third assembly slot is provided with a third adsorption component, and the third adsorption component is adjustable within the third assembly slot.

[0015] A laser ablation device includes a first support platform, a second support platform, a third support platform, a first laser mechanism, a second laser mechanism, a third laser mechanism, and a conveying mechanism. The first, second, and third support platforms are all disposed on the path along which the first and second adsorption components move horizontally. The first laser mechanism is disposed corresponding to the first support platform, and the first support platform is used to support a workpiece placed horizontally. The second laser mechanism is disposed corresponding to the second support platform, and the second support platform is used to support and fix a workpiece placed vertically. The third laser mechanism is disposed corresponding to the third support platform, and the third support platform is used to support and fix a workpiece placed vertically. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 A schematic diagram of the handling mechanism provided in the embodiments of this utility model; Figure 2 A schematic diagram of the structure of the first driving component and the first adsorption component in the conveying mechanism provided in the embodiments of this utility model; Figure 3 A schematic diagram of the structure of the second driving component and the second adsorption component in the conveying mechanism provided in the embodiments of this utility model. Attached image description: 100. Displacement component; 200. First driving component; 300. Second drive assembly; 310. Second lifting drive component; 320. Rotation drive component; 400, First adsorption component; 410, First mounting component; 420, First adsorption element; 430, First assembly groove; 500, Second adsorption component; 510, Connector; 520, First adsorption part; 521, Second mounting part; 522, Second adsorption component; 523, Second assembly groove; 530, Second adsorption part; 531, Third mounting part; 532, Third adsorption component; 533, Third assembly groove; 600. First extension component; 700. Second extension component; 800, Anti-collision sensor; 810, Sensor; 820, Sensored component. Detailed Implementation

[0019] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0020] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0021] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the conveying mechanism and laser ablation equipment or components referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0022] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In some descriptions of utility models, "a plurality of" means two or more, unless otherwise explicitly specified.

[0023] This application provides a handling mechanism that can flip workpieces and efficiently transfer workpieces between different workstations.

[0024] See Figure 1 The conveying mechanism includes a displacement component 100, a first driving component 200, a second driving component 300, a first adsorption component 400, and a second adsorption component 500.

[0025] The first driving component 200 and the second driving component 300 are respectively disposed on the displacement component 100. The displacement component 100 drives the first driving component 200 and the second driving component 300 to move independently at least in the horizontal direction, and enables the first driving component 200 and the second driving component 300 to move closer to or further away from each other.

[0026] The first adsorption component 400 and the second adsorption component 500 are used to adsorb workpieces, respectively. The first adsorption component 400 is connected to the first driving component 200, and the second adsorption component 500 is connected to the second driving component 300. It can be understood that when the first driving component 200 moves under the action of the displacement component 100, the first adsorption component 400 can move synchronously, and when the second driving component 300 moves under the action of the displacement component 100, the second adsorption component 500 can move synchronously.

[0027] Furthermore, the first driving component 200 drives the first adsorption component 400 to move vertically, and the second driving component 300 drives the second adsorption component 500 to move vertically, so that the first adsorption component 400 and the second adsorption component 500 can dock.

[0028] Specifically, the first driving component 200 can drive the first adsorption component 400 to move vertically, and the second driving component 300 can drive the second adsorption component 500 to move vertically, so that the first adsorption component 400 and the second adsorption component 500 can be staggered in the vertical direction.

[0029] Then, the displacement component 100 can move by driving the first driving component 200 and the second driving component 300, so that the first adsorption component 400 and the second adsorption component 500 can approach each other to the same vertical direction, and then the first adsorption component 400 and the second adsorption component 500 can dock through the cooperation of the first driving component 200 and the second driving component 300.

[0030] For example, in one possible implementation, after the front side of the workpiece is processed at the first station, the second adsorption component 500 can move to the first station to pick up the workpiece under the action of the displacement component 100 and the second drive component 300, and can drive the workpiece to rotate 180°. During this process, the first adsorption component 400 and the second adsorption component 500 can approach each other under the action of the displacement component 100 and dock with each other, transferring the rotated workpiece onto the first adsorption component 400. At this time, the first adsorption component 400 can move to the third station to process the back side of the workpiece under the action of the displacement component 100, while the second adsorption component 500 can continue to pick up the workpiece and transfer it to the first station for back side processing or rotate the workpiece 90° and transfer it to the second station for side side processing.

