Alkali metal source evaporation device and alkali metal source holder

Abstract

The alkali metal source evaporation device provided by the present disclosure comprises an alkali metal source, a cavity with a substrate installed, and a broken line type bracket with one end provided with the alkali metal source and the other end fixed to the cavity, wherein the broken line type bracket comprises a first framework supporting the alkali metal source and a second framework connected between the first framework and the cavity. The broken line type bracket is fixed to the cavity via a flange, and the flange is connected with a power supply device for supplying power to the alkali metal source. The alkali metal source evaporation device provided by the present disclosure can make the included angle of the alkali metal source relative to the normal of the substrate surface within a predetermined angle range, adjust the distance between the alkali metal source and the substrate, reduce the requirement for the position of the installation flange, optimize the spacing between the alkali metal source and the substrate to meet the evaporation conditions, and improve the uniformity of the evaporated film.

Description

Technical Field

[0001] This disclosure relates to the field of vacuum evaporation, and mainly to an alkali metal source evaporation device and an alkali metal source support. Background Technology

[0002] In ultra-high vacuum fabrication of thin film materials containing alkali metals (such as Cs, K, Na, etc.), alkali metal source evaporation devices are often required. The alkali metal source is electrically heated to cause a reaction of its internal components, releasing the alkali metal through an evaporation window onto a substrate fixed in a cavity, thereby forming a vapor-deposited thin film on the substrate. Because ultra-high vacuum is required during evaporation, the alkali metal source is connected to the cavity via a flange to ensure the cavity's airtightness. Furthermore, to ensure uniform film formation, the alkali metal source is typically positioned directly in front of the substrate or within a small angle range; for example, the angle between the alkali metal source and the substrate surface normal is within 30°.

[0003] Figure 7 This is a schematic diagram of an existing alkali metal source evaporation apparatus. Multiple alkali metal strips, arranged side-by-side as alkali metal sources, are connected to a cavity via a linear support and mounting flange. The relative position between the alkali metal strips and a substrate located at the center of the cavity can be adjusted using a linear actuator or similar device connected to the mounting flange. For example, one alkali metal strip can be positioned directly in front of the substrate, allowing for uniform evaporation and coating by applying current to the alkali metal strip.

[0004] However, in the structure of this linear evaporation source, the pipe for mounting the flange on the cavity needs to be parallel to the substrate surface. In order to ensure that the distance between the alkali metal strip and the substrate meets the evaporation conditions, the mounting flange must be located in front of the substrate. Therefore, the customization requirements for the cavity are very high, and it cannot be widely used in any cavity.

[0005] Figure 8 This is a schematic diagram of another existing alkali metal source evaporation apparatus. The chamber contains multiple evaporation sources, such as evaporation source 1 and evaporation source 2. Evaporation source 1 is located directly in front of the substrate, and evaporation source 2 forms an angle θ with the normal to the substrate surface. When this angle θ is less than 30°, the occurrence of uneven deposition can be greatly reduced, thus adapting to most deposition chambers. However, when the chamber size is small, such as a diameter less than 20 cm, steric hindrance can easily cause the angle θ to be too large (e.g., >45°), resulting in uneven deposition of the thin film. In this case, to adapt the structure of the linear evaporation source to the substrate for uniform deposition, the substrate is generally required to be sufficiently small, or the sample stage where the substrate is placed must be modified into an angle-adjustable multi-dimensional sample stage, which will significantly increase the cost of the apparatus. Utility Model Content

[0006] The purpose of this disclosure is to overcome the above and / or other problems in the prior art, and to provide an alkali metal source evaporation device. By setting a zigzag support between the alkali metal source and the flange, the angle between the alkali metal source and the normal of the substrate surface on the evaporation device can be reduced, the distance between the alkali metal source and the substrate can be optimized, the space utilization of the cavity can be improved, and the problems of low evaporation efficiency and unevenness caused by improper installation angle in traditional evaporation devices can be improved. In addition, it can be adapted to cavities with different window settings.

[0007] To achieve the above objectives, this disclosure provides an alkali metal source evaporation apparatus, comprising: an alkali metal source; a cavity on which a substrate is mounted; and a zigzag-shaped support with the alkali metal source at one end and the other end fixed to the cavity, the zigzag-shaped support comprising: a first frame supporting the alkali metal source; and a second frame connected between the first frame and the cavity.

