Target holder transfer device, target supply apparatus, and deposition apparatus

Abstract

The utility model discloses a target material frame transfer device, target material supply equipment and deposition equipment, target material frame transfer device includes support block, and the movable shaft is set up in the vertical direction movement and autorotation of relative to it on support block, and the movable shaft is connected target material frame tray, and target material frame tray has the perforation of the boss of the bottom of target material frame and inserts in the side part of movable shaft, and the lower extreme of movable shaft leans on the lifting drive mechanism, and the lifting drive mechanism drives movable shaft and switches between the first height and the second height. The utility model discloses a target material frame transfer device can be through target material frame tray and rotate around movable shaft to move target material from equipment to equipment side portion or outside, so this greatly facilitates the replacement of target material frame or the addition of target material. Meanwhile, through the lifting drive mechanism drive movable shaft elevating, make target material frame tray can elevate and rotate mechanism separate or connect, thereby effectively satisfy the need of lifting and rotating mechanism separation when target material frame tray translation.

Description

Technical Field

[0001] This utility model relates to the field of deposition equipment, and in particular to a target material holder transfer device, a target material feeding device, and a deposition equipment. Background Technology

[0002] Target material supply is a crucial process in the deposition process.

[0003] To improve the sputtering target feeding capacity, some sputtering target feeding equipment will adopt the following... Figure 1 The structure shown is used for target feeding. In this structure, a target frame A is set up to store multiple targets B. The target frame A is driven to rotate by a rotating mechanism C, so that the targets B on the target frame A rotate one by one to the feeding position and face the feed cylinder D. Then, the target B is pushed out of the feed cylinder D by the lifting device E to realize the feeding.

[0004] In this structure, the target holder is usually located inside the feeding equipment, which makes it inconvenient to manually replace the target holder or add targets, leaving room for improvement. Utility Model Content

[0005] The purpose of this invention is to solve the above-mentioned problems in the prior art and to provide a target material transfer device, a target material feeding device, and a deposition device.

[0006] The objective of this utility model is achieved through the following technical solution: A target material rack transfer device includes a support block on which a movable shaft is provided, movable and rotatable relative to the support block in a vertical direction. The movable shaft is connected to a target material rack tray, which has a through hole located on the side of the movable shaft for a boss at the bottom of the target material rack to be inserted. The lower end of the movable shaft abuts against a lifting drive mechanism, which drives the movable shaft to switch between a first height and a second height.

[0007] Preferably, the movable shaft passes through two support blocks of different heights, and a first positioning plate is provided on the target material frame tray. A reinforcing plate is provided on the first positioning plate. Both the first positioning plate and the reinforcing plate are connected to the movable shaft, and the target material frame tray and the reinforcing plate are located between the two support blocks.

[0008] Preferably, the first positioning plate cooperates with the first positioning pin to keep the target material frame tray in a first horizontal position.

[0009] Preferably, the target holder tray is provided with a positioning structure located next to the perforation.

[0010] Preferably, the target holder tray is provided with a push-pull handle located between the perforation and the movable shaft, and the distance between the push-pull handle and the line connecting the perforation and the movable shaft is greater than the diameter of the perforation.

[0011] Preferably, the lifting drive mechanism includes a cam abutting against the lower end of the movable shaft, the cam being connected to a drive shaft rotatably mounted on the mounting block, the drive shaft extending horizontally and connected to a drive handle for manually driving its rotation; the drive handle is perpendicular to the drive shaft. When the drive handle extends vertically and is above the drive shaft, the movable shaft is at a first height. When the drive handle extends vertically and is below the drive shaft, the movable shaft is at a second height, which is higher than the first height.

[0012] Preferably, the drive handle is provided with a lock hole; When the drive handle extends vertically and is above the drive shaft, the lock hole cooperates with the first lock assembly to lock the drive handle; When the drive handle extends vertically and is below the drive shaft, the lock hole cooperates with the second lock assembly to lock the drive handle.

[0013] Preferably, the keyhole is provided with an unlocking component for disengaging the bolts of the first and second locking components from the keyhole.

[0014] The target feeding equipment includes the target frame transfer device as described in any of the above.

[0015] Deposition equipment, including the target feeding equipment described above.

[0016] The advantages of this utility model's technical solution are mainly reflected in: This utility model's target material rack transfer device features a movable shaft that can be raised and lowered, with a target material rack tray mounted on the shaft. The target material rack tray can be moved from inside the equipment to the side or outside by rotating around the movable shaft, greatly facilitating the replacement of the target material rack or the addition of targets. Simultaneously, a lifting drive mechanism drives the movable shaft to rise and fall, allowing the target material rack tray to be raised, lowered, separated from, or connected to the rotating mechanism, effectively meeting the need for lifting and separation from the rotating mechanism when the target material rack tray is moved horizontally.