[0031] As can be seen, in the conveying mechanism of this application, the first driving component 200 is connected to the first adsorption component 400, enabling the first adsorption component 400 to move vertically. The second driving component 300 is driven to the second adsorption component 500, enabling the second adsorption component 500 to move vertically and rotate. Simultaneously, the displacement component 100 can drive the first driving component 200 and the second driving component 300 to move independently, at least horizontally, and can allow the first driving component 200 and the second driving component 300 to move closer to or further away from each other. When the parts 500 approach each other, the first adsorption component 400 and the second adsorption component 500 can dock under the action of the first driving component 200 and the second driving component 300. After one surface of the workpiece is processed, the second adsorption component 500 flips the workpiece and transfers it to the first adsorption component 400. At this time, the first adsorption component 400 can transfer the workpiece to another station for processing the other surface of the workpiece under the action of the displacement component 100. Meanwhile, the second adsorption component 500 can continue to pick up the workpiece and transfer it to the processing station for processing under the action of the displacement component 100. In other words, the first adsorption component 400 and the second adsorption component 500 of this application can not only flip the workpiece, but also independently drive the workpiece to different stations. This method can reduce waiting time and improve processing efficiency.

[0032] For example, in one embodiment, the conveying mechanism can be installed on a processing equipment including a first station, a second station, and a third station. The first station can support a workpiece placed horizontally with its front facing up, the second station can support a workpiece placed vertically, and the third station can support a workpiece placed horizontally with its back facing up. The first adsorption component 400 and the second adsorption component 500 can cooperate to flip the workpiece while also moving efficiently between the first station, the second station, and the third station to efficiently transfer the workpiece.

[0033] See Figure 1 In one embodiment, the displacement component 100 is a multi-moving actuator, with the first driving component 200 and the second driving component 300 each connected to a corresponding moving element. This method enables the first driving component 200 and the second driving component 300 to move independently in the horizontal direction, thus achieving independent horizontal movement of the first adsorption component 400 and the second adsorption component 500, while also saving space.

[0034] In other embodiments, the displacement component 100 may include two drive structures, one of which drives the first drive component 200 to move, and the other drive structure drives the second drive component 300 to move.

[0035] See Figure 1 and Figure 2 In one embodiment, the conveying mechanism may include a first extension 600, one end of which is connected to a first drive assembly 200, and the other end of which extends toward a direction close to a second drive assembly 300. A first adsorption assembly 400 is connected to the end of the first extension 600 away from the first drive assembly 200.

[0036] Understandably, the first extension 600 can position the first adsorption component 400 on the side of the first driving component 200 closer to the second driving component 300. In this way, when the first driving component 200 and the second driving component 300 approach each other and the first adsorption component 400 and the second adsorption component 500 dock, the risk of collision between the first driving component 200 and the second driving component 300 can be reduced or avoided.

[0037] In one embodiment, see Figure 1 and Figure 3 The conveying mechanism may include a second extension 700, one end of which is connected to the second drive assembly 300, and the other end of which extends toward the end closer to the first drive assembly 200. The second adsorption assembly 500 is connected to the end of the second extension 700 away from the first drive assembly 200.

[0038] Understandably, the second extension 700 can position the second adsorption component 500 on the side of the second driving component 300 closer to the first driving component 200. In this way, when the first driving component 200 and the second driving component 300 approach each other and the first adsorption component 400 and the second adsorption component 500 dock, the risk of collision between the first driving component 200 and the second driving component 300 can be reduced or avoided.

[0039] It should be noted that the conveying mechanism may include one or both of the first extension 600 and the second extension 700.

[0040] See Figure 1 The first drive component 200 may be a servo lifting screw module.

[0041] See Figure 3The second driving assembly 300 may include a second lifting drive 310 and a rotary drive 320. The second lifting drive 310 is connected to the displacement assembly 100. One end of the second extension 700 is connected to the second lifting drive 310, and the other end of the second extension 700 extends towards the end closer to the first driving assembly 200. The rotary drive 320 is connected to the end of the second extension 700 away from the second lifting drive 310, and the rotary drive 320 is connected to the second adsorption assembly 500. This structure facilitates the placement of the rotary drive 320, avoids interference between the rotary drive 320 and the second lifting drive 310, and also allows the second adsorption assembly 500 to be located on one side of the second lifting drive 310.

[0042] The first lifting drive component can be a servo lifting screw module. The rotary drive component 320 can be a combination of a screw motor and a hollow rotary platform.

[0043] Combination Figure 1 , Figure 2 and Figure 3 The conveying mechanism may also include an anti-collision sensor 800, which includes a sensor 810 and a sensed element 820. One of the sensor 810 and the sensed element 820 is disposed in the first drive assembly 200 and the other is disposed in the second drive assembly 300. When the first drive assembly 200 and the second drive assembly 300 are close to each other, the sensor 810 can sense the sensed element 820.