[0008] In some embodiments, the second frame of the alkali metal source evaporation device has multiple segments.

[0009] In some embodiments, in the alkali metal source evaporation apparatus, each segment of the first frame and the second frame is straight.

[0010] In some embodiments, in the alkali metal source evaporation apparatus, the zigzag bracket is fixed to the cavity via a flange, and the flange is connected to a power supply device for supplying power to the alkali metal source.

[0011] In some embodiments, in the alkali metal source evaporation apparatus, adjacent frames in the zigzag support are fixed together by connectors or integrally formed.

[0012] In some embodiments, in the alkali metal source evaporation apparatus, the included angle between adjacent frames is set such that the alkali metal source faces the surface of the substrate or the included angle between the alkali metal source and the surface normal of the substrate is within a predetermined range.

[0013] In some embodiments, in the alkali metal source evaporation apparatus, the included angle between adjacent frames is set such that the distance between the alkali metal source and the substrate is within a predetermined range.

[0014] In some embodiments, the included angle between adjacent frames in the alkali metal source evaporation apparatus is 120° or more.

[0015] In some embodiments, the alkali metal source evaporation apparatus further includes a second alkali metal source disposed opposite the substrate, and the included angle between adjacent frames is set such that the alkali metal source is disposed close to the second alkali metal source.

[0016] In some embodiments, the alkali metal source evaporation apparatus includes a plurality of alkali metal strips arranged side by side.

[0017] In some embodiments, the alkali metal source evaporation apparatus further includes a linear actuator connected to the flange, which moves the alkali metal source when the angle between the flange and the normal to the substrate surface is 90°.

[0018] This disclosure also provides an alkali metal source support for mounting an alkali metal source to an alkali metal source evaporation device, comprising: a first frame supporting the alkali metal source; and a second frame connected between the first frame and the cavity of the alkali metal source evaporation device, wherein the first frame and the second frame form a zigzag support.

[0019] According to the alkali metal source evaporation apparatus disclosed herein, by setting a zigzag-shaped support between the alkali metal source and the flange, the angle between the alkali metal source and the normal to the substrate surface can be kept within a predetermined angle range, thereby adjusting the distance between the alkali metal source and the substrate, reducing the requirements for the position of the mounting flange, optimizing the spacing between the alkali metal source and the substrate to meet the evaporation conditions, and improving the uniformity of the evaporated film. Attached Figure Description

[0020] The accompanying drawings are provided to further illustrate the present disclosure and form part of the specification. They are used together with the embodiments of the present disclosure to explain the disclosure and do not constitute a limitation thereof. In the drawings: Figure 1 This is a schematic diagram of the structure of an alkali metal source evaporation device according to Embodiment 1 of this disclosure; Figure 2 This is a schematic diagram of another alkali metal source evaporation device according to Embodiment 1 of this disclosure; Figure 3 This is the embodiment 1 involved in this disclosure. Figure 2 A partial structural schematic diagram of a medium-alkali metal source evaporation device; Figure 4 This is a schematic diagram of the structure of an alkali metal source evaporation device according to Embodiment 2 of this disclosure; Figure 5 This is a schematic diagram of another alkali metal source evaporation device according to Embodiment 2 of this disclosure; Figure 6 This is a schematic diagram of the structure of an alkali metal source evaporation device according to Embodiment 3 of this disclosure; Figure 7 This is a schematic diagram of an existing alkali metal source evaporation device; Figure 8 This is a schematic diagram of another existing alkali metal source evaporation device. Detailed Implementation

[0021] The following describes specific embodiments of this disclosure. It should be noted that, in order to provide a concise description, this specification cannot exhaustively describe all features of the actual embodiments. It should be understood that, in the actual implementation of any embodiment, just as in any engineering or design project, various specific decisions are often made to achieve the developer's specific goals and to meet system-related or business-related constraints, and this can change from one embodiment to another. Furthermore, it is understood that although the efforts made in this development process may be complex and lengthy, for those skilled in the art related to the content disclosed in this disclosure, changes in design, manufacturing, or production based on the technical content disclosed in this disclosure are merely conventional technical means and should not be construed as insufficient content of this disclosure.