[0017] The lifting drive mechanism of this utility model adopts a cam mechanism, which is simple in structure, easy to operate, and has accurate positioning. Furthermore, the drive handle extends vertically to correspond to the highest and lowest positions of the movable shaft, allowing the operator to perform more precise control. Simultaneously, the locking hole, in cooperation with the component, effectively locks the drive handle in position after the movable shaft reaches its designated position, reducing the risk of accidental triggering. Additionally, the unlocking component on the drive handle allows for convenient unlocking without additional tools, improving operational convenience. Attached Figure Description

[0018] Figure 1 This is a cross-sectional view of the target feeding device of this utility model; Figure 2 This is a first-view perspective perspective view of the target material frame transfer device of this utility model; Figure 3 This is a second-view perspective perspective view of the target material frame transfer device of this utility model; Figure 4 This is a perspective view of the target material feeding equipment and integrated target material frame transfer device of this utility model; Figure 5 This is a cross-sectional view of the elastic set screw of this utility model. Detailed Implementation

[0019] The purpose, advantages, and features of this utility model will be illustrated and explained through the following non-limiting description of preferred embodiments. These embodiments are merely typical examples of applying the technical solutions of this utility model, and all technical solutions formed by equivalent substitutions or equivalent transformations fall within the scope of protection claimed by this utility model.

[0020] In the description of the solution, it should be noted that the terms "center," "upper," "lower," "left," "right," "front," "rear," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience and simplification of description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0021] Example 1 The target material holder transfer device disclosed in this utility model is described below with reference to the accompanying drawings. Figure 2 Appendix Figure 3 As shown, it includes a support block 100, on which a movable shaft 200 is provided that can move and rotate relative to it in the vertical direction. The movable shaft 200 is connected to a target material frame tray 300. The target material frame tray 300 has a through hole 310 located on the side of the movable shaft 200 for a boss at the bottom of the target material frame to be inserted. The lower end of the movable shaft 200 abuts against a lifting drive mechanism 400, which drives the movable shaft 200 to switch between a first height and a second height.

[0022] As attached Figure 2 Appendix Figure 3As shown, the movable shaft 200 passes through two support blocks 100 of varying heights, and the two support blocks 100 can be mounted on a support column F of the target feeding device. The portion of the movable shaft 200 located between the two support blocks 100 is connected to the target frame tray 300.

[0023] The target holder tray 300 is generally cross-shaped, comprising a main body portion 320 and a shaft connection portion 330 distributed opposite to each other. The main body portion 320 has a through hole 310. To facilitate the positioning and limiting of the target holder on the target holder tray 300, a positioning structure is provided on the main body portion 320 next to the through hole 310. This positioning structure can be a positioning groove or a positioning hole 321, or a positioning pin, specifically adapted to the positioning structure at the bottom of the target holder.

[0024] The shaft connection portion 330 is provided with a connecting hole for the movable shaft 200 to pass through. The shaft connection portion 330 and the movable shaft 200 can be welded and / or screwed together, or they can be connected by an interference fit. The shaft connection portion 330 is also provided with a first positioning plate 340. There are two first positioning plates 340, which are distributed in a V-shape or figure-eight shape and are both connected to the side of the movable shaft 200. Furthermore, one of the first positioning plates 340 cooperates with a first positioning pin 500 to limit the target material frame tray 300 to be held in a first horizontal position. The first positioning pin 500 is provided on the lower support block 100. The first positioning pin 500 extends horizontally and is perpendicular to the drive shaft 430 of the lifting drive mechanism 400. When in the first horizontal position, the target material frame tray 300 is located in the target material feeding device and is coaxial with the turntable of the rotating mechanism.

[0025] A reinforcing plate 350 is provided on each of the two first positioning plates 340. Both the first positioning plates 340 and the reinforcing plate 350 are connected to the side wall of the movable shaft 200. The target material frame tray 300 and the reinforcing plate 350 are located between the two support blocks 100.

[0026] Push-pull handles 370 are respectively provided on the other two opposite mounting parts 360 of the target material frame tray 300. The push-pull handles 370 are located between the through hole 310 and the movable shaft 200. At the same time, the line connecting the axes of the two push-pull handles 370 is perpendicular to the connection between the axes of the through hole 310 and the movable shaft 200, and the distance between the push-pull handles 370 and the line connecting the through hole 310 and the movable shaft 200 is greater than the diameter of the through hole 310.

[0027] The lifting drive mechanism 400 includes a cam 410 abutting against the lower end of the movable shaft 200. The cam 410 is preferably an eccentric wheel, but it can also be other known cam shapes, which are not limited here. The cam 410 is connected to a drive shaft 430 that is rotatably mounted on a mounting block 420. The mounting block 420 can be mounted on the support column F where the support block 100 is located. The drive shaft 430 extends horizontally and is connected to a drive handle 440 for manually driving its rotation. The drive handle 440 drives the drive shaft 430 to rotate, thereby causing the cam 410 to rotate around the drive shaft, which in turn causes the movable shaft to move up and down as the height of the side of the cam 410 changes. Furthermore, the drive handle 440 is perpendicular to the drive shaft 430; When the drive handle 440 extends vertically and is above the drive shaft 430, the movable shaft 200 is at a first height. At this time, the target frame on the target frame tray 300 rests on the rotating mechanism, and the target frame tray 300 is not connected to the rotating mechanism. When the drive handle 440 extends vertically and is below the drive shaft 430, the movable shaft 200 is at a second height, which is higher than the first height. At this time, the target holder on the target holder tray 300 is separated from the rotating mechanism.