[0044] For example, in one embodiment, when the first drive assembly 200 and the second drive assembly 300 approach each other, after the sensor 810 detects the sensed member 820, the displacement assembly 100 can stop driving the first drive assembly 200 and the second drive assembly 300 to move, thereby avoiding the risk of collision between the first drive assembly 200 and the second drive assembly 300.

[0045] See Figure 2 The first adsorption component 400 may include a first mounting component 410 and a plurality of first adsorption components 420. The first mounting component 410 is connected to the first driving component 200, and the plurality of first adsorption components 420 are disposed on the first mounting component 410 to cooperate in adsorbing workpieces. This method enables the first adsorption component 400 to adsorb workpieces of different sizes.

[0046] See Figure 3The second adsorption assembly 500 may include a connector 510, a first adsorption part 520, and a second adsorption part 530. The connector 510 is connected to the second drive assembly 300, and the first adsorption part 520 and the second adsorption part 530 are disposed opposite to each other on the connector 510. It is understood that the above structure allows the second adsorption assembly 500 to reduce the number of flips when adsorbing workpieces. For example, after the first adsorption part 520 adsorbs a workpiece and docks with the first adsorption assembly 400 and transfers it to the first adsorption assembly 400, the second adsorption part 530 of the second adsorption assembly 500 can directly adsorb another workpiece without needing to rotate it again. Furthermore, the second adsorption assembly 500 can adsorb two workpieces simultaneously.

[0047] In one embodiment, the first adsorption part 520 includes a second mounting member 521 and a plurality of second adsorption members 522. The second mounting member 521 is disposed on the first surface of the connector 510, and the plurality of second adsorption members 522 are disposed on the second mounting member 521 to cooperate in adsorbing workpieces. This method enables the first adsorption part 520 to adsorb workpieces of different sizes.

[0048] The second adsorption part 530 includes a third mounting member 531 and a plurality of third adsorption members 532. The third mounting member 531 is disposed on the second surface of the connector 510 opposite to the first surface. The plurality of second adsorption members 522 are disposed on the third mounting member 531 to cooperate in adsorbing workpieces. This method enables the second adsorption part 530 to adsorb workpieces of different sizes.

[0049] Furthermore, the first mounting component 410 is provided with a plurality of first mounting slots 430, which are distributed radially. Each first mounting slot 430 is provided with a first adsorption component 420, and the first adsorption component 420 is adjustable within the first mounting slot 430. It can be understood that this method makes the position of the first adsorption component 420 adjustable to adapt to workpieces of different shapes and sizes, thus enhancing compatibility.

[0050] The second mounting component 521 is provided with multiple second mounting slots 523, which are distributed radially. Each second mounting slot 523 is provided with a second adsorption component 522, and the second adsorption component 522 is adjustable within the second mounting slot 523. It can be understood that this method makes the position of the second adsorption component 522 adjustable to adapt to workpieces of different shapes and sizes, thus enhancing compatibility.

[0051] The third mounting component 531 is provided with multiple third mounting slots 533, which are distributed radially. Each third mounting slot 533 is provided with a third adsorption component 532, and the third adsorption component 532 is adjustable within the second mounting slot 523. It can be understood that this method makes the position of the third adsorption component 532 adjustable to adapt to workpieces of different shapes and sizes, thus enhancing compatibility.

[0052] This application also provides a laser ablation device, including a first support platform, a second support platform, a third support platform, a first laser mechanism, a second laser mechanism, a third laser mechanism, and a conveying mechanism of this application. The first, second, and third support platforms are all disposed on the path along which the first adsorption component 400 and the second adsorption component 500 move horizontally. The first laser mechanism is disposed corresponding to the first support platform, and the first support platform is used to support a horizontally placed workpiece. The second laser mechanism is disposed corresponding to the second support platform, and the second support platform is used to support and fix a vertically placed workpiece. The third laser mechanism is disposed corresponding to the third support platform, and the third support platform is used to support and fix a vertically placed workpiece.

[0053] For example, after the front of the workpiece placed on the first support platform is laser-ablated, the second adsorption component 500 can pick up and flip the workpiece on the first support platform under the action of the displacement component 100 and the second driving component 300. After flipping, the first adsorption component 400 can also move to dock with the second adsorption component 500 under the action of the displacement component 100 and the first driving component 200. At this time, the first adsorption component 400 can adsorb the back of the workpiece to transfer the workpiece to the first adsorption component 400. Then, under the action of the displacement component 100 and the first driving component 200, the first adsorption component 400 can place the workpiece on the third support platform for laser ablation of the back of the workpiece, while the second adsorption component 500 can continue to load another workpiece onto the first support platform or the second support platform under the action of the displacement component 100 and the second driving component 300.