[0022] Unless otherwise defined, the technical or scientific terms used in the claims and description shall have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. The terms “first,” “second,” and similar words used in this patent disclosure and the claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. The terms “an” or “a” and similar words do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms “comprising” or “including” and similar words mean that the element or object preceding “comprising” or “including” encompasses the element or object listed following “comprising” or “including” and its equivalents, and do not exclude other elements or objects. The terms “connected,” “coupled,” or “linked” and similar words are not limited to physical or mechanical connections, nor are they limited to direct or indirect connections.

[0023] Unless otherwise specified, all embodiments and preferred embodiments mentioned herein can be combined to form new technical solutions. Similarly, unless otherwise specified, all technical features and preferred features mentioned herein can be combined to form new technical solutions.

[0024] In the description of the embodiments of this disclosure, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.

[0025] The following describes in detail, with reference to the accompanying drawings, an alkali metal source evaporation apparatus provided according to embodiments of the present disclosure.

[0026] [Example 1]

[0027] The alkali metal source evaporation apparatus disclosed herein is installed in a cavity with a fixed substrate via a flange connection to evaporate the alkali metal onto the substrate to form a vapor-deposited thin film. Figure 1 This is a schematic diagram of the structure of the alkali metal source evaporation apparatus 100 according to Embodiment 1 of this disclosure. The alkali metal source evaporation apparatus 100 includes an alkali metal source 10, a cavity 20 on which a substrate is mounted, and a zigzag-shaped support 30 for mounting the alkali metal source 10 into the cavity 20.

[0028] The alkali metal source 10 can be an alkali metal such as Cs, K, or Na, depending on the specific requirements. The alkali metal source 10 can be in the form of strips, with multiple strips arranged side-by-side at one end of the zigzag support 30. Figure 1 (Left end of the middle).

[0029] The cavity 20 is a space for evaporating alkali metals, and its shape is, for example, spherical, with a substrate fixed in the center. The cavity 20 has a window and a conduit connecting to the window, and a cavity flange 21 is provided at the window. In this embodiment, the diameter of the cavity 20 is approximately 25 cm, and the size of the substrate is approximately 1 inch.

[0030] Regarding the zigzag bracket 30... Figure 1 The diagram shows a three-segment structure of a zigzag-shaped support 30. This zigzag-shaped support 30 includes a first frame 301 supporting an alkali metal source 10, and two second frames 302 and 303 connecting the first frame 301 to a flange 41. The first frame 301, second frames 302, and 303 are straight frames. To ensure uniform film formation, the first frame 301 is positioned directly opposite the substrate located in the center of the cavity 20, such that the alkali metal source 10 mounted on the first frame 301 is directly in front of the substrate, and the distance between the alkali metal source 10 and the substrate meets the film formation requirements. The second frame 302 connects the first frame 301 and the second frame 303, and one end of the second frame 303 (…) Figure 1 The right end of the cavity 10 is connected to flange 41, which is connected to cavity flange 21, thereby installing alkali metal source 10 into cavity 20.

[0031] Flange 41 is a disc-shaped connecting component with good sealing performance, ensuring that the cavity is in an ultra-high vacuum environment during sealing. In this embodiment 1, the pipe with flange 41 installed has an inner diameter of 38 mm and a length of approximately 25 mm, and flange 41 is a CF35 flange.

[0032] Figure 1In this configuration, the substrate is located at the center of the cavity 20, and the flange 41 and the pipe face towards the center of the cavity 20. Therefore, the angle between the flange 41 and the normal to the substrate surface (hereinafter referred to as the flange angle) is set as α. The extension line of the first skeleton 301 ( Figure 1 The angle between the horizontal direction (in the middle) and the pipe direction of the mounting flange 41 is set as β. Figure 1 In the first skeleton 301, the first skeleton is located directly in front of the substrate and parallel to the substrate surface, with α being approximately 60° and β being approximately 30°.

[0033] The angle between the first skeleton 301 and the second skeleton 302 is set as γ, and the angle between the second skeleton 302 and the second skeleton 303 is set as γ'. Figure 1 In this context, γ is approximately 160° and γ' is approximately 130°. By setting the angles as described above, the alkali metal source 10 is positioned directly opposite the substrate, with a distance of approximately 80 mm between them.