[0028] Furthermore, since the movable shaft 200 will continuously apply downward pressure to the cam 410, when the drive handle 440 is rotated to the position, in order to prevent the cam 410 from being driven to rotate under downward pressure, the drive handle 440 is provided with a locking hole 441, which is parallel to the drive shaft 430. When the drive handle 440 extends vertically and is above the drive shaft 430, the lock hole 441 cooperates with the first lock assembly 600 to lock the drive handle 440. The first lock assembly 600 can be set on the support column F where the support block 100 is located. At the same time, the first lock assembly 600 can be a spring lock. The locking tongue 610 of the spring lock retracts during the downward rotation of the drive handle 440, and when the lock hole 441 of the drive handle 440 is opposite to the locking tongue 610, it extends out and inserts into the lock hole 441 under the reaction force of the elastic element (not shown in the figure). The specific structure of the first lock assembly 600 is known technology and will not be described in detail here.

[0029] When the drive handle 440 extends vertically and is located below the drive shaft 430, the locking hole 441 cooperates with the second locking assembly 700 to lock the drive handle 440. The second locking assembly 700 is also located on the support column F and near the lower part of the support column F. Its specific structure and working principle are the same as those of the second locking assembly 700, and will not be described in detail here.

[0030] When unlocking, a pin can be inserted into the keyhole 441 and push the bolts 610 of the first lock assembly 600 and the second lock assembly 700 out of the keyhole 441 to achieve unlocking.

[0031] Furthermore, to facilitate unlocking, an unlocking component 800 is provided at the lock hole 441 for disengaging the bolts of the first and second locking components 700 from the lock hole 441. The unlocking component 800 is, for example, an elastic set screw, which is threaded or interference-fitted to the lock hole. By pressing the outer end of the telescopic pin 810 of the elastic set screw, the bolt can be pushed out of the lock hole 441, thereby unlocking the drive handle. When the drive arm is rotated, the telescopic pin is released, and the telescopic pin can be reset under the force of the internal spring 820.

[0032] Example 2 This embodiment discloses a target feeding device, as shown in the attached figure. Figure 4 As shown, it includes the target holder transfer device as described above.

[0033] Example 3 This embodiment discloses a deposition apparatus, including the target feeding device described above.

[0034] This utility model has many other embodiments. All technical solutions formed by equivalent transformation or equivalent transformation fall within the protection scope of this utility model.

Claims

1. A target material holder transfer device, characterized in that: The device includes a support block on which a movable shaft is provided, which is movable and rotatable relative to the support block in a vertical direction. The movable shaft is connected to a target material frame tray, which has a through hole located on the side of the movable shaft for a boss at the bottom of the target material frame to be inserted. The lower end of the movable shaft abuts against a lifting drive mechanism, which drives the movable shaft to switch between a first height and a second height.

2. The target holder transfer device according to claim 1, characterized in that: The movable shaft passes through two support blocks of different heights. A first positioning plate is provided on the target material frame tray, and a reinforcing plate is provided on the first positioning plate. Both the first positioning plate and the reinforcing plate are connected to the movable shaft. The target material frame tray and the reinforcing plate are located between the two support blocks.

3. The target holder transfer device according to claim 2, characterized in that: The first positioning plate cooperates with the first positioning pin to keep the target material frame tray in a first horizontal position.

4. The target holder transfer device according to claim 1, characterized in that: The target holder tray is provided with a positioning structure located next to the perforation.

5. The target holder transfer device according to claim 1, characterized in that: The target holder tray is provided with a push-pull handle located between the perforation and the movable shaft. The distance between the push-pull handle and the line connecting the perforation and the movable shaft is greater than the diameter of the perforation.

6. The target holder transfer device according to any one of claims 1-5, characterized in that: The lifting drive mechanism includes a cam that abuts against the lower end of the movable shaft. The cam is connected to a drive shaft that is rotatably mounted on a mounting block. The drive shaft extends horizontally and is connected to a drive handle for manually driving its rotation. The drive handle is perpendicular to the drive shaft. When the drive handle extends vertically and is above the drive shaft, the movable shaft is at a first height. When the drive handle extends vertically and is below the drive shaft, the movable shaft is at a second height, which is higher than the first height.

7. The target holder transfer device according to claim 6, characterized in that: The drive handle is provided with a lock hole; When the drive handle extends vertically and is above the drive shaft, the lock hole cooperates with the first lock assembly to lock the drive handle; When the drive handle extends vertically and is below the drive shaft, the lock hole cooperates with the second lock assembly to lock the drive handle.

8. The target holder transfer device according to claim 7, characterized in that: The keyhole is provided with an unlocking component for retracting the bolts of the first and second locking components from the keyhole.

9. A target feeding device, characterized in that: Includes the target holder transfer device as described in any one of claims 1-8.

10. A deposition apparatus, characterized in that: Includes the target feeding device as described in claim 9.

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