[0054] The aforementioned laser ablation equipment can process multiple workpieces simultaneously, reducing processing waiting time and improving workpiece processing efficiency.

[0055] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of some utility models should be included within the protection scope of some utility models.

Claims

1. A conveying mechanism, characterized in that, include: Displacement components; The first driving component and the second driving component are respectively disposed on the displacement component, and the displacement component drives the first driving component and the second driving component to move independently in the horizontal direction, and enables the first driving component and the second driving component to move closer to or further away from each other. A first adsorption component and a second adsorption component are used to adsorb workpieces, the first adsorption component is connected to the first driving component, and the second adsorption component is connected to the second driving component. The first driving component drives the first adsorption component to move vertically, and the second driving component drives the second adsorption component to move vertically, so that the first adsorption component and the second adsorption component can dock, and the second driving component can also drive the second adsorption component to perform a flipping motion.

2. The conveying mechanism as described in claim 1, characterized in that, The displacement component is a multi-movement drive device, and the first drive component and the second drive component are respectively connected to a corresponding mover.

3. The conveying mechanism as described in claim 1 or 2, characterized in that, It also includes a first extension member, one end of which is connected to the first driving assembly, and the other end of which extends toward the second driving assembly; the first adsorption assembly is connected to the end of the first extension member away from the first driving assembly; and / or It also includes a second extension, one end of which is connected to the second drive assembly, and the other end of which extends toward the end closer to the first drive assembly. The second adsorption assembly is connected to the end of the second extension away from the first drive assembly.

4. The conveying mechanism as described in claim 3, characterized in that, The second driving component includes a second lifting drive and a rotating drive. The second lifting drive is connected to the displacement component. One end of the second extension is connected to the second lifting drive, and the other end of the second extension extends toward the end closer to the first driving component. The rotating drive is connected to the end of the second extension away from the second lifting drive. The rotating drive is connected to the second adsorption component.

5. The conveying mechanism as described in claim 1 or 2, characterized in that, It also includes a collision avoidance sensor, which includes a sensor and a sensed element. One of the sensor and the sensed element is disposed in the first drive assembly, and the other is disposed in the second drive assembly. When the first drive assembly and the second drive assembly are close to each other, the sensor can sense the sensed element.

6. The conveying mechanism as described in claim 1, characterized in that, The first adsorption component includes a first mounting component and a plurality of first adsorption components. The first mounting component is connected to the first driving component, and the plurality of first adsorption components are disposed on the first mounting component to cooperate in adsorbing the workpiece.

7. The conveying mechanism as described in claim 6, characterized in that, The second adsorption component includes a connector, a first adsorption part, and a second adsorption part. The connector is connected to the second driving component, and the first adsorption part and the second adsorption part are disposed opposite to each other on the connector.

8. The conveying mechanism as described in claim 7, characterized in that, The first adsorption part includes a second mounting member and a plurality of second adsorption members. The second mounting member is disposed on the first surface of the connector, and the plurality of second adsorption members are disposed on the second mounting member to cooperate in adsorbing the workpiece. The second adsorption part includes a third mounting member and a plurality of third adsorption members. The third mounting member is disposed on the second surface of the connector opposite to the first surface, and the plurality of second adsorption members are disposed on the third mounting member to cooperate in adsorbing the workpiece.

9. The conveying mechanism as described in claim 8, characterized in that, The first mounting component is provided with a plurality of first assembly slots, which are distributed radially. Each first assembly slot is provided with a first adsorption component, and the first adsorption component is adjustable within the first assembly slot. The second mounting component is provided with a plurality of second assembly slots, which are distributed radially. Each second assembly slot is provided with a second adsorption component, and the second adsorption component is adjustable within the second assembly slot. The third mounting component is provided with a plurality of third assembly slots, which are distributed radially. Each third assembly slot is provided with a third adsorption component, and the third adsorption component is adjustable within the third assembly slot.

10. A laser ablation device, characterized in that, The device includes a first support platform, a second support platform, a third support platform, a first laser mechanism, a second laser mechanism, a third laser mechanism, and a conveying mechanism as described in any one of claims 1 to 9. The first support platform, the second support platform, and the third support platform are all disposed on the path along which the first adsorption component and the second adsorption component move in the horizontal direction. The first laser mechanism is disposed corresponding to the first support platform. The first support platform is used to support a workpiece placed in the horizontal direction. The second laser mechanism is disposed corresponding to the second support platform. The second support platform is used to support and fix a workpiece placed in the vertical direction. The third laser mechanism is disposed corresponding to the third support platform. The third support platform is used to support and fix a workpiece placed in the vertical direction.