[0034] The lengths of each segment of the zigzag support 30, 301-303, and the aforementioned included angles γ and γ' are determined collaboratively based on factors such as the dimensions of the cavity 20, the distance from the alkali metal source 10 to the substrate surface, the angle between the center of the alkali metal source 10 and the normal to the substrate surface, the flange angle (α), the flange dimensions, and the pipe length. This ensures that the alkali metal source 10 can smoothly pass through the pipe of the cavity 20 into the cavity and be fixed to the cavity flange 21 via the flange 41, ensuring that the angle between the alkali metal source 10 and the normal to the substrate surface is as small as possible. Figure 1 (The case where the source is directly in front of the substrate) and maintains a certain distance from the substrate. Typically, the distance between the substrate and the alkali metal source 10 is about 60 mm to 120 mm. The alkali metal source should be as close as possible to the front of the substrate, as this results in lower alkali metal loss and a more uniform coating during evaporation. Therefore, it is preferable that the included angles γ and γ' are 120° or greater.

[0035] exist Figure 1 In the illustrated case, regardless of the angle α between the flange 41 and the normal to the substrate surface, the angles between adjacent frames can be adjusted to ensure that the alkali metal source 10 is directly facing the substrate or that the angle between the alkali metal source 10 and the normal to the substrate surface is within a predetermined angle range that satisfies the film formation conditions, such as within 30°. Simultaneously, the distance between the alkali metal source 10 and the substrate is also within a predetermined range, such as 60 mm to 120 mm. Therefore, the evaporation coating of the alkali metal source can be made more uniform.

[0036] In addition, the frame segments 301~303 of the zigzag bracket 30 can be made of high-temperature resistant, low-gas-storage, and high-hardness metal materials such as 304 stainless steel, 316 stainless steel, molybdenum, tantalum, and copper.

[0037] Although Figure 1The diagram shows a three-segment structure for the zigzag bracket 30, but it is not limited to this; the zigzag bracket 30 can also be configured with four or more segments. Figure 2 This is a schematic diagram of the alkali metal source evaporation apparatus 200 according to Embodiment 1 of this disclosure. The alkali metal source evaporation apparatus 200 also includes an alkali metal source 10, a cavity 20 on which a substrate is mounted, and a zigzag-shaped support 31 that mounts the alkali metal source 10 into the cavity 20. The main difference from the alkali metal source evaporation apparatus 100 described above is that the zigzag-shaped support 31 includes a first frame 311 supporting the alkali metal source 10, and three second frames 312, 313, and 314 connecting the first frame 311 to a flange 41. The first frame 311 and the second frames 312-314 are straight frames. One end of the second frame 312 is connected to the first frame 311, and the other end is connected to the second frame 313. The other end of the second frame 313 is connected to the second frame 314, and the other end of the second frame 314 is connected to the flange 41. The angle between the first frame 311 and the second frame 312 is γ, the angle between the second frame 312 and the second frame 313 is γ', and the angle between the second frame 313 and the second frame 314 is γ''. Figure 2 In the above settings, γ is approximately 150°, γ' is approximately 160°, and γ'' is approximately 140°. By setting these angles as described above, the alkali metal source 10 is positioned directly opposite the substrate, with a distance of approximately 80 mm between them, to ensure uniform film formation.

[0038] The following will combine Figure 3 The structure of the alkali metal source evaporation device 200 is described in detail. Figure 3 It shows Figure 2 A partial structure of the medium-alkali metal source evaporator 200. (Compared to...) Figure 2 Similarly, Figure 3 The diagram shows an alkali metal source 10, a first skeleton 311, second skeletons 312-314, and a flange 41.

[0039] The alkali metal source 10 is mounted on the first frame 311 via a first terminal 71 and a second terminal 72. The first terminal 71 is fixed to one end of the first frame 311, and the position of the second terminal 72 can be adjusted according to the length of the alkali metal source 10. The first terminal 71 is electrically connected to the first frame 311, and the second terminal 72 is electrically insulated from the first frame 311.

[0040] The adjacent frames of the first frame 311 and the second frames 312-314 are fixed together by screws 90 and are electrically connected to each other. However, this is not the only option; the adjacent frames can also be integrally formed. For example, the included angle between the adjacent frames can be designed according to the size of the cavity, the size of the flange, the length of the flange pipe, etc., and they can be integrally formed.

[0041] A connector 50, a first terminal 61, and a second terminal 62 are provided on the flange 41. The connector 50 electrically connects the second frame 314 to one end of the first terminal 61, and the other end of the first terminal 61 is electrically connected to one of the positive and negative terminals of a power supply device (not shown), for example, the positive terminal.

[0042] One end of the second terminal 62 is electrically connected to the alkali metal source 10 via a flexible wire 80 and a second terminal 72, and the other end is connected to the other of the positive and negative terminals of a power supply device (not shown), for example, the negative terminal. Thus, alkali metal vapor can be obtained by energizing the alkali metal source 10 through the power supply device (not shown) to generate thermal evaporation.

[0043] Figure 3 Although the illustration shows an alkali metal source 10 consisting of a single alkali metal strip, it is not limited to this; the alkali metal source 10 may also include multiple alkali metal strips arranged side by side. In this case, the number of first terminals 61 and second terminals 62 is adjusted according to the number of alkali metal strips. A common electrode can also be used to reduce the number of terminals.

[0044] The alkali metal source evaporation devices 100 and 200 involved in this embodiment can, for different flange angles α, ensure that the alkali metal source 10 is directly facing the substrate by setting up the zigzag brackets 30 and 31, and adjust the distance between the alkali metal source and the substrate. This can improve the evaporation efficiency of the alkali metal source, improve the uniformity of the vapor-deposited film, and is adaptable to various cavities. It also eliminates the need to design a multi-dimensional sample stage, thus suppressing the increase in device cost.

[0045] Furthermore, although this embodiment 1 uses the case where the pipe with the flange installed is radially along the cavity, it can also be applied to other cases. Figure 7 Such a pipe is not along the radial direction of the cavity.

[0046] Furthermore, the number of second frames in a zigzag-shaped scaffold is not limited to... Figures 1-3 The 2-3 segments shown can be used, or more segments can be set, or only 1 segment can be set. In this case, the relative position of the alkali metal source and the substrate can be adjusted by adjusting the included angle between the first and second frames. Compared with a linear support, this can also improve the evaporation efficiency of the alkali metal source and improve the uniformity of the vapor-deposited film.

[0047] Furthermore, the relative positional relationship between the alkali metal source and the substrate is not limited to the case where they are directly opposite each other. As long as the evaporation can be uniform, the angle between the alkali metal source and the normal to the substrate surface can also be within a certain range, such as 0 to 25°.

[0048] [Example 2]

[0049] The above describes the situation where a single alkali metal source can be positioned directly opposite the substrate using a zigzag bracket at different flange angles. In this embodiment, the situation where multiple alkali metal sources are installed in one cavity will be described.

[0050] Figure 4 The structure of the alkali metal source evaporation apparatus 300 according to Embodiment 2 of this disclosure is shown. The alkali metal source evaporation apparatus 300 includes two alkali metal sources 10 and 11, a cavity 22 on which a substrate is mounted, a zigzag-shaped support 32 that connects the alkali metal source 10 to a flange 42 and is mounted in the cavity 22, and a straight support 33 that connects the alkali metal source 11 to a flange 43 and is mounted in the cavity 22.

[0051] Since the alkali metal source 11 is mounted directly opposite the substrate, it can be placed at the end of the linear support 33. Figure 4 As shown, the pipe with flange 42 is mounted radially along cavity 22, and the angle between it and the normal to the substrate surface, i.e., the flange angle of flange 42, is θ.

[0052] As described in Embodiment 1 above, an alkali metal source can be positioned directly opposite the substrate by using a zigzag-shaped support. However, in this Embodiment 2, the presence of alkali metal source 11 becomes a spatial steric hindrance for another alkali metal source 10.

[0053] If the alkali metal source 10 is set up using a linear support as before, then as Figure 8 As shown, alkali metal source 10 ( Figure 8 The angle (flange angle θ) between the evaporation source 2 and the normal to the substrate surface can cause unevenness in the vapor-deposited film. In this embodiment, the angle between the alkali metal source 10 and the normal to the substrate surface can be reduced by using the zigzag support 32.

[0054] like Figure 4 As shown, the polygonal support 32 includes a first frame 321 supporting the alkali metal source 10, and two second frames 322 and 323 connecting the first frame 321 to the flange 42. The first frame 321 and the second frames 322 and 323 are straight frames. By adjusting the included angles γ and γ' between adjacent frames, the angle between the alkali metal source 10 and the normal to the substrate surface can be adjusted relative to... Figure 8 The case is reduced to θ-δ.

[0055] As a result, the angle between the alkali metal source 10 and the normal to the substrate surface is reduced, and a more uniform thin film can be deposited on the substrate when using alkali metal sources 10 and 11 for evaporation coating.

[0056] Although Figure 4The diagram shows a three-segment structure for the zigzag bracket 32, but it is not limited to this. The zigzag bracket 32 ​​can also have four or more segments, or it can be set to only two segments. Figure 5 This is a schematic diagram of the structure of the alkali metal source evaporation apparatus 400 according to Embodiment 2 of this disclosure. The alkali metal source evaporation apparatus 400 and... Figure 4 The main difference in the alkali metal source evaporation apparatus 300 shown is that the zigzag support 34 includes a first frame 341 supporting the alkali metal source 10 and a second frame 342 connecting the first frame 341 to the flange 42. The first frame 341 and the second frame 342 are straight frames. By adjusting the angle γ between the first frame 341 and the second frame 342, the angle δ between the alkali metal source 10 and the normal to the substrate surface can be reduced, resulting in uniform evaporation of the alkali metal source 10 onto the substrate.

[0057] Therefore, when multiple alkali metal sources are installed in one cavity, although there is spatial steric hindrance, by setting a zigzag support between the alkali metal source and the flange, the angle between the alkali metal source and the normal of the substrate surface can be reduced compared with a straight support, thereby improving the evaporation efficiency of the alkali metal source and improving the uniformity of the vapor-deposited film.

[0058] Furthermore, although in this embodiment the alkali metal source 11 facing the substrate is mounted in the cavity 22 via a linear support 33, a zigzag support can also be used instead of the linear support 33. In this case, both alkali metal sources 10 and 11 are mounted via zigzag supports. Therefore, by adjusting the included angle between adjacent frames of each zigzag support, the arrangement of each alkali metal source relative to the substrate can achieve more uniform evaporation and film formation.

[0059] Additionally, while the above embodiments show the case where the pipe with flange 42 is mounted radially along the cavity, this does not apply to cases where the pipe is not radially along the cavity (e.g., Figure 7 As shown in the figure, by adjusting the angle between adjacent skeletons, the angle between the alkali metal source and the substrate or the normal direction of the substrate surface can be within a predetermined range, thereby achieving uniform evaporation and film formation of the alkali metal source.

[0060] [Example 3]

[0061] When the angle between the flange and the normal to the substrate surface is 90°, the alkali metal source evaporation device can be used in conjunction with a linear actuator. Figure 6 This is a schematic diagram of the structure of the alkali metal source evaporation device 500 involved in Embodiment 3 of this disclosure.

[0062] The alkali metal source evaporation apparatus 500 includes an alkali metal source 10, a cavity 23 on which a substrate is mounted, a zigzag-shaped support 35 that connects the alkali metal source 10 to a flange 44 and is mounted inside the cavity 23, and a linear actuator 51 disposed outside the cavity 23 and connected to the flange 44. The zigzag-shaped support 35 includes a first frame 351 supporting the alkali metal source 10, and two second frames 352 and 353 connecting the first frame 351 to the flange 44. The first frame 351 and the second frames 352 and 353 are straight frames.

[0063] The alkali metal source 10 comprises multiple alkali metal strips arranged in parallel on the surface of the first framework 351. For example... Figure 6 As shown, since the angle between the flange 44 and the normal to the substrate surface is 90°, and the pipe that mounts the flange 44 is radially along the cavity 23, by adjusting the angle between each adjacent skeleton 351, 352, 353, the arrangement direction of multiple alkali metal strips on the alkali metal source 10 can be made parallel to the substrate (e.g., in the horizontal direction).

[0064] The linear actuator 51 is connected to the polygonal bracket 35, and the linear actuator 51 can drive the polygonal bracket 35 to move. Figure 6 As shown, driven by the linear actuator 51, the first frame 351 and the second frame 353 can move in the left-right direction as shown in the figure. This allows the multiple alkali metal strips on the first frame 351 to be sequentially aligned with the center of the substrate for evaporation deposition, thereby further ensuring uniform film formation.

[0065] Furthermore, in the above embodiments 1 to 3, it was described that the skeletons 301 to 303, 311 to 314, 321 to 323, 341 to 342, and 351 to 353 are straight skeletons, but they are not limited to this. The skeletons can also be shapes other than straight lines, such as curves, as long as the alkali metal source is directly facing the substrate or the angle between the source and the substrate surface normal is within a predetermined range that satisfies the film formation conditions, and the distance between the alkali metal source and the substrate is also within a predetermined range that satisfies the film formation conditions.

[0066] In summary, according to the alkali metal source evaporation apparatus of this disclosure, by setting a zigzag-shaped support between the alkali metal source and the flange, the angle between the alkali metal source and the normal to the substrate surface can be kept within a predetermined angle range, the distance between the alkali metal source and the substrate can be adjusted, the requirements for the position of the mounting flange can be reduced, the spacing between the alkali metal source and the substrate can be optimized to meet the evaporation conditions, and the uniformity of the evaporated film can be improved.

[0067] It should be understood that the above description is illustrative and not restrictive. For example, the above embodiments (and / or aspects thereof) can be used in combination with each other. Furthermore, many modifications can be made to adapt particular situations or materials to the teachings of the various embodiments of this disclosure without departing from the scope of this disclosure. While the dimensions and types of materials described herein are used to define parameters of the various embodiments of this disclosure, the embodiments are not intended to be restrictive but are exemplary. Many other embodiments will become apparent to those skilled in the art upon reading the above description. Therefore, the scope of the various embodiments of this disclosure should be determined by reference to the appended claims and the full scope of their equivalents.

Claims

1. An alkali metal source evaporation apparatus, characterized in that, include: Alkali metal source; A cavity with a substrate mounted; as well as A zigzag-shaped bracket with the alkali metal source at one end and the other end fixed to the cavity. The zigzag-shaped bracket includes: A first framework supporting the alkali metal source; as well as A second skeleton connecting the first skeleton and the cavity.

2. The alkali metal source evaporation apparatus as described in claim 1, characterized in that, The second skeleton has multiple segments.

3. The alkali metal source evaporation apparatus as described in claim 1 or 2, characterized in that, Each segment of the first skeleton and the second skeleton is straight.

4. The alkali metal source evaporation apparatus as described in claim 1 or 2, characterized in that, The zigzag bracket is fixed to the cavity via a flange. The flange is connected to a power supply device that supplies power to the alkali metal source.

5. The alkali metal source evaporation apparatus as described in claim 1 or 2, characterized in that, The adjacent frames in the zigzag bracket are fixed together by connectors or integrally formed.

6. The alkali metal source evaporation apparatus as described in claim 3, characterized in that, The included angle between adjacent skeletons is set such that the alkali metal source is facing the surface of the substrate or the included angle between the alkali metal source and the surface normal of the substrate is within a predetermined range.

7. The alkali metal source evaporation apparatus as described in claim 6, characterized in that, The included angle between adjacent skeletons is set such that the distance between the alkali metal source and the substrate is within a predetermined range.

8. The alkali metal source evaporation apparatus as described in claim 6, characterized in that, The included angle between adjacent skeletons is 120° or more.

9. The alkali metal source evaporation apparatus as described in claim 3, characterized in that, It also includes a second alkali metal source positioned opposite the substrate. The included angle between adjacent skeletons is set such that the alkali metal source is positioned close to the second alkali metal source.

10. The alkali metal source evaporation apparatus as described in claim 1 or 2, characterized in that, The alkali metal source comprises multiple alkali metal strips arranged side by side.

11. The alkali metal source evaporation apparatus as described in claim 4, characterized in that, It also includes a linear drive connected to the flange. When the angle between the flange and the normal to the substrate surface is 90°, the alkali metal source is moved by the linear actuator.

12. An alkali metal source support for mounting an alkali metal source to an alkali metal source evaporation device, characterized in that, include: A first framework supporting the alkali metal source; as well as A second frame is connected between the first frame and the cavity of the alkali metal source evaporation device. The first frame and the second frame together form a zigzag-shaped support.